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1 2 3 1 1
M. A. Davies (2), T. Ueda(2) , R. M’Saoubi(2) , B. Mullany(3) , A. L. Cooke
1
Center for Precision Metrology, Department of Mechanical Engineering and Engineering Science,
University of North Carolina at Charlotte, Charlotte, NC
2
Kanazawa University, Japan
3
SECO Tools AB, Sweden
Abstract
Because it is key to understanding the performance of material removal processes and resultant workpiece quality, the
measurement of temperature during material removal is done extensively. We review several widely used temperature
measurement methods and show how they can be applied to temperature monitoring during material removal. Since there
is little documentation on measurement uncertainties as relates to material removal, this paper outlines the physics of
each method, detailing the sources and evaluation of uncertainty. Finally, using criteria critical in measuring material
removal, methods are compared, and the results presented in guide-format for participants in this field of work.
-582-
100 Pm
D
520 Pm
(%) (%)
L
Line Width: 5 Pm
Material: Platinum Sensor 1 100
Error
Thickness: 250 Pm
Sensor 2
Error
10 Tsys
sys
Temperature
800 Pm
Temperature
1% Tamb
amb
200 Pm
0.1
Relative
0.01
Relative
0.001
1600Pm
0.0001
2500 Pm
0 2 5D
5D 6 8 10 12 14
Immersion (diameters)
Immersion (diameters)
Figure 2: Micro-thermistor after Yoshioka et al. [232].
Figure 3: Immersion errors.
shock can be difficult to predict and can cause hysteresis
in sensor response. Commercial thermocouples have many advantages.
They are: (1) relatively low cost; (2) rugged; (3) versatile
As shown in Figure 3, error that results when the sensor
and available for many temperature ranges; (4)
is not fully immersed in the medium of interest, and thus
reasonably stable and reproducible; (5) subject to
is not at the temperature of the medium, should not be
relatively low uncertainty when used as designed; and (6)
ignored in uncertainty calculations. For example,
fast responders, depending on size. However, the
simplified modeling shows that a sensor must be
advantages are tempered by the relative complexity of
immersed at a depth of greater than five times its
the thermocouple system and the possible associated
diameter to limit the error to less than one percent.
sources of uncertainty.
Other materials can be used to build miniaturized PRT's
While thermocouples are subject to errors caused by
and RTD's, and use of these devices is promising for the
immersion, lag and settling, radiation, and alteration of
measurement of temperatures in material removal
the thermal field by the sensor, the largest error source is
processes. However, because gradients and time-
due to material inhomogeneity resulting from cold work of
variations of thermal profiles encountered are extreme, it
the thermocouple wires, chemical reactions such as
is recommended that these methods be used in
oxidation, reaction with insulating materials, or changes
conjunction with simulation and other measurement
in material phase with temperature. Note that these
techniques so that uncertainties due to size effects and
errors can be upwards of 1 percent but can be minimized
immersion errors can be well quantified.
by ensuring that the inhomogenous portions of the
3.2 Thermocouple (TC/DTC) thermocouple, e.g., the junctions, do not experience
The thermocouple (TC) consists of two dissimilar metals thermal gradients. The second-most important source of
joined in such a way as to cause the voltage generated error in thermocouple measurement is inadequate
between the contacts to be an accurate gauge of knowledge or control of the reference junction
temperature difference between the contacts. In temperature. To minimize this error, the reference
particular, heat transfer in an electrically conducting junction temperature T0 is generated with a well-
material occurs by a combination of phonons and the constructed ice-point, and instruments are allowed to
movement of electrons or current. The thermally induced come to thermal equilibrium. Still, errors of up to 1
current is associated with a voltage drop. Thus, a percent due to junction temperature are to be expected.
voltage drop will occur in any electrically conducting In material removal processes, many sources of error
material experiencing a thermal gradient. This is the associated with the thermocouple cannot be minimized,
Seebeck effect, and it dominates the voltage generated but instead can be worsened by the removal process
by a thermocouple (TC). The Seebeck effect, itself. For example, thermocouple junctions near a tool
summarized in Equation (2), applies to an electrically edge are subjected to large thermal gradients and/or
conducting material with a one-dimensional temperature rapidly changing temperature, introducing the first and
field T(x). second types of uncertainty. For a detailed study of the
effect of thermal gradient on measurement error, see
dV Attia and Kops [9-12].
S (T ) ( 2) The dynamic or tool-workpiece-type thermocouple is not
dT
surprisingly subject to the worst inhomogeneity and
V(x) is the spatially varying voltage and S(T) is the gradient errors. The presence of very large thermal
temperature-dependent Seebeck coefficient. A gradients in the region of greatest material
thermocouple consisting of two dissimilar materials inhomogeneity actually precludes standard thermocouple
attached at a junction is shown in Figure 4. The voltage practice. Nevertheless, researchers have attempted to
generated by the thermocouple in either circuit is related conduct theoretical and numerical analyses of the tool-
S B S A T1 T0
to temperature according to Equation (3), work thermocouple in order to determine the effect of a
variable temperature on the tool-work interface.
V (3) Comprehensive work by Stephenson [192] shows that if
the thermoelectric voltage generated at the interface is
where V is the total voltage generated, SB and SA are the proportional to temperature, the experimental voltages
Seebeck coefficients of the two materials, T1 is the will correlate to the mean temperature at the interface.
temperature being measured and T0 is a reference This however does not account for the high strains,
temperature, usually the ice-point of water. pressures, phase transformations, chemical reactions
-583-
and other physical problems that must significantly affect Material A
the Seebeck coefficient of the materials near the
interface. Furthermore, calibration of two materials V T1
against each other under quiescent conditions does little
to eliminate all uncertainty, since the inhomogeneities Material B
and changing contact conditions cannot be reproduced.
Stephenson [192] suggests that the errors from
Ta T0
inhomogeneity alone may be on the order of at least 5 Signal
percent. However, the dynamic thermocouple is (b)
Collection
inexpensive, practical, and does provide an indication of
trends in interface temperatures as well as correlations Material A
with tool wear [6]. When it was first introduced, it was the
only method of attaining thermal information about the V Material C T1
tool-workpiece interface. Moreover, Stephenson [192]
argues that it is the only existing method that shows Material B
promise for use in shop floor practice, where monitoring Ta T0
of qualitative changes may be all that is needed.
The use of thermocouples in general, be they dynamic or (a)
static, are practical, but because of their complexity, and Figure 4: 4:Typical thermocouple circuits in in
thethe
Figure Typical thermocouple circuits
the difficulties in reducing relative standard uncertainties measurement environment.
measurement environment.
to less than 10%, we conclude that this device be used
only when qualitative information is desired. In particular,
variations on the dynamic thermocouple can be used in Because thermal emission is a complex phenomenon, it
many different processes such as turning [60, 68, 186], is useful to first consider the spectral emission of a real
grinding [151], milling [193], and drilling [48]. body in relation to that of an idealized perfect radiator or
blackbody. A blackbody has three properties: (1) it
3.3 Thermophysical Processes (TP) absorbs all incident radiation regardless of wavelength
and direction; (2) for a given wavelength and
Measurements that rely on thermophysical
temperature, no body can emit more energy than a
processes(TP) are classified as semi-invasive [38].
blackbody; and (3) radiation emitted by a blackbody is
Several commercially available vehicles for exploiting this
independent of direction. The spectral emissive power,
technology exist: (1) thermo-sensitive and thermo-
indicating paints, (2) thermochromatic liquid crystals, (3) EO,b, of a blackbody is a function of temperature and
thermographic phosphors; (4) temperature sensitive wavelength and is governed by Planck’s law.
crayons and pellets; and (5) pyrometric cones. Although C1
O5 eC 2
EO ,b OT
1
to date, there has been relatively little use of these ( 4)
products to measure temperature in material removal
operations, attention has been given to paints and
phosphors which have become quite sophisticated and The spectral emissive power is the power emitted per
can accommodate a range of temperatures up to unit area of the blackbody at a given wavelength and
2000ºC. Of even more interest would be if crude temperature. In Equation 4, C1 and C2 are the first and
-
measurement techniques, such as the bending of a cone second radiation constants with values of 1.191044 x 10
16 2 -1
-584-
main differences among the types are the wavelength
Spectral Band (O=O & O=O ) Detector
Ratio
Aperture
Angle-defining
/Display
Amplifier
I
applicable to material removal processes.
T
Ratio thermometers collect radiation at two wavelengths
Detector
and attempt to eliminate dependence on surface
Lens
emissivity. Since they, like spectral band thermometers,
are quite suited to measurements of material removal
Target
processes, we detail both types below.
Optical fiber thermometers are so named due to the
means of collecting the radiation, not to the wavelength
dA
Aperture
Target-defining
Filter(s)
range that is collected, nor to the collection angle. RO
Moreover, optical fibers may be utilized to collect light in
H(O,IT)EO,b
any type of radiation thermometer.
Spectral radiance thermometers, (a.k.a. single color
O
pyrometers), are comprised of an array of detectors that System
can convert radiant power into a spatial image. A Response
significant disadvantage of spectral band thermometry is
its dependence on the emissivity of the surface being
measured. Emissivity, which is often incorrectly referred Figure 6: Typical radiation thermometer.
to as a “property” of a surface, is actually dependent on
many factors. It is a measure of the fraction of the total
emitted radiation from a real surface to the radiation
surface, T,I represent direction, O is the wavelength of
where dA is a differential area element on the radiating
emitted by a perfect blackbody at the same temperature,
the radiation and G(O) is responsivity of the detector The
and as such, its value is always between 0 and 1. The
term gray body is also an idealization for which the
emissivity is not a function of direction or wavelength. most direct method of dealing with this complicated
response is to calibrate the instrument directly to the
emissivity H, giving the emissive power as follows.
For a gray body, Equation (5) is modified by the
surface of interest which has been heated and its
HVT 4
emissivity measured by some other detector [45].
E (6) However, this method is accurate only to the extent that
the surface being studied can be reproduced in the same
The discussion and equations given above provide the condition as when measured, vis-à-vis surface oxidation,
simplest definition of emissivity, and its value is tabulated surface finish, etc. The instrument can also be calibrated
for surfaces over a wide range of conditions. with a blackbody to determine its responsivity, and then
the emissivity of the radiating surface can be measured
In practice, emissivity varies with both wavelength and
with special instruments. For example, Davies et al. [46]
emissivity function H(O), which is the ratio of the spectral
direction. Wavelength variation gives rise to the spectral
calibrate the equipment against a blackbody and then
measure the emissivity of steel (the object of their study),
emissive power of a real surface to that of a blackbody as as a function of wavelength, including in their uncertaintly
a function of wavelength. For instance, white paper has measurements the effects of oxidation and finish
an emissivity of 0.2 at a wavelength of 1 micrometer and changes which are undetermined, but can be estimated.
an emissivity of 0.9 at a wavelength of 3 micrometers. The salient point is that one cannot simply assume a
Furthermore, as mentioned previously, emissivity also manufacturer supplied value for the emissivity as that
varies with direction, as shown in Figures 5 and 6 incurs potentially large measurement errors on the order
(pattern typical of metals [52]). Extensive tables of of tens of percent or more.
spectral emissivity for a variety of surfaces can be found
spectral band (OL<O<OU) is critical in determining the size
in the literature [52]. From Equation 7, it is also evident that the choice of
A typical radiation thermometer is shown in Figure 6.
of the signal S(T). Because spectral content, the peak of
The signal, S(T), from the detector is a function of
the radiation, and emissivity are functions of temperature,
temperature and is determined from the integral,
³ O³ T³ ³I G(O )H I , T , O EO
O2
O , T dIdT dOdA
it is critical to select the band of accepted radiation to be
near the expected peak wavelength of the emission. The
S (T ) ,b (7 ) wavelength band is estimated using Wien’s displacement
A 1
law,
-585-
OmaxT 2898 μm K
wavelengths where adequate signal can still be
(8) maintained. Note that measurements at high
which gives the peak wavelength Omax of the spectral
temperatures and measurements of materials with low
inherent emissivity will have higher uncertainty.
emissive power for a blackbody as a function of its
temperature. For example, to measure temperatures in In material removal processes, uncertainty in the spectral
the range of 500ºC, a spectral band detector should emissivity is typically the greatest source of error in the
measurement of temperature. Emissivities can differ
3.7 Pm.
accept radiation in the vicinity of the peak wavelength of
dramatically. For example, Figure 7, which shows the
Typical medium range spectral radiation
emissivity of several materials, includes detailed data on
thermometers use Indium-Antimonide detectors and are
Inconel®, where it is seen that the emisivity changes
Pm to 5 Pm band. However, to measure in the range of
suited to this task because they accept radiation in the 3
from 0.1 to 0.95, depending on surface preparation
alone. Moreover, for all materials listed in this figure, the
radiation is centered at 10 Pm, one would want to choose
room temperature where the wavelength of the emitted emissivity varies with wavelength, thus invalidating the
gray body assumption. This is notable considering that
a long-range spectral radiation thermometer or a different ratio thermometers (two-color pyrometers), assume that
type of detector. To reduce the thermal noise in emissivity does not vary with wavelength. In fact, for
semiconductor detectors, costly cooling systems are materials where emissivity varies with wavelength, use of
often needed. the ratio thermometer would be in question. In particular,
The ratio radiation, or two-color thermometer (TCP), has the combination of low sensitivity with emissivity errors
been developed to reduce the uncertainty associated could combine, causing the uncertainty of a ratio
with emissivity, but at the expense of sensitivity. If thermometer to actually be greater than that of a spectral
emissivity is independent of direction, and detector band thermometer under the same conditions. For
H O1 EO1 , b
surface. If the ratio, r, of the readings at the two
H O2 EO 2 , b
wavelengths is 0.9, and the body is an ideal gray body,
S1 (T )
r (9) then Equation 10 yields a measured temperature of 1070
S 2 (T ) K. However, according to Figure 7, the emissivity of
polished iron at these two wavelengths is approximately
0.175 and 0.15, respectively. If we then correct Equation
If one incorporates the graybody assumption, then the 10 to include the different emissivities at the two
result is an emissivity-independent expression for wavelengths[38], we find that the actual temperature is
temperature.
C 2 O1 O2
919 K, meaning that the assumption of a gray body leads
to an error of 14%. Calibration against other temperature
§ § O ·5 ·
T (10) measurement devices can reduce this error.
O1O2 ln¨¨ r ¨¨ 1 ¸¸ ¸¸
It should be cautioned that many radiation thermometry
O
© © 2¹ ¹
devices allow a value of the emissivity to be “set” by the
user. In these situations, uncertainty can be reduced by
conducting measurements with this value set to one, and
The obvious advantage of this methodology is that then processing the raw data with the best wavelength-
emissivity is removed from the calibration equations. In dependent emissivity data available to the user.
practice, however, the graybody assumption is never Computing the temperature in this way necessitates
strictly satisfied, and since radiation is being collected solving transcendental equations [46].
over narrow bands, the signal to noise ratio is reduced. While emissivity is typically the largest contributor to
Radiation thermometry is non-invasive and can produce uncertainty in radiation thermometry, other significant
thermal images or single-point measurements. However, sources are: (1) reflection; (2) absorption; (3) size of
the trade-off for these advantages is the introduction of source, particularly focus; and (4) obstructions in the field
numerous complicated sources of error. According to of view (vignetting). Note that most of these error
Childs [38] and Nicholas and White [141], errors in sources are included in the uncertainty of the measured
radiation thermometry lie in three general areas: (1) radiance, uEM,, the first term in Equation 11. In the
surface characterization including fluorescence, following sections, where applicable, we discuss the use
reflections, and emissivity; (2) variations in the of radiation thermometers in the context of sources of
transmission path including absorption, emission error and uncertainty and how these can be reduced.
scattering, size-of-source effects and 4 MEASUREMENT CAPABILITY & CHALLENGES
obstruction/vignetting; and (3) signal processing. The
Each of the methods discussed in Section 3 has been
mathematical determination of error in radiation
cited in the measurement of material removal processes
thermometry is described in many texts, (e.g.,[38, 52,
documented in Figure 1. Using Figure 1 as a guide, we
141]). In measured temperature, the two largest sources
highlight major work, and discuss important results. The
of uncertainty, uTm, are usually associated with
results are organized by process and method.
uncertainty in emissivity, uH, and the uncertainty in
measured radiance uEm, as expressed in Equation 11. 4.1 Turning
OT 2 §¨ u Em uH2 ·¸
Turning is ubiquitous and is one of the most studied
2
C2 ¨ H 2 ¸¹
processes, with the measurement of process
uT2M
©
(11) temperature being no exception. In this section we cover
Em2
dynamic and embedded thermocouples, spectral band
radiance, ratio radiation, with specifics regarding their
Errors increase with wavelength, with the square of the use in determining temperature.
temperature and in inverse proportion to the square of The first estimates of temperatures in turning were likely
the emissivity. Therefore, to minimize uncertainty, made by examining the color of oxidized chips, a
measurements should always be made at the smallest thermophysical method. The ability to make quantitative
-586-
1.0 NIST Standard (Inconel®) where measurements taken of the tool-chip interface
during orthogonal cutting of carbon and stainless steels
Normal Spectral Emissivity
Heavily Oxidized
0.9
Moderately are documented. The tool-workpiece thermocouple circuit
0.8 Oxidized used in the study was calibrated using a special TIG
0.7 welding system which provided localized heating at the
0.6 Sand Blasted & tool-work contact zone (Figure 9(a)). The temperature
0.5 Moderately was measured with a standard K-type thermocouple
er Oxidized embedded in the steel specimen and yielded linear
0.4
ap
Sand Blasted relations between temperature and tool-work voltage for
eP
As Received (typ)
W
0.2
Polis (TiC/Al2O3/TiN), and four-layer CVD coated
h ed Alu Polish Electropolished
0.1 minu
ed Iro
n
(TiC/Ti(C,N)/Al2O3/TiN) inserts. Representative data for
m Polished Silver standard tool geometries are shown in Figure 9(b).
0
1 2 3 4 5 6 7 8 910 20 30 40 Restricted contact length tools were also studied,
Wavelength (Pm) producing a comprehensive set of data plotted against
thermal number, as defined by Chao et al. [37]. Grzesik
Figure 7: Spectral emissivity of various materials suggests that it is the intrinsic properties of the multi-
after Childs [38] and Nicholas and White [141]. Black layer coating that control the heat flow into the chip,
indicates Inconel®. reducing it when an intermediate Al2O3 coating layer is
employed. The presumption is that it forms a thermal
barrier affecting chip curling and controlling heat partition
measurements began with embedded and dynamic (tool-
in the chip-coating-substrate tribo-system [61]. However,
chip) thermocouples. Both methods have proven to be
recent investigation by Rech et al. [163] indicates that the
very practical and have been in continuous use for nearly
so-called thermal barrier effect of Al2O3 seems to be
a century. The embedded thermocouple was patented
substantially mitigated in continuous turning. The
by Verbeek [219] and the tool-chip thermocouple (Figure
significant uncertainty of the complex tool-work
8) was introduced shortly thereafter by Shore [186],
thermocouple circuit with multiple hot junctions in the
Gottwien [60] and Herbert [68], and then substantially
region of largest thermal gradients might also contribute
improved by Boston and Gilbert [30] ,Kraemer [95],
to the discrepancies.
Trigger et al. [201], Olberts [144], Lowack [115], Veenstra
The use of modern CNC for tool grinding can create very
[217, 218], Takayama and Murata [196] and Alvelid [6].
complex tool geometry which can perturb both the
The difficulties common to all thermocouples used in
contact zone and the temperature of the tool-chip
material removal have to do with the junction being
interface. Anagonye, et al. [7], illustrate the effects of
subjected to large thermal gradients. In the case of the
tool macro-geometric features on tool-work thermocouple
embedded thermocouple, insertion of the thermocouple
signal by showing how it varies for different combinations
leads to significant changes in the system behavior and
of tool nose radius and included angle. The resulting
hence, to errors in the measurement [9-12]. Furthermore,
effects on cutting temperature cannot be ignored. As the
the hot junction for both the embedded and tool-chip
insert included angle increases from 35 degrees to 80
thermocouple is subject to large thermal gradients. For
degrees, the thermocouple experiment shows that the
the tool-chip thermocouple, errors at additional hot-
average temperature on the rake face decreases by
junctions (between the workpiece and tool and, in some
18%. Grzesik [63, 64] has completed similar, but very
cases, the insert and the toolholder) can only be avoided
comprehensive studies on the effect of chip breaker and
if these junctions are isothermal. Much of the work on
reduced contact tooling on the tool-work thermocouple.
thermocouple measurements of turning during the last
He concludes that control of the contact length [62]
several decades has focused on eliminating the error
influences the heat flux and thermal load .
sources cited above, and is detailed in the keynote paper
by Barrow [20]. Figure 1 traces the work. The process of interrupted machining/milling, particularly
in modern high speed machining, has been shown to
Although use of the tool-work technique is an older
effect tool wear. To make measurements under such
method [20], it is still often used in single point turning [7,
challenging conditions, Lezanski and Shaw [110] and
64, 167, 191, 192]. The method has been re-evaluated in
Stephenson and Al [193], have utilized the tool-work
recent years, with current research focusing on
thermocouple method. More recently, Kitagawa [83] used
monitoring and explaining wear phenomena. For
a similar procedure to investigate variations in tool life
example, Kramer [96] used the tool-work thermocouple
between turning and end milling of Ti-6Al-4V-2Sn alloys
as an input parameter in an analytical model of tool wear
that accounts for both chemical dissolution of the tool
material into the chip and the effect of abrasion of the
tool by hard particles (cementite) within the work
material. A quantitative correlation of tool-chip interface Workpiece Material D
temperature and wear mode (flank and crater) was later Material A
proposed by Leshock and Shin [109], and was based on
tool-work thermocouple measurements during turning of Ta
AISI 4140 steel and Inconel 718 with tungsten carbide Hot Junction
tools. They found an apparent exponential increase in T1
crater wear rate with increase in tool temperature,
providing evidence relating crater wear to a temperature - Material B
dependent diffusion mechanism [109]. Tool
In examining wear of tools with multilayer coatings, use
of the tool-work thermocouple is complicated by having to Electrical Ta Material C
grapple with multiple hot junctions. Yet, because coated
Insulation
tools comprise an estimated 53% of the world market. V
Studies in this area are of extreme importance
economically. To see how the tool-work thermocouple Figure 8: Typical tool-chip thermocouple
can be used to study coated tools, refer to Grzesik [62], arrangement [20].
-587-
1000 1-TiC/Al2O3/TiN 2 - TiC/Ti9C,N)/Al2O3/TiN B Contour levels (˚C)
3 - P20 uncoated 3b TC TC A=350
900
Temperature °C
TC C
carbide D B F G
TC B=320
800 TC
1b 3a 320 G
C=200
700 New tool
TC F
1a E D=125
600 270 W
2a
TC
500 2b a = AISI 1045 steel 220 TC
400 b = AISI 304 steel TC TC
70
20
0 20 40 60 80 100 120
t(s
-588-
S free-cutting stainless steel, Fang et al. [59], were able
to correlate thermocouple temperature and adhering
layer formation on the tool. The embedded thermocouple
technique has also been used by some authors to
investigate the effect of cryogenic cooling on cutting
temperature in the machining of titanium alloys [71] and
ceramics [223]. For example, Wang and Rajurkar [223]
show that tool wear in machining advanced structural
silicon nitride with CBN tools can be significantly reduced
by cryogenic cooling, reducing the maximum cutting
temperature by more than 300ºC.
Moriwaki et al. [129] placed thermocouples at four
locations in the toolholder to measure the temperature
rise during single crystal diamond machining of
aluminium and oxygen-free copper. Although it had been
thought that temperature rise in diamond machining was
negligible, this work revealed a temperature rise near the
Figure 11: Embedded thermocouple arrangement cutting edge of up to 10ºC and more than 3 micrometers
used to measure rake face temperatures in dry of induced thermal expansion at the tool shank. In
cutting of cast iron GG25 by Weinert et al. [225]. another study of the precision machining of oxygen-free
copper performed by Moriwaki et al. [130]), three 0.35
Adjustable Workpiec ºC 1000
ºC 1000 mm copper-constantan thermocouples are implanted
Workpiec
Toolpost 800
Inser 800
CHIP
CHIP within the workpiece to measure real-time temperature
Tool 20,000 600
Objective/
Objective 20,000 600 T rise as the tool cuts through the thermocouple. The
Guard RPM 400
Spindle 400 O
T thermoelectromotive force signal shows good agreement
Spindle 200
Microscope
Body
200 O
O with simulations, and is a good example of the rapid
Feed response that can be obtained with modern micro-
Feed
thermocouples.
Camera
Infrared V
V
C
C Controlling the temperature in the cutting of natural
100 Pm
Pm
Camera
Pm
100 materials such as bone and is important in order to avoid
Z-axis
Machine
-Axis
Z
damage [128]. Lucas et al. [116] use six embedded
thermocouples to investigate the temperatures around
Figure 12. Experimental arrangement of Davies the cutting site for wood and bone in ultrasonic
et al. [44-46] and an example thermal machining. The authors suggest that the design of
micrograph. ultrasonic cutting blades must necessarily be impacted if
thermal damage is to be avoided.
measurement/finite-element approach and is similar to
that outlined by El-Wardany et al. [58]. Kishawy [82] also Spectral band radiance measurements of material
removal processes dates to Schwerd [181] and Kraemer
used embedded thermocouples to investigate the effects
[95] who focused light from a cutting process directly
of different process parameters on the cutting edge
onto a thermocouple. Other types of detectors, such as
temperature during high-speed hard turning of D2 tool
lead sulphide cells and germanium photodiodes, were
steel using polycrystalline cubic boron nitride (PCBN)
used similarly by several researchers [36, 54, 166], with
tools. The effects of tool geometry and edge preparation
scanning methods being added by Lenz [106-108], and
on tool temperature were also investigated by Coelho et
Van Worden and Prins [156, 216]. Boothroyd [29],
al. [39] in the high speed cutting of Inconel 718 using a
Salmon et al. [178] and Mayer [124] developed the first
variety of tool materials (Al2O3-based, Al2O3-based + SiC,
thermal images of the tool-chip interface using IR-
and PCBN). A new method recently introduced by
Weinert et al. [225] used PVD-coatings for temperature sensitive film. Jeelani [79] and Lauscher [103] improved
measurements by means of the Seebeck effect. A on earlier IR photographic techniques by taking
NiCr/Ni thermocouple was applied as a sensor pattern on advantage of the development of more sensitive films
a silicon nitride insert tip. Comparative temperature and more accurate calibration techniques to measure the
measurements in cast iron GG25 confirm the temperature distribution in the orthogonal machining of
functionality and reliability of coating technology (Figure an 18% Ni maraging steel.
11). Along with the introduction of high bandwidth solid-state
detector arrays, the use of imaging techniques in recent
Several authors have attempted to use embedded
years has proliferated, and we list many examples[26].
thermocouples to investigate heat transfer and to
Wang et al. [221] took advantage of modern imaging
estimate heat flux at the tool-chip/tool-work interface [2,
systems to produce the first dynamic thermal images of
23, 100, 101, 163, 164, 233]. An example is in Battaglia
curling chips, and Narayanan et al. [135] used a similar
et al. [23], where the heat flux in a workpiece during hard
system to measure the temperature field at the tool-chip
turning with CBN tools is estimated by thermocouples
interface during machining of Brass 332, with images
embedded in the workpiece, and then used to determine
being retrieved through a sapphire tool that is transparent
the temperature at the machined surface. This
at the measured wavelength. A two-color pyrometer
information led the authors to surprisingly conclude that
these temperatures are not high enough to cause the calibration method that compensates for unknown
transformed surface layers as seen in hard turning. emissivity value was also used. Ng et al. [138] utilized a
thermal imaging system with adjustable emissivity input
The effect of tool-wear on work-piece surface to measure chip temperatures in orthogonal turning of
temperature and integrity have also been examined in hardened die steel, AISI H13 (52HRC), with
aluminium machining by O’Sullivan [142]. Results show polycrystalline cubic boron nitride (PCBN) tools. While
that: (1) machined-surface temperatures decrease with the effect of wavelength dependent emissivity is not
corresponding increases in feed rates, and (2) the addressed, good agreement with simulations is
progression of tool wear is accompanied by a consistent demonstrated. In Stephenson [190], a direct radiance
increase in workpiece temperature. When machining Ca- system was used as a comparison to the tool-work
-589-
wavelength (8 Pm to 14 Pm) direct radiance
thermocouple. Chu and Wallbank employed a long maximum temperature points are present on the tool face
in two locations as seen in Figure 13(c), possibly
measurement system calibrated against a thermocouple suggestive of design changes that could reduce wear.
to verify that in cutting mild steel, the condition of the This agrees qualitatively with results previously obtained
flank face of the tool is the most important factor in by Wanigarathne et al. [224], in their investigation of
determining the temperature on the newly machined progressive tool wear in machining of AISI 1045 steel
surface. Davies et al. [44-46] developed a radiance with coated (TiN/TiCN/TiC) grooved tools, where they
-590-
203]. In Al Huda et al. [3] and in Ueda et al. [203], an
optical fiber is inserted into an alumina tool so that it
nearly reaches the rake face as shown in Figure 17(a).
Radiation is collected by the optical fiber and thus the
temperature can be determined independent of changes
in the emissivity of the target. Results confirm [184] that
coolant does not reach the tool-chip interface in turning.
For example, the machining of AISI 1045 steel [3] with
water soluble overhead-jet coolant versus dry machining
shows only a 3% decrease in cutting temperatures over a
range of cutting speeds from 200 m/min to 300 m/min at
a cutting depth of 0.8 mm and a feed rate of 0.2 mm/rev
(Figure 17(b)). Similarly, results for mist coolant show a
decrease in rake temperature from 1060ºC to only
1000ºC in turning AISI 1045 steel at 300 m/min. Müller
and Renz [132] developed a two-color pyrometer with
high spatial and temporal resolution which was
subsequently used [72, 97, 133] to measure Figure 13: (a) IR-CCD measurement arrangement of
temperatures of the newly cut surface in extremely high M’Saoubi et al. showing the (b) temperature maps (ºC) for
speed machining (up to 100 m/s) of three different machining SS2541 machined with an S6 insert at a
workpiece materials: carbon steel AISI 1045, aluminum cutting speed of 200 m/min and a feed of 0.15 mm. (c)
alloy AA 7075, and titanium alloy Ti6Al4V. Tool temperature map during oblique cutting with a chip
breaker geometry insert cutting stainless steel 316L at
Pursuing a thermophysical-based (TP) approach first
180 m/min with a feed of 0.3 mm/rev and (d) temperature
developed using paints by Shallbroach[182], Bickele[25],
profile on rake face [117-122].
Vierrege[220], Rossetto [173] and Kato [81], Wright and
Trent [227] correlated micro-hardness with the
temperature history of steel tools and was thus able to
develop thermal profiles for a variety of cutting conditions Laser Dynamometer
[228]. Ostafiev et al. [147] developed a grid of channels
filled with special thermosensitive paint in a split carbide Tool
tool, from which they developed the isotherms shown in Charge
Figure 18. Lo Casto et al. [114] use a constant melting Workpiece
Amplifier
point potassium nitrate powder on a plane parallel to the
Pyrometer
rake face to determine tool temperatures in cutting of
C40 steel with Ceramic (Alumina) inserts. Olson et al.
[145] propose online machine tool monitoring using thin- Data
film sensors (0.18 mm) able to simultaneously measure Processor Acquisition
heat flux and temperature, thus providing input for an System
improved inverse calculation of tool temperatures.
4.2 Milling Figure14:
Figure 14:Emissivity
Emissivitymeasuring
measuringpyrometer
pyrometerofofLei Leiet al.
Despite the introduction of extremely high speed et al.
[105] [94] measuring
measuring surfacesurface temperature
temperature of nitride with
of silicon
machining centers during the past two decades, milling silicon nitride
a CBN toolwith
in aalaser
CBNassisted
tool in amachining
laser assisted
cell.
process temperatures have received substantially less machining cell.
attention than turning. The difficulties of measuring InSb-pyrometer
rotating tools and multiple moving axes make the
experiments significantly more challenging than similar
Target Optical
experiments in turning. Nevertheless, many researchers Fiber
Area
output
have attempted to measure both interrupted turning and Condenser
milling processes, with most focusing on use of the
dynamic thermocouple. We also discuss how embedded Cladding
Object
thermocouples and direct radiance and ratio radiance
properties can be applied to the measurement of
temperature in milling. Ge-pyrometer
The dynamic thermocouple has been adapted to milling
Figure 15: Two-color pyrometer designed by Ueda et al.
via the addition of a slip ring. However, rotating Figure
Similar15: Two color
systems havepyrometer
been useddesigned
measureby Ueda
numerous
secondary hot junctions, such as those between insert et al. and utilized to processes
measure numerous
material removal [202-203,material
206-212].
and toolholder, tool and collet, collet and toolholder, and
removal processes [176-180].
toolholder and machine spindle complicate matters.
Narutaki et al. [136] appear to have been the first to of both gray cast iron and 2024 aluminum. Results
employ the tool-work thermocouple for measurements indicate that in both materials the peak temperatures
during interrupted cutting. Their study was of diffusive decrease as the time out of cut is increased, going from
wear mechanisms in Alumina-Zirconia tools used to mill 550ºC to around 500ºC in gray cast iron, and from 275ºC
plain carbon steel S45C at high surface speeds of to 250ºC in 2024 aluminum. Kitigawa et al. [83] provide
300m/min to 600m/min. The tool-work thermocouple further evidence for the supposition that interrupting the
implementation necessitated the addition of titanium cut decreases the maximum tool-chip temperature. Their
carbide with good electrical conductivity to the tool. No technique was to sinter a thermocouple wire coated with
detail of the setup or calibration of the thermocouple is ceramic into a carbide tool, essentially converting a chip-
given, but average rake temperatures of 1100ºC at 400 wire combination into a dynamic thermocouple, which
m/min, and 1300 ºC at 600m/min, are reported. was then used while cutting titanium. Measurements of
Stephenson et al. [193] employ the tool-chip cutting temperatures during intermittent turning are
thermocouple in interrupted and continuous turning tests shown in Figure 19, which includes data for continuous
and interrupted machining, with and without coolant. With
-591-
60v% CBN
5º Rake, 6º Clear.,
Distance a Measure
1000 0.1 mm land, 0.2 Distance b plane
mm nose AISI52100
(700HV1)
900 15CrMo4
Chip flow
Temperature °C
(650HV1)
a=0.1 mm, direction
800 AISI1055
f=0.1 mm/rev (700HV1)
Primary
AISI52100 Motion
700 (510HV1) Thermal paint (a)
AISI1045 0
Pm
600 a=0.8 mm, 980° 831° 699° 567° 422°
(210HV1)
f=0.15 mm/rev
-1000
Distance b
500
100 200 300
Cutting speed m/min -2000
Figure16:
Figure 16:Data
Datafrom
fromUeda
Uedaetetal.
al.[206]
[180]showing
showingthe
the
-3000
effectof of
effect material
material hardness,
hardness, composition
composition and
and cutting 0 2000 4000
cutting speed
speed onon maximum
maximum rake
rake temperatures.
temperatures. Distance a (b)
Figure
Figure 18:18:
(a)(a) Split
Split carbide
carbide tooltool with
with thermo-sensitive
thermo-sensitive
Oil-mist nozzle
Chip
1000 paintand
painT grid grid(b)
and (b) isotherms
isotherms (Ostafiev
(Ostafiev [133]).[147]).
Temp˚C
Tool
w/piece
Depth of cut
● d=1.0mm 1000
♦ d=0.8mm
■ d=0.6mm
6mm continuous
Optical fiber 800 900 intermittent
Two color pyrometer 75 125 175 225
Temperature, °C
Cutting speed V m/min Dry
Work- 1100 Direction 30mm Wet
Mist Nozzle of cut
Temp˚C
piece
chip
Tool
tip ○ Dry cutting
● Wet cutting tool
800
150 250 350 Workpiece 300
Top view Side view
Cutting speed V m/min 200
(a) (b)
100
Tungsten 0
Figure
Figure 17:17:
(a)(a) Two-color
Two-color pyrometer
pyrometer arrangement
arrangement of Ueda wire (25Pm) 0 10 Time t (ms) 50 60
et of
al.Ueda
[203] et
andal.results
[176] and results
(b) for (b) AISI
cutting for cutting
1045 at AISI
various (a) (b)
1045 parameters
at various parameters with and
with and without without
flood flood
coolant.
coolant. FigureFigure
19: (a)19:
Orthogonal interrupted
(a) Orthogonal turningturning
interrupted
arrangement
arrangement of of Kitigawa
Kitigawa [73]
[83] and
and resulting
resulting temperature
measurements
temperature for cutting titanium
measurements withtitanium
for cutting carbide at at a
coolant, the maximum temperature is decreased by
withcutting
carbidespeed
at at of 100 m/min
a cutting speedandof a100
feed rate of 0.1
m/min
approximately 15%. Otherwise, the data does show that mm/rev.
if the time in cut is less than the rise time (in this case and a feed rate of 0.1 mm/rev.
approximately 20 ms); there is good evidence that the
desired effect can be achieved. Direct radiance measurements of milling seem to be
Several researchers have used embedded somewhat lacking, likely due to the difficulty and risk of
thermocouples to measure temperatures in atypical mounting an expensive pyrometer onto the moving axes
machining situations. For example, in their study of the of a machine-tool. Lin et al. [111] utilize a direct radiance
performance of whisker reinforced Alumina tools in measurement system (single-color pyrometer) with a spot
milling and continuous turning of Inconel® 718, size of 1 mm, which they mount to moving machine axes.
Elebestawi et al. [57], attached a nickel-chromium Measurements were made of the surface temperatures
thermocouple at a point 0.4 mm from the cutting edge of generated behind a three-flute end mill as it carved a slot
a rotating tool. Measured temperatures cluster at values in AISI 1050 steel plate at a surface speed of
between 300ºC and 350ºC for interrupted cutting, and approximately 300 m/min. At a point 10.5 mm behind
rise to higher temperatures of between 350ºC and 500ºC the center of the cutter, a rise of 50ºC to 60ºC is
for continuous cutting. Surface speeds ranged from 400 reported. Inverse calculation methods are proposed as a
m/min to 750 m/min. means of linking measurements to temperatures under
the tool.
In another example, Ng et al. [140] implant K-type
thermocouples into the workpiece to study high-speed Ueda et al. [202], employing ratio radiance thermometry,
-592-
color pyrometer shown in Figure 20 to make cutting edges of a drill. The thermocouple is created
measurements of other milling processes. They have when a drill contacts a metal foil embedded in the
shown that: (1) in milling of hardened carbon steel, the workpiece. As the drill progresses, the contact moves
temperature of the cubic boron nitride (CBN) tool rises along the cutting edges, “scanning” the temperature
rapidly with increased cutting speed (to approximately along the way. In the cases where the workpiece itself is
850°C at 600 m/min) [73]; (2) the hardness of the composed of electrically conducting material, then sheets
workpiece greatly effects temperature; and (3) the of insulating material and foil are stacked between two
minimum quality lubricant (MQL) technique can be used plates of the workpiece material, and the process
to lower the tool flank temperature significantly (by more proceeds as above. The device is calibrated with a
than 80ºC in their example [203]). In another study of standard thermocouple clamped between the drill point
high-speed machining with a miniature ball endmill [75], and a piece of the foil. Bono and Ni [28] also employed
Ueda et al. implemented a three-color pyrometer this methodology to validate a finite element model that
consisting of mercury cadmium telluride (MCT), InSb and predicts temperature profiles along the cutting edges of a
InAs detectors, to improve the accuracy of measurement. drill. Contrary to conventional thought, this model shows
maximum temperatures occurring on the chisel edge.
4.3 Drilling
In an application of metallurgical methods, Al Huda et al.
The process of measuring temperature during drilling [3] compared heat treated high speed steel (HSS)
operations is challenging at best with the early literature calibration specimens to those from cutting experiments
describing calorimic measurements [180]. We describe to deduce temperatures in the range of 650°C to 900°C
specific methods and practices for the application of [127, 198]. This method capitalizes on the fact that high
embedded and dynamic thermocouples, metallurgical speed steels such as M2, M7, M33 exhibit microstructure
methods and spectral radiance thermometry to changes starting at temperatures in the range of 600°C
temperature measurement in drilling. to 650°C. These temperatures establish the lower limits
De Vries et al. [49, 51] determined drill and flank face for the subsequent determination of tool isotherms. More
temperatures with iron-constantan embedded recently, taking into account the relationship of vanadium
thermocouples [48, 50], and this type of work continues content to workpiece temperatures and functionality,
today [171]. Devries et al. found that workpiece Reissig et al. [168] used a transmission electron
attributes, such as size and the presence of pilot holes, microscope coupled with an energy dispersive X-ray
-593-
Temperatures occurring in fixed abrasive processes are
generally measured with dynamic and embedded
thermocouples, and direct radiance techniques, and
these topics are covered in the following paragraphs.
Grinding is an energy intensive process as was
determined quite early by calorimic studies [32, 66, 123,
177, 179], with most of the resulting heat largely
dissipated through the workpiece. Detrimental effects
include variations in workpiece hardness and
microstructure, grinding burn, cracking and discoloration.
Figure
Figure20:
20:Two-color
Two-colorpyrometer
pyrometerfor formeasuring
measuringthethetool-
As with other types of machining, correlations among the flank temperature in milling of AISI
tool-flank temperature in milling of 1045 steel,steel,
AISI 1045 Ueda et
physical processes occurring during grinding, such as the al. [202].
Ueda et al.[175].
degree of chip formation, sparking and temperature
change, have long been sought. In 1952, Outwater and
Shaw [149] found in their experiments that sparks formed
during grinding were actually caused by exothermic heat
being released during chip oxidation which occurred
immediately after the chips left the grinding zone. As a
result, it was concluded that the grinding zone must be Drill
measured directly, and to do so, they implemented
dynamic thermocouple techniques which had been
introduced to turning in the 1920s. Workpiece
Since then, other thermocouple variations have been Infrared Radiation
used, as described in Tönshoff [199]. Notably,
thermocouples have been embedded directly into the
Mirror
grinding wheel [34, 43], and spectral radiance
thermometry has yielded insights into temperature
magnitudes and gradients at both local and global levels Figure 21: Spectral radiance experiment [55]
[51].
[125]. We list several references of particular interest: In
1967, Kops and Shaw [92, 94] used various IR films and
PbS detectors to measure grinding temperatures; in the diameter insulated Platinum wire, was inserted into a
1980’s, Ueda successfully utilized ratio thermometry and 0.25 mm diameter hole in the workpiece (Figure 22). This
optical fibers to collect IR from the grinding zone [204, thermocouple is reported to have response times on the
205, 207, 209-211, 213]; Xu et al. [231] performed order of 2 μs. Pu et al. [157] used the same
experimental work to compare results obtained from configuration, calibrating the thermocouple as described
three different measurement methods; embedded in [230], and claiming an uncertainty of only 1%. Using
infrared optical fiber and embedded and dynamic several of these thermocouples along the length of the
thermocouples, finding all results in good agreement. In workpiece, they investigated grinding burn in creep feed
1974, Kops and Hucke [88, 91] provided the first large grinding of 45C steel and 20CrMnTi with a corundum
scale field of view of the grinding process, which grinding wheel. They concluded that grinding burn is not
contained both the workpiece and the grinding wheel [76, film boiling. Batako et al. investigated the effect of the
77, 177]. In the following sections, greater detail on these single pole wire geometry on the temperatures recorded
various techniques, along with the significance of their during wet and dry high efficiency deep grinding (HEDG)
measuring capabilities, is provided. of soft steel [21], for three different formations of hot
Outwater and Shaw [149] used the tool-grit dynamic junctions, namely a wire (25 μm in diameter), a thin foil
thermocouple consisting of a grinding wheel (vitreous (10 μm by 15 μm) and thicker strips (widths ranging from
bonded silicon carbide) and a workpiece. To overcome 18 μm to 50 μm and breath of 750 μm). Under dry
high impedance while capitalizing on high thermoelectric conditions, all three provided similar results, but under
power, it was necessary to use a vacuum-tube voltmeter wet conditions the thicker strips provided the most
to record voltage/temperature variations. Their system reliable readings. Other researchers have implemented
was calibrated in a furnace reaching temperatures of this technique to evaluate grinding processes, [99, 174,
1600 ºF (871 ºC) and measured against a chromel- 175], such as in Davidov [43], who inserted a single pole
alumel thermocouple. While conducting tests on a variety thermocouple into a grinding wheel.
of metals, and recording grinding temperatures up to Nee and Tay [137] presented a version of the grindable
6000 ºF (3316 ºC), they found that they were able to thermocouple, whereby, instead of one insulated wire
extrapolate the calibration curve outside the measured plus workpiece acting as the other ‘wire’, two standard
range. They speculated that the measurements thermocouple wires are placed between a split workpiece
corresponded to the mean temperatures of several grits and separated from each other by thin insulating mica
and were thus lower than true peak temperatures. A sheets. The advantage of this system is that calibration
microstructure analysis of the ground surfaces led them is easier than with Peklenik’s original configuration.
to conclude that while temperatures were high, a high Calibration and initial testing with a hot slider gave a time
rate of heat dissipation also occurred. König and Lowin constant of 3.4 ms. Dry grinding tests on mild steel with
[87] developed this method further. silicon carbide wheels determined that table/workpiece
Newer research focuses on a type of dynamic speed had the greatest influence on temperature
thermocouple (grindable thermocouple), embedded in the followed by depth of cut and wheel speed. Maximum
workpiece. The hot junction is formed when the grinding recorded temperatures were approximately 2300 ˚C.
wheel brazes two embedded wires together or brazes a Rogov et al. [172] applied this two pole technique to fine
single wire to the workpiece. Various configurations are grinding of glass. Thermocouple wires were embedded in
summarized in [21] and [200]. K8 optical glass, with the hot junction formed between
the wires and the wheel. They found that maximum
The first single wire grindable thermocouple, presented material removal rate and smoothest surface were
by Peklenik in 1957 [151, 152], consisted of a 0.2 mm obtained when running under the hottest conditions, high
-594-
load and minimum coolant volume. The maximum full field IR to evaluate thermal gradients arising during
temperatures were on the order of 190˚C. grinding. Their camera was Indium antimonide-based,
Brinksmeier et al. [34] evaluated the capabilities of three with a field of view of 6.7 mm by 6.7 mm, pixel resolution
type-K thermocouple (chromel-alumel) pairs, separated of 52.5 μm and an integration time of 0.15 ms. Krylon
by an insulating layer embedded in the grinding wheel, to ultra flat mat paint was used to improve workpiece
record grinding temperatures. Each pair differed in its emissivity. The system was calibrated from room
physical form, with the thin film sensor thermocouple temperature to 400˚C with an E-type thermocouple
having the shortest response time. This sensor was attached to painted plate. In addition to recording the IR
made up of layers of Chromel and Alumel separated by a variations emitted from the side of the workpiece they
layer of SiON, deposited on silicon by evaporation incorporated a dynamometer into their experimental
techniques (Figure 23). The sensor signal was setup. Results obtained during dry cut grinding with CBN
transmitted by wireless means to a data acquisition and AL2O3 wheels correlated with their heat partition
system at a rate of 40 kHz. While this type of model. Due to camera resolution, the experiment did not
thermocouple has very short response times, it has not capture the thermal gradients within 100 μm of the
been fully calibrated. Nevertheless its potential is highly surface.
apparent. Hwang et al. [76, 77] used a high speed InSb detector
-595-
Location of the introduction of chemical mechanical planarization (CMP)
thermal joint Workpiece into the IC manufacturing line in 1989, there has been a
welded during resurgence of interest in material removal mechanisms
grinding Pt - wire (diameter
0.2mm) coated in and process control methods that might lend themselves
insulating synthetic to process automation. This has spurred further scientific
resin. Inserted in a
hole of approx. study, with the majority of the research in this area
0.25mm in diameter focused on understanding global polishing temperatures.
No research directed at determining polishing flash
Workpiece temperatures has yet been conducted, but is an area
with embedded deserving of further research.
thermocouple
Grinding wheel Sugimoto et al. [194], utilized thermocouples to study
wafer pad polishing. They attached two thermocouples to
Preamplifier the back of a silicon wafer (one at the center and one at
the edge), on the assumption that because of the high
RC Generator
Film to thermal conductivity of silicon, these temperatures would
record be indicative of those at the wafer pad interface.
Cathode ray output
oscillograph Maximum temperatures recorded for the polishing of
oxide coated wafers with the slurry supplied at 8 ºC, was
Figure
Figure 22:
22: Schematic
Schematic of of Peklenik’s
Peklenik’s Thermocouple
Thermocouple [151]. about 24 ºC.
[137].
Wang et al. [222], used a non contact infrared thermal
sensor to assess the temperature of a polishing pad
exiting out from under a tungsten coated wafer. The
sensor operated in the 7 μm to 14 μm range. The
temperature recorded at exit served to isolate the end
point of the polishing process, reached when the blanket
layer of tungsten is removed. When this occurs, the heat
generated by friction and the exothermic reaction cause a
noticeable change in recorded temperature, with maxima
on the order of 75 ºC.
Stein et al. [188, 189] measured the point where the pad
Figure
Figure 23:
23: Thin
Thin film
film thermocouples
thermocouples integrated
integrated into
into exits the tungsten coated wafer, using an infrared sensor.
grinding wheel,wheel,
grinding Brinksmeier et al.[29].
Brinksmeier et al.[33]. They performed several tests covering a wide range of
process parameters and consumable types. They
reported maximum detected temperatures of less than 60
ºC, but did not describe calibration. White [226], Lin
[112] and Hocheng [69] also used thermal imaging
cameras with large fields of view to look at the pad
temperature exiting the wafer in CMP.
Mullany [131], capitalized on the transmission of silicon at
certain wavelengths, to study the temperatures at the
wafer pad interface during CMP. She used an HgCdTe
camera with a large field of view, and an operating
bandwidth of 2.0 μm to 5.6 μm. By modifying the CMP
configuration to expose the back of the wafer, she was
able to observe thermal gradients at the pad-wafer
interface [131] (Figure 26). Thermal fields were mapped
using a heated water bath whose temperature was
monitored with a thermocouple. Results of this work
provided a unique insight into how process parameters
Figure
Figure 24:24: Experimental
Experimental setup
setup forfor thermal
thermal imaging
imaging with and polishing pad properties influence thermal gradients
withThermovision
AGA AGA Thermovision
750 and750 and videorecording
videorecording equipment and maximum process temperatures. Maximum
equipment Sony-matic;
Sony-matic; IR camera
IR camera traveling traveling
with with
the table [88]. temperatures while polishing blanket oxide wafers were
the table [79]. around 28 ˚C.
4.6 Electro-Discharge Machining
Output Voltage
h: indicative of temperature
l l: intervals between grains Process temperatures during electro-discharge
b: size of cutting grain machining (EDM) have not been extensively measured,
and the lack of experimental data is certainly correlated
h to the measurement challenges, most notably the very
high temperatures, short discharge durations, small
b Time (ms) electrode gaps and the presence of a dielectric fluid.
Metallurgical examination of the workpiece surface after
Figure
Figure 25:25: A typical
A typical output
output voltage
voltage signal
signal obtained
obtained by EDM has given insights with respect to the magnitude
by measuring
measuring the radiance
the radiance emittedemitted by the abrasive
by the abrasive particles and gradients of the temperatures experienced by the
particles
as as from
the exited the exited from zone,
the grinding the grinding zone,
Ueda [207]. workpiece [215]. In 1995, Albinski et al. [5] assessed
Ueda [184]. plasma temperatures by measuring the intensity of the
Fe I line spectrum emission. The intensity of the emitted
Beilby [187], researchers have wondered if the radiation at two different wavelengths (411.854 nm and
magnitude of the flash temperatures occurring in glass 413.206 nm) was captured by monochromators and
polishing can cause localized melting of the glass. photomultipliers. The relative intensities were then used
However, few measurements were made. With the to estimate plasma temperatures to be in the range of
8,000K to 10,000K. Kloche et al. [84] also measured the
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Table 1 : Comparison of methods.
Method
RTD Thermo- Dynamic Single-Color Two-Color Thermo-
couple Thermo- Pyrometer Pyrometer physical
couple
Temperature Range Metal 0ºC- Work 20ºC- 0ºC-5000ºC+ Ttrans
Melting 3000ºC Melting 5000ºC+
Spatial Resolution 500 Pm >500 Pm Interface 5 Pm (T 20 Pm 100Pm
*10 Pm
Properties
Average dependent)
radiation emitted from the discharge zone, using a high [143] presented a similar technique, but did not take wire
speed framing camera that consisted of a macro lens, a wear and impulse frequencies into consideration. They
beam splitter and three CCD cameras. The CCD estimated a time-averaged wire temperature of less than
cameras were each fitted with different filters, ranging 100 ˚C. Using the above methodologies, wire
from 450 nm to 700 nm. The system was calibrated and temperatures reported are all lower than those typically
the cameras characterized against a tungsten lamp at causing wire rupture. However, for more accurate
temperature of 3000K. The emission intensities were measurements, it is necessary to also include effects of
recorded during 3μs time intervals and were used to both wire wear and of process impulse frequency.
solve a modified Max Planck equation for the process 5 COMMENTARY ON MEASUREMENT PRACTICES
temperatures. The values obtained ranged widely from
4742K to 6426K, probably owing to blackbody Because of its relationship to workpiece quality and wear,
assumptions and inconsistencies between sequential as well as to the scientific aspects of tooling, the
discharges, necessarily affecting many input parameters. measurement of temperature during material removal
processes is being aggressively pursued, but mostly in
Wire EDM relies on a thin wire (approximately 250 μm the purview of established methods. However, in some
diameter) to carry pulses of current to the workpiece. cases, such as with wire-EDM, milling and drilling, new
While many sources of wire breakage are understood, methods are being devised that can circumvent some
the role that temperature plays in the process is not measurement difficulties.
completely clear. Due to the difficulty in accessing the
wire during machining, alternatives to the temperature Despite this new work and data, one must still depend
measurement techniques outlined in Section 3 have been largely on information available in the current literature,
developed. For example, Kunieda et al. [98] make use of where the chances that published data can match an
how wire temperature affects specific resistance to exact experimental or shop floor situation are very low,
compute wire temperature. That is, by knowing these considering that even small changes in process
values, and by measuring the changes in the ratio of the parameters, materials, tooling etc., can lead to large
total current to the current carried in the different sections uncertainties. An example of this, with a few exceptions,
of the wire EDM circuitry, it is possible to calculate the is in the case of orthogonal turning where trends agree,
temperature of the wire. Peak temperatures recorded by but agreement between experiments in the literature is
this technique were on the order of 180 ˚C. Obara et al. hard to establish since each measuring environment is
slightly different. Another observation is that combined
standard uncertainties are rarely reported, and when
reported, they all too often correspond to manufacturer
quoted uncertainties. These tend to be artificially low
because they apply to instruments under the best
calibration conditions, and not for those encountered in
most material removal processes. However, what we can
say is that combined uncertainties in any reported
process measurement are likely to be within ±10%, at
best, and that is our educated estimate based on
experience, both in the shop and with published studies.
The value of this information from the perspective of
process predictions is in regard to simulation, where one
can say that if the simulation does not agree to within
±10% of the most well controlled measurements, then the
methodology and/or the input data may be in error.
Modern methods of temperature measurement
Figure 26: Infrared polishing measurements of accommodate ever higher bandwidths in tandem with
Mullany et al. [131]. higher resolution. Additionally, it is now possible to utilize
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