Abstract

Bulk micromachining is the earliest and best-characterized method of

producing micromachined devices. Its principle consists of etching deeply into
the silicon wafer.

Definition
Bulk micromachining is a set of processes that enable the 3D sculpting of
various materials (mainly silicon) to make small structures that serve as
components for MEMS devices..

Basic Methodology
Bulk Micromachining of Silicon-Based Materials
Bulk micromachining of silicon uses wet- or dry-etching techniques in
conjunction with etch masks and etch-stop techniques to sculpt a microstructure
from the silicon substrate. The available etching methods fall into three
categories in terms of the state of the etchant: wet, vapor and plasma. Wet
chemical etch is the most popular method among these techniques due to the
process being cheap and easy. There are two major strategies, isotropic etching
and anisotropic etching

Bulk micromachining processing steps

 Deposition
 Photolithography
 Etch
 Bulk dry or wet etching
There are 2 types of etching can be used in bulk micromachining:
 Wet etching
 Dry etching

Wet Etching

Isotropic Etching

Anisotropic Etching
Isotropic Etching of Silicon

Anisotropic Etching of Silicon

Dry Etching

Reactive Ion Etching (RIE) uses a plasma to etch straight walled structures on
the wafer and provides a means for dry etching silicon.

Process chemistries differ depending on the types of films to be etched. Those

used in dielectric etch applications are typically fluorine-based. Metal etch uses
chlorine-based chemistries

Bulk micromachining advantages

• They are Inexpensive
• They can make high aspect ratio
• Good for making micromechanical parts:
holes, trenches, pits and MEMS
• They can be done much faster

Bulk micromachining disadvantages

• Not easily integrated with
microelectronic devices
• Cannot be layered on the same wafer
• part complexity must be relatively simple

Bulk micromachining Applications

 Accelerometer devices (primarily for airbag deployment sensors)
 pressure sensors for automotive, industrial control, and biomedical
markets.
 Free-standing membranes
 Cantilevers