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TSMC Confidential Information 924762 Interuniversitair\ Micro-Elektronica\ Centrum\ \(IMEC\)\ vzw 07/09/2018
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Version 2.00
April 2008
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General Application Note
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TSMC Universal Analog
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I/O Library
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Copyright 2005, Taiwan Semiconductor Manufacturing Company, Ltd. All Rights Reserved.
TSMC Confidential Information 924762 Interuniversitair\ Micro-Elektronica\ Centrum\ \(IMEC\)\ vzw 07/09/2018
No part of this publication may be reproduced in whole or in part by any means without prior
written consent.
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NOTICE
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Taiwan Semiconductor Manufacturing Company Ltd. reserves the right to make changes in
the contents of this document without notice. No responsibility is assumed by Taiwan
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Semiconductor Manufacturing Company Ltd. for any infringements of patents or other rights
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5 Update “Tape-Out with Top Two Thick Metals and Top Two
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Large VIAs“ section in Chapter 4.
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1. Update the “Power Cut Adapter Cell PRCUTA” section and insert
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1.30 2005/12/04 “ESD Core Clamp PCLAMP Cell” section into Chapter 2.
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Reorganize Chapter 2, 3, 4, 5, and 6.
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1. Insert the section on “Tape Out with Top Two Thick Metals and
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Top Two Large VIAs for the mixed-mode process” into Chapter 2.
2
1.10 2005/06/15 2.
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Insert the section on “Direct Shrinkage to Half-Node Technology”
into Chapter 2.
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Note.
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TSMC Confidential Information 924762 Interuniversitair\ Micro-Elektronica\ Centrum\ \(IMEC\)\ vzw 07/09/2018
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Chapter 1 Introduction 1
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Description............................................................................................................................ 1
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Outline .................................................................................................................................. 1
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Condition One: Connect PDBxA / AC Analog Signal Pin to Internal Gate ......... 7
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Analog Ground Pad PVSS3A/AC .................................................................................... 12
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Filler Cell PFILLERxA Family & Corner Cell PCORNERA....................................... 14
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How To Use TPAxxxGV Universal Analog I/O with Bond Pad Cell............................ 19
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Non-CUP In-Line Wire-Bond ................................................................................. 19
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How To Use TPAxxxNV Universal Analog I/O with Bond Pad Cell ............................ 22
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Approach A: Place PCLAMP Cell in between Analog Macro and PVDD3AC &
PVSS3AC Cells......................................................................................................... 29
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Exampleby: Vanita
2: Using Agarwal
PRCUTA cell to separate digital/analog domains or to
Organization: F13780-College
separate analog/analog ofI/OEngineering
domains (with the same voltage)..............................Pune
34 (CoE
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TSMC Universal Analog I/O Library General Application Note – April 2008 iv
Example 3: Using PRCUTA cell to separate digital/analog domains or to
TSMC Confidential Information 924762 Interuniversitair\ Micro-Elektronica\ Centrum\ \(IMEC\)\ vzw 07/09/2018
separate analog/analog domains (with the same core voltage) ............................ 35
In
OD Mask ................................................................................................................. 36
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Poly Resistor ............................................................................................................. 37
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GDSII Change to Mask Revision............................................................................ 37
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Tape-Out with Top Two Thick Metals and Top Two Large VIAs in Non-CUP Wire
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Bond .................................................................................................................................... 38
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Direct Shrinkage to Half-Node Technologies.................................................................. 39
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Chapter 6 Contact Us 42
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TSMC Confidential Information 924762 Interuniversitair\ Micro-Elektronica\ Centrum\ \(IMEC\)\ vzw 07/09/2018
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Description
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original signal waveform has played a crucial role. This document summarizes
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useful information on what TSMC universal analog I/O comprises and how to
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By using the TSMC IP, TSMC universal analog I/O library is suitable for all kinds
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of power separation applications and Digital/Analog signal interface. Note that
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TSMC can guarantee the ESD robustness based on the testing condition specified
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in the universal analog I/O silicon report.
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Outline lI
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• Chapter 1 provides general information on what to follow and what to avoid.
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Chapter 2 introduces cell usage for analog I/O, power, ground, power-cut,
corner, filler, bond pad, and ESD core clamp cells.
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Chapter 3 provides application examples using universal analog I/O cells.
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out with top two thick metals, and direct-shrinkage to half-node technologies.
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TSMC Confidential Information 924762 Interuniversitair\ Micro-Elektronica\ Centrum\ \(IMEC\)\ vzw 07/09/2018
be used to bridge between TSMC universal analog I/O and TSMC
universal standard I/O. Note that it is prohibited to use the standard
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Application Note.
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Attention 3: Ensure the inter-connection between the analog macro
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Attention 4: There is no limitation on the number of power
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universal analog I/O and TSMC universal standard I/O. For how to
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bridge between TSMC universal standard I/O and TSMC specialty I/O
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cells, please refer to Chapter 7 of TSMC Universal Standard I/O
General Application Note for details.
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For universal analog I/O: You need to use the GDS under
(target total metal – 1) lm directory under “mt” directory; then
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insert dummy metal into metal top to fulfill the top 2 “Mu”
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For bond pad: TSMC bond pads cannot yet support “Mu”
metal scheme (where u stands for ultra). Therefore, you need
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Downloaded by: Vanita Agarwal manual followed by DRC / LVS check to ensure error free.
TSMC Confidential Information 924762 Interuniversitair\ Micro-Elektronica\ Centrum\ \(IMEC\)\ vzw 07/09/2018
streaming out the GDS file. If needed, TSMC can modify it
through customization service. Note that TSMC plans to
provide the ultra-thick metal bond pad in the near future.
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Please refer to the bond pad library release note for guidance
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oxide thickness, N90 universal analog I/O cell name comes with
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_33 / _25 / _18 extensions for DRC/LVS purpose.
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TSMC Confidential Information 924762 Interuniversitair\ Micro-Elektronica\ Centrum\ \(IMEC\)\ vzw 07/09/2018
In
•
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Filler cell PFILLERxA family & Corner cell PCORNERA
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• How to Use TPAxxxGV Universal Analog I/O with Non-CUP Bond Pad.
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•
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How to Use TPAxxxNV Universal Analog I/O with Non-CUP or CUP Bond Pad.
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To Core or
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TAVDD/TACVDD (Power Rail) io
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ESD Device
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ESD Device
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To Pad
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Figure 2.1 indicates that devices in universal analog I/O are powered by the
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TAVDD/TACVDD power rails, where TAVDD is for the domain supplied by I/O
voltage, and TACVDD is for the domain supplied by core voltage.
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TSMC Confidential Information 924762 Interuniversitair\ Micro-Elektronica\ Centrum\ \(IMEC\)\ vzw 07/09/2018
Figure 2.2 illustrates the structure of PDBxA/AC cells with the ESD protection
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Power
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Signal Input/Output
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ESD device
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Ground
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Figure 2.2 The PDBxA/AC Structure or
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The naming convention for PDBxA/AC is presented below (taking PDBxAC as an
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example):
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PD-B-x-A-C
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I/O Pad
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Table 2.1 provides a list of PDBxA/AC cells. There are three different input-
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capacitance categories with different ESD robustness levels available for options.
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TSMC Confidential Information 924762 Interuniversitair\ Micro-Elektronica\ Centrum\ \(IMEC\)\ vzw 07/09/2018
Domain Analog Estimated Expected ESD EM Application
Features
Type Cell Capacitance Performance Optimization Example
In
~ 600 fF at
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PDB3AC > 2KV HBM Yes
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steady state
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capacity
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PDB3A
~ 600 fF at tia
> 2KV HBM Yes
both ESD robustness DAC
steady state and EM (current) ADC
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Note 1: The capacitance shown in Table 2.1 only considers the ESD protection devices.
For the total input capacitance, we also need to take account of bond pad, and inter-
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connection between I/O and analog macro. Since this information is library
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dependent, please refer to the library release note for details.
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Note 2: For signal integrity, the signal swing cannot exceed the power rail voltage (Core or
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I/O) by 0.3V, a diode turn on voltage. Similarly, the signal swing cannot go under
the ground rail voltage by 0.3V, a diode turn on voltage.
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Note 3: If analog signal cell is connected to the internal gate, it is required to insert the
secondary ESD protection devices as illustrated in Figure 2.3 to ensure optimal
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ESD protection. If analog signal cell is connected to the internal drain, either insert
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the secondary ESD protection devices as illustrated in Figure 2.4, or follow the
ESD guidelines specified in TSMC Design Rule Manual as illustrated in Figure 2.5.
For robust ESD protection, you need to avoid direct path to power or to ground
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Note 4: For LNA, the “Expected ESD Performance” in Table 2.1 can only be applicable to
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Downloaded
Note 5: Whileby: Vanita
doing LVS Agarwal
check, you need to insert the top-level signal net name (that
“AIO” pin is connected to) as the bond pad pin text of PDBxA/AC signal cell for
Organization: net nameF13780-College
consistency. of Engineering Pune (CoE
Continued on the following page
Downloaded on: 09/11/2023
TSMC Universal Analog I/O Library General Application Note – April 2008 6
Note 6: The design of PDBxA / PDBxAC universal analog signal cells is not optimized for
TSMC Confidential Information 924762 Interuniversitair\ Micro-Elektronica\ Centrum\ \(IMEC\)\ vzw 07/09/2018
ESD Machine-Model protection. However, TSMC can provide guidelines on how to
enhance Machine-Model ESD performance based on specific application. Please
contact TSMC if consulting service is needed.
In
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It is required to implement your own secondary ESD protection device (with proper
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channel length) as specified in the ESD guidelines of TSMC Design Rule Manual,
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where a resistor in series with a PMOS protection device to power and an NMOS
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protection device to ground should be used as illustrated below.
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Diode
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PDBxA / PDBxAC
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For internal signal connection, please avoid direct path to power or to ground through one gate oxide.
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It is required to implement your own secondary ESD protection device (with proper
channel length) as specified in the ESD guidelines of TSMC Design Rule Manual,
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Parasitic
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Power Diode
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Ground
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Figure 2.4 Secondary ESD Protection Device Connected to The Drain Side of
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Internal Device
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If you cannot implement the secondary ESD protection device, you need to ensure
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that the internal P & N transistors (as indicated in yellow) closely follow the ESD
guidelines of TSMC Design Rule Manual. or
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Ground oxide
PDBxA / PDBxAC
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Figure 2.5 Internal P & N Transistor Need to Follow The ESD Guidelines
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Note: P & N transistors with drain side connected to the analog signal pin need to follow
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ESD guidelines, particularly the RPO ones as shown in Figure 2.6. Since P & N transistors
in this case have to be regarded as ESD devices, please waive the associated DRC errors.
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Source
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RPO to Contact = x
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RPO to Poly= y
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RPO overlap Poly = z
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Figure 2.6 RPO Rules in ESD Guidelines (x, y; z varies, depending on the
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technology)
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TSMC Confidential Information 924762 Interuniversitair\ Micro-Elektronica\ Centrum\ \(IMEC\)\ vzw 07/09/2018
rail name (TACVDD) of PDBxAC is different from that (TAVDD) of PDBxA cells.
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AIO (to Analog / RF macro) AIO (to Analog / RF macro) AIO (to Analog / RF macro)
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ESD Device
TS ESD Device ESD Device
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PDB1A
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PDB2A PDB3A
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ESD Device
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ESD Device ESD Device
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VSS (ground rail) VSS (ground rail)
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The PVDD3A/AC is the power cell to both analog macro and I/O power rail. Figure
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2.8 presents the simplified power diagram for PVDD3A/AC cells, where PVDD3AC
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is for supplying both analog macro and I/O power rail with the core voltage, while
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PVDD3A is for supplying both analog macro and I/O power rail with the I/O voltage.
TS
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TACVDD
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ESD Device
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PVDD3AC
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Figure 2.8 The PVDD3A/AC Power Scheme or
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Table 2.2 summarizes PVDD3A/AC cells in detail. io
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VSS
pre-driver voltage of Digital
I/O)
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I/O)
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Regarding Vanita Agarwal
of PVDD3A/AC, let’s take PVDD3A as an example:
Power pad for both analog macro and I/O power rail
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Note: The maximum analog power (TAVDD / TACVDD) metal bus resistance from
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the “bonded” PVDD3A/PVDD3AC power cell to any PDBxA/AC analog I/O in the
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same domain needs to be less than 1 Ohm for N45/N65/N90 process technologies;
on 9 tro 01
less than 3 Ohm for 0.13µm/0.15µm/0.18µm/0.25µm process technologies. Please
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refer to Figure 10.2 of Universal Standard I/O General Application Note for details.
fid 24 ni 8
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Figure 2.9 presents the simplified power diagram for PVSS3A/AC cells, where
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PVSS3AC is the ground pad for PVDD3AC, and PVSS3A is the ground pad for
2
PVDD3A. at
AVSS (to Analog / RF macro) AVSS
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(to Analog / RF macro)
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TACVDD TAVDD
VSS VSS
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PVSS3AC PVSS3A
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TSMC Confidential Information 924762 Interuniversitair\ Micro-Elektronica\ Centrum\ \(IMEC\)\ vzw 07/09/2018
PVDD3A/AC, PVSS3A/AC, and PDBxA/AC universal analog
I/O cells. If you must do so, please contact TSMC to have
PVSS3A/AC customized for this purpose.
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domain.
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For ESD/Latch-Up considerations, it is required to make the VSS
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domain) less than 1 ohm for N45/N65/N90 I/O; less than 3 ohm
fid 24 ni 8
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this requirement.
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In addition to the bonded PVSS1DGZ/CDG cell that needs to be
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PVSS2DGZ /CDG cells, so that the ESD power (VDD,
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Max. 1 Ohm VSS Bus Resistance for N45/N65/N90 I/O & 3 Ohm for 0.13um/0.15um/0.18um/0.25um I/O
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PRCUTA
PVSS3A/AC
PVSS1DGZ
PVDD3A/AC
PVSS2DGZ
PDBxA/AC
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PVDD2POC
PVDD1DGZ
Filler Cell
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Figure 2.10 Vanita
The VSS Bus Agarwal
of Universal Analog I/O Cells Is Supplied By
PVSS1DGZ/CDG Pre-Driver Ground Cell in the Adjacent
Organization: F13780-College of Engineering Pune (CoE
Universal Standard I/O Domain
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TSMC Universal Analog I/O Library General Application Note – April 2008 13
Table 2.3 PVSS3A/AC Cell Description
TSMC Confidential Information 924762 Interuniversitair\ Micro-Elektronica\ Centrum\ \(IMEC\)\ vzw 07/09/2018
Port Port Power &
Cell Name Description
to Core to Pad Ground
In
TS
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The ESD clamping device implemented within the PVDD3A/AC analog power cells
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can solidify the whole-chip ESD protection. Therefore, in addition to filler cells, you
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can also consider to insert PVDD3A/AC to the empty space in between universal
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analog I/O cells, with the trade-off in increasing stand-by leakage current.
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Filler Cell PFILLERxA Family & Corner Cell
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PCORNERA
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Similar to Digital I/O, Analog I/O library provides filler cells and corner cell. Since
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these cells are designed for analog domain, you can insert the filler cells or corner cell
(if necessary), and have them abutted with the neighboring Analog I/O.
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While inserting filler cell, DO NOT use smaller filler cells to fill large I/O spacing.
For example, use one 20µm pitch filler cell (PFILLER20A) and one 10µm pitch filler
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cell (PFILLER10A) instead of using 6 “5µm pitch” filler cells (PFILLER5A) to fill
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Please refer to the library release note or library databook for the available filler cell
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names.
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The power-cut adapter cell (PRCUTA) can be used for the following purposes:
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• To bridge the interface between TSMC universal analog I/O domain and TSMC
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Digital Domain
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The design principle of the power-cut adapter cell is to short the analog ground rail
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(VSS) with the digital pre-driver ground rail (VSS), while leaving the power rails
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Figure 2.11 PRCUTA as an Adapter Cell between Analog and Digital Domain
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Attention!!!
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For short ESD discharge path, you need to place PVDD1DGZ/CDG cell (from TSMC
universal standard I/O library) near the PRCUTA cell on the Digital side.
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TPAxxxGV universal analog I/O can only support non-CUP wire bond for ultra low-
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TSMC Confidential Information 924762 Interuniversitair\ Micro-Elektronica\ Centrum\ \(IMEC\)\ vzw 07/09/2018
metal , you need to insert enough filler cells from the “mt_2” back-end
directory of the staggered universal standard I/O library, as illustrated in Figure 2.12.
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CUP WB
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Filler Cell
CUP WB
Non-CUP WB
fid 24 ni 8
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From metal 1 to metal top - 2
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Figure 2.12 Filler Cell Insertion Between PRCUTA Adapter Cell & Staggered
Universal Standard I/O with CUP Bond Pad
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TPAxxxNV universal analog I/O compatible with linear universal standard I/O can
EC
support non-CUP wire bond or CUP wire bond application. Since the height of
TPAxxxNV universal analog I/O without the bond pad is exactly the same as the
\)\
height of linear universal standard I/O without the bond pad, you may consider to
adopt non-CUP wire bond for both TPAxxxNV universal analog I/O and linear
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universal standard I/O, or consider to adopt CUP wire bond for both TPAxxxNV
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universal analog I/O and linear universal standard I/O for area-saving concern.
Downloaded by: Vanita Agarwal
Organization: F13780-College of Engineering Pune (CoE
Downloaded on: 09/11/2023
TSMC Universal Analog I/O Library General Application Note – April 2008 16
Though using CUP pad with TPAxxxNV universal analog I/O could save area, CUP
TSMC Confidential Information 924762 Interuniversitair\ Micro-Elektronica\ Centrum\ \(IMEC\)\ vzw 07/09/2018
bond pad would impact the total input capacitance, which might be detrimental to RF
application. Therefore, we suggest non-CUP wire bond for RF application.
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Non-CUP WB
Non-CUP WB
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TPAxxxNV universal analog I/O can support either
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Figure 2.13 Non-CUP Wire Bond with TPAxxxNV Universal Analog I/O &
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Linear Universal Standard I/O io
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The PRCUTA adapter cell can be placed between two analog domains under the
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following conditions:
• Between two analog domains with different supplied voltage
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• Between two analog domains with the same supplied voltage for noise concern.
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EC
The design principle of PRCUTA adapter cell is to short the analog ground rail (VSS)
of one analog domain supplied by one voltage source with that of another analog
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Analog Domain A
C Analog Domain B
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Figure 2.14 PRCUTA as Adapter Cell between Two Analog Domains with
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For noise concern, you may consider to place PRCUTA adapter cell between two
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analog domains with the same supplied voltage. Doing so can considerably isolate
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the noise effect induced from the other. Please refer to Figure 2.15 for illustration.
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TACVDD (Core-Voltage Analog Power Rail) TACVDD (Core-Voltage Analog Power Rail)
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TSMC Confidential Information 924762 Interuniversitair\ Micro-Elektronica\ Centrum\ \(IMEC\)\ vzw 07/09/2018
with Bond Pad Cell
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TPAxxxGV (where xxx is technology code) universal analog I/O comes with “gv”
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suffix in the library name, indicating that this library can be compatible with
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universal standard I/O that comes with “gv” suffix through adapter cell. For example,
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TPAxxxGV universal analog I/O can only support non-CUP wire-bond with in-line
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on 9 tro 01
style. Users can select PADxA/AM or PADxAR/ARM bond pads based on the target
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pad pitch and application. Please refer to the following section for usage instruction.
fid 24 ni 8
For the pad pitch bigger than the I/O cell width, you need to insert appropriate
ic
number of filler cells as instructed in “Filler cell PFILLERxA family & Corner cell
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I/O Library
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Two types of bond pad available from TPBxxxGV bond-pad library can be used for
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0.13µm/0.18µm TPAxxxGV universal analog I/O, PADxA/AM and PADxAR/ARM.
Please refer to Table 2.5 for usage instruction.
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en
Table 2.5 Bond Pads for 0.13µm/0.18µm TPAxxxGV Universal Analog I/O
tr
Used with
PADxA From Metal 1 to PDB3A/AC, Under the "wb" directory of the
\\
PVSS3A/AC
EC
Used with
PADxAR From Metal Top-1 Under the "wb" directory of the
PDB1A/AC,
PADxARM to Metal Top corresponding bond pad library
PDB2A/AC
\)\
vz
w
TSMC Confidential Information 924762 Interuniversitair\ Micro-Elektronica\ Centrum\ \(IMEC\)\ vzw 07/09/2018
universal analog I/O library.
1 thick top metal PADxA
In
process
er
M
si
C
ta
Figure 2.16 The Non-CUP Bond Pads for 0.13µm/0.18µm TPAxxxGV Universal
C
Analog I/O Library
ir\
on 9 tro 01
M
fid 24 ni 8
ic
Note 1: The “x” of PADxA / PADxAM / PADxAR / PADxARM is the pad pitch. For
ro
en 762 ca\
example, PAD60A comes with “60µm” pad pitch.
-E
tia
Note 2: For 0.13µm/0.18µm application with top two thick metals and top two large
le
VIAs for the mixed-mode process, you need to use the bond pad with suffix “M”. For
lI
k
instance, use PADxAM as the bond pad for PDB3A/AC, PVDD3A/AC, and
07
nf
PVSS3A/AC. Similarly, use PADxARM as the bond pad for PDB1A/AC and
PDB2A/AC.
or
/0
9/
m
Note 3: Please read special notes on page 21 & 22.
2
at
io
C
n
en
tr
For 90nm & other advanced technologies, because of complex metallization options,
you will not find PADxAM & PADxARM bond pads in the bond pad library. Instead,
EC
you can only see PADxA & PADxAR bond pads under each specific back-end
directory that is named by metal scheme. For example, you can find PADxA &
\)\
PADxAR GDS from 9M_6X2Z directory, where 9M indicates 9 metal layer; 6X2Z
indicates 6 metal layers with X metallization and top 2 metal layers with Z metallization.
vz
Please refer to the table of “Metallization Options” in TSMC Design Rule Manual for
w
TSMC Confidential Information 924762 Interuniversitair\ Micro-Elektronica\ Centrum\ \(IMEC\)\ vzw 07/09/2018
Cell Name Metal Layer Description Where to Find
Used with
In
Used with
TS From Metal Top-1 Under the "wb" directory of the
v
PADxAR PDB1A/AC,
to Metal Top corresponding bond pad library
er
M PDB2A/AC
si
C
ta
C
ir\
on 9 tro 01
M
fid 24 ni 8 PADxA
9lm/9M_6X2Z
ic
PADxAR
ro
en 762 ca\
wb directory
PADxA
-E
tia 6lm/6M_3X2Y
TPBxxxGV PADxAR
le
nf
or
/0
9/
m
2
at
Figure 2.17 The Non-CUP Bond Pads for 90nm/65nm/45nm TPAxxxGV
Universal Analog I/O Library
io
C
n
en
tr
um
Special Notes
\\
(IM
Note 1: For low input capacitance purpose, TPAxxxGV universal analog I/O is
designed for the non-CUP wire bond, but not for the CUP application.
EC
Note 2: For the double-pitch cell width, you need to connect “TWO” bond pads as
\)\
illustrated in Figure 2.18. Align the left edge of one bond pad pr-boundary with the left
edge of double-pitch cell pr-boundary, and align the right edge of the other bond pad pr-
vz
DownloadedNoteby:
3: WhileVanita
using PDB1A/ACAgarwal
and PDB2A/AC I/O cells, you need to insert the dummy
metal blockage layer to both the I/O cell and the PADxAR/ARM bond pads to ensure the
Organization: F13780-College
low input of Engineering
capacitance. However, doing so might Pune
lead to insufficient metal density errors. (CoE
Please contact TSMC Product Engineer for waive-ability.
Downloaded on: 09/11/2023
TSMC Universal Analog I/O Library General Application Note – April 2008 21
Note 4: Misuse of PADxAR/ARM to PDB3A/AC, PVDD3A/AC; PVSS3A/AC would
TSMC Confidential Information 924762 Interuniversitair\ Micro-Elektronica\ Centrum\ \(IMEC\)\ vzw 07/09/2018
result in open problem!
pad capacitance!
te
ru
ni
TS
v er
M
si
C Double-Pitch Cell
ta
C
ir\
fid 24 ni 8
ic
ro
en 762 ca\
-E
tia
Bond Pad Bond Pad
le
lI
k
07
nf
or
/0
9/
m
2
at
Figure 2.18 Two Bond Pads Required for the Double-Pitch Cell
io
C
n
en
tr
um
TPAxxxNV (where xxx is technology code) universal analog I/O comes with “nv”
suffix in the library name, indicating that this library can be compatible with the linear
\)\
universal standard I/O that comes with “nv” suffix through adapter cell. For example,
tpan90lpnv3 universal analog I/O can be compatible with tpdn90lpnv3 linear universal
vz
TSMC Confidential Information 924762 Interuniversitair\ Micro-Elektronica\ Centrum\ \(IMEC\)\ vzw 07/09/2018
For TPAxxxNV universal analog I/O library, you need to access back-end
In
For TPBxxxNV bond pad library, you need to access back-end database under
ru
“wb” directory
ni
Users can select PADxA/AM or PADxAR/ARM bond pads based on the target pad
TS
v
pitch and application. Please refer to the following section for usage instruction. For
er
the pad pitch bigger than the I/O cell width, you need to insert appropriate number of
M
si
filler cells as instructed in “Filler cell PFILLERxA family & Corner cell PCORNERA”
C
section of Chapter 2.
ta
C
ir\
on 9 tro 01
M
fid 24 ni 8
PADxA/AM and PADxAR/ARM Bond Pads for
ic
ro
en 762 ca\
0.13µm / 0.18µm TPAxxxNV Universal Analog I/O
-E
Library
tia
le
lI
Two types of non-CUP bond pads available from TPBxxxNV bond-pad library can be
k
07
nf
used for 0.13µm/0.18µm TPAxxxNV universal analog I/O, PADxA/AM and
PADxAR/ARM. Please refer to Table 2.7 for usage instruction.
or
/0
9/
m
Table 2.7 The Non-CUP Bond Pads for 0.13µm/0.18µm TPAxxxNV Universal
2
Analog I/O at
Cell Name Metal Layer
io
Description Where to Find
C
n
en
Used with
PADxA From Metal 1 to PDB3A/AC, Under the "wb" directory of the
tr
PVSS3A/AC
\\
Used with
PADxAR From Metal Top-1 Under the "wb" directory of the
PDB1A/AC,
(IM
Figure 2.19 shows where to locate the non-CUP bond pads for 0.13µm/0.18µm
vz
TSMC Confidential Information 924762 Interuniversitair\ Micro-Elektronica\ Centrum\ \(IMEC\)\ vzw 07/09/2018
(1 large top via) PADxAR
In
PADxARM
process
ni
TS
v er
Figure 2.19 The Non-CUP Bond Pad for 0.13µm/0.18µm TPAxxxNV Universal
M
si
Analog I/O C
ta
Note 1: The “x” of PADxA / PADxAM / PADxAR / PADxARM is the pad pitch. For
C
ir\
Note 2: For 0.13µm/0.18µm application with top two thick metals and top two large
fid 24 ni 8
ic
VIAs for the mixed-mode process, you need to use the bond pad with suffix “M”. For
instance, use PADxAM as the bond pad for PDB3A/AC, PVDD3A/AC, and
ro
en 762 ca\
PVSS3A/AC. Similarly, use PADxARM as the bond pad for PDB1A/AC and
-E
PDB2A/AC.
tia
le
lI
Note 3: Please read special notes on page 25 & 26.
k
07
nf
or
/0
9/
m
PADxA and PADxAR Bond Pad for
2
at
90nm/65nm/45nm TPAxxxNV Universal Analog io
C
I/O Library n
en
tr
For 90nm & other advanced technologies, because of complex metallization options,
you will not find PADxAM & PADxARM bond pads in the bond pad library. Instead,
um
you can only see PADxA & PADxAR bond pads under each specific back-end
directory that is named by metal scheme. For example, you can find PADxA &
\\
PADxAR GDS from 9M_6X2Z directory, where 9M indicates 9 metal layer; 6X2Z
(IM
indicates 6 metal layers with X metallization and top 2 metal layers with Z metallization.
Please refer to Figure 2.20 for illustration, and Table 2.8 for usage instruction.
EC
\)\
vz
w
TSMC Confidential Information 924762 Interuniversitair\ Micro-Elektronica\ Centrum\ \(IMEC\)\ vzw 07/09/2018
Analog I/O
Cell Name Metal Layer Description Where to Find
In
Used with
te
TS
v
Used with
From Metal Top-1 Under the "wb" directory of the
er
PADxAR PDB1A/AC,
Mto Metal Top corresponding bond pad library
PDB2A/AC
si
C
ta
C
ir\
on 9 tro 01
M
fid 24 ni 8
ic
PADxA
9lm/9M_6X2Z
ro
wb directory
tia
TPBxxxNV PADxA
le
nf
or
/0
9/
m
Figure 2.20 The Non-CUP Wire-Bond Bond Pads for 90nm/65nm/45nm
2
at
TPAxxxNV Universal Standard I/O Library io
C
n
en
tr
um
Special Notes
\\
Note 1: For the double-pitch cell width, you can connect “TWO” bond pads by
(IM
aligning the left edge of bond-pad pr-boundary with the left edge of double-pitch cell
pr-boundary, and by aligning the right edge of the other bond-pad pr-boundary with the
EC
Note 2: While using PDB1A/AC and PDB2A/AC I/O cells, you need to insert the dummy
metal blockage layer to both the I/O cell and the PADxAR/ARM bond pads to ensure the
vz
low input capacitance. However, doing so might lead to insufficient metal density errors.
Please contact TSMC Product Engineer for waive-ability.
w
TSMC Confidential Information 924762 Interuniversitair\ Micro-Elektronica\ Centrum\ \(IMEC\)\ vzw 07/09/2018
bond-pad capacitance!
In
te
ru
ni
TS
v
Double-Pitch Cell
er
M
si
C
ir\
on 9 tro 01
M
fid 24 ni 8
ic
ro
tia
le
lI
k
07
nf
Figure 2.21 Two Bond Pads Required for the Double-Pitch Cell
or
/0
9/
m
2
at
CUP In-Line Wire-Bond io
C
n
en
For TPAxxxNV universal analog I/O library, you need to select back-end database
under “mt_2” directory. Please refer to Figure 2.23 for example.
tr
um
For TPBxxxNV bond pad library, you need to access back-end database under
“cup” directory, and select PADxARU / PADxARMU CUP pad as shown in Table
\\
2.9.
(IM
Table 2.9 CUP Bond Pad for TPAxxxNV Universal Analog I/O
EC
PDB1A/AC,
Under the "cup" directory of the
PADxARU PDB2A/AC
vz
TSMC Confidential Information 924762 Interuniversitair\ Micro-Elektronica\ Centrum\ \(IMEC\)\ vzw 07/09/2018
technologies. For the pad pitch bigger than the I/O cell width, it is necessary to insert
the appropriate number of filler cells as instructed in “Filler cell PFILLERxA family &
Corner cell PCORNERA” section of Chapter 2.
In
te
TS
v er
blockage layers in the top two metals first, and then route the
C
internal signal afterwards.
ta
C
ir\
on 9 tro 01
Note 2: Though using CUP with TPAxxxNV universal analog
M
I/O could save area, CUP bond pad would significantly increase
fid 24 ni 8
ic
en 762 ca\
-E
tia
Note 3: For the double-pitch cell width, you can connect
le
“TWO” CUP pads by aligning the left edge of CUP pad pr-
lI
boundary with the left edge of double-pitch-cell pr-boundary,
k
07
nf
and by aligning the right edge of the other CUP pad pr-boundary
with the right edge of double-pitch-cell pr-boundary.
or
/0
9/
m
Figure 2.22 shows where to locate the CUP pads for 0.13µm/0.18µm TPAxxxNV
2
PADxARU
TPBxxxNV (1 large top via)
tr
process
(IM
Figure 2.22 The CUP Bond Pads for 0.13µm/0.18µm TPAxxxNV Universal
EC
Analog I/O
\)\
vz
Note 1: The “x” of PADxARU / PADxARMU is the pad pitch. For example,
PAD60ARU comes with “60µm” pad pitch.
w
TSMC Confidential Information 924762 Interuniversitair\ Micro-Elektronica\ Centrum\ \(IMEC\)\ vzw 07/09/2018
large VIA in 0.13µm:
For universal analog I/O cell, use 6lm gds under “mt_2” directory within the gds
In
kit, where 6lm gds contains metal 1 to metal 4, leaving space in metal 5 and 6
empty.
te
For CUP bond pad, use 6lm gds under “cup” directory within the gds kit, where
ru
TS
v
C
ta
fid 24 ni 8 VIA 45
ic
VIA 45
Metal 4
ro
VIA 56 Metal 3
tia
le
VIA 23 lI
k
Metal 2
07
VIA 12
nf
or
/0
Metal 1
9/
at
Figure 2.23 Illustration of GDS Kit Under “mt_2” and “cup” Directories for
0.18µm/0.13µm CUP Application io
C
n
en
tr
Reminder: If you need top 2 thick metals, all you have to do is replace PADxARU
um
For 90nm & other advanced technologies, because of complex metallization options,
vz
you will not find PADxARMU CUP pad in the bond pad library. Instead, you can only
see PADxARU CUP pad under each specific back-end directory that is named by metal
w
TS
v
Figure 2.24 The CUP Bond Pad for 90nm/65nm/45nm TPAxxxNV Universal
er
Analog I/O
M
si
C
ta
C
ir\
on 9 tro 01
M
fid 24 ni 8
ESD Core-Clamp PCLAMP Cell
ic
ro
en 762 ca\
For ESD robustness in the “core-voltage” analog domain implemented with universal
-E
tia
analog I/O cells, you need to place ESD core-clamp “PCLAMP” cell in either of the
le
nf
Approach A: Place PCLAMP Cell in between or
/0
m
2
at
Step 1: Place analog power PVDD3AC and analog ground PVSS3AC cells together.
io
C
Step 2: Place PCLAMP cell in between (the PVDD3AC & PVSS3AC pairs) and
n
en
internal core.
tr
Step 3: Connect from AVDD pin of PVDD3AC analog power cell to VDDESD pin of
um
Step 4: Connect from AVSS pin of PVSS3AC analog ground cell to VSSESD pin of
PCLAMP cell through Metal 3.
(IM
Step 5: Connect from VDDESD and VSSESD rails of PCLAMP cell to internal power
EC
TS
v
PCLAMP
er
C
ta
on 9 tro 01
M
fid 24 ni 8
ic
PVSS3AC
PVDD3AC
ro
Metal 3
en 762 ca\
-E
tia
le
VIA Mesh lI
k
07
Metal 1, 2
nf
Non-CUP WB
Non-CUP WB
or
/0
9/
m
2
at
io
C
n
en
Attention: If you do not place PCLAMP cell together with PVDD3AC & PVSS3AC
pair, ESD performance would be degraded.
\)\
vz
w
TSMC Confidential Information 924762 Interuniversitair\ Micro-Elektronica\ Centrum\ \(IMEC\)\ vzw 07/09/2018
Bond Pads of PVDD3AC and PVSS3AC
In
Step 2: Place PCLAMP cell between the bond pads of PVDD3AC & PVSS3AC, and
ru
have PCLAMP cell “away” from the die edge (i.e. closer to filler-cell region as
ni
Step 3: Connect to the bond pad of PVDD3AC and the bond pad of PVSS3AC
er
C
ta
on Filler9Cells tro 01
M
fid 24 ni 8
ic
PVSS3AC
PVDD3AC
ro
en 762 ca\
-E
tia
le
lI
k
07
nf Non-CUP WB
or
/0
9/
m
2
at
Non-CUP WB
io
C
PCLAMP n
en
tr
um
\\
Figure 2.26 Place PCLAMP Cell between The Bond Pads of PVDD3AC and
PVSS3AC
EC
Figure 2.26
\)\
METAL 3
vz
w
TS
v er
M
si
C
ta
C
ir\
on 9 tro 01
M
fid 24 ni 8
ic
ro
en 762 ca\
-E
tia
le
lI
k
07
nf
or
/0
9/
m
2
at
Figure 2.27 Connect from PCLAMP Cell to The Bond Pads of PVDD3AC and
io
PVSS3AC through Metal 3 (in blue)
C
n
en
tr
um
\\
(IM
Attention: If you do not place PCLAMP cell together with PVDD3AC & PVSS3AC
pair, ESD performance would be degraded.
EC
\)\
vz
w
TSMC Confidential Information 924762 Interuniversitair\ Micro-Elektronica\ Centrum\ \(IMEC\)\ vzw 07/09/2018
This chapter illustrates examples for different types of applications. It is crucial to
In
use the right cells for performance achievement and quality concern. Please contact
te
questions.
ni
Table 3.1 shows the general rule of thumb, depending on the application type.
TS
v er
PDB3AC
fid 24 ni 8 I/O
ic
PDB2A PVDD3A
en 762 ca\
PVSS3A Not Applicable driver voltage of digital
-E
PDB3A
tia I/O
le
lI
k
nf
digital/analog domains or to separate
or
/0
9/
voltage)
at To Analog macro
io
C
To Analog macro
n
en
PCLAMP
AVDD AIO AVSS
AVDD AVSS AIO
tr
um
P P
ESD Device ESD Device ESD Device ESD Device
P R R
(IM
T ESD Device A A
ESD Device ESD Device ESD Device
A
\)\
Downloaded
Digital by: Vanita Agarwal Core-Voltage
I/O Voltage Digital
Domain B Analog Power Domain Analog Power Domain Domain A
Organization: F13780-College of Engineering Pune (CoE
Downloaded on:
Figure 09/11/2023
3.1 Application Example 1 Using PRCUTA
TSMC Universal Analog I/O Library General Application Note – April 2008 33
DESCRIPTION
TSMC Confidential Information 924762 Interuniversitair\ Micro-Elektronica\ Centrum\ \(IMEC\)\ vzw 07/09/2018
Referred to Figure 3.1, PVDD3A is the power supply in I/O-voltage analog power
In
domain and PVDD3AC is the power supply in core-voltage analog power domain.
te
(a). In I/O-voltage analog power domain: PVSS3A and PDBxA are used with
PVDD3A.
ru
(b). In core-voltage analog power domain: PVSS3AC and PDBxAC are used with
ni
cell.
er
(c). The power-cut adapter cell PRCUTA can be used to separate the analog power
M
domains supplied with different voltage.
si
(d). The power-cut adapter cell PRCUTA can also be used to separate the analog
C
ta
domain from the digital domain, as indicated on the left and right sides of Figure 3.1
C
ir\
fid 24 ni 8
ic
ro
voltage)
nf
or
/0
To Analog macro
9/
m To Analog macro
2
VDD
n
en
P P
P ESD Device ESD Device R ESD Device ESD Device R
um
Digital
I/O-Voltage I/O-Voltage Domain A
Domain B
vz
Downloaded by:
Figure Vanita
3.2 Application Agarwal
Example 2 Using PRCUTA
Similar to Example 1, Figure 3.2 illustrates that PRCUTA cell can also be used in
te
between two analog domains with the same I/O voltage just for noise concern.
ru
ni
TS
v
M
digital/analog domains or to separate
si
C
ta
voltage) on 9 tro 01
M
fid 24 ni 8
ic
en 762 ca\
-E
PCLAMP
tia PCLAMP
le
nf
VDD TACVDD or TACVDD VDD
/0
9/
A
A ESD Device ESD Device ESD Device ESD Device
n
en
Digital Digital
\\
DESCRIPTION
vz
w
TSMC Confidential Information 924762 Interuniversitair\ Micro-Elektronica\ Centrum\ \(IMEC\)\ vzw 07/09/2018
In
To correctly tape out with TSMC I/O library, users must refer to the
corresponding “Masking Layers & Bias” document at TSMC Online for the most
ni
updated mask tooling layers and operation/bias equations. The following include
TS
v
M
si
C
ir\
For libraries from different vendors, the GDSII numbers defined for each process
on 9 tro 01
layer and dummy layers could be different. Please follow the definition in the
M
fid 24 ni 8
“GDS Layer Usage Description File” of the corresponding technology that is
ic
en 762 ca\
Warning: The mixing or wrong mapping of GDSII layers could
-E
lI
k
07
nf
OD Mask or
/0
9/
m
According to the “GDS Layer Usage Description File," there are two methods for
2
defining the OD region in GDSII: One method is to use DIFF; another, is to use
at
(PDIFF+NDIFF). Different libraries may have their preferences and users must
io
C
tape out all the GDSII layers related to an OD mask, or the chip may fail. It’s
n
en
suggested to tape out the OD layer with (DIFF or PDIFF or NDIFF) to ensure all
the OD layout styles are included in the OD mask tooling.
tr
um
ESD Mask
\\
(IM
Different GDSII layers are defined for ESD implant: masks (110) and (111).
Though the ESD implant is optional in process steps, taping out the ESD mask
EC
(111) is strongly recommended to improve ESD margins. You need to make sure
all the ESD-related GDSII layers are taped out correctly according to the
\)\
“Masking Layers & Bias” table. Please check the release note for the special
equation.
vz
w
TSMC Confidential Information 924762 Interuniversitair\ Micro-Elektronica\ Centrum\ \(IMEC\)\ vzw 07/09/2018
To ensure that the poly resistor and SPICE model match, users can tape out
dummy layers (such as DMN2V, DMP2V, RHDMY or RH⊗ ) to ensure/avoid
In
the LDD implant on the poly resistors. Users must check the “Masking Layers &
te
Bias” table to tape out the corresponding dummy layer with the TSMC universal
ru
I/O library.
ni
TS
v
M
si
but not in 0.15µm and 0.18µm technologies. For 0.15µm/0.18µm, you need to
C
insert NOT VARDMY into the general-purpose logic equation. Please check the
ir\
on 9 tro 01
0.15µm/0.18µm library release note for the exact logic operation in detail.
M
fid 24 ni 8
ic
en 762 ca\
Even minor changes of the GDSII layers may result in a major change of a mask
-E
tia
set, especially in base layers of a process. For example, the modification of the
le
OD2 GDSII layer not only changes the OD2 mask but also other masks, such as
lI
k
LDD, POLY, RPO, ESD, and so on, depending on the technology. Users must
07
nf
review the “Masking Layers & Bias” document to tape out all the masks related
or
/0
m
2
stand-by leakage current. Please refer to the stand-by leakage current comparison
um
table (“with high-Vt layer” versus “without high-Vt layer”) available from the
library release note first; then decide whether to tape out this layer or not.
\\
If not, discard the high-Vt implant in the tape out MT form or remove it
EC
Bond
ru
ni
To tape out with (ultra) thick top metal and top-1 thick metal, customers can use
the top-1 layer gds, and then insert dummy metal as metal top.
TS
v er
For instance, to tape out with ultra thick top metal and top-1 thick metal in 6lm:
M
si
C
ta
For Universal Analog I/O: Customers can use the 5lm gds (where metal 5 is
C
thick and via45 is large) from "mt" directory, and then insert dummy metal
ir\
fid 24 ni 8
For 0.13µm/0.18µm bond pad, use 6lm gds under “wb” directory within the
ic
bond pad library back-end kit, and select PADxAM / PADxARM, where
ro
en 762 ca\
suffix “M” in bond pad name indicates that this bond pad comes with top
two thick metals and top two large VIAs.
-E
tia
le
nf
pad library. Instead, you can only see PADxA / PADxAR bond pads under
each specific back-end directory that is named by metal scheme. For
or
/0
example, you can find PADxA / PADxAR GDS from 6M_3X2Z directory,
9/
m
where 6M indicates 6 metal layer; 3X2Z indicates 3 metal layers with X
2
at
metallization and top 2 metal layers with Z metallization. Similarly, you can
also find PADxA / PADxAR GDS from 6M_3X2Y directory, etc.
io
C
n Bond Pad
en
VIA 34 34
Metal 3 N65/N45 technologies
VIA 23
\)\
Metal 2
vz
VIA 12 VIA 12
Metal 1
w
TSMC Confidential Information 924762 Interuniversitair\ Micro-Elektronica\ Centrum\ \(IMEC\)\ vzw 07/09/2018
Technologies
In
without any additional work. For example, 0.18µm universal analog I/O can be
ru
directly shrunk to 0.11µm technology, 90nm universal analog I/O can be directly
shrunk to 80nm technology, and 65nm universal analog I/O can be directly
TS
v er
shrunk to 55nm technology. However, only a certain type of bond pads can
M
support direct shrinkage to half-node technologies. For details, please refer to the
si
C
ir\
on 9 tro 01
M
fid 24 ni 8
ic
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-E
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le
lI
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07
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or
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9/
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TSMC Confidential Information 924762 Interuniversitair\ Micro-Elektronica\ Centrum\ \(IMEC\)\ vzw 07/09/2018
In
This chapter provides information on device mapping between Spice Model Card
and LVS/LPE Netlist. For 0.13µm, 0.15µm, 0.18µm, and 0.25µm I/O, since
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device name defined in the spice model card is different from that in the
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LVS/LPE netlist, user must modify the spice netlist following the mapping table
below prior to simulation.
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TS
v
However, for 90nm and 65nm I/O, device name of the spice model card is
er
consistent with that of the LVS/LPE netlist. So there is no need to take any
M
si
action on this matter, except for those that feature I/O-voltage over-drive.
C
ta
C
ir\
fid 24 ni 8
The same as LVS/LPE The same as spice
ic
45nm
netlist model card
ro
en 762 ca\
The same as LVS/LPE The same as spice
65nm 2.5v I/O
-E
lI
k
3.3v Over-Drive
nf
NDIO_33 or NDIO_25OD
/0
PDIO_33 PDIO_25OD
9/
m
The same as LVS/LPE The same as spice
2
90nm at
netlist model card
0.13µm
io
C
nch N
0.15µm
n
en
pch P
0.18µm
tr
nch_25
um
nch_33 ND
nch3
\\
pch_25
(IM
pch_33 PD
pch3
EC
nch_na33
NN
nanch3
\)\
DIO_esd33
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DIO_esd25 DB
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TSMC Confidential Information 924762 Interuniversitair\ Micro-Elektronica\ Centrum\ \(IMEC\)\ vzw 07/09/2018
NDIO_25 D2
NDIO_3
In
PDIO_33
te
PDIO_25 D1
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PDIO_3
ni
Nch N
TS
v
Pch P
er
0.25µm
M nch3 ND
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C
ta
pch3 PD
C
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on 9 tro 01 Y
M
fid 24 ni 8
ic
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or
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9/
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(IM
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TSMC Confidential Information 924762 Interuniversitair\ Micro-Elektronica\ Centrum\ \(IMEC\)\ vzw 07/09/2018
In
The TSMC universal analog I/O libraries are released under the supervision of the
TSMC standard quality assurance (QA) procedure. If you find any errors or
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encounter any problems with the library, please first refer to the release notes and
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designkit.info (packed as part of the deliverable kits) for the known issues. Also,
make sure to download the most updated technology files from TSMC Online.
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For any further issues, please contact your library distributor or TSMC regional
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si
C
ta
C
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on 9 tro 01
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fid 24 ni 8
ic
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en 762 ca\
-E
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07
nf
or
/0
9/
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2
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io
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um
\\
(IM
EC
\)\
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