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Importance of IC Packaging:
Fig: Small Outline Package (SOP/SOIC/SO).
The packaging of an integrated circuit is as important as
the integrated circuit, the semiconductor device within.
The packaging mainly serves 3 (three) purposes:
– First, it protects the semiconductor circuit from
physical impairment or damage.
– Secondly, it protects the circuit from corrosion.
– Finally and most important, it decides how electrical
contacts are laid out from the semiconductor device
over a PCB. This is an important consideration for
both IC designing as well as PCB designing. Like how Fig: Quad Flat Package (QFP).
the connections are organized in an IC, how they are
laid out using a standard IC package must be coherent
with the application and various use cases of the
respective IC.
Types of IC Packaging:
Inside an IC Package:
Leads: These are also called pins which are used to mount
and make contacts with a PCB to connect the outside
electronic components of a circuit to the chip.
Moore’s Law:
Moore's Law has been used in the semiconductor industry Fig: Channel Length = Gate Length – (2 × Diffusion Length).
to guide long-term planning and to set targets for research
and development, thus functioning to some extent as a Discrepancy in Feature Size Naming Convention:
self-fulfilling prophecy. It created a roadmap for the
ubiquity of computer technology, including that in Most recently, due to various marketing and discrepancies
consumer electronics, artificial intelligence, and among foundries, the number has lost the exact meaning it
supercomputers. In effect, Moore’s Law also predicted the once held. Recent technology nodes such as 22nm, 16nm,
increasing affordability and accessibility of computer 14nm, and 10nm refer purely to a specific generation of
technology, as the cost per transistor decreases when there chips made in a particular technology. It does not
are more transistors available on a single chip. correspond to any channel length. For example, Intel's
10nm is comparable to TSMC's 7nm and Global
Foundries' 12nm processes, while Intel's 7nm is
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Imran Chowdhury | Lecture Note | VLSI II
comparable to other foundries’ 5nm process.
Nevertheless, the naming convention has stuck and it is
what the leading foundries call their nodes.
MOS Transistor Technology There is a large number and variety of basic fabrication
steps used in the production of modern integrated circuits.
The fundamental building block of integrated circuits is The same process can be used for the fabrication of nMOS
transistor, and for modern VLSI it is MOSFET, to be or pMOS or CMOS devices. The step-by-step procedure
specific, enhancement type MOSFET. MOSFET has 4 of Enhancement type nMOS fabrication steps are
(four) terminals Gate, Drain, Source and Body. However, discussed below:
the body terminal is always connected with the source
terminal. Therefore, we are left with only three terminals. Step 1 (Substrate Doping): The process starts with a
MOSFETs are classified into 2 (two) types: semiconductor wafer of pure silicon (Si), were p-type
impurities (boron, gallium, indium, aluminum, etc.) are
1) Depletion type MOSFET (D-MOSFET) added through diffusion or ion implantation technique to
2) Enhancement type MOSFET (E-MOSFET) make it a p-type substrate for the nMOS. The size of such
wafer is about 75-150mm in diameter and 0.4mm in
Both MOS transistors are further classified as n-type thickness, and the doping concentration is about 1015/cm3
named nMOS (or n-channel) and p-type named pMOS (or to 1016/cm3.
p-channel) MOSFETs.
Step 3 (Photolithography – Photoresist): The surface is Fig: Step 5a – The soften photoresist area is being etched away
now covered to photoresist which is deposited onto the by using some solvent.
wafer and spun to an even distribution of the required
thickness. Which is done by pouring liquid photoresist
onto the surface of the substrate and spinning it.
Step 4 (Photolithography – Masking): The photoresist Step 6 (Thin Oxide): A thin layer of SiO2 typically 0.1μm
layer is then exposed to ultraviolet (UV) light through thick or less is grown all over the surface of the wafer to
photomask, which defines those regions into which make the insulation layer between the polysilicon and
diffusion is to take place. Here negative photoresist is used silicon substrate. It is done by heating the silicon substrate
which gets harden when exposed to UV light, and remain at around 1200℃ and sending oxygen gas or water vapor
soften where it is not exposed to UV light. The black onto it. The thickness of the thin oxide layer can be
potion of the photomask or optical mask means closed controlled by the temperature and the reaction time.
section and yellow portions mean open section where UV
light can go through. So, the photoresist under the black
portion will remain soften while the photoresist under the
yellow portions will get harden.
Fig: Step 6 – Thin oxide layer gown onto the surface of the
entire wafer.
Fig: Step 8 – Drain and source regions are being exposed using
photolithography and etching.
Fig: Step 11 – Metal contacts are being formed using
Step 9 (Drain and Source Formation): After exposing metallization, photolithography and etching.
the regions where drain and source are to be formed, the
regions are then doped with n-type impurities using either Body Effect of MOSFET:
diffusion or ion implantation method. Diffusion involves
placing the semiconductor wafer in a high temperature A transistor is a 4-terminal device. Gate, drain and source
gaseous atmosphere called ‘diffusion furnace’ containing are the 3 terminals that are used to control the transistor,
the desired impurity, where the doping occurs based on but the bulk or body, if not properly biased, may put the
concentration gradient. Ion implantation generally takes transistor inoperable.
place at a lower temperature than diffusion, where a beam
of impurity ions is accelerated and then directed to the
surface of the semiconductor wafer to make the desired n-
type regions. Depth of the drain and source doping is
generally 1μm. In this process the polysilicon with
underlying thin oxide and the thick oxide acts as the mask
during formation of drain and source, hence the process is
called self-aligning.
Fig: Step 10 – Contact regions are being patterned using The body effect can be seen as a change in threshold
oxidization, photolithography and etching. voltage and it is modeled as just that:
VT0n = threshold voltage when VSB = 0. Non-saturated Bipolar Logic Family is further categorized
2ϕf = surface potential (2ϕf ≈ 0.6V for NMOS and into 2 (two) types:
0.75V for PMOS). i. Schottky TTL
γ = body-effect parameter (γ ≈ 0.4V1/2 for NMOS and ii. Emitter Coupled Logic (ECL)
−0.5V1/2 for PMOS).
Unipolar or MOS Logic Family is further categorized
For PMOS, the bulk voltage should always be higher than into 3 (three) types:
the source because the p-n junction is in the opposite
direction (source p+ and bulk n−). Then, the threshold a) pMOS Logic Family
voltage should be rewritten as: b) nMOS Logic Family
c) CMOS Logic Family
CMOS Logic Family In this logic family, nMOSs are arranged in a pull-down
network (PDN) between the output and the ground rail
(CMOS Technology) (VSS) while pMOSs are in a pull-up network (PUN)
between the output and the supply voltage rail (VDD). All
The term CMOS stands for “Complementary Metal Oxide the inputs are distributed to both the PUN and PDN. Thus,
Semiconductor”. It is a class of digital circuits built using an nMOS will be ON when the corresponding pMOS is
both enhancement type nMOS and pMOS. The advantages OFF, and vice-versa. For any input pattern, one of the
of CMOS logic family includes high speed, low power networks is ON and the other is OFF.
dissipation, high noise margins in both states, and a wide
range of source and input voltages (fixed source voltage).
CMOS logic family was developed for the Very Large
Scale Integration (>10000 gates) and beyond. This logic
family can be classified into the following categories:
1) Static CMOS Logic
a) Conventional Static CMOS Logic
b) Pseudo-nMOS Logic (Ratioed Logic)
c) Pass Transistor & Transmission Gate Logic
2) Dynamic CMOS Logic
a) Domino Logic Fig: General block diagram of static CMOS logic.
b) np-CMOS Logic
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Imran Chowdhury | Lecture Note | VLSI II
Designing combinational circuits with Static CMOS logic
technically means designing the pull-down and pull-up
network. The number of nMOS in the PDN and pMOS in
the PUN depends on the number of inputs, and their
connection depends on the Boolean function. The
following table shows the type of connection in the PND
and PUN based on the logic operation in the Boolean
function. Like nMOS logic, Static CMOS logic works for
inverted logic by default.
Pull-down Pull-up
Logic Operation
Network (PDN) Network (PUN)
Addition Parallel Series Fig: General block diagram of Pseudo-nMOS logic.
Multiplication Series Parallel
As with nMOS logic, designing combinational circuits
Pseudo-nMOS Logic with Pseudo-nMOS logic technically means designing the
driver (or pull-down) network, since there is only one
Although CMOS is superior in terms of static power loss pMOS load in the pull-up network. Again, as with nMOS
and operating speed to its predecessor, but it needs more logic, the number of nMOS and their connection in the
transistors than others in the same logic family like nMOS driver network depends on the number of inputs and their
logic. Hence area consumption is more for CMOS. This is Boolean function respectively. Like nMOS and CMOS
where Pseudo-nMOS logic comes in which is based on logic, Pseudo-nMOS works for inverted logic by default.
nMOS logic structure keeping the CMOS definition
satisfied by incorporating pMOS load in the nMOS logic Driver Network or Pull-
Logic Operation
down Network (PDN)
circuit. The advantages of Pseudo-nMOS logic includes
Addition Parallel
less area consumption, hence low gate capacitance, thus
Multiplication Series
higher operating speed. But the main disadvantage of this
logic is it carries on the static power loss from nMOS logic
since the load is always ON. Like nMOS logic, Pseudo- Pass Transistor Logic
nMOS logic was developed for the Large Scale Integration
(≤10000 gates). Pass Transistor:
Transmission Gate or Pass Gate Logic bipolar, nMOS, or GaAs technologies. CMOS can be
obtained by integrating both nMOS and pMOS transistors
over the same silicon wafer. Depending on which type of
The Transmission Gate Logic is developed to solve the
silicon wafer is primarily chosen, the fabrication process
voltage drop problem of the Pass Transistor Logic. This
can be classified into 3 (three) types:
technique uses the complementary properties of nMOS
and pMOS transistors. i.e.: 1) P-well Process
2) N-well Process
nMOS passes strong LOW (logic 0) 3) Dual-well or Twin-tub Process
pMOS passes strong HIGH (logic 1)
P-well Process: In this process of CMOS, the substrate or
The transmission gate combines the best of the two
silicon wafer is chosen to be n-type in which pMOS
devices by placing an nMOS transistor in parallel with a
devices are formed by suitable masking and diffusion. In
pMOS transistor as shown in Figure below. The control
order to accommodate nMOS devices, a deep p-well is
signals to the transmission gate 𝐶 and 𝐶̅ are
diffused into the n-type substrate.
complementary to each other. The transmission gate is a
bidirectional switch enabled by the gate signal 'C'. N-well Process: In this process of CMOS, the substrate or
silicon wafer is chosen to be p-type in which nMOS
devices are formed by suitable masking and diffusion. In
order to accommodate pMOS devices, a deep n-well is
diffused into the p-type substrate. N-well CMOS circuits
are superior to p-well because of the lower substrate bias
Fig: Transmission Gate symbols. effect on threshold voltage and inherently lower parasitic
capacitances associated with the source and drain regions.
According to the transmission gate in the following figure,
Twin-tub Process: In this process of CMOS, the substrate
When C = 1, both MOSFETs are ON and the signal or silicon wafer is chosen to be intrinsic. This allows two
pass through the gate i.e. A = B if C = 1. separate tubs to be implanted into the silicon, which in turn
Whereas C = 0 makes the MOSFETs cut off creating allows the doping profiles in each tub region to be tailored
an open circuit between nodes A and B, which independently so that neither type of device will suffer
produces a High Impedance (Z) output at B. from excessive doping effects. The main advantage of this
process is that the threshold voltage, body effect parameter
C A B and the transconductance can be optimized separately.
0 0 Z
For an example, the following CMOS based device is
0 1 Z fabricated based on p-well process.
1 0 0
1 1 1
Fig: Transmission Gate circuit.
Circuit Layout
Rule 2: When two or more ‘sticks’ of different type cross VLSI design ultimately aims to translate circuit concepts
or touch each other there is no electrical contact (If onto silicon, which is done by designing circuit layout.
electrical contact is needed we have to show the Circuit layout is also called Mask Layout or Physical
connection explicitly). Layout. Layout Design is a schematic of the Integrated
Circuits (IC) which describes the exact area and placement
of the components for fabrication. The layout is a physical
representation of circuit design, or the drawing the masks
which will be used in the manufacturing process.
Exercise 4:
Solution:
Exercise 2:
Solution:
Problem 1:
Draw the physical layout of a CMOS 2-input NOR gate ⇒ 𝑉𝐺𝑠 = 𝑉𝑡ℎ = 𝑉𝐺 − 𝑉𝑜𝑢𝑡 = 𝑉𝐷𝐷 − 𝑉𝑜𝑢𝑡
considering twin-tub fabrication process. ⇒ 𝑉𝐺𝑠 = 𝑉𝐷𝐷 − 𝑉𝑜𝑢𝑡
Solution: ∴ 𝑉𝑜𝑢𝑡 = 𝑉𝐷𝐷 − 𝑉𝐺𝑠
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Imran Chowdhury | Lecture Note | VLSI II
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