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Label-free biosensing using a microring
resonator integrated with poly-
(dimethylsiloxane) microfluidic channels
Cite as: Rev. Sci. Instrum. 90, 035004 (2019); https://doi.org/10.1063/1.5074134
Submitted: 22 October 2018 . Accepted: 08 March 2019 . Published Online: 28 March 2019

Shangquan Wu, Yingying Guo, Wanjun Wang, Jie Zhou, and Qingchuan Zhang

Rev. Sci. Instrum. 90, 035004 (2019); https://doi.org/10.1063/1.5074134 90, 035004

© 2019 Author(s).
Review of ARTICLE scitation.org/journal/rsi
Scientific Instruments

Label-free biosensing using a microring resonator


integrated with poly-(dimethylsiloxane)
microfluidic channels
Cite as: Rev. Sci. Instrum. 90, 035004 (2019); doi: 10.1063/1.5074134
Submitted: 22 October 2018 • Accepted: 8 March 2019 •
Published Online: 28 March 2019

Shangquan Wu,1 Yingying Guo,1 Wanjun Wang,2 Jie Zhou,2 and Qingchuan Zhang1,a)

AFFILIATIONS
1
CAS Key Laboratory of Mechanical Behavior and Design of Material, Department of Modern Mechanics,
University of Science and Technology of China, Hefei 230027, China
2
China Electronics Technology Group Corporation No. 38 Research Institute, Anhui 230001, China

a)
Author to whom correspondence should be addressed: zhangqc@ustc.edu.cn. Telephone: +86-551-63607613.
Fax: +86-551-63601248.

ABSTRACT
Microring resonators have shown promising potential for highly sensitive, label-free, real-time detection of biomolecules. Accurate quan-
titative detection of target molecules through use of photonic integrated circuits has been demonstrated for environmental monitoring
and medical diagnostics. Here, we described the design, fabrication, and characterization of a highly sensitive, label-free microring opti-
cal resonator integrated with poly-(dimethylsiloxane) microfluidic channels, which consumes only 30 µl of sample solution. The resonance
wavelength shifts resulting from the change in the effective refraction index can be measured in situ, and thus the binding events on the res-
onator surface, including antibody immobilization, blocking of the resonator surface, and the specific binding of antibody and antigen, can be
recorded throughout the entire experimental process in real time. We measured the binding events for the detection of human immunoglob-
ulin G. The system had a detection limit of 0.5 µg/ml, a value substantially (14 times) lower than that of a previously reported microring
resonator. To verify the usefulness and adaptability of this technique, human epidermal growth factor receptor 2 was used for the detection.
The microring optical resonator was able to monitor reactions between biological molecules in real time and thus can be used in quantitative
detection and biological sensing with little sample consumption.
Published under license by AIP Publishing. https://doi.org/10.1063/1.5074134

I. INTRODUCTION semiconductor (CMOS) fabrication technology,15,16 as well as the


substantial experimental cost reduction associated with the use of
Biochemical sensors are powerful detection and analysis tools electronics fabrication facilities.17–19 Silicon microring resonators
with diverse applications in biomedical research, environmental can be integrated with microfluidic technology, thus providing a
monitoring, and health care.1,2 According to the different output relatively stable liquid environment. Using advanced fluid handling
physical signals, biochemical sensors can be grouped into func- techniques for photonic devices at or below the micrometer scale has
tional types such as optical biosensors (including microring biosen- the potential to provide compact, effective sensors for lab-on-a-chip
sors3–5 ), electrochemical biosensors,6,7 and mechanical biosensors tools.
(microcantilever sensors8–10 ). Among these sensors, the silicon Microring resonators take advantage of the highly sensitive
microring resonator, a highly sensitive, label-free, real time, rapid evanescent field generated near silicon-on-insulator (SOI) photonic
response, and efficient optical sensor,11–14 has become one of the waveguides, owing to a contrast in RI between core silicon and
most promising photonic integration platforms. Its promise can be silicon dioxide.20–23 The evanescent field is a type of electromag-
mainly attributed to the combination of a high contrast in refrac- netic wave produced at the boundary of two different media. Its
tive index (RI) and the availability of complementary metal oxide amplitude decays exponentially with increasing vertical dimension

Rev. Sci. Instrum. 90, 035004 (2019); doi: 10.1063/1.5074134 90, 035004-1
Published under license by AIP Publishing
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to the boundary. Biorecognition molecules, such as antibodies and (APTES), glutaraldehyde (GAD) solution [25% (w/v) in water], and
aptamers, are immobilized on the resonator surface. When a solu- phosphate-buffered saline (PBS; 0.1M phosphate buffer containing
tion containing target analytes, such as specific antigens, flows over 0.9% sodium chloride, pH 7.5) were obtained from Sigma-Aldrich
the resonator surface, the binding of antigens to antibodies causes (St. Louis, MO, USA). Other chemicals were of analytical reagent
the effective RI to change, thus shifting the resonance wavelength. grade and were used as received.
The effective RI is related to the RI of the microring and the SOI resonator chips and microfluidic channels (30 µl), both
microring’s surroundings. Resonance occurs when the change in made in house, were used. A temperature control system was
the optical path length of the resonator is exactly a whole num- purchased from Shimax (MAC50, JP), and 24-well polystyrene
ber. Microring resonators can sense the effective RI changes induced microplates were purchased from Costar (Corning, NY, USA).
by analyte binding on the surface. By examining the shift in res-
onance wavelength, the binding of biomolecules to target-specific B. Resonator design, fabrication,
capture agents can be monitored. The resonance wavelength is and characterization
defined as
Figure 1 shows an SEM micrograph of the home-built SOI
λ = 2πRneff /m, (1) microring resonator with a radius of 20 µm used in the experiment.
where m is an integer (m = 1, 2, 3 . . .), λ is the wavelength of light, R The circular section is the microring waveguide, and the structure
is the radius of the microring, and neff is the effective RI. beside the ring is the straight waveguide. In this work, microring
Human immunoglobulin G (IgG), the most abundant resonators were fabricated on a SiO2 substrate (RI: 1.44) with a Si
immunoglobulin in serum, plays an important role in the immune core layer (RI: 3.45). Owing to the large RI difference between Si and
response.24 Many analytical methods are currently available to SiO2 , most optical fields were restricted in the higher index Si waveg-
detect IgG, including enzyme-linked immunosorbent assay (ELISA), uide. In order to achieve the high sensitivity, the most key design rule
and protein chip and fluorescein labeling methods. Fluores- is to improve the overlap between the optical mode and the analyte.
cein labeling and ELISA are sensitive and selective methods for Among the single microring resonator, one of the key parameter
detection.25 However, either target molecules or biorecognition is the thickness of the silicon waveguide; with thinner waveguide,
molecules must be fluorescently tagged, a process that is often dif- more optical modes will overlap with the analyte. If we use thinner
ficult, typically requiring extensive sample pretreatment or lengthy waveguide, we can get higher sensitivity. Based on sensitivity and
procedures, and may increase experimental cost. In contrast, micro-nano processing technology, we have chosen a microring of
microring resonators, allow for label-free detection of molecules in 20-µm radius, a silicon waveguide of 220 nm × 450 nm, and a gap of
their natural forms on the chip surface without the added complex- 160 nm between the straight waveguide and the ring.
ity of the forms on labels or enzymatic tags. Microring resonators The microring resonators were patterned by using standard
have the notable advantages of being label-free, being able to detect optical photolithography and formed by using reactive ion etching
multiple analytes in real time to provide in situ monitoring, and hav- (RIE).26 Our chips were fabricated at the Interuniversity Micro-
ing lower analytical costs. Thus, this method is relatively easy and electronics Centre (IMEC), where 150 nm line or gap can be pro-
inexpensive to perform. cessed. The fabrication was started by spin-coating approximately
Here, we demonstrate the design, fabrication, and characteriza-
tion of a highly sensitive, label-free microring optical resonator, inte-
grated with poly-(dimethylsiloxane) (PDMS) microfluidic channels,
which consumes only 30 µl of the sample solution. Using different
concentrations of ethanol solutions with known refractive indices,
we determined the RI detection sensitivity and the detection limit
(DL). We demonstrated the label-free, quantitative detection of IgG
by using a microring resonator and measured the resonance wave-
length shift resulting from the effective RI changes caused by the
specific binding between antibodies and antigens. Furthermore, the
binding events on the resonator surface, including antibody immo-
bilization, blocking of the resonator surface, and specific binding of
antibody and antigen, were recorded during the entire experiment
in real time. To demonstrate the usefulness and adaptability of the
presented technique, we also demonstrated the label-free detection
of human epidermal growth factor receptor 2 (Her2).

II. MATERIAL AND METHODS


A. Materials and apparatus
FIG. 1. (a) A schematic illustration of the microfluidic channels system, exposing
IgG and goat anti-human IgG were purchased from San- the four layers of the microfluidic channel system (from bottom to top): the bottom
gon Biotech (Shanghai) Co., Ltd. Human Her2 protein and anti- base, the optical chip, the fluidic layer, and the top base. Illustration: SEM image
Her2 monoclonal antibody were purchased from Sino Biological, of a microring resonator and linear waveguide in the corner. (b) Photograph of the
PDMS microfluidic channel system.
Inc. Bovine serum albumin (BSA), 3-aminopropyltriethoxysilane

Rev. Sci. Instrum. 90, 035004 (2019); doi: 10.1063/1.5074134 90, 035004-2
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280–320 nm of photoresist on an SOI wafer, then drying for 90 s In addition, a high precision temperature controller was applied to
at 90 ○ C (microfabrication process sequence in Fig. S1). After con- adjust the experiment temperature. The control of the entire mea-
ventional photolithography, the pattern of the photoresist was trans- surement setup was automated by a computer (measurement setup
ferred to the SOI wafer through inductively-coupled plasma RIE. in Fig. S2). The polarization used is TM mode.
The photoresist was then removed, thus allowing the analyte to con-
tact the sensing waveguide surface. Finally, the resonator chip was E. Preparation of the microring
cleaned in a solution (1:1 H2 SO4 /30% H2 O2 ) for 10 min to remove
the protective photoresist coating and any residual organic contam- The surface of the sensor was modified with APTES and glu-
inants introduced from fabrication and then washed with copious taraldehyde before being integrated with the microfluidic channels.
amounts of deionized water. The chip was first cleaned in piranha dip (3:1 H2 SO4 /30% H2 O2 ) for
approximately 10 min (with stirring) to remove the protective pho-
toresist coating and any residual organic contaminants introduced
C. Fabrication of the microfluidic channel system
from fabrication, and then it was washed with copious amounts of
In the process of detection, steady control of sample solutions deionized water and dried under nitrogen gas. To promote anti-
flowing through the chip surface is crucial. Microfluidic channels, body adhesion to the silicon surface, the chip surface was immersed
one of the most commonly used methods for the detection of tar- in a solution of 2.5% APTES (1:100 deionized water/ethanol) for
get molecules with little sample consumption, not only ensure the 2 h at 4 ○ C, then rinsed with ethanol and deionized water, and
activity of target and biorecognition molecules but also make the dried under nitrogen gas. The resonator chip was incubated with
modification of the chip more efficient. 5% glutaraldehyde (GAD) in deionized water for 1 h and rinsed
Owing to the high sensitivity of the microring, the output spec- with deionized water three times. Next, we integrated the chip with
trum is easily affected by external factors, such as vibration, temper- microfluidic channels as described in Sec. II C. The temperature con-
ature, and dust. Many materials are available with a broad range of trol of the microfluidic channels was 27 ± 0.01 ○ C, and the room
optical, mechanical, and chemical properties. Polymers have been temperature was controlled to 25 ± 0.1 ○ C. The functionalization
mostly used as substrate materials for microfluidic devices in recent procedures of the chip were performed in the microfluidic chan-
years.27,28 We designed the system of microfluidic channels inte- nels. PBS containing 100 µg/ml of anti-IgG monoclonal antibody
grated with a microring resonator, which prevented salt coales- was flowed through the microfluidic channels and over the resonator
cence on the chip surface, owing to liquid volatilization in an open surface at a rate of 4.2 ml/h for 10 min, and then the chip was incu-
environment. The microfluidic channels consumed only 30 µl of bated for 1.5 h to allow functionalization. A rinse with PBS was
sample solution, thus potentially allowing for substantially lower performed to remove any loosely bound antibody. The microflu-
experiment costs. idic channel was then filled with 5% solution (w/v) of BSA in PBS
We used two acrylic polymers for easy processing, poly- for 40 min for blocking. After these procedures, the functionalized
(methylmethacrylate) (PMMA) and poly-(dimethylsiloxane) microring was washed with PBS and was then ready to use, as shown
(PDMS) to fabricate the microfluidic channels. PDMS is a type of in Fig. S3.
macromolecule organic silicon compound, which has good biocom-
patibility and is widely used in biological microelectromechanical
systems, as a gap filling agent or lubricant, and in contact lenses.29,30 III. RESULTS AND DISCUSSION
First, we placed the microring chip in the PMMA base. Then, A. Stability of resonance wavelength shift
the precise PDMS microfluidic channels were aligned, and another
The stability of the signal when no biomolecular interaction
PMMA base was deposited to produce a seal. Simultaneously, inlet
takes place on the chip surface is crucial for a low detection limit.
and outlet holes above the base were made to form solution chan-
To determine whether the microfluidic channels system was able to
nels. As shown in Fig. 1, the base encapsulated the surface of the
measure wavelength shifts with high signal stability, we monitored
chip, thus not only protecting the chip but also forming the solution
the real time resonance wavelength shift in an open liquid environ-
channels.
ment and microfluidic channels by using the same chip [Fig. 2(a)]. In
an open liquid environment, the chip is placed on a glass slide or in
D. Measurement setup
a petri dish, and then 2 ml of liquid is added to cover the chip. In an
The resonator consisted of two parts: the integrated optical open liquid environment, the resonance wavelength shifted 110 pm
waveguide structure and the microfluidic channel system. Solutions in the short wavelength direction after 10 min in the buffer solution
were controlled by a peristaltic pump, which supplied a continu- [black line in Fig. 2(a)]. After the experiment, there was abundant
ous flow of solution through the microfluidic channels and output salt on the chip surface. One reason for this deviation may have
pipes, then to the waste solution bottle. We use the broadband light been salt precipitation during the process of water loss, thus chang-
source and optical spectrum analyzer to monitor the wavelength ing the effective RI constantly and causing a continued resonance
shift of the microring resonator sensor. Light from the broad band wavelength shift. In the microfluidic channel system, the continuous
light source was coupled into the waveguide of the resonator through liquid flow and small volatile area provided the chip with a stable
polarization-maintaining lens fibers. After a series of coupling oscil- buffer solution environment, and thus the resonance wavelength
lations, the output light was collected by a spectrometer through the was in the steady state [red line in Fig. 2(a)]. These findings indi-
output optical fiber. For the optical measurement system, a three- cated the stability of the microfluidic channels system, suggesting
dimensional adjustable high precision optical test platform was used that the microfluidic channels system was essential for the accuracy
to accurately adjust the input and output optical fibers and chip. of detection.

Rev. Sci. Instrum. 90, 035004 (2019); doi: 10.1063/1.5074134 90, 035004-3
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FIG. 2. Real time wavelength shifts of the microring caused by environmental factors. (a) Comparison between wavelength shifts obtained in PBS with or without microfluidic
channels. (b) Comparison between wavelength shifts obtained in ethanol with or without a temperature control device.

Temperature is another major contributor to unwanted in Table I. As we known, the most key performance is the sensitiv-
changes in effective RI in biochemical detection. We placed the chip ity. In order to achieve the high sensitivity, the most key design rule
in ethanol with or without a temperature control device. The reso- is to improve the overlap between the optical mode and the ana-
nance wavelength changed with changes in room temperature and lyte. The strip waveguide based on TE or TM is robust and reliable
shifted 30 pm in the long wavelength direction after 30 min with- for the fabrication and can achieve the 135 nm/RIU in a previous
out a temperature control device [Fig. 2(b)]. The wavelength was reported study. In this paper, the sensitivity is improved by the using
essentially in a stable state at a constant temperature of 25 ○ C. These of the TM mode. As we know, the TM mode has more overlaps
results suggested that temperature stability was also very important with the analyte than the TE mode, and so maybe that is why we
for the accuracy of detection. can achieve the higher sensitivity than the convention single micror-
ing sensor based on TE mode. Slot waveguide and sub wavelength
B. Refractive index sensing grating is also a very competitive solution and can push the sensi-
tivity to almost twice/three as compared to the strip waveguide. But
To demonstrate the microring sensing ability and to character-
they suffer from the problem that the minimum linewidth of slot
ize the RI sensitivity of the resonator, the resonator was calibrated
or subwavelength grating is challenge for the fabrication process.
by using different concentrations (0, 2, 4, 6, and 8M) of ethanol. Its
They need high resolution Lithography technology. It will intro-
resonant wavelength was measured when the ethanol solution was
duce extra cost in the fabrication. The detection limit (DL) was
flowed across the microring surface. The results showed a linear shift
defined as31
in the resonant wavelength with increasing ethanol concentration
σ
(Fig. S4). Higher ethanol concentrations with a larger RI caused a DL = , (2)
larger shift in the resonant wavelength. From the slope of the curve, RI sensitivity
we obtained an RI sensitivity of 140.15 nm/RI unit (RIU). There are where σ is the system noise which can be obtained from the sys-
many kinds of the silicon ring resonators and we summarize them tem filled with a blank solution. The DL reports the smallest RI

TABLE I. Comparison of the sensitivity of different microring resonator.

Sensitivity (nm/RIU) Reference

MRR based on strip waveguide working at TE 70 32


MRR based on ultra-thin strip waveguide working at TE 100 33
MRR based on strip waveguide working at TM 135 34
MRR based on the slot waveguide 298 35
MRR based on the sub wavelength grating 490 36
MRR based on strip waveguide working at TM 140 This work

Rev. Sci. Instrum. 90, 035004 (2019); doi: 10.1063/1.5074134 90, 035004-4
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FIG. 3. Real time resonance wavelength shifts of the microring resonator for antibody immobilization, blocking of the sensor surface, and the specific binding of antibody and
antigen. After each procedure, the functionalized microring was washed with PBS. 1 PBS, 2 anti-IgG, 3 BSA, 4 1 µg/ml IgG, or 5 5 µg/ml IgG.

change that can be measured. The resolution of the spectrometer net shift (10 pm) was much less than that of the microring with spe-
used in the experiment was 4 pm. From Fig. 2(b), we can get the cific binding on the surface (90 pm) and slightly greater than that of
system noise which is 8 pm. Thus, we determined the DL to be the microring in PBS (4 pm), as shown in Figs. 3 and 4. The results
5.708 × 10−5 RIU. again suggested that the measured wavelength shift of the micror-
ing was generated by the specific binding interaction between the
C. Real-time detection of human IgG anti-IgG antibody and IgG on the microring surface.
The density of biorecognition molecules on the chip surface
The resonance wavelength shifts resulting from effective RI
may affect the wavelength shift; thus, we compared the wavelength
changes can be measured in situ, and thus, the binding events on the
shifts on different chip surfaces for antibody immobilization and
resonator surface, including antibody immobilization, blocking of
blocking of the resonator surface under the same modified condi-
the resonator surface, and specific binding of antibody and antigen,
tions. The wavelength shifts were measured when the chip surface
can be recorded during an entire experiment in real time (Fig. 3). We
was successively covered with anti-IgG monoclonal antibody and
recorded the resonance wavelength every 30 s. The resonance wave-
length remained essentially unchanged in PBS and shifted 408 pm
after 1.5 h in the anti-IgG solution and then reached the steady
state. The spectra did not significantly change after a rinse with PBS,
thus suggesting that the antibody had been steadily immobilized on
the microring surface. The BSA coating buffer caused a net shift
of 132 pm after 40 min. After the baseline resonance wavelength
was stabilized in the PBS solution again, the human IgG solution
with a concentration of 1 µg/ml in PBS was flowed over the sur-
face. After the chip was rinsed with PBS, 5 µg/ml IgG solution was
circulated in the microfluidic channels. For both concentrations of
IgG, the effective RI changed when the antigen-antibody complex
formed on the chip surface. The shift signals for human IgG solu-
tions were 44 and 90 pm for 1 and 5 µg/ml IgG solution, respectively.
The curve did not show an obvious shift during a continual rinse
with PBS, thus indicating that the resonance wavelength shift was
caused by an RI change on the resonator surface due to the spe-
cific binding of antigen rather than to chemical molecules in the
liquid.
To further determine whether the measured wavelength shift FIG. 4. Real-time resonance wavelength shifts of the microring resonator for spe-
was induced by the specific binding on the microring surface, the cific binding of antigen and nonspecific binding of BSA. The pink area is the real
microring was flowed with the BSA solution at a high concentration time shift in resonance wave-length during specific binding. The blue area is the
real time shift in resonance wavelength during nonspecific binding. 1 PBS, 3
(5 mg/ml) after 5 µg/ml IgG (Fig. 4). Although the BSA concentra-
BSA, 5 5 µg/ml IgG.
tion was much higher than the antigen concentration, the measured

Rev. Sci. Instrum. 90, 035004 (2019); doi: 10.1063/1.5074134 90, 035004-5
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BSA solutions. As seen in Fig. S5, the wavelength shift in antibody


immobilization was approximately twice that in BSA blocking. One
reason for this deviation might be that anti-IgG flowed over the
chip earlier than BSA, thus affording the anti-IgG monoclonal anti-
body more opportunities to occupy positions on the chip surface.
Another reason may be that BSA has a smaller molecular weight
than anti-IgG. The wavelength shifts on different chip surfaces in the
same modified condition were nearly identical. These results thus
established a foundation for quantitative detection.

D. Quantitative detection of human IgG


To explore the quantitative detection capability of microrings,
solutions of human IgG with various concentrations were circulated
in the microfluidic channels after the baseline resonance wavelength
was stabilized in PBS. The resonance wavelength shifts were moni-
tored in situ for approximately 60 min for each concentration. The
real time monitoring of the resonance wavelength in response to var-
ious concentrations of human IgG is shown in Fig. 5. Different new FIG. 6. Representative binding curve for Her2 and PBS to an anti-Her2 modified
sensors were used in each experiment. The measured values showed microring resonator. The solid lines indicate the functions fit to the initial binding
jumps attributed to the resolution of the spectrometer used in the response.
experiment (4 pm). The shift signals were 12, 52, 64, and 88 pm
for 0.5, 2.5, 5, and 10 µg/ml human IgG solutions, respectively.
These results indicated that the specific binding between the anti- receptor 2 (Her2), an important breast cancer biomarker, was devel-
IgG antibody and IgG appeared to cause the resonance wavelength oped through the same procedure described above for IgG. Over-
shift. In addition, with increasing of antigen concentration, the shift expression of Her2 protein occurs in approximately 25% of human
increased. The results demonstrated that the microring based on breast cancers and leads to a particularly aggressive disease.31 The
the evanescent field was sensitive enough to detect IgG (7.23–16.85 shift signals were 96 and 125 pm for 2.5 and 5 µg/ml human Her2
mg/ml in human serum) and to quantify the IgG. The developed sys- solutions, respectively (Fig. 6). We verified that the use of our devel-
tem had a detection limit of 0.5 µg/ml, 14 times lower than the detec- oped system was able to sensitively detect Her2 at a concentra-
tion limit (7.1 µg/ml) of a previously reported microring resonator tion as low as 2.5 µg/ml, a value comparable to the detection limit
for IgG detection.37 (5.0 µg/ml) of a previously reported microring resonator for Her2
To verify that this technique was applicable to other ana- detection.31 The high sensitivity of the sensing system for both IgG
lytes, a microring resonator for human epidermal growth factor and Her2 may be mainly attributed to microfluidic channels, which
provide a relatively stable liquid environment, and also to optical
waveguide structure of the sensor. As we know, the TM mode have
more overlap with the analytes than the TE mode, so maybe that
is why we can achieve higher sensitivity than the convention sin-
gle microring sensor based on TE mode. For the single microring
resonator, one of the key parameter is the thickness of the silicon
waveguide so that the thinner the waveguide, the more optical mode
will overlap with the analytes. We get a higher sensitivity based
the 220 nm × 450 nm waveguide. On the basis of these findings,
our developed system composed of a microring optical resonator
and PDMS microfluidic channels can be used for target molecule
detection, providing the advantage of high sensitivity, label-free,
quantitative, rapid, and real time detection.

IV. CONCLUSION
We demonstrated the design, fabrication, and characteriza-
tion of a highly sensitive and label-free microring optical resonator,
integrated with PDMS microfluidic channels, which avoided salt
coalescence on the chip surface resulting from volatilization in
an open environment, and required only 30 µl of sample solu-
tion. The microfluidic channels significantly decreased the exper-
FIG. 5. Real time wavelength shifts in the microring resonator after injection of imental cost. The RI detection sensitivity was determined to be
different concentrations of IgG solutions.
140.15 nm/RIU, and the RI detection limit was determined to be

Rev. Sci. Instrum. 90, 035004 (2019); doi: 10.1063/1.5074134 90, 035004-6
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Rev. Sci. Instrum. 90, 035004 (2019); doi: 10.1063/1.5074134 90, 035004-7
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