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SURFACE AND INTERFACE ANALYSIS

Surf. Interface Anal. 27, 1114–1117 (1999)

SHORT COMMUNICATION

Notes on Locating Peak Energies in XPS

János Végh*
Institute of Nuclear Research of the Hungarian Academy of Sciences, H-4001 Debrecen, Pf. 51, Hungary

The algorithms proposed for determination of the position in XPS are analysed. The method of bisected
chords is reformulated in a form readily available for digital-computers, another derivation of fitting a
parabola to the top of peak is given and some more non-iterative methods are presented. The suggested
methods determine different characteristics of the photopeak, such as ‘peak location’, maximum height,
centre of gravity and the distribution parameter. Copyright  1999 John Wiley & Sons, Ltd.
KEYWORDS: peak location; peak position; energy calibration; bisected chord method

INTRODUCTION Because of this, it is quite difficult to compare this method


with the present-day digital computer methods available
in the data evaluation software. Now we will reformulate
One of the key points in electron spectroscopy is to deter- it in a form readily available for use on the modern digital
mine the energy of the photo-peaks. Because the energy computers.
scale calibration itself is also based on the determination In this method chords are drawn horizontal (formerly
of the energies of some photopeaks, it is worth compar- parallel to the baseline). They intersect the irregular poly-
ing the features of the available methods offered for that gon, forming the peak envelope. Using the notation shown
purpose. in Fig. 1 for the kth chord (drawn at height yk ) it happens
between points .i, i C 1/ and .j, j C 1/. The E coordinates
of this chord are
METHODS USED TO LOCATE PEAKS yk yi.k/
Ek,L D Ei.k/ C [Ei.k/C1 Ei.k/ ] .1/
yi.k/C1 yi.k/
Let us have a measured spectrum y.E/ (a distribution
of counts y as a function of energy E), i.e. y.k/ is the and
number of counts recorded in channel k of nominal energy yk yj.k/C1
E.k/ . One can determine ‘peak position’ with several Ek,R D Ej.k/C1 [Ej.k/C1 Ej.k/ ] .2/
methods, each providing a different result, partly because yj.k/ yj.k/C1
a different characteristic is interpreted as a ‘peak position’.
In addition, different parts of the peaks are used in the for the left (L) and right (R) intersections, respectively,
calculation, i.e. the peaks are truncated differently. As with the two polygon sections.
Hansen indicates in his work determining peak position Usually, the data points are equidistant (i.e. E D
with a high precision,1 the arbitrary choice of the channels Ei.k/C1 Ei.k/ D Ej.k/C1 Ej.k/ ), so the energy of the
considered distorts the sample (which should be infinitely midpoint is
wide) and necessitates what in statistical language is called 
1
a ‘bias correction’. Also, it is worth noting that the so- Ek D Ei.k/ C Ej.k/C1 C E
called ‘binning’ (the non-infinitely small channel width) 2
can also distort the derived result (see section II. C.  
yk yi.k/ yk yj.k/C1
in Ref. 2). ð .3/
yi.k/C1 yi.k/ yj.k/ yj.k/C1

The bisected chord method The same calculation can be carried out on several chords,
each contributing a midpoint energy. These midpoints are
The method was originally given3 in terms like then extrapolated to a value at the peak giving the peak
energy; in other words, a curve (line) is drawn through the
plot spectra through . . . , draw the baseline, midpoints, which is some kind of (rather arbitrary) fitting.
As found by Cumpson,5 a simple average can be taken for
. . . draw horizontal chords, etc. symmetrical peaks but the midpoints will scatter on both
sides of this line.
Without loss of generality, one can correct the calcu-
* Correspondence to: J. Végh, Institute of Nuclear Research of the lated midpoint energy of a chord with an arbitrary constant
Hungarian Academy of Sciences, H-4001 Debrecen, Pf. 51, Hungary.
E-mail: J.Vegh@atomki.hu
value, namely with the value (relative to the projected
Contract/grant sponsor: Hungarian Academy of Sciences; Con- peak energy) of the intersection of this fitted line and
tract/grant number: OTKA (T026514). the chord. After having corrected the individual Ek items,
CCC 0142–2421/99/121114–04 $17.50 Received 30 June 1999
Copyright  1999 John Wiley & Sons, Ltd. Revised 23 August 1999; Accepted 23 August 1999
LOCATING PEAK ENERGIES IN XPS 1115

envelope does not arise. It is easy to see that if the abso-


lute value of the slopes of the linear sections [i, i C 1] and
[j, j C 1], respectively, are different (and of course they
are), the resulting midpoint energy Ek will depend on the
actual value of yk , so the sampling frequency and range
should be given in the algorithm. An alternative could be
to start at the maximum height plus the two neighbour-
ing points and then extend the region on either side until
the new point allows a new chord. In this case yk could
be the middle height of the narrower height interval: for
example, in Fig. 1 yk D .yi C yj //2. The final resulting
peak energy could be derived as the energy coordinate
of the point where the line, fitted to the chord midpoints,
intersects the peak envelope.
Figure 1. The notations used in the bisected chord method. Considering the uncertainty of E, it can be seen easily
that the closer the points are to the peak maximum, the
closer the counts in the adjacent channels are to each
the energy of the peak itself is calculated as an average other, i.e. their contribution to the uncertainty is greater.
of these corrected E0k values over all k chords, i.e. the This fact suggests that care be used when determining the
algorithm simplifies to a simple summation over properly peak energy that the midpoints are extrapolated to. On
selected pairs of sections of the polygon. The sum can be the other hand, although the uncertainty of E improves
separated into two terms with the number of the terms averaged, the difference
X of the counts in adjacent channels will decrease sharply
[E0i.k/ C E0j.k/C1 ] and so also will the influence of systematic errors (such
ED k
X as neighbouring peaks, asymmetric shape, etc), thus an
2 1 increase in the number of the chords will result in much
k more uncertainty. This analysis supports the suggestion
X  yk yi.k/ yk yj.k/C1
 from practical experience that this algoritm should use
only points in the [100%, 84%] height interval.
yi.k/C1 yi.k/ yj.k/ yj.k/C1 In summary, the method is equivalent to the unweighted
C E k X .4/
2 1 average of the energies Ek , where the method of selecting
k
the points in summing greatly improves the precision,
focusing the summing to the points near to the peak
The first sum is evidently the (unweighted) average energy maximum, so that practically the maximum of the peak
for all points used, whereas the second term needs more height is evaluated as the peak location.
attention. One can assume (without loss of generality) that
the symmetric peak is located symmetrically (i.e. such
that its peak energy Eo coincides with the nominal energy Non-iterative fitting methods
of one of the measured points Ei ). Notice that in the
absence of statistical disturbance the individual terms in These methods rely heavily on the measured points being
the second sum would be exactly zero. It does not hold equidistant, so in this section Ei stands for the sequence
for asymmetric peaks, so the second term measures the number i. Note that in calculating the value of the trans-
asymmetry of the peak. This asymmetry can arise from the formed function, at some point the neighbours of the point
asymmetric placing or the asymmetric shape of the peak, are used; thus, in calculating the uncertainty, special care
or both. Of course, the counting statistics also affect these should be taken so as not to use multiple data points.
terms, but in a statistical sense they remain valid.
The result above points to one more requirement: we Parabola fitting. A method for fitting a parabola (of the
cannot select the chords arbitrarily. When drawing chords form yi D aE2i CbEi Cc) to the top of the peak is described
at some equidistant heights, some measured points might by Cumpson et al.5 Another simple derivation of the same
be used in calculating the midpoints for more than one result can be given using a transformation and a non-
chord (or just the opposite: it might not be used at iterative linear fitting. Let us consider the top few points
all), which means that some measured points are used of the peak and transform the intensities as
more than once in calculating E, and the peak energy
becomes biased. According to the mathematical statistics, Q.Ei / D yiC1 yi 1 .5/
one cannot use any of the four points used in evaluating
E.k/ , E.kC1/ or E.k 1/ . However, in practice one cannot be This leads to
so strict. For example, in spectra published by Powell4 Q.Ei / D 4aEi C 2b .6/
only nine points fall in the [100%, 84%] height interval,
so only (maximum) two such chords could be derived. i.e. the transformed function is linear in energy. To this
When drawing statistical conclusions, we have to bear transformed function a straight line can be fitted (using
this fact in mind. the weights Wi D [.yiC1 /2 C .yi 1 /2 ] 1 ), as described in
Notice that the way the chords are drawn affects standard textbooks.6 The fitting results in the peak position
the final result. The linear interpolation used above for
approximating the upper part of the distribution seems b
reasonable and the need for some spline or other fitted Eo D .7/
2a
Copyright  1999 John Wiley & Sons, Ltd. Surf. Interface Anal. 27, 1114–1117 (1999)
1116 J. VÉGH

in full accordance with Eqn (14) of Ref. 5. From this the individual data points and calculate the parameters
derivation it is also clear immediately that the constant of the peak from the parameters of this linear function.
term c of the parabola (corresponding to a constant back- Because these methods can also be used to set up the
ground) does not have any role: however, a sloping back- other initial parameters (FWHM and height) for (at least
ground will shift the peak position. relatively) separated peaks, the further steps necessary to
derive them are also described there.
Polynomial fitting. A more generalized fitting procedure For a Gaussian of the form
can be derived easily. Having equidistant points, let us fit "  #
to the point with maximum height plus 2m neighbouring E i Eo 2
y.Ei / D yo exp p .11/
points an nth order polinom of the form 2
X
n
the transformation is7
fj D bnk jk .8/
kD0 Ei Eo
Q.Ei / D ln..yi 1 //.yiC1 // D 2 .12/
2
in such a way that
!2
For a Lorentzian of the form
X
Cm X
Cm X
n
yo
MD .fj yj /2 D bnk jk yj .9/ y.Ei / D   .13/
jD m jD m kD0
Ei Eo 2
1C
0.5
is minimum. The corresponding condition is
the transformation is8
∂M X
n X
Cm X
n X
Cm

D2 bnk jkCr 2 yj jr D 0 .10/ 1 1 16


∂bnr Q.Ei / D D .Ei Eo / .14/
kD0 jD m kD0 jD m yiC1 yi 1 yo 2

for r D 0, . . . , n. After changing the order Pof the summa- Three-point Gaussian method. Another quick and simple
tion and introducing the notations S D
Cm
kD m i
kCr
and method was proposed recently by Li et al.9 Three mea-
PCm rCk
sured points are used in the calculations, where the peak
Fr D rD m yi jr , one arrives at the system of equations
of the form energy is calculated as
X n
 2 2 
bnk SrCk D Fr E Eo E2 E2 E2 E2
ln yi j Ð yo i j Ð yj o i
kD0 1
ED   .15/
Because SrCk  0 for odd values of r C k, then when 2 ln yiEj Eo Ð yoEi Ej Ð yjEo Ei
fitting a second-order polynomial to the top five points of
the peak, i.e. n D 2 and m D 2, the system simplifies to where Ei , yi , Ej and yj are as shown on Fig. 1, and Eo
and yo denote the energy and height, respectively, of the
b20 S0 C b22 S2 D F0 point with the highest count.
b20 S2 C b22 S4 D F2
The moments method
b21 S2 D F1
It is worth drawing attention to the momentum method
and the coefficients of the parabola are readily available. too. In this method2 the moments of the distribution y.E/
are used. The ith moment is defined as the expectation
Fitting Gaussian and Lorentzian. Note that fitting a parabola value of Ei . The peak position will be the first central
to the top of the peak essentially corresponds to expanding moment (see Eqn (9) in Ref. 2: the simple weighted
the lineshape as a Taylor series by .E Eo /, neglecting the average of the spectrum data points is taken)
third- and higher order terms. Obviously, only the very top
of the peak is similar to a parabola, so a real lineshape can X
Ek y k
be more effectively approximated with either a Gaussian
or a Lorentzian. Although the peaks in the XPS are neither ED X
k
.16/
purely Lorentzian nor Gaussian, they are much closer to yk
either of the two than to a parabola. Because of this, much k

more of the peak (unlike the top few per cent of the peak at for some points near to the peak energy. To calculate the
the parabola fitting) can be used in the calculation, although statistical uncertainty of E we also need to calculate the
the fitting region is usually limited to the points whose second central moment (see Eqn (11) in Ref. 2) and obtain
contents are greater than half-maximum.
It is a well-known fact that—similar to the parabola fit- X 
E2k yk
ting—the frequently used Gaussian and Lorentzian peak  k 2
shapes can also be linearized, i.e. peak parameters such  X E
 
as position can be calculated non-iteratively. The trick is yk
again the same as at fitting the parabola: using the equidis-  2 .E/ D k
X .17/
tant nature of the recorded spectra, transform the function yk
into a linear function using the immediate neighbours of k

Surf. Interface Anal. 27, 1114–1117 (1999) Copyright  1999 John Wiley & Sons, Ltd.
LOCATING PEAK ENERGIES IN XPS 1117

Note that the calculated centre of gravity E is indepen- should be applied. Under the conditions used in the energy
dent of the actual shape of the symmetric distribution. The calibration measurements, this correction is of the order
method is a well-established mathematical technique, sim- of 2–5 meV.
ple enough to use even on hand-held calculators and can
be included readily in evaluation software. However, as Acknowledgements
Hansen points out in his work for determining the peak The author kindly acknowledges Dr C. J. Powell for providing the
position with high precision,1 when using a truncated measurement data used in his work.4 The support of Hungarian grant
line to estimate the correct line position a bias correction OTKA (T026514) is kindly acknowledged.

REFERENCES

1. Hansen PG. Nucl. Instrum. Methods 1978; 154: 321. 6. Bevington PR. Data Reduction and Error Analysis for the
2. Valentine DJ, Rana EA. IEEE Trans. Nucl. Sci. 1996; 43: 2501. Physical Sciences (McGraw-Hill, New York, 1969) Ch. 6.
3. Surf. Interface Anal 1987; 10: 55; ASTM Standard E 902-88; 7. Mukoyama T. Nucl. Instrum. Methods 1975; 125: 289.
Surf. Interface Anal 1991; 17: 889. 8. Mukoyama T, Végh J. Nucl. Instrum. Methods 1980; 173:
4. Powell CJ. Surf. Interface Anal. 1997; 25: 777. 345.
5. Cumpson PJ, Seah MP, Spencer SJ. Surf. Interface Anal. 9. Li J, Valentine JD, Rana AE. Nucl. Instrum. Methods 1999;
1996; 24: 687. A422: 438.

Copyright  1999 John Wiley & Sons, Ltd. Surf. Interface Anal. 27, 1114–1117 (1999)

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