Measurement 187 (2022) 110159

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Measurement
journal homepage: www.elsevier.com/locate/measurement

Analysis and design of axial inductive displacement sensor

Wenyin Li, Jinghua Hu, Zhenzhong Su, Dong Wang *
National Key Laboratory of Science and Technology on Vessel Integrated Power System, Naval University of Engineering, Wuhan 430033, China

A R T I C L E I N F O A B S T R A C T

Keywords: An axial inductive displacement sensor, which can be fixed on radial direction to measure axial displacement of
Magnetic bearings the suspended rotor, is proposed in this paper. Based on Schwarz-Christoffel transformation, 3D inductance of the
Axial displacement inductive sensor proposed sensor is calculated. The novel approach for 3D inductance calculation is compared with 3D FEM
Schwarz-Christoffel transformation
results, showing the feasibility for practical applications. Static and dynamic characteristics are evaluated on a
Theory model
magnetic bearing platform. Sensitivity and linearity are 2.63 V/mm and 0.46%, respectively. Static noise result
shows that the proposed sensor can reach a resolution of 5 μm. Dynamic characteristics tests, including vibrating
and shocking experiments show that the displacement detection capability of the proposed sensor is similar to
that of an eddy current sensor, showing the potential of the proposed sensor used in other fields where eddy
current sensors have already be applied.

1. Introduction
Due to its merits of no lubrication, low power consumption, long life,
no pollution of oil, low vibrate and noiseless, magnetic bearings which
levitate a rotor by electromagnetic forces without mechanical contact
between the rotor and stator, have attracted more and more attentions
[1–3], and have been widely used in many industrial machines and
devices, such as high-speed suspension machine[3–5], space application
[6], flywheel energy storage[7,8], and other rotor systems[9–13]. To get
a stable electromagnetic levitation, the magnetic force is adjusted by the
displacement between the rotor and stator sensed by displacement
sensors. Therefore, as one of the most important components of the
magnetic bearing control system, the performance of displacement
detection has a great influence on the control accuracy of the rotor po­
sition[14].
Most of the optical and capacitive displacement sensors have certain
advantages in resolution and accuracy, but they are susceptible to dust,
oil, moisture, temperature, mechanical vibration, shock[15–17], and are
not suitable for magnetic bearings. With the merits of high sensitivity,
linear measurement range and good frequency response characteristics,
eddy current displacement sensors become one of the most popular
sensors used in magnetic bearings[3,18–20]. However, it is very sensi­
tive to the material under test, and what is more, the measuring system
of eddy current in magnetic bearings is too complex and expensive,
which limits the miniaturization and further applications of magnetic
bearings[21].
In order to prevent the problems of larger volume and higher cost
caused by displacement sensors in a magnetic bearing system, a self-
sensing technology, which uses the coil current to estimate the rotor
position instead of displacement sensors, has been proposed and attracts
more and more attentions[21–26]. This technology is cost reduction and
has better system integration. However, this method is commonly
model-based, and can be easily affected by system parameter variations,
resulting in low robustness[17].
The inductive displacement sensor possesses the attributes of low
maintenance, long life span, high sensitivity, low cost and insensitivity
to harsh environments[27–30]. And if the frequency response of the
inductive displacement sensor is properly compensated, it can reach to a
wider application prospect than the eddy current displacement sensor in
the high-precision AMBs system[31]. Therefore, it has been deeply
studied ever since it is proposed, such as inductive displacement
detection with bilateral sensing units[15], two-dimensional displace­
ment detection with inductive spiral coils[32,33], temperature
compensation[16], etc. And it has already been applied for conical iron
core position sensing[34], floating-wiper[30], absolute angular position
sensing[35], magnetic bearing displacement detection[31,36–38], etc.
Reference[36] presents an integrated displacement sensor structure
for magnetic systems, and reference[37] uses active low-pass filter and a
notch filter to eliminate disturbances, and reference[31] presents an
optimization method for design and analysis. While all these work are
done for radial displacement detection in magnetic bearing systems. In
reference [38], a novel measuring method for rotor axial displacement is

* Corresponding author.
E-mail address: wangdongl@vip.sina.com (D. Wang).

https://doi.org/10.1016/j.measurement.2021.110159
Received 8 June 2021; Received in revised form 6 September 2021; Accepted 9 September 2021
Available online 23 September 2021
0263-2241/© 2021 Elsevier Ltd. All rights reserved.
W. Li et al.
Fig. 1. Basic structure of the proposed sensor.
Fig. 2. 3D structure of the inductance in the proposed sensor.
present. In this sensor, with the help of an E type magnetic core, the
changes of rotor axial displacement is transferred into the change of
mutual inductance, and the inductive voltage of secondary winding of
the sensor will change as mutual inductance change. However, the in­
ductances of secondary windings share part of the magnetic circuit,
which is easy to cause mutual interference. And the E type core is a three
layer structure, which is not conducive to axial size reduction.
In this paper, an axial displacement sensor for magnetic bearing is
present. The proposed sensor can be fixed on radial direction to measure
axial displacement of the suspended rotor, showing the potential to
integrate with a radial inductive sensor. Different from the structure in
reference[38], the proposed sensor is a two layer structure, and each
exciting winding is winded around each side of the magnetic core,
separately, reducing the mutual interference between each inductance.
For structure design, as far as I am concerned, most design are based
2
Measurement 187 (2022) 110159
on finite element method (FEM), which will consume much computing
time, especially for 3D models, and also, the 3D FEM model is usually
complex. To reduce the computing time and model complexity, theory
model of 3D inductance is built. And the theory calculation results have
been compared to 3D FEM results, the error is always less than 4%,
indicating that the theory model can be used to guide practical
applications.
Highlights of this paper can be expressed as:
1. This paper proposes an novel axial inductive sensor, which can be
fixed on radial direction to measure axial displacement of the suspended
rotor, showing the potential to integrate with a radial inductive sensor,
and reducing the installation space of the axial displacement sensor,
further.
2. This paper builds theory model of 3D inductance, whose error is
less than 4% compared with FEM results, and the experiment sensitivity
of the proposed sensor shows great agreement with theory result, indi­
cating that the theory analysis could be used in 3D inductance calcula­
tion instead of FEM method to reduce computation time and model
complexity.
3. The axial sensor proposed in this paper is only sensitive to axial
displacement, therefore, it can be used for axial displacement detection,
alone. And displacement detection capability of the proposed sensor is
similar to that of an eddy current sensor, showing the potential to be
used in other fields where eddy current sensors have already be applied.
This paper is organized as follow. Following section I, section II in­
troduces the basic structure of the proposed sensor. Section III presents
calculation of 3D inductance. Section IV describes displacement detec­
tion principle of the proposed sensor, and a series of experiments are
carried out to test the sensor performance in Section V. At last, con­
clusions are summarized and discussed.
2. Basic structure of the proposed sensor
The axial inductive displacement sensor studied in this paper is a
kind of self-inductance sensor. The structure is composed of stator core,
coil and armature, as shown in Fig. 1. The sensor is consisted of 8 in­
ductances, namely, L1 ~ L8. These inductances are placed circum­
ferentially along z direction. When the armature moves along axial
direction (z direction), the effective overlap area of each inductance
changes. Therefore, the magnetic resistance changes, resulting in vari­
ations of inductance. Then, armature displacement along axial direction
can be determined by detecting the change of the inductance.
Usually, the structure of inductive sensors is designed with the help
of 2D finite element method, which is accurate and convenient, espe­
cially for radial sensors [31,39]. While, for the sensor proposed in this
paper, it is difficult to convert the structure to 2D FEM model. And, 3D
FEM simulation is complex in model building and time consuming in
simulating process, which is not convenient for axial sensor structure
design. Therefore, a more convenient method for 3D inductance analysis
and design is needed, and the calculation process is expressed in the next
part.
3. Calculation of 3D inductance
In this part, a method for calculating 3D inductance using Schwarz-
Christoffel transformation is described, and the calculation process is
based on reference [40]. The calculation result is established through
comparisons with results of finite element method.
For the proposed sensor, 3D structure of the inductance is shown in
Fig. 2. Fig. 2(a) shows the 3D structure of the inductance, Fig. 2(b) shows
the cross section view in yoz plane, and Fig. 2(c) shows the cross section
view in xoy plane. Parameters in the figures are described as follows: a
and b are the un-overlap widths on the left and right hand, respectively,
w is the overlap width, h1 is the height of teeth, h2 is the height of
armature, l is the width of the teeth and g is the air gap between teeth
and armature.
W. Li et al. Measurement 187 (2022) 110159

Fig. 3. Inductance calculation method of the structure in yoz plane. (a) basic
structure in yoz plane, (b) left half of the structure, (c) right half of the struc­
ture, (d) reluctance relationship between each figure.

For the structure in Fig. 2(b), the geometry can be separated into two
parts, as shown in Fig. 3. And the Schwarz-Christoffel transformations
can be used to calculate the air reluctance of each part.
For the structure in Fig. 3(b), the calculation step are given as follow.
Firstly, transforming the basic geometry in Fig. 4(a) to the real axis in t
plan. Secondly, transforming the real axis in t plane to a geometry of
parallel capacitor in Fig. 4(c) is further derived.
Table 1 gives vertex coordinates of the polygon in z-plane, the vertex
angles, and the corresponding points on the real axis in t-plane.
For the situation in Fig. 4, the transformation from the real axis of the
t-plane to the polygon boundary in the z-plane can be derived by the
following equation
− π
dz
(1)
π 2
= S(t − 0)− π (t − 1)− π
dt
then
√̅̅̅̅̅̅̅̅̅̅ √̅̅̅̅̅̅̅̅̅̅
z(t) = − jS[2ln(1 + 1 − t) − lnt − 2 1 − t] + C (2)

where S and C are constant, which will be further determined. Fig. 4. The Schwarz-Christoffel transformation of a basic geometry.
Based on the two following boundary conditions,
{
z(t = 1) = 0 Table 1
(3)
z(t→0) = ∞ Corresponding point in t-plane.

S and C are determined. z-plane t-plane Angle(◦ )

⎧ -∞-jg − ∞ 0
⎨C =0 +∞ 0 180
jg (4) 0 1 − 90
⎩S =
π +j∞ +∞ 0

Then, the transformation equation can be fully described as follow.

g √̅̅̅̅̅̅̅̅̅̅ √̅̅̅̅̅̅̅̅̅̅ plane.
z(t) = [2ln(1 + 1 − t) − lnt − 2 1 − t] (5) Similarly, the transformation from the real axis of the t-plane to a
π
geometry of a parallel-type capacitor as shown in v-plane can be derived
where g is the air gap between rotor and stator as shown in Fig. 2(c). by the following equation
Table 2 gives appropriate transformation between t-plane and v-

3
W. Li et al. Measurement 187 (2022) 110159

Table 2
Corresponding point in v-plane.
AMP voltage
t-plane v-plane Angle(◦ )
reference
− ∞ +∞ 0
oscillator
− 1 jV 0
0 -∞ 180
1 0 0
+∞ +∞ 0 B

4.50 A/B AMP

FEM results
theory results LPF
z
Inductance value (mH)

4.25 A
z
4.00
z sensor AD698

3.75 (a) Schematics of the designed circuit based on AD698

3.50
-1.0 -0.5 0.0 0.5 1.0
Armature offset along z direction (mm)
Fig. 5. Comparison of inductance between theory results and FEM results.

+Us L8
L1 L6 L3

U1 U2
L2 L5 L4 (b) Picture of the designed PCB circuit.
L7
-Us
Fig. 7. Schematics and picture of the designed circuit.
Fig. 6. Schematic diagram of detecting principle.

dv radial magnetic bearing

(6)
π
= T(t − 0)− π
dt axial eddy current sensor
then
v(t) = Tln(t) + D (7)

where T and D are constant, and will be further determined. armature

Based on the two following boundary conditions,
{
v(t = 1) = 0
(8)
v(t = − 1) = jV shaft

T and D are determined. radial eddy current sensor

{ axial inductive sensor
T = V/π
(9) axial magnetic bearing
D=0

Then, the transformation equation can be fully described as follow. Fig. 8. Schematic diagram of the test system.

V
v(t) = ln(t) (10) ⎧
π ⎪ 2V aπ
⎪
⎪ (B1 )v = ln( ) + jV
Based on the analysis above, points B1 to B4 in z-plane can be derived ⎪
⎪
⎪
⎪
π 2g
⎪
into v-plane as follow. ⎪
⎪
⎪ V πw
⎪
⎨ (B2 )v = − π [ 2g + 2(1 − ln2)] + jV
⎪
(11)
⎪
⎪ V πw
⎪
⎪ (B3 )v = − [ + 2(1 − ln2)]
⎪
⎪ π 2g
⎪
⎪
⎪
⎪
⎪
⎪ 2V πh2
⎪
⎩ (B4 )v = ln( )
π 2g

4
W. Li et al. Measurement 187 (2022) 110159

axial eddy current sensor 1.0

along x axis
axial inductive sensor along y axis
0.5 sensitivity along x axis: ~0mV/μm

output voltage (V)

sensitivity along y axis: ~0mV/μm

0.0
30
20
-0.5 10

mV
0
-10
-60 -40 -20 0 20 40 60
-1.0
-60 -40 -20 0 20 40 60
displacement along radial direction (μm)
Fig. 12. Sensitivities of the proposed sensor along radial direction.

stator

coil
armature

noise (mV)
Fig. 9. The experimental setup for the test on static characteristics.
~12mV

0.6
experiment results
theory results
Linear Fit of output voltage
0.3
output voltage (V)

2.63mV/μm time (s)

0.0
Fig. 13. Static noise of the proposed sensor.
2.74mV/μm
-0.3 Equation
Adj. R-Square
y = a + b*x
0.99993
Value Standard Error Table 3
performance of the proposed sensor.
output voltage Intercept 0.00333 0.00102
output voltage Slope 2.63 0.00787
-0.6 Measuring range(mm) Sensitivity(V/mm) Linearity(%) Resolution(μm)
-0.2 -0.1 0.0 0.1 0.2
− 0.2 ~ 0.2 2.63 0.46 4.5
displacement along axial direction (mm)
Fig. 10. Experiment and theory sensitivities of the proposed sensor.
400
inductive sensor
-3
eddy current sensor
4.0x10
axial displacement (μm)

200
-3
2.0x10
residuals (V)

0.0 0
Maximum residual point
-3 (0.05, -0.00483)
-2.0x10
-200
-3
-4.0x10

-6.0x10
-3 -400
-0.2 -0.1 0.0 0.1 0.2 0 0.5 1 1.5 2
time (s)
displacement along axial direction (mm)
Fig. 14. Vibrate response of the proposed sensor.
Fig. 11. The residual curve.

5
W. Li et al. Measurement 187 (2022) 110159

80 Then, based on the formula (9) to formula (12) in reference[40], the

inductive sensor reluctance of this 3D model can be expressed as
60 eddy current sensor
g
Rair =
axial displacement (μm)

shock μ0 [l + 4gπln(h2g1 π) + 4gπ (1 − ln2)][w + 2gπln(a2gπ) + 2gπln(b2gπ) + 4gπ (1 − ln2)]

40
(18)
20 Generally, the magnetic reluctance of air gap is much larger than that
of the core and armature, then the inductance in Fig. 2 can be expressed
0 as

-20 N2
L=
2Rair
-40 4g h1 π 4g 2g aπ 2g bπ 4g
0 0.2 0.4 0.6 0.8 1 μ0 N 2 [l + ln( ) + (1 − ln2)][w + ln( ) + ln( ) + (1 − ln2)]
π 2g π π 2g π 2g π
=
time (s) 2g
(19)
Fig. 15. Shock response of the proposed sensor.
where N is the coil turns.
For the structure designed in this paper, when the armature moves The novel approach for 3D inductance calculation has been
along z direction from − 1.0 mm to + 1.0 mm, a and h2 always meet the compared with 3D FEM results, as shown in Fig. 5. The FEM analysis
following condition. comparison used in this paper is developed based on Python, and core
reluctance is ignored in the FEM model. When the armature moves along
a < h2 (12)
z axis from − 1mm to 1 mm, the error between FEM results and theory
Then, for the geometry in Fig. 4(c), the capacitance per unit length calculation results is always less than 4%, showing the feasibility for
can be calculated as practical applications.

(B1 )v − (B2 )v
Cleft,yoz = ε 4. Displacement detection principle
V
(13)
w 2 aπ 2
= ε[ + ln( ) + (1 − ln2)] As shown in Fig. 1, the sensor is consisted of 8 inductances, namely,
2g π 2g π
L1 ~ L8. These inductances are placed circumferentially in two groups
where ε is dielectric constant. Therefore, the air gap reluctance of left along z direction, one group is made up of L1, L3, L5 and L7 as shown in
half structure in yoz plane (shown in Fig. 3(b)) can be derived as follow Fig. 1(b), and another group is made up of L2, L4, L6 and L8 as shown in
Fig. 1(c). Inductance L1, L2, L5 and L6 are placed along y direction, and
Rleft,air,yoz =
1
(14) they are connected to form a full bridge. Meanwhile, inductance L3, L4,
+ π2ln(a2gπ) + π2 (1 − ln2)] L7, L8 are placed along × direction and form another full bridge, as
w
μ0 [2g
shown in Fig. 6.
Similarly, for the right half of the structure in yoz plane (shown in
The input voltage of the bridge is set to ± Us, and output voltages are
Fig. 3(c)), the air gap reluctance can be expressed as
set to U1 and U2. When neglecting the resistance of the circuit, output
1 voltages can be obtained.
Rright,air,yoz = (15)
w
μ0 [2g + π2ln(b2gπ) + π2 (1 − ln2)] ⎧
⎪
⎪ L2 − L1 L5 − L6
⎨ U1 = (L + L − L + L )Us
⎪
Then, for the geometry in yoz plane (as shown in Fig. 2(b)), the air
(20)
2 1 5 6

gap reluctance can be derived as ⎪

⎪
⎪ U2 = ( L4 − L3 L7 − L8
⎩ − )Us
L4 + L3 L7 + L8
1
Rair,yoz = (16)
μ0 [wg + π2ln(a2gπ) + π2ln(b2gπ) + π4 (1 − ln2)] When the armature is in equilibrium position (dz = 0), all the in­
ductances of the sensor are equal, namely, L1 = L2 = L3 = L4 = L5 = L6 =
where μ0 is the permeability of vacuum. Other parameters are shown in L7 = L8 = L0, then the output voltages are
Fig. 2. {
Similarly, air gap reluctance in xoy plane can be expressed as follow U1 = 0
(21)
U2 = 0
1
Rair,xoy = (17) While, when the armature moves along z direction (dz = Δz), it will
μ0 [gl + π4ln(h2g1 π) + π4 (1 − ln2)]
lead to inductance variation.

Table 4
Comparison between the proposed sensor with other similar sensors.
Sensor schemes Linearity (%) Resolution (μm) Electrical contact to moving part Easy to integrate with magnetic bearing cost

planar spiral coil[28] 0.6 10.2 Yes No Low

Planar LVDT[41] 0.8 3 Yes No Low
Self-Inductance Displacement Sensor[31] 1.25 Not mentioned No No Low
Sensor With Bilateral Sensing Units[15] Not mentioned 1.2 Yes No Moderate
Eddy current sensors[42,43] 0.2(typical value) 10− 2 ~ 101 No No High
This work 0.46 5 No Yes Low

6
W. Li et al.
⎧
⎪
⎪ L1 = L3 = L5 = L7
⎪
⎪
⎪
⎪ μ N 2
4g h π 4g 2g a − Δz 2g b − Δz 4g
⎪
⎪ 1
⎪ = 0 [l + ln( ) + (1 − ln2)][(w + Δz) + ln(
⎨ π) + ln( π) + (1 − ln2)]
2g π 2g π π 2g π 2g π
⎪
⎪ L2 = L4 = L6 = L8
⎪
⎪
⎪
⎪ 2
⎪
⎪ μN 4g h1 π 4g 2g a + Δz 2g b + Δz 4g
⎪
⎩ = 0 [l + ln( ) + (1 − ln2)][(w − Δz) + ln( π) + ln( π) + (1 − ln2)]
2g π 2g π π 2g π 2g π
Then, output of the sensor changes. The relationship between Δz and
U1 can be obtained through numeral calculations, as well as the rela­
tionship between Δz and U2.
Therefore, displacement along z direction of the rotor can be ob­
tained by detecting the changes of U1 and U2. Meanwhile, it is available
to improve the axial displacement sensor through structure optimization
to complete more harsh distance detection for magnetic bearings.
In order to obtain the information of the rotor displacement, the
amplitude of output voltage U1 and U2 should be obtained. The AD698 is
a complete, monolithic Linear Variable Differential Transformer (LVDT)
signal conditioning subsystem, and can be used to convert transducer
mechanical position to dc voltage with a high degree of accuracy and
repeatability.
The measuring circuit in this paper is designed based on AD698, and
the excitation voltage is set to 13.6 V@19 kHz. The schematics and
picture of the designed circuit is shown in Fig. 7.
5. Experiments
The schematic diagram of the magnetic bearing system adopted to
perform the tests is illustrated in Fig. 8. In this platform, the shaft is
levitated by two eight-pole radial magnetic bearings and an axial mag­
netic bearing. The displacement information required for magnetic
bearing control is provided by eddy current sensors. To reduce the in­
fluences of the magnetic bearing electromagnetic field on the sensor’s
performance, the axial inductive sensor is placed on the shaft at a certain
distance from the magnetic bearing. The armature is fixed on the shaft
and can move along axial direction with the shaft. The test platform is
shown in Fig. 9.
5.1. Static characteristics test
For the test platform, air gap range of the axial protective bearing is
about ± 0.3 mm, then only the characteristics within ± 0.2 mm range
along axial direction are tested. When the armature is moving along
axial direction from − 0.2 mm to 0.2 mm by step length of 0.05 mm,
sensitivity of the sensor is tested. Fig. 10 shows the output voltage at
different axial displacement and the linear fit curve of the experiment
results. Fig. 11 shows the residual curve.
Theory and experiment sensitivity of the proposed sensor are 2.74
mV/μm and 2.63 mV/μm, respectively. The relative error is less than
5%, indicating that the theory analysis could be used for structure design
and optimization.
According to the experiment results, sensitivity and linearity of the
proposed sensor are 2.63 V/mm and 0.46%, respectively.
When the armature is forced to move along radial direction, output
voltage are also detected and the experiment data are plotted in Fig. 12.
The results show that when the armature is moving along radial direc­
tion, output voltage of the sensor has little changes, and the sensitivity
along radial direction limit to 0 mV/μm, indicating that the sensor could
not be affected by radial direction displacements.
Then, static noise is tested and the results are plotted in Fig. 13. The
7
Measurement 187 (2022) 110159
(22)
noise of the sensor is less than 12 mV, showing that the resolution of the
proposed sensor is better than 5 μm.
Then, based on the static test above, performance of the proposed
sensor can be obtained, as shown in Table 3..
5.2. Dynamic characteristics test
When the shaft is forced to vibrate along axial direction, displace­
ments sensed by the proposed sensor and eddy current sensor are ob­
tained, as shown in Fig. 14.
At last, a shock by hammer is hit on the shaft along axial direction,
and displacements sensed by the proposed inductive sensor and eddy
current sensor are given in Fig. 15.
The vibrate and shock results show that the detection capability of
the proposed sensor is consistent with eddy current sensor.
Table 4 gives a comparison study between the proposed sensor with
other similar sensors. The proposed axial displacement sensor has
several advantages over the existing sensors in terms of easy to manu­
facture, no contact to moving part, easy to integrate with magnetic
bearing and low cost, etc.
6. Conclusions
In this paper, an axial displacement sensor for magnetic bearings is
proposed, designed and tested. The main conclusions can be expressed
as follow.
(1) Novelty of this paper can be summarized in structure and analysis
method. The structure proposed in this paper is a two layer structure,
and each exciting winding is winded around each side of the magnetic
core, separately, reducing the mutual interference between each
inductance. Theory model of 3D inductance is built based on the
Schwarz-Christoffel transformation, and the error between theory re­
sults and FEM results is less than 4%. Therefore, the theory model can be
used in 3D inductance calculation instead of FEM method to reduce
computation time and model complexity.
(2) Experiment sensitivity of the proposed sensor is 2.63 mV/μm,
showing great agreement with theory result (2.74 mV/μm), indicating
that the theory analysis could be used for structure optimization.
(3) The axial sensor proposed in this paper is only sensitive to axial
displacement, therefore, it can be used for axial displacement detection,
alone. And displacement detection capability of the proposed sensor is
similar to that of an eddy current sensor, showing the potential to be
used in other fields where eddy current sensors have already be applied.
(4) The proposed axial displacement sensor has several advantages
over the existing sensors in terms of easy to manufacture, no contact and
low cost, etc. therefore, it has the potential to be applied to other fields,
especially for displacement measurement of rotating machinery.
(5) According to the novelty and experiment results, contribution of
this paper can be summarized as follow. Firstly, this paper may expand
the topology of sensors, and more and more structure types may appear
in the near feature. Secondly, a theory analysis method is proposed in
this paper, and with the help of this approach, efficiency of structural
design and optimization will be improved, significantly. Thirdly, this
paper provides a potential low-cost sensor for displacement
W. Li et al.
measurement.
(6) Static performance of this sensor has been tested, and the dy­
namic frequency response will become the focus of future research. In
addition, further improvement and optimization of the sensor will also
be the focus of future work.
CRediT authorship contribution statement
Wenyin Li: . Jinghua Hu: . Zhenzhong Su: . Dong Wang:
Conceptualization, Methodology.
Declaration of Competing Interest
The authors declare that they have no known competing financial
interests or personal relationships that could have appeared to influence
the work reported in this paper.
Acknowledgments
This work was supported by the National Natural Science Foundation
of China under Grant 51825703, Grant 51690181, Grant 51707201 and
Natural Science Foundation of Hubei Province under Grant
ZRMS2020001244.
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