Clean Regulator

SRH Series

ARJ
AR425
to 935

ARX
AMR
ARM
ARP
IR-A
IR
IRV
VEX
SRH
SRP
SRF
ITV
IC
ITVH
ITVX
PVQ
VY1
VBA
VBAT

AP100

Contamination controlled stainless steel regulator

855
 Clean Regulator
SRH Series
Contamination controlled stainless steel regulator

Outstanding corrosion resistance

All metal parts in contact with fluid use stainless steel 316

Oil free
Parts assembled without any use of oils

2 types of diaphragm Designed to minimize

material available residual fluid
Depending upon the application, • Design includes an intake/exhaust
PTFE (Grade A) or fluororubber port in the diaphragm compartment
(Grade B) can be selected for the which facilitates flow
diaphragm material • Valve springs are partitioned by the
diaphragm

Pulsation suppressing Consistent clean room

design production
Washed, assembled and inspected in a Class
Step response comparison 100 environment, and sealed in double bags

SRH Current regulator

Manufacturing process
Grade A Grade B
Pressure

Pressure

P1 P1 Parts assembly Parts assembly

P2 P2 Degrease/Wash Degrease/Wash

Pure water (16MΩ-cm) wash Assembly

Time Time

Assembly Inspection
Circuit diagram

P1 P2 Inspection Interior purge

1 2 1 2
Interior purge Package
SRH
Clean booth
Package Class 100

856
Clean Regulator

SRH Series
ARJ
How to Order AR425
to 935

ARX
SRH 3 0 0 0 02 AMR
Gauge port
Body size orientation ARM
3 1/4 Nil: Standard
4 3/8
IN OUT
ARP
Washing grade
0 Grade A Knob IR-A
1 Grade B Gauge port

R: R Specification IR
Set pressure Gauge port
0
1
0.02 to 0.2 MPa
0.05 to 0.7 MPa IN OUT
IRV
Relief mechanism VEX
0 Non-relief ∗There is only one gauge
1 Relief port.
SRH
Thread type
Nil Rc SRP
N NPT

Made to Order
SRF
Port size
Refer to pages 864 to 866 for details.
Symbol Piping port size SRH3000 SRH4000
ITV
01 1/8 • —
X210 EPDM seals
02 1/4 • • With relief port fittings
X211 (Applicable tube O.D.: ø4)
IC
03 3/8 — •
04
A2
1/2
With metal gasket seal fitting
—
URJF 1/4
•
—
X216 Machined relief port M5 thread
Knob operation product
X233 with reduced torque ITVH
A3 With metal gasket seal fitting — URJF 3/8
X234 Aluminum body
ITVX
Note) The pressure gauge is optional. Refer to option specifications on page 862.
Note that the products used for the port size A2 or A3 are not available at SMC. PVQ
VY1
Specifications
VBA
VBAT
Model SRH30 SRH40 SRH31 SRH4 1
Relief mechanism Non-relief Relief AP100
1/8, 1/4 1/4, 3/8, 1/2
Port size 1/8, 1/4 1/4, 3/8, 1/2
URJF 1/4 URJF 3/8
Grade A Clean air, N2, Ar, CO2, Pure water Clean air, N2
Fluid
Grade B Air, N2, Ar, CO2, Water Air, N2
Proof pressure 1.5 MPa
Max. operating pressure 1 MPa
Low pressure
Set type 0.02 to 0.2 MPa
pressure High pressure
0.05 to 0.7 MPa
type

Ambient and fluid

temperatures 0 to 60°C (No freezing)

Fluid-contact material (metal) Stainless steel 316 (Body is stainless steel 316L)
Diaphragm Grade A PTFE
material Grade B Fluororubber
Weight 360 g 730 g 360 g 730 g

857 A
SRH Series
Flow Rate Characteristics (Representative Value)

Fluid: Air Fluid: Water

Conditions/ Inlet pressure: 0.5 MPa Conditions/ Inlet pressure: 0.7 MPa Conditions/ Inlet pressure: 0.5 MPa

SRH3000-02 SRH3010-02 SRH3000-02

0.5
0.20 0.20

0.4

Outlet pressure MPa

Outlet pressure MPa
Outlet pressure MPa

0.15 0.15
0.3

0.10 0.10
0.2

0.05 0.05
0.1

0 100 200 300 400 0 100 200 300 400 0 2 4 6

Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min

SRH3100-02 SRH3110-02 SRH3100-02

0.5
0.20 0.20

0.4

Outlet pressure MPa

Outlet pressure MPa

Outlet pressure MPa

0.15 0.15
0.3

0.10 0.10
0.2

0.05 0.05
0.1

0 100 200 300 400 0 100 200 300 400 0 2 4 6

Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min

SRH4000-03 SRH4010-03 SRH4000-03

0.5
0.20 0.20

0.4
Outlet pressure MPa

Outlet pressure MPa

Outlet pressure MPa

0.15 0.15
0.3

0.10 0.10
0.2

0.05 0.05
0.1

0 500 1000 0 500 1000 1500 0 5 10 15 20 25

Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min

SRH4100-03 SRH4110-03 SRH4100-03

0.5
0.20 0.20

0.4
Outlet pressure MPa
Outlet pressure MPa

Outlet pressure MPa

0.15 0.15
0.3

0.10 0.10
0.2

0.05 0.05
0.1

0 500 1000 0 500 1000 1500 0 5 10 15 20 25

Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min

858
 Clean Regulator SRH Series
Pressure Characteristics (Representative Value)

Fluid: Water/Air
Conditions/ Inlet pressure: 0.7 MPa Conditions/ Inlet pressure: 0.7 MPa, Outlet pressure: 0.2 MPa, Flow rate 2 L/min

SRH3010-02 SRH3000 SRH3100

0.5
0.24 0.24 ARJ
0.4
AR425
Outlet pressure MPa

Outlet pressure MPa

Outlet pressure MPa

0.22 0.22
to 935
0.3
0.20 0.20

0.2
ARX
0.18 0.18

0.1 0.16 0.16 AMR

0 2 4 6 0 0.2 0.4 0.6 0.8 1.0 0 0.2 0.4 0.6 0.8 1.0 ARM
Flow rate L/min Inlet pressure MPa Inlet pressure MPa
ARP
SRH3110-02 SRH4000 SRH4100
0.5
IR-A
0.24 0.24
0.4 IR
0.22 0.22
Outlet pressure MPa

Outlet pressure MPa

Outlet pressure MPa

0.3
0.20 0.20 IRV
0.2
0.18 0.18
VEX
0.1 0.16 0.16
SRH
0 2 4 6 0 0.2 0.4 0.6 0.8 1.0 0 0.2 0.4 0.6 0.8 1.0
Flow rate L/min Inlet pressure MPa Inlet pressure MPa SRP
SRH4010-03 SRF
0.5
ITV
0.4
IC
Outlet pressure MPa

0.3

0.2
ITVH
0.1 ITVX
0 5 10 15 20 25 PVQ
Flow rate L/min
VY1
SRH4110-03
VBA
0.5 VBAT

0.4 AP100
Outlet pressure MPa

0.3

0.2

0.1

0 5 10 15 20 25
Flow rate L/min

859
SRH Series
Construction

Component parts
Material
No. Description
Grade A Grade B
1 Body Stainless steel 316L
2 Diaphragm PTFE Fluororubber
3 Diaphragm PTFE Fluororubber
4 Valve guide PPS
5 Bonnet PPS

860
 Clean Regulator SRH Series
Dimensions

Rc thread type

0.5

40 (52)
ø3 .5) Panel thickness Max. 3
( ø 36 ARJ
AR425
Panel mounting holes to 935
40 (58)
ARX
AMR
ARM
Max. 83.5 (Max. 104.5)

ARP
IR-A
(27)
22

IN OUT
IR
(33.5)
24

IRV
1/4
Gauge port (standard specifications)
VEX
Dimensions inside ( ) are for SRH4000. SRH
Metal gasket seal fitting type SRP
SRF
ITV
IC
(48)
42

ITVH
ITVX
PVQ
9/16-18UNF: URJF1/4
Gauge port (standard specifications) VY1
VBA
VBAT

AP100
Max. 83.5 (Max. 104.5)

(27)
22

IN OUT
(33.5)
24

9/16-18UNF: URJF1/4
84 (106) (7/8-14UNF: URJF3/8)

Dimensions inside ( ) are for SRH4000.

861 A
 SRH Series
Options

Pressure Gauge Procedure for setting the limit gauge indicator

1) Before setting the limit indicator, turn the cover counterclockwise
Dimensions (approximately 6 to 7 mm) until it stops. Then, remove by pulling it
46.5 towards you.
Cover
26.5
12

14
Turn counterclockwise
until the cover stops.
ø42

Pull

R1/4
2) Use a flat head screwdriver (with a 2.9 mm blade width) to set the
limit indicator.
Be careful not to bend other needle or damage the dial plate.

Specifications Limit indicator

Item Model G46--02-SRA G46--02-SRB

Port size R 1/4
Flat head screw driver
Operating temperature
0 to 60°C (No freezing)
range
Accuracy ± 3%F.S. 3) After completing the setting, replace the cover.
Scale range 270° Fit the cover by aligning the cutout in the cover to the groove on
the top of the black case. Turn the cover clockwise (approximately
Parts washing
Precision wash General degrease 6 to 7 mm) and make sure that the matching mark on the cover is
(fluid-contact parts)
aligned with the groove on the top of the case.
Assembly and adjustment
Clean room General production line
environment Hollow
Oil free / Water free Non-lube / Non-wet
Fluid-contact parts Stainless steel 316
Case Stainless steel 304 (Black melamine coating) Slit
Materials
Clear cover Polycarbonateca (Hard coated) Part No. G46-00-00-2
Internal parts Brass
Weight 80 g Mark

Models
Model
Pressure range
MPa
Indicator units Specific Product Precautions
G46-2-02-SRA Be sure to read this before handling the products.
0 to 0.2
G46-2-02-SRB
Refer to back page 50 for Safety Instructions and
G46-4-02-SRA
0 to 0.4 pages 387 to 391 for Precautions on every series.
G46-4-02-SRB
MPa
G46-7-02-SRA Selection
0 to 0.7
G46-7-02-SRB
G46-10-02-SRA
Caution
0 to 1.0
G46-10-02-SRB 1) Avoid use in locations with strong pressure pulsation or vibration.
2) Contact SMC if the product is to be used in an application with a
high frequency of operation.

Mounting
Caution
1) Do not subject the gauge to shocks, such as dropping during
transportation and mounting, as this can cause loss of indication
accuracy.
2) Do not use this gauge in a location with high temperature and
humidity, as this may cause faulty operation.
3) When mounting the pressure gauge, be certain to use a wrench on
the square wrench flats to screw it into place. If the wrench is
applied on any other part, air leakage or other damage may occur.

A 862
 Clean Regulator SRH Series

Brackets

For SRH3000 For SRH4000

Model B21-1-T1 1350112-T1
Material Rolled sheet steel (Electroless nickel plated) ARJ
AR425
to 935

30
ARX

36
51

61
ø31 ø37 AMR
8.5
Dimensions 10
ARM
ARP

21
28
20
6.5

8
IR-A

13.5
28 30

2.3
1.6

41 50

IR
IRV
VEX
SRH
SRP
SRF
ITV
IC
ITVH
ITVX
PVQ
VY1
VBA
VBAT

AP100

863
 SRH Series
Made to Order Specifications 1
Please contact SMC for detailed dimensions, specifications and lead times.

Symbol Symbol
1 EPDM Seals X210 2 With Relief Port Fittings (Applicable tube O.D.: ø4) X211
Regulator with seals made of a different material. Regulator with a fitting in order to connect it to the relief port.

SRH Standard model no. X210 SRH Standard model no. X211
EPDM seals Made to Order
Specifications Nil Standard
With relief port fittings
Model SRH30-X210 SRH40-X210 SRH31-X210 SRH41-X210 X211 (Applicable tube O.D.: ø4)
Relief mechanism Non-relief Relief
1/8, 1/4 1/4, 3/8, 1/2
Specifications
Port size 1/8, 1/4 1/4, 3/8, 1/2
URJF 1/4 URJF 3/8 Model SRH30-X211 SRH40-X211 SRH31-X211 SRH41-X211
Grade A Clean air, N2, Ar, CO2, Pure water Clean air, N2 Relief mechanism Non-relief Relief
Fluid
Grade B Air, N2, Ar, CO2, Water Air, N2 1/8, 1/4 1/4, 3/8, 1/2
Port size 1/8, 1/4 1/4, 3/8, 1/2
Proof pressure 1.5 MPa URJF 1/4 URJF 3/8
Max. operating pressure 1.0 MPa Grade A Clean air, N2, Ar, CO2, Pure water Clean air, N2
Fluid
Low pressure
0.02 to 0.2 MPa Grade B Air, N2, Ar, CO2, Water Air, N2
Set type
pressure type
High pressure
0.05 to 0.7 MPa Proof pressure 1.5 MPa
Max. operating pressure 1.0 MPa
Ambient and fluid 0 to 60°C (No freezing) Low pressure
temperatures Set type 0.02 to 0.2 MPa
pressure High
type
pressure
0.05 to 0.7 MPa
Fluid-contact material (metal) Stainless steel 316 (Body is stainless steel 316L)
Diaphragm Grade A PTFE Ambient and fluid 0 to 60°C (No freezing)
material temperatures
Grade B EPDM
Weight 360 g 730 g 360 g 730 g Fluid-contact material (metal) Stainless steel 316 (Body is stainless steel 316L)
Diaphragm Grade A PTFE
material Grade B Fluororubber
Weight 360 g 730 g 360 g 730 g

Dimensions
Dimensions other than below are the same as the standard type.

Applicable tube O.D.: ø4

Fitting: KQ2H04-M5-X17

14.7

EXH
OUT
16.6

IN OUT

A 864
 SRH Series
Made to Order Specifications 2
Please contact SMC for detailed dimensions, specifications and lead times.

Symbol Symbol
3 Machined Relief Port M5 Thread X216 4 Knob Operation Product with Reduced Torque X233
Regulator with an M5 thread machined on the relief port in Fluoro grease is applied to an adjusting screw in order to
order to connect it to the relief port. make the knob operation easy.
ARJ
∗ Oil is not used for the wetted parts. AR425
SRH Standard model no. X216 to 935
SRH Standard model no. X233
Made to Order
Knob Operation Product ARX
Nil Standard
Machined relief port with Reduced Torque
X216
M5 thread Specifications
AMR
Specifications Model SRH30-X233 SRH40-X233 SRH31-X233 SRH41-X233
Relief mechanism Non-relief Relief
ARM
Model SRH30-X216 SRH40-X216 SRH31-X216 SRH41-X216
Relief mechanism 1/8, 1/4 1/4, 3/8, 1/2
Non-relief Relief Port size
URJF 1/4 URJF 3/8
1/8, 1/4 1/4, 3/8, 1/2 ARP
1/8, 1/4 1/4, 3/8, 1/2
Port size 1/8, 1/4 1/4, 3/8, 1/2
URJF 1/4 URJF 3/8 Grade A Clean air, N2, Ar, CO2, Pure water Clean air, N2
Fluid
Grade B Air, N2, Ar, CO2, Water Air, N2
IR-A
Grade A Clean air, N2, Ar, CO2, Pure water Clean air, N2
Fluid
Grade B Proof pressure 1.5 MPa
Air, N2, Ar, CO2, Water Air, N2
Max. operating pressure 1.0 MPa
IR
Proof pressure 1.5 MPa
Low pressure
Max. operating pressure 0.02 to 0.2 MPa
Low pressure
1.0 MPa Set type
pressure High pressure
0.05 to 0.7 MPa
IRV
Set type 0.02 to 0.2 MPa type
pressure High pressure
type 0.05 to 0.7 MPa Ambient and fluid
temperatures 0 to 60°C (No freezing) VEX
Ambient and fluid 0 to 60°C (No freezing)
temperatures Fluid-contact material (metal) Stainless steel 316 (Body is stainless steel 316L)
SRH
Fluid-contact material (metal) Stainless steel 316 (Body is stainless steel 316L) Diaphragm Grade A PTFE
material Grade B Fluororubber
Diaphragm Grade A PTFE
SRP
material Grade B Fluororubber Weight 360 g 730 g 360 g 730 g
Weight 360 g 730 g 360 g 730 g
SRF

Dimensions Symbol
ITV
Dimensions other than below are the same as the standard type. 5 Aluminum Body X234 IC
Relief port M5 thread
The body material has been changed to aluminum.
ITVH
SRH Standard model no. X234
Aluminum Body ITVX
Specifications
Model SRH30-X234 SRH40-X234 SRH31-X234 SRH41-X234
PVQ
Relief mechanism Non-relief Relief
EXH
Port size 1/8, 1/4 1/4, 3/8, 1/2 1/8, 1/4 1/4, 3/8, 1/2
VY1
OUT
Fluid Grade B Air, N2, Ar, CO2 Air, N2 VBA
16.6

IN OUT Proof pressure 1.5 MPa VBAT

Max. operating pressure 1.0 MPa
Low pressure
0.02 to 0.2 MPa
AP100
Set type
pressure High
type
pressure
0.05 to 0.7 MPa
Ambient and fluid 0 to 60°C (No freezing)
temperatures
Fluid-contact material (metal) A2017 (Surface treatment: Anodized)
Diaphragm Grade B
material Fluororubber

Weight 230 g 360 g 230 g 360 g

865 A
 SRH Series
Made to Order Specifications 3
Please contact SMC for detailed dimensions, specifications and lead times.

6 Regulator (Stainless Steel 316) with Port Sizes Rc 3/4, Rc 1

• Regulator made of Specifications
stainless steel 316 with Model XT13-394-06 XT13-394-10 INA-48-1-06 INA-48-1-10 INA-48-58-06-H INA-48-58-10-H INA-48-16-06 INA-48-16-10
port sizes Rc 3/4 and Port size Rc3/4 Rc1 Rc3/4 Rc1 Rc3/4 Rc1 Rc3/4 Rc1
Rc 1. Relief mechanism Non-relief Relief Non-relief
• EPDM or FPM is used
Fluid Deionized water (Pure water) Air, N2
for valves (seals),
Proof pressure 1.5 MPa 1.9 MPa
O-rings and
diaphragms. Max. operating pressure 1.0 MPa 1.3 MPa
• Oil-free Set pressure 0.05 to 0.5 MPa 0.1 to 1.0 MPa
Oil is not used for any of the Ambient and fluid temperatures 5 to 60°C
parts and all wetted parts are Fluid-contact material (metal) Stainless steel 316
degreased.
Diaphragm material EPDM Fluororubber
Note) Products must be
assembled under normal Weight 2100 g
conditions. Note) The pressure gauge is optional. For details, refer to the Options on page 862.

Flow Rate Characteristics Construction

XT13-394-06, 10
Max. operating flow rate

(Itoperating
is recommended to be used within the max.
flow rate (negative) range. )
Conditions/ Inlet pressure: 0.5 MPa, Fluid: Water
0.5
82

SMC
Outlet pressure MPa

0.4 K
U
P

SH C
LO

0.3

0.2
82

0.1

0.0
0 10 20 30 40 50 60 70
Flow rate L /min (ANR)
w

INA-48-1-06, 10

142 (Max. 146)

Conditions/ Inlet pressure: 0.55 MPa, Fluid: Air
0.5
r
Outlet pressure MPa

0.4

0.3
IN OUT
0.2
33

0.1

2 x Rc 3/4 to 1
0.0
0 1000 2000 3000 4000 t e y q
Flow rate L /min (ANR)

Component parts
Material
No. Description
XT13-394-06, 10 INA-48-1-06, 10
1 Body Stainless steel 316
2 Bonnet ADC12
3 Valve guide Stainless steel 316
Diaphragm EPDM Fluororubber
4
Assembly Stainless steel 316 (Wetted part metal) Stainless steel 316 (Wetted part metal)
EPDM (Seals) FPM (Seals)
5 Valve
Stainless steel 316 (Wetted part metal) Stainless steel 316 (Wetted part metal)
6 O-ring EPDM Fluororubber

866
 SRH Series
Specific Product Precautions
Be sure to read this before handling the products.
Refer to back page 50 for Safety Instructions and pages 387 to 391 for Precautions
on every series.

Design and Selection Pressure Adjustment

ARJ
Warning Warning AR425
to 935
1. Confirm the fluid. 1. Do not use tools when operating the
Because the fluid to be used differs depending on the product, be pressure regulator knob. ARX
certain to confirm the specifications. If an incompatible fluid is If tools etc. are used to operate the pressure regulator knob,
used, special characteristics will change and this may cause
improper operation.
damage may occur. Operate this knob only by hand. AMR
2. Residual pressure relief is not possible
without inlet pressure.
Caution ARM
1. Perform pressure adjustments only after
In the SRH series, if the inlet pressure is cut off while pressure still
remains on the outlet side, it is not possible to eliminate the outlet releasing the lock.
ARP
pressure (residual pressure relief). If it will be necessary to
eliminate pressure from the outlet side, a circuit should be
When the pressure regulator knob will not turn, it is locked.
Release the lock by pulling the pressure regulator knob out. If the
IR-A
provided for residual pressure relief.
knob is turned by force damage will occur.
Lock again after adjusting the pressure by pressing the knob back IR
Caution down.
2. Adjust pressure in an upward direction. IRV
1. Oscillation (beat) may occur with some oper-
ating conditions even if the operation is A correct pressure setting cannot be achieved by adjusting the
VEX
pressure downward. The outlet pressure is increased by turning
within specification. Contact SMC for that the pressure regulator knob to the right, and decreased by turning
case. the knob to the left. SRH
2. When operating at an inlet pressure lower 3. In the case of the non-relief type, the
than the inlet pressure used in the flow rate pressure cannot be reduced by turning the SRP
characteristics graph, the pressure drop on pressure regulator knob to the left.
the outlet side may be greater. Therefore, be In the case of the non-relief type regulator, the outlet pressure SRF
sure to conduct testing using the actual will not decrease even if the knob is turned to the left, when there
equipment.
is no outlet fluid consumption. The knob will be damaged if it is ITV
turned by force.
For pressure control equipment selection,
refer to page 123 in the “Product Selection
In case the pressure setting is too high, reduce the pressure on
the outlet side to less than the desired setting pressure by
IC
Guide.” consuming fluid on the outlet side, and then reset to the desired
ITVH
pressure.
4. Confirm the inlet pressure.
Mounting
Set the outlet pressure to no more than 85% of the inlet pressure.
ITVX
Caution If the inlet pressure is too low, a correct setting pressure cannot
be attained. PVQ
1. Open the sealed package inside a clean 5. Do not use fluid containing solid matter.
room. This will cause faulty operation.
VY1
These products are packaged in sealed double packaging in a VBA
clean room. It is recommended that the inside packaging be VBAT
opened in a clean room or other clean environment.
2. Flush out the piping. AP100
Connect these products to piping only after it has been flushed
and cleaned properly. If debris or scale etc. remains in the piping,
this can cause faulty operation or failure.
3. Be certain that sealing material does not get
inside the piping.
When screwing in pipes and joints etc., take care that cutting dust
from the pipe threads, sealing material, and the like do not get
inside the piping. If debris or scale etc. remain inside the piping,
this may cause faulty operation or failure. Also, when thread tape
is used, leave 1.5 to 2 threads exposed at the end of the pipe.
4. Confirm the mounted orientation of the
product.
The side marked IN is the fluid inlet port, and the side marked
OUT is the fluid exhaust port. If mounted backwards, the device
will not operate properly.

867 A