Patents

CN101358992A

Quadrature ring-type piezoelectric accelerometer

Abstract
CN101358992A
The present invention provides a piezoelectric accelerometer.
China
The sensitive components are arranged axisymmetrically; the
piezoelectric accelerometer comprises four flexible arms, a
quality block and a base; the flexible arms are folded and shaped Download PDF
like a ring or an arc; any two of the flexible arms are arranged Find Prior Art
Similar
opposite to the other two so as to form an orthogonal annular
symmetric structure which connects the quality block and the
Other languages: Chinese
base; and the flexible arms are made of piezoelectric material or
the piezoelectric sheets are symmetrically pasted on the flexible Inventor: 李朝晖, 喻飞雄
arms. The accelerometer can perform the three-axis Current Assignee
: Peking University
measurement, and because of the structural symmetry, when the
axial acceleration is measured, the response of the transverse
acceleration can be reduced; when the transverse acceleration is Worldwide applications
measured, the response of the axial acceleration can be reduced; 2008

CN
therefore, the interference between the channels is inhibited to
the lowest degree. The three-way accelerometer has the
Application CN 200810222531 events
characteristics of high sensitivity, small transverse interference
and simple manufacturing process, and can be used in the
industrial production, the scientific research and the national 2008-09-19 Application filed by
defense field. Peking University

2008-09-19 Priority to CN
200810222531

2009-02-04 Publication of
CN101358992A

2010-03-17 Application granted

2010-03-17 Publication of
CN100594384C

Status Expired - Fee Related

2028-09-19 Anticipated expiration

Info: Patent citations (2), Cited by (5),

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and Related Applications

External links: Espacenet, Global

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Claims (9)

1. piezoelectric accelerometer, comprise sensing unit, contact conductor, pre-amplification circuit, outer casing base,
shell and output cable, it is characterized in that: described sensing unit is axisymmetric, it comprises four elastic
arms, mass and a pedestal again, elastic arm is ring shape or arc, four elastic arms constitute an orthogonal ring
symmetrical structure in twos relatively mass and pedestal are coupled together, and piezoelectric patches is made
or be pasted with symmetrically to described elastic arm itself thereon by piezoelectric.

2. accelerometer as claimed in claim 1 is characterized in that: described elastic arm is a semi-round ring
shape.

3. accelerometer as claimed in claim 1 is characterized in that: the orthogonal ring symmetrical structure that
described elastic arm constitutes is positioned on the pedestal, and mass is positioned at the outside or the
inboard of the orthogonal ring symmetrical structure other end.

4. accelerometer as claimed in claim 1 is characterized in that: described elastic arm is made by metal
material, is pasted with piezoelectric patches symmetrically at the inside surface and/or the outside surface of
elastic arm.

5. accelerometer as claimed in claim 4 is characterized in that: the inside surface of each elastic arm and
outside surface all are pasted with a slice piezoelectric patches, the piezoelectric patches homophase or the
anti-phase stickup in the elastic arm inboard and the outside.

6. accelerometer as claimed in claim 4 is characterized in that: described metal material is brass, stainless
steel or aluminium alloy.

7. accelerometer as claimed in claim 1 is characterized in that: the piezoelectric that this accelerometer
adopts is polyvinylidene fluoride, piezoceramic material or relaxor ferroelectric monocrystal material.

8. accelerometer as claimed in claim 7 is characterized in that: described piezoceramic material is PZT.

9. accelerometer as claimed in claim 7 is characterized in that: described relaxor ferroelectric monocrystal

material is PMN-PT or PZN-PT.

Description

Quadrature ring-type piezoelectric accelerometer

Technical field

The invention belongs to sensor and transducer technology field, be specifically related to a kind of
piezoelectric accelerometer.

Background technology

Sensor technology is the cutting edge technology of modern science and technology, be one of three big pillars
of modern information technologies, the height of its level is one of important symbol of weighing a national
science and technology development level, and accelerometer is widely used in Aero-Space, auto industry,
robotization control, robot, biomedicine and military field as a kind of sensor.

Accelerometer comes branch can be divided into piezoelectric type, condenser type, moving-coil type, pressure
resistance type, tunnel type, rock formula, force balance type, resonant mode, optical fiber, temperature effect
uniform acceleration by the sensitive material of sensing; Direction by induction can be divided into single-axis
accelerometer and multiaxis accelerometer.
Although the kind of accelerometer is a lot, piezoelectric accelerometer at present still in the highest flight.The
ultimate principle of piezoelectric accelerometer is a Newtonian mechanics, mainly is the piezoelectric effect
of having utilized piezoelectric, and its feature is: high Q value, low resistance, high output impedance,
temperature range are wide.So-called piezoelectric effect is meant when some crystal being subjected to the
external force effect deformation takes place, and electric charge can occur on its some surface.The sensing
unit of piezoelectric accelerometer is by flexible member quality of connection piece on pedestal, flexible
member is made of piezoelectric or thereon with piezoelectric, when the acceleration in the external world acts
on the pedestal, mass can be subjected to the effect of inertial force, and the corresponding vibration of
generation, deformation can take place in flexible member under the effect of mass, also can make
piezoelectric generation deformation simultaneously, and piezoelectric produces voltage because of
piezoelectric effect.Piezoelectric ceramics is present main piezoelectric, but fragility is very big, PVDF
(polyvinylidene fluoride, Polyvinylidene Fluoride) be a kind of have suppress electrical novel piezoelectric, and
crooked easily, be the good material of making sensor.

The structure of piezoelectric accelerometer commonly used has following three types substantially:
compression, shearing and bending-type.The compression accelerometer is at present more common a kind
of, wherein the sensing unit structure of positive-pressure type single shaft piezoelectric accelerometer
comprises pedestal 13, mass 11 and the piezoelectric patches 12 that is connected them as shown in Figure
1, and such arrangements of accelerometers is simple, assembling is simple, but sensitivity is low.The sensing
unit of shearing accelerometer as shown in Figure 2, comprise column pedestal 23, tubular piezoelectric
patches 22 and tubular mass 21, this accelerometer longitudinal sensitivity is higher, and cross sensitivity is
little, and can reduce the influence of pedestal strain, miniaturization easily, very high natural frequency is
arranged, so the wide ranges of frequency response is suitable for measuring the high-frequency vibration, but
assembling is difficulty relatively, and success ratio is low.The sensing unit of bending-type piezoelectric
accelerometer comprises pedestal 33, contains crooked disk or the bent beam 32 and the mass 31 of
piezoelectric patches as shown in Figure 3, and its natural reonant frequency is low, and is highly sensitive, is
applicable to low frequency measurement, and shortcoming is that volume is big, and physical strength is
relatively poor.Other structure accelerometer also all based on these three kinds of fundamental types, belongs
to a kind of of bending-type as quadrature beam type accelerometer (see figure 4), and quadrature beam 42
contains piezoelectric patches, and its four end places on the pedestal 43, and mass 41 places the quadrature
beam in the heart.

Piezoelectric accelerometer on the present market mostly is single shaft and two axis accelerometers, three
axis accelerometer is generally combined by a twin-axis accelerometer and a single-axis accelerometer,
volume is bigger, and owing to structural asymmetry reason, laterally disturbs also bigger.

Summary of the invention

The objective of the invention is to overcome conventional accelerometer and generally can only measure
unidirectional acceleration, and laterally disturb big defective, a kind of measurement that can realize 3-axis
acceleration is provided, and highly sensitive, laterally disturb little piezoelectric accelerometer.

Technical scheme of the present invention is as follows:

A kind of piezoelectric accelerometer, comprise sensing unit, contact conductor, pre-amplification circuit, outer
casing base, shell and output cable, wherein sensing unit is axisymmetric, it comprises four elastic arms, mass
and a pedestal again, elastic arm is ring shape (shape is as " く ") or arc, four elastic arms constitute an
orthogonal ring symmetrical structure in twos relatively mass and pedestal are coupled together, and
piezoelectric patches is made or be pasted with symmetrically to described elastic arm itself thereon by
piezoelectric.
The orthogonal ring symmetrical structure that above-mentioned elastic arm constitutes is positioned on the
pedestal, and mass can be positioned at the outside or the inboard of the orthogonal ring symmetrical
structure other end.

Above-mentioned elastic arm can adopt metal material (for example brass, stainless steel, aluminium alloy) to
make, and pastes piezoelectric patches at the inside surface and/or the outside surface of elastic arm
symmetrically then; It also can be the whole crooked piezoelectric patches of making by piezoelectric own.

The piezoelectric that the present invention uses can be PVDF, also can be piezoceramic material (for example
PZT) or relaxor ferroelectric monocrystal material (PMN-PT for example, PZN-PT).

When elastic arm itself was made of the piezoelectric patches of bending, axial acceleration was obtained by
the voltage addition on four elastic arms, and transverse acceleration is subtracted each other by the voltage
on two relative elastic arms and obtained.

When the inside and outside surface at the metallic elastic arm all was pasted with piezoelectric patches
symmetrically, the acceleration of three directions can carry out plus and minus calculation by the different
phase relation of response voltage in 8 piezoelectric patches and obtain.If the piezoelectric patches of the
inside and outside both sides of elastic arm is that anti-phase stickup is (referring to Fig. 5, Fig. 6), be that the
side that piezoelectric patches and elastic arm are pasted is "-" utmost point, and opposite side is "+" utmost
point, then inside and outside piezoelectric patches shared "-" utmost point, at this moment, the acceleration of
vertical direction (being axial acceleration) makes the piezoelectric patches in the outside be stretched and
inboard piezoelectric patches is compressed, perhaps opposite, thereby can in the piezoelectric patches of
elastic arm medial and lateral, produce the voltage of same phase, output can be obtained by the outside
voltage and the summation of inboard voltage of whole four elastic arms; For transverse acceleration, the
acceleration of horizontal x direction produces the opposite deformation of direction on two of the x direction
relative elastic arms, when promptly the elastic arm of a side is compressed by the equilibrium position, the
elastic arm of offside then is stretched by the equilibrium position, perhaps opposite, thereby the outside of
two elastic arms and the outside, the inboard and inboard voltage that produces opposite phase respectively,
at this moment, the acceleration responsive of x direction can be subtracted each other to sue for peace after
subtracting each other with outside voltage again and obtains by the inboard voltages of two elastic arms; The
acquisition of the acceleration responsive of y direction and x direction are similar.

If being homophases, pastes the piezoelectric patches of the inside and outside both sides of elastic arm,
summation obtained to four arms again after then axial acceleration was subtracted each other respectively by
the every arm of four elastic arms the voltages inboard and outside, and transverse acceleration is subtracted
each other by two inboard voltages of relative elastic arm and outside voltage subtracts each other and more
inside and outside summation obtained afterwards.

Advantage of the present invention and technique effect: existing accelerometer mostly is single shaft and
measures, and laterally disturb bigger, the elastic arm of piezoelectric accelerometer of the present invention
adopts the orthogonal ring structure, can carry out three-axis measurement, and because the symmetry of
structure, during the acceleration analysis of vertical direction, the response of transverse acceleration is cut;
During measured lateral acceleration, the acceleration responsive of vertical direction is cut, and therefore
interchannel interference is suppressed to minimum.The present invention preferably adopts piezoelectric
property better, and crooked easily PVDF material can change the three-dimensional accelerometer that the
structure and material parameter designing meets various frequency ranges and sensitivity as required as
transductive material.In a word, the three axial accelerometer that the present invention utilizes the quadrature
characteristics of resilient ring to constitute, have highly sensitive, laterally disturb little, the better simply
characteristics of manufacture craft, the three-way vibration that can be widely used in commercial production,
scientific research and national defence field is measured.
Description of drawings

Fig. 1 positive-pressure type single shaft piezoelectric accelerometer sensing unit structural representation is
among the figure: 11-mass, 12-piezoelectric patches, 13-pedestal.

The shearing single shaft piezoelectric accelerometer of Fig. 2 sensing unit structural representation is among
the figure: 21-mass (tube), 22-piezoelectric patches (tube), 23-pedestal.

Fig. 3 curve disk-type or crooked beam type single shaft piezoelectric accelerometer sensing unit structural
representation are among the figure: 21-mass, crooked disk of 22-or bent beam (containing piezoelectric
patches), 23-pedestal.

Fig. 4 quadrature beam type accelerometer sensitive cell schematics, wherein (a) is longitudinal sectional view,
is vertical view (b), among the figure: 41-mass, 42-quadrature beam (containing piezoelectric patches), 43-
pedestal.

The longitudinal sectional drawing of Fig. 5 embodiment of the invention accelerometer.

The sensing unit vertical view of Fig. 6 embodiment of the invention accelerometer.

Among Fig. 5 and Fig. 6: 51-mass, 52-elastic arm, 53-pedestal, 54-piezoelectric patches, 55-contact conductor,
56-outer casing base, 57-shell, 58-pre-amplification circuit, 59-output cable.

Embodiment

Below in conjunction with accompanying drawing, further describe the present invention by embodiment, but
the scope that does not limit the present invention in any way.

As shown in Figure 5, the sensing unit of this accelerometer is by a mass 51, four elastic arms 52, a pedestal
53 and eight piezoelectric patches 54 are formed, four elastic arms 52 constitute the orthogonal ring
symmetrical structure in twos relatively, and eight piezoelectric patches 54 stick on the inside and outside
surface of elastic arm (referring to Fig. 6) symmetrically.Piezoelectric patches 54 material therefors are PVDF,
and elastic arm 52 is the semicircular ring that processed by brass, and it is fixing to use epoxy resin to paste
between piezoelectric patches 54 and the elastic arm 52, and available in case of necessity small amount of
silver slurry makes and guarantees electric reliable connection between piezoelectric patches 54 and the
elastic arm 52; Use screw and epoxy resin coupling between elastic arm 52 and mass 51 and the pedestal 53
firmly.Contact conductor 55 uses the silver slurry to stick on the piezoelectric patches 54 earlier, fixes with
epoxide-resin glue then, and connection electrode goes between to the input end of pre-amplification circuit
58, and the output terminal of pre-amplification circuit 58 links to each other with output cable 59.Use bonding
agent that it is linked into an integrated entity between discoidal outer casing base 56 and the pedestal 53,
shell 57 is fixed on the outer casing base 56.

The calculating of acceleration:

Be respectively 1,2,3,4 if define four elastic arms, wherein, 1,2 is two relative elastic arms of x direction, and 3,4
is two relative elastic arms of y direction; Piezoelectric patches 1 mark in all elastic arms outside, inboard
piezoelectric patches 2 marks, then the outside piezoelectric patches voltage on four elastic arms can be
labeled as respectively:

V11，V21，V31，V41

Inboard piezoelectric patches voltage can be labeled as respectively:

V12，V22，V32，V42
So when inside and outside side piezoelectric patches is oppositely pasted (as shown in Figure 5), the
acceleration responsive of vertical direction (axially) can calculate by formula (1):

Vz＝V11+V12+V21+V22+V31+V32+V41+V42 (1)

The transverse acceleration response can be calculated by formula (2), (3):

X direction: Vx=V11-V21+V12-V22 (2)

Y direction: Vy=V31-V41+V32-V42 (3)

When inside and outside side piezoelectric patches was pasted in the same way, the acceleration responsive
of vertical direction (axially) can be calculated by formula (4):

Vz＝V11-V12+V21-V22+V31-V32+V41-V42 (4)

The transverse acceleration response can be calculated by formula (5), (6):

X direction: Vx=V11-V21-V12+V22 (5)

Y direction: Vy=V31-V41-V32+V42 (6)

Patent Citations (2)

Publication number Priority date Publication date Assignee Title

Family To Family Citations

US5524489A
* 1994-02-18 1996-06-11 Plan B Enterprises, Floating mass
Inc. accelerometer

DE4431232C2
* 1994-09-02 1999-07-08 Hahn Schickard Ges Integrable spring-mass
system

* Cited by examiner, † Cited by third party

Cited By (5)

Publication number Priority date Publication date Assignee Title

CN102175892A
* 2011-01-26 2011-09-07 边义祥 Multidimensional acceleration sensor
with cored piezoelectric rods and
acceleration measurement method

CN104655430A
* 2013-11-25 2015-05-27 中航商用 Cooling type vibration signal sensing
航空发动 device
机有限责
任公司

CN104698295A
* 2015-03-17 2015-06-10 中国科学 Method for dynamically measuring
院上海硅 high-temperature piezoelectric
coefficients of piezoelectric material
 酸盐研究
所

CN113447180A
* 2021-05-10 2021-09-28 中山大学 Torsion pendulum testing device
based on differential capacitor and
torsion pendulum decoupling reading
method

Family To Family Citations

TWI628439B
* 2016-12-28 2018-07-01 國立成功 Accelerometer and manufacturing
大學 method thereof

* Cited by examiner, † Cited by third party, ‡ Family to family citation

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Priority And Related Applications

Priority Applications (1)

Application Priority date Filing date Title

CN 200810222531 2008-09-19 2008-09-19 Orthogonal loop type piezoelectric accelerometer

Applications Claiming Priority (1)

Application Filing date Title

CN 200810222531 2008-09-19 Orthogonal loop type piezoelectric accelerometer

Legal Events

Date Code Title Description

2009-02-04 C06 Publication

2009-02-04 PB01 Publication

2009-04-01 C10 Entry into substantive examination

2009-04-01 SE01 Entry into force of request for substantive examination

2010-03-17 C14 Grant of patent or utility model

 2010-03-17 GR01 Patent grant

2016-11-09 CF01 Termination of patent right due to non-payment of annual fee Granted publication date:
20100317

Termination date: 20150919

2016-11-09 EXPY Termination of patent right or utility model

Concepts

machine-extracted Download Filter table

Name Image Sections Count Query match

material claims,abstract,description 13 0.000

PVDF binder claims,description 7 0.000

polyvinylidene fluoride claims,description 7 0.000

amplification claims,description 5 0.000

nucleic acid amplification method claims,description 5 0.000

conductor claims,description 4 0.000

Brass claims,description 3 0.000

brass claims,description 3 0.000

metal material claims,description 3 0.000

Al alloy claims,description 2 0.000

lead zirconate titanate claims,description 2 0.000

stainless steel alloy claims 1 0.000

acceleration abstract,description 28 0.000

sensitivity abstract,description 5 0.000

measurement abstract,description 4 0.000

manufacturing process abstract,description 3 0.000

industrial production abstract 1 0.000

Show all concepts from the description section

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