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AIR BEARINGS

SEMINAR REPORT

Submitted by

ASHIN CHERIAN JOSEPH

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Seminar Report

ABSTRACT

Bearings are those machine elements that allow components to move with respect to

each other.Air bearing also known as aerodynamic bearings are bearings that uses a thin film

of pressurized air to provide an exceedingly low friction load bearing interface between

surfaces. This seminar is intended to have a review on air bearings and its application. As

these bearings are contact free problems like friction, wear, particulates and lubrication

handling are avoided. There are advantages like precision positioning such as lacking

backlash and static friction as well as in high speed applications. 4 lot of studies and

research have been done on air bearings as there are lot of advantages of air bearings over

sliding contact bearing with large applications. Working, applications and advantages of air

bearings will be discussed in this seminar. Lot of future studies have began combining air

bearing into new technology. Mining trucks, aircraft, locomotives ,modular buildings are

now built,moved and positioned with Air float technology which uses air bearing. There are

few limitations to air bearing like need for dry supply of pressurized air and initial cost. But

air bearings today emerged as the future bearings in the field of manufacturing technology.

Department of Mechanical Engineering, RSET, Kochi -682039

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Seminar Report

CONTENTS

ABSTRACT

ACKNOWLEDGEN

LIST OF FIGURES

1. INTRODUCTION

2. HISTORY

3. WORKING PRINCIPLE

4. TYPES OF AIR BEARING

4.1 AEROSTATIC BEARING

4.2 AERODYNAMIC BEARING

5. METHODOLOGY

5.1 DESIGN METHODOLOGY

5.2 PRESSURE PROFILE IN BEARING GAP

5.3 LOAD CAPACITY OF BEARING

6. ADVATAGES , DISADVANTAGES AND COMPARISON

6.1 ADVANTAGES

6.2 DISADVANTAGES

6.3 BEARING SYSTEM COMPARISON

7. APPLICATIONS

8. CURRENT RESEARCH

9. CONCLUSION

10. REFERENCES

11. QUESTIONS ASKED 23

12. PRESENTATION SLIDES 24

Department of Mechanical Engineering, RSET, Kochi -682039


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LIST OF FIGURES

1 . FIG 1 Aerostatic Bearing


2 . FIG 2 Pressure Supply
3. FIG 3 Aerodynamic Bearing

4. FIG 4 Air Bearing design Strategy

5 . FIG 5 Pressure Profile


6 . FIG 6 Load Capacity

7. FIG 7 Stiffness Relation

8. FIG 8 Bearing Systems Comparison

9 . FIG 9 Air Bearing Cutting System

10. Fig 10 Hyperloop

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Seminar Report

CHAPTER 1

INTRODUCTION

Air bearing are bearings that use a thin film of pressurized air for providing

exceedingly low friction load bearing interface between surfaces. The two surfaces do not

touch. As they are contact free, they provide tradition bearing problems of wear, friction,

particulates and lubrication handling, and offer a distinct advantage in precision positioning,

such as lacking backlash and static friction, as well as in high speed applications. The fluid

film of the bearing is air that flows through the bearing itself to the bearing surface. The

design of the air bearing is such that, although the air constantly escapes from the bearing

gap, the pressure between the faces of the bearing is enough to support the working loads.

Thus, there is a differentiation that has to be made between hydro-dynamical bearings, which

establish the air cushion through their movement, and hydrostatical bearings, in which the

pressure is being externally inserted. Air bearings are being mainly used in precision

machinery tools (measuring and processing machines) and fast running machines (high

speed spindle).This paper presents a detailed description of the Air bearings and its

applcations. They provide high stiffness and higher damping, while allowing higher speeds

with smooth and practically silent operation. For these reasons, air bearings are commonly

used in high precision manufacturing and testing applications. This guide will provide an

overview of the types of air bearings, product configurations, typical specifications to expect

from air bearings, and some of their applications and use.

Department of Mechanical Engineering, RSET, Kochi -682039 1

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CHAPTER 2

HISTORY

In 1828, Rev. Wills publishes a work in the Cambridge Philosophical Society entitled

—On the Pressure Produced on a Flat Surface When Opposed to a Stream of Air Issuing

from an Orifice in a Plane Surface.|| .In 1897 A. Kingsbury experiments with a 6| diameter

Journal bearing supported on externally pressurized air. The practical problems of matching

bore and shaft geometry and size to achieve a consistent .0005|| gap all the way around were

and are a manufacturing challenge. Small gaps are required when using air because the

viscosity is so low. Kingsbury finds that the higher viscosity of water or oil works better with

the relatively large gaps that can be manufactured at that time. In 1904 G. Westinghouse

receives a patent for an air thrust bearing used in a vertical steam turbine. In 1950s

Although obscure, air bearings are an important enabling technology in meeting the exacting

needs of the defense department and the nuclear power industry. US National Labs is a

leader in the application of air bearings to ultra-precision machine tools. In 1960's

Porous air bearings are developed, and have their genesis inside the National Labs. In 1965

Air Bearings Revolutionize the Coordinate Measuring Machine .The Check Mate is the first

CMM to employ air bearing technology, using a granite guide surface. Russ Shelton —

known by some as the father of the CMM— used porous carbon air bearings on machines he

built 40 years ago. Some of these machines are still in use today. This is because the air

bearings provide straighter, frictionless motion. The smooth, silent operation is especially

evident in the resolution of scanning or measurement on the fly-type machines. In1970's Air

bearing technology is commercialized when IBM uses air bearing spindles to produce large

hard disc drives.

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Seminar Report

The hard disc drive industry still relies almost exclusively on air bearing spindles
for its spin

stands.In1982 Sheffield Corporation (now Giddings & Lewis Metrology) — a builder of

CMMs — is one of the few companies to develop its own porous media air bearings. The

company considers the technology an important technical advantage. Originally employed on

the Apollo Machine in 1982, Giddings & Lewis Metrology continues to use porous media air

bearings today. In 1984 Aeolus Air Bearings — the predecessor to New Way Air Bearings® —

offers .The first standard air bearing product line. For the first time, customers are able to

choose from five sizes of inexpensive, readily-available, simple-to-employ air bearings. In

1987 The L.S. Starrett Co. builds a rolling-element bearing CMM when it redesigns its

machines to employ the advantages of air bearing technology. They elect to purchase New

Way® Porous Media™ air bearings rather than developing their own. Today they continue to

purchase New Way air bearings.

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CHAPTER 3

WORKING PRINCIPLE

The general perception of bearing in individual mind is ball bearing i.e. everybody is

Sfamiliar to only ball bearing but in air bearing there is no any contact between the bearing

surfaces. In Air bearing instead balls, there is cushion of air this mean air film acts as

lubrication between surfaces and friction will be reduced. The gap depends upon types of air

bearing used i.e. it may be aerodynamic bearings or aerostatic bearings. The basic principle

of operation of air bearings has been established for more than fifty years. An air bearing

may comprise of a sleeve separated from a plain shaft by gap, typically 5-50 um. High

pressure air is fed through small orifices in the sleeve through the bearing gap where it flows

along the gap and out of the ends of the bearing. Orifice size is matched to the bearing size

so that under no load the pressure in the gap, just downstream of the orifice, is approximately

half the supply pressure. When a radial load is applied, the gap on one side of the shaft closes

down increasing its resistance to and causing pressure to rise. On the opposite side of the

shaft, the larger gap has reduced resistance to airflow and allows pressure to fall. The

pressure difference across the bearing gives it the capacity to support the applied load

without incurring any metal-metal contact even if there is no shaft rotation.

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Seminar Report

CHAPTER 4

TYPES OF AIR BEARINGS

Air bearings fall under one of two categories, aerodynamic or aerostatic bearings.

Aerodynamic bearings require motion to generate an air film between the bearing surfaces.

Therefore, when there is no motion the bearing surfaces will contact. Aerodynamic bearings

may also be referred to as foil bearings or self-acting bearings. The other category of air

bearings is aerostatic bearings. These bearings require a source of pressurized air which is

passed through very precise features to the bearing surfaces. Because there is a constant

source of air; the air gap is maintained even when there is no motion.

4.1 AEROSTATIC BEARINGS

It is the bearing in which the pressurized air is supplied externally between the
bearing surface. A separate external supply of air is fed under pressure between the two
surfaces being kept apart. It is a continuous flow system where pressurised gas from the
source flows through restrictors into the clearance between the bearing surfaces escaping to
the atmosphere at the outside edges of the bearing.Simple orifice fed, Pocketed orifice, Slot
fed and Porous are types of aerostatic bearings.

4.1.1 PRINCIPLE
Because aerostatic bearings have a pressurized air source they can maintain an air

gap in the absence of relative motion between the bearing surfaces. Air bearings offer a
solution for many high-tech applications where high-performance and high accuracy is
required. Aerostatic bearings require an external Pressurized air source due to which
aerostatic bearings are also known as passive air bearings. High stiffness can be achieved.

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The aerostatic bearing is able to support higher load than the aerodynamic bearing, but it
requires continuous power supply for supplying pressurized air. Overall, aerostatic bearings
perform well in most aspects such as having long life, noise-free operations and are free from
contamination Since air has a very low viscosity, the bearing gaps need to be small, of the
order of 1- 10 um. As the object floats on a thin layer of air, the friction is extremely small
and even zero when stationary.

= = A > =
— e} —
e N

FIGURE 4.1 AEOSTATIC BEARING

Supplying air to the interface between moving elements of an aerostatic bearing can be
achieved in a few different methods:-

-Porous Media (through porous material)

-Micro-Nozzle (through micro-sized holes)

-Orifice Type ( through holes and grooves)

-Air Caster ( through an air bag)

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Pa

Ps

SN
73
/ Lo "
Low Clearance Side High Clearance Side

FIGURE 4.2 PRESSURE SUPPLY

Figure shows that, how gas at a supply pressure, Ps is admitted into the clearance
through a restricting device, which reduces the supply pressure. The pressure drop is due to
the acceleration of the gas as it expands. The air will flow through the bearing and back to
the atmosphere where the pressure further reduces to atmospheric pressure, Pa. A smaller
clearance will reduce the pressure drop that gives a higher load capacity. It is desirable to
achieve an optimum condition at which a maximum stiffness occurs where the rate of change
of load when divided by the rate of change of clearance is a maximum.

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4.2. AERODYNAMIC BEARINGS

It is the bearing which creates the air layer by its own.Also known as Foil Bearing or Self
acting Bearing. The supporting
film is generated by the relative motion of the two surfaces
being kept apart. An aerodynamic bearing can be of several types. The design characteristics
differ greatly between journal and axial bearings and they can suffer problems of instability.
Simple cylinders, Tri-lobe, Grooved (axial / herringbone
/ spiral) and Stepped are some of its
hpes.

4.2.1. PRINCIPLE

Aerodynamic bearings depend on relative motion between the bearing surfaces and
usually some type of spiral grooves to draw the air between the bearing lands. This bearing
action is very similar to hydroplaning in our automobile on a puddle of water at high speed.
At a lower speed our tire would cut through the water to the road. In just this way,
aerodynamic bearings require relative motion between the surfaces, when there is no motion
or when the motion is not fast enough to generate the air film the bearing surfaces will come
into contact. Aerodynamic bearings are often referred to as foil bearings or self-acting
bearings. Examples of this type of bearing include the read-write head flying over a spinning
disk, crankshaft journals, camshaft journals, and thrust bearings for electrical generator
turbines. Once the shaft is spinning fast enough, the working fluid(air) pushes the foil away
from the shaft via viscosity effects so that there is no contact.4 high speed of the shaft with
respect to the foil is required to initiate the air gap, and once this has been achieved, no wear
occurs.
Unlike aerostatic bearings, foil bearings require no external pressurisation system for the
working fluid. Thus the Aerodynamic bearing is called self acting.

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Bearing Top foil


housing
nonrotating

Compliant
support structure
rotating (bump foil)

FIGURE 4.3 AERODYNAMIC BEARING

Wider operating temperature range (40-2,500 K),Capable of operating above critical


speed when compared to other bearings,High shock load capacity are its features
The disadvantages are
- Wear during start-up and stopping
- High speed required for operation
Current-generation foil bearings with advanced coatings have greatly exceeded the
limitations of earlier designs. Anti-wear coatings exist that allow over 100,000
start/stop cycles for typical applications.

Department of Mechanical Engineering, RSET, Kochi -682039 9


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Seminar Report

CHAPTER §

METHODOLOGY

5.1 DESIGN METHODOLOGY

The basic understanding of air bearing performance was utilised to develop a simple
methodology to help the design and selection process. Design is an iterative process, but the
number of iterations can be minimised by adopting a careful strategy. Based on the load and
stiffness requirements, the bearing dimensions, orifice size, and supply pressure can be
suitably selected using this approach. Optimum air-gap and correspondingly the required
pre-loading can be also obtained.

| Select suitable supply pressure, Po -

Choose bearing dimen: based on total load


cap y

Select orifice diameter based on stiffness =

— Determine optimum air-gap range -

Determine pre-load to avoid unstability

FIGURE 5.1 STRATEGY


FOR AIR BEARING DESIGN

Based on the load and stiffness requirements, the bearing dimensions, orifice size, and supply
pressure can be suitably selected using this approach. Optimum air-gap and correspondingly the
required pre-loading can be also obtained.

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5.2 PRESSURE PROFILE IN BEARING GAP

Figure shows the pressure profile of planar thrust bearing. The measurement was
executed with an air gap of 10 um and a supply pressure of 0.6 MPa. There is a difference
between the expected profile of pressure and the measured one. Compared to the curve for
an ideal porous bearing material, real materials have no constant pressure field over the
bearing surface. However, the experimental data showed a curve with a similar trend. An
approximate value for the gap pressure can be specified with 0.55 MPa for parameters
stated above. The following criteria were necessary to achieve this. There must be a high
flatness of bearing and guide surface, a high mounting accuracy of the ceramic plate and
the bearing housing, and an optimal adjusting method for the measurement.

0.6
planar bearing
CVI-SIC/SIC
diameter
40 mm

thickness
2mm
supply pressure
0.6 MPa
air gap
10 pm
S‘ sensor

30 20 10 ] 10 30
distance a

FIGURE 5.2: PRESSURE PROFILE IN GAP OF A PLANAR THRUST BEARING

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5.3 LOAD CAPACITY OF BEARING

In Figure, the results of load capacity at several supply pressure are presented. All
curves show a tendentious similar behaviour. With decreasing air gap, an exponential
increasing load capacity is demonstrated. The maximum value lies at 380 N for a supply
pressure of 0.6 MPa and an air gap of 5 um. With increasing bearing gap, the load capacity
trended to zero.

500
planar bearing
CVI-SIC/SiC

N diameter
\ 40 mm

thickness
L~ : 300 A 2 mm

§ \\ supply pressure

3 R —+—0.6MPa
——0.4 MPa
—0—0.2 MPa

100

0 10 20 30 40 um 60
air gap hs

FIGURE 5.3 MEASURED LOAD CAPACITY FOR SEVERAL AIR GAPS

The bearing gap pressure and the load capacity are proportional to each other with
the surface as proportionality factor. Therefore, the load capacity curves have the same trend
as the pressure curves. In addition, the point of the maximum load capacity change was not
reached for small air gaps and it was not determinable by data extrapolation. Due to
different throttle effect with variation of air gap, the pressure distribution in gap is also
changed. During the measurement, it was identified that it is not possible to realise a
constant pressure over the bearing surface (see also Figure 4.3) even at decreasing of air
gap. For this reason, the mathematically maximum value of load capacity was not achieved.

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For the further determination of the optimal operating points, the knowledge of the
maximum load capacities alone is not sufficient. The investigation of the static stiffness of
aerostatic bearing is of decisive importance, because frequent load change arises in real
operation. Since the measured gap pressures do not consider the real pressure distribution in
the bearing gap, the stiffness was determined directly over the change of the load capacity
curves. The stiffness values give an essential statement about the static and dynamic
behaviour. It is also possible to determine the absorption behaviour of aerostatic bearing for
different operating conditions.

Figure shows the stiffness of bearing


for the supply pressure of 0.2 MPa to 0.6 MPa
for an air gap up to 60 um. With a supply pressure of 0.6 MPa and an air gap of 5 um, the
maximum stiffness lies approximately atl4 N/um. With increasing supply pressure, the
maximum value displaced in direction of smaller air gaps.

16
planar. bearing
Nigm| & CVI-SIC/SIC
\ diameter
12 40 mm

thickness
5 10 \ 2 mm
& \\
fi 8 — supply pressure
%E, \ ——0.6 MPa
6 =C=0.4 MPa
——0.2 MPa
4

2 ~—— ]
\ i—
Q 10 20 30 40 pm 60
air gap hg

FIGURE 5.4. STIFFNESS


IN RELATION OF BEARING GAP AND SEVERAL SUPPLY
PRESSURES

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CHAPTER 6

ADVANTAGES . DISADVANTAGES AND COMPARISON

6.1 ADVANTAGES

1) GREATER PRECISION

Air bearings provide extreme radial and axial rotational precision. Since there is no
mechanical contact, wear is minimal, ensuring accuracy remains constant over time.

2) INCREASED TOOL LIFE

The use of air bearings means tool life can be greatly extended.

3) IMPROVED SURFACE FINISH

The accurate, repeatable motion given by air bearing spindles gives a superior surface finish

4) LONG BEARING LIFE

With no mechanical contact and a clean air supply, free from oil and water; bearing
life is dramatically increased.

5) LOW THERMAL GROWTH

Low fiiction, constant air flow and efficient power transmission result in minimal thermal
growth.

6) LARGE LOAD CAPACITY

Air bearings can support heavy loads, allowing them to be applied to many industrial
machine tool applications

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7) REDUCED VIBRATION

Only minimal levels of vibration and audible noise are produced when running an air
bearing spindle.

8) LACK OF MAINTENANCE

Only the very minimum of maintenance is required. 4 regular check of air supply and
coolant systems is all that is necessary to ensure complete reliability

9) CLEANLINESS

Air is the only lubrication used; therefore air bearing technology is ideal where there must
be no contamination of the work piece or working environment.

10) HIGH SPEED

Low shear forces within the air bearing allow extremely high rotational speeds with
minimal loss of power and very low heat generation. Speeds can exceed 300,000 rpm.

6.2 DISADVANTAGES

1) High geometrical accuracies and precision required during manufacture.

2) The Supplied pressurized air which has to be clean and dry.

3) Requires some form of power consumption during operation to supply the high pressure
air unlike mechanical systems which may operate without any power input.

4) High manufacturing cost.

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6.3 BEARING SYSTEMS COMPARISION TABLE

Air Bearing
- Qil-bearing Ball be_nl_ing
Parameter hydrodynamic | ang. contact
Accuracy of rotation

=1,000rpm

Speed: <1,000 - 60,000rpm

=60,000 om

Low vibration

Shock resistance

Freguent stop/starts

Low starting forgue

Long lifafime (=20,000 hours)

Wide temperature range

Contamination fo surroundings

Resistance fo dusf ingress

High axial’radial loads

High axial’radial stiffness

Small space envelope

Low heaf generation

Run in partial vacuum

Low running costs

FIGURE 6.1 BEARING COMPARISON TABLE

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CHAPTER 7

APPLICATIONS

1. AIR-GUIDED HIGH-FREQUENCY KNIFE DRIVE

FIGURE 7.1. AIR BEARING CUTTING ENGINE

Even for movements which cause damage due to disruptive wear with roller bearings,
lifetimes of the drive systems are unlimited.

2. AIR GUIDED TURBOCHARGER

In order to provide confidence and for the first investigations, an initial conversion
from a conventional oil-guided turbo charger into air-guided was done. For a real future
version, the use of results obtained from high-temperature solutions, mass products and high-
frequency spindles will be very helpful.

3. MEDICAL TECHNOLOGY

Fat- and oil-free drives for respirators, stick-slip-free movements of scanners or a


high rotary speed of large rotors have all been achieved with air bearings.

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4. AIR-GUIDED COMPUTED TOMOGRAPHY

High rotary speed (> 5.5 H= / 330 rpm), low operation costs, no noise, large inner
rotor diameter (> Im), small weight of rotor and frame, tilt possibility of the rotor as well as
a high reliability. Besides a direct drive, a belt drive is also possible.

5. PRODUCTION TECHNOLOGY

Primarily, stick-slip-free movements and/or smallest forces are required. The air
bearing technology is predestined for fat/oil-free high-dynamic movements with short
strokes.

5. AIR BEARING FOR THE ADJUSTMENT OF COMPONENTS

With air-guided units, optical components can be arranged to have the same diameter
on a rotary table. The air bearing with vacuum preload and a constant bearing gap height
floats contact-less on top of the rotary table.

6. ADJUSTMENT SLIDER FOR OPTICS PRODUCTION

The linear slider, which is air-guided and statically determined, guarantees a high-
precision positioning of the optical component before grinding. The self-aligning process is
done without friction or force. When clamped the component retains its position for further
manufacturing in the sub-micrometre-range.

7. AIR-MAGNETIC SLIP SYSTEM

When transporting solar panels for satellites in a launching rocket, these must be
folded. After reaching orbit, they unfold via a spring mechanism, weightlessly and without
friction. This process requires prior testing on Earth due to security reasons. During the
testing design, the solar panels are hung on magnetic preloaded air-bearings that
compensate for gravity. In doing so, the unfolding movement process is carried out with a
minimum friction impact.Moreover, the design offers absolutely maintenance-free handling.

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The air-bearing components (diameter 34 mm) with integrated magnets are so small such
that they are able to glide contact-free along conventional rolled sheet plates smoothly and
with a bearing gap height of about 25 um. The holding force of an air bearing for one solar
panel averages 600 N. This force is achieved by an equal distribution of the load on 16 single
air bearing elements. The unfolding process of the solar panels has been developed
for an
area of 21 m x 2.5 m.

The permanent magnetic preloaded air-bearing guidance system may be used for many
types of hanging transportation movements as well as for many other applications, such as
for instance for the stick-slip-free positioning of components during assembly.

8. HYPERLOOP TRANSPORTATION

The Hyperloop is a conceptual high-speed transportation system, incorporating reduced-


pressure tubes in which pressurized capsules ride on an air cushion driven by linear
induction motors and air compressors.

The Hyperloop concept is proposed to operate by sending specially designed "capsules”


or "pods" through a continuous steel tube maintained at a partial vacuum. Each capsule
Sfloats on a 0.5-to-1.3-millimetre (0.02 to 0.05 in) layer of air provided under pressure to air-
caster "skis", similar to how pucks are suspended in an air hockey table.

FIGURE 7.2 HYPERLOOP CAPSULE: AIR COMPRESSOR ON THE FRONT, PASSENGER


COMPARTMENT IN THE MIDDLE, BATTERY COMPARTMENT AT THE BACK AND AIR
CASTER SKIS AT THE BOTTOM

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CHAPTER 8

CURRENT RESEARCH

The current area of research is to make the air bearing have the ability to operate at
- cryogenic gas temperature

- Higher load capacity


- Improved damping
- Improved coatings

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CHAPTER 9

CONCLUSION

A lot of studies and research have been done on air bearing. there are lot of
advantages of air bearing over sliding contact bearing with large applications air baring
concepts are ready to solve the problem of sliding contact bearing.with the comparison with
other types bearings the air bearings has been explainedAir bearings have found their use
primarily where it is mandatory to negate friction and wear.It is a solution for high speed and
reduced vibrations applicationsThe advantages take them into clean and environment
friendly bearing solution.Also by adopting air bearing technology we can increase bearing as
well as tool life.
This article which covers the field of air bearings, will help the personnel in field of high
precision machine designing.We can predict that air bearings will soon replace the
conventional bearings in hign speed,low and high loading applications because of their
excellence in overcoming the frictional related issues.In future air bearings will be made
applicable in many situations.Thus air bearings will become the Future Bearings

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REFERENCES

[1] T. Waumans, On the design of high-speed miniature air bearings: dynamic stability,

optimisation and experimental validation. PhD thesis, Katholieke Universiteit Leuven - Dept.

Mechanical Engineering, 2009.

[2] J. M. Vance, Rotordynamics of Turbomachinery. John Wiley & Sons, New York, 1987.

[3] L. San Andrés andD. Childs, Angled injection - hydrostatic bearings analysis and

comparison to test results. Trans. ASME - Journal of Tribology 119(1):179-187, 1997.

[4] L. Della Pietra, G. Adiletta, The squeeze film damper over four decades ofinvestigations,

Part I: Characteristics and operating features. Shock and Vibration Digest, 34(1):3-26, 2002.

[5] T Waumans, J. Peirs, F. Al-Bender, and D. Reynaerts, Design, optimisation and testing of

a high-speed aerodynamic journal bearing with a flexible, damped support.

[6] Tobias Waumansl, Jan Peirsl, Farid Al-Benderl, Dominiek Reynaerts ,AIR BEARINGS

FOR HIGH-SPEED APPLICATIONS: A VIABLE, CLEAN SOLUTION

[7] T. Waumans, J. Peirs, F. Al-Bender, and D. Reynaerts, Design, optimisation and testing of

a high-speed aerodynamic journal bearing with a flexible, damped support. in Proc. of the

9th International Workshop on Micro and Nanotechnology


for Power Generation and Energy

Conversion Applications, pp. 83-86, Washington DC, USA, December 2009.

[8] T. Waumans, J. Peirs, F. Al-Bender, and D. Reynaerts, Aerodynamic journal bearing with

a flexible, damped support operating at 7.2 million DN. in Proc. of the 10th International

Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion

Applications, pp. 199-202, Leuven, Belgium, December 2010.

[9] [2] R. Haberland, J. C. Aurich, G. M. Schueler, J. Engmann, and K. H. Schmidt, High-

speed air bearing spindles for using ultra-small cutting tools in micro-milling and micro-

grinding processes. In Proc. of the 8th euspen International Conference, Ziirich, Switzerland,

May 2008

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QUESTIONS ASKED

1. Explain the application of air bearings in semiconductor technology with examples ?

Ans. (1) Air bearing for inspection device

In terms of the measurement of wafers and flat panels, it is very important to place the
sensor chip precisely and without any contact along the surface. Therefore, the chip is
integrated directly into the bearing s surface. The maximum distance tolerance to the surface
which refers to the gap variation of the air bearing, is smaller than 0.5 um. When placing the
air bearing with the sensor chip, they must not touch the wafer surface being measured. As
for the up-and-down movement, a pneumatic piston is used which is, for repeatability
reasons, also air-guided. The preload of the air bearing and thus the gap height are also
adjusted with this piston.

(2) Chuck with integrated lift drive

For the electrical testing of wafers the chuck can be lifted stick-slip-free up to 3 mm. The
needed contact force for the probe is adjustable and independent from stroke. The lift drive is
based on a voice coil motor; the guidance is air-guided. An air-guided pneumatic piston
between the chuck and the drive limits the contact force.

2. What is the aspect behind the comparison chart ?

Ans. The aspect behind the comparison chart is the performance of each bearings in the
given parameter.

3. How much is the maximum load bearing capacity of a flat air bearing ?

Ans. 380 N for a supply pressure of 0.6 MPa and an air gap of 5 um.

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Seminar Report

AIR BEARINGS

0 ASHIN CHERIAN JOSEPH


. ROLLNO:23
® U14013414
GUIDED BY:JEFFIN JOHNSON $7 ME ALPHA

CONTENTS
o Introductionto Air Bearings

© WorkingPrinciple

o Dypes of Air Bearings

© Advantages
and Disadvantages

© Comparison

o Applications

o Conclusion

© Reference °

Department of Mechanical Engineering, RSET, Kochi -682039 24


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Seminar Report

BEARINGS

© Bearings are machine elements that allow components to

move with respect to each other.

© The term "bearing" is derived from the verb "to bear“.

© A bearing being a machine element allows one part to bear

(i.e., to support) another.

AIR BEARINGS

o Air bearings are the bearings that uses a thin film of pressurized air
to provide low friction interface between surfaces.

o It is the air which provides lubrication between the surfaces.

o The pressure thus developed between the surface supports the


workingloads.

o Contactfree bearing. ‘

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WORKING
o The general perception of bearing in individual mind is ball
bearing

o In Air bearing instead balls, there is cushion of air which act


as a lubricant in the gap between bearing moving parts.

o The air cushion carries the load without any contact between
the moving parts.

o Normally, the compressed air is supplied by a compressor:

© A key goal of supplying the air pressure in the gap is to reach


the highest possible stiffness and damping level

o In addition, air consumption and uniformity of air supply into


the gap are crucial for the behaviors of air bearings.

TYPES OF AIR BEARINGS

o There are two major types of Air Bearing.

- Aerostatic bearing

-Aerodynamic bearing

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Seminar Report

AEROSTATIC BEARING (CONTD...)

o It is the bearing in which the pressurized air is supplied


externally between the bearing surface.

o The pressure of this air is maintained by external source fiom


which it is supplied

o It is a continuous flow system where pressurised gas from the


source flows through restrictors into the clearance between
the bearing surfaces and escaping to the atmosphere at the
outside edges of the bearing. ‘

AEROSTATIC BEARING (CONTD...)

Department of Mechanical Engineering, RSET, Kochi -682039 2

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Seminar Report

AEROSTATIC BEARING (CONTD...)


o Supplying air to the interface between moving elements

of an aerostatic bearing can be achieved in a few

different methods. -

-Porous Media (through porous material)

-Micro-Nozzle (through micro-sized holes)

-Orifice Type ( through holes and grooves)

-Air Caster ( through an air bag)

AERODYNAMIC BEARING (CONTD...)

o It is the bearing which creates the air layer by its own.

o Also known as Foil Bearing or Self acting Bearing.

o The principle of aerodynamic bearings depends on

relative motion between surfaces in contact.

o They were first tested for commercial use in United

Airlines Boeing 727 and Boeing 737 cooling turbines in

the early- and mid-1960s. fl

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AERODYNAMIC BEARING

Bearing Top foil


housing
nonrotating

Compliant
Shaft (journal) support structure
rotating (bump foil)

AERODYNAMIC BEARING (CONTD...)

o A4 shaftis supported by a spring-loaded foil journal lining.

O Once the shaft is spinning fast enough, the working fluid(air) pushes the

Joilaway from the shaft viaviscosity effects so that there is no contact.

© A high speed of the shaft with respect to the foil is required to initiate the air

gap, and once this has been achieved, no wear occurs.

o Unlike aerostatic bearings, foil bearings require no external pressurisation

system for the working fluid.

o Thus the Aerodynamic bearing is called self acting.

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Seminar Report

AERODYNAMIC BEARING (CONTD...)

o Wider operating temperature range (40-2,500 K)

o Capable of operating above critical speed when compared to

other bearings

o High shock load capacity

AERODYNAMIC BEARING (CONTD...)

o The disadvantages are:

- Wear during start-up and stopping

- High speed required for operation

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AERODYNAMIC BEARING (CONTD...)

o Current-generation foil bearings with advanced coatings

have greatly exceeded the limitations of earlier designs.

Anti-wear coatings exist that allow over 100,000

start/stop cycles for typical applications

ADVANTAGES
1) Wear less operation. Air bearings operate contact-fiee

2) Cleanliness: Air is the only lubrication used. Hence no


contamination of the work piece or working environment

3) Reduced Vibration: Only minimal levels of vibration and


noise is produced

4) High Speed: Low shear forces within the air bearing allow
extremely high rotational speeds. Speeds can exceed
300,000 rpm. °

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5) Less Maintenance: Only Regular air supply check is only required.

6) Large Load Capacity: Load capacity of a flat air bearing with one
square inch of area operating at 5.5 atm inlet pressure is about 14
kg

7) Low Thermal Growth: Low friction and heat results in minimal


thermal growth.

8) Long Bearing and Tool Life: No mechanical contact and a clean air
supply, life is increased

9) Low friction a

DISADVANTAGES

1) High geometrical accuracies and precision required during


manufacture.

2) The Supplied pressurized air which has to be


clean and dry.

3) Requires some form of power consumption during operation


to supply the high pressure air unlike mechanical systems which
may operate without any power input.

4) High manufacturing cost. °

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COMPARISON
PARAMETER AEROSTATIC AERODYNAMIC OIL BALL
BEARING BEARING

Accuracyof Excellent Excellent Good Fair


rotation
Low Vibration Excellent Excellent Good Fair

Shockresistance Excellent Good Excellent Good

Frequent Excellent Good Excellent Good


start/stop
Low starting Excellent Fair Good Good
torque

Longlife Excellent Good Excellent Poor


time(>20000
hr)

Contamination = Good Excellent Poor Poor


to surroundings
Small space Fair Good Good Excellent
envelope
Low heat Good Good Poor Good
generation
Low running Fair Excellent Good Good
cost
Wide Excellent Good Fair Fair
temperature
range
Speed (inrpm)
<1000 Excellent Poor Excellent Fair
1000-60000 Excellent Excellent Fair Good
>60000 Excellent Excellent Poor Poor

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W Ai~ Bearir stem -
S Genring urice

APPLICATIONS
© Medical Technology

1.4ir-guided computed tomography

- High rotary speed (> 330 rpm)

- low operation costs

- no noise

- overall less weight

2. Fat- and oil-firee drives for respirators

3. stick-slip-firee movements of scanners or a high rotary speed ‘

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APPLICATIONS (conrtp...)
o Coordinate measuring machines

-Modular air bearings used on a CMMs which has a probe


moves in X Y Z directions are controlled by air bearings for
high measurements.

o Semi conductor technology

Chuck with integrated lift drive: For the electrical testing of


the chuck can be lifted stick-slip-free up to 3 mm.

APPLICATIONS (conrp...)

© Production Technology

1. Adjustment slider for optics production

-The linear slider; which is air-guided guarantees a high-

precision positioning of the optical component before.

2. An air bearing live center has been developed recently for

improving accuracy for gear checking. Q

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APPLICATIONS (conrp...)

o Transportation

-Hyperloop: It will ride on a cushion of air pumped from the

bottom of tray sized sleds.

o Turbomachinery

-Used in the machines by eliminating the oil systems

required by traditional bearing designs.

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s O
&

CURRENT RESEARCH

o Areas of research are:

The ability to operate at

- cryogenic gas temperature

- Higher load capacity

- Improved damping

- Improved coatings

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Seminar Report

CONCLUSION

O There are lot of advantages of air bearing over other types of


bearings.

o Air bearings have found their use primarily where it is

mandatory to negate friction and wear.

o It is a solution for high speed applications

© The advantages take them into clean and environment fiiendly

bearing solution.

REFERENCE
o [1] T. Waumans, On the design of high-speed miniature air
bearings: dynamic stability, optimisation and experimental

validation. PhD thesis, Katholieke Universiteit Leuven - Dept.

Mechanical Engineering, 2009.

o [2] J. M. Vance, Rotordynamics of Turbomachinery. John

Wiley & Sons, New York, 1987.

o [3] L San Andrés and D. Childs, Angled injection -

hydrostatic bearings analysis and comparison to test results.

Trans. ASME - Journal of Tribology 119(1):179-187, 1997. °

Department of Mechanical Engineering, RSET, Kochi -682039 38

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REFERENCE
o [4] L. Della Pietra, G. Adiletta, The squeeze film damper over four

decades of investigations, Part I: Characteristics and operating


Jfeatures. Shock and Vibration Digest, 34(1):3-26, 2002.

o [5] T Waumans, J. Peirs, F. Al-Bender, and D. Reynaerts, Design,

optimisation and testing of a high-speed aerodynamic journal

bearing with a flexible, damped support. in Proc. of the 9th

o [6]New Way Air Bearingswww.newwayairbearings.com

o [7] Air Bearing Technology, www.westwind-airbearings.com.

o [8] AirFloat Technologies, Decatur c

THANK YOU

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