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Procedia CIRP 108 (2022) 372–377
www.elsevier.com/locate/procedia

6th CIRP Conference on Surface Integrity

Modification of Surface and Sub-Surface Conditions of Cemented Carbide

by Pressurized Air Wet Abrasive Jet Machining for PVD Coatings
Alexander Leonard Meijera*, Alexander Otta, Dominic Stangierb,
Wolfgang Tillmannb, Dirk Biermanna
a
Institute of Machining Technology, TU Dortmund University, Baroper Str. 303, Dortmund 44227, Germany
b
Institute of Materials Engineering, TU Dortmund University, Leonhard-Euler-Str. 2, 44227 Dortmund, Germany

* Corresponding author. Tel.: +49 231 755 5820; fax: +49 231 755 5141. E-mail address: alexander.meijer@tu-dortmund.de

Abstract

The wear resistance of coated cutting tools depends to a large extent on adhesion of applied PVD coatings. The adjustment of the surface
roughness as well as the residual stresses of the sub-surface of the substrate thus represents a decisive step in tool manufacturing. For this reason,
the conditioning of the surface and sub-surface constitution of ultrafine grain cemented carbide specimens via pressurized air wet abrasive jet
machining (PAWAJM) was investigated in analogy tests. Regarding the coating adhesion of an applied TiAlN-PVD coating, relevant potentials
resulted from the preparation via PAWAJM, especially with the finer abrasive F500 (Al2O3) at low blasting angles and high pressures.
© 2022 The Authors. Published by Elsevier B.V.
This is an open access article under the CC BY-NC-ND license (https://creativecommons.org/licenses/by-nc-nd/4.0)
Peer review under the responsibility of the scientific committee of the 6th CIRP CSI 2022
Keywords: surface conditioning, pressurized air wet abrasive jet machining, coating adhesion, ultra-fine grain carbide

1. Introduction edge for subsequent coating process leads to a further

The performance and wear resistance of cutting tools
directly depends on the cutting tool material and is strongly
influenced by their geometry and the condition of the cutting
edge [1]. For this reason, an application-oriented preparation of
the cutting edge, in order to minimize microscopic defects and
to tailor its microgeometry with regard to the process-related
load collective, has gained enormous interest and was subjected
to several studies [2–4]. Furthermore, especially when
machining hard-to-cut materials, PVD-coatings play a decisive
role on the cutting process as well as on the tool life. On the one
side the substrate material is protected against the thermal load
to avoid diffusion and oxidation processes. On the other side
the thin films provide sufficient protection against the
mechanical loads during the cutting operation to increase the
wear resistance leading to a longer tool life [5,6]. Within this
context, first indicators prove that the adaption of the cutting
enhancement of the tool performance [7]. Additionally, it was
reported that, the quality of the cutting edge can be improved
leading to a defect free surface which favors a high coating
adhesion [8]. In this respect, abrasive blasting processes have
recently gained enormous interest, because the microgeometry
as well as the topography and sub-surface region of the tools
can be tailored for the cutting operations and the subsequent
PVD coating process [7–9].
In abrasive blasting processes, the kinetic energy of the
abrasive grain at impact on the surface of workpiece causes
material removal [10]. According to the findings of Rateick et
al. the material removal mainly depends on the shape and size
of the particles, the material properties, the particle velocity and
the angle of impact [11]. On the other hand, the hardness,
strength, and ductility of the workpiece material also influence
the erosion rate. The abrasive jet machining processes can be
distinguished based on the carrier media used. While air is used

2212-8271 © 2022 The Authors. Published by Elsevier B.V.

This is an open access article under the CC BY-NC-ND license (https://creativecommons.org/licenses/by-nc-nd/4.0)
Peer review under the responsibility of the scientific committee of the 6th CIRP CSI 2022
10.1016/j.procir.2022.04.073

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 Alexander Leonard Meijer et al. / Procedia CIRP 108 (2022) 372–377
as the carrier medium in dry abrasive jet machining, e.g. water
is used as the carrier in wet abrasive jet machining. Results by
Denkena and Biermann showed that water favors higher surface
qualities due to damping effects [2]. Bouzakis et al. stated, that
the process induces compressive stresses in the sub-surface of
the substrate, enhancing superficial film strength properties of
tools with PVD coatings, which led to a better performance of
the tools [9]. Jacob related as well that machining the surface of
a tools substrate by abrasive jet machining can improve the
adhesion of thin film [7]. However, regarding the preparation
of the cutting edge, Bouzakis et al. observed the local removal
of carbides at the cutting edge and a higher roughness profile.
Furthermore, a reduced coating adhesion was observed, which
was contributed to the increased concentration of cobalt in this
area [1]. Therefore, the preparation process should be designed
to the specific application to fit the high requirements.
In general, the application of wet abrasive blasting offers
great potentials for the conditioning of cutting tools. Although
the positive influence on topography and sub-surface could be
demonstrated, the interaction between preparation and coating
adhesion still remains as open question. Additionally, the
influence of the upstream heating and etching on the induced
residual compressive stresses and the adhesion of the deposited
PVD layers is not yet fully understood. So far conducted studies
only focus on the modification of tools for macromachining and
consisting of coarse-grained carbides. In order to transfer the
preparation principles to micromachining, the mechanisms of
action on ultrafine grain carbides have to be investigated.
2. Materials and Methods
2.1. Materials
As substrate material, an ultra-fine grain carbide consisting
of 92 wt% of WC and 8 wt% of Co type HB20UF (Boehlerit,
Austria) was selected, which is commonly used for the
production of filigree and high-performance cutting tools. Coin
shaped specimens with a diameter of 20 mm and a height of
5 mm were exposed to the surface modifications by pressurized
air wet abrasive jet machining (PAWAJM) and the PVD
coating process. Due to its high hardness H = 23.7 ± 0.5 GPa as
well as the high transverse rupture strength, it is designed for
the manufacturing of filigree micromilling tools [12]. Fig. 1
presents the crystallographic structure determined by XRD as
well as the microstructure investigated using scanning electron
microscope (SEM). A homogenous distribution of the
nanoscale hexagonal WC-phase can be determined, which is
embedded in the Co-matrix.
Fig. 1. XRD pattern (Co-Kα) and morphology (SEM) of the ultra-fine grain
carbide HB20UF substrate material
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373
The specimens used were characterized prior to the test
series with regard to surface properties and the residual stress
state to take the interaction of the focused preparation via
PAWAJM with the previous manufacturing process into
account. The reference surface was in a finely ground condition
with a maximum roughness of Rz = 551.1 ± 82.5 nm and an
arithmetic mean roughness of Ra = 52.2 ± 7.8 nm.
Furthermore, the values determined of the material ratio curve
Rpk = 34.6 ± 10.1 nm, Rk = 109.6 ± 17.7 nm and
Rvk = 155.9 ± 26.5 nm were determined. The evaluation of the
residual stresses revealed slightly anisotropic compressive
residuals stresses of σ11 = -1329.50 ± 90.92 MPa and
σ22 = -1239.18 ± 57.32 MPa in the substrate material.
2.2. Pressurized air wet abrasive jet machining (PAWAJM)
The modifications of the topography and the sub-surface of
the specimens was conducted by a PAWAJM machine type
WA 110-P (Restec GmbH Nicolis Technology, Switzerland).
An ABB robot arm (ABB, Switzerland), which realizes the
positioning and process guidance, enables different blasting
operations on workpieces or cutting tools. Due to the degrees
of freedom of the robot arm, a high level of flexibility as well
as a high precision during processing can be achieved.
The system operates according to the injector principle with
compressed air as the accelerating medium (Fig. 2), which is
supplied by a SXC 6 compressor (Kaeser Kompressoren SE,
Germany). The resulting air pressure can be controlled. The
blasting medium used is a suspension of water (carrier
medium) and aluminum oxide (abrasive). The conveying of the
suspension from the plant tank to the nozzle is by means of a
submersible motor pump of the type J 12 D from Sulzer Ltd.
By combining the process parameters (blasting pressure pst,
blasting angle αst, volume concentration σst, nozzle distance hd)
with the jet feed speed vf,st of the robotic arm, precise
PAWAJM processes can be set up. Fig. 2 presents the
experimental setup of the PAWAJM process. Two abrasives
from the Company Imerys Fused Minerals GmbH (Germany)
made of aluminum oxide (Al2O3) with a blocky grain shape in
the grit sizes FEPA F220 and F500 were used for the
investigation. Beside the constant process parameters shown in
Fig. 2, the blasting pressure pst and the blasting angle αst were
varied in the listed stages. The measurements to determine the
volumetric particle size distribution have shown that the
average particle size according to FEPA F220 is davg = 72 µm
instead of the specified davg = 54 µm. The grain size F500 is
within the specified range.
Fig. 2. Experimental setup of the PAWAJM process
 374 Alexander Leonard Meijer et al. / Procedia CIRP 108 (2022) 372–377
2.3. PVD-coating process
Subsequent to the treatment with PAWAJM, the specimens
were cleaned in an ultrasonic bath with ethanol for 30 min to
remove residuals from the surface. The deposition of the
coating was conducted in an industrial sputtering device
CC800/9 Custom (CemeCon AG, Germany) using a two-folded
handling system. Prior to the deposition of the DC/HiPIMS
TiAlN coating the specimens were exposed to a sequence of
heating steps to evacuate the chamber to a base pressure below
p < 10 mPa with a temperature of approximately TS = 400 °C.
To remove oxides and contaminations from the surface of the
substrate material an ion etching process with Ar+ and Kr+ was
conducted for a duration of 60 min to ensure a good adhesion
of the coating [13]. The deposition of the TiAlN coating was
carried at a nitrogen controlled pressure of 500 mPa with an Ar
flow of 250 sccm with a synchronized bias voltage of -100 V
applied on the handling system. Two DC and two HiPIMS-
cathodes with a size of 500 x 88 mm² were used for the
deposition of the TiAlN system. On the DC magnetrons two
TiAl60 targets, consisting of a monolithic Ti-plate with 60 Al
plus with a diameter of 15 mm placed along the race tracks
operated at a constant power density of P = 18.2 W/cm². The
pulse parameters of the HiPIMS-cathodes were set to a
frequency of f =1000 Hz with a pulse duration of ton = 50 µs at
an average power density of P = 11.4 W/cm². To ensure a
similar chemical composition of the high ionized species a
slightly different target design (TiAl48 with a diameter of the
Al plugs of 12 mm) was used on the HiPIMS-cathodes due the
differences in the sputtering yield and mechanisms of Ti and
Al in reactive DC and HiPIMS processes [14]. Fig. 3 shows the
cryogenically generated fracture surface and the topography of
the deposited coating taken by a scanning electron microscope
(SEM) FE-JSEM 7001 (Jeol, Japan).
For the stoichiometry of the coating system an equimolar
composition with respect to the Ti/Al ratio as well as for the
nitrogen content was determined. Additionally, the
morphology indicates a defect free, dense and fine crystalline
growth of the thin films on the ultra-fine grain carbide resulting
in a smooth surface of the TiAlN coating with a thickness of
2171 ± 47 nm. The mechanical properties measured by
nanoindentation according to the method suggested by Oliver
and Pharr [15] revealed a hardness of H = 27.79 ± 1.46 GPa
with a Young’s modulus of E = 447.4 ± 20.9 GPa.
Fig. 3. SEM images of the cross-section and topography of the DC/HiPIMS
TiAlN coating deposited onto the ground reference sample
2.4. Analytical methods
For analyzing the roughness of the specimens as well as
applied thin films, the confocal microscope Duo Vario
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(Confovis, Germany) was used. A 50x lens (Olympus, Japan)
with a numerical aperture of 0.95 was used for the
measurements. With aid of this high-precision measurements
were generated, which were evaluated using a measuring
software Mountainmaps 7 (Digital Surf, France). During the
analyses, measuring fields with a size of 1.3 x 1.3 mm were
recorded. Determined profile lines were subsequently filtered
according to DIN EN ISO 4287 with λc = 0.25 mm.
For the measurement of the residual stresses in the substrate,
material before and after the coating process an Advanced D8
(Bruker AXS, United States) was utilized, which is equipped
with a polycap with a diameter of D = 2 mm. Co Kα radiation
was selected (λ = 0.179 nm) with a photon energy of
E = 6.931 keV operating at IA = 40 kV and UA = 40 mA. For
the subtraction of the Co-Kβ radiation a Fe filter was placed in
front of the detector. The measurements were performed using
the sin²ψ method for the WC (112) reflex, which shows no
overlapping with other Bragg-reflex for the substrate and the
TiAlN coating. A detailed list of the parameters for the
calculation of the residual stresses in given in Table 1 based on
the material properties presented by Eigenmann and
Machenrauch [16]. The measurements were performed for a 2θ
range from 121.5 to 126.5° with an increment of Δ2θ = 0.1°
and an exposure time of t = 2 s. Equal distances of
sin²ψ = 0.0625 were selected with rotation angle steps of
φ = ± 0; 45; 90; 135; 180; 225 and 270° to determine the biaxial
state of the residual stresses.
Table 1. Selected Bragg reflex and properties for the calculation of the
residual stresses in the substrate material
Bragg Young’s Poisson’s XEC s1 XEC ½s2
reflex modulus ratio [10-6 MPa-1] [10-6 MPa-1]
WC (112) 624 GPa 0.16 -0.2564 1.859
The adhesion of the coatings on the differently treated
surfaces was analyzed by a scratch tester Revestest (CSM
Instruments, Switzerland) according to ISO 20502. The load
was linearly increased from 0 N to 100 N using a scratch length
of 10 mm with a Rockwell C diamond tip with a radius of
200 µm. For the evaluation the critical load Lc2, representing
the delamination of the coating alongside the scratch track was
selected and analyzed by means of a SEM.
3. Results
3.1. Influence of PAWAJM on the surface integrity
To understand the influence of the PAWAJM process on the
surface integrity of ultra-fine grain carbide substrate materials
the changes in the topography as well as the residual stresses
are analyzed. The surface characteristics Rz and Ra as well as
the parameters of the material ratio curve revealed an influence
of the blasting pressure for both abrasives. As exemplarily
presented in Fig. 4, the values of the roughness parameters Rz
and Rpk increase with higher blasting pressures, resulting from
the higher kinetic energy of the abrasive particles, which is
directly proportional to the pressure and the velocity of the
waterjet. This leads to an enhancement of the abrasive capacity
of the blasting and thus to an intensified change of the
 Alexander Leonard Meijer et al. / Procedia CIRP 108 (2022) 372–377
topography of the surface [17,18], which is in good accordance
with the observations made by Aßmuth [10].
In contrast, the effect of the blasting angle in comparison to
the blasting pressure is less pronounced. Thus, a reduced
influence on the surface roughness with rising blasting angle
can be observed at higher blasting pressures. However, this
influence is noticeably weaker and only emerges at higher
blasting pressures. This can be attributed to the decreasing
impulse transfer with increasing blasting angle, resulting in a
reduction of the material removal achieved. In addition, a
comparison of the two abrasive grain sizes F220 and F500
show a reduction of the influence on the roughness with the
smaller grain size. Since their mass decreases with the particle
size, the kinetic energy of the particles is reduced with finer
particle size [18]. Comparable to the blasting pressure, the
abrasive power is thus influenced, which can be attributed to
the reduced influence of the F500.
The analysis of the residual stresses in the sub-surface
region showed an isotropic compressive stress state for all
specimens after the preparation by PAWAJM (see Fig. 5). The
maximum compressive stresses of approximately
σ = -3.0 ± 0.04 GPa were determined at high pst and a ast = 0°.
Furthermore, previous findings concerning the overall process
dependencies due to the kinetic energy of the abrasive particles
were affirmed. As indicated by the presented results, the finer
abrasive leads to lower compressive stresses, which can be
contributed to the lower particle mass. The smaller mass
reduces the kinetic energy on impact, resulting in a minor
influencing of the sub-surface zone. While the blasting pressure
was identified as the main influencing factor, the blasting angle
was attributed as minor factor for inducing compressive stress.
Nevertheless, it is noticeable that a weakening of initial
compressive stresses can be observed at high blasting angles
and low pressures. One may conclude that although material is
removed on the surface as can be seen in the minor changes in
roughness, only a small share of the particle´s kinetic energy is
transferred to the subsurface due to the shallow impact angle.
Thus, only the near-surface area, in which residual stresses are
inherent, is removed without introducing further residual
compressive stresses into the sub-surface by the process.
Fig. 4. Influence of blasting angle αst and pressure pst on maximum roughness
Rz and reduced peak height Rpk
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375
Fig. 5. Influence of blasting angle αst and pressure pst on residual stress state
3.2. Influence of the PVD-deposition process
To determine the influence of the PVD-process on the
surface integrity, a detail look for the selected process steps in
terms of heating, ion etching and deposition of the TiAlN
coating with regard to changes in roughness and residual stress
(see Fig. 6) is necessary. Although the heating process as well
as ion etching induce only a small changes in the roughness
profile the film deposition of the DC/HiPIMS TiAlN coating
leads to an increase in the Ra and Rz values. These observations
can be explained by the different mechanisms involved in each
step of the deposition process. The induced thermal energy
does not lead to changes in the topography of the substrate
material (ΔRaheat = -2.88 nm) but in contrast to the roughness
profile the initially induced compressive residual stresses by
the grinding process are reduced (Δσheat ~ 404.0 MPa) which is
caused by thermal relaxation of the deformation and defects.
Contrary correlations are observed for the plasma etching
process (ΔRaion et = +5.51 nm) which leads to a change of the
topography but no shift of the residual stresses in the WC-phase
can be observed (Δσetch ~ 0.75 MPa). This effect can be
ascribed to the selective etching of the Co-matrix by the high
kinetic noble gas ions leading to an exposure of the WC-phase.
This mechanism can be confirmed by Gassner et al. for fine
grain carbide substrates which were plasma etched using
different bias voltages [19]. In dependency of the exposure time
and the kinetic energy of the etching process caused a rounding
of the shape of the WC particles, which cannot be confirmed
within this study.
However, consistent results to other works are observed for
the deposition of the TiAlN coating in terms of an increased
roughness after the growing of the thin film [20]. The
crystalline structure of the nitride coating and the shadowing
effects of the substrate material support the evolution of a
higher roughness profile compared to the conducted
pretreatments. Nevertheless, the measured values for the
roughness profile and the topography present a smooth defect
free surface, which is suitable for the high demands of
micromilling tools. The residual stresses maintain on a similar
 376 Alexander Leonard Meijer et al. / Procedia CIRP 108 (2022) 372–377

Fig. 6. Influence of coating process on roughness and residual stress state

level compared to the etching process (Δσcoat ~ 89.0 MPa),

which was also observed by Breidenstein and Denkena in the Fig. 7. Residual stresses after the deposition of TiAlN coating in the substrate
model for residual stress generation by different process chains
[21]. The same effects appear to be valid for nano-grained WC- 3.3. Influence on the coating adhesion
Co surfaces which were exposed to different plasma
pretreatments before the deposition of a CrAlN coating [22]. To evaluate the effect of the PAWAJM pretreatment on the
Additionally, the residual stresses of the substrate were adhesion of the TiAlN coating scratch tests were performed. As
measured and analyzed after the coating process. Compared to presented in Fig. 8, all blasted specimens showed an
the initial state of the induced compressive stresses by improvement of the film adhesion with higher Lc2 values
PAWAJM a reduction can be observed after the deposition of compared to the ground initial condition. On average over all
the TiAlN coating. Fig. 6 presents these correlations in parameter configurations considered, the adhesion increased
dependency of the blasting pressure and the blasting angle. A from initially Lc2 = 14.0 ± 5.8 N to Lc2,F220 = 24.4 + 8.8 N for
reduction from Δσ = 51 up to 1059 MPa for F220, with a F220 and Lc2,F500 = 28.2 + 12.3 N for the F500 abrasive.
maximum at pst = 6 bar and ast = 0° was observed. For F500 a
difference ranging from Δσ = 98 to 870 MPa at pst = 8 bar and
a ast = 0° was determined. Preparations with high residual
stresses, as a result of for example high blasting pressures, tend
to show the highest differences in the values determined. A
comparable effect can be seen considering the blasting angle.
Due to the dependence of the resulting compressive stresses on
the blasting angle resulting in the highest values at ast = 0°, a
significantly stronger reduction of the compressive stresses was
determined at low blasting angles. A more detailed analysis
revealed a dependency of the reduction to the process
parameters and abrasive used. Taking into account the
compressive stresses induced by PAWAJM, the values
determined after coating are reduced an average about 30% ±
6% for both abrasives. Moreover, for the F500 considered, no
further dependencies appear to arise over the considered
parameter range, as presented in Fig. 7. The analysis of the
abrasive F220, showed a minor dependence on the blasting Fig. 8. Influence of PAWAJM on coating adhesion Lc2
pressure. In particular, it appears that the reduction is more
prominent in the range of pst = 4 bar. As a result, this allows A detailed evaluation of the adhesion results showed a
concluding that higher beam pressures resulting in a higher correlation between the adhesion and the blasting angle. Thus,
kinetic energy of the abrasive particles allow a stronger the highest adhesion of the coating was determined with a
conservation of the compressive residual stresses, potentially blasting angle of α = 0°. Therefore, it is assumed that the
indicating a deeper distribution of stresses. However, further topography change is most beneficial when the particle impact
investigations will be necessary to analyze this based on angle is orthogonal. In addition, it was found, that in
considerations of the depth gradients of the residual stresses. comparison of the two abrasives analyzed a higher adhesion
was achieved with the finer abrasive. This is particularly
interesting in consideration of the lower compressive residual
stresses induced by the F500 abrasive, which on the other hand
achieved lower roughness values due to a finer modification of

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 Alexander Leonard Meijer et al. / Procedia CIRP 108 (2022) 372–377
the surface topography. This leads to the conclusion that
despite the lower residual stresses, the influence of the surface
topography on the layer adhesion is predominant in this case
and leads to complex interactions with respect to coating
adhesion. Despite the significantly higher compressive residual
stresses that could be obtained with the F220, the excessive
roughening of the surface led to a lower adhesion of the surface,
indicating a substrate specific optimum of the roughness profile
for ultra-fine grain carbides.
The differentiated observation of the process models
confirms the previously mentioned influence of the blasting
angle. The larger potential of the F500 abrasive is also evident,
since a higher adhesion was achieved at a blasting angle of
αst = 0° compared to the F220 abrasive. In addition, it is also
clear that the finer abrasive reacts slightly more sensitively to
the blasting pressure, so that an improvement in coating
adhesion can also be identified over the increasing pressure.
Nevertheless, the positive influence of PAWAJM on the
coating adhesion in the preparation of ultrafine-grain carbide
and the potential for preparation cutting edges can be deduced.
4. Conclusion
The influence of pressurized air wet abrasive jet machining
(PAWAJM) on ultra-fine grain carbide substrate material was
investigated with respect to the surface integrity and correlated
with the induced changes by PVD-coating processes and the
adhesion of the TiAlN thin films. The derived models show the
blasting pressure pst as the dominant factor for the abrasives
F220 and F500 inducing high compressive residuals stresses
and leading to an stronger increase in the roughness profile
compared to the blasting angle αst.
An analysis of the PVD coating process on ground samples
showed that the heating process step already leads to a
significant reduction of initial residual compressive stresses. In
addition, the etching process step led to a slight increase in
surface roughness of ΔRaion et = 5.51 nm due to the removal of
the cobalt binder phase. Further investigations on the modified
samples showed, that the induced residual stresses by
PAWAJM were reduced by an average of 30 %, which still
resulted in increased residual stress state compared to reference
specimens. Furthermore it could be shown, that this still led to
an enhanced adhesion of the DC/HiPIMS TiAlN coatings.
Here, the finer abrasive F500 revealed a higher potential, which
achieved higher values of the coating adhesion Lc2 compared
to the F220 in the scratch tests conducted.
Further investigations focus on the influence of a specific
design of the etching process on the layer adhesion as well as
the transfer of established fundamentals to the modification
conventional micromilling tool designs.
Acknowledgements
This research was funded by the Deutsche Forschungs-
gemeinschaft (DFG, German Research Foundation) – project
number 445127534 – Effects and interactions for interface and
cutting-edge conditioning in hard micromachining.
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377
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