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Imran Chowdhury | Lecture Note | VLSI II

VLSI II Design Abstraction Levels:


Very Large Scale Integration VLSI design abstraction levels refer to the fact that what
level or kind of knowledge is required to be a VLSI design
Introduction engineer. The ‘system’ level is the highest level of
abstraction where someone has the knowledge of a system
and its outcome on a macro level without having the
Electronic circuits can broadly be categorized into 2 (two)
knowledge of underlying components that make the
types: (i) Discrete circuits, (ii) Integrated circuits. Very
system. Whereas the ‘device’ level is the lowest level of
large-scale integration (VLSI) is the process of creating
design abstraction where someone has the knowledge of
an integrated circuit (IC) by combining millions of
physical design of the most fundamental device of the
transistors onto a single chip.
system on a micro level. It refers to the fact that a VLSI
design engineer is supposed to have the knowledge of
The integrated circuits or IC`s are devices used in almost
physical design of transistors which are the fundamental
any electronic device today. The development of
building block of a chip.
semiconductor technology, and fabrication methods lead
to the invention of Integrated Circuits. Prior to the
invention of the IC, all the equipment for computational
tasks used vacuum tubes for implementation of logic gates
and switches. Vacuum tubes, in nature, are relatively
large, high power consuming devices. For any circuit, the
discrete circuit elements had to be connected manually.
The influence of these factors resulted in rather large and
expensive electronic devices even for the smallest
computational task. Therefore, a computer, five decades
ago was enormous in size and very expensive, and
personal computers were a very distant dream.

Semiconductor based transistors and diodes, which have


higher energy efficiency and microscopic in size, replaced
vacuum tubes and their uses. Hence a large circuit could Fig: Design abstraction levels of VLSI.
be integrated on a small piece of semiconductor material
allowing more sophisticated electronic devices to be Role of a VLSI Engineer:
created. Even though the first integrated circuits had only
a small number of transistors in them, at present in an area The field of VLSI can be broadly categorised into 2 (two)
of your thumb nail billions of transistors are integrated. branches:
1) VLSI Design
The course will be mainly focused on VLSI Design, with 2) VLSI Technology
a brief touch on VLSI Technology. Based on the tasks an
IC needs to do, VLSI design can be categorized into 3 Both branches have their set of engineers responsible for
(three) branches: (a) Analog VLSI Design (b) Digital different set of tasks. Broadly, VLSI Design engineers are
VLSI Design, and (c) Mixed Signal VLSI Design. This responsible for designing the chip, and VLSI Technology
course will be more focused on Digital VLSI Design. engineers are responsible for fabricating or manufacturing
the chip. VLSI Design engineers can be categorised into 2
Level of Integration / Integration Complexity: (two) types:
Depending on the number of gates or transistors per chip, a) Front-end VLSI Design Engineers
or level of complexity, the field of chip or IC design can b) Back-end VLSI Design Engineers
be categorized into 6 (six) schemes as tabulated below.
Although, according to the definitions of the schemes we Front-end VLSI Design engineers are responsible for
are now in the GSI era, but the term VLSI becomes a designing the system (e.g. circuits), defining the functions
‘name’ and still used to refer the field of IC design. and behaviour of the system, defining the architecture of
the system, and synthesizing the design to verify it, etc.
Scheme #gates/chip Year before starting the physical design.
Small Scale Integration (SSI) Up to 100 1965
Medium Scale Integration (MSI) Up to 1,000 1970 Back-end VLSI Design engineers are responsible for
Large Scale Integration (LSI) Up to 10,000 1980 designing the physical layout of the chip (sometimes
Very large Scale Integration (VLSI) Over 10k 1985 including pad frames), performing post-layout simulation,
Ultra large Scale Integration (ULSI) Over 100k 1990 placement and routing, etc.
Giga Scale Integration (GSI) Over 1Billion 2005
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Imran Chowdhury | Lecture Note | VLSI II
IC Packaging:

Integrated Circuit Packaging refers to the encasing of a


semiconductor component. The package is a case that
surrounds the circuit material to protect it from corrosion
or physical damage and allow mounting of the electrical
contacts connecting it to the printed circuit board (PCB).

Importance of IC Packaging:
Fig: Small Outline Package (SOP/SOIC/SO).
The packaging of an integrated circuit is as important as
the integrated circuit, the semiconductor device within.
The packaging mainly serves 3 (three) purposes:
– First, it protects the semiconductor circuit from
physical impairment or damage.
– Secondly, it protects the circuit from corrosion.
– Finally and most important, it decides how electrical
contacts are laid out from the semiconductor device
over a PCB. This is an important consideration for
both IC designing as well as PCB designing. Like how Fig: Quad Flat Package (QFP).
the connections are organized in an IC, how they are
laid out using a standard IC package must be coherent
with the application and various use cases of the
respective IC.

Types of IC Packaging:

There are many different types of integrated circuits, and


therefore there are different types of IC packaging systems
to consider, as different types of circuit designs will have Fig: Quad Flat Non-leaded Package (QFN/LCC).
different needs when it comes to their outer shell.
Although, most of the ICs come in more than one package.
The classifications of IC packaging is mainly done based
on their mounting style. Some of the most common
broader categories of IC packaging are:
1) Through-Hole Mount Packages
2) Surface Mount Packaging
3) Flat Packages
4) Ball Grid Array
5) Chip-Scale Packages
Fig: Ball Grid Array Package (BGA).
Each of the broader categories have numerous types of
sub-categories of packages based on the application and
types of PCBs. But in academics, most commonly we will
encounter only 2 (two) types of IC packages which are
Dual in-line Packages (DIP) and Quadruple in-line
Packages (QIP) as shown below, those falls into the
‘Through-Hole Mount’ category. Some of the other sub-
categories of IC packages are depicted below as well.

Fig: Chip-Scale Packages (CSP).

Inside an IC Package:

Although we call the whole package an integrated circuit


or a chip, but technically that is not the case. If an IC
Fig: Dual in-line Packages Fig: Quadruple in-line package is opened, there are several components can be
(DIP). Packages (QIP). seen, one of which is the IC or chip.

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Imran Chowdhury | Lecture Note | VLSI II
IC Layout:

The network in an IC is consisted of different layers like


tubs (n-type or p-type), diffusions (drain and source),
polysilicons (a sandwich of polycrystalline silicon and
SiO2), metals (interconnections), contacts (vias), etc. in
three dimension. The geometry of the area-patterns of this
network of layers is known as the IC layout or chip layout.
Connections from the chip to the outside world are made
around the edge of the chip.

In other words, chip layout or IC layout is the


representation of an integrated circuit in terms of planar
geometric shapes which correspond to the patterns of
metal, oxide, or semiconductor layers that make up the
components of the integrated circuit.

Fig: Block diagram of inside the packaging of an IC or Chip.

Chip: The chip is the rectangular semiconductor die sit at


the middle of the package that contains the entire
integrated circuits.

Cavity: It is the rectangular well at the middle of the


package that holds the chip sturdy.

Leads: These are also called pins which are used to mount
and make contacts with a PCB to connect the outside
electronic components of a circuit to the chip.

Bonding Wires: These are very tiny connecting wires that


connect the leads to the chip’s input/output and power
terminals. Generally bonding wires are made up of gold
for better conductivity.
Fig: IC layout a of a RF receiver for ISM-900M.
Pad Frames: These are the small rectangular contacts
sitting at the edge of the chip. Pad frames are used as vias
in between the bonding wires and chip to protect the chip
VLSI Design Fundamentals
from unwanted high current through the leads and bonding
Moore’s Law:
wires. A single part of the pad frame is called a pad. A pad
is made much larger in area than the average width of the Moore’s law is not really a law of physics or even a proven
interconnecting metals of the IC, with multiple layers of
theory in the scientific sense (such as E=MC2). Rather, it
metals stack on top of each other for higher thermal was an ‘empirical relationship’ based on observation and
tolerance. projection of a historical trend of semiconductor
technology by Gordon E. Moore in 1965 while he was
working at Fairchild Semiconductor. Moore later went on
to co-founder Intel Corporation and his observation
became the driving force behind the semiconductor
technology revolution at Intel and elsewhere.

Moore’s Law:

The number of transistors per chip would grow double


every 18 months, and the growth would be exponential.

Moore’s 2nd Prediction:

The capital cost of a semiconductor fabrication would


Fig: Real-life image of inside the packaging of an IC. increases exponentially over time.

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Imran Chowdhury | Lecture Note | VLSI II
The End of Moore’s Law:

In recent years, Moore’s Law has slowly fallen out of


relevance. Recently, semiconductor foundry (fabrication
house) TSMC has announced that it plans to release chips
in 3nm (nanometer) process sometime in 2022. By
comparison, the diameter of a single atom measures
somewhere between 0.1 and 0.5 nanometers, so there is a
finite limit to how small a single transistor can become.

According to renowned theoretical physicist Michio Kaku


"in about ten years or so, we will see the collapse of
Moore's Law. In fact, already we see a slowing down of
Fig: Number of transistors per chip for Intel microprocessors Moore's Law. Kaku also says that when Moore's law
over the years. finally collapse by the end of the next decade, we will
simply tweak it a bit with chip-like computers in three
dimensions. He then says "we may have to go to molecular
computers and perhaps late in the 21st century quantum
computers".

Feature Size / Process Technology / Node:

Feature Size is an element of semiconductor chip used to


measure and designate the chip generation at the
fabrication level. It refers to a specific semiconductor
manufacturing process and its design rules. Different
feature size often imply different circuit generations and
architectures. Generally, the smaller the feature size the
Fig: Global smartphone RAM capacity (in MB) over the years smaller the transistor size in the chip, producing higher
(from GSMArena.com). number of transistors in a single chip, which are both faster
and more power-efficient.

Technically, Feature Size is the minimum distance


between the source and drain or channel length of a
MOSFET, which today is measured in nanometers.
Feature Size is also called Process Technology, Process
Node, Technology node, or simply Node.

Fig: Global smartphone NAND Flash capacity (in GB) over


the years (from IEEE).

Importance of Moore’s Law:

Moore's Law has been used in the semiconductor industry Fig: Channel Length = Gate Length – (2 × Diffusion Length).
to guide long-term planning and to set targets for research
and development, thus functioning to some extent as a Discrepancy in Feature Size Naming Convention:
self-fulfilling prophecy. It created a roadmap for the
ubiquity of computer technology, including that in Most recently, due to various marketing and discrepancies
consumer electronics, artificial intelligence, and among foundries, the number has lost the exact meaning it
supercomputers. In effect, Moore’s Law also predicted the once held. Recent technology nodes such as 22nm, 16nm,
increasing affordability and accessibility of computer 14nm, and 10nm refer purely to a specific generation of
technology, as the cost per transistor decreases when there chips made in a particular technology. It does not
are more transistors available on a single chip. correspond to any channel length. For example, Intel's
10nm is comparable to TSMC's 7nm and Global
Foundries' 12nm processes, while Intel's 7nm is
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Imran Chowdhury | Lecture Note | VLSI II
comparable to other foundries’ 5nm process.
Nevertheless, the naming convention has stuck and it is
what the leading foundries call their nodes.

VLSI Design Rules:

Design rules are geometric constraints provided by


semiconductor manufacturers and imposed on integrated
circuit (IC) designers to ensure their designs function
properly and can be produced with acceptable yield in as
small area as possible without compromising reliability of
the circuit. Design rules are developed by process
engineers based on the capability of their processes.
Design rules are specific to a particular semiconductor Fig: Semiconductor wafer.
manufacturing process. There are 2 (two) types of design
rules available broadly:

1. Absolute Design Rules (μ-based design rules): In this


approach, the design rules are expressed in absolute
dimensions (e.g. 0.75μm) and therefore can exploit the
features of a given process to a maximum degree. These
rules tend to be more complex especially for deep
submicron. Even for the same minimum dimension,
design rules tend to differ from company to company, and
from process to process. Now, CAD tools allow designs to
migrate between compatible processes.

2. Scalable Design Rules (λ-based design rules): In this


approach, all rules are defined in terms of a single
parameter λ. The rules are so chosen that a design can be Fig: The wafer shown in the VLSI class during my MS at
easily ported over a cross section of industrial process, Texas A&M University – Kingsville, USA.
making the layout portable. Scaling can be easily done by
simply changing the value of λ. The key disadvantage of
this approach is that it is too conservative and hence
cannot exploit the features of a given process to a
maximum degree.

Wafer and Die:

Wafer: A wafer (also called a slice or substrate) is a thin


slice of semiconductor material, such as a crystalline
silicon, used in electronics for the fabrication of integrated
circuits. It undergoes many microfabrication processes,
such as doping, ion implantation, etching, thin-film
deposition of various materials, and photolithographic
patterning. Finally, the individual microcircuits are Fig: Semiconductor die.
separated by ‘wafer dicing’ and packaged as an integrated
circuit. Wafer diameter can be of various sizes from 25mm Photomask:
to 675mm, with various thickness under 1mm.
A photomask is basically a “master template” of an IC
Die: A die is a small block of semiconductor material, on design. A photomask is an opaque plate with holes or
which a given functional circuit is fabricated. Typically, transparencies that allow light to shine through in a
integrated circuits are produced in large batches on a defined pattern. They are commonly used in
single wafer of electronic-grade silicon (EGS) or other photolithography and the production of integrated circuits
semiconductor (such as GaAs). The wafer is cut (“diced”) (IC). Masks are used to produce the pattern of an IC layout
into many pieces, each containing one copy of the circuit. on a semiconductor wafer. Several masks are used in turn,
Each of these pieces is called a die. Die size varies from each one reproducing a layer of the completed design, and
about 5mm2 to 15mm2. together they are known as a mask set. A single IC may
contain 5-40 layers, resulting in a need for 5-40 unique
photomasks for every IC.

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Imran Chowdhury | Lecture Note | VLSI II
applications. A typical FPGA chip consists of I/O buffers,
an array of configurable logic blocks (CLBs), and
programmable interconnect structures. Hardware
Description Language (HDL) like Verilog or VHDL is
used as the language of the programming.

Gate Array (GA) Design: In PLD, GA design comes


after FPGA, although it is not programmable by the users,
but fundamental architectures are almost same. Unlike
FPGA, a GA design needs to be sent to a fabrication house
to manufacture the designed circuits onto the chip. But
unlike ASIC, the manufacturing process of GA is much
shorter and requires only 2 (two) steps. The first phase,
which is based on generic (standard) masks, results in an
array of uncommitted transistors (without any
Fig: Photomask.
interconnections) on each GA chip. Then, these
uncommitted chips can be customized later, which is
completed by defining the metal interconnects between
the transistors of the array. In a way, ‘GA design’ falls
under the ‘semi-custom design’ as well.

Standard Cell-based Design: Standard cells are pre-


characterized cells used in ASIC Design flow as basic
building blocks. The standard cell is also called the
polycell, and the design style is also called semi-custom
design. In this design style, all of the commonly used logic
cells are developed, characterized, and stored in a standard
cell library. A typical library may contain a few hundred
cells including inverters, NAND gates, NOR gates,
complex AOI, OAI gates, D-latches, and flip-flops. Each
gate type can have multiple implementations to provide
adequate driving capability for different fanouts. For
Fig: Photomask in IC manufacturing process. instance, the inverter gate can have standard size
transistors, double size transistors, and quadruple size
Photomasks are also known as Optical Masks or Glass transistors so that the chip designer can choose the proper
Masks. Photomasks help with the miniaturization of size to achieve high circuit speed and layout density.
computer chips. This is because smaller chips require
highly precise images of their general arrangement, which Full Custom Design: In this design style, the entire mask
is near impossible without a lithographic process. design is done anew without use of any library. However,
the development cost of such a design style is becoming
VLSI Design Styles: prohibitively high. In real full-custom layout in which the
geometry, orientation and placement of every transistor is
Several design styles can be considered for chip done individually by the designer, design productivity is
implementation of specified algorithms or logic functions. usually very low - typically 10 to 20 transistors per day,
Each design style has its own merits and shortcomings, per designer. Thus, in digital CMOS VLSI, full-custom
and thus a proper choice has to be made by designers in design is rarely used. Exceptions to this include the design
order to provide the functionality at low cost. of high-volume products such as memory chips, high-
performance microprocessors, etc. For logic chip design,
1) Programmable Logic Devices (PLD)
a good compromise can be achieved by using a
a. Field Programmable Gate Array (FPGA)
combination of different design styles on the same chip.
b. Gate Array (GA) Design
2) Application-Specific Integrated Circuit (ASIC)
VLSI Design Flow:
a. Standard Cell-based Design (Semi-custom)
b. Full Custom Design
VLSI design flow can be broadly categorized into two
parts: (i) Front-End design, and (ii) Back-End design.
Field Programmable Gate Array (FPGA): A field-
Front-end and back-end design can also be referred to as
programmable gate array (FPGA) is an integrated circuit
High-level design and Low-level design respectively.
that can be programmed or reprogrammed to the required
Generally, front-end design includes circuit modeling and
functionality or application after manufacturing. This
synthesis using schematic capture and Verilog/VHDL. It
design style provides a means for fast prototyping and also
also includes design and testing through various custom
for cost-effective chip design, especially for low-volume
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Imran Chowdhury | Lecture Note | VLSI II
and Semi-custom methodologies. The back-end design
comprises of IC layout, cell and library design, its
characterization using specific process technology, and
post-layout simulation.

Fig: n-channel Enhancement type MOSFET (left) and n-


channel Depletion type MOSFET (right).

Fig: p-channel Enhancement type MOSFET (left) and p-


channel Depletion type MOSFET (right).

E-MOSFET (n-type) Fabrication Process:

The aim of this course is not to present a detailed


discussion of silicon fabrication technology, which
deserves separate treatment in a dedicated course. Rather,
the emphasis will be on the general outline of the process
Fig: Typical VLSI design flow (top-down design abstraction). flow and on the interaction of various processing steps.

MOS Transistor Technology There is a large number and variety of basic fabrication
steps used in the production of modern integrated circuits.
The fundamental building block of integrated circuits is The same process can be used for the fabrication of nMOS
transistor, and for modern VLSI it is MOSFET, to be or pMOS or CMOS devices. The step-by-step procedure
specific, enhancement type MOSFET. MOSFET has 4 of Enhancement type nMOS fabrication steps are
(four) terminals Gate, Drain, Source and Body. However, discussed below:
the body terminal is always connected with the source
terminal. Therefore, we are left with only three terminals. Step 1 (Substrate Doping): The process starts with a
MOSFETs are classified into 2 (two) types: semiconductor wafer of pure silicon (Si), were p-type
impurities (boron, gallium, indium, aluminum, etc.) are
1) Depletion type MOSFET (D-MOSFET) added through diffusion or ion implantation technique to
2) Enhancement type MOSFET (E-MOSFET) make it a p-type substrate for the nMOS. The size of such
wafer is about 75-150mm in diameter and 0.4mm in
Both MOS transistors are further classified as n-type thickness, and the doping concentration is about 1015/cm3
named nMOS (or n-channel) and p-type named pMOS (or to 1016/cm3.
p-channel) MOSFETs.

The Depletion type MOSFETs are doped so that a channel


exists even with zero voltage from gate to source during
manufacturing of the device. To control the channel, a
negative voltage is applied to the gate (for an n-channel Fig: Step 1 – Silicon substrate is being doped p-type.
device), depleting the channel, which reduces the current
flow through the device. In essence, the Depletion type Step 2 (Oxidization – Thick Oxide): In order to select
MOSFET is equivalent to a closed (ON) switch, while the the specific area to form gate, source and drain on the
Enhancement type MOSFET does not have the built in surface of the substrate, the fabrication process goes
channel and is equivalent to an open (OFF) switch. Due to through two steps called oxidization and
the difficulty of turning off the Depletion MOSFET, they photolithography. Growing a think oxide is a part of
are rarely used. oxidization process, where a layer of SiO2 (silicon
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dioxide) typically 1μm thick is grown all over the surface Using some other kind of solvent, the remaining harden
of the wafer to protect it. It is done by heating the silicon photoresist areas are removed as well. The thick oxide
substrate at around 900℃ and sending water vapor onto it. layer outside the window remains.

Fig: Step 2 – Thick oxide layer grown onto silicon substrate.

Step 3 (Photolithography – Photoresist): The surface is Fig: Step 5a – The soften photoresist area is being etched away
now covered to photoresist which is deposited onto the by using some solvent.
wafer and spun to an even distribution of the required
thickness. Which is done by pouring liquid photoresist
onto the surface of the substrate and spinning it.

Fig: Step 5b – The thick oxide layer in the window is being


etched away by hydrofluoric acid, and the remaining
Fig: Step 3 – Photoresist deposited onto the surface on top of harden photoresist areas are being etched away by using
the thick oxide layer. some solvent.

Step 4 (Photolithography – Masking): The photoresist Step 6 (Thin Oxide): A thin layer of SiO2 typically 0.1μm
layer is then exposed to ultraviolet (UV) light through thick or less is grown all over the surface of the wafer to
photomask, which defines those regions into which make the insulation layer between the polysilicon and
diffusion is to take place. Here negative photoresist is used silicon substrate. It is done by heating the silicon substrate
which gets harden when exposed to UV light, and remain at around 1200℃ and sending oxygen gas or water vapor
soften where it is not exposed to UV light. The black onto it. The thickness of the thin oxide layer can be
potion of the photomask or optical mask means closed controlled by the temperature and the reaction time.
section and yellow portions mean open section where UV
light can go through. So, the photoresist under the black
portion will remain soften while the photoresist under the
yellow portions will get harden.

Fig: Step 6 – Thin oxide layer gown onto the surface of the
entire wafer.

Step 7 (Poly Formation): Polysilicon is deposited using


chemical vapor deposition (CVD) method on top of the
thin oxide layer in the window to form the gate structure.
Fig: Step 4 – Photoresist being exposed to UV light through The polysilicon is basically heavily doped silicon which is
patterned photomask. as good as a conductor. The thickness of this polysilicon
layer is typically 1-2μm.
Step 5 (Etching): These areas are subsequently readily
etched away together with photoresist and underlying
thick oxide so that the surface of the silicon substrate is
exposed to the window defined by the mask. The soften
photoresist is removed by using some kind of solvent to
wash it away. So, the harden photoresist area remains. The
exposed thick oxide layer is removed by pouring
hydrofluoric acid all over the surface. The harden
photoresist areas act as a protective layer so the underlying Fig: Step 7 – Polysilicon is being deposited on top of the thin
thick oxide layer remains. After mixing with the thick oxide layer in the window.
oxide layer, the hydrofluoric acid gets converted into
hydrofluorosilicic acid which can be easily washed away.
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Step 8 (Exposing Drain and Source Region): After Step 11 (Metallization): After forming the contact cuts,
forming the gate structure, the silicon substrate needs to be the whole wafer then has metal (e.g. Aluminum) deposited
exposed again exactly where the drain and source are to be over its surface to a thickness typically of 1μm. This metal
formed, using photolithography (applying photoresist and layer then goes through photolithography (applying
exposed to UV lights) and etching (removing photoresist photoresist and exposed to UV lights) and etching
and oxide layer). (removing photoresist and metal layer).to form the
required contact pattern.

Fig: Step 8 – Drain and source regions are being exposed using
photolithography and etching.
Fig: Step 11 – Metal contacts are being formed using
Step 9 (Drain and Source Formation): After exposing metallization, photolithography and etching.
the regions where drain and source are to be formed, the
regions are then doped with n-type impurities using either Body Effect of MOSFET:
diffusion or ion implantation method. Diffusion involves
placing the semiconductor wafer in a high temperature A transistor is a 4-terminal device. Gate, drain and source
gaseous atmosphere called ‘diffusion furnace’ containing are the 3 terminals that are used to control the transistor,
the desired impurity, where the doping occurs based on but the bulk or body, if not properly biased, may put the
concentration gradient. Ion implantation generally takes transistor inoperable.
place at a lower temperature than diffusion, where a beam
of impurity ions is accelerated and then directed to the
surface of the semiconductor wafer to make the desired n-
type regions. Depth of the drain and source doping is
generally 1μm. In this process the polysilicon with
underlying thin oxide and the thick oxide acts as the mask
during formation of drain and source, hence the process is
called self-aligning.

According to the above figure, the p-n junctions defined


by source-bulk and drain-bulk, which are basically two
diodes, must be reverse-biased to stop them from leaking
current from the source/drain to the substrate. That means
that the source potential must always be equal or greater
Fig: Step 9 – Drain and source regions are being formed either than the bulk potential. Since drain voltage is always
by diffusion or ion implantation. greater or equal than source voltage, we don't even
consider the drain-bulk junction.
Step 10 (Contact Patterning): After forming the gate,
drain and source region, the area on top of them needs to
be exposed where the metal contacts are to be formed,
using oxidization (adding thick oxide), photolithography
(applying photoresist and exposed to UV lights) and
etching (removing photoresist and oxide layer).

When VS > VB, the depletion width of the p-n junction


increases. That makes it more difficult to create a channel
with the same VGS, effectively reducing the channel depth.
In order to return to the same channel depth, VGS needs to
increase accordingly.

Fig: Step 10 – Contact regions are being patterned using The body effect can be seen as a change in threshold
oxidization, photolithography and etching. voltage and it is modeled as just that:

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vii. Transistor-Transistor Logic (TTL)

 VT0n = threshold voltage when VSB = 0. Non-saturated Bipolar Logic Family is further categorized
 2ϕf = surface potential (2ϕf ≈ 0.6V for NMOS and into 2 (two) types:
0.75V for PMOS). i. Schottky TTL
 γ = body-effect parameter (γ ≈ 0.4V1/2 for NMOS and ii. Emitter Coupled Logic (ECL)
−0.5V1/2 for PMOS).
Unipolar or MOS Logic Family is further categorized
For PMOS, the bulk voltage should always be higher than into 3 (three) types:
the source because the p-n junction is in the opposite
direction (source p+ and bulk n−). Then, the threshold a) pMOS Logic Family
voltage should be rewritten as: b) nMOS Logic Family
c) CMOS Logic Family

Characteristics of Digital IC:

Digital Logic Families Different logic families possess different characteristic.


(IC Design Technologies) One family may be best suited to one situation whereas
another family in some other situation. For example in
Almost all electronic gadgets make use of different digital certain cases, low power consumption may be the prime
systems for their operation. All the digital systems use requirement whereas in some other cases it is speed.
some kind of digital ICs. For the sake of simplicity in
design and compatibility in constructing any complex Along with power consumption and speed, digital ICs
digital system, all digital circuits (ICs) used in the design have other characteristics as well, which are:
process should be from same logic family. Besides, for the 1) Propagation Delay / Operating Speed
expansion of the system, it is necessary to connect 2) Power Dissipation
different logic circuits together. In order to connect the 3) Figure of Merit
output of one logic circuit to the input of another logic 4) Fan-In and Fan-Out
circuit, one must have circuits with similar characteristics. 5) Operating Temperature Range
6) Power Supply Requirements
Logic Family/Technology 7) Voltage and Current Parameters
8) Noise Immunity / Noise Margin
A group of compatible logic circuits having same logic
levels, supply voltages, and electrical characteristics 1) Propagation Delay / Operating Speed: Propagation
fabricated on a single IC for performing various logical Delay is the time interval between the application of the
functions are referred to as logic family. input pulse and the occurrence of the output. If the
propagation delay is less, then the operating speed at
According to the components used to make a logic circuit which the IC operates will be faster.
and as per the construction of the basic logic circuits, there
are different types of logic families. Broadly, logic
families are categorized into 3 (three) types:
1) Bipolar Logic Family
2) Unipolar or MOS Logic Family
3) BiCMOS

Bipolar Logic Family is further categorized into 2 types:


a) Saturated Bipolar Logic Family
b) Non-saturated Bipolar Logic Family
Let TPLH is the time delay when the output changes from
logic 0 to 1, and TPHL is the delay when the output changes
Saturated Bipolar Logic Family is further categorized into
from logic 1 to 0. The average value of THL and TLH is
7 (seven) types:
considered as the propagation delay (TP). The delay times
i. Diode Logic (DL) or Diode-Resistor Logic (DRL) are measured in between the 50% voltage levels of input
ii. Resistor-Transistor Logic (RTL) and output wave forms.
iii. Direct Coupled Transistor Logic (DCTL)
𝑇𝑃𝐿𝐻 + 𝑇𝑃𝐻𝐿
iv. Integrated Injection Logic (IIL or I2L) 𝑃𝑟𝑜𝑝𝑎𝑔𝑎𝑡𝑖𝑜𝑛 𝐷𝑒𝑙𝑎𝑦, 𝑇𝑃 =
v. Diode-Transistor Logic (DTL) 2
vi. High Threshold Logic (HTL)

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Imran Chowdhury | Lecture Note | VLSI II
2) Power Dissipation: It is the amount of power that a Fan-out is calculated from the amount of current available
digital circuit or IC dissipates. The power dissipated is in the output of a gate and the amount of current needed in
determined by the average current that is drawn from the each input of the connecting gate. It is specified by
supply voltage (𝑉𝐶𝐶 ). The average current (𝐼𝐶𝐶(𝑎𝑣𝑔)) is the manufacturer and is provided in the data sheet.
average value of the current at LOW gate output (𝐼𝐶𝐶𝐿 ) and
the current at HIGH gate output (𝐼𝐶𝐶𝐻 ). 5) Operating Temperature Range: All the gates which
are made up of semiconductor devices are temperature
𝐼𝐶𝐶𝐻 + 𝐼𝐶𝐶𝐿 sensitive in nature. The temperature in which the
𝐴𝑣𝑒𝑟𝑎𝑔𝑒 𝑐𝑢𝑟𝑒𝑛𝑡, 𝐼𝐶𝐶(𝑎𝑣𝑔) =
2 performance of the IC is effective is called as operating
𝑃𝑜𝑤𝑒𝑟 𝐷𝑖𝑠𝑠𝑖𝑝𝑎𝑡𝑖𝑜𝑛, 𝑃𝑑 = 𝑉𝐶𝐶 × 𝐼𝐶𝐶(𝑎𝑣𝑔) temperature range. The accepted temperature range for
consumer ICs is from 0℃ to 70℃, from 0℃ to 85℃ for
industrial applications, and from -55℃ to 125℃ for
If there are ‘n’ number of logic gates, then the power
military applications.
dissipation per logic gate would be:
𝑉𝐶𝐶 × 𝐼𝐶𝐶(𝑎𝑣𝑔) 6) Power Supply Requirements: Every IC requires a
𝑃𝑜𝑤𝑒𝑟 𝐷𝑖𝑠𝑠𝑖𝑝𝑎𝑡𝑖𝑜𝑛 𝑝𝑒𝑟 𝑔𝑎𝑡𝑒, 𝑃𝑑𝑛 = certain amount of electrical power to operate, and different
𝑛
logic family requires a different level of supply voltage.
3) Figure of Merit: In digital logic circuits, a trade-off Usually there is only one power-supply terminal on the
exists between power dissipation and the speed. That is, chip and it is marked VCC for bipolar logic family or VDD
for higher speed, the power dissipation will be more. For for MOS logic family. Obviously low power consumption
an efficient operation of any device, achieving a higher is a desirable feature in any digital IC.
speed with less power dissipation is desirable but a highly
challenging task. 7) Voltage and Current Parameters: Voltage and
current parameters are defined by the span of input and
The figure of merit or Speed Power Product is a common output voltage and current. In order to achieve proper
means of measuring the performance of circuits in the operation in multistage gates or logic circuits, these
digital logic family. parameters should be matched.
𝐹𝑖𝑔𝑢𝑟𝑒 𝑜𝑓 𝑀𝑒𝑟𝑖𝑡 = 𝑃𝑟𝑜𝑝𝑎𝑔𝑎𝑡𝑖𝑜𝑛 𝐷𝑒𝑙𝑎𝑦 × 𝑃𝑜𝑤𝑒𝑟 𝐷𝑖𝑠𝑠𝑖𝑝𝑎𝑡𝑖𝑜𝑛

To achieve higher performance, the value of figure of


merit should be as low as possible.

4) Fan-In and Fan-Out: Fan-in is the number of inputs


connected to the gate without any degradation in the
voltage level. For the example given in the figure below,
the EX-OR gate has three inputs. So fan-in for the given
EX-OR gate is 3. 𝑉𝑂𝐻(𝑚𝑖𝑛) = 𝑚𝑖𝑛𝑖𝑚𝑢𝑚 𝑂/𝑃 𝑣𝑜𝑙𝑡𝑎𝑔𝑒 𝑓𝑜𝑟 𝑙𝑜𝑔𝑖𝑐 1
𝑉𝑂𝐿(𝑚𝑎𝑥) = 𝑚𝑎𝑥𝑖𝑚𝑢𝑚 𝑂/𝑃 𝑣𝑜𝑙𝑡𝑎𝑔𝑒 𝑓𝑜𝑟 𝑙𝑜𝑔𝑖𝑐 0
𝑉𝐼𝐻(𝑚𝑖𝑛) = 𝑚𝑖𝑛𝑖𝑚𝑢𝑚 𝐼/𝑃 𝑣𝑜𝑙𝑡𝑎𝑔𝑒 𝑓𝑜𝑟 𝑙𝑜𝑔𝑖𝑐 1
𝑉𝐼𝐿(𝑚𝑎𝑥) = 𝑚𝑎𝑥𝑖𝑚𝑢𝑚 𝐼/𝑃 𝑣𝑜𝑙𝑡𝑎𝑔𝑒 𝑓𝑜𝑟 𝑙𝑜𝑔𝑖𝑐 0

𝐼𝑂𝐻 = ℎ𝑖𝑔ℎ 𝑙𝑒𝑣𝑒𝑙 𝑂/𝑃 𝑐𝑢𝑟𝑟𝑒𝑛𝑡


𝐼𝑂𝐿 = 𝑙𝑜𝑤 𝑙𝑒𝑣𝑒𝑙 𝑂/𝑃 𝑐𝑢𝑟𝑟𝑒𝑛𝑡
𝐼𝐼𝐻 = ℎ𝑖𝑔ℎ 𝑙𝑒𝑣𝑒𝑙 𝐼/𝑃 𝑐𝑢𝑟𝑟𝑒𝑛𝑡
𝐼𝐼𝐿 = 𝑙𝑜𝑤 𝑙𝑒𝑣𝑒𝑙 𝐼/𝑃 𝑐𝑢𝑟𝑟𝑒𝑛𝑡

Fan-out refers to the number of inputs that is driven by the


output of another logic gates without any degradation in
the voltage level and keeping the proper function. For
example, the following circuit has an EX-OR gate, which
drives 4 NOT gates. So fan-out of EX-OR gate is 4.
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Imran Chowdhury | Lecture Note | VLSI II
8) Noise Immunity / Noise Margin: In digital logic
circuits, the binary values 0 and 1 represent the LOW and
Conventional Static CMOS Logic
HIGH voltage levels. Due to the interference of the noises,
The basic idea for Conventional Static CMOS technology
the voltage levels may increase or decrease. This may lead
is to combine n-channel and p-channel MOSFETs such
to the wrong operation of the device. The noise immunity
that there is never a conducting path from the supply
is the ability of the logic device to tolerate the noise
voltage to ground. As a consequence, these logic circuits
without causing spurious change to the output voltage.
consume very little energy. Power is only dissipated in
Noise margin allows the logic device to function properly
case the circuit actually switches. This logic family
within the specified limits. It is expressed in volts.
incorporates enhancement type nMOS in the pull-down
network and pMOS in the pull-up network in equal
numbers. Both n-channel and p-channel MOSFETs are
designed to have matching characteristics. Conventional
Static CMOS technology is simply called CMOS.

Fig: Static CMOS Inverter.

According to the above schematic, if HIGH voltage (logic


1) is applied at 𝑉𝑖𝑛 , the pMOS turns OFF and the nMOS
Noise Margin at input or output of a gate: turns ON. Since the nMOS is ON, the resistance between
𝑉𝑜𝑢𝑡 and ground will be ideally zero, and hence the voltage
𝐼𝑛𝑝𝑢𝑡 𝑁𝑜𝑖𝑠𝑒 𝑀𝑎𝑟𝑔𝑖𝑛, 𝑉𝑁(𝑖𝑛) = 𝑉𝐼𝐻(𝑚𝑖𝑛) − 𝑉𝐼𝐿(𝑚𝑎𝑥) drop at 𝑉𝑜𝑢𝑡 becomes LOW (logic 0). And, if LOW
𝑂𝑢𝑡𝑝𝑢𝑡 𝑁𝑜𝑖𝑠𝑒 𝑀𝑎𝑟𝑔𝑖𝑛, 𝑉𝑁(𝑜𝑢𝑡) = 𝑉𝑂𝐻(𝑚𝑖𝑛) − 𝑉𝑂𝐿(𝑚𝑎𝑥) voltage is applied at 𝑉𝑖𝑛 , the pMOS turns ON and the
nMOS tuens OFF. Since the nMOS is OFF, the resistance
Noise Margin in between two stages of gates: between 𝑉𝑜𝑢𝑡 and ground will be ideally infinite, and
hence the voltage drop at 𝑉𝑜𝑢𝑡 will be HIGH.
𝐻𝑖𝑔ℎ 𝑆𝑡𝑎𝑡𝑒 𝑁𝑜𝑖𝑠𝑒 𝑀𝑎𝑟𝑔𝑖𝑛, 𝑉𝑁𝐻 = 𝑉𝑂𝐻(𝑚𝑖𝑛) − 𝑉𝐼𝐻(𝑚𝑖𝑛)
𝐿𝑜𝑤 𝑆𝑡𝑎𝑡𝑒 𝑁𝑜𝑖𝑠𝑒 𝑀𝑎𝑟𝑔𝑖𝑛, 𝑉𝑁𝐿 = 𝑉𝐼𝐿(𝑚𝑎𝑥) − 𝑉𝑂𝐿(𝑚𝑎𝑥) Static CMOS Combinational Logic Design:

CMOS Logic Family In this logic family, nMOSs are arranged in a pull-down
network (PDN) between the output and the ground rail
(CMOS Technology) (VSS) while pMOSs are in a pull-up network (PUN)
between the output and the supply voltage rail (VDD). All
The term CMOS stands for “Complementary Metal Oxide the inputs are distributed to both the PUN and PDN. Thus,
Semiconductor”. It is a class of digital circuits built using an nMOS will be ON when the corresponding pMOS is
both enhancement type nMOS and pMOS. The advantages OFF, and vice-versa. For any input pattern, one of the
of CMOS logic family includes high speed, low power networks is ON and the other is OFF.
dissipation, high noise margins in both states, and a wide
range of source and input voltages (fixed source voltage).
CMOS logic family was developed for the Very Large
Scale Integration (>10000 gates) and beyond. This logic
family can be classified into the following categories:
1) Static CMOS Logic
a) Conventional Static CMOS Logic
b) Pseudo-nMOS Logic (Ratioed Logic)
c) Pass Transistor & Transmission Gate Logic
2) Dynamic CMOS Logic
a) Domino Logic Fig: General block diagram of static CMOS logic.
b) np-CMOS Logic
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Imran Chowdhury | Lecture Note | VLSI II
Designing combinational circuits with Static CMOS logic
technically means designing the pull-down and pull-up
network. The number of nMOS in the PDN and pMOS in
the PUN depends on the number of inputs, and their
connection depends on the Boolean function. The
following table shows the type of connection in the PND
and PUN based on the logic operation in the Boolean
function. Like nMOS logic, Static CMOS logic works for
inverted logic by default.
Pull-down Pull-up
Logic Operation
Network (PDN) Network (PUN)
Addition Parallel Series Fig: General block diagram of Pseudo-nMOS logic.
Multiplication Series Parallel
As with nMOS logic, designing combinational circuits
Pseudo-nMOS Logic with Pseudo-nMOS logic technically means designing the
driver (or pull-down) network, since there is only one
Although CMOS is superior in terms of static power loss pMOS load in the pull-up network. Again, as with nMOS
and operating speed to its predecessor, but it needs more logic, the number of nMOS and their connection in the
transistors than others in the same logic family like nMOS driver network depends on the number of inputs and their
logic. Hence area consumption is more for CMOS. This is Boolean function respectively. Like nMOS and CMOS
where Pseudo-nMOS logic comes in which is based on logic, Pseudo-nMOS works for inverted logic by default.
nMOS logic structure keeping the CMOS definition
satisfied by incorporating pMOS load in the nMOS logic Driver Network or Pull-
Logic Operation
down Network (PDN)
circuit. The advantages of Pseudo-nMOS logic includes
Addition Parallel
less area consumption, hence low gate capacitance, thus
Multiplication Series
higher operating speed. But the main disadvantage of this
logic is it carries on the static power loss from nMOS logic
since the load is always ON. Like nMOS logic, Pseudo- Pass Transistor Logic
nMOS logic was developed for the Large Scale Integration
(≤10000 gates). Pass Transistor:

Like Pseudo n-MOS logic, Pass Transistor logic comes in


to reduce the number of transistor from a logic circuit that
the CMOS logic circuits encounter. The basic principle of
Pass Transistor is to pass a voltage from one point to
another, and single nMOS or pMOS transistor is the basic
building block of this logic. So, based on the type of
transistor, Pass Transistor can be 2 (two) types:
1) nMOS Pass Transistor
2) pMOS Pass Transistor
Fig: Pseudo-nMOS Inverter.
The operation of the above Pseudo-nMOS inverter is same nMOS Pass Transistor:
as an nMOS inverter since the load pMOS is always ON,
because according to the load configuration 𝑉𝐺(𝐿𝑜𝑎𝑑) = 0, When nMOS is used as the building block of the Pass
which makes 𝑉𝐺𝑆(𝐿𝑜𝑎𝑑) = −𝑉𝐷𝐷 . Transistor logic, it is called nMOS Pass Transistor. In
nMOS Pass Transistor, a positive supply voltage (𝑉𝐷𝐷 ) is
Pseudo-nMOS Combinational Logic Design: applied to the gate (𝑉𝐷𝐷 = 𝑉𝐺 ), the input voltage is applied
to the drain (𝑉𝑖𝑛 = 𝑉𝐷 ), and the output voltage is taken
The design of Pseuso-nMOS combinational logic circuits from the source ( 𝑉𝑜𝑢𝑡 = 𝑉𝑆 ). The range of the output
is similar to the basic principles developed for nMOS logic voltage can be 0 to 𝑉𝐷𝐷 − 𝑉𝑇𝑛 , since 𝑉𝐺𝑆 needs to be at
circuits, except for the fact that the load is always a pMOS. least equal to 𝑉𝑇𝑛 (generally 1V) to turn ON the nMOS.
So, the structure of driver (or pull-down) network with
nMOS, number of nMOS and their interconnection, input
connections, etc. remain same.

Fig: nMOS Pass Transistor.


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Imran Chowdhury | Lecture Note | VLSI II
Considering the supply voltage 𝑉𝐷𝐷 = 5𝑉 and threshold
voltage 𝑉𝑇𝑛 = 1𝑉 for the nMOS, for different values of If 𝑉𝑖𝑛 ≤ |𝑉𝑇𝑝 | Then 𝑉𝑜𝑢𝑡 = |𝑉𝑇𝑝 |
𝑉𝑖𝑛 the values of 𝑉𝑜𝑢𝑡 will be as follows: If 𝑉𝑖𝑛 > |𝑉𝑇𝑝 | Then 𝑉𝑜𝑢𝑡 = 𝑉𝑖𝑛

𝑉𝐷𝐷 = 5𝑉  Observation #1: Since this logic passes exact 5V for


𝑉𝑇𝑛 = 1𝑉 input 5V but 1V for input 0V, it is said that pMOS
𝑽𝒊𝒏 (V) 𝑽𝒐𝒖𝒕 (V) Pass Transistor passes strong HIGH but weak LOW.
0 0  Observation #2: To pass Strong LOW, 𝑉𝑆𝑆 needs to
0.5 0.5 be connected to at least −1V.
1 1
2 2
Cascading Pass Transistor:
3 3
4 4
When multiple Pass Transistors are connected such a way
4.5 4
that one Pass Transistor is driving another, it is called
5 4
cascading Pass Transistors. Based on the connection
cascading can be be done in 2 (two) ways:
If 𝑉𝑖𝑛 ≤ 𝑉𝐷𝐷 − 𝑉𝑇𝑛 Then 𝑉𝑜𝑢𝑡 = 𝑉𝑖𝑛
If 𝑉𝑖𝑛 > 𝑉𝐷𝐷 − 𝑉𝑇𝑛 Then 𝑉𝑜𝑢𝑡 = 𝑉𝐷𝐷 − 𝑉𝑇𝑛 1) Driving next Pass Transistor’s gate (not recommended)
2) Driving next Pass Transistor’s drain (recommended)
 Observation #1: Since this logic passes exact 0V for
input 0V but 4V for input 5V, it is said that nMOS The following type of cascading is based on the first
Pass Transistor passes strong LOW but weak HIGH. category where one Pass Transistor is driving the gate of
 Observation #2: To pass Strong HIGH, 𝑉𝐷𝐷 needs to the next one. The problem with this cascading is that, since
be higher than 𝑉𝑖𝑛 by 𝑉𝑇𝑛 , meaning 𝑉𝐷𝐷 − 𝑉𝑖𝑛 = 𝑉𝑇𝑛 . the output voltage at drain is dependent on the supply
voltage at gate, at every stage the 𝑉𝑜𝑢𝑡 degrades by 𝑉𝑇𝑛
pMOS Pass Transistor: until it becomes 0. This is why this type of cascading is
not recommended. This type of cascading is not even
When pMOS is used as the building block of the Pass possible for pMOS Pass Transistors.
Transistor logic, it is called pMOS Pass Transistor. In
nMOS Pass Transistor, ground (𝑉𝑆𝑆 ) is applied to the gate
( 𝑉𝑆𝑆 = 𝑉𝐺 ). As with nMOS Pass Transistor, the input
voltage is applied to the drain (𝑉𝑖𝑛 = 𝑉𝐷 ), and the output
voltage is taken from the source (𝑉𝑜𝑢𝑡 = 𝑉𝑆 ). The range of
the output voltage can be |𝑉𝑇𝑝 | to 𝑉𝑖𝑛 since 𝑉𝐺𝑆 needs to
be at least −𝑉𝑇𝑝 (generally −1V) to turn ON the nMOS.
Fig: Cascading by driving next pass transistor’s gate.

The following type of cascading is based on the second


category where one Pass Transistor is driving the drain of
the next one. Unlike the first category of cascading, the
output voltage in this cascading does not degrades at every
stage as long as the supply voltage at the gate of every Pass
Transistor is same.
Fig: pMOS Pass Transistor.

Considering the gate is grounded 𝑉𝑆𝑆 = 0𝑉 and threshold


voltage |𝑉𝑇𝑝 | = 1𝑉 for the pMOS, for different values of
𝑉𝑖𝑛 the values of 𝑉𝑜𝑢𝑡 will be as follows:
Fig: Cascading by driving next pass transistor’s drain.
𝑉𝑆𝑆 = 0𝑉
Pass Transistor Combinational Logic Design:
|𝑉𝑇𝑝 | = 1𝑉
𝑽𝒊𝒏 (V) 𝑽𝒐𝒖𝒕 (V) A popular and widely-used alternative to complementary
0 1 static CMOS is pass-transistor logic, which attempts to
0.5 1 reduce the number of transistors required to implement a
1 1
logic circuit by allowing the primary inputs to drive gate
1.5 1.5
terminals as well as source/drain terminals. This is in
2 2
3 3
contrast to logic families that we have studied so far,
4 4 which only allow primary inputs to drive the gate
5 5 terminals of MOSFETS.

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Imran Chowdhury | Lecture Note | VLSI II

Transmission Gate or Pass Gate Logic bipolar, nMOS, or GaAs technologies. CMOS can be
obtained by integrating both nMOS and pMOS transistors
over the same silicon wafer. Depending on which type of
The Transmission Gate Logic is developed to solve the
silicon wafer is primarily chosen, the fabrication process
voltage drop problem of the Pass Transistor Logic. This
can be classified into 3 (three) types:
technique uses the complementary properties of nMOS
and pMOS transistors. i.e.: 1) P-well Process
2) N-well Process
 nMOS passes strong LOW (logic 0) 3) Dual-well or Twin-tub Process
 pMOS passes strong HIGH (logic 1)
P-well Process: In this process of CMOS, the substrate or
The transmission gate combines the best of the two
silicon wafer is chosen to be n-type in which pMOS
devices by placing an nMOS transistor in parallel with a
devices are formed by suitable masking and diffusion. In
pMOS transistor as shown in Figure below. The control
order to accommodate nMOS devices, a deep p-well is
signals to the transmission gate 𝐶 and 𝐶̅ are
diffused into the n-type substrate.
complementary to each other. The transmission gate is a
bidirectional switch enabled by the gate signal 'C'. N-well Process: In this process of CMOS, the substrate or
silicon wafer is chosen to be p-type in which nMOS
devices are formed by suitable masking and diffusion. In
order to accommodate pMOS devices, a deep n-well is
diffused into the p-type substrate. N-well CMOS circuits
are superior to p-well because of the lower substrate bias
Fig: Transmission Gate symbols. effect on threshold voltage and inherently lower parasitic
capacitances associated with the source and drain regions.
According to the transmission gate in the following figure,
Twin-tub Process: In this process of CMOS, the substrate
 When C = 1, both MOSFETs are ON and the signal or silicon wafer is chosen to be intrinsic. This allows two
pass through the gate i.e. A = B if C = 1. separate tubs to be implanted into the silicon, which in turn
 Whereas C = 0 makes the MOSFETs cut off creating allows the doping profiles in each tub region to be tailored
an open circuit between nodes A and B, which independently so that neither type of device will suffer
produces a High Impedance (Z) output at B. from excessive doping effects. The main advantage of this
process is that the threshold voltage, body effect parameter
C A B and the transconductance can be optimized separately.
0 0 Z
For an example, the following CMOS based device is
0 1 Z fabricated based on p-well process.
1 0 0
1 1 1
Fig: Transmission Gate circuit.

Transmission Gate Combinational Logic Design:

In the previous section, nMOS Pass Transistors were used


to implement logic circuits to reduce the number of Fig: Cross-section of a CMOS device based on p-well process.
transistors in comparison to CMOS logic circuits. But the

CMOS Layout Design


voltage reduction at the output still remains, since nMOS
passes weak HIGH. Transmission Gate logic solves this
issue by connecting a pMOS with the nMOS in parallel,
so that nMOS can be used to pass strong LOW and pMOS After designing the circuit schematic and synthesizing the
can be used to pass strong HIGH. The fundamental logic operation, the physical circuit/mask layout is designed
circuit structure of Transmission Gate is same as with the which is to be fabricated onto a chip. The layout design
Pass Transistor logic. process is done in 2 (two) steps:
1) Stick Diagram
CMOS Fabrication Technology 2) Mask/Circuit Layout
(CMOS Fabrication Process Types)

The CMOS fabrication technology is recognized as the


Stick Diagram
leader of VLSI systems technology. CMOS provides an
A stick diagram is a kind of diagram which is used to plan
inherently low power static circuit technology that has the
the layout of a transistor cell or a complex circuit. Stick
capability of providing lower power-delay product than
diagram is a means of capturing topography and layer
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Imran Chowdhury | Lecture Note | VLSI II
information using simple diagrams. It uses "sticks" or lines Exercise 1:
to represent the devices and conductors. It acts as an
interface between symbolic circuit and the actual layout. Draw the stick diagram of a CMOS inverter.
Stick diagram conveys layer information of the CMOS Solution:
circuit through:
Stick Diagram Notations:
a) Color codes, or
b) Monochrome encoding

Stick Diagram shows:


 all components and vias (interconnections).
 relative placement of components.

Stick Diagram does not show: Sick Diagram of a CMOS Inverter:


 exact placement of components.
 transistor sizes.
 wire lengths, wire widths, tub boundaries.

Some Rules of Sick Diagram:

Rule 1: When two or more ‘sticks’ of the same type cross


or touch each other that represents electrical contact.

Circuit Layout
Rule 2: When two or more ‘sticks’ of different type cross VLSI design ultimately aims to translate circuit concepts
or touch each other there is no electrical contact (If onto silicon, which is done by designing circuit layout.
electrical contact is needed we have to show the Circuit layout is also called Mask Layout or Physical
connection explicitly). Layout. Layout Design is a schematic of the Integrated
Circuits (IC) which describes the exact area and placement
of the components for fabrication. The layout is a physical
representation of circuit design, or the drawing the masks
which will be used in the manufacturing process.

Layout Design shows:


 all components and vias (interconnections).
 exact placement of components.
Rule 3: When a poly crosses diffusion it represents a  transistor sizes.
transistor (if a contact is shown then it is not a transistor).  wire lengths, wire widths, tub boundaries.

Fig: Physical layout of nMOS (left) and pMOS (right).

Rule 4: In CMOS, a separation line is drawn to avoid


touching of p-diff with n-diff. All pMOS must lie on one
side of the line and all nMOS on the other side.

Fig: Layout Design Flow (schematic to physical layout).


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Imran Chowdhury | Lecture Note | VLSI II
Exercise 1:
Draw the physical layout of a CMOS inverter considering
n-well fabrication process.
Solution:
Layout Notations:

Physical Layout of a CMOS Inverter:

Exercise 4:

Draw the physical layout of the following CMOS logic


circuit considering twin-tub fabrication process.
𝐹 = ̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅
𝐴 + 𝐵 + 𝐶𝐷

Solution:
Exercise 2:

Draw the physical layout of a CMOS 2-input NAND gate


considering n-well fabrication process.

Solution:

Problem 1:

Draw the physical layout of the following CMOS logic


circuit considering twin-tub fabrication process.
𝐹 = ̅̅̅̅̅̅̅̅̅̅̅̅̅
𝐴+𝐵+𝐶

Why nMOS used in pull-down:

Let’s consider pMOS in the pull-down and nMOS in the


pull-up. When pMOS is OFF, nMOS should be ON and its
gate to source voltage would be,
Exercise 3:

Draw the physical layout of a CMOS 2-input NOR gate ⇒ 𝑉𝐺𝑠 = 𝑉𝑡ℎ = 𝑉𝐺 − 𝑉𝑜𝑢𝑡 = 𝑉𝐷𝐷 − 𝑉𝑜𝑢𝑡
considering twin-tub fabrication process. ⇒ 𝑉𝐺𝑠 = 𝑉𝐷𝐷 − 𝑉𝑜𝑢𝑡
Solution: ∴ 𝑉𝑜𝑢𝑡 = 𝑉𝐷𝐷 − 𝑉𝐺𝑠
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Imran Chowdhury | Lecture Note | VLSI II

Thus, the output voltage is always reduced by 𝑉𝐺𝑠 . Now,


if we increase 𝑉𝐺𝑆 in order to get higher current, the output
reduces even more. This is why nMOS is not used in the
pull-up network in CMOS design.

Latch-up:

Latch-up is a condition in which the parasitic components


give rise to the establishment of low resistance conducting
paths between VDS and VSS with disastrous results. Careful
control during fabrication is necessary to avoid this
problem.

Version 1.3 | Page 18 of 18

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