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I. I NTRODUCTION
Fig. 2. IDS –VGS characteristics of MoS2 -n and WSe2 -p devices with equal
IOFF at VDS = VDD . The bilayer TMD devices show larger subthreshold
swing (SS) and higher threshold voltage (VT ). The mobility of bilayer TMDs
is assumed to be 1.6× of that for monolayer TMDs [11]–[13]. The gate width
is set to be 5.9 nm.
TABLE I
BANDGAP, E LECTRON A FFINITY, D IELECTRIC C ONSTANT, AND E FFECTIVE
M ASSES FOR M ONOLAYER /B ILAYER MoS 2 AND WSe2 U SED IN T HIS
PAPER [9], [10], [19]–[24]. m e AND m h D ENOTE THE E LECTRON
AND H OLE E FFECTIVE M ASSES , R ESPECTIVELY.
m 0 I S THE F REE E LECTRON M ASS
Fig. 3. (a) RSNM and (b) WSNM comparisons of SRAM cells with mono-
layer and bilayer MoS2 -n/WSe2 -p devices. The butterfly curves (right insets)
illustrate the better RSNM and worse WSNM of monolayer SRAM.
VREAD,0 is the read disturb voltage determined by the voltage divider effect
between the PG and PD transistors. VWRITE,0 is determined by the voltage
divider effect between the PG and PU transistors. The upper and lower bounds
indicate the best and worst RSNM if L g has 10% process variation.
resistance (RSD ), the gate-to-source/drain underalp design, and
the IOFF spec. on the SRAM stability and performance are assess the power-performance of monolayer MoS2 device.
comprehensively addressed.
For WSe2 devices, the mobility ratio of monolayer WSe2
This paper is organized as follows. Section II describes the
to MoS2 devices is based on their intrinsic phonon-limited
device design and TCAD simulation methodology used in this
mobility ratio [25]. In the comparison between the monolayer
paper. In Section III, we investigate and compare the stability,
and bilayer TMD devices, the mobility of bilayer TMDs is
leakage, and read/write performance of 6T SRAM cells using
assumed to be 1.6× of that for monolayer TMDs (if not
monolayer and bilayer MoS2 -n/WSe2 -p devices. Finally, the
otherwise stated) based on the experimental data in [11]–[13].
conclusions are drawn in Section IV.
According to [6] and [8], source-to-drain direct tunneling is
assumed to be negligible due to the relatively large effective
II. D EVICE D ESIGN AND TCAD S IMULATION masses of TMDs. Source/drain series resistance of 128 μm
M ETHODOLOGY is adopted from the ITRS 2028 node spec.
In this work, monolayer and bilayer MoS2 -n/WSe2 -p
devices are designed with equal OFF-current (IOFF ) of 5 nA/μm
III. SRAM S TABILITY /P ERFORMANCE U SING
and pertinent device parameters based on the ITRS 2028
M ONOLAYER AND B ILAYER MoS2 -n/WSe2 -p D EVICES
technology node, as shown in Fig. 2. To evaluate the stability
and performance of the TMD-based 6T SRAM, 2-D TCAD Fig. 3(a) compares the read static noise margin (RSNM) for
mixed-mode simulations [18] are performed with the physical monolayer and bilayer MoS2 -n/WSe2 -p 6T SRAM cells. The
properties of the atomically thin TMDs, as listed in Table I. RSNM is defined as the minimum noise voltage present at each
These material parameters are judiciously chosen from pub- storage node that flips the state of the cell. It is shown that, for
lished experimental and theoretical data [9], [10], [19]–[24]. a given VDD , the monolayer MoS2 -n/WSe2 -p 6T SRAM cell
The transport model (drift-diffusion model) is calibrated with possesses a larger nominal RSNM than the bilayer counterpart.
the dissipative quantum transport model using non-equilibrium This can be explained in Fig. 3(a) (right inset). It shows that
Green’s function (NEGF) formalism in [6] to accurately although the monolayer SRAM cell possesses slightly larger
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Fig. 4. Cell leakage comparison of 6T SRAM cells with monolayer Fig. 5. Impacts of bilayer-to-monolayer mobility ratio on the per-
and bilayer MoS2 -n/WSe2 -p devices. Despite the same nominal leakages at formance gain of bilayer SRAM (against monolayer SRAM). With
VDD = 0.64 V, the worst-case leakage of monolayer SRAM under 10% L g μBilayer /μMonolayer = 3×, the performance of bilayer SRAM cell
variation is much smaller than the bilayer counterpart. can be ∼25% better than that of monolayer SRAM cell.
Fig. 8. (a) With 2-nm L underlap , the RSNM of bilayer SRAM cell is
(as mentioned in Section I) [11], [26]. The impacts of RSD improved because of the increased effective channel length and improved SS
on 6T SRAM cell stability and performance are shown in of the bilayer TMD device. (b) While the performance of monolayer SRAM
degrades with 2-nm L underlap , the performance of bilayer SRAM virtually
Fig. 7. Fig. 7(a) reveals that the RSNM and WSNM for remains the same due to the improved SS. The read performance/write
both the monolayer and bilayer SRAMs decrease with increas- performance is normalized with respect to monolayer SRAM with
ing RSD . The decreasing RSNM may stem from the weaker L underlap = 0 nm.
PD (compared with the PG), because it operates in the linear
region. Moreover, when RSD becomes high, the bilayer SRAM more superior cell read access time and time-to-write to the
may possess larger RSNM than the monolayer counterpart monolayer SRAM, as shown in Fig. 8(b).
due to its smaller sensitivity of RSNM to RSD . Fig. 7(b) Fig. 9 compares the stability and performance of monolayer
shows that the cell read access time and time-to-write for both and bilayer SRAMs for LP and high-performance (HP) appli-
the monolayer and bilayer SRAMs are significantly degraded cations. It is shown in Fig. 9(a) that, by relaxing IOFF from
as RSD increases. Furthermore, the performance of bilayer the LP to HP specs, both the monolayer and bilayer SRAMs
SRAM exhibits higher sensitivity to RSD compared with the exhibit degraded RSNM. This is because the read disturb
monolayer counterpart owing to its higher mobility (and thus increases due to the decreased VT (and thus the stronger
smaller channel resistance). PG transistors). However, in the comparison of monolayer
Fig. 8(a) shows the impacts of gate-to-source/drain under- and bilayer SRAMs with HP IOFF spec., the bilayer SRAM
lap on the stability of bilayer and monolayer SRAM exhibits better RSNM than the monolayer SRAM. From the
cells. It shows that, with the source/drain underlap design perspective of read/write performance, the bilayer SRAM
(e.g., L underlap = 2 nm), the RSNM of bilayer SRAM shows more improvement in cell read access time and time-
improves and becomes slightly larger than the monolayer to-write than the monolayer one, as shown in Fig. 9(b). This
SRAM counterpart. This can be attributed to the improved can be explained by the fact that the relevance of mobility to
SS due to the increased effective channel length. Furthermore, performance increases with increasing (VDD − VT ). In other
compared with the bilayer SRAM without source/drain under- words, the bilayer SRAM, with higher channel mobility, is
lap, the bilayer SRAM with underlap possesses substantially more suitable for relaxed channel length and HP applications.
This article has been accepted for inclusion in a future issue of this journal. Content is final as presented, with the exception of pagination.
Chang-Hung Yu (S’11) received the B.S. degree Vita Pi-Ho Hu (S’09–M’13) received the
from National Taiwan University, Taipei, Taiwan, B.S. degree in materials science and engineering
in 2007, and the M.S. degree from National Chiao and the Ph.D. degree in electronics engineering and
Tung University, Hsinchu, Taiwan, in 2011, where the Institute of Electronics, National Chiao Tung
he is currently pursuing the Ph.D. degree with the University, Hsinchu, Taiwan, in 2004 and 2011,
Institute of Electronics. respectively.
His current research interests include design and She is currently an Assistant Professor with
modeling of emerging CMOS devices, analysis and National Central University, Taoyuan, Taiwan.
design of low-power SRAMs in ultrascaled
technologies, and device-circuit interaction.
Kuan-Chin Yu received the B.S. and M.S. degrees Ching-Te Chuang (S’78–M’82–SM’91–F’94)
from National Chiao Tung University, Hsinchu, received the Ph.D. degree in electrical engineering
Taiwan, in 2013 and 2015, respectively. from the University of California at Berkeley,
She is currently with Taiwan Semiconductor Berkeley, CA, USA, in 1982.
Manufacturing Company, Ltd., Hsinchu. He is currently a Life Chair Professor with the
Department of Electronics Engineering, National
Chiao Tung University, Hsinchu, Taiwan. He holds
64 U.S. patents, and has authored or co-authored
over 410 papers.