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Keywords: ISFET, pH, biosensor, sensitivity, drift Equation (2) predicts a potential gradient of 0.059
volts per pH.
1 Introduction
3 Devices
Biosensors can have a variety of medical, industrial
and military applications. Ion-selective field effect 3.1 ISFET
transistors are robust and sensitive devices to
monitor the changes in ion concentrations, The ISFET [3] is one of the early products of
including protons, when they interact with the gate MEMS technology and its fabrication process is
surface. The ISFET could be made into a specific closely similar to that of the metal oxide
device to detect a particular analyte by semiconductor field effect transistor (MOSFET). It
incorporating enzymes or antibodies on the gate only differs from the MOSFET in that the metal
surface. Hydrolytic enzymes that break down gate is replaced with an ion sensitive membrane
specific analyte are used as biosensing element on such as SiO2, Al2O3, Ta2O5 etc., while an ionic
the gate surface. The action of the enzymes on the liquid acts as the gate. Electrical contact with the
analyte leads to changes in the ion concentration gate is established indirectly using a reference
that are detected by the FET device. Here, we have electrode [3]. Being a solid-state device, it offers
made efforts to fabricate and optimise a circuit to several advantages over conventional devices.
measure the potential changes occurring near a gate Figure 1 shows the structure of a typical ISFET and
surface of a commercial ISFET. Lipase, a fig.2 shows its surface topology as seen under a
triglyceride hydrolysing enzyme, would be microscope.
incorporated on the gate surface to specifically
monitor the concentration of triglycerides in
biological fluids.
2 Background
pH is a measure of the ion concentration in a liquid
and is defined as the negative logarithm of the
Hydrogen ion concentration. It is measured in
terms of the potential given by the Nernst equation
(see also [1]):
Fig.1 Structure of ISFET
1
time and low short-term drift. The system was
expected to resolve pH variations in the order of
0.1pH, calling for a high sensitivity. The ISFET
satisfies these conditions, but demands elaborate
considerations in the interface circuitry.
5 Circuit design
2
700 pH4
600
500 pH7
Id(uA)
400 pH9.2
300
200
100 Vref = 0.5V
0
0 1 2 3 4 5 6 7 8 9 10
Vds(V)
3
57.6mV/pH as shown by the graph of fig.10 Table 1. Measuring pH in low sample volumes
(labelled ‘ckt-2’). pH Sample pH Output
volume (mV)
2.2 ckt-2 (µL)
7 100 706
1.7 50 707
Vgs (V)
40 706
1.2 30 707
ckt-1 20 Unstable reading
0.7 10 Unstable reading
2 3 4 5 6 7 8 9 10 11 12 4 100 405
50 404
pH
40 405
30 Unstable reading
Fig.10 pH-mV curves for circuits of figs. 7 & 9 20 Unstable reading
10 Unstable reading
6 Results 9 100 905
50 905
The system was put through various tests to 40 906
evaluate its suitability for the actual application, 30 Unstable reading
and the results of these are presented below. 20 Unstable reading
10 Unstable reading
2.05 pH9
2
1.95
Vout (V)
pH7
1.9
1.85 Error<9mV
1.8
1.75 pH4
Sample Droplet 1.7
0 20 40 60
Time (min)
Fig.11 Sensor with 50µL sample
Fig.12 Hysteresis and short-term drift
A common problem in biological measurements is
the extremely small quantities of samples available. 6.3 Long term drift
Therefore, one of the primary objectives of the
design was focussed on making measurements on A slow drift of 10mV was observed over a one-
small volume samples. The ISFET geometry was hour period, as shown in fig.13.
well suited for this, with an exposed sensing area of
2mm diameter, as can be seen in Fig 3b. By 1.12
positioning the reference electrode with its orifice 1.10
in proximity to the ISFET’s sensing area as shown
Vout (V)
1.08
in fig.11, the sample could be applied with a micro 1.06
litre pipette. Stable readings were obtained with 1.04
sample volumes as low as 50 micro litres. 1.02
1.00
Table 1 shows the readings obtained with 0 10 20 30 40 50 60 70
diminishing sample volumes. The direct pH Time (min)
readout signal from circuit-2 was used for this.
Fig.13 Drift characteristics
4
6.4 Evaluation for use as biosensor appropriately. It also requires to be stored in 3M
NaCl solution.
The device was tested to detect triglycerides.
Hydrolysis of triglycerides at 10 mM (Potassium 7.2 Circuit-related
phosphate buffer 5mM, pH7.6) was monitored in
5ml volume in the presence of Bacterial lipase (40 7.2.1 Drift, noise and EMI
µg /ml). The mV signal was followed after the
addition of lipase. The change in pH as a function Circuit-related problems include drift associated
of time is shown in the graph of fig.14. with operational amplifiers and susceptibility to
electromagnetic interference. The OP05 and TL071
1.89 operational amplifiers were selected for low drift,
1.88 low noise, high input impedance and low bias-
1.87 current specifications. Figure 12 shows the overall
Vout (V)
5
Special care is needed on the part of the end-user in standards and test samples. The support and
all stages of the measurement to eliminate these encouragement from Shri. Sekar Ramachandran
errors. and Shri. G.G. Kingi of Instrumentation Group,
CCMB is also acknowledged.
8 Instrumentation
References
The following instruments were utilised in the
design and evaluation phase: [1] Willard, Hobar H. et al., 1986, Instrumental
• Fluke-45 dual display bench-top Methods of Analysis, CBS, New Delhi, India,
multimeter Chap. 22.
• Fluke-105B Scope Meter [2] Prichard E. and Lawn, R., 2003, Measurement
• Hinditron86 - 4½digit DMM of Ph, Royal Society of Chemistry, London, Chap.
• Meco 3½ digit DMM 6.
• Pacific-PDC20 Component Development [3] Bergveld, P., 1970, “Development of an ion-
System sensitive solid-state device for neuro-physiological
• Genrad-1657 RLC Digibridge measurements,” IEEE Trans. Biomed. Eng. BME-
17
Figure 15 shows the instrumentation set-up used [4] Jung-Chuan Chou, Ching-Nan Hsiao, 2000,
during initial stages of the design. “Drift behaviour of ISFETs with a Silicon H-SiO2
gate insulator”, Materials Chemistry and Physics,
63.
[5] Burr-Brown Linear Products Data Book
1996/1997, Burr-Brown Corporation, USA.
[6] Dybko, Artur, 2001, “Errors in Chemical
Sensor Measurements”, Sensors, I, 29-37.
[7] Sakai T, et al, 1987, “Ion Sensitive FET with a
Silicon – Insulator – Silicon structure “,
Proceedings of the Transducer- 87
[8] Shul A A et al, 1996, “Operation of an ISFET
with non- insulated substrate directly exposed to
the solution”, Sens, Actuators, B 30
[9] Ligtenberg H C G and Leuveld I G M, 1987,
“ISFET based measuring device and method for
correcting drift”, patent 4,701, 253
[10] Wong H S and White A H , 1989, “ A CMOS
Fig. 15 Instrumentation setup integrated ISFET operational amplifier, chemical
sensor employing differential sensing”, IEEE,
Trans. Electronics Devices 36
Conclusion
[11] Robin L, 1993, “Sensing developments using
ISFETS”, Labmate 18
A measuring circuit was built with a commercial
[12] Gumbrecht W, Schelter W and Montag B,
ISFET as the sensing element. A linear, near-
1990, “ On line Blood electrolyte monitoring with a
Nernst sensitivity of 57.6 mV/pH was achieved in
ChemFET microcell systems, Sens. Actuators B 1
the range 4pH to 9pH. The speed of response,
short-term drift and hysteresis were measured to be
within the limits required by end-use objectives.
Stable readings on sample volumes as low as 50µL
could be achieved. The viability of using the device
as a biosensor for detecting triglycerides was also
established. However, the enzyme (lipase) has to be
immobilised on the ISFET’s sensing surface for
actual utility as biosensor and is currently under
study.
Acknowledgements
The authors wish to thank Dr.Madhusudhan Rao,
Scientist, CCMB and his group for providing
valuable inputs pertaining to the research
applications as well as providing the necessary