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Smoothing, roughening and sputtering: the complex evolution of immiscible Fe/Bi bilayer
system
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IOP PUBLISHING JOURNAL OF PHYSICS D: APPLIED PHYSICS
J. Phys. D: Appl. Phys. 41 (2008) 215306 (8pp) doi:10.1088/0022-3727/41/21/215306
Abstract
In this work, swift heavy ion (SHI) induced surface smoothing, roughening and sputtering of
thermally immiscible Fe/Bi bilayer system has been investigated. The pristine and irradiated
samples were analysed by Rutherford backscattering spectrometry (RBS), grazing angle x-ray
diffraction (XRD), atomic force microscopy and scanning electron microscopy including x-ray
dispersive energy analyzer. RBS analysis revealed that steepness of the low energy edge of the
Bi signal increases at a fluence of 3 × 1013 ions cm−2 , beyond which the slope of the rear edge
decreases. The increased steepness is due to smoothing induced at initial fluence; however, the
decrease in the slope of rear edge beyond 3 × 1013 ions cm−2 fluence is a result of surface
roughening. XRD reveals the increase in the crystalline nature of Bi after irradiation at
3 × 1013 ions cm−2 . Irradiation at higher fluences from 6 × 1013 to 1 × 1014 ions cm−2 leads to
a decrease in the crystalline nature of Bi. Surface roughness of pristine and irradiated samples
from AFM analysis revealed that initially roughness decreases with a fluence of
3 × 1013 ions cm−2 . However, at higher fluences, beyond 3 × 1013 ions cm−2 , the
agglomeration of smaller grains has been observed due to the shear flow mechanism, which
results in surface roughening. The observed behaviour of surface smoothing and roughening
under SHI irradiation may be explained on the basis of the thermal spike model.
(Some figures in this article are in colour only in the electronic version)
few millimetres at 4.2 K), bismuth and its alloys are widely by a calibrated quartz crystal thickness monitor. The films
used in many industries such as microwave engineering, were deposited in a high vacuum chamber at a base vacuum
medications, thermoelectric generators and refrigerators and of ∼10−6 Torr. The samples were irradiated by 120 MeV Au
free detection and suppression system safety devices. It has ions at different fluences ranging from 3 × 1013 ions cm−2
been reported that at room temperature (RT), the immiscible to 1 × 1014 ions cm−2 at RT). The irradiation flux was kept
Fe/Bi system, characterized by a large positive heat of mixing low (1010 ions cm−2 s−1 ) to avoid sample heating during
(+17.46 kJ mol−1 ), has shown unique physical properties in irradiation. The electronic and the nuclear energy loss values
some respects, due to its long magnetic relaxation time [18]. of the projectile were calculated using the Monte Carlo SRIM-
This unique characteristic is attributed to the large spin–orbital 2006 code [23]. The projected range of 120 MeV Au ions is
splitting of Bi, which prevents the magnetic element from 10.84 µm and 7.05 µm for Bi and Fe, respectively, and thus,
rapidly releasing its magnetic energy to the system. Honda and the ions would penetrate deep within the Si substrate. The
Nagata [19] recently discovered an enhanced Hall coefficient thickness and the composition of the pristine and irradiated
of 5.25 × 10−10 cm G−1 in the Co–Bi film, which exceeds samples were analysed by means of Rutherford backscattering
that of bulk Co by two orders of magnitude. Hence, the spectrometry (RBS) using 1.35 MeV He+ ions. The energy
combination of magnetic metal and semi-metallic Bi gives spectrum of the backscattered He+ ion was measured using a
rise to numerous peculiar and interesting results. The Fe/Bi silicon surface barrier detector under an angle of 160◦ with
system exhibits complete immiscibility in the condensed state respect to the normally incident ion beam. The concentration
as shown in the binary phase diagram of Bi/Fe [20]. This profiles were extracted from the RBS spectra with the help
means that a uniform Fe/Bi alloy cannot be formed by solid of the ‘RUMP’ simulation code [24]. The concentration
diffusion or liquid melt quenching techniques. In principle, profiles of Fe were fitted with a Gaussian error function and
one can fabricate such an alloy by means of non-equilibrium the variances were determined. The observed increase in the
techniques such as IBM and vapour quenching [21]. To the variance σ 2 (ϕ) = σ 2 (ϕ) − σ 2 (0) was taken as a measure
best of our knowledge, the immiscible Fe/Bi bilayer system for the mixing effect (where σ 2 (ϕ) and σ 2 (0) are the variances
has not been studied previously by swift heavy ions (SHIs). of irradiated and pristine samples, respectively, and ϕ is the
Therefore, it is of interest to investigate the possibility of fluence). Glancing angle x-ray diffraction (GAXRD) analysis
SHI induced mixing in the immiscible bilayer system. SHI was performed using Cu Kα (wavelength λ = 0.154 18 nm)
induced mixing is shown to be a consequence of interdiffusion radiation using Brucker D8 advance x-ray diffractometer to
during the transient molten phase [22]. Thus, it would be study the mixed phase and crystallinity of film. GAXRD
further interesting to perform the IBM experiment on the Fe/Bi measurements in the 2θ range of 20◦ –60◦ of as-deposited as
system, where Fe and Bi both go to the transient molten state well as irradiated Fe/Bi films were performed at a grazing
as predicted by the thermal spike model. angle of 2◦ with a scan speed of 0.5◦ min−1 and a step value of
A SHI, while traversing through the solid, loses its energy 0.02◦ . Atomic force microscopy (AFM) and scanning electron
in two ways: electronic energy loss (Se ) due to inelastic microscopy (SEM) with x-ray dispersive energy analyzer
collision of an energetic projectile ion with electron of the solid (EDAX) measurements were carried out to study the surface
and nuclear energy loss (Sn ) due to elastic collisions with atoms morphology of the samples at IUAC, New Delhi and IIT
of the solid. In the MeV energy regime, electronic energy loss Roorkee, respectively.
dominates over nuclear energy loss. In such cases, a trail of
defects or amorphous phase is induced along the ion trajectory, 3. Results and discussions
called latent track, when Se exceeds a threshold value of
‘Seth ’. It may be mentioned that under the present conditions, 3.1. Glancing angle x-ray diffraction
the contribution of electronic energy loss of 20 keV nm−1 The x-ray diffraction (XRD) pattern for the as-deposited
and 34 keV nm−1 is much more than that of nuclear energy sample shows the emergence of two peaks at 27.17◦ and 44.76◦ ,
loss of 0.50 keV nm−1 , 0.61 keV nm−1 for bismuth and iron, which are indexed as the (0 1 2) plane of the rhombohedral
respectively. phase of Bi and the (1 1 0) plane of the body centred cubic
In this paper, we present the first experimental evidence of (BCC) phase of Fe, respectively. It is observed from the XRD
initial surface smoothing, thereafter roughening and sputtering spectra that the signal from Fe layers was always very weak
of immiscible Fe/Bi bilayer system by SHI irradiation. It is relative to that from Bi, because the atomic number of Bi is
also shown that the observed broadening of the Bi peak in RBS large, so the atomic scattering factor of Bi is much higher than
spectra is due to the surface roughening at higher fluences. that of Fe [25]. The intensity of the XRD peak of Bi improves
at a lower fluence up to 3 × 1013 ions cm−2 due to the increase
2. Experimental details in crystallinity. However, the intensity decreases with a further
increase in fluence beyond 3 × 1013 ions cm−2 , which can be
We deposited a 58 nm Fe film on the Si (1 0 0) substrate attributed to the strain induced by energy deposition by SHI,
using the electron beam evaporation technique. Then 40 nm which results in a decrease in crystallinity of Bi. The average
of Bi film was deposited on Fe by the resistive heating size of the particles is estimated using Scherrer’s formula [26]
method without breaking the vacuum. Prior to deposition, given by
the Si sample pieces were properly cleaned and chemically kλ
D= , (1)
etched. The film thickness is evaluated during evaporation β cos θB
2
J. Phys. D: Appl. Phys. 41 (2008) 215306 A Gupta et al
Table 1. Average particle size of Bi and Fe estimated by Scherrer’s 3.2. Rutherford backscattering spectrometry
formula.
A typical RBS spectrum of Fe/Bi bilayer samples before and
Fluence FWHM Grain size FWHM Grain size
(ions cm−2 ) of Bi of Bi (nm) of Fe of Fe (nm) after irradiation by 120 MeV Au ions at different fluences is
shown in figure 2. Variance and interface broadening first
Pristine 0.3532 26.7 0.7800 11.3 decreases and then increases with ion fluences as shown in
3 × 1013 0.3265 30.1 0.7718 11.4
the inset of figure 2. A detailed analysis showed that the
6 × 1013 0.3336 29.2 0.6241 14.3
1 × 1014 0.3351 29.0 0.4982 18.5 Bi peak in the pristine sample could not be fitted accurately
because of a large tail, which could be attributed either to the
interface roughness or to the asymmetric granular nature of
the Bi film. In fact, while Fe evaporation onto Si results in a
smooth layer [28], Bi shows an island growth when evaporated
onto Fe and thus forms a rough surface. RBS spectra of the
pristine sample exhibited a long tail at the low energy edge
of the Bi peak, which indicates an extreme roughness with a
non-Gaussian height distribution. RBS analysis revealed that
steepness of the low energy edge of the Bi signal increases
at the fluence of 3 × 1013 ions cm−2 and beyond this fluence
the slope of the rear edge decreases with fluence. As can be
seen in figure 3, the tail area (integrated counts from zero to
50% of the low energy edge of Bi) also decreases initially for
the irradiation fluence of 3 × 1013 ions cm−2 and thereafter it
increases with increasing fluences. The increased steepness is
due to smoothing induced at low fluence, however, the decrease
in slope of the rear edge beyond 3 × 1013 ions cm−2 fluence
shows an increase in surface roughening.
Figure 1. GAXRD patterns of as-deposited and irradiated Fe/Bi As observed in many other ion mixing experiments, the
films on the Si (1 0 0) substrate. 2
edges at the interface are less steep after irradiation, i.e. σRBS
increases with increasing ion fluence. However, one should
where k is the Scherrer factor (0.9), λ = 1.5418 Å (for Cu 2
note that σRBS is composed (σRBS2
= σd2 + σmix
2
) of the variance
2
Kα ), β = FWHM (in radians) and 2θB is the Bragg angle. of the interfacial concentration gradient, σmix , and the lateral
The FWHM and particle size corresponding to the (0 1 2) and fluctuation of the top layer thickness, σd2 , which itself contains
the (1 1 0) XRD peaks in all cases are given in table 1. The both the interface and the surface roughness [29]. Therefore,
GAXRD spectra of irradiated films, as shown in figure 1(b), in the present case, the broadening at higher fluences may be
reveal a decrease in the FWHM (shown in table 1) with a lower the result of interface mixing, surface roughening and/or the
fluence. The average particle size of both Bi and Fe in this case effect of both. As observed, the large tail in the RBS spectra of
is estimated using equation (1) and the growth of Bi from 26.7 the pristine film may be due to the island structure and surface
to 30.1 nm is observed at the ion fluence of 3 × 1013 ions cm−2 . roughness in the Bi layer. To confirm this we characterized our
The spectra of irradiated films, as shown in figures 1(c) and (d), samples by AFM and SEM. We have also extracted the value
show an increase in FWHM (shown in table 1) with a higher of surface roughness using AFM and investigated the effect of
ion fluence from 6 × 1013 to 1 × 1014 ions cm−2 . The average surface roughening on interface broadening in RBS spectra.
particle size of Bi in these cases is estimated to be 29.2 nm and
29.0 nm, respectively. 3.3. Atomic force microscopy
SHI irradiation on the Fe/Bi system causes electronic The surface morphology of the as-deposited and irradiated
energy loss due to inelastic collisions of high energy ions films is shown in figure 4. The topography of the as-deposited
with the host atoms and introduces either point defect, defect film shows very high (up to 200 nm) structures at the surface
clusters or induces strain energy depending on the amount and has a large value of surface roughness of 23.6 nm.
of energy deposited [27]. In other words, when a SHI Bismuth grains of various sizes are present in the as-deposited
penetrates a solid, the material along the ion trajectory of film. These particles result in a non-Gaussian surface height
the ion beam is modified, atoms are pushed out of their distribution and are responsible for the long tail of the
normal positions and ordered structures such as that of the RBS signal (as discussed above). At the lower fluence
crystal lattice may be destroyed. It has been shown that the of 3 × 1013 ions cm−2 , there is an apparent decrease in the
material properties get altered due to the energy deposition root mean square (rms) roughness from 23.6 to 16.9 nm,
by the ion beam. The decrease in particle size in the Fe/Bi which may be attributed to ion induced smoothing of the
system with SHI irradiation at higher fluences from 6 × 1013 to surface. However, with a further increase in the fluence up
1×1014 ions cm−2 clearly indicates distortion in lattice caused to 1 × 1014 ions cm−2 , a significant increase in the surface
by stress-induced defects due to the increase in total energy roughness (from 16.9 to 32.1 nm) is observed. The variation
deposition (Se × ϕ) by the ion beam. of roughness versus ion fluence is shown in figure 5.
3
J. Phys. D: Appl. Phys. 41 (2008) 215306 A Gupta et al
Figure 2. RBS spectra of Fe/Bi film on the Si (1 0 0) substrate after being irradiated with 120 MeV Au ions of different fluences at RT and
the inset shows the variance σ 2 of the depth profiles and interface broadening σ 2 extracted from the RBS data versus the fluence.
This result supports the AFM analysis, which also shows the
decrease in the surface roughness at lower fluences.
The results obtained in this work from RBS and AFM
analyses of Fe/Bi bilayers strongly support this interpretation.
As mentioned above, the broadening obtained from RBS
2
measurements, σRBS , may contain two contributions:
interface mixing and surface roughening. In most analyses
of IBM experiments, it has been implicitly assumed that
surface roughening and recrystallization of the top layer by
the impinging ion beam is unimportant as compared with
the strong interface mixing effect. However, in systems
where a small or even vanishing mixing effect is expected,
a quantitative separation of the two effects is necessary as
was shown by Sun et al [30]. They investigated IBM in
nitride/Al and Al/nitride systems and found that about 50%
of the broadening observed in the RBS spectra was due to
irradiation induced surface roughening. Upon comparing
2 2
the quantities σRBS and σAFM obtained for Au-irradiated
Figure 3. Area of tail of the Bi edge in the RBS spectra versus the Fe/Bi bilayers, it also turns out that the broadening observed
ion fluence for Fe/Bi on the Si substrate irradiated by 120 MeV Au with RBS is to a large extent determined by an increasing
ions. surface roughness. The difference in σRBS 2
− σAFM
2
can be
regarded as a direct measure of the interface mixing or surface
3.4. Scanning electron microscopy roughening effect and is plotted in figure 7 (versus fluence).
It is clear from figure 7 that interface broadening in the RBS
SEM images of the as-deposited and irradiated Fe/Bi samples spectra is due to the surface roughening induced by SHI.
on the Si substrate are shown in figures 6(a) and (b) and We have also calculated the sputtering yield of Bi from
corresponding EDAX profiles are also shown in figures 6(c) the change in the film thickness upon irradiation (measured
and (d), respectively. The SEM image of pristine film shows by RBS in terms of areal density (at cm−2 )). The sputtering
the formation of a continuous porous film. Micrographs of yield of Bi is found to be ∼200 at ion−1 at a lower fluence and
pristine and irradiated samples clearly demonstrate that there ∼94 at ion−1 at the highest fluence (1 × 1014 ions cm−2 ). This
is a decrease in the surface roughness after gold ion irradiation. may be the reason for the low energy edge of Fe in RBS spectra
4
J. Phys. D: Appl. Phys. 41 (2008) 215306 A Gupta et al
Figure 4. (a) AFM image of the Fe/Bi sample unirradiated, (b) irradiated at 3 × 1013 ions cm−2 , (c) irradiated at 6 × 1013 ions cm−2 and
(d) irradiated at 1 × 1014 ions cm−2 , respectively.
5
J. Phys. D: Appl. Phys. 41 (2008) 215306 A Gupta et al
Figure 6. (a) SEM image of the Fe/Bi sample unirradiated, (b) irradiated at 1 × 1013 ions cm−2 , (c) EDAX pattern of the Fe/Bi sample
unirradiated and (d) irradiated at 1 × 1013 ions cm−2 .
4. Conclusions
6
J. Phys. D: Appl. Phys. 41 (2008) 215306 A Gupta et al
Figure 8. The evolution of lattice temperature with time in 120 MeV Au ion irradiated Fe as calculated by the thermal spike model. Tm is
the melting temperature of Fe.
7
J. Phys. D: Appl. Phys. 41 (2008) 215306 A Gupta et al
[27] Rao B P, Rao K H, Subba Rao P S V, Kumar A M, [31] Paulus H, Bolse T and Bolse W 2006 Nucl. Instrum. Methods
Murthy Y L N, Asokan K, Kumar V V S, Kumar R, B 245 117
Gajbhiye N S and Caltun O F 2006 Nucl. Instrum. Methods [32] Nakatani R, Taniguchi R, Chimi Y, Ishikawa N, Fukuzumi M,
B 244 27 Kato Y, Tsuchida H, Matsunami N and Iwase A 2005 Nucl.
[28] Stroscio J A, Pierce D T and Dragoset R A 1933 Phys. Rev. Instrum. Methods B 230 234
Lett. 70 3615 [33] Chandramohan S, Sathyamoorthy R, Sudhagar P, Kanjilal D,
[29] Crespo-Soa A, Schaaf P, Bolse W, Lieb K-P, Gimbel M, Kabiraj D and Asokan K 2007 Nucl. Instrum. Methods B
Geyer U and Tosello C 1996 Phys. Rev. B 53 14795 254 236
[30] Sun J, Bolse W, Lieb K P and Traverse A 1995 Mater. Sci. [34] Ghosh S, Khan S A, Ganesan V, Kundu S and Bhattacharya R
Eng. A 196 229 2006 Nucl. Instrum. Methods B 244 34