18ECE302T-MEMS Technology

Unit-2, Lecture-12: Stress and strain -tensile stress and strain, definition ,
Relationships

Dr. Md Jawaid Alam

mdjawaia@ssrmist.edu.in

Department of ECE
SRM Institute of Science and Technology
Kattankulathur, Chennai

February 20, 2023

 Newton’s Law’s of Motion and Stress
Newton’s Laws of motion: One of the most frequently encountered conse-
quences of the Newton’s Laws is that, for any
1 (The Law of Inertia): Every object in a
stationary object, the vector sum of forces and
state of uniform motion tends to remain in
moment (torque) on the object and on any part of
the state of motion unless an external force
it must be zero.
is applied to it.
These laws are used to analyze
2 The relationship between an object’s mass force distribution inside a material,
m, its acceleration a, and the applied force which gives rise to stress and strain.
F is F = ma.
Acceleration and forces are vectors.
The direction of the force vector is the
same as the direction of the accelera-
tion vector.
3 For every action there is an equal and op-
posite reaction.

Dr. Md Jawaid Alam (SRM) 18ECE302T-MEMS Technology February 20, 2023 1 / 13

 Stress and Strain
Stress is defined as: Stress and strain are related as:
F
σ= (1) σ = Es (3)
A
The applied force may have three components
(F x , Fy and Fz ). The area A can be represented
by normal vector to the surface.
In general the σ will have six components
h iT
σ = σ xx , σyy , σzz , σ xy , σ xz and σyz Due to strain, if object elongate in x → direction
The
 tangential components
 then it gets compessed in other directions to
σ xy , σ xz and σyz are called shear stress. maintain volume. These lateral deformation can
be calculated with the knowledge of Poisson’s
Strain is defned as: Ration (ν)
∆l sy sz
s= (2) ν= = (4)
l sx sx

Dr. Md Jawaid Alam (SRM) 18ECE302T-MEMS Technology February 20, 2023 2 / 13

 Problem
Question: A cylindrical silicon rod is pulled on both ends with a force of 10 mN. The rod is 1 mm
long and 100 µm in diameter. Find the stress and strain in the longitudinal direction of the rod Take
E silicon = 130 GPa.
σ
Solution: , σ = F
A = 3.18 × 105 N/m2 and strain s = E = 2.4 × 10−6

Dr. Md Jawaid Alam (SRM) 18ECE302T-MEMS Technology February 20, 2023 3 / 13

 Shear force, Shear strain, Shear modulus of elasticity
displacement:
Shear force is the tangential force on a sur- ∆x
face, this may lead to shape deformation. γ= (6)
L
Shear stresses can be developed under dif-
ferent force loading conditions. The shear stress is unit less; in fact, it repre-
sents the angular displacement expressed
in the unit of radians.
Shear modulus of elasticity, G, is defined
as
τ
G= (7)
γ
The magnitude of the shear stress is defined as: For a given materials, E, G, and the Pois-
son’s ratio are linked through the relation-
F
τ= N/m2 (5) ship
A E
G= (8)
Shear strain, γ, defined as the extent of rotational 2 (1 + ν)
Dr. Md Jawaid Alam (SRM) 18ECE302T-MEMS Technology February 20, 2023 4 / 13
Stress and strain relationship

Dr. Md Jawaid Alam (SRM) 18ECE302T-MEMS Technology February 20, 2023 5 / 13

Normal and Shera stress

A cube has six faces. Consequently, Based on torque balance, two shear stress
there are 12 possible shear force compo- components acting on two facets but point-
nents—two for each face. ing towards a common edge have the same
magnitude =⇒ τ xy = τyx and so on..
Each pair of shear stress components act-
ing on parallel faces but along the same 1 Normal stress components σ xx , σyy , σzz are
axis have equal magnitude and opposite di- simply noted as T 1 , T 2 , T 3 respectively.
rections for force balance. =⇒ Indepen-
dent shear stress components = six.
2 Shear stress components τyz , τ xz , τ xy are
simply noted as T 4 , T 5 , T 6 respectively.
    
T 1  C11 C12 C13 C14 C15 C16   s1 
 
T  C C22 C23 C24 C25 C26   s2 
 2   21
T 3  C31 C32 C33 C34 C35 C36   s3 
  = 
T 4  C41 C42 C43 C44 C45 C46   s4 
 
T  C C52 C53 C54 C55 C56   s5 
 
 5   51  
T6 C61 C62 C63 C64 C65 C66 s6
(9)
Dr. Md Jawaid Alam (SRM) 18ECE302T-MEMS Technology February 20, 2023 6 / 13
 stress strain relation

T = Cs (10)
Where C is called stiffness matrix.
One can also write:

s = ST (11)

Where S is called compliance matrix.

S = C −1 (12)

Dr. Md Jawaid Alam (SRM) 18ECE302T-MEMS Technology February 20, 2023 7 / 13

Polycrystalline silicon
Comparison of Mechanical Properties of Polysilicon with Other Materials

Dr. Md Jawaid Alam (SRM) 18ECE302T-MEMS Technology February 20, 2023 8 / 13

 Silicon Piezoresistors

Piezoresistance
In general stress σ is a tensor:
A change in electrical resistance of solids h iT
when subjected to stress fields. [σ] = σ xx , σyy , σzz , σ xy , σ xz , σ xz
Doped silicon are piezoresistors (p-type or [π] = Piezoresistive coefficient matrix.
n-type).
Relationship between change of resistance
∆R and stresses σ:

[∆R] = [π] [σ] (13)

Where [∆R] i =
h T
∆R xx , ∆Ryy , ∆Rzz , ∆R xy , ∆R xz , ∆Ryz represents
the change of resistances with corresponding
stress components.
Dr. Md Jawaid Alam (SRM) 18ECE302T-MEMS Technology February 20, 2023 9 / 13
Silicon Piezoresistors – Cont’d

Due to equilibrium condition, there are six

independent stress components: 3 normal
stress components and 3 shearing stress Expanding Eq. (4) result in the following:
 
components ∆R xx = π11 σ xx + π12 σyy + σzz
∆Ryy = π11 σyy + π12 (σ xx + σzz)
Consequently, the piezoresistive coefficient
∆Rzz = π11 σzz + π12 σ xx + σyy
matrix has the components:
∆R xy = π44 σ xy
π11

π12 π12 0 0 0 
 ∆R xz = π44 σ xz
π π11 π12 0 0

0  ∆Ryz = π44 σyz
 12
π π12 π11 0 0 0  Note: Only 3 piezoresistive coefficients
[π] =  12
 0 0 0 π44 0 0  are required; π11 and π12 associated with

 0 0 0 0 π44 0 

normal stresses and π44 with shearing
π44
 
0 0 0 0 0 stresses.
(14)

Dr. Md Jawaid Alam (SRM) 18ECE302T-MEMS Technology February 20, 2023 10 / 13

 Silicon piezoresistors at room temperature

Numerical values of piezoresistive coefficients

∆R
= πL σL + πT σT (15)
R

Dr. Md Jawaid Alam (SRM) 18ECE302T-MEMS Technology February 20, 2023 11 / 13

 Piezoresistive coefficients of p-type silicon

Piezoresistive coefficients of p-type silicon piezorestors in various directions

Reference: Tai-Ran Hsu - MEMS & Microsystems Design and Manufacture-Tata McGraw-Hill Education (2002).

Dr. Md Jawaid Alam (SRM) 18ECE302T-MEMS Technology February 20, 2023 12 / 13

 Example 7.3

Problem statement: Estimate the change of

resistance in Piezoresistor attached to the di-
aphragm of a pressure sensor described in fig-
ure.
Solution: Find the maximum stress at the middle
0.308pa2
of all edges σmax = ∆t2 .
Due to symmetry σL = σT = σmax
As both the stresses are along 100 direction so
πL = πT = 0.02π44 from Table 7.9 for p-type
piezoresistors.
From Table 7.8 π44 = 138.1 × 10−11 Pa− 1
Now ∆R R = πL σL + πT σT = 2 × 0.02π44 σmax =
0.0132 =⇒ 1% change in resistance will be ob-
served. Is it good enough to measure?
Reference: Tai-Ran Hsu - MEMS & Microsystems Design and Manufacture-Tata
McGraw-Hill Education (2002).

Dr. Md Jawaid Alam (SRM) 18ECE302T-MEMS Technology February 20, 2023 13 / 13