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Smart Materials in Manufacturing 1 (2023) 100016

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Smart Materials in Manufacturing


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Highly stretchable strain sensors based on gold thin film reinforced with
carbon nanofibers
Mostafa Vahdani a, Sheyda Mirjalali a, Mounika Chowdary Karlapudi a, Sajad Abolpour Moshizi a,
Jincheol Kim a, Shujuan Huang a, Mohsen Asadnia a, Shuhua Peng b, Shuying Wu a, b, *
a
School of Engineering, Macquarie University Sydney, NSW, 2109, Australia
b
School of Mechanical and Manufacturing Engineering, University of New South Wales, Sydney, NSW, 2052, Australia

A R T I C L E I N F O A B S T R A C T

Keywords: Flexible piezoresistive sensors are often fabricated by depositing a conductive layer such as platinum, gold,
Piezoresistivity graphene thin films, or conductive nanoparticles onto an elastic substrate. However, due to the intrinsic brit-
Strain sensors tleness of the conductive materials, this method usually results in sensors with limited stretchability. Herein, we
Gold thin film
demonstrate a new technique to greatly increase the stretchability of piezoresistive strain sensors based on gold
Carbon nanofibers
(Au) thin films by being hybridized with carbon nanofibers (CNFs). Sensors based on Au thin film fail electrically
at a very small strain (~ 4.5%). In contrast, the sensors based on hybridized Au-CNFs thin film show a signifi-
cantly increased failure strain up to ~ 225%. Introducing one-dimensional CNFs enables a greatly enlarged
workable strain range by bridging and deflecting the microcracks formed in the Au thin film during stretching.
This can effectively prevent the formation of lengthy, channel-like straight cracks that cause electrical failure
under low strains. The high-performance sensors have shown great potential for use as wearable sensors for
motion detection, such as detecting joint bending. Moreover, the potential of the sensors in detecting airflow
similar to human respiratory airflow level has been demonstrated.

1. Introduction nanofibers [23], and carbon nanotubes [24] to develop flexible electro-
mechanical sensors.
Flexible and stretchable sensors have recently gained enormous Three key classes of strain sensors have been extensively studied
attention because of their potential in diverse applications such as elec- including piezoresistive, piezoelectric, and piezocapacitive. Among
tronic skins [1–4], health monitoring [5–8], smart textiles [9–11], smart these, piezoresistive sensors are well known for relatively simple read-
robots [12,13] and monitoring day-to-day activities [14,15]. Traditional out systems [25]. The deposition of thin films of conductive materials
sensors are typically made of rigid materials such as semiconductors or on elastic polymer substrates is one of the most commonly used methods
metals and have limited stretchability (typically <5% [16]). In contrast, to develop flexible piezoresistive sensors [26]. However, this method
flexible and soft sensors are lightweight, comfortable to wear, and able to generally results in sensors with low stretchability due to the brittle na-
conform to arbitrary surfaces like human bodies [17,18]. Elastic poly- ture of most of the conductive materials. When subjected to stretching,
mers such as polyurethane (PU), polydimethylsiloxane (PDMS), and lengthy, channel-like straight cracks are created in the conductive thin
Ecoflex have been widely used in fabricating flexible electronics due to film, which leads to early electrical failure (typically at strains < 20%)
their stretchable and robust mechanical properties [19]. These polymers [27–32]. For example, Li et al. [33] developed highly sensitive flexible
are commonly combined with conductive nanomaterials, such as silver piezoresistive sensors based on graphene woven fabrics deposited on
and gold nanowires [20], carbon black [21], graphene [22], carbon PDMS. High-density cracks were formed at small strains (< 10%) upon

* Corresponding author. School of Engineering, Macquarie University, North Ryde, Sydney, NSW, 2109, Australia.
E-mail address: shuying.wu@mq.edu.au (S. Wu).

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https://doi.org/10.1016/j.smmf.2023.100016
Received 24 March 2023; Received in revised form 27 April 2023; Accepted 28 April 2023
Available online xxxx
2772-8102/© 2023 The Authors. Publishing services by Elsevier B.V. on behalf of KeAi Communications Co. Ltd. This is an open access article under the CC BY-NC-ND
license (http://creativecommons.org/licenses/by-nc-nd/4.0/).
M. Vahdani et al. Smart Materials in Manufacturing 1 (2023) 100016

Fig. 1. (a) Schematic illustration of the fabrication process of the Au-CNFs/PDMS sensors; (b–c) Photos of the Au-CNFs/PDMS sensors, which indicate the sensors are
twistable and stretchable.

stretching, leading to significantly increased resistance (high sensitivity and then stretching it with a controlled strain. The oxygen plasma
with a gauge factor (GF) of ~ 103 under 2–6% strains and ~106 under exposure made the top of the elastomer stiffer by forming oxidized
higher strains (7%–8%). Nevertheless, the cracks propagated quickly polymer layer. The exposure time could thus be used to control the
upon increasing the strain, leading to the fracture of the graphene. stiffness of the substrate and thereby the microcracks (length, width, and
Therefore, the sensors exhibited limited stretchability (< 10% strain). density) formed in the graphite thin films, resulting in sensors with
Similarly, sensors made of gold thin film deposited on PDMS reported by different stretchability.
Yang et al. [34] also demonstrated high sensitivity due to the cut-through Herein, we present a new approach to developing highly stretchable
cracks (GFs of up to 200 (ε < 0.5%), 1000 (0.5% < ε < 0.7%), and more piezoresistive strain sensors based on Au and CNFs deposited on PDMS
than 5000 (0.7% < ε < 1%), which meanwhile resulted in low substrate. Instead of directly depositing Au on the elastic PDMS substrate
stretchability. which usually forms cut-through long and straight cracks that leads to
Previous studies have demonstrated that stretchability is largely low failure strains (< 20%) [50], a layer of CNFs was spray-coated onto
dependent on the size (length, width) and density of microcracks formed the PDMS before depositing Au by thermal evaporation. The CNFs suc-
in the conductive thin films upon stretching [35–39]. Therefore, one cessfully prevented the formation of long and straight microcracks.
major strategy to enhance the stretchability of such sensors is to effec- Instead, shorter and deflected microcracks were formed. The electrical
tively control the microcracking behavior of the brittle conductive thin failure of the conductive layer on PDMS was thus greatly delayed from
films. Different parameters have been found critical, including conduc- about 4.5% (for Au-PDMS) to 225% strain (for Au-CNFs/PDMS).
tive thin film's thickness [40–42], its interaction/bonding with the sub- Therefore, the sensors have a much wider workable strain range. The
strate [43–45], as well as the mechanical properties of the substrate effects of Au film thickness and CNFs area density on sensor performance
[46–48]. For instance, based on Li et al. [49], under tensile loading, the were also examined in detail. These strain sensors are thin and flexible,
microcracking behavior of Cr films on polyethylene terephthalate (PET) making them ideal for applications as wearable electronics for health and
substrates depended on Cr thickness. Three Cr film thicknesses of 15, 70, motion detection. By using a wooden hand model, the capability of our
and 140 nm were examined. It was found that the cracks began to form at sensors in detecting joint movements such as finger and wrist joint
strains ranging from 0.6 to 1.9% and the thicker the Cr, the smaller strain bending was demonstrated. Moreover, the sensors were found to be able
the crack started. Also, the cracks on the 15 nm Cr film were denser than to be used as a flow sensor to measure airflow similar to human respi-
those on the 70 and 140 nm films. Moreover, Xiang et al. [45] found that ratory airflow level.
the failure strain of metal (Cu) thin films deposited on polyimide sub-
strate were dependent on their adhesion to the substrate. By delocalizing 2. Experimental section
deformation in the film, a well-bonded Cu films could withstand tensile
strains up to 10% without forming noticeable cracks and up to 30% at 2.1. Materials
which discontinuous microcracks were formed. On the other hand,
channel cracks were observed in the film at ~ 2% strain when it was Carbon nanofibers (CNFs, Pyrograf-III, grade PR-24-XT-HHT) were
weakly bonded to the substrate. Amjadi et al. [32] demonstrated that the purchased from Applied Sciences Inc. PDMS (polydimethylsiloxane)
microcracks in graphite thin films coated on elastomer substrate (Eco- elastomer kit including both base and curing agents (Sylgard 184) was
flex) could be controlled by treating the substrate with oxygen plasma purchased from Dow Corning. Isopropyl alcohol (IPA) and

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M. Vahdani et al. Smart Materials in Manufacturing 1 (2023) 100016

Fig. 2. (a) Schematic diagram of the fabrication process of the flow sensor (U-shape), (b) Experimental setup for measuring sensor's responses to airflow.

polyvinylpyrrolidone (PVP, Mw  40 000) were purchased from Chem- 40%, 80%, and120% were applied at a constant speed of 1 mm/s. At least
Supply and Sigma, respectively. three duplicate specimens were tested for the quasi-static tensile test to
understand the repeatability. The gauge factor (GF), indicator of the
2.2. Sensor design and fabrication piezoresistive sensitivity, was calculated by using linear regression to
analyze the relative resistance changes as a function of strain (ϵ), as
The Au-CNFs/PDMS sensors were fabricated by the procedure illus- shown in the following:
trated in Fig. 1. CNFs were first spray-coated on a thin PDMS substrate (~
0.5 mm thickness). The CNFs/IPA dispersion (1 mg ml1) was prepared ΔR=R0 ðR  R0 Þ=R0
GF ¼ ¼
by probe ultrasonicating CNFs in IPA for 1 h to create a stable dispersion ϵ ðL  L0 Þ=L0
with assistance of 1 wt% PVP as the dispersion agent. It should be
mentioned that PDMS was plasma treated before coating by being where R and R0 stand for, respectively, resistance at a specific strain and
exposed to O2 plasma for 2 min. This O2 plasma treatment facilitated the initial resistance, L0 and L are the sensor's initial length and instanta-
coating and enhanced the adhesion with conductive nanomaterials. The neous length, respectively.
spray-coating was conducted by using a Blackridge airbrush kit with a To examine the durability of the Au-CNFs/PDMS sensor, 2500 tensile
0.3 mm nozzle at a pressure of 15–20 psi and a distance of 10 cm. The loading-unloading cycles with a peak strain of 40% were applied. Strain
areal density of CNFs deposited on the PDMS substrate was estimated to rate effects were studied by applying cyclic loading-unloading at
be 0.5 mg cm2. In the next step, a thin layer of Au with different different velocities: 1, 4, 7, and 10 mm/s. The response time of the
thicknesses (30 nm and 60 nm) was coated onto the surface of the CNFs/ sensors was tested by stretching the specimen to a strain of 40% at a
PDMS using a Thermal Evaporator System. Copper wires were then velocity of 10 mm/s.
connected to the two ends of the Au-CNFs/PDMS using a silver paste for
electric resistance measurement. After this, the obtained sensor (Au- 2.3.3. Application demonstration
CNFs/PDMS) was encapsulated using another layer of PDMS (0.5 mm
thickness), which was then cured for 2 h at 60  C. The prepared sensor 2.3.3.1. Airflow sensing monitoring. Fig. 2 illustrates the setup to inves-
exhibited excellent flexibility and stretchability as demonstrated in tigate the sensor's capability of detecting airflow of similar level to that of
Fig. 1b and c. human respiratory airflow. The sensor was first cut into “U" shape and
fixed vertically by being embedded into a PDMS base. It is then posi-
2.3. Characterizations tioned next to (1 mm distance between the sensor and the tube end) a
flexible tube which is connected to a Continuous Positive Airway Pres-
2.3.1. Morphology and microcracking behavior of the Au-CNFs/PDMS sure (CPAP) air generator capable of creating airflow that simulates
sensors breathing. The tube has an internal diameter of 19.60 mm and the sen-
Bright-Field Microscopy (CKX53, Olympus) and Scanning Electron sor's top 5 mm (out of a total height of 7 mm) are exposed to the flowing
Microscopy (SEM, FEI Nova NanoSEM) were employed to investigate the air. CPAP air generator can precisely control the time and flow with an
morphology and microcracking behavior of the sensors. accuracy of 10 ms and 1.5 L min1, respectively (or  2.7% of the
reading). Three parameters such as set-point high (SPH), set-point low
2.3.2. Piezoresistivity measurements of the Au-CNFs/PDMS sensors (SPL), and period can be used to control the device. SPH can be altered to
Using a digital multimeter (Keysight E4980 AL), the electrical resis- set different flow rates while SPL is fixed at zero. The period means cycle
tance changes of samples subjected to tensile stretching were measured. time, which was varied to investigate the sensor's response time. Each
The samples were subjected to quasi-static tension and cyclic tensile cycle consisted of the time when the pump is on plus the time when it is
loading-unloading cycles using a custom-built linear stage. For cyclic off (noted that the pump is on and off for half of the period). To amplify
tensile tests, 5 cycles of varying peak-strains ranging from 1%, 5%, 10%, the voltage output, the sensor was connected to a Wheatstone bridge

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M. Vahdani et al. Smart Materials in Manufacturing 1 (2023) 100016

Fig. 3. SEM pictures of unstretched (a) CNFs/PDMS and (b) Au-CNFs/PDMS; (c) The plot of relative resistance change (ΔR/R0) vs strain under monotonic tension up
to strain where the sensor failed electrically; Optical microscopic images of (d) Au/PDMS, (e) Au-CNFs/PDMS, and (f) CNFs/PDMS under stretching (Note: Levels of
strain are mentioned on the images and stretching direction is horizontal); (g) Length and (h) width of the cracks formed in CNFs/PDMS, Au/PDMS, and Au-CNFs/
PDMS based on optical micrographs shown in (d–f); (i) SEM images of Au-CNFs/PDMS when stretching.

circuit. A unity gain SRS560 low-noise preamplifier was used to filter the 3. Results and discussion
sensor output using a 3 Hz low-pass filter. The data were collected and
analysed by LabVIEW Signal Express software. Each experiment was 3.1. Microcracking and its influences on piezoresistive properties
carried out three times to calculate the standard error.
The obtained thin film strain sensor is composed of an active sensing
2.3.3.2. Joint bending detection. The potential application of Au-CNFs/ layer made of Au-CNFs composite film encapsulated by two layers of
PDMS sensor in detecting strains associated with human motions was PDMS. The PDMS can protect the sensing layer from the surrounding
investigated by attaching the sensor onto different parts of a wooden environment. Fig. 3a shows the even dispersion of CNFs over the PDMS
hand model (Fig. 6a and b). Sensors with the dimension of 10 mm substrate. Once the Au layer was deposited, the CNFs were shown to be
(length)  5 mm (width)  1 mm (thickness) were mounted to wrist and totally covered (as seen in Fig. 3b).
index finger joints of a wooden hand model by a tape. The resistance When subjected to monotonic tensile strains, the resistance of the Au/
changes during bending the wrist and finger joints were recorded. PDMS, CNFs/PDMS, and Au-CNFs/PDMS nanocomposites increased
continuously until they were electrically failed (resistance increases to
the level that exceeds the measurement capacity of the used digital

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Fig. 4. (a) Effect of thickness of Au on the relative change of resistance (ΔR/R0) as a function of strain for Au-CNFs/PDMS sensors; (b) Sensitivity and (c) Stretchability
of the sensors with different Au thicknesses; (d) ΔR/R0 when subjected to stretching-releasing cycles for the strain sensors with different Au thicknesses.

multimeter (1 GΩ)), as shown in Fig. 3c. It was noted that the sensor failed electrically at a very low strain of ~ 4.5%. The GFs of the sensors
made of Au (Au/PDMS) showed very sharp increase in resistance when based on CNFs/PDMS and Au-CNFs/PDMS were determined to be ~ 1.1
subjected to stretching with a GF of ~ 155 270.8. However, the sensor and ~ 5.7, with a stretchability of ~ 150% and 225%, respectively. The

Fig. 5. Durability, frequency dependency, and response time of the sensor (t ¼ 60 nm): (a) Resistance change (ΔR/R0) under 2500 cycles of stretching-releasing (the
peak strain is 40%); (b) relative resistance change (ΔR/R0) when stretched-released at different velocities (the peak strain is 40%); (c) Response time of sensor as it
stretched to 40% strain at a velocity of 10 mm/s.

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Fig. 6. Application demonstration of the sensor: photo the wooden hand model with a sensor attached to a finger (a) and wrist joint (b); ΔR/R0 of the sensor attached
to the wrist joint which was bent at (c) 20 and (d) 45 ; ΔR/R0 of the sensor attached to the finger joint which was bent at (c) 45 and (d) 90 .

excellent linearity of resistance change as a function of strain and high same strain, the microcracks formed in the Au-CNFs/PDMS thin film are
stretchability is believed due to the unique microcracking behavior of the considerably shorter and narrower than those in the Au/PDMS thin film.
sensors. The structural changes in the conductive thin films of Au/PDMS, For example, at a strain of 60%, the average microcrack length and width
CNFs/PDMS, and Au-CNFs/PDMS nanocomposites were observed by for the Au-CNFs thin film are approximately 109.5 μm and 4.6 μm,
using optical microscopy (Fig. 3d–f). The sensor made of Au only (Au- respectively, while those for the Au/PDMS film are around 283 μm and
PDMS) showed lengthy, channel-like straight cracks (Fig. 3d), which 5.5 μm, respectively. The crack length formed in CNFs/PDMS and Au-
disturbed electric conductance, causing remarkable increase in resistance CNFs/PDMS under the same strain were similar but the width was
and eventually electrical failure at low strains. By introducing CNFs to Au slightly larger for Au-CNFs/PDMS. This disparity in microcrack di-
thin film, the coalition of tiny parallel cracks to larger ones was pro- mensions accounts for the difference in their piezoresistivity.
hibited, resulting in the formation of shorter, deflected, tortuous micro-
cracks, as indicated in Fig. 3e. A higher magnification SEM image in 3.2. Effects of Au thickness on the piezoresistivity of the Au-CNFs/PDMS
Fig. 3i indicates that the CNFs bridged the cracks (reinforcing the Au thin sensors
film and increasing the electrical failure resistance to strain). Therefore,
the electrical failure can be postponed to a much higher strain, up to To study the effect of the thickness of Au coating on the sensing
about 225% (Fig. 3c). The sensor made from CNFs only (Fig. 3f) exhibited performance, Au-CNFs/PDMS sensors coated with Au of two different
similar cracking behavior, in terms of crack length, to the sensors made of thicknesses (30 and 60 nm) were fabricated and compared with CNFs/
Au-CNFs/PDMS. However, at the same strain, it displayed a smaller PDMS (no Au). Fig. 4a shows the resistance changes as a function of
crack, resulting in a lower sensitivity compared to the sensors made of quasi-static tensile strain up to failure. Based on Fig. 4a, the sensitivity
Au-CNFs/PDMS (Fig. 3e). calculated by linear regression analysis and the corresponding stretch-
The microcrack dimensions were estimated from the optical micro- ability (defined as failure strain) are presented in Fig. 4b and c. The
scopic images and plotted in Fig. 3g and h. As the strain increased, the sensitivity (GF) was determined to be 1.7 and 5.7 for sensors with 30 nm
crack length and width of all specimens increased. Additionally, at the and 60 nm thick Au, respectively. Furthermore, increasing the thickness

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Fig. 7. (a) Sensor response for different rates of airflow; (b) Response time; Sensor response for a constant airflow rate of 60 L min1 with different applied periods: (c)
200 ms. (d) 400 ms. (e) 600 ms; (f) Average of resistance change from peak-to-peak as a function of periods.

of Au layers results in an increase in stretchability (failure strain). The human physiological signs and physical activities.
sensor comprising 30 nm thick Au has a stretchability of 130% while that
based on 60 nm thick Au exhibits a stretchability of 225% (Fig. 4c). In
3.4. Application demonstration
Fig. 4d, changes in resistance are demonstrated under cyclic loading-
unloading with peak strain values of 1%, 5%, 10%, 40%, 80%, and
3.4.1. Joint bending detection
120%. The sensor resistance increased gradually during stretching and
To test the sensors' capacity in detecting human motions like joint
reduced during unloading. The stretching process creates microcracks
movements, the sensor with the optimal sensitivity (60 nm thickness of
that increase the resistance, while releasing the stretching leads to the
Au) was chosen. The sensor was fixed to the wooden hand model (Fig. 6a
closure of these microcracks and recovery of resistance to its initial value.
and b). When the wrist was bent at an angle of 20 and 45 , the maximum
This indicates that the sensors have excellent durability, and the resis-
relative resistance changes (ΔR/R0) were measured to be 23% and 60%
tance can be mostly restored to its original value when the strain is
(Fig. 6c and d), respectively, indicating a strain of ~ 11% and 24% was
released. Additionally, the sensors can detect small strain (1%) (Insert in
induced, respectively. The sensor exhibited high stability with no visual
Fig. 4d), demonstrating their strong potential for monitoring at low strain
damage noticed during bending cycles. Fig. 6e and f demonstrates the
levels.
sensor's ability to detect bending of a finger joint, with a larger increase
in resistance being noticed when the degree of bending is increased.
3.3. Au-CNFs/PDMS sensor durability and response time Strain was measured to be ~ 46% and ~ 22%, respectively, when the
finger was bent at angles of 90 and 45 based on the maximum ΔR/R0.
Based on the results discussed above, the sensor made of 60 nm thick
Au, showing highest sensitivity with reasonably high stretchability 3.4.2. Au-CNFs/PDMS nanocomposite as an airflow sensor
(225%) was selected to study the sensor's durability, response time, and Strain sensors have been developed for real-time respiration moni-
dependence on strain rate in this section. Fig. 5a presents the relative toring to assess the respiratory rate [52,53], tidal volume [54,55],
resistance changes of the sensor when subjected to cyclic stretching- breathing frequency [56,57], and minute ventilation [58–61]. Breath can
releasing with a peak strain of 40% over 2500 cycles. It can be seen be detected by monitoring minute ventilation and tidal volume. The
that, although slight down-drift in electric signal was observed in the amount of air that is exhaled from the lungs in a minute is referred as
initial ~ 50 cycles, the sensor outputs were overall stable without sig- minute ventilation while the total amount of air that is inhaled and
nificant changes, indicating excellent durability. Furthermore, the as- exhaled when at rest is referred as the tidal volume. Airflow sensors that
developed sensor did not exhibit any apparent dependence on the can measure the airflow precisely have the potential in detecting
strain rate (Fig. 5b), suggesting that this sensor was capable of func- breathing patterns. Herein, we investigated the sensor's responses to
tioning consistently when subjected to various deformation rates. In airflows with different rates. To do this, the sensor was fixed in front of
addition, the sensor shows very quick response (Fig. 5c). The response the cylinder (1 mm distance) which was connected to an airflow gener-
time was investigated by stretching the sensor quickly to 40% strain at a ator. The flow rate of the generated air can be precisely controlled from
velocity of 10 mm/s. The response time was estimated to be ~ 0.42 s, 20 to 80 L min1 with intervals of 5 L min1 and was purged to the sensor
comparable to strain sensors that have been previously reported [51]. with effective length of 5 mm. Fig. 7a displays the sensor output (relative
Fast response time of strain sensors is essential to effectively track various resistance changes) for five consecutive cycles as a function of time under

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M. Vahdani et al. Smart Materials in Manufacturing 1 (2023) 100016

five different airflow rates. It can be seen that the resistance increases from the ARC via the Discovery Early Career Researcher Award
instantly when the air generator was turned on and then reached its (DE190100311).
maximum where no drift in output over time was observed with a rela-
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