You are on page 1of 30

Motion Control

Rotation Stages

2022
Volume #3r
Company
STANDA FACTS FIELDS OF ACTIVITY
ዧ In the photonics business ዧ Vibration isolation
since 1987 ዧ Precise adjustment of optics
ዧ Factory located in Vilnius,
ዧ Opto-mechanics
Lithuania
ዧ Motion control
ዧ Employs 200 people and growing
ዧ Automation
ዧ More than 10 000 m2 of factory
space ዧ Solid state micro lasers
ዧ Represented by 30 distributors ዧ Light measurement equiment
ዧ Sales to 80 countries across the ዧ OEM solutions for science and
globe industry

OUR MISSION
ዧ Facilitate scientific research
ዧ Increase productivity of our
partners
ዧ Create value for customers via
innovation
ዧ Rock`n`Roll Motion Control

+370-5-2651474 +370-5-2651483 sales@standa.LT www.standa.LT 1


Contents
8MRL184 4 and more at
Torque Motor Rotary Stage
www.standa.LT
8MRL182 6
Torque Motor Rotary Stage

8MRL122 8
Torque Motor Rotary Stage

8MRL120-15 10
Torque Motor Rotary Stage

8MRL80 12
Torque Motor Rotary Stage

8MRL180, 8MRL250 14
Torque Motor Rotary Stage

8-0143 16
Torque Motor Gimbal Stage

8-0165 18
Torque Motor Gimbal Stage

ACS SPiiPlusCM 20
EtherCAT® Master Control
Module
With 1, 2, or 3 Integrated
Universal Motor Drives

ACS NPMpm 23
EtherCAT® Single/Dual Axis
NanoPWM Drive Module

LUMS 26
Laser Machining Software:
Universal Micromachining

2 +370-5-2651474 +370-5-2651483 sales@standa.LT www.standa.LT


Brief Ordering Information
Prices All prices are EXW (Incoterms 2010) Vilnius, Lithuania and do not include any taxes. Quantity
discounts as well as research application discount are available on request.

Payment 30 days net by bank wire transfer. Money Orders, Bank and Company Checks are accepted –
in this case please add 1% to lump sum of invoice to cover cashing charges. Credit
cards – VISA, MASTERCARD are accepted.

Certificate All items shown in this catalogue are supplied with Certificate of Origin Form EUR 1. AII
of origin items are import duty free when importing to EC and EFTA countries.

Warranty All products of Standa are guarantied to be free from defects in material and workmanship
for a period of one year after delivery. Standa does not assume liability from installation,
labour or consequential damages. Visit www.standa.LT for details.

Delivery Standard products are stocked and shipped off-shelf after receipt of your order. Large
volume orders are delivered under mutually agreed terms. If not altered shipping charges
are prepaid and added as separate item in the invoice.

Ordering We accept orders placed by mail, fax or email.


Mail orders should be sent to: Standa Ltd.
P.O. Box. 377, 03012 Vilnius, LITHUANIA
For prompt ordering, please use fax, email or www:
Fax: +370 5 2651483 E-mail: sales@standa.LT URL:
www.standa.LT

See General Terms & Conditions on www.standa.LT 

Our new catalogue of Optical Components

ዧ Spherical Lenses ዧ Beam splitters


ዧ Windows ዧ Color glass filters
ዧ Prisms ዧ ND filters
ዧ Polarization components ዧ Interference filters
ዧ Metal coated mirrors
ዧ Dielectric high power
custom mirrors

Ask for free copy or download from


www.standaphotonics.com

www.youtube.com/StandaLTD

Find more information on

www.facebook.com/Standa.ltd www.standa.LT
+370-5-2651474 +370-5-2651483 sales@standa.LT www.standa.LT 3
8MRL184
Torque Motor Rotary Stage

FEATURES
ዧ Direct-Drive (Torque) Motor
Rotation Stage
ዧ Rotation velocity up tp: 555 rpm
ዧ Radial load up to 25 kg
ዧ Non-contact optical encoder
ዧ Resolution up to: 0.0024 arcsec
ዧ High position accuracy:
±1.50 arcsec
The 8MRL184 series rotary stage is based on 3 phase servo/BLDC
ዧ Ultra-high bi-directional
torque frameless ultra thin motor. Direct drive design enables:
repeatability: 0.26 arcsec RMS backlash less motion control, low friction, ultrahigh bandwidth,
ዧ Low excentricity: ±2.5 μm smooth velocity, exceptional accuracy, and ultrahigh precision.
Unique torque motor technology ensures low cogging, low total
ዧ Available with ultrahigh precision
harmonic distortion and smooth motion with low position error.
cam Chuck up to d150 mm
D150 mm CAM chuck holder is available, while precision collet
ዧ Available with ER25 collet holder holder ER25 can be fit as well.
ዧ Compact design Disc type optical encoder located directly on the moving part,
allows reading angular position with down to 0.00000067055°
angular resolution. Ultra-precise crossed roller bearing system
ensures 0.26 arcsec RMS bi-directional repeatability, while
calibrated absolute angular accuracy is ±1.50 arcsec.

M6x14 deep Ø 16
6 holes Clear aperture M6x14 deep
6 holes 22,5
22,5
45

45
140
130
75

75
65
15

100 100

M6x9 deep
12 holes
°
60
Ø 100
Ø 150
182
150
220

Ø 60

120°
For M6 (1/4-20) screw
4 clearance slots

62
150
184

4 +370-5-2651474 +370-5-2651483 sales@standa.LT www.standa.LT


Model Units 8MRL182-20

KINEMATICS & FEEDBACK INFORMATION


Travel range deg ±360
Encoder type Optical
Encoder model LEn5
Encoder resolution 1) deg 0.0000006705523
Encoder interface 1Vpp analog or RS422 digital
Internal multiplier Optional
Multiplication factor ×4 to ×65536
Encoder grating period µm 40
Reference mark (index) YES
Absolute accuracy (before calibration) 2) µrad / arcsec ±267 / ±55
Absolute accuracy (after calibration) µrad / arcsec ±7.27 / ±1.5
Uni-directional repeatability µrad / arcsec TBD
Bi-directional repeatability (peak to peak) 2) µrad / arcsec ±2.42 / ±0.5
Bi-directional repeatability(RMS) 2) µrad / arcsec 1.26 / 0.26
Excentricity 3) µm ±5
Wooble 3) µrad / arcsec ±12.12 / ±2.5
Maximum velocity (no load @ 300 VDC) 4) deg/s / RPM 3330 / 555
Maximum acceleration (no load) 5) sdeg/s2 250000
Limits switches type (safety) N/A
Limit switch polarity (safety) N/A
Limit switch voltage V N/A

LOAD, GUIDING & TRANSMISSION INFORMATION


Design type Torque motor stage (Direct drive)
Motor model TM5
Motor design type Torque motor
Maximum bus voltage VDC 320
Maximal continues current APK 4.6
Maximal peak current APK 7.3
Maximal continues torque Nm 15.7
Maximal peak torque Nm 21.7
Number of poles 36
Load capacity (central) 6) kg 50
Load capacity (radial) 6) kg >25
Moving mass 7) kg 0.6
Guiding system 2 × Crossed roller bearings; 2 × radial bearings

MATERIAL AND ENVIRONMENT CONDITIONS


Housing material Aluminum alloy
Housing coating (finish) Black anodizing
Environment pressure Normal atmosphere
Operating temperature °C 20±2

CONTROL, COMMUNICATION AND CABLING


Recommended controllers 8) 8SMC5-USB or ACS Product Line
Recommended drivers 8) 8SMC5-USB or ACS Product Line
Recommended power supply 9) 1 phase / 3 phase source
Built-in communication interface EtherCAT / RS232 / USB / TCP-IP
Cable length m 2 (cab be rquested)
Differential outputs 10) On request

ACCESSORIES INFORMATION
Base plate for mechanical interface Not required
OxOy stack Angle bracket required
Z configuration N/A

ADDITIONAL DETAILS
Precision cam chuck Available up to ø150 mm
Precision collet holder Available ER25
Dimensions of moving platform (D) mm ø180
Stage dimensions (W × L × H) mm 218 × 180 × 75
Measurement system Metric / Imperial
Weight kg TBD

+370-5-2651474 +370-5-2651483 sales@standa.LT www.standa.LT 5


8MRL182
Torque Motor Rotary Stage

FEATURES
ዧ Direct-Drive (Torque) Motor
Rotation Stage
ዧ Rotation velocity up tp: 555 rpm
ዧ Non-contact optical encoder
ዧ Resolution up to: 0.0024 arcsec
ዧ High position accuracy:
±1.50 arcsec
ዧ Ultra-high bi-directional
repeatability: 0.26 arcsec RMS
ዧ Low excentricity: ±2.5 μm
ዧ Available with ER25 collet holder The 8MRL182 series rotary stage is based on 3 phase servo/BLDC
torque frameless ultra thin motor. Direct drive design enables:
ዧ Compact design
backlash less motion control, low friction, ultrahigh bandwidth,
smooth velocity, exceptional accuracy, and ultrahigh precision.
Unique torque motor technology ensures low cogging, low total
harmonic distortion and smooth motion with low position error.
Disc type optical encoder located directly on the moving part,
allows reading angular position with down to 0.00000067055 °
angular resolution. Ultra-precise crossed roller bearing system
ensures 0.26 arcsec RMS bi-directional repeatability, while
calibrated absolute angular accuracy is ±1.50 arcsec.
The rotary stage can be operated in raster scan mode by
commanding small increment steps or continues rotation as a
trajectory component.

M6x14 deep M6x14 deep


6 holes 6 holes
75

45 45
27,5 27,5
10 10
0 0
100 180 100
180 218
150 (6") For M6 (1/4-20") screw
4 clearance holes
Ø 54

Ø 77
150 (6")

Ø 118

Ø 100

M4x7 deep M6x8 deep


8 holes 8 holes

6 +370-5-2651474 +370-5-2651483 sales@standa.LT www.standa.LT


Model Units 8MRL182-20

KINEMATICS & FEEDBACK INFORMATION


Travel range deg ±360
Encoder type Optical
Encoder model LEn5
Encoder resolution 1) deg 0.0000006705523
Encoder interface 1Vpp analog or RS422 digital
Internal multiplier Optional
Multiplication factor ×4 to ×65536
Encoder grating period µm 40
Reference mark (index) YES
Absolute accuracy (before calibration) 2) µrad / arcsec ±267. / ±55
Absolute accuracy (after calibration) µrad / arcsec ±7.27 / ±1.5
Uni-directional repeatability µrad / arcsec TBD
Bi-directional repeatability (peak to peak) 2) µrad / arcsec ±2.42 / ±0.5
Bi-directional repeatability (RMS) 2) µrad / arcsec 1.26 / 0.26
Excentricity 3) µm ±5
Wooble 3) µrad/arcsec ±12.12 / ±2.5
Maximum velocity (no load @ 300 VDC) 4) deg/s / RPM 3330 / 555
Maximum acceleration (no load) 5) sdeg/s2 250000
Limits Switches Type (Safety) N/A
Limit switch polarity (safety) N/A
Limit switch voltage V N/A

LOAD, GUIDING & TRANSMISSION INFORMATION


Design type Torque motor stage (Direct drive)
Motor model TM5
Motor design type Torque motor
Maximum bus voltage VDC 320
Maximal continues current APK 4.6
Maximal peak current APK 7.3
Maximal continues torque Nm 15.7
Maximal peak torque Nm 21.7
Number of poles 36
Load capacity (central) 6) kg 50
Load capacity (radial) 6) kg 10
Moving mass 7) kg 0.6
Guiding system 2× Crossed roller bearings

MATERIAL AND ENVIRONMENT CONDITIONS


Housing material Aluminum alloy
Housing coating (finish) Black anodizing
Environment pressure Normal atmosphere
Operating temperature °C 20±2

CONTROL, COMMUNICATION AND CABLING


Recommended controllers 8) 8SMC5-USB or ACS Product Line
Recommended drivers 8) 8SMC5-USB or ACS Product Line
Recommended power supply 9) 1 phase / 3 phase source
Built-in communication interface EtherCAT / RS232 / USB / TCP-IP
Cable length m 2 (cab be rquested)
Differential outputs 10) On request

ACCESSORIES INFORMATION
Base plate for mechanical interface Not required
OxOy stack Angle bracket required
Z configuration na

ADDITIONAL DETAILS
Precision cam chuck Available with 8MRL184 version
Precision collet holder Available ER25
Dimensions of moving platform (D) mm ø180.00
Stage dimensions (W × L × H) mm 218 × 180 × 75.00
Measurement system Metric / Imperial
Weight kg TBD

+370-5-2651474 +370-5-2651483 sales@standa.LT www.standa.LT 7


8MRL122
Torque Motor Rotary Stage

FEATURES
ዧ Travel range: ±360 deg
ዧ Low Excentricity & Wooble
ዧ Resolution: up to 26.632 nrad
ዧ Direct drive zero backlash system
ዧ High resolution non-contact
optical incremental encoder
ዧ Bidirectional repeatability:
±7.3 µrad (<±2.9 µrad RMS)
ዧ Maximum velocity: 1500 rpm
ዧ Maximum Acceleration:
18 krpm/s
Torque Motor Based Rotary Stage of series 8MRL122 are based on
ዧ 2× High accuracy crossed roller
3 phase rotary brushless servo motor technology. BLDC technology
bearings
allow user to reach motion with high accuracy, repeatability, motion
ዧ Accuracy: <±15.00 µrad stability and low friction. In order to proof precision of stage and
imitate working condition, Standa provides measurement reports
ዧ Long life performance guaranteed
in both: disassembled and assembled conditions (if required with
ዧ Easy integration with load of customer).
metric/imperial opto-mechanical Rotary non-contact optical encoder as a feedback system
systems guarantees direct control of position with sub nanoradian
ዧ Multy axes system in 8-0165 resolution.
gymbal implementation available 140
ዧ All measurement reports are
125 (5")

included by default!
24

ዧ Cables Can be customized for


50 (2")
101

different OEM electronics


ዧ Optimized for vertical orientation
11

ዧ Can be delivered with variable for M6 (1/4-20) screw 142


6 clearance holes
chcuk system (variable diameter Ø 40
45°
sample holder) M4x6 deep
90
°

16 holes
Ø 70
134

Ø 88

Ø 16
73

Cables
clear aperture

Base Plate
12

3BP-122-16-01
(included)

8 +370-5-2651474 +370-5-2651483 sales@standa.LT www.standa.LT


Model Units 8MRL122-16

KINEMATICS & FEEDBACK INFORMATION


Travel range deg ±360
Encoder type Optical
Encoder model LEn4
Encoder resolution 1) deg 0.00000109863281
Encoder interface Differential RS422 or 1Vpp
Internal multiplier YES (optionally analog SIN/COS)
up to ×200 (if integrated interpolator)
Multiplication factor
up tp ×65536 (if interpolated by driver)
Encoder grating period µm 40
Reference mark (index) - YES
Absolute accuracy (before calibration) 2) µrad / arcsec ±218 / ±45
Absolute accuracy (after calibration) µrad / arcsec ±14.54 / ±3
Bi-directional repeatability (peak to peak) 2) µrad / arcsec ±7.3 / ±1.5
Bi-directional repeatability (RMS) 2) µrad / arcsec ±2.9 / ±0.6
Excentricity 3) µm ±5.
Wooble 3) µrad / arcsec ±19.4 / ±4
Maximum velocity (no load @ 300 VDC) 4) deg/s / RPM 11196 / 1868
Maximum acceleration (no load) 5) sdeg/s2 / kRPM/s 1080000 / 180
Limits switches type (safety) N/A
Limit switch polarity (safety) N/A
Limit switch voltage V N/A

LOAD, GUIDING & TRANSMISSION INFORMATION


Design type Torque motor stage (Direct drive)
Motor model TM1
Motor design type Torque motor
Maximum bus voltage VDC 300
Maximal continues current APK 5.1
Maximal peak current APK 7.3
Maximal continues torque Nm 5.4
Maximal peak torque Nm 6.7
Number of poles 20
Load capacity (central) 6) kg 20
Load capacity (radial) 6) kg 5
Moving mass 7) kg 0.2
Guiding system 2× Crossed roller bearings

MATERIAL AND ENVIRONMENT CONDITIONS


Housing material Aluminum alloy
Housing coating (finish) Black anodizing
Environment pressure Normal atmosphere
Operating temperature °C 20±2

CONTROL, COMMUNICATION AND CABLING


Recommended controllers 8) 8SMC5-USB or ACS Product Line
Recommended drivers 8) 8SMC5-USB or ACS Product Line
Recommended power supply 9) 2 phase / 3 phase source
Built-in communication interface EtherCAT / RS232 / USB / TCP-IP
Cable length m 2 (cab be rquested)
Differential outputs 10) On request

ACCESSORIES INFORMATION
Base plate for mechanical interface Not required
OxOy stack Angle bracket required
Z configuration na
Cam holder available
Collet holder available

ADDITIONAL DETAILS
Dimensions of moving platform (D) mm ø90.00
Stage dimensions (W × L × H) mm 151×122×62
Measurement system Metric / Imperial
Orthogonality 11) µrad / arcsec N/A
Weight kg TBD

+370-5-2651474 +370-5-2651483 sales@standa.LT www.standa.LT 9


8MRL120-15
Torque Motor Rotary Stage

FEATURES
ዧ Travel range: ±360 deg
ዧ Low Excentricity & Wooble
ዧ Resolution: up to
0.000000762939453125 deh
ዧ Direct drive zero backlash system
ዧ High resolution non-contact
optical incremental encoder
62

ዧ Bidirectional repeatability:
±7.30 µrad (<±2.9 µrad RMS)
ዧ Maximum velocity: 1500 rpm
151

ዧ Maximum Acceleration:
M4x7,5 deep M3X6 deep
18 krpm/s 6 holes 6 holes

ዧ High accuracy crossed roller


60

bearings
°

ዧ Accuracy: <±15 µrad Ø 122

Ø 65
ዧ Long life performance guaranteed
ዧ Easy integration with
122

Ø 90
metric/imperial opto-mechanical Ø 50

systems
ዧ ER20 collet holder available
ዧ Multy axes system in 8-0165 or
For M6 (1/4-20) screw
8-0143 gymbal implementation 4 clearance holes
100 (4")

available
8MRL120-15
ዧ All measurement reports are
included by default!
ዧ Cables Can be customized for
different OEM electronics

10 +370-5-2651474 +370-5-2651483 sales@standa.LT www.standa.LT


Model 8MRL120-15-MEn

KINEMATICS & FEEDBACK INFORMATION


Angular range 360 Deg
Encoder type Optical
Encoder model Len3
Encoder resolution 1) 0.0000625 Deg
Encoder interface Differential rs422
Internal multiplier Yes (optionally analog sin/cos)
Multiplication factor 200
Encoder grating period 0.05 deg
Reference mark (index) Yes
Absolute accuracy 2)
Before calibration ±218 Μrad / ±45.00 Arcsec
After calibration Request
Bi-directional repeatability (peak to peak) 2) ±7.30 Μrad / ±1.50 Arcsec
Bi-directional repeatability (RMSs) 2) ±2.90 Μrad / ±0.60 Arcsec
Eccentricity 3) ±5.00 Μm
Wooble 3) ±19.40 Μrad / ±4.00 Arcsec
Maximum velocity (no load, @ 300 VDC) 4) <9000 Deg/s / 1500 rpm
Maximum acceleration (no load) 5) 1080000 Deg/s2 / 180 krpm/s2
Maximum torque (continuous) 5) 5.4 Nm
Limits switches N/a

LOAD, GUIDING & TRANSMISSION INFORMATION


Design type Torque motor (Direct-Drive) rotation stage
Linear motor model TM 105.34N
Linear motor design type Torque motor
Maximum bus voltage >300 VDC
Load capacity (centrally placed) 6)
Horizontal 40 kg
Vertical 20 kg
Moving mass 7) request
Guiding system Crossed roller bearings

MATERIAL & ENVIRONMENT CONDITIONS


Housing material Aluminum alloy
Housing coating (finish) Black anodizing
Environment pressure Normal atmosphere
Operating temperature 20±2 °C

CONTROL, COMMUNICATION AND CABLING


Recommended controllers 8) ACS Products Line or 8SMC5-USB series
Recommended drivers 8) ACS Products Line or 8SMC5-USB series
Recommended power supply 9) 2 phase / 3 phase source
Recommended communication interface 12) EtherCAT / RS232 / USB / TCP-IP
Cable length 2 m (other by request)
Differential outputs 10) On request

ACCESSORIES INFORMATION
Base plate for mechanical interface Not required
Ox, Oy stack Through angle bracket

ADDITIONAL DETAILS
Dimensions of moving platform Ø 90 mm
Central aperture Ø 15, mm
Overall linear stage dimensions (W × L × H) 151 × 122 × 62 mm
Measurement system Metric / Imperial (Base)
RoHS Compliant
Weight 2.6 kg

+370-5-2651474 +370-5-2651483 sales@standa.LT www.standa.LT 11


8MRL80
Torque Motor Rotary Stage

FEATURES
ዧ Dedicated pneumatic ER collet
chuck (diameter of 0.2 to 7 mm)
see 8MRLP80-5
ዧ Travel range: ±360° (infinite)
ዧ Resolution: up to
0.000000762939453125 deg
ዧ Direct drive zero backlash ultra
high precision system 8MRL80 8MRLP80
ዧ High resolution non-contact
optical incremental encoder with Direct drive torque motor technology allow user to reach highly
index marker dynamic motion featured with: high positioning accuracy, bi-
ዧ Bidirectional repeatability: directional repeatability, motion stability and low friction. Rotary
<±1.5 arcsec (±0.6 arcsec RMS) stages 8MRL80 have clear aperture of 5 mm while 8MRLP80 have
dedicated pneumatic collet holder dedicated for ER11 collets.
ዧ Maximum velocity: >4000 rpm Within variety of acceptable diameters (0.2 to 7 mm) 8MRLP80
ዧ High precision crossed roller is perfect for high precision laser turning applications, like: laser
bearings gurantees <±5.00 µm cutting, scribing, marking, stent cutting etc.
eccentricity & <±4.00 arcsec Rotary non-contact optical encoder as a feedback system
wobble guarantees direct control of position with nanoradian resolution.
Naturally aged aluminum alloy guaranties high temperature
ዧ Accuracy: <±3 arcsec
stability, lightweight of 8MRL80 stage and excellent long period
ዧ Clear aperture: 5 mm kinematics without drift of its performance. Compact crossed roller
bearing provide perfect resistance to load in vertical direction.
ዧ Long life performance guaranteed
Rotary Stage of series 8MRL80 can be prepared for clean rooms
ዧ Multy axes AB Stage (gimbal) is and vacuum up to 10-3 torr with minor changes.
available in short delivery time
ዧ Can be applied to industry
Ø 66
Ø 24

applications like: laser cutting,


18

scribing, drilling, marking, Ø 15H7 M6x9 deep


Ø 5 aperture
2

Nozzle for

turning, stent cutting, metrology, Ø4 mm pipe (P=5...6 bar)

positioninng
94,5

Ø 80h8
76,5
57,5

ዧ All measurement reports are


Ø 80h8
51,5

included by default! System is


tested as a system - 0,2
Ø 80 - 0,3
4,5

- 0,2
Ø 80 - 0,3

ዧ Cables Can be customized for


4,5

M3x4 deep Ø 80
6 holes for M3 screw
6 clearance holes
Ø 94
different OEM electronics for Ø 86
58,5
°
60

direct integration into a machine! Ø 94 Ø 86


Ø 60
30°

15°

Ø 40
60
60

Ø 52
°

M3x5 deep For M3 screw


12 holes 6 clearance holes

8MRL80 8MRLP80

12 +370-5-2651474 +370-5-2651483 sales@standa.LT www.standa.LT


Model Units 8MRL80

COLLET HOLDER
Pneumatic collet holder Yes
Acceptable collet size ER11
Minimal internal diameter mm 0.2
Minimal internal diameter mm 7.0
Option name P

KINEMATICS & FEEDBACK INFORMATION


Travel range deg ±360
Encoder type Optical
Encoder model LEN3
Encoder resolution (drive mult. ×4096) 1) arcsec 0.00000076294
Encoder interface RS422 / 1Vpp
Encoder grating period µm 20
Reference mark (index) YES
Absolute accuracy (before calibration) 2) µrad / arcsec ±218 / ±45
Absolute accuracy (after calibration) µrad / arcsec ±14.54 / ±3
Bi-directional repeatability (peak to peak) 2) µrad / arcsec ±7.3 / ±1.5
Bi-directional repeatability (RMS) 2) µrad / arcsec ±2.9 / ±0.6
Excentricity 3) µm ±5
Wooble 3) µrad / arcsec ±19.4 / ±4
Maximum velocity (no load @ 300 VDC) 4) deg/s / RPM >4100
Maximum acceleration (no load) 5) sdeg/s2 / kRPM/s –
Limits switches type (safety) –

LOAD, GUIDING & TRANSMISSION INFORMATION


Design type Toruq motor (direct drive) rotary stage
Motor model TM3
Motor design type Torque motor (iron core)
Maximum bus voltage VDC <600 VDC
Maximal continues current APK 4.64
Maximal peak current APK 7.56
Maximal continues torque Nm 0.27
Maximal peak torque Nm 0.39
Number of poles 8
Load capacity (central) 6) kg 15
Load capacity (radial) 6) kg 8
Guiding system Crossed Roller Bearing

MATERIAL AND ENVIRONMENT CONDITIONS


Housing material Aluminum
Housing coating (finish) Black anodizing
Environment pressure Normal atmosphere
Operating temperature °C +5 ... +30

CONTROL, COMMUNICATION AND CABLING


Recommended controllers 8) CMNT / CMHP
Recommended drivers 8) CMNT / CMHP
Recommended power supply 9) 1 phase / 3 phase source
Built-in communication Interface –
Cable length m 0.2
Differential outputs 10) –

ACCESSORIES INFORMATION
Collet holder 1) YES. -P version ER11
Base plate for mechanical interface Not required
OxOy stack Angle bracket required

ADDITIONAL DETAILS
Central aperture (D) mm 5.00
Stage dimensions (D × H) mm 94 × 62
Measurement system
Weight kg 1.4

+370-5-2651474 +370-5-2651483 sales@standa.LT www.standa.LT 13


8MRL180, 8MRL250
Torque Motor Rotary Stage

8MRL180
8MRL250

FEATURES Standa 8MRL series rotation stages are based on direct drive
torque motors in order to avoid mechanical inaccuracies (e.g.
ዧ High angular velocity up to backlash) and reach high dynamical response of rotation system.
6600 deg/s Ironless design of motor allows high acceleration and high velocity
ዧ High angular acceleration and it perfectly suits for a start-stop application which is especially
important in: 3D printing, laser fabrication, wafer scanning or PCB
ዧ High bi-directional repeatability
etching applications.
up to <5 arcsec
High quality bearings and feedback system allows user to reach
ዧ Sophisticated control & drive high positioning accuracy. Mechanical accuracy of stages is
systems personally mapped using laser autocollimator in order to avoid
ዧ Analog encoder interface and constant inaccuracy. User is allowed to choose up to ×200
wide range of RS422 interpolation interpolation using Standa external interpolation system or fit
factors necessary servo controller with internal interpolation circuit for
ዧ Perfectly fits with 8MTL series higher resolution of stage. 8MRL series stages are capable to
linear motor high resolution operate with <4 arcsec bi-directional repeatability.
stages

Connector Connector
C091 31C004 100 2 C091 31C004 100 2
Connector Connector Connector
DB15(M) HDB15(M) DB15(M) Connector
HDB15(M)
38

38

195 257
175 (7'')
225 (9'')
125
100 175
75 100
50 75
25 For M6 (1/4-20) screw
3 clearance slots
50
25 For M6 (1/4-20) screw
3 clearance slots
Ø 180
Ø 250
M6x8 deep
17 holes M6x8 deep
25 holes
M4x8 deep
175 (7'')

225 (9'')

16 holes M4x8 deep


125
100
75
50
25

175
100

12 holes
75
50
25
237,5

310

8MRL180 8MRL250

14 +370-5-2651474 +370-5-2651483 sales@standa.LT www.standa.LT


Model 8MRL180 8MRL250

MOTION CONTROL
Travel range (coarse/fine) 360/360 deg
Encoder type 1) 1Vpp Analoge inductance
Encoder resolution 2) 2 arcsec 1 arcsec
Bidirectional repeatability 5 arcsec 4 arcsec
Unidirectional repeatability On request
Accuracy (before calibration) 50 arcsec 40 arcsec
Axial runout 30 µm 30 µm
Radial runout 30 µm 20 µm
Backlash 0 arcsec
Maximal speed 6600 deg/s 3300 deg/s
Limit switches / reference mark Reference mark
Switch polarity / reference mark interface RS422

LOAD AND TRANSMISION INFORMATION


Horizontal load capacity 12 kg 20 kg
Vertical load capacity 12 kg 15 kg
Transmision type direct drive
Motor type 3-phase brushless motor
Nominal torque 6.4 Nm 6.9 Nm
Peak torque 21.6 Nm 22.9 Nm
Bearing type 4 contact ball bearings

CONTROL AND COMMUNICATION


Recommended controllers SPiiPlusEC
Recommended driver UDMlc series
Recommended power supply PS36-4.4-4
Connector on request
Cable length on request

MATERIAL AND ENVIROMENT CONDITIONS


Base material Aluminum
Finish Black anodized
Environment pressure up to 10-3 Torr
Ambient temperature on request

ACCESSORIES
Base plate 3BP8MRL180 3BP8MRL250
Connecting plate on request

ADDITIONAL DETAILS
Rotating platform diameter 180 mm 250 mm
Measurement system metric
Weight 5 kg 9 kg
Central aperture on request
1) Encoder can be equipped with external
interpolation circuit which will result differential
RS422 encoder interface.
2) Resolution is indicated using analog encoder
interface. While increasing the factor of external
interpolation circuit the higher resolution can be
adjusted for specific applications.

+370-5-2651474 +370-5-2651483 sales@standa.LT www.standa.LT 15


8-0143
Torque Motor Gimbal Stage

FEATURES
ዧ Travel range:
±360 deg (infinite) of Yaw axis;
±130 deg of Tilt axis
ዧ Low Excentricity & Wooble Torque Motor Based Gimbal Stage of series 8-0143 are based on 3
phase rotary brushless servo motor technology. BLDC technology
ዧ Resolution: up to 13.316 nrad
allow user to reach motion with high accuracy, repeatability, motion
ዧ Direct drive zero backlash system stability and low friction. In order to proof precision of stage and
ዧ High resolution non-contact imitate working condition, Standa provides measurement reports
optical incremental encoder in both: disassembled and assembled conditions (if required with
load of customer).
ዧ Bidirectional repeatability:
Rotary non-contact optical encoder as a feedback system
±7.30 μrad (< ±2.9 μrad RMS)
guarantees direct control of position with sub nanoradian
ዧ Maximum velocity: 1500rpm resolution.
ዧ Maximum Acceleration: Naturally aged aluminum alloy guaranties high temperature
180 krpm/s stability, softness of 8-0143 instruments and excellent long period
ዧ High accuracy crossed roller kinematics without drift of bearing. Compact crossed roller bearing
bearings provides perfect resistance to load in any direction.
Gimbal Stage of series 8-0143 can be prepared for clean rooms
ዧ Accuracy: < ±15.00 μrad
and vacuum up to 10-3 torr with small changes. For higher vacuum
ዧ Integrated magnetic brake for please contact Standa. Additional requirement of cleanliness could
safe operation be requested separately.
ዧ Long life performance guaranteed Gimbal Stage can be easily connected to standard imperial/
ዧ Easy integration with metric optical table directly. Stages also can be combined with
metric/imperial opto-mechanical the linear axes to supply entire 4 axes fabrication setup. 8-0143
systems can be equipped with pneumatic COLLET HOLDER 8MRLP120 for
fabrication application. 15 mm clear aperture is available in default
ዧ Can be suplied with customuized
configuration.
counterweight
Motion control of 8-0143 series translation stages is available with
ዧ Can be applied to light industry Standa or ACS motion Controllers & Drivers in exposed or housed
applications like: laser cutting, configurations.
scribing, drilling
For industry applications 8-0143 stages can be supplied mounted
ዧ All measurement reports are on standard optical table, horizontal XY stage or extremely flat
included by default! granite plate. 8-0143 stages have no active or passive protection
ዧ Cables Can be customized for from dust, therefore external dust protection must be applied in
different OEM electronics dusty environment.

16 +370-5-2651474 +370-5-2651483 sales@standa.LT www.standa.LT


SPECIFICATIONS
1) System can be delivered with standard analog
Model 8-0143
SIN/COS encoder interface for personal
Tilt (A) Axis Yaw (B) Axis interpolation or with integrated external
interpolator (up to x200).
KINEMATICS & FEEDBACK INFORMATION
2) Absolute accuracy & Bi-Directional
Travel range ±130 deg ±360 deg (infinite)
Repeatability, Wobble measurements
Encoder type Optical processed by 11DALI-COL electronic
Encoder model LEn2 autocollimator. Stages can be assembled with
Encoder resolution 1) 0.023 to 0.184 arcsec additional precision. Please contact Standa for
more information.
Encoder interface Differential RS422 or analog Sin/Cos
3) Eccentricity is measured by Zygo Michelson
Internal multiplier Yes (optionally analog SIN/COS) interferometer.
Multiplication factor x4 – 200 4) Maximum Velocity is electrically limited by
Encoder grating period 20 μm encoder and driver CUT-OF frequency (125kHz
Reference mark (index) Yes in analog interface; 50MHZ in RS422 digital
interface); maximum velocity is also limited by
Absolute accuracy (before calibration) 2) ±218 μrad / ±45 arcsec
bearing.
Absolute accuracy (after calibration) ±14.54 μrad / ±3 arcsec 5) Maximum Torque is limited by Drivers` Peak
Bi-directional repeatability (peak to peak) 2) ±7.3 μrad /±1.5 arcsec Current, Motors` Peak Current and External
Bi-directional repeatability (RMS) 2) ±2.9 μrad/±0.6 arcsec Load (inertia). Please contact Standa for
Excentricity 3) ±5 μm explanation.

Wooble 3) ±19.4 μrad / ±4 arcsec


6) Load Capacity is limited by position of load.
Please contact Standa for loading calculation.
Maximum velocity (no load @ 300 VDC) 4) < 9000 deg/s / 1500 RPM
7) Moving Mass is constant parameter of system
Maximum acceleration (no load) 5) 1080000 sDeg/s2 / 180 kRPM/s which characterize m0 or inertia of unloaded
LOAD, GUIDING & TRANSMISSION INFORMATION system.

Design Type Torque Motor Gymbal Stage


8) Recommended controllers & Recommended
drivers can be optimized for a certain
Motor Model TM1 application. Please contact Standa for
Motor Design Type Torque Motor recommendation.
Maximum Bus Voltage <320 VDC 9) Recommended power supply depends on
Maximal Continues Current 5.1 APK required duty cycle and load. Please contact
Standa for recommendation.
Maximal Peak Current 7.3 APK
10) Differential Outputs are available in passive
Maximal Peak Current with Heatsink 13.3 APK
(buffered) or active (modulated) way with
Maximal Continues Torque 5.4 Nm LCMv2.
Maximal Peak Torque 6.7 Nm 11) Scalar Control can be implemented with
Maximal Peak Torque with Heatsink 10.6 Nm USB/ TCP-IP / RS-232 communication
Number of Poles 20 interface; for vector control we recommend to
use EtherCAT.
Load Capacity (central) 6) 1 kg
Load Capacity (radial) 6) 1 kg
Moving Mass 7) 6.6 kg 1.55 kg
Guiding System Crossed roller bearings
MATERIAL AND ENVIRONMENT CONDITIONS
Housing Material Aluminum Alloy
Housing Coating (Finish) Black Anodizing
Environment pressure Normal Atmosphere
Operating Temperature 20±2 °C
122
Control, Communication and Cabling 149

Recommended controllers 8) 8SMC5-USB or ACS Product Line


ER20 ( to Ø 13mm)
Recommended drivers 8) 8SMC5-USB or ACS Product Line
Recommended power supply 9) 2 phase / 3 phase source
Recommended Communication Interface 11) EtherCAT / RS232 / USB / TCP-IP
161

Cable Length 2 m (cab be rquested)


100

Differential Outputs 10) On Request


ACCESSORIES INFORMATION Not required
299
Base plate for mechanical interface Gymbal type 349

A
ADDITIONAL DETAILS
Magnetic Brake Yes No For M6 screw
6 clearance slots View A
Dimensions of Moving Platform (D) Ø90 mm
Central Aperture (D) NA Ø15 mm
Stage Dimensions (W × L × H) 349 × 149 × 161 mm
100

Ø 4H7

Measurement System Metric / Imperial 2 holes

ROHS Complian 25 100 25


Weight 12.3 kg 106

+370-5-2651474 +370-5-2651483 sales@standa.LT www.standa.LT 17


8-0165
Torque Motor Gimbal Stage

FEATURES
ዧ Accuracy < ±15.00 µrad
ዧ Resolution: up to 13.316 µrad
ዧ Maximum velocity: 1500 rpm
ዧ Direct drive zero backlash system
ዧ High resolution non-contact
optical incremental encoder
ዧ Optional magnetic brake for safe
operation
ዧ Long life performance guaranteed
ዧ All measurement reports are
included by default!
ዧ Pneumatic ER20 COLLET
HOLDER 1) System can be delivered with standard analog
ዧ Cables can be customized for SIN/COS encoder interface for personal
interpolation or with integrated external
different OEM electronics interpolator (up to x200).

ዧ Adjustable Counter Balance for Absolute accuracy & Bi-Directional


2)

Repeatability, Wobble measurements


different weights processed by 11D-ALI-COL electronic

ዧ Continoues rotation
autocollimator. Stages can be assembled with
additional precision Please contact Standa for
more information.
3) Eccentricity is measured by Zygo Michelson
interferometer.
4) Maximum Velocity is electrically limited by
encoder and driver CUT-OF frequency (125 kHz
±115° in analog interface; 50 MHZ in RS422 digital
Ø 16 interface); maximum velocity is also limited by
clearance aperture bearing.
for cables
5) Maximum Torque is limited by Drivers` Peak
Current, Motors` Peak Current and External
135

Load (inertia). Please contact Standa for


73

explanation.
74

for M6 screw
6 clearance holes
6) Load Capacity is limited by position of load.
39 125
Please contact Standa for loading calculation.
61 154 140
256
7) Moving Mass is constant parameter of system
50
which characterize m0 or inertia of unloaded
Ø 80 Ø 65
system.
Ø 50
8) Recommended controllers & Recommended
Ø 15 drivers can be optimized for a certain
clearance aperture
application. Please contact Standa for
142

M3x6 deep
6 holes
recommendation.
M4x7,5 deep
9) Recommended power supply depends on
6 holes required duty cycle and load. Please contact
Standa for recommendation.
299 10) Differential Outputs are available in passive
(buffered) or active (modulated) way with
LCMv2.
11) Scalar Control can be implemented with USB/
TCP-IP / RS-232 communication interface; for
vector control we recommend to use EtherCAT.

18 +370-5-2651474 +370-5-2651483 sales@standa.LT www.standa.LT


Model Units 8-0165
Tilt (A) Axis Yaw (B) Axis

KINEMATICS & FEEDBACK INFORMATION


Travel range deg ±110 ±360 (infinite)
Encoder type Optical
Encoder model LEn3 LEn2
Encoder resolution 1) arcsec up to 0.003955078125 up to 0.00274658203125
Encoder interface Differential RS422 or 1Vpp
Internal multiplier Yes (external or by driver)
Multiplication factor up to ×200 by external; up to ×65536
Encoder grating period CPR 5000 7200
Reference mark (index) YES
Absolute accuracy (before calibration) 2) µrad / arcsec ±218 / ±45
Absolute accuracy (after calibration) µrad / arcsec ±14.54 / ±3
Bi-directional repeatability (peak to peak) 2) µrad / arcsec ±7.3 / ±1.5
Bi-directional repeatability (RMS) 2) µrad / arcsec ±2.9 / ±0.6
Excentricity 3) µm ±5
Wooble 3) µrad / arcsec ±19.4 / ±4
Maximum velocity (no load @ 300 VDC) 4) deg/s / RPM < 9000 / 1500
Maximum acceleration (no load) 5) sdeg/s2 / kRPM/s 108000 / 18
Limits switches type (safety) - NA

LOAD, GUIDING & TRANSMISSION INFORMATION


Design type Torque motor gymbal stage
Motor model TM1
Motor design type Torque motor
Maximum bus voltage VDC <320
Maximal continues current APK 5.1
Maximal peak current APK 7.3
Maximal continues torque Nm 5.4
Maximal peak torque Nm 6.7
Number of poles 20
Load capacity (central) 6) kg 1
Load capacity (radial) 6) kg 1
Moving mass 7) kg 3
Guiding system Double crossed roller bearings Crossed roller bearings

MATERIAL AND ENVIRONMENT CONDITIONS


Housing material - Aluminum alloy
Housing coating (finish) - Black anodizing
Environment pressure - Normal atmosphere
Operating temperature °C 20±2

CONTROL, COMMUNICATION AND CABLING


Recommended controllers 8) 8SMC5-USB or ACS Product Line
Recommended drivers 8) 8SMC5-USB or ACS Product Line
Recommended power supply 9) 1 phase / 3 phase source
Recommended communication interface 11) EtherCAT / RS232 / USB / TCP-IP
Cable length m 2 (cab be rquested)
Differential outputs 10) On request

ACCESSORIES INFORMATION
Base plate for mechanical interface Gymbal type
Pneumatic collet holder Yes, available ER20

ADDITIONAL DETAILS
Counter weight options Yes, available
Magnetic brake Yes, available
Dimensions of moving platform (D) mm ø90
Central aperture (D) mm ø15
Stage dimensions (W × L × H) mm 299×142×135
Measurement system Metric/Imperial
ROHS Complian
Weight kg 9.3

+370-5-2651474 +370-5-2651483 sales@standa.LT www.standa.LT 19


ACS SPiiPlusCM
EtherCAT® Master Control Module
With 1, 2, or 3 Integrated Universal Motor Drives

FEATURES
ዧ Supports up to 64 axes and thousands of I/O
ዧ Advanced Profile Generation and Servo Control
Algorithms for
ዧ Maximum Motion Performance
– ServoBoost
– LearningBoost
– MotionBoost
– Multi-axis Lookahead and Corner Rounding
– SmoothPath
– MIMO Gantry Control
– Cascaded Dual Loop Control
– Customized Algorithms (Contact ACS)
ዧ Universal Motor and Encoder Support for
Maximum Flexibility
ዧ Max Drive Current: 15/30 A Per Axis
ዧ Drive Supply Input: 85 – 265 Vac
The SPiiPlusCMxa is a member of ACS Motion Control’s
ዧ Built-In 4-Axis Pulse/Direction (PDMnt) Interface
SPiiPlus series of products and is designed to meet
ዧ Functional Safety: STO, SS1 the needs of OEMs with demanding multi-axis motion
ዧ 12 or 16 bit SinCos and Analog Input Resolution control applications. Its unique multi-processor
architecture leverages powerful profile generation
ዧ Feedback Channels: 4 (AqB, SinCos, or and servo control algorithms to maximize motion
Absolute) performance, while its universal motor and encoder
ዧ Digital I/O technology provides the system designer flexibility to
– 4 High-Speed Position Capture (MARK) Inputs control most any type of motor or stage. As an EtherCAT
master it can control ACS products within the SPiiPlus
– 8 Limit Sensor Inputs
Motion Control Platform as well as 3rd party EtherCAT
– 3 Brake Outputs products.
– 3 High-Speed Position Event Generation The SPiiPlusCMxa is highly configurable and supported
(PEG) Engines with up
by many advanced servo tuning and application
– to 10 Configurable Outputs development tools available in MMI Application Studio.
– 8 General Purpose Digital Inputs Users can control and generate motion profiles for up to
– 8 General Purpose Digital Outputs 64 axes. Configure the SPiiPlusCMxa to include 1, 2, or
ዧ Analog I/O 3 built in drives with one of three current levels: 5/10A,
10/20A, or 15/30A.
– 6 General Purpose Analog Inputs (shared with
SinCos) * The SPiiPlusCMxa is a drop-in replacement for the SPiiPlusCMba or
SPiiPlusCMhp offering improved jitter and noise performance and STO and
– 2 General Purpose Analog Outputs SS1 functional safety features.

20 +370-5-2651474 +370-5-2651483 sales@standa.LT www.standa.LT


COMMUNICATION CHANNELS ዧ MotionBoost, 2-axis SmoothPath, and 2-axis NURBS
ዧ Serial: One RS-232. Up to 115,200 bps are included with 4 kHz or 5 kHz (MPU cycle). For
MotionBoost BPTP profile generation at 20 kHz (SP
ዧ Ethernet: One, TCP/IP, 10/100/1000 Mbs
cycle), ServoBoost must be ordered in addition to
ዧ Simultaneous communication through all channels is MotionBoost. Contact your ACS sales representative
fully supported. for a quote for 3+ axis SmoothPath or 3+ axis NURBS
ዧ Modbus as client or server is supported over Ethernet feature.
and serial channels.
ዧ Ethernet/IP protocol as adapter is supported over SUPPORTED ETHERCAT SLAVES
Ethernet channel.
ዧ All ACS SPiiPlus Platform EtherCAT slave products
are supported. 3rd party EtherCAT drives can
PROGRAMMING be controlled via DS402 CoE protocol in Cyclic
ዧ ACSPL+ powerful motion language Synchronous Position (CSP) mode.
ዧ Real-time program(s) execution ዧ ACS recommends qualification of 3rd party EtherCAT
ዧ Up to 64 simultaneously running programs drives and I/O devices. Refer to ACS website for
ዧ NC programs (G-code) latest list of qualified devices and contact an ACS
ዧ C/C++, .NET and other high-level languages via host representative to discuss qualification
programming libraries
SERVO
MOTION TYPES A standard comprehensive set of powerful algorithms to
ዧ Multi-axis point-to-point, jog, tracking and sequential enhance accuracy, move & settle time, smooth velocity,
multi-point motion stability and robustness.
ዧ Multi-axis segmented motion with look-ahead – Servo Sampling and Update Rate: 20 kHz position,
20 kHz velocity, 20 kHz current
ዧ Arbitrary path with PVT cubic interpolation
– Advanced PIV cascaded structure
ዧ Third order profiles (S-curve)
– Loop shaping filters
ዧ Smooth on-the-fly change of target position or
velocity – Gain Scheduling
ዧ Inverse/Forward kinematics and coordinate – Gantry MIMO control
transformations (at application level) – Dual feedback / loop control
ዧ Master-slave with position and velocity locking – Disturbance rejection control
(electronic gear/cam) ዧ ServoBoost algorithm

MOTION PROCESSOR UNIT (MPU) MOTOR TYPES


ዧ Processor Type: Multi-core Intel Atom CPU (model Two- and three-phase permanent magnet synchronous
depends on controller configuration) (DC brushless/AC servo), DC brush, Voice coil, Two- and
ዧ RAM: 1 GB threephase stepper (micro-stepping open or closed loop,
ዧ Flash: 2 GB AC induction *.
* Consult Standa.
ETHERCAT PORTS
ዧ Two ports, Primary and Secondary
DRIVES
ዧ Protocols: CoE and FoE ዧ Type: digital current control with field oriented control
and space vector modulation.
ዧ NetworkBoost (optional) - Automatic network failure
detection and recovery using ring topology and
ዧ Current ripple frequency: 40 kHz
redundancy ዧ Current loop sampling rate: 20 kHz
ዧ Programmable Current loop bandwidth: up to 5 kHz
MPU/ETHERCAT CYCLE RATE ዧ Commutation type: sinusoidal. Initiation with and
ዧ The following options are available for MPU Cycle without hall sensors
Rate: ዧ Switching method: advanced unipolar PWM
– For Maximum Number of Axes = 2, 4, or 8: 2 kHz ዧ Protection: Over voltage, Phase-to-phase short circuit,
(default), 4 kHz, 5 kHz Short to ground, Over current, Over temperature,
motor over temperature
– For Maximum Number of Axes = 16 or 32: 2 kHz
(default), 4 kHz ዧ Feedback
– For Maximum Number of Axes = 64: 1 kHz ዧ Incremental Digital Encoder: Four, A&B,I; Clk/Dir,I;
(default), 2 kHz Electrical
ዧ NetworkBoost and Segmented Motion (XSEG) ዧ Interface: RS-422. Max. rate: 50 million encoder
features functionality can be limited as a function of counts/sec.,
MPU Cycle Rate and Number of Axes. Please refer ዧ Protection:
to Software Documentation or contact ACS for more – Encoder error
details. – Not connected
ዧ Sin-Cos Analog Encoder (optional): Three.1Vptp,
differential.

+370-5-2651474 +370-5-2651483 sales@standa.LT www.standa.LT 21


ዧ Max. Multiplication factor: ዧ Resolution: 12 bit, 16 bit optional
x4096 (12 bit), x65536 (16 bit) ዧ Outputs: Two, Single-end, ±10 V ±5%, 10 bit resolution
ዧ Maximum frequency: 500kHz
ዧ Automatic compensation of Offset, Phase and FUNCTIONAL SAFETY I/O
Amplitude ዧ Safe Torque Off (STO) Input
ዧ Protection: ዧ Electrical Interface: Dual-channel 24 V isolated
– Encoder error ዧ Safe Stop 1 (SS1) Feature
– Not connected. ዧ Deceleration time till STO activation: 110 – 230 ms.
ዧ Hall inputs: Three sets of three per axis. Single-ended,
Exact deceleration time value is fixed (SS1-t
5 V, source, opto-isolated. Input current: <7 mA.
functionality) and depends on product configuration (see
ዧ Absolute encoders (optional): Three, EnDat user manual for more details)
2.1(Digital)/2.2, Smart-ABS, Panasonic, Biss-A/B/C,
SSI. 5 V feedback supply: Total current available for
feedback devices: 1A
POWER SUPPLIES
The module is fed by three power sources.
PULSE/DIRECTION (PDMNT) A motor AC supply, a 24 Vdc control supply and 24 Vdc
motor brake supply.
INTERFACE During emergency conditions there is no need to remove
ዧ Number of P/D Command Axes: 4 the 24VDC control supply.
ዧ Type: RS-422. Up to 5 million pulse/sec. ዧ Drive Supply: 85 to 265 Vac, single or three phase, or
ዧ Programmable pulse width 120 – 375 Vdc
ዧ Range: 0.08 to 80 microseconds ዧ Control Supply: 24 Vdc ± 10%, 4 A
ዧ Motor Brake Supply: 24 Vdc ± 20%, 3 A
DIGITAL I/O
ዧ Limit Inputs: Eight. Left + right limit per axis PHYSICAL ENVIRONMENT
ዧ E-stop Inputs: One, software-level input Operating: 0 to +40°C. Storage : -25 to +60°C Humidity:
ዧ Registration Mark inputs: Four. RS422 5% to 90% noncondensing
ዧ Motor Brake Outputs: Three. 24 V, 1 A,optoisolated.
Powered by the 24 V Brake Supply. STANDARDS AND CERTIFICATIONS
ዧ General Purpose Outputs: Eight. Single-ended, (PENDING)
5 Vdc (±10%) or 24 Vdc (±20%), opto-isolated, ዧ CE Electrical Safety: IEC 61800-5-1
sink/source, 100 mA
ዧ CE EMC: IEC 61326-3-1, IEC 61800-3, EN 61500-5-2
ዧ General Purpose Inputs: 8 Single-ended, 5Vdc (±10%)
ዧ UL Electrical Safety: UL 61800-5-1
or 24Vdc (±20%), opto-isolated, sink/source
ዧ TUV STO & SS1 Functional Safety: IEC 61800-5-1,
ዧ Position Event Generator outputs (PEG): 10, RS-
IEC 61800-5-2
422, max rate 10 MHz (incremental). Outputs are
configurable for up to 3 PEG engines.
ACCESSORY PRODUCTS
ANALOG I/O ዧ CMUDMxa-ACC1: Mating connector kit
ዧ Inputs: Six ±10V, differential, 20 kHz sampling rate. ዧ STO-ACC1: STO Breakout Cable
2 inputs are consumed per connected SinCos
encoder. If all 3 SinCos encoders are connected, no
analog inputs are available.

Product
CMxayA… CMxayB… CMxayC…
(y - number of axes)
Number of built-in drives 1,2,3
Drive Supply voltage input [V] 85 - 265VAC, single or 3 phase or 120 - 375VDC
Control voltage input [Vdc] 24±10%
Phase current Cont./Peak Sine amplitude [A] 5 / 10 10/20 15/30
Phase current Cont./Peak RMS [A] 3.6 / 7.1 7/14 10.6/21.2
Peak current time [sec] 1
Max. output voltage [Vdc] (Vac in) x1.41 x 97%
Max. RMS input current
18A for 1-phase supply
1-phase supply [A] 18 24
15A for 3-phase supply
3-phase supply[A]
Min. load Inductance, at max. motor voltage
1
[mH]
Max. Heat dissipation per axis [W] 33 67 102
Weight [gram] 5750
Dimensions [mm³] 324x249x120

22 +370-5-2651474 +370-5-2651483 sales@standa.LT www.standa.LT


ACS NPMpm
EtherCAT® Single/Dual Axis
NanoPWM Drive Module

FEATURES
ዧ Powerful & Smart EtherCAT Drive ዧ Smart Motion related I/O
Module – Digital I/O
– Two drives per module for – Inputs: 4 encoder registration
Gantry control MARK / general purpose
– Voltage: 12 Vdc – 100 Vdc – Outputs: 2 Position Event
– Current: Up to 13.3 A / 40 A Generators, 2 motor brake /
(cont./peak) general purpose
ዧ The Ultimate Drive for Demanding ዧ Analog I/O
Positioning Applications – Inputs: 4, 12 bit resolution,
– Sub-nanometer standstill jitter ±10 V
– Nanometer tracking error and – Outputs: 4, 16 bit resolution,
optimal velocity smoothness ±10 V
ዧ A Lower Cost of Ownership
Alternative to Linear Drives
– Lower heat dissipation
– Better reliability
The NPMPM is a line of the most advanced servo drives available
– Significantly smaller
today.
– Simpler supply requirements
It is specifically designed to address the most demanding
– Digitally controlled and easy applications with regards to move and settle times, standstill
setup
jitter, and velocity smoothness, such as wafer metrology and
ዧ Uncompromised speed and inspection, FPD inspection, and ultra-precision machining for
resolution processing of optical components.
– Up to 4 Analog Sin-Cos 1Vptp It is based on the proprietary and unique technology that exceeds
encoders with frequency up to stand still jitter and tracking error performance that until now
10 MHz has been achieved only with linear drives, with reduced cost of
– Encoder multiplication of 4 to ownership.
65,536 With the optional combination of a 10MHz laser encoder interface
– Automatic encoder and the powerful algorithm, demanding sub-nanometer resolution
compensation and error positioning systems can achieve ultimate throughput and accuracy
detection
with minimal sensitivity to disturbances and stage to stage
– Dual feedback support manufacturing differences.
– Two squared Sin-Cos The NPMPM is a slave that runs under any ACS EtherCAT masters.
– Position feed forward for A comprehensive set of software support tools are provided for
active vibration isolation module configuration, setup and tuning.
systems
– Optional internal relays for
dynamic braking (shorting
motor phases)

+370-5-2651474 +370-5-2651483 sales@standa.LT www.standa.LT 23


DRIVES ዧ Sin-Cos Analog Encoder: Up to two per axis.
ዧ Type: digital current control with field oriented control ዧ Type: 1Vptp, differential.
and space vector modulation. ዧ Programmable multiplication factor: x4 to x65,536.
ዧ Current ripple frequency: 40 kHz. ዧ Maximum frequency: 500 kHz or 10 MHz.
ዧ Current loop sampling rate: 20 kHz. ዧ Maximum acceleration with Sin-Cos encoder: 108
ዧ Programmable Current loop bandwidth: up to 4 kHz, sine periods/second2.
will vary with tuning & load parameters. ዧ Squared Sin-Cos output: Two, differential RS422.
ዧ Commutation type: sinusoidal. Initialization with or ዧ Absolute encoders (optional): Up to two. Smart-Abs,
without hall sensors. Panasonic, BiSS-A/B/C, SSI, Sanyo Denki.
ዧ Switching method: advanced unipolar PWM. ዧ Hall inputs: A set of three per axis.
ዧ Built-in motor phases shortening relays. ዧ Type: single-ended, 5 V, source, open cathode. Input
ዧ Protection: Over & under voltage, Over current, Over current: <7 mA.
temperature, Phase to phase and phase to ground ዧ Feedback supplies: For all digital feedback devices:
short (short circuit on one of the motor phases might 5 V, 0.5 A.
damage the drive). ዧ For all analog feedback devices: 5 V, 1.5 A.

SUPPLIES DIGITAL I/O


ዧ The module is fed by two power sources. A motor ዧ For different I/O configurations see ordering options
supply and a 24 Vdc control supply. ዧ Safety Inputs: Left and right limit inputs per axis
ዧ During emergency conditions there is no need to ዧ Type: 24 V/ source (default), single ended, opto-
remove the 24 Vdc control supply. isolated. Input current 4 – 14 mA.
ዧ STO: Two inputs, 24 V ±20%. Input current: <50 mA
MOTOR DRIVE SUPPLY ዧ Registration MARK Inputs (High Speed Position
ዧ Range: 12 Vdc – 100 Vdc, recommended: 12 Vdc – Capture): Four. Fast, 24 V±20%, opto-isolated, two
96 Vdc. terminals.
ዧ Current rating should be calculated based on actual ዧ Input current 4 – 14 mA.
load. ዧ Can be used as general purpose inputs.
ዧ If regen resistor is required, it should be added in ዧ General purpose output, Motor Mechanical Brake
parallel to motor supply with 102 V shunt activation. output: Two, 24 V/source (default), single ended,
opto-isolated, 0.1 A
ዧ External Motor relay control: Two, 24 V ±20%, source,
CONTROL SUPPLY
0.5 A.
ዧ Range: 24 Vdc ±10% ዧ These outputs are used to shorten the phases of the
ዧ Maximum input current / power: 0.9 A @ 21.6 V/ 20 W motors by external
Without motor brakes. ዧ relays (if the optional internal relays are not present).
ዧ With 2 motor brakes: 1.9 A @ 21.6 Vdc / 42 W ዧ PEG (Position Event Generator): Two, Pulse or State,
ዧ Built-in motor phases shortening relays. Differential, RS422.
ዧ Protection: reverse polarity. A 4 A external fuse must ዧ Pulse width: 26nSec to 1.75mSec. Maximum rate:
be used. 10 MHz.
ዧ Can be used as general purpose output.
MOTOR TYPE
ዧ Two- and three-phase permanent magnet ANANLOG I/O
synchronous (DC brushless/AC servo), DC brush, ዧ Analog Inputs: Four, ±10 V, differential, 12 bit
Voice coil, Two- and three-phase stepper (micro- resolution.
stepping open or closed loop).
ዧ Max. input frequency: 1 KHz. Offset: < 30 mV
ዧ Analog Outputs: Four, ±10 V, differential, 16 bit
FEEDBACK resolution.
ዧ Types: Incremental digital encoders (AqB), Hall ዧ Offset: ±50 mV, Bandwidth: 5 KHz. Max. output load:
inputs, analog Sin-Cos (optional), absolute encoders 10 KΩ,
(optional). ዧ Noise / Ripple: <40 mV.
ዧ Incremental Digital Encoder: Two per axis. A&B,I and
Clk/Dir

ETHERCAT® COMMUNICATION
Type: Differential RS-422
ዧ ዧ Two ports, In and Out, RJ45 connector
Max. rate: 50 million quad counts/sec.
ዧ Protection: Encoder error, not connected

24 +370-5-2651474 +370-5-2651483 sales@standa.LT www.standa.LT


ENVIRONMENT ACCESSORIES
ዧ Operating range: 0 to + 40 °C ዧ NPXpm-ACC1: Mating connectors kit
ዧ Storage and transportation range: -25 to +60 °C ዧ UDMmc&NPXpm-ACC2: (J1) mating 2m flying lead
ዧ Humidity (operating range): 5% to 90% non- cable
condensing ዧ STO-ACC1: 2 meter cable with flying leads

DIMENSIONS CE, UL (PENDING)


ዧ 257 x 154.9 x 50.9 mm 3 ዧ EtherCAT® is registered trademark and patented
technology, licensed by Beckhoff Automation GmbH,
Germany.

SPECIFICATIONS
Per Axis A B C D
Continuous/Peak current Sine 3.3 / 10 A 6.63 / 20 A 103 / 30 A 13.33 / 40 A
amplitude
Continuous/Peak current 2.3 / 7 Arms 4.6 / 14.1 Arms 7 / 21.2 Arms 9.4 / 28.2 Arms
Maximum cont. Input current 2.6 Arms 5.3 Arms 8 Arms 10.6 Arms
Maximum heat dissipation, W 7 + 0.9 × (no. of drives) 7 + 2.1 × (no. of drives) 7 + 3.7 × (no. of drives) 7 + 5.6 × (no. of drives)
Maximum cont./peak output 260 / 780 W 520 / 1560 W 790 / 2340 W 1050 / 3120 W
power @ 100 Vdc
Peak current time 1 sec
Minimum load inductance 0.05 mH
@100 Vdc. Can be derated
linearily for lower voltages

PER MODULE
Control voltage input 24 ±10% Vdc
Drive voltage input range 12 – 100 Vdc (96 Vdc recommended)
Maximum output voltage (Vin motor) × 88% Vdc
Maximum cont. input current 5.2 Arms 10.6 Arms 16 Arms 21.2 Arms

+370-5-2651474 +370-5-2651483 sales@standa.LT www.standa.LT 25


LUMS
Laser Machining Software:
Universal Micromachining

FEATURES
ዧ In LUMS trajectories can be
generated by importing CAD files
(DXF, DWG, STL, Gerber, NC Drill,
etc.) or by drawing them with built
in tools.
ዧ Stitching feature to split large
objects to machine with galvo
scanners
ዧ Advanced slicing and hatching
algorithms allows to slice 300 MB
file with 4 million triangles in less
than a minute
ዧ Formulas and Variables can be DOT. LINE. PLANE. SHAPE
used and interpreted in text as
LUMS software imports DXF, DWG, Gerber files to prepare for
well using {}
laser cutting, etching, ablation and other 2D, 2.5D applications. All
ዧ LUMS controls all of the hardware objects are imported as lines and arcs for efficient machining. Set
directly size and position of the object or simply drag it where it should be
ዧ LUMS laser machining software machined.
controls positioning stages Use Hatching to fill the volume of the object. Use Stitching feature
directly using manufacturer’s .dll to split large objects to machine with galvo scanners.
files
Using 64-bit architecture, LUMS not only supports large and
ዧ LUMS laser machining complex STL files, but handles them really fast. Our advanced
software controls many hardware slicing and hatching algorithms allows to slice 300 MB file with 4
of the machine directly: stages, million triangles in less than a minute. Faulty STL models can be
galvo, lasers, sensors, I/O fixed using LUMS Slice Repair tool.
interfaces
LUMS allows NC Drill file import for laser drilling processes. Adjust
ዧ LUMS supports several cameras: via hole size by offsets to compensate beam spot diameter. Use
one camera for general view and either helical or layer by layer drilling. In Helical drilling mode, Z axis
one camera for high resolution moves constantly, while XY axes draws circles. In Layer mode a set
view number of repeats are done before moving Z axis by a specified
ዧ Fully compatible with ACS step size to increase drilling depth. Use Stitching tool to center
products each hole at the center of galvo scanners. Combine NC Drill file
ዧ Key Applications with Gerber files to do both PCB etching and drilling.
Simple shapes like lines, circles, arcs and rectangles are easy to
– Laser Additive Manufacturing
draw in LUMS software. You can draw them by hand and/or add
– PCB Laser Processing and precise parameters for size and position. You can even draw poly-
fabrication
lines and polygon shapes with a special easy to use tool. All closed
– Laser Engraving shapes can be hatched with one of the hatching types (lines,
– Laser Drilling cross-hatching, dots, contours). Select motion speed and laser
– 3D printing parameters either for each shape, groups of shapes or the whole

26 +370-5-2651474 +370-5-2651483 sales@standa.LT www.standa.LT


SPECIFICATIONS
Version LUMS LUMS PRO LUMS Ultimate

MOTION CONTROL
Galvanometric scanner control + + +
Positioning stages control + + +
Up to 3 axes control + + +
Unlimited number of axes - + +
Galvo+Stages Stitching - + +
Virtual Joystick + + +

FILE IMPORT
DXF, DWG + + +
STL Up on request + +
STP, IGES - + +
Gerber, NC Drill/Excellon Up on request + +
TXT, CSV + + +

TOOLS / COMMANDS
Drawing tools + + +
Hatching (lines, cross-hatching) + + +
Advanced hatching (stripes, chess pattern) - + +
Measuring - + +
Logical Commands (Loop, If) + + +
Variables - + +
Math functions + + +
Loging, Data Export - + +
Sample surface height mapping - + +
3D Printing tool Up on request + +
Support generation for 3D models - + +
3D model fixing Up on request + +

DEVICE CONTROL
IO + + +
Serial Port control + + +
Wait For IO Trigger - + +

SECURITY FEATURES
User access levels - + +
Process Parameter locking - + +

CUSTOM FEATURES
APIs to add new hardware and features - + +
Development of custom features and hardware support (up to 16 hours) - + +
Development of custom features, hardware support and user interface - - +

TRAINING AND SUPPORT


Personal online training session + + +
Online assistance with configuration - + +
Training for recipe creation for your application - + +
Installation, configuration and testing on your machine at your site - - +
Training on your machine at your site - - +
Follow-up online training - + +

SYSTEM
64 bit support + + +
Multicore processing + + +

CAMERAS AND VISION


Webcam support Up on request Up on request +
Industrial camera support Up on request Up on request +
Camera view calibration with positioning system Up on request Up on request +
Autofocus feature (to find laser focus position) Up on request Up on request +
Perspective distortion correction Up on request Up on request +
Manual alignment Up on request Up on request +
Automatic feature recognition Up on request Up on request +

+370-5-2651474 +370-5-2651483 sales@standa.LT www.standa.LT 27


recipe. Use Stitching tool to split large shapes or to LUMS laser machining software controls positioning
center them in galvo scanner field. stages directly using manufacturer’s .dll files.
To add a text in the machining recipe, simply click Therefore, control is always precise and does not
on Text tool and click where it should appear. LUMS need additional post processing, proofing and upload.
supports fonts supported by Windows, bold, italic, Just click run and motion is executed.
underline, and strikethrough functions. LUMS controls XY or XYZ galvo scanners.
Formulas and Variables can be used and interpreted Functionality such as galvo delays tables and
in text as well using {}. E.g. a line “speed = {v} mm/s”, skywriting is implemented and easily accessible
where “v” is a variable with value 50, will return a result in LUMS. Combined motion by galvo scanners and
“speed = 50 mm/s”. This function is especially useful stages is possible by using Stitching function.
in R&D as process parameters can be marked near Laser sources can be triggered through motion
object for future reference. controller outputs. Triggering can be done at a set
Any imported or drawn object with a closed contour frequency or position based. For laser sources
can be hatched in LUMS laser machining software. supporting the function, power can be controlled via
LUMS has several different hatching modes: Line, analog output from LUMS.
Cross-Hatching (up to 5 angles), Dots and Contours. Peripheral devices can be controlled by LUMS Laser
machining software via Serial Port tool.
AUTOMATION. SYCNHRONIZATION. A selection of various sensors is supported in LUMS.
LOOPS They are mostly used for: distance, height detection.
Power meters can be used to automatically set
Complex laser machining recipes can be created
required laser power via analog output or direct laser
and automated with LUMS software. LUMS laser
control.
machining software has a Stitching tool to combine
motion of galvo scanners and standa linear stages.
It makes use of fast speed of galvo scanners and the MACHINE VISION AND CAMERA
field size of linear stages. And all of it is controlled LUMS software seamlessly integrates machine
with an easy function in a single window. Stitching vision for laser machining processes. Use it to
allows to divide large object or recipe to tiles or center see machining results or position your fabrication
each object in the galvo field e.g. for laser drilling. trajectories on the sample precisely. Camera view is
LUMS controls all of the hardware directly, so all the displayed in the Recipe Preview window in LUMS. It is
motions are coordinated with an available feedback calibrated to match coordinate system of positioning
from controllers. stages and galvo scanners.
Any part of the laser machining recipe can be looped LUMS supports several cameras: one camera for
in LUMS. Loops inside loops are also allowed. LUMS general view and one camera for high resolution view.
allows recipe start or restart loop by digital inputs. Camera view can be calibrated to be coaxial to laser
When sample is tilted or has an uneven surface, beam or off-axis.
distance to it can be acquired via sensor focus LUMS Machine Vision module has an Autofocus
function. That data is generated to a height map and function for the camera(s) used in the system.
is used to compensate beam focus position. User can Focus can be found by scanning whole set range
select which area should be mapped and device to do continuously or by small steps looking for focus
it. A map can be imported as a CSV file. improvement.
Additive laser manufacturing or 3D laser printing Built-in LUMS’s Machine Vision module provides
processes like SLS, SLM or stereolithography may use alignment functionality for laser machining
additional level of automation. processes. There are several alignment modes:
ዧ Manual, when machining trajectories are dragged to
ONE INTERFACE FOR ALL HARDWARE match sample view.
ዧ Manual, when fiducials are selected in camera view by
LUMS laser machining software controls many operator.
hardware of the machine directly: ዧ Simple, when Machine Vision finds a position of a
ዧ Positioning stages; user set image.
ዧ Joysticks; ዧ Advanced, when Machine Vision searches for a set
ዧ Galvanometric scanners; pattern e.g. cross, edge, etc.
ዧ Laser sources; Alignment can be done using one or two alignment
ዧ Serial ports; marks. After alignment all recipe is rotated
ዧ I/O control; and translated automatically to match sample
ዧ Sensors and cameras. displacement error.

28 +370-5-2651474 +370-5-2651483 sales@standa.LT www.standa.LT


Standa Main Office:
P.O.Box 377 Standa Ltd
03012 Vilnius, Lithuania Svitrigailos 4-39
Phone: +370-5-2651474 03222 Vilnius
Fax: +370-5-2651483 Lithuania
E-mail: sales@standa.lt
http://www.standa.lt

Manufacturer of Opto-Mechanical equipment and lasers for research, industry and education

Standa sales, service and support centers throughout the world.


Argentina Italy Spain
Tolket S.R.L Microcontrol n.t. Greenlight Solutions
Av. Gral. Las Heras 3923 6to E via Giuba 11, 20132 Milano, Italy San Bernardo 20-1
C1425ATD Buenos Aires, Phone: +39 02 283 144 10 28015 Madrid, Spain
Argentina Fax: +39 02 287 1777 Phone: +34 91 701 4880
Phones: +54 (11) 5256.0150 E-mail: info@microcontrolnt.com Fax: +34 91 532 3132
E-mail: info@tolket.com.ar E-mail: info@greenlightsl.com
Italy
China Crisel Instruments s.r.l Sweden
Pinnacle Scientific (China) Corporation via Mattia Battistini 177, Nanor AB
No. 100 Minxin Road Roma, Italy PO Box 27061,
Winning International Building Phone: +39 06 35402933 102 51 Stockholm, Sweden
Suite 2404, Jianggan District Fax: +39 06 35402879 Phone: +46 8 409 128 00
Hangzhou, China 310020 E-mail: info@criselinstruments.it E-mail: sales@nanor.se
Phones: +86-571-88225151
Fax: +86-571-88225252 Japan Switzerland
E-mail: sales@psci.cn Tokyo Instruments, Inc. Dyneos AG
6-18-14 Nishikasai, Edogawa-ku, Vogelsangstrasse 15
Czech Republic Tokyo 134-0088, Japan CH - 8307 Effretikon, Switzerland
Safibra s.r.o. Phone: +81-33686-4711 Phone: +41 52 355 12 40
Cernokostelecka 1621, CZ 25101 Rícany, Fax: +81-33686-0831 Fax: +41 52 355 12 44
Czech Republic E-mail: sales@tokyoinst.co.jp E-mail: info@dyneos.ch
Phone: +420 461 056 798
Fax: +420 323 606 007 Korea Taiwan
E-mail: safibra@safibra.cz SMTech AEO
Finland 1201 Hyundai-Resortel Advanced Electro-Optics Co. Ltd.
Oy Mitaten Finland Ab 535-6 Bongmyoung-Dong 2F, No.13, Lane 39,
Venevalkamantie 5, 02700 Kauniainen, Yousung-Gu, Daejeon, Pei-I road Hsin Tien City
Finland Korea Taiwan 231, R.O.C
Phone: +358500502600 Phone: +82-42-824-4413~4 Phone: +886-22-912 3678
E-mails: leif.wikgren@mitaten.fi Fax: +82-42-824-4415 Fax: +886-22-912 3767
E-mail: sales@lasersystem.co.kr E-mail: aeosec@ms19.hinet.net
France
Opton Laser International Norway United Kingdom
Parc Club Orsay Université W. Tverdal A/S Laser Support Services Ltd.
29, rue Jean Rostand Postboks 88, 3441 Royken, Norway School Drive, Ovenstone,
91893 Orsay Cedex, France Phone: 31 28 47 33 Fife KY 10 2RR, UK
Phone: +33 1 69 41 04 05 Fax: 31 28 60 18 Phone: +44 1333 311938
Fax: +33 1 69 41 32 90 Email: wtverdal@w-tverdal.no Fax: +44 1333 312703
E-mails: sales@optonlaser.com, E-mail: enquiries@laser-support.co.uk
ventes@optonlaser.com Poland
Probis Scientific Turkey
Germany Kasztanowa Str. 25, Mitra Temsilcilik Dis Tic. A.S
Vision GmbH 62-003 Biedrusko, Poland Litros Yolu, Fatih Sanayi Sitesi,
Luegensteinweg 27, 30890 Goexe, Germany Phone: +48 507 356 261 No: 12/125-126 Topkapi-Istanbul, Turkey
Phone: +49-5108-6446 0 Fax: +48 61 87 00 499 Phone: +90 212 347 47 40
Fax: +49-5108-644611 E-mail: biuro@probis-scientific.com.pl Fax: +90 212 347 47 45
E-mail: sales@vision-lasertechnik.de E-mail: info@mitralaser.com
Singapore
India Acexon Technologies Pte. Ltd. USA
Scientific Solutions 21 Bukit Batok Crescent Altos Photonics, Inc.
JF-38 , Lower Ground Floor, Khirki Extn., #20-86 WCEGA Tower, 201 S. Wallace, Ste B2C
Malviya Nagar, New Delhi - 110017, India Singapore 656065 Bozeman, MT 59715-4888, USA
Phone: +91-11-55680885 Phone: +65-65657300 Phone: 866-658-5404
Fax: +91-11-29545703 Fax: +65-65657005 Fax: 866-658-7357
E-mail: scisol@vsnl.com E-mail: sales@acexon.com E-mail: sales@altosphotonics.com

Israel Slovakia
Ben Moshe Kvant spol. s.r.o.
64, Arlozorov St. Ramat-Gan, FMFI UK - Mlynská dolina
P.O. Box 18125, Tel-Aviv 61181, Israel 842 48 Bratislava, Slovakia
Phones: +972-3 670 00 07 Phone: +421-2-65411344
Fax: +972-3 672 73 19 Fax: +421-2-65411353
E-mail: bms@ben-moshe.net E-mail: kvant@kvant.com

You might also like