Vimal Jyothi Engineering College DEPARTMENT OF

MECHANICAL ENGINEERING

MICRO AND NANO MANUFACTURING (MET464)

Syllabus

Module 2

Introduction to Non-conventional micro-nano manufacturing: Abrasive Jet Micro-machining,

WAJMM- principle, process and applications. Micro EDM, Micro WEDM, Micro EBM- principle,
process and applications. Micro ECM, Micro LBM, Focused Ion Beams- process, principle and
applications. Micro moulding processes: Injection moulding, Reaction injection moulding, hot
embossing, injection compression moulding- micromolding tools-applications.
Module 3

Introduction to micro-nano finishing processes: Magnetorheological Finishing (MRF) processes,

Magneto-rheological Abrasive Flow Finishing (MRAFF) processes- Principle, equipment and
applications- Force analysis for MRAFF process. Magnetic float polishing (MFP), Elastic Emission
machining (EEM), Ion Beam Machining (IBM), Chemical Mechanical Polishing (CMP)- principle,
equipment and applications

Q bank
1. What is hot embossing? Why is it particularly suited for manufacturing of optical components?

Hot embossing is a microfabrication technique used to transfer a pattern or structure onto a

thermoplastic material by applying heat and pressure to a mold. The process involves heating the
thermoplastic material above its glass transition temperature, placing a mold with the desired pattern
or structure on top of the material, and applying pressure to transfer the pattern or structure onto the
material. After cooling, the mold is removed, leaving the pattern or structure on the material.
Hot embossing is particularly suited for the manufacturing of optical components because it allows
for the precise replication of microscale features with high fidelity and accuracy. The technique is
capable of producing structures with sub-micron resolution and high aspect ratios, which are critical
for many optical applications, such as diffractive optical elements, micro lenses, and gratings.

2. List out the applications of Micromolding

• Micro molding has been employed to fabricate a variety of polymer components. Most applications
are in the field of micro-optics and micro-fluidics, but there are also some examples of micro-(and
nano) electrical and mechanical devices.
• The most widely solid micromolding product probably is the well known CD and DVD for data storage,
music, and videos.
• Another application is the hologram that is attached to a credit card.
• Other molded microoptical components include spectrometers.
• Optical switches, Optical fiber components, Waveguides.
• anti- reflective surfaces, optical gratings, and photonic structures.
• There is a variety of molded microfluidic devices, such as pumps, valves, nebulizers, ink jets,
degassers for HPLC systems, capillary analysis systems devices for investigations of living cells,
pressure sensors and flow sensors.
 • Prospective applications of thermo-plastic molding also lie in electronics.
• One of them is nano imprinting which may allow for the low-cost replication of electronic
circuits with critical dimensions as small as 10 nanometers

3. What is the principle of Abrasive jet machining? Explain with diagram.

Ans:

It is the process of removal of materials by impact erosion through the action of a

concentrated, high velocity of the grit abrasives entertained in a high velocity gas
stream.

• In this process, a gas (nitrogen or carbon dioxide or air), is supplied under

pressure (2-8kg/sq.cm) is supplied and after filter and regulator, it is passed to a
mixing chamber (containing abrasive particles) vibrating at 50c/sec.

• From the mixing chamber , the gas along with the abrasive particles of size 10-
50 micro-mt. passes on to a nozzle having its tip of tungsten carbide and
diameter around 0.45mm , with a velocity of 150-300m/sec.

• The air consumption is of the order of 0.6 cum/ hr.

• The nozzle tip distance is of the order of 0.81mm

• The abrasive powder feed rate is controlled by the amplitude of vibration of the
mixing chamber.

• The relative motion between the nozzle and the work piece is obtained by cams,
pantographs to control size and shape of cut.
 • Dust removal equipment is also incorporated to protect the environment.

4. What are the merits, demeris and application of AJMM?

Ans:

ADVANTAGES

• Ability to cut fragile, brittle or heat sensitive material without damage.

• Ability to cut intricate holes in materials of any hardness.
• Low capital cost.
• Can cut materials without damage because there is no heating of the working
surface.\

DISADVANTAGES

• Slow material removal rate.

• Low accuracy (0.1mm) due to stray cutting.
• Abrasives get embedded on the material surface, if it is soft.
• Abrasives powder cannot be refused

APPLICATION

• Used for abrading and frosting glass more economically as compared to etching
or grinding.
• For cleaning of metallic smears on ceramics, oxides on metals, resistive
coatings, etc.
• Cutting and machining of fragile material like Ge, Si, etc.
• For deburring small hole in hypodermic needles and for small milled slots in
hard metallic components.
• Register treaming can be done very easily and micromodule fabrication for
electrical contact, semiconductor processing can also be done effectively.
4 . Write a note on water abrasive jet machining.

Ans: WATER ABRASIVE JET MACHINING :

• An unconventional machining process.

• It is the process of removal of materials by impact crosion through the action of a
concentrated, high velocity of the grit abrasives entertained in a high velocity gas
stream.
• In this process, a gas (nitrogen or carbon dioxide or air), is supplied under
pressure (2-8kg/sq.cm) is supplied and after filter and regulator, it is passed to a
mixing chamber (containing abrasive particles) vibrating at 50c/sec.
• From the mixing chamber, the gas along with the abrasive particles of size 10-50
micro-mt. passes on to a nozzle having its tip of tungsten carbide and diameter
around 0.45mm, with a velocity of 150-300m/sec.
• The air consumption is of the order of 0.6 cu m/hr. The nozzle tip distance is of
the order of 0.81mm.
• The abrasive powder feed rate is controlled by the amplitude of vibration of the
mixing chamber.
• The relative motion between the nozzle and the work piece is obtained by cams,
pantographs to control size and shape of cut.
• Dust removal equipment is also incorporated to protect the environment.

APPLICATION :

• Used for abrading and frosting glass more economically as compared to etching
or grinding.
• For cleaning of metallic smears on ceramics, oxides on metals, resistive coatings,
etc.
• Cutting and machining of fragile material like Ge, Si, etc.
• For deburring small hole in hypodermic needles and for small milled slots in hard
metallic components.
• Register treaming can be done very easily and micro module fabrication for
electrical contact, semiconductor processing can also be done effectively.
 ADVANTAGES OF THE PROCESS:

• Ability to cut fragile, brittle or heat sensitive material without damage.

• Ability to cut intricate holes in materials of any hardness.
• Low capital cost.
• Can cut materials without damage because there is no heating of the working
surface.

DISADVANTAGES OF THE PROCESS :

• Slow material removal rate.

• Low accuracy (0.1mm) due to stray cutting.
• Abrasives get embedded on the material surface, if it is soft.
• Abrasives powder cannot be refused.

5. Explain the process of micro EDM in detail.

Ans: MICRO EDM

• Micro-EDM is a process based on the thermoelectric energy between the

workpiece and an electrode.
• Micro-EDM is a newly developed method to produce micro-parts which in the
range of 50 μm -100 μm
• Micro-EDM is an efficient machining process for the fabrication of a micro-
metal hole with various advantages resulting from its characteristics of non-
contact and thermal process.
• A pulse in a small gap between the work piece and the electrode and at the same
time removes the unwanted material from the parent metal through the process
of melting and vaporization.
• EDM is a process that provides an alternative method to produce
microstructures.
 • It is also states that the micro EDM is similar to the principal of macro EDM
where the process mechanism is based on an electro-thermal process that relies
on a discharge through a dielectric in order to supply heat to the surface of the
work piece.
• The current causes the heating of the dielectric, the work piece, and the
electrode.
• The dielectric forms a channel of partially ionized gas.
• The discharge power is dissipated in the plasma channel with amount between
2% and 10%.
• The channel acts as a heat source on the surface of the work piece.
• Then the work piece is locally heated beyond its melting point and removed
after the material ejected solidifies within the cooler dielectric medium.

APPLICATIONS OF MICRO-EDM :

1. Die Making -Dies are tools used to cut or shape materials into a solid product.
EDM is used to create these dies, despite the size or commonness of the shape
needed.
2. Mold Making -Molds are containers that transform liquid or substance into the
shape of the container. A mold's dimension and depth is achieved with use of
EDM.
3. Hole Drilling - Without EDM, drilling small holes would be difficult. EDM's
ability to create small shapes accurately makes it ideal for drilling the exact size
of holes needed.

5Q. Mention the advantages, disadvantages and applications of micro EDM.

Ans: ADVANTAGES

➢ Because of the absence of the split lines in the die, savings of the stages in the
sequential Tools occurs. It permits more punch opening per stage.
 ➢ There will no flashes on the molded parts because the molds with draught can be
Arranged without vertical divisions.
➢ To necessity for tool manufacturing and storing.
➢ Work pieces are hardened before cutting. So no heat treatment distortion is
present.
➢ Whole work is done in one machine. So die manufacturing cycle time is short.
➢ Lesser inspection time because of single piece construction of dies with high
accuracy.
➢ Time is utilized perfectly as the wire cut EDM can cut throughout the day.
➢ Very economical even for small batch production.
➢ Low thermally affected zone. High surface finish.
➢ Numbers of rejected work pieces are very small.

DISADVANTAGES

➢ Material to be machined must be electrically conductive

➢ Rapid electrode wear can become costly
➢ Electrodes smaller than .003 in. in diameter are impractical
➢ The power required for machining is much higher compared to the conventional
Machining. (120J/mm2)
➢ There are chances of surface cracking when the materials become brittle at room
Temperature.
➢ A thin layer usually ranging from 0.01 mm to 0,10 mm containing 4 % carbon
may be Deposited on the work piece made of steel.

APPLICATIONS

➢ Die Making: Dies are tools used to cut or shape materials into Solid product.
EDM is used to create these dies, despite The size or commonness of the shape
needed.
➢ Mold Making: Molds are containers that transform liquid or Substance into the
shape of the container. A mold’s Dimension and depth is achieved with use of
EDM.
➢ Small Hole Drilling: Without EDM, drilling small holes would be difficult.
EDM’s ability to create small shapes accurately makes it deal for drilling the
exact size of holes needed.
 ➢

6Q. What do you mean by wire EDM. Explain the process?

Ans:

Wire electrical discharge machining (EDM) is a process of metal machining in which a

tool Discharges thousands of sparks to a metal work piece. A non-conventional process,
wire EDM Works on parts resistant to conventional machining processes, but only if
these parts are Electrically conductive; usually, they are non-ferrous, and include steel,
titanium, super alloys, Brass, and many other metals. Instead of cutting the material,
EDM melts or vaporizes it, leaving Little debris and providing a very accurate line.
Industry-wide acceptance has led to a wide Variety of EDM applications, as it is highly
versatile, can cut hard metals, and utilizes a relatively Compact amount of workspace.

Wire electrode methods can cut complicated shapes like a wire sawing machine.
Normally the Wire electrode is brass wire or coated steel wires but in case of thin wires
tungsten or Molybdenum wires are used. Since we can change the orientation of the
wire by controlling the Horizontal position of the upper wire guide relative to the lower
guide all types of surfaces can be Cut. Discharge current with a high peak value over a
short duration of time are used, both the Upper and lower feeding brush are supplied
 with current to obtain a quick rise in the discharge Current by reducing the inductance
in order to avoid breakage due to Joule heating. To reduce Vibration and deflection
tension is applied to the wire resulting in deteriorated cutting accuracies. Water is the
most often used as the dielectric liquid but its specific electrical conductivity should Be
decreased using de-ionizing resins to avoid electrolysis and to keep high open voltage.

A very thin wire of diameter is used as an electrode in wire cut EDM. It cuts the
workpiece with Electrical discharge just like a band saw. In this process either
workpiece or the wire is moved. The spark discharge phenomenon is used for eroding
the metal which is same as the Conventional EDM. In wire cut EDM the wire acts as an
electrode as a result complicated shapes Can be cut easily without forming electrode.
Basically the wire-cut EDM consists of a machine Which has a workpiece contour
movement control unit (NC tension: a power supply which Supplies electrical energy to
the wire and has a unit). It also has workpiece mounting table and a Wire driver section.
The wire driver section is use for moving the wire accurately at a constant Tension.
Another important part is the dielectric fluid (distilled water) supplier having constant
Specific resistance. Wire EDM has the following features

a) No forming electrode is necessary.

b) Electrode wear is very negligible.

c) Smooth machined surface.

d) Tight geometrical and dimensional tolerances .

e) Extremely high tolerances between punch and die. Extended die life.

f) Straight holes are possible to produce.

g) Machine can be operated without any regular supervision for long time at high
operating Rates.

h) No skill is needed to run the machine.

7Q. Mention the advantage, disadvantage and application of wire EDM process?

Ans: ADVANTAGE
 1) Hard & tough metals can be machined with better surface finish.
2) Complex & internal shapes can be machined.
3) No cutting force due to no contact b/w metal and w/p.
4) The surface finish is non-directional.
5) No effects of material hardness and tool wear.
6) Tolerance up to 0.4 micro meter is achieved.
7) Secondary finishing operation can be neglect.
8) No need of Heat treatment before machining.

DISADVANTAGE

1) Low MRR.
2) The w/p must be electric conductor.
3) The surface after machining is highly stressed.
4) Machining time is too long.
5) Specific power consumption is too high.
6) Excessive tool wear.

APPLICATION

1) It is used in the production of die for fabrication of all components.

2) EDM can be used in manufacturing of hydraulic valve spools, gear wheels, fine holes
or slots in hard blade materials used in gas turbines, compressors, diesel engines etc.
3) It is used in fabrication, extrusion, blanking, stamping and embossing dies.
4) It is also used for removal of drill and tapes from components.

8Q. What is the principle of EBM?

Ans. Principle of EBM

The EBM works on the principle that when a high beam of electron strikes a work
piece, the kinetic energy of the electrons is converted into heat energy and this
concentrated heat energy raises the temperature of the part of the work piece at which
the electron beam strikes and that part of the work piece are vaporized and removed
from the work piece. In this way, the material is removed from using the EBM process.
 9Q. Explain in detail the micro EBM process.

Ans:

• It is a type of thermal micromachining processes.

• It uses a high-velocity stream of electrons focused on the workpiece surface to
remove material by melting and vaporization.

Mechanism of Material Removal in EBM

• An electron beam gun generates a continuous stream of electrons.

• This stream of electrons is then forced through a valve that controls the beam.
• After passing through valve, the beam is then focused onto the surface of the
workpiece.
• The kinetic energy of the high velocity electrons is converted to heat energy as
the electrons strike the work material.
• By this heat material is removed and vaporized.
 Electron Beam Machining – Equipment

• The basic functions of any electron beam gun are to generate free electrons at the
cathode, accelerate them to a sufficiently high velocity and to focus them over a
small spot size. Further, the beam needs to be maneuvered if required by the gun.
• The cathode is generally made of tungsten or tantalum. Such cathode filaments are
heated, often inductively, to a temperature of around 2500˚C.
• Such heating leads to thermo-ionic emission of electrons, which is further enhanced
by maintaining very low vacuum within the chamber of the electron beam gun.
 • Just after the cathode, there is an annular bias grid. A high negative bias is applied
to this grid so that the electrons generated by this cathode do not diverge and
approach the next element, the annular anode, in the form of a beam.
• The annular anode now attracts the electron beam and gradually gets accelerated. As
they leave the anode section, the electrons may achieve a velocity as high as half the
velocity of light.
• After the anode, the electron beam passes through a series of magnetic lenses and
apertures. The magnetic lenses shape the beam and try to reduce the divergence.
Apertures on the other hand allow only the convergent electrons to pass and capture
the divergent low energy electrons from the fringes.
• Then the electron beam passes through the final section of the electromagnetic lens
and deflection coil.
• The electromagnetic lens focuses the electron beam to a desired spot. The deflection
coil can maneuver the electron beam, though by small amount, to improve shape of
the machined holes.
• Work piece is mounted on a CNC table so that holes of any shape can be machined
using the CNC control and beam deflection in-built in the gun.

PROCESS PARAMETERS

10Q. Enlist the merits, demerits and applications of EBM.

Ans:

Merits

▪ EBM can effectively cut very thin holes of large aspect ratio. It can cut almost any
programmable hole shape.
▪ It can use for machining of both metal and non-metal.
▪ EBM is precise and distortion free. It can achieve micro finishing.
▪ EBM does not apply direct force/ pressure on workpiece, so brittle and fragile
material can be machined without the danger of fracture.
▪ It is used to the machining of highly reactive metals under vacuum.
▪ EBM can be used to cut holes and slots in metal, ceramic, plastic etc.
▪ Single step process.
▪ Very low tool wear.
Demerits

▪ EBM is expensive; it involves high capital cost. Maintenance cost is also high.
▪ Vacuum must be provided to reduce contamination.
▪ The EBM requires a vacuum. The time need for evacuating chamber is also included
in the time of manufacturing.
▪ Since EBM is done in a vacuum, there is a limit to the size of components to be
handling.
▪ Even though the shorter pulse reduces the heat effecting zone, there is still some
thermal effect may remain in the machined edges.
▪ The metal removal rate is very low when compared to other methods.
▪ A highly skilled operator is required.
Application

• Machining of titanium aircraft engine parts.

• Drilling fine holes (less than 50 μm)
• Cutting contours in sheets
• Cutting narrow slots (25μm)
• Medical and electronics industries
 11Q. What is the principle of ECM?

Ans:

Electrochemical Machining (ECM) is one of the newest and most useful non-traditional
machining (NTM) process belonging to Electrochemical category. Electrochemical
machining (ECM) is used to remove metal and alloys which are difficult or impossible
to machine by mechanical machining process. It is the reverse of electroplating. This
machining process is based Michael Faraday’s classical laws of electrolysis, requiring
basically two electrodes, an electrolyte, a gap and a source of D.C power of sufficient
capacity.

Fig: Schematic illustration of electrochemical machining

Electrolysis Process

The elements of ECM include :

1. Electrolyte

2. Tool (cathode)

3. Work-piece (anode)

4. D.C power suppl

In the electrolytic circuit the electron is flowing from the work-piece through the power
supply to the tool.

The electrolysis process that takes place at the cathode liberates hydroxyl ions(OH-) and
free hydrogen.

❖ The hydroxyl ions combine with the metal ions of the anode to form insoluble metal
hydroxides and material is thus removed from the anode.

❖ At cathode, the following reactions takes place: 1. M++ e- M(M denotes metal)

2. 2H++ 2e- H2(Hydrogen evolution)

❖ At anode, the following reactions takes place with a halogen electrolyte:

1. M M++ e-(Metal dissolution)

2. 2H2O O2+ 4H++ 4e-(Oxygen evolution) 3. 2Cl- Cl2+ 2e-(Halogen gas evolution) ❖
As an example, in machining of iron in NaCl electrolyte, at the cathode the reaction
products are FeCl2, Fe(OH)2, Fe(OH)3 which forms a layer and this is how iron is
removed by electrolytic action.

❖ Current of 1000 A would dissolve iron at the rate of about 15 g/min and generate
hydrogen at a rate of about 300 cm3/min.

12Q. Enlist the merits, demerits and applications of ECM.

Ans: Advantages

• There is no cutting forces therefore clamping is not required except for controlled
motion of the work piece.
• It can machine configurations which is beyond the capability of conventional
machining processes.
• Very accurate (tolerance of ±0.02 mm).
• Relatively fast.
• Can machine harder metals than the tool.
• Extremely thin materials can be easily worked without distortion.
• Tool wear is nearly absent.
 • Better surface finish (0.2 to 0.8 micron).

Disadvantages

• High energy consumption.

• Non conducting material cannot be machined.
• Corrosion and rust of ECM machine can be hazardous but preventive measures can
help in this regard.

Application

• The most common application of ECM is high accuracy duplication. Because there
is no tool wear, it can be used repeatedly with a high degree of accuracy.
• It is commonly used on thin walled, easily deformable and brittle material because
they would probably develop cracks with conventional machining.
• It is used in machining of hard-heat-resisting alloys.
• It is used in cutting cavities and holes in various products, machining of complex
external shapes like that of turbine blades, aerospace components and machining of
tungsten carbide and nozzles of alloy steels.
• Any conducting material can be machined by this method.

13Q. Explain in detail the micro ECM process ?

Ans: Micro Electro-Chemical Machining

EMM

• Material removal of small dimensions

• Ranges from several microns to millimetres
• For production of miniaturized parts and components

When electrochemical machining process is applied to micro -machining range (i.e.,

from 0.1 μ m to 1 mm) for manufacturing ultra-precision shapes, it is called
electrochemical micromachining(EMM).
Sub system for EMM setup
 Applications of EMM for Micro fabrication
• Nozzle plate for Ink Jet Printer Head
• Production of High Accuracy Holes
• 3D Micromachining

14Q. Explain in detail the micro LBM process ?

Ans: MICRO LBM

Laser beam machining (LBM) is a non-conventional Machining manufacturing process,

a form of machining, in which a laser is directed towards the work piece for machining.
This process uses thermal energy to remove material from metallic or non-metallic
surfaces.
Micromachining can be realized by laser beam machining (LBM), when the highly
coherent beam of electromagnetic radiation with wavelength varying from 10.6 μm for
CO2 laser to 157 nm for a fluorine excimer laser is focused to a small spot and produces
high-density power, which causes rapid heating, melting, and evaporation of molten
metals. Laser micromachining is characterized by short pulse length from the
millisecond range for micro welding to the pico- and even femtosecond range for
ablation of metals. Neodymium-doped yttrium aluminium garnet (Nd:YAG) laser can
machine high-precision micro holes in hard materials such as metal and diamond,
whereas excimer lasers are mostly used for ceramic and composites. CO2 laser is
capable of drilling micro holes in very thin material with higher production rate.
Microelectronics and other particle-sensitive surfaces are cleaned effectively by 248-nm
excimer laser pulse of 350 mJ/cm2. Excimer laser is also capable of producing fine
surface structure on small parts. Q-switch Nd:YAG and excimer laser are used for
surface structuring and texturing on moulds and dies for producing cosmetically
attractive surface on plastic consumer products. However, the formation of a
resolidified layer and an HAZ is inevitable. Micro holes and slits of medium precision
with various cross-sections, but with low aspect ratio ranging from 1 to 2, are the main
products. Since a high-power generator is available, the machining performance of
femtosecond laser is considered to be the highest among the available laser
micromachining methods. Excimer and femtosecond lasers are preferred, to avoid
resolidified layer and HAZ on the machined surface.

15Q. What are the merits, demerits and applications of LBM?

Ans: LBM stands for laser beam machining.

Advantages

• Since the rays of a laser beam are monochromatic and parallel (i.e. zero etendue)
it can be focused to a small diameter and can produce as much as 100 MW of
power for a square millimeter of area.
• Laser beam machining has the ability to engrave or cut nearly all materials,
where traditional cutting methods may fall short.
• There are several types of lasers, and each have different uses.
• The cost of maintaining lasers is moderately low due to the low rate of wear and
tear, as there is no physical contact between the tool and the workpiece.
• The machining provided by laser beams is high precision, and most of these
processes do not require additional finishing.
• Laser beams can be paired with gases to help the cutting process be more
efficient, help minimize oxidization of surfaces, and/or keep the workpiece
surface free from melted or vaporized material.

Disadvantages

• The initial cost of acquiring a laser beam is moderately high. There are many
accessories that aid in the machining process, and as most of these accessories
are as important as the laser beam itself the startup cost of machining is raised
further.
• Handling and maintaining the machining requires highly trained individuals.
Operating the laser beam is comparatively technical, and services from an expert
may be required.
• Laser beams are not designed to produce mass metal processes.
• Laser beam machining consumes a lot of energy.
• Deep cuts are difficult with workpieces with high melting points and usually
cause a taper.

Application

• Lasers can be used for welding, cladding, marking, surface treatment, drilling,
and cutting among other manufacturing processes. It is used in the automobile,
shipbuilding, aerospace, steel, electronics, and medical industries for precision
machining of complex parts.
 • Laser welding is advantageous in that it can weld at speeds of up to 100 mm/s as
well as the ability to weld dissimilar metals. Laser cladding is used to coat cheap
or weak parts with a harder material in order to improve the surface quality.
Drilling and cutting with lasers is advantageous in that there is little to no wear
on the cutting tool as there is no contact to cause damage.

• Milling with a laser is a three dimensional process that requires two lasers, but
drastically cuts costs of machining parts. Lasers can be used to change the
surface properties of a workpiece.

• The appliance of laser beam machining varies depending on the industry. In

light manufacturing the machine is used to engrave and to drill other metals. In
the electronic industry laser beam machining is used for wire stripping and
skiving of circuits. In the medical industry it is used for cosmetic surgery and
hair removal.

16Q. Explain in detail the machining process done by focused ion beams?

Ans:

Focused ion beam, also known as FIB, is a technique used particularly in the
semiconductor industry, materials science and increasingly in the biological field for
site-specific analysis, deposition, and ablation of materials. A FIB setup is a scientific
instrument that resembles a scanning electron microscope (SEM). The machining
process done in FIB are FIB imaging ,milling and deposition.

Imaging

Imaging. Imaging is achieved when the fine ion beam is raster scanned over a
substrate. High-
Imaging is achieved when the fine ion beam is raster scanned over a substrate. High-
spatial-resolution images can be obtained from the secondary electrons . In
crystalline materials like aluminium and copper, the ion penetration depth varies due to
channelling along open in the lattice structure. The depth of the penetration of the
channelled incident ion varies with the relative angle between the ion beam and the
lattice plane and the interplanar spacing of the lattice . Since the secondary electron
 emission rate depends on the penetration depth, FIB can be used to image crystal grains,
revealing different crystal orientations.

Milling. The removal of sample material is achieved using a high ion current beam. By
scanning
Milling

The removal of sample material is achieved using a high ion current beam. By scanning
the beam over the substrate, an arbitrary shape can be etched, whereby physical
sputtering of the sample material occurs. The milling process speed can be
increased by using an etching gas Xenon difluoride (XeF2) into the work chamber
during milling. It will increase the etching rate and the selectivity towards different
materials by chemically facilitating the removal of reaction products. The technique
is called gas-assisted etching (GAE).

Deposition. FIB allows the localized maskless deposition of metal and insulator
materials known
Deposition

FIB allows the localized maskless deposition of metal and insulator materials known as
chemical vapour deposition (CVD). The main difference is better resolution, but
lower deposition rate of FIB. The deposited material is not fully pure because organic
contaminations and Ga+ ions are inevitably included. The smallest features that can be
deposited are of the order of 100 nm (lateral dimension). The minimum thickness is
about 10 nm.

17Q. Mention the merits, demerits and applications of ion beam machining.

Ans:

Merits
 • The process is almost universal.
• No chemical reagents or etching compounds are required.
• There is no undercutting as with another chemical etching process.
• Etching rates are easily controlled.

Demerits

• It is relatively expensive.
• Etching rates are slow.
• Although virtually no heat is generated there is little possibility of some thermal
or radiation damage.

Application

• It is applied mostly in micro-machining (etching) of electronic components like

computer parts, figuring optical surfaces.
• The precision fabrication of fine wire dies in refractory materials.
• Typical materials that can be etched include glass, alumina, quartz, crystals,
silica, agates, porcelain, cermets and numerous metals and oxides.

18Q. State some advantages of micro Ion beam machining.

Ans:

Advantages

• Fabrication of Micro tools - The development of cutting tools like the diamond
cutting tool for micro- lathes and mills can be done using FIB. The dimensions
of micro cutting within the range of 15-100 µm can easily be manufactured
using FIB sputtering. Complex geometric features like tool nose radius, rake
angles, and relief angles are controlled in nm range. Variety of tool geometries
are produced with the help of FIB sputtering technique on the tool materials
such as tungsten carbide, high-speed tool steel, and single crystal diamond.
Among the three of the tool types, diamond requires 508 Advances in
Manufacturing and Materials Engineering significantly longer machining time
due to higher C-C surface bonding energy. Steel and carbide require smaller
time for shaping using the FIB fabrication process. Previous research shows that
 a 25 µm wide threading tool made up using steel or carbide can be fabricated in
3-5 hours with a 2nA ion beam.
• FIB Nanofabrication- FIB can be used to fabricate sub-5 nm feature sizes. This
is a size that is difficult to produce using standard fabrication processes. There
are methods involved to mill through thin membranes (30-200 nm). The first
method is used by milling through the membrane to make a hole otherwise done
by electron or ion beam SiO2-assisted deposition which is used to fill the hole
and reduce its diameter. The result of SiO2 ring was used to attach DNA around
the pores for biosensing. The other method is to make sub-5 nm diameter
nanopores that involve milling through the membranes and use of redeposition
to produce a cone shaped hole. Si3N4 membranes are usually used as well as the
SiC membranes. The SiC membranes were coated with metallic thin film to
balance the intrinsic stress surrounded by the membranes.
• High Aspect Ratio Microstructures - When fabricating thin-films with high
aspect ratio for micro devices, a low stress level is preferable since excessive
stress may cause in a delamination. The hole drilling method is used in order to
measure the internal stress. A circular hole is grilled in the structure under
tension to a depth equal to the hole diameter. The hole changes its diameter due
to its tensile stress and compressive stress. FIB is used to do the hole in range of
a few microns up to several ten microns into thin-films. The electroplating
process carried using high current densities which causes a high deposition rate
and internal stress.

19Q. What is micro abrasive machining?

Ans:

Abrasive Jet Micro Machining (AJMM) is a relatively new approach to the

fabrication of micro structures. It is a promising technique to three-dimensional
machining of glass and silicon in order to realize economically viable microelectro-
mechanical systems (MEMS). It employs a mixture of a fluid (air or gas) with
abrasive particles. In contrast to direct blasting, the surface is exposed completely to
the erosive action of the particle beam. Hence, before processing, the substrate
material has to be partially shielded by applying an erosion resistant mask. Only
where the mask does not protect the workpiece, material removal will take place.

This method is used for making accurate shallow holes or grooves, and, with the
use of masks, patterns on target material. The resulting erosion of the target
material can be controlled using masks and by varying parameters such as
impact angle and particle flux density, velocity, and particle properties. In
contrast to conventional micro-fabrication methods, such as wet and dry etching,
AJMM is capable of machining anisotropic patterns and suspended structures
with high erosion rate and relatively low cost. Globally, it introduces the concept
of precision machining techniques to conventional blasting through the use of
fine and hard abrasive particles, constant powder feeding devices and masking
technology.

Advantages of AJM:
(1) low capital and operating costs,
(2) environmentally friendly process,
(3) no major health hazards, and
(4) ability to machine anisotropic and suspended structures on the same
substrate.
In addition, multiple depth features can be machined on the same substrate,
unlike chemical etching whereby the entire substrate is etched at a constant rate.

Typical AJM applications include drilling, cutting and engraving of glass,

ceramics and some hard materials. It can also be used to etch labels in plastics
and metals, deburr, deflash and clean materials after conventional machining.
 Fig. Schematic diagram of AJMM

20Q. Name the properties of abrasives.

Ans:

Abrasives are substances both natural and synthetic that are used to grind, polish,
abrade, scour, clean, or otherwise remove solid material usually by rubbing action
(as in a grinding wheel), but also by impact (pressure blasting). The most important
physical properties of materials that qualify as abrasives are

i. Hardness
Hardness is a measure of the resistance to localized plastic deformation
induced by either mechanical indentation or abrasion.
ii. Toughness (or rigidity)
Toughness is the ability of a material to absorb energy and plastically
deform without fracturing. One definition of material toughness is the
amount of energy per unit volume that a material can absorb before
rupturing.
iii. Grain shape and size
 Larger particles generate higher impact force removing the material
surface quicker and producing a heavier texture. Particles with points and
edges remove surface material on impact, while round particles without
cutting edges are used to pound or “peen” a surface.
iv. character of fracture (or cleavage)
Fracture is the separation of an object or material into two or more pieces
under the action of stress. The fracture of a solid usually occurs due to
the development of certain displacement discontinuity surfaces within
the solid.
v. Purity (or uniformity)
It represents the weight of fine metal therein, in proportion to the total
weight which includes alloying base metals and any impurities.

In the final analysis, the choice of a high-grade abrasive depends upon the
quality and quantity of work performed by the abrasive per unit of cost. Initial
cost of an artificial abrasive may be much greater than that of a natural abrasive,
but the artificial mineral may do so much better work and do it so much faster
that the ultimate cost is less. It is for this reason that artificial abrasives have
largely replaced natural abrasives.

21Q. Define micro AJM

Ans:

• Abrasive Jet Micro Machining (AJMM) is a relatively new approach to the

fabrication of micro structures.
• AJMM is a promising technique to three-dimensional machining of glass and
silicon in order to realize economically viable micro electro-mechanical systems
(MEMS)
• It employs a mixture of a fluid (air or gas) with abrasive particles.
• In contrast to direct blasting, the surface is exposed completely to the erosive
action of the particle beam.
• Hence, before processing, the substrate material has to be partially shielded by
applying an erosion resistant mask.
 • Only where the mask does not protect the work piece, material
removal will takeplace.

22 Q Explain the role of carbonyl iron particles in MR finishing process

Carbonyl iron particles are also used in magneto-rheological (MR) finishing, which is a precision
surface finishing process used to achieve high levels of surface quality and accuracy on various
materials.
In the MR finishing process, a slurry of abrasive particles, including carbonyl iron particles, is
used to remove material from the surface of the workpiece. The slurry is placed between the
workpiece and a polishing tool, which is typically made of a soft material such as polyurethane.
The role of carbonyl iron particles in the MR finishing process is to provide a controllable abrasive
action. When a magnetic field is applied to the slurry, the carbonyl iron particles align themselves
with the field, forming a chain-like structure. This alignment increases the viscosity and stiffness
of the slurry, which in turn increases the abrasive action of the particles.
As the polishing tool moves across the surface of the workpiece, the carbonyl iron particles in the
slurry remove material from the surface. The magnetic field can be adjusted to control the abrasive
action of the particles, allowing for precise control of the amount of material removed and the
resulting surface finish.
In summary, carbonyl iron particles play a critical role in the MR finishing process by providing a
controllable abrasive action that results in a high-quality surface finish on the workpiece. The
ability to adjust the magnetic field allows for precise control of the abrasive action, making MR
finishing a highly effective and efficient surface finishing process.
4marks

23 Q Explain the working principle elastic emission machining with neat sketch
Elastic Emission Machining (EEM) is a non-contact precision machining process that uses
ultrasonic vibrations to remove material from a workpiece. The principle of EEM is based on the
phenomenon of elastic deformation and fracture of materials under high-frequency mechanical
vibrations.
The EEM process uses a tool called an ultrasonic horn, which is typically made of titanium or
steel, and is connected to a transducer that converts electrical energy into high-frequency
mechanical vibrations. The horn is then brought into contact with the workpiece, and a slurry of
abrasive particles and a liquid coolant is introduced between the horn and the workpiece.
As the horn vibrates at high frequency, it generates a series of compressive and tensile stresses in
the workpiece surface, which causes the material to deform elastically. When the tensile stresses
exceed the material's tensile strength, it causes small cracks to form on the surface of the
workpiece. These cracks propagate and coalesce, eventually resulting in the removal of tiny
fragments of material from the workpiece surface.
The abrasive particles in the slurry help to accelerate the material removal process by abrading the
freshly fractured surface of the workpiece. The liquid coolant helps to dissipate the heat generated
by the machining process and to flush away the debris from the machining zone.
The EEM process is capable of producing high-quality surface finishes with sub-micron precision
and can be used to machine a wide range of materials, including ceramics, metals, and composites.
The process is also suitable for machining complex shapes and features that are difficult or
impossible to produce using conventional machining processes.
4marks
 24 Q. What are the advantage and application of micro AJM process?

Ans:

Advantages

• Minimal tooling cost

• Quick turnaround for prototyping and development work
 • Feature sizes down to 100 µm and featured depths to just a few microns are
possible
• Feature location and dimensional tolerances down to +/-25 microns are possible
• Multiple features can be machined in one operation
• Very high pattern densities are possible
• Features can be of any 2D shape: square, round, designed shapes, and connected
channels
• Masks are made directly out of CAD files reducing the risk of pattern error
• The process generates no heat and does not change the material properties of the
work-piece
• Process works well with metalized parts

Applications

• Shallow depth cut on ceramic materials

• Trenches for micro-medical applications
• Mesas to reduce the surface area of chuck and other semiconductor components
• Reference cavities for pressure sensors
• Thru-holes for air and chemical flow
• Cavities for mechanical locations
• Removing flash and parting lines from injection molded parts
• Deburring and polishing plastic, nylon and teflon components
• Cleaning metallic mould cavities which otherwise may be inaccessible
• Cutting of thin sectioned fragile components made of glass, ceramics, etc.

25 Q. What are the process parameters affecting MRR in micro AJM?Ans:

1. The abrasive (composition, strength, size and mass flow rate)

Mainly five types of abrasives are used (1) Aluminum Oxide (2) Sodium Bicarbonate
(3)

Dolomite (4) Silicon Carbide (5) Glass beads. Grains with a diameter 10-50 microns are
readily available. For good wear action on the surfaces, the abrasive grains should have
 sharp edges. The mass flow rate of the abrasive particles depends on the pressure and
the flow rate of the gas. Reuse of the abrasive powder is normally not recommended
because of a decrease of cutting capacity and clogging of the nozzle orifices due to
contamination. There is an optimum mixing ratio (mass fraction of the abrasive in the
jet) for which the metal removal rate is the highest. When the mass flow rate of the
abrasive increases the material removal rate also increases.

2. The gas (composition, pressure and velocity) Mostly Air, Carbon Dioxide, Nitrogen
etc. are used as gas in gas propulsion system. The AJM unit normally operates at a
pressure of 0.2-1.0 N/mm2. The composition of gas at high velocity has a significant
impact on the MRR even if the mixing ratio is not changed.

3. The nozzle (geometry, material, distance from and inclination to the work surface)

The nozzle is one of the most vital elements controlling the process characteristics. The
nozzle material should be hard to avoid any significant wear due to the flowing
abrasive. For a normal operation the cross-sectional area of the orifice can be either
circular or rectangular and between 0.05- 0.2mm2.

26 Q. Write down the operating principle of micro Water jet machining process

Ans:
 Principle:
This process works on basic principle of water erosion. In this process, a high speed
well concentrated water jet is used to cut the metal. It uses kinetic energy of water
particle to erode metal at contact surface. The jet speed is almost 600 m/s. It does not
generate any environmental hazards. For cutting hard materials, abrasive particles are
used in water jet These abrasive particles erode metal from contact surface.

Hydraulic Pump:
In the water jet machining process a hydraulic pump is used to pump the water from
storage tank for machining process. It is connected by an electric motor of about 100
Horse power.

Hydraulic Intensifier:
As the name implies, it is used to increase the water pressure for further process.
Hydraulic intensifier accept water from pump at a small pressure about 4 bar. The water
pressure at outlet of intensifier is about 3000-4000 bars.

Hydraulic Accumulator:
Hydraulic accumulator is used when large amount of pressure energy is required for an
instant. It used to eliminate pressure fluctuation It supplies fluid at high pressure when
required.

Tubing System:
Tubes are used to supply high pressure water to the nozzle for further cutting process. It
increase the kinetic energy of fluid. It diameter is about 10-14 mm. It provide flexible
movement and does not allow any significant loses.

Flow regulator:
Flow regulators are used to regulate the flow according to cutting requirement. For high
cutting load, high pressurized water is supplied at high rate.
Nozzle:
As we know, nozzles are used to convert pressure energy into kinetic energy. This
nozzle convert high pressure of water into high velocity jet. This high speed water jet
strikes at work surface which is used for machining. There is possibility of erosion at
orifice of the nozzle due to high pressure water jet. Therefore high wear resistance
material is used for nozzle. The size of nozzle is about 0.2 – 0.4 mm. If abrasive water
jet machining is used, abrasive particles mixed in water stream before entering into
nozzle.

27 Q. Why Abrasive Jet Machining is Not Recommended for Ductile Materials?

Ans:

In abrasive jet machining (AJM), solid and hard abrasive grits accelerated by
pressurized air jet are allowed to impinge the work surface to erode material in the form
of tiny metal particles. A mixture of eroded metal particles and used abrasive grits flow
out of the machining zone. So there always exists a chance that some of the abrasive
grits remain stick to the work surface and don’t come out from the machining zone.
Such phenomenon enhances when work material is soft and ductile (like wood, plastic,
leather, foam, aluminum, copper, etc.).

AJM should not be used for machining soft and ductile materials ;

While machining ductile materials by AJM, the hard abrasive grits may get embedded
on the soft machined surface. This hampers cut quality as well as properties and
appearance of machined surface. While cutting deep slots or holes, these embedded
abrasives can restrict further erosion and thus degrading trend in material removal rate
(MRR) is observed. There also exist high chances of side cutting instead of cutting at
bottom. Moreover practically it has been observed that MRR for machining brittle
materials is usually higher than that of ductile materials. Due to the above reasons, AJM
is not recommended for soft and ductile materials; however, preferred for non-
conductive brittle and hard materials.

28 Q. What are the variables that affect cutting process in micro abrasive jet machining
?
 Ans: Influencing factors related to abrasive

• Type of abrasive—Various abrasive particles have various hardness. Harder

abrasives can fetch higher MRR; whereas, softer abrasives tend to crumble when
striking hard work surface.
• Shape of abrasive—Irregular shape grits having sharp edges improve MRR as
compared to spherical grits.
• Abrasive grain size—Size of indentation created by single grit is proportional to
grit diameter. Therefore, larger grits create bigger indentation (thus high MRR);
whereas, smaller grits provide smooth surface finish but low MRR.
• Variation in grain size—Commercially available abrasive has diameter in a
range (it is not a fixed value). Lesser the variation of diameter within the overall
mass, better will be prediction for surface quality and MRR.
• Presence of impurity—Presence of tiny metallic particles within abrasive can
cause blockage in pipeline and thus variation in flow rate can be observed.

Influencing factors related to carrier gas

• Gas pressure—Pressure of carrier gas after mixing with abrasives is converted

into kinetic energy. Thus higher gas pressure indicates high jet velocity and thus
higher MRR.
• Gas flow rate—Gas flow rate basically influences mixing ratio and MRR
becomes maximum at an optimum value of mixing ratio.
• Moisture content—Since very high pressure is utilized, so presence of steam
within the gas may convert into water particles, which can grab abrasives and
agglomerate into a large particles. This can block pipelines, vary jet velocity and
also erode nozzle at a faster rate.

Influencing factors related to nozzle

• Inner diameter—Higher nozzle inner diameter indicates lower jet velocity for
the same gas pressure and mixing ratio. So improper jet diameter can hamper
MRR as well as surface quality.
• Worn out nozzle—Nozzle diameter increases due to wear.
• Nozzle material—Life of the nozzle (wear rate) greatly depends on nozzle
material.
Influencing factors related to abrasive jet

• Jet velocity—Higher jet velocity can erode material at a faster rate but it requires
high carrier gas pressure. So the machine set-up should have to be capable of
withstanding such high pressure without leakage.
• Jet diameter—It is actually based on nozzle inner diameter and stand-off
distance. Higher jet diameter can erode material from a wider zone; however,
accuracy may degrade as abrasives present at the jet center will get less chance
to come out after impact and thus collide with the fresh jet.

Influencing factors related to process parameters

• Mixing ratio—It greatly influences MRR and penetration depth (surface finish).
An optimum level provides better result.
• Abrasive flow rate—It is also another important factor as MRR is proportional
to the mass flow rate of abrasive.
• Stand-off distance (SOD)—With increase in SOD, jet diameter also increases
because of spreading. Thus higher SOD results in low velocity but wider jet.
Whereas, small SOD provides insufficient passage for used grits to leave
machining zone.
• Impingement angle—It is the operating angle between work surface and jet
diameter. Usually it is kept between 60º – 90º; higher value produces deeper cut.
Numerous researches indicate that MRR becomes maximum at an impingement
angle of 70º – 90º based on work material and many other parameters.

Influencing factors related to work material

• Poor working surface condition—If surface roughness is high then accuracy of

cut may hamper. Similarly highly finished surface reduces MRR because of
possible abrasive bounce back effect.
• Inhomogeneity in material properties—It may result in inaccuracy in machining.
• Stress concentration—It can reduce MRR by reducing erosion rate.

29 Q. What are the techniques used for controlling beam in micro EBM process?
Ans:

The electron beam need to be controlled with optical precision

• The beam consists of negatively charged particles whose energy content is determined
by the mass and velocity of the individual particles.

• The negatively charged particles can be accelerated in an electrostatic field to extreme

high velocities. During the process, the specific energy content of the electron beam can
be increased beyond the emission energy, thus producing abeam of energy, the intensity
of which far exceeds that obtainable from light.

•Due to the precise electron optics, large amounts of energy can be manipulated with
optical precision.

The technique used for controlling beam in micro EBM Process are

1.Electromagnetic lens:

• Before the electrons collide with the work piece, a variable strength electromagnetic
lens is used to refocus the beam to any desired diameter down to less than 0.025 mm at
a precise location on the work piece and thus attains an extremely high power density.

•This extremely, high power density immediately vaporizes any material on whichthe
beam impinges.

2.Magnetic deflection coil:

• Mounted below the magnetic lens, is used to bend the beam and direct it over
thedesired surface of the work piece. This deflection system permits programming of
the beam in any specific geometrical pattern, using the proper deflection coil current
input

• At the point of beam impingement, the kinetic energy in the beam is converted to
thermal energy in work piece.

• Another interesting deflection control technique is the flying spot scanner or optical
tracing device. Using this device, the electron beam can be deflected to cover almost
any conceivable pattern over a 0.25 sq.in. area. The desired pattern is drawn, then
photographed, and the photographic negative acts as the master.
 • The electron beam can also be deflected in a predetermined pattern by a relay tray or a
flying spot scanner mounted in a control cabinet, which consists of a saw-tooth square
wave and sine wave generator. By using this process, it is possible to drill a cross-
shaped hole.

28 Q With neat sketch explain micro electron beam machining process,

parameters and applications

• Micro electron beam machining is a precision manufacturing process that uses a focused
beam of high-energy electrons to selectively remove material from a workpiece. The
process is often used in the fabrication of micro-electromechanical systems (MEMS),
micro-optics, and other high- precision components. In micro electron beam machining,
a beam of electrons is generated by anelectron gun and accelerated to high speeds using
an electric field. The beam is then focused using a series of electromagnetic lenses and
directed onto the workpiece. The high-energy electrons in the beam interact with the
atoms in the workpiece, causing them to be ejected and the material to be removed.

• The electron beam can be controlled using a computer program to precisely remove
material from the workpiece in a desired pattern or shape. The process is capable of
achieving high levels of precision and accuracy, with feature sizes on the order of a few
microns or smaller. Micro electron beam machining can be used to machine a wide
range of materials, including metals, ceramics, and semiconductors. However, the
process requires a high vacuum environment to prevent the electron beam from
interacting with air molecules and losing energy, which can limit its applicability in
some cases. Overall, micro electron beam machining is a powerful tool for the
fabrication of high-precision components and devices, and its use is becoming
increasingly common in advanced manufacturing applications.

• The process parameters of EBM are as follows.)

• Beam current: It is related to the emission of electrons by the cathode in the beam
whose value is as low as 1µA.

• Duration of Pulse: It can be varied from 50 µs to 15 ms.

• Accelerating voltage (Va) is 100 Kv.

• Energy per pulse is 100 J/Pulse.

• Applications
 • To manufacture parts for aircraft and spacecraft such as cut, drill, and shape high-
strength materials like titanium, nickel, and aluminum.

• To produce high-precision components for medical devices such as dental implants,

orthopedic implants, and surgical instruments

• To produce components for nuclear reactors. It is used to manufacture fuel rods, control
rods, and other components that require high precision and tight tolerances.

• To produce microelectronic components like integrated circuits, transistors, and diodes.

It is also used to manufacture printed circuit boards (PCBs).

• To manufacture engine components such as pistons and cylinder heads. The process can
produce high-precision components with complex shapes and is ideal for machining
high- strength materials such as aluminum alloys

28Q. Why vacuum is needed for micro EBM process?

Ans:

Vacuums must be used to reduce contamination, and minimize electron collisions with
air molecules. Because work must be done in a vacuum, EBM is best suited for small
parts. The interaction of the electron beam with the work piece produces hazardous x-
rays, and only highly trained personnel should use EBM equipment.

The work piece to be making is located under the electron beam and is kept at vacuum.
The whole process is carried out in a vacuum chamber because collision between an
electron and an air molecule courses electron to character and does lose their energy and
cutting ability. Is achieved and maintained using a combination of Rotary Pump and
diffusion pump It is attached to the different part of the electron beam define pump
assembly and oil heater as the all is heated oil vapour pressure upward change the
direction of motion of the paper and oil paper starts moving downward at a high
velocity. Such high velocity jets of oil.

29Q. What do you understand by fourth state of matter?

Ans:

Plasma is called the fourth state of matter after solid, liquid, and gas. It is a state of
matter in which an ionized substance becomes highly electrically conductive to the
point that long-range electric and magnetic fields dominate its behaviour. Plasma is
created by adding energy to a gas so that some of its electrons leave its atoms. This is
called ionization. It results in negatively charged electrons, and positively charged ions.
Unlike the other states of matter, the charged particles in a plasma will react strongly to
electric and magnetic fields (i.e. electromagnetic fields). If a plasma loses heat, the ions
will re-form into a gas, emitting the energy which had caused them to ionize. When
 more heat is provided to atoms or molecules, they may be ionized. An electron may
gain enough energy to escape its atom. After the escape of electron, atoms become ions.
In sufficiently heated gas, ionization happens many times, creating clouds of free
electrons and ions. This ionized gas mixture consisting of ions, electrons and neutral
atoms is called PLASMA.
The characteristics of plasma are significantly different
from those of ordinary neutral gases so that plasmas are considered a distinct "fourth
state of matter." For example, because plasmas are made up of electrically charged
particles, they are strongly influenced by electric and magnetic fields while neutral
gases are not. It is an interesting fact that most of the material in the visible Universe
(The whole Universe, as much as 99.9% according to some estimates, is in the Plasma
State.

30Q. What are the advantages of micro EBM?

Ans:. Advantages of Electron beam machining

1. It is an excellent process for micro finishing (milligram/ s).

2. Very small holes can be machined in any type of material to high accuracy.

3. Holes of different sizes and shapes can be machined.

4. There is no mechanical contact between the tool and the workpiece.

5. It is a quicker process. Harder materials can also be machined at a faster rate

than conventional machining.

6. Electrical conductor materials can be machined

7. The physical and metallurgical damage to the workpiece is very less.

8. This process can be easily automated.

9. Extremely close tolerances are obtained.

10. Brittle and fragile materials can be machined.

 31. Q Explain the advantages and disadvantages Electrochemical Machining

1. Advantages

• Negligible tool wear.

• Complex and concave curvature parts can be produced easily by the use of convex and
concave tools.
• No forces and residual stress are produced, because there is no direct contact between
tool and workpiece.
• An excellent surface finish is produced.
• Less heat is generated.
•
Disadvantages

• The risk of corrosion for tool, w/p and equipment increases in the case of saline and
acidic electrolyte.
 • Electrochemical machining is capable of machining electrically conductive materials
only.
• High power consumption.
• High initial investment cost.
33 Q With neat sketch explain the Magneto-rheological Abrasive Flow Finishing
processes Principle
Magneto-rheological Abrasive Flow Finishing (MRAFF) is a finishing process used to improve
the surface quality of complex shapes and structures. This process uses a magnetorheological (MR)
fluid mixed with abrasive particles to remove material from the surface of a workpiece. The MR
fluid used in MRAFF is a special type of fluid that consists of a suspension of magnetically
polarizable particles in a carrier fluid. When a magnetic field is applied to the MR fluid, the
particles align themselves in the direction of the magnetic field, which leads to a significant
increase in the fluid's viscosity. This property allows for precise control of the fluid's flow and
pressure during the finishing process.

In MRAFF, the MR fluid mixed with abrasive particles is pumped through a tooling system, which
consists of a workpiece holder and an extrusion die. The workpiece is held in place by the holder,
and the MR fluid is forced through the extrusion die, which shapes the fluid flow and directs it
toward the workpiece. As the MR fluid flows through the tooling system, it is exposed to a
magnetic field, which increases its viscosity and allows for precise control of the fluid flow and
pressure. The abrasive particles mixed in the fluid act as cutting agents, removing material from
the surface of the workpiece as the fluid flows over it. The resulting surface finish is smooth and
uniform. Overall, MRAFF is a highly precise finishing process that allows for the efficient and
effective improvement of surface quality on complex shapes and structures. Its use of MR fluid
and abrasive particles provides greater control over the finishing process and allows for highly
uniform and consistent results. 3marks
34 Q Discuss the Force analysis for MRAFF process and applications

2 marks
Applications ( any 5 points 5*1=5 marks)
• MRAFF is commonly used to improve the surface finish of various materials, such as metals,
ceramics, and composites. It can remove surface defects, such as burrs, scratches, and roughness,
resulting in a smoother and more uniform surface.

• MRAFF can be used to round sharp edges of machined parts, which can improve their strength
and reduce the risk of injury.

• MRAFF can be used to polish surfaces, such as molds, dies, and other precision
components, resulting in a high-gloss, mirror-like finish.

• MRAFF can remove burrs and other unwanted material from the edges of machined parts,
which can improve their functionality and reduce the risk of injury.

• MRAFF can be used to produce micro-features, such as micro-holes and micro-channels, in

various materials, which are commonly used in microfluidics, biomedical devices, and electronic
components.

• MRAFF can be used to repair or refurbish damaged parts, such as turbine blades, engine
components, and hydraulic cylinders, which can extend their lifespan and improve their
performance.
 35 What is nano finishing and why is it required?
Ans : Nano finishing is ultra finishing process which is developed for obtaining nanometer
order surface finish.
Need for Nanofinishing
•Traditional finishing processes are incapable of producing required surface
characteristics to meet demand of nanotechnology.
•Electronics and computer industries are demanding higher precision for large
devices and high data packing densities.
•To improve interchangeability of components, improve quality control and
longer wear/fatigue life.
36 List the Applications Abrasive jet machining
• Removing flash and parting lines from injection moulded parts.
• Deburring and polishing plastic, nylon and Teflon components,
• Cleaning metallic mould cavities which otherwise may be inaccessible.
• Cutting thin sectioned fragile components made of glass, refractories, ceramics,
mica, etc.
• Producing high-quality surfaces.
• Removing glue and paint from paintings and leather objects.
• Reproducing designs on a glass surface with the help of masks made of rubber,
copper, etc.
• Frosting interior surface of glass tubes.
• Etching markings on glass cylinders.

1.
36 Describe Magnetic Abrasive Finishing (MAF)
• Ferromagnetic particles sintered with fine abrasive particles (Al2O3 ,SiC,
Cubic Boron Nitride Powder or diamond) are called ferromagnetic abrasive
particles (or magnetic abrasive particles).
• Homogeneously mixed loose ferromagnetic and abrasive particles are used in
certain applications.
 • Magnetic field is applied across gap between workpiece surface and rotating
electromagnet pole.
• Magnetic abrasive grains combined to each other magnetically form flexible
magnetic abrasive brush.
• Force due to magnetic field is responsible for causing abrasive penetration
inside workpiece while rotation of magnetic abrasive brush results in material
removal in form of chips.

37 Explain Magnetorheological Finishing

• Uses Magnetorheological (MR) fluid- suspension of micron sized
magnetizable particles (e.g. Carbonyl iron) dispersed in non-magnetic medium
(mineral oil, water, silicone oil).
• On Applying Magnetic field to MR suspension, particles acquire dipole
moments & aggregated into chains of dipoles.
Applications:
• High precision lenses include medical equipment such as endoscopes,
military's night vision equipment like infrared binoculars. Resistance to
applied shear strain by chains is responsible for material removal .

Elastic Emission Machining

 • Uses ultra fine particles to collide with workpiece surface.
• Finish surface by atomic scale elastic fracture & directly by removing atoms &
molecules from surface without plastic deformation.
• Workpiece is submerged in slurry of abrasive particles (ZrO2 or Al2O3 ) and
water.
• Polyurethane ball(56 mm dia) mounted on shaft, driven by motor, is used to
apply working pressure.
• Material removed by erosion of surface atoms by bombardment of abrasive
particles.

Explain Magnetic Float Polishing

a. Ceramics are extremely sensitive to surface defects resulting from grinding and polishing
processes. Fatigue failure of ceramics is driven by surface imperfections.
For this gentle and flexible polishing conditions like low level of controlled forces and use
of abrasives softer than work material are required.
b. The schematic diagram of the magnetic float polishing apparatus used for finishing
advanced ceramic balls is shown in Figure .
A magnetic fluid containing fine abrasive grains and extremely fineferromagnetic particles
in a carrier fluid such as water or kerosene fills the aluminium chamber.
c. A bank of strong electromagnets is arranged alternately north and south below the
chamber.
On the application of magnetic field the ferro fluid is attracted downward towards the area
of higher magnetic field and an upward buoyant force is exerted on non-magnetic
material(abrasive grains, ceramic balls, and acrylic float) to push them to the area of lower
magnetic field.
 d. Drive shaft is fed down to contact the ball and presses them down to
reach the desired force level.
e. The balls are polished by the relative motion between the balls and the
abrasives under the influence of buoyant force and resistance.
f. Both higher material removal rate and smoother surface in this polishing
method, are attained by stronger magnetic field and finer abrasives.
g. Conventional polishing of ceramic balls takes considerable time(12-
15days) to finish a batch of ceramic balls because of low polishing
speeds and use of expensive diamond abrasive at high loads can result in
scratches, and micro cracks.
h. Magnetic Float polishing is used to finish 9.5 mm diameter Si3N4 balls.
i. The surface finish obtained was 4 nm Ra and 40 nm Rmax. Finished
surfaces relatively free of scratches, micro cracks, etc. were obtained.

5. Explain micro electron beam machining process and parametersMicro electron beam machining
is a precision manufacturing process that uses a focused beam of high-energy electrons to
selectively remove material from a workpiece. The process is often used in the fabrication of
micro-electromechanical systems (MEMS), micro-optics, and other high- precision components.
In micro electron beam machining, a beam of electrons is generated by an
electron gun and accelerated to high speeds using an electric field. The beam is then focused using a
series of electromagnetic lenses and directed onto the workpiece. The high-energy electrons in the beam
interact with the atoms in the workpiece, causing them to be ejected and the material to be removed.
The electron beam can be controlled using a computer program to precisely remove material from the
workpiece in a desired pattern or shape. The process is capable of achieving high levels of precision and
accuracy, with feature sizes on the order of a few microns or smaller. Micro electron beam machining can
be used to machine a wide range of materials, including metals, ceramics, and semiconductors.
However, the process requires a high vacuum environment to prevent the electron beam from interacting
with air molecules and losing energy, which can limit its applicability in some cases. Overall, micro
electron beam machining is a powerful tool for the fabrication of high-precision components and
devices, and its use is becoming increasingly common in advanced manufacturing applications.

The process parameters of EBM are as follows.

• Beam current: It is related to the emission of electrons by the cathode in the beam whose value
is as low as 1µA.
• Duration of Pulse: It can be varied from 50 µs to 15 ms.
• Accelerating voltage (Va) is 100 Kv.
• Energy per pulse is 100 J/Pulse.