Available online at www.sciencedirect.

com
Available online at www.sciencedirect.com
ScienceDirect
Available ScienceDirect
online
Procedia atonline
CIRP
Available www.sciencedirect.com
00 (2019) 000–000
at www.sciencedirect.com
www.elsevier.com/locate/procedia
ScienceDirect
Procedia CIRP 00 (2019) 000–000
ScienceDirect www.elsevier.com/locate/procedia

Procedia CIRP 00 (2017)

Procedia 000–000
CIRP 95 (2020) 950–953
www.elsevier.com/locate/procedia
20th CIRP CONFERENCE ON ELECTRO PHYSICAL AND CHEMICAL MACHINING
20th CIRP CONFERENCE ON ELECTRO PHYSICAL AND CHEMICAL MACHINING
Developing a desk-top electron beam micro-machining system in the low-
Developing a desk-top 28th CIRP pressure
electron argonmicro-machining
beam
Design Conference, atmosphere
May 2018, Nantes, France system in the low-
pressure argon atmosphere
Ching-Hsiang Chien1,2, Aleksander Zawada3, Piotr Konarski3, Dong-Yea Sheu1,*
A new Ching-Hsiang
methodology Chien to1,2,analyze
Aleksander theZawada
functional3 and physical
, Piotr Konarski 3
, Dong-Yea architecture
Sheu1,* of
Graduate Institute of Manufacturing Technology, National Taipei University of Technology. 1, Sec. 3, Chung-Hsiao E. Rd., Taipei 10608 Taiwan
1

existing products for an assembly oriented product family identification

Graduate Institute of Manufacturing Technology, National Taipei University of Technology. 1, Sec. 3, Chung-Hsiao E. Rd., Taipei 10608 Taiwan
1
2
Chien’s Scientific Company, No. 2, Alley 12, Lane 990, Sec. 1, Fu-Hsing Rd., 33559 Tashi, Taoyuan, Taiwan

3
2
Paul Stief *, Jean-Yves Dantan, Alain Etienne, Ali Siadat
Chien’s Scientific Company, No. 2, Alley 12, Lane 990, Sec. 1, Fu-Hsing Rd., 33559 Tashi, Taoyuan, Taiwan
Lukasiewicz Research Network -Tele and Radio Research Institute, ul. Ratuszowa 11, 03-450 Warszawa, Poland
École Nationale
3 Supérieure
Lukasiewicz d’Arts Network
Research et Métiers, Artsand
-Tele et Métiers ParisTech,
Radio Research LCFC ul.
Institute, EARatuszowa
4495, 4 Rue
11,Augustin Fresnel, Metz
03-450 Warszawa, 57078, France
Poland
* Corresponding author. Tel.: +886-2-2771-2171 ex2078; fax: +886-2-2731-7193. E-mail address: dongya@ntut.edu.tw

**Corresponding
Correspondingauthor.
author.Tel.:
Tel.:+33
+886-2-2771-2171 ex2078;
3 87 37 54 30; E-mail fax: +886-2-2731-7193.
address: E-mail address: dongya@ntut.edu.tw
paul.stief@ensam.eu
Abstract
Abstract
Electron beam machining (EBM) is a well-established technology for various industries. Conventional EBM systems use high-voltage for
Abstract
electron beam generation. The EBM could be used for various processing such as drilling, welding and surface modification by converting
Electron beam machining (EBM) is a well-established technology for various industries. Conventional EBM systems use high-voltage for
Inkinetic
today’s
electron
energy
business
beam
of electrons
environment,
generation.
to thermal
The EBM the trend energy of more
couldtowards
the substrate. The core
product processing
be used for various variety technology
andsuch
customization of EBM is electron
as drilling,is welding
unbroken. andDue
beam
to
surface
generation.
thismodification
development, Traditionally,
bythe need of
converting
magnetic
agile and lens systems are
reconfigurable used to focus
production systems theemerged
electrontobeamcope and
with magnetic
various coils are and
products usedproduct
for beam deflection.
families. To However,
design and most EBM
optimize systems
production
kinetic energy of electrons to thermal energy of the substrate. The core technology of EBM is electron beam generation. Traditionally,
availableason
systems welltheasmarket are designed
to choose the to
optimalfor macro size work-piece machining purposes. These machines havemost
largeofchambers and equipped with
magnetic lens systems are used focus product matches,
the electron beamproduct analysiscoils
and magnetic methods are needed.
are used for beam Indeed,
deflection. the known
However, mostmethods aim
EBM systems to
high
analyze power supplies.
a product Thus
or one productcauses difficulty
familyfor onmacro for micro-machining
the physical level. Different on small
product work-pieces.
families,These Therefore,
however, in order
may differ to
largelyperform micro-machining
in terms and
of the numberwith for
and
available on the market are designed size work-piece machining purposes. machines have large chambers equipped
tiny work-piece,
nature of components. a desk-top EBMimpedes
This causes
fact system with a vacuum
an efficient chamber smaller
comparison and than of
choice 5 Lappropriate
was developed dedicated
product for micro machiningfor theprocesses. A
high power supplies. Thus difficulty for micro-machining on small work-pieces. Therefore, infamily
order combinations
to perform micro-machining productionfor
transformer
system. of microwave
A new methodology oven is used
is proposed as power supply. As an electron beam source by using concave cathode, which focuses the resulting
tiny work-piece, a desk-top EBM systemtowithanalyze existing
a vacuum products
chamber in view
smaller of5their
than L wasfunctional
developed anddedicated
physical for
architecture. The aimprocesses.
micro machining is to clusterA
electron
these beamininnew
products argon ambient.
assembly Argon ambient also for
allows to avoid contamination during the process theofcreation
machining. In order to obtain
transformer of microwave ovenoriented
is usedproduct
as power families
supply. theanoptimization
As electron beam of existing
source assembly lines
by using concave andcathode, whichof future
focusesreconfigurable
the resulting
excellentsystems.
assembly results of microonmachining operation on
thesmaller work-pieces, of the electron beam behavior of the desk-top EBM was investigated in
electron beam in Based Datum Argon
argon ambient. Flow Chain,
ambient physical
also structure
allows to avoid the products
contamination is analyzed.
during theFunctional
process of subassemblies
machining. In areorder
identified, and
to obtain
this study.
aexcellent
functional The experimental
analysis results
is performed. show
Moreover,that dissimilar materials welding, small hole drilling and surface modification could be carried out by
results of micro machining operationa on hybrid functional
smaller and physical
work-pieces, architecture
the electron graph (HyFPAG)
beam behavior is the EBM
of the desk-top outputwaswhich depicts the
investigated in
this desk-top
similarity EBM.product
It is expected that
bythe desk-topdesign
EBM can be used for commercial applications especially for microdesigners.
machiningAn in illustrative
near future.
this study.between
The experimental families
results show providing support
that dissimilar materials to both,
welding, production system planners
small hole drilling and surfaceandmodification
product could be carried out by
example of a nail-clipper
this desk-top is used tothat
EBM. It is expected explain the proposed
the desk-top EBMmethodology.
can be used for Ancommercial
industrial case study onespecially
applications two product for families of steering
micro machining incolumns of
near future.
© 2020 The Authors.
thyssenkrupp Published
Presta France is thenbycarried
ElsevieroutB.V.
to give a first industrial evaluation of the proposed approach.
© 2020 The Authors. Published by Elsevier B.V.
©This
© 2017
This
is The
2020
is
an
The
an
open accessPublished
Authors.
Authors.
open access
article under
Published
article by
under
the CC B.V.
byElsevier
Elsevier
the CC
BY-NC-ND
B.V.
BY-NC-ND
license (http://creativecommons.org/licenses/by-nc-nd/4.0/)
license (http://creativecommons.org/licenses/by-nc-nd/4.0/)
Peer-review
Peer-review statement:
under Peer-review
responsibility under
ofofthe responsibility of the scientific committee of the ISEM 2020
This is an open
Peer-review access
under article under
responsibility thescientific
CC committee
BY-NC-ND
scientific committee of
ofthe
license 28th CIRP
2020Design Conference 2018.
(http://creativecommons.org/licenses/by-nc-nd/4.0/)
the ISEM
Peer-review statement: Peer-review under responsibility of the scientific committee of the ISEM 2020
Keywords: Electron beam machining; Magnetic lens systems; Concave cathode; Dissimilar materials welding.
Keywords: Assembly; Design method; Family identification
Keywords: Electron beam machining; Magnetic lens systems; Concave cathode; Dissimilar materials welding.

1. Introduction
1. Introduction Denbnovetsky
of the product rangeet al. and
[4].characteristics
In addition tomanufactured
concave cathodes,
and/or
1. Introduction hollow cathodes
Denbnovetsky
assembled have
in thisetsystem. also
al. [4].In Inbeen studied
thisaddition
context, to and widely
theconcave
main used for
cathodes,
challenge in
Since to
Due the first
the electron beam machining
fast development in (EBM)
the domainsystem was of electroncathodes
hollow
modelling beam
and generation,
have also
analysis e.g.
been
is now Koval et al.
studied
not only to [5]
and andwith
widely
cope Oks
usedet for
singleal.
constructed
communication by and
Since the first Dr. Karl-Heinz
electron
an ongoing Steigerwald
beam machining
trend of(EBM) in system
1952 and
digitization [1], products,
was [6].
electron beam generation,
a limited product e.g.
rangeKoval et al. [5]
or existing and Oks
product et al.
families,
thermionic
constructed by
digitalization, cathodes emitters
Dr. Karl-Heinz
manufacturing are used for electron
Steigerwald
enterprises are facing generation
in important
1952 [1], but [6].Both
also tohollow
be able and concave
to analyze and cathodes
to comparehave muchto define
products longer
purpose. This
thermionic
challenges in type emitters
cathodes
today’s electron
marketare sources
used forhave
environments: relatively
electron short new
generation
a continuing lifetime
Both than
hollow
product pureand
families.metal thermionic
Itconcave
can cathodes
cathodes
be observed traditionally
have
that used
muchexisting
classical longer
lifetime due
purpose. towards
tendency to back
This type stream
electron
reduction ion etching and
sourcesdevelopment
of product cathode
have relatively material
timesshort
and in EBM. Cold
lifetimefamilies
product cathodes
than pure aremetal do not burn
thermionic
regrouped out, and
cathodes
in function ion erosion
traditionally
of clients has
useda
or features.
evaporation.
lifetime due
shortened In
product order
to back to obtain
stream In
lifecycles. a stable
ionaddition, electron
etching there
and cathode beam, it is little
material However,
is an increasing effect
in EBM. Cold on their
cathodes
assembly electron
do not
oriented emission
burn families
product efficiency.
out, andare ionhardly
erosionHollow
to has
find.a
requiredoftocustomization,
evaporation.
demand useInspecial
order to power
obtain
beingsupply
at systems.
a stable
the same Already
electron
time a inglobal
beam,
in 1907,
it is cathodes
little the and
On effect onconcave
product their
family cathodes
electron do not differ
emission
level, products require complicated
efficiency.
mainly Hollow
in two
Marcellotovon
required
competition use Pirani
with special used concave
power
competitors supply cathodes
all over systems. asAlready
the world. electron
Thisinsource powercharacteristics:
1907, main
trend, cathodes supply. The (i)electron
and concave cathodes
the numberbeam emission
doofnot requireregulation
components complicated
and (ii) the is
to melt
Marcello
which metals
is von [2].
Piranithe
inducing Concave
useddevelopmentcathodes
concave cathodes were
from as the subject
electron
macro to source
micro of possible
power
type by changing
supply. The(e.g.
of components the accelerating
electron voltage
beam electrical,
mechanical, or by tuning
emission electronical).
regulation is the
interest
to melt of
markets, various
metals
results in authors,
Concaveincluding
[2].diminished lot sizesRocca
cathodes were
due totheet augmenting
al. [3] and
subject of pressure
possible of methodologies
by
Classical the working
changing gas. The electron
the accelerating
considering voltage
mainly beam
or byoftuning
single concave
products the
interest varieties
product of various authors, including
(high-volume to low-volume Roccaproduction)
et al. [3] [1]. and or pressure of the
solitary, working
already gas. The
existing electron
product beamanalyze
families of concave the
2212-8271 © 2020 The Authors. Published by Elsevier B.V.
To cope with this augmenting variety as well as to be able to product structure on a physical level (components level) which
This is an open access article under the CC BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/)
identify
2212-8271 possible
© 2020 The optimization
Authors. Published potentials
by Elsevier in
B.V. the existing
Peer-review statement: Peer-review under responsibility of the scientific committeecauses difficulties
of the ISEM 2020 regarding an efficient definition and
This is an open
production access article
system, under the CCtoBY-NC-ND
it is important license (http://creativecommons.org/licenses/by-nc-nd/4.0/)
have a precise knowledge comparison of different product families. Addressing this
Peer-review statement: Peer-review under responsibility of the scientific committee of the ISEM 2020
2212-8271 © 2020 The Authors. Published by Elsevier B.V.
This is an©open
2212-8271 2017access article Published
The Authors. under theby CC BY-NC-ND
Elsevier B.V. license (http://creativecommons.org/licenses/by-nc-nd/4.0/)
Peer-review
Peer-review under
under responsibility
responsibility of scientific
of the the scientific committee
committee of the of theCIRP
28th ISEM 2020 Conference 2018.
Design
10.1016/j.procir.2020.02.276
 Ching-Hsiang Chien et al. / Procedia CIRP 95 (2020) 950–953
2 Author name / Procedia CIRP 00 (2019) 000–000
cathode is focused mainly due to the appropriate shape of the
cathode surface and also due to the neutralization of the space
charge (so-called ionic focusing).
In traditional EBM devices with hot cathodes, intensity of
the electron beam is tuned by changing the Wehnelt electrode
potential. The beam is focused and moved by using magnetic
lenses and deflection coils. The set of all electrodes forms an
electron gun that requires several supply voltages, which
makes the power supply system complicated. In addition,
traditional electron guns require a good vacuum ambient of
the order of 10-5 mbar, which requires the use of an expensive
vacuum pumping systems. Finally the conventional EBM
systems are equipped with high power suppliers. For example:
the smallest supply used in a commercial electron beam
welder is of 2 kW [7]. Some commercial power supplies do
not allow operation with less than a few hundred Watts, which
is too much for small work-pieces. Therefore, conventional
EBM system is not only expensive but also has significant
limitations for small work-piece machining. Tests performed
with small workpiece elements by using Lukasiewicz ITR
institute conventional EBM welding system have shown that
such systems are not suitable for this type application.
M. Fukao et al. [8] and Amir H. Sari et al. [9] studied
solutions of simple electron gun and concave cold cathode gun
by obstructed discharge. A. Zawada and P. Konarski built a
compact EBM system with concave cathode as an electron
source by using transformer taken from microwave oven [10].
However, some parameters are still not clear for practical
applications. In this study, a simple low-cost desktop EBM
was developed for micro parts welding and surface
modifications. Not only the characteristics of welding
conditions but also parameters such as gas pressure, power
voltage and focusing spot were also investigated. The low-cost
desktop EBM is expected to have more applications on micro
machining in the future.
2. Electron beam source design and system configuration
2.1. The electron beam source design
The electron beam source is an aluminum rod of 18 mm
diameter with 20 mm height. There are two surface designs.
One is concave surface of 15 mm radius with 13 mm off-set
and a 3 mm cavity in the middle. The other is a 3 mm cavity
in the middle with 118o drilling angle hole at 13 mm diameter.
(a) Drilled cathode (b) Concave cathode
Fig. 1. Cathodes of electron gun: sketches and pictures
951
Figure 1 shows sketches and photos for the two cathodes.
Their ceramic shields are moved up to show the details of
cathodes. Focusing of the electron beam is performed by the
curvature of the aluminum cathode surface [8] and drilling
angle surface. The electrode is installed in a heat-resistant
glass tube and sealed with O-ring for vacuum tight. The
cathode is covered with a ceramic tube during operation. A
transformer of maximum voltage output of 3.38 kV, taken
from microwave oven, is used for the power supply.
2.2. System configuration
The simple desk-top EBM is assembled with a vacuum
chamber made of stainless-steel and covered with an 8 mm
thick glass plate. Rotary vane vacuum pump was used for
pumping. The full range vacuum gauge and float flowmeter
were mounted on the chamber for vacuum measurement and
argon flow control. The 1050 aluminum material was used for
electron beam source (EBS) generator, since the aluminum
has a high secondary emission coefficient [5]. The details of
EBS are shown in figure.1. In order to avoid chemical
reaction between residual gases and the work-piece, argon
was applied as working gas. The argon flows into the vacuum
chamber from a gas cylinder and the flow rate is controlled by
pressure regulator and floating flowmeter. At the same time,
gas is pumped out through the vacuum channel by rotary
vacuum pump as shown in Figure 2. This arrangement
confirms that the welding process is undertaken in an inert gas
flow to ensure the welding quality.
Fig. 2. A simple experimental desktop EBM system
2.3. The electric power supply
A typical transformer of microwave ovens was used as a
high voltage (HV) source to supply the cathode. This HV is
doubled and smoothed by using a voltage double rectifier,
which uses a HV diode and a capacitor of 1F. The output
voltage can be smoothly regulated with a potentiometer
mounted on the full voltage regulator to adjust output source
voltage approximately 3.38 kV. Figure 3 shows the
dependence of the HV output voltage without load on the AC
full voltage regulator setting. A 350 Ohm, 100 W resistor was
connected in series between the cathode and the power supply
in order to restrain the maximum current. A 30 Ohm resistor
was used for the beam current detecting measurement. Figure
4 shows the electronic circuit and EBM system diagram.
952 Ching-Hsiang Chien et al. / Procedia CIRP 95 (2020) 950–953
Author name / Procedia CIRP 00 (2019) 000–000
Compared with the conventional EBM electric power, the
transformer taken from microwave oven can only provide low
energy in this study. Therefore, the desk-top EB system can
be used for such purposes as micro parts welding and surface
micro-structure modification of low melting point materials.
Fig. 3. The HV output of transformer due to adjustment of AC full voltage
regulator.
Fig. 4. Electronic circuit diagram of the supply and EBM system.
3. Experimental results
3.1 General characteristics of the cathode
Figure 5 shows the relationship of cathode voltage and the
residual gas pressure in the vacuum chamber.
Fig. 5. Cathode voltage versus pressure of residual gases in vacuum chamber.
The gap between the cathode and anode was approximately
97mm and the working pressure was adjustable from 0.05
Torr to 0.09 Torr to eliminate the adverse arc discharge,
which happens when the working pressure is higher than 0.11
Torr. The stable glow discharge was obtained at a working
3
pressure range from 0.05 Torr to 0.09 Torr. The focusing
point of the discharge was located 8.15 mm to 19.2 mm from
the cathode surface. Observing from the viewport, the cathode
dark space and negative column of discharge is extended
when the working pressure is decreasing as well as when the
cathode supply voltage is increasing. The symptom can be
considered as the discharge works under the conditions
corresponding to the left-hand branch of Paschen curve [11].
When using of full power, the transformer maximum
output value measured at 0.054 Torr pressure of the cathode
reaches -2780V. According to Ohm’s law, a beam current of
the system is around 5.71 mA.
The adjustment of the electron beam current is possible by
tuning the cathode voltage as well as by selecting the proper
working gas pressure. For discharge voltages below 3 kV, a
precise adjustment of working gas pressure is necessary for
beam current tuning [8]. The ultimate pressure of the desktop
EBM pumping system is 0.05 Torr. Therefore, we use stable
argon flow to the working chamber up to a pressure of 0.081
Torr. Under these conditions, the glow discharge is not fully
stable, and thus the beam current varies from 0 to 45 mA for
different cathode voltages. The discharge takes place within
abnormal glow regime, on the left branch of Paschen curve,
close to its minimum. This branch of the curve is generally
more sensitive to gas pressure variation, due to the steep slope
of the curve. In fact, singular breakdowns, which are
occurring, change pressure in the chamber dynamically.
Therefore, it is difficult to obtain a quantitative estimation and
reproducibility of the results for this dynamic system.
3.2 Beam focusing test of cathodes
In order to generate the high energy density, the concave
surface cathode was used for plasma electron beam focusing
purpose. By using the concave cathode curvature, it is
possible to focus the plasma beam spot for machining and
welding [6]. In our system, the target is a grounded anode.
304 stainless steel (SS) plates placed at several different gap
distances (20mm, 25mm and 60mm) from the cathode were
used as targets. After initial testing, it reveals that the distance
gap of 25 mm between the workpiece and the cathode has an
excellent beam focusing spot.
The SS plate was hold and fixed on the distance with
respect to the cathode then the chamber was pumped down to
0.05 Torr. Argon was fed into the chamber when the pressure
reached optimal value of 0.08 Torr. The focusing spot of the
electron beam on the SS plate could be observed clearly and
this plate melts when power is increasing. Figure 6 shows
photos of the two cathodes with different shape surfaces and
also schematic of assumed straight electron beam trajectories.
Under such assumption cathode of figure 6(b) has a better
focus point than that of figure 6(a). Contrary to assumption,
the photos show that the cathode with 118o drilling angle
surface seems to have a better focusing beam than the
concave surface. It could be considered that the workpiece is
out of the focusing spot when it works at the same distance
between the cathode and substrate in case of the two different
cathodes. However, such phenomena need to be proved
further.
 Ching-Hsiang Chien et al. / Procedia CIRP 95 (2020) 950–953
4 Author name / Procedia CIRP 00 (2019) 000–000
(a) Drilled cathode (b) Concave cathode
Fig. 6. Photos of beam focusing and beam lines sketches of both cathodes
Figure 7 shows the photos of focusing spot testing results
for SS plates. Figure 7(a) shows that focusing spots obtained
by using concave surface cathode are about 3 mm in diameter.
However, the focus spot size is approximately 1 mm in
diameter with the 118 ゜ drilling angle surface cathode as
shown in figure 7(b). Although the size seems to be too large
comparing with commercial EBM system, it is available for
micro-parts welding and surface modification.
(a) concave surface cathode (b) 118 drilling angle surface cathode
o
Fig. 7. View of focus test results with different cathode
3.3 Applications of EBM
The desk-top EB process shows the possibility for small
parts drilling and dissimilar materials welding. It is also
possible for high thermal conductivity material likes copper
wire, which was melted to form a ball as shown in figure 8(e).
Figure 8 (a) shows the images photos of drilling SS plates.
Figure 8(b) shows the silicon wafer drilling. One edge of this
wafer was broken due to the heat conduction during process.
The results of SS wire and plate welding are shown in figure
8(c) and figure 8(d).
Fig. 8. The photos of welding and drilling with simple desktop EBM of
various materials.
Fig. 9. Surface modification of SS plate by using low-cost EB. a) prior and b)
after EB treatment
953
Figure 9 exhibits SEM photos of surface modification for
SS plate by using simple desk-top EBM. It is quite clear that
the electron beam melted surface and re-solidification
occurred to form a new surface.
4. Conclusion
A simple desk-top EBM system was developed for micro
welding and micro machining in this study. The low-cost
desktop EBM uses concave cathode electron source and a
transformer taken from a typical microwave oven. The results
show that the high-voltage output of transformer is
proportional to the input power. Electron beam focusing and
its current depend on working gas pressure in the vacuum
chamber. The cathode with 118o angle surface has a good
focusing of electron beam at 25 mm distance. The desktop
EBM shows the possibility of micro welding and micro
machining for the materials such as stainless steel, copper,
aluminum and silicon. Besides the power limitation and beam
focusing problem, the desk-top EB process is available for
micro parts welding and machining, which is shown in this
study. It is necessary to develop a high power EB machine for
wide applications in the future.
References
[1] Steigerwald Strahltechnik GMBH, Germany. Brochure for the 50th
anniversary - The Innovators of the electron beam.
[2] Von Pirani, M. (1907). Production of homogeneous bodies from tantalum
or other metals. U.S. Patent No. 848,600. Washington, DC: U.S. Patent
and Trademark Office.
[3] Rocca, J. J., Meyer, J. D., Farrell, M. R., & Collins, G. J. (1984). Glow‐
discharge ‐ created electron beams: Cathode materials, electron gun
designs, and technological applications. Journal of applied physics, 56(3),
790-797.
[4] Denbnovetsky, S. V., Felba, J., Melnik, V. I., & Melnik, I. V. (1997).
Model of beam formation in a glow discharge electron gun with a cold
cathode. Applied Surface Science, 111, 288-294.
[5] Koval, N. N., Oks, E. M., Schanin, P. M., Kreindel, Y. E., & Gavrilov, N.
V. (1992). Broad beam electron sources with plasma cathodes. Nuclear
Instruments and Methods in Physics Research Section A: Accelerators,
Spectrometers, Detectors and Associated Equipment, 321(3), 417-428.
[6] Oks, E. M., & Schanin, P. M. (1999). Development of plasma cathode
electron guns. Physics of Plasmas, 6(5), 1649-1654.
[7] Brochure of MEBW-60 Micro Electron Beam Welder – Oct. 2016 - Focus
GmbH - Germany.
[8] Fukao, M., Ishida, M., Ohtsuka, Y., & Matsuo, H. (2000). A simple
electron gun by obstructed discharge and its discharge-sustaining
mechanism. Vacuum, 59(1), 358-372.
[9] Sari, A. H., Ghorannevis, M., Hora, H., & Osman, F. (2004). Concave
cold cathode electron gun using obstructed discharge. In Proc. of 31st
EPS Conference on Plasma Physics (Vol. 28). London, 28 June - 2 July
2004 ECA Vol.28G, P-1.021
[10] Zawada, A., & Konarski, P. (2013). Electron beam generated in low
pressure noble gas atmosphere–Compact device construction and
applications. 10th International Conference “Interaction of Radiation with
Solids”, September 24-27, 2013, Minsk, Belarus
[11] Lisovskiy, V., Kravchenko, E., Skubenko, E., Kharchenko, N., &
Yegorenkov. V. (2010). Obstructed DC glow discharge in low-pressure
nitrogen. Problems of Atomic Science and Technology 2010 (6) Series:
Plasma Physcis (16), 156-158