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Article history: Machining processes have made technological leaps in achieving ultraprecision material removal and surface
Received 26 February 2020 finishing at the submicrometric scale. At this level of precision, size effects have dominated machining investiga-
Received in revised form 24 March 2020 tions while surface effects have often been overlooked. The majority of micromachining research works are igno-
Accepted 25 March 2020
rant of the potential implications that these phenomena bring as the characteristic length approaches the
Available online 1 April 2020
ultraprecision machining level. In this review, physicochemical and physical surface effects are discussed by ex-
Keywords:
amining the theoretical developments and applications of each phenomenon in machining. These effects include
Microcutting the Rehbinder effect, solid coatings, and extrusion-cutting. Substantial mesoscopic analyses have been performed
Surface effects on metals with the Rehbinder effect and extrusion-cutting but the inherently different material deformation
Chemisorption characteristics in microcutting invite further investigations. While solid coating effects have been reported at
Coatings the microscale, its discovery questions the influence of other inevitably formed surface coatings (i.e. oxide
Diamond turning layers). To these ends, key areas for future research in the microcutting of engineering metals and brittle mate-
Ultraprecision machining rials are proposed in addition to the integration with unavoidable size effects. As machining technology and ma-
terial characterization techniques progress into the nanometric scale, there is a need to rally efforts towards the
embrace of surface phenomena in microcutting.
© 2020 The Authors. Published by Elsevier Ltd. This is an open access article under the CC BY-NC-ND license (http://
creativecommons.org/licenses/by-nc-nd/4.0/).
Contents
1. Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
2. Physicochemical effects . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
2.1. Machining forces and chip flow . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
⁎ Corresponding author.
E-mail address: mpewhao@nus.edu.sg (H. Wang).
https://doi.org/10.1016/j.matdes.2020.108688
0264-1275/© 2020 The Authors. Published by Elsevier Ltd. This is an open access article under the CC BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/).
2 Y.J. Lee, H. Wang / Materials and Design 192 (2020) 108688
removal mechanism (i.e. mechanical–chemical). However, physico- Nonetheless, it is important to acknowledge the various types of physi-
chemical effects that also involve surfactants will be accounted for in cochemical phenomena that have been established in the past for ap-
this paper on the condition of the necessary participation of mechanical preciation and differentiation.
influence. These surfactants adsorb on the workpiece surface and alter The Kramer effect [37] accounts for the emission of exoelectrons
the surface interatomic relationships of the work material that lead to from a freshly produced metal surface and the chemical adsorption of
large differences in macroscopic mechanical properties. oxygen on the surface to produce metal soaps as a product. As a result,
Available works on each applicable effect will be reviewed in this metal ions are removed from the surface and dislocation pile-ups di-
paper to promote the research in this field of micromanufacturing. Sev- minish to enable energetically favorable dislocation egression and the
eral phenomena and theories have been discovered nearly a century change in work hardening rates. Interestingly, the exoelectron phenom-
ago but were mainly accessed through fundamental material character- enon occurs for non-metals as well, such as germanium and silicon
ization in the macroscopic level, including mesoscale manufacturing. In- [38–40], although the investigations were primarily focused on the con-
vestigations on a few surface effects at the microscale have been ductive properties of the materials. The exoelectron emission phenom-
initiated recently, such as the Rehbinder effect, but a variety of surface enon also envisaged the formation of functional surfaces such as
phenomena have yet to be explored in microcutting. Given the limited lubricants and adsorption of paints films [41].
research on surface effects in micromachining, this paper will provide Oxide films have been observed to induce surface hardening as ob-
an overview of the findings to date, which will include the beneficial served in cadmium [42] and zinc [43,44], otherwise known as the Ros-
outcomes in machining, and the research gaps to enhance our under- coe effect. At the same time, polycrystalline metallic films also showed
standing of the phenomena on a fundamental level.
2. Physicochemical effects
a similar influence on the slip deformation characteristics as reported involvement of corrosion or dissolution with certain surfactants may
for gold, iron and chromium films on silver substrates [45]. These two also contribute to the development of stress concentrators on the sur-
types of films appear to be similar in terms of the influence of surface face and the overall decline in mechanical strength, they are considered
films on the mechanical properties of the substrate material based on to be arbitrary in comparison to the Rehbinder effect. In fact, there have
dislocation dynamics. However, they differ from their chemical origins, been several arguments adopting other chemical effects to disprove the
which means that the mechanical response of a metal may be altered in- phenomenological occurrence, such as the dissolution of oxide films on
tentionally or naturally by oxide layer formation. Nonetheless, a surface the surface by surfactant molecules leading to reductions in hardness of
layer is indefinitely present that exhibits different mechanical responses the material [43,54]. However, tests on ionic crystals and gold, which
to material deformation [46]. presumably could not inherit an oxide film, proved that an oxide film
The presence of water in the environment could also lead to a purely was not a prerequisite for the Rehbinder effect [55]. While the Kramer
chemical surface effect as demonstrated on halid crystal, potassium effect and Rehbinder effect share seemingly similar prerequisites,
chloride, where plasticity was enhanced in a humid environment and Ferrante [56] clarified that the Kramer effect was only dependent on
brittleness was exhibited under dry conditions [47,48]. This is known the chemical interaction and not the deformation of the surface. In
as the Joffe effect that could inhibit crack initiation and propagation view of the relatively insignificant number of reports on the other phys-
due to the dissolution of solid surface defects and the subsequent mul- icochemical effects in machining, the Rehbinder effect will be discussed
tiplication of adjacent slip planes for ease in material flow at lower further in the subsequent sections.
stresses [49]. Although these unique surface effects have been discov-
ered for almost a century now, the wealth of literature has not been ap- 2.1. Machining forces and chip flow
plied in the aspects of micromachining apart from the Rehbinder effect.
If not the most intriguing phenomenon, the Rehbinder effect is the Before the advent of ultraprecision machining, investigations on the
most studied physicochemical phenomenon in machining. In the Rehbinder effect were largely carried out on macro- and mesoscopic
1920s, the late Russian researcher, Peter Aleksandrovich Rehbinder, metal cutting with explorational interests in the applications of lubrica-
pioneered the world-renowned marvel named after him. It is an inter- tion during machining. In metal cutting, material is removed through
disciplinary branch of physical chemistry correlating the mechanical chip formation by driving a cutting tool into the workpiece. Machining
treatment of solids with chemical adsorption (chemisorption) [51]. forces are often recorded by a force sensor in laboratories to evaluate
The fundamental definition of the effect can be understood as the reduc- cutting performances. Cutting force reductions, ranging up to 50%, and
tion in strength of solids under the influence of surface-active sub- changes to the chip morphology are the two most commonly observed
stances due to the lowering of energy for free surface generation [52]. results of the Rehbinder effect in machining. Various methods of apply-
This followed Griffith's thermodynamic reasoning for fracture strength, ing surfactants during cutting have been tested, such as the tool-chip in-
which assumes the energy for material failure to be proportional to the terface and the pre-machined workpiece surface. Experiments with the
free surface energy. pre-machined surface are generally preferred due to the distinguishable
The various chemical effects can be easily mistakenly interpreted for effect of the chemisorption phenomenon and avoidance of tool-chip lu-
each other due to the involvement of a surfactant, but the Rehbinder ef- brication effects. Orthogonal grooving serves as the fundamental exper-
fect sets itself apart from the other effects with the obligatory participa- imental approach to demonstrating the Rehbinder effect in machining
tion of stress and physicochemical reversibility [53]. While the with strips of surfactant applied across the workpiece surface [57,58].
Fig. 4. Machining forces in orthogonal grooving of hardened copper and the corresponding chip morphology under the influence of Dykem ink [57].
Y.J. Lee, H. Wang / Materials and Design 192 (2020) 108688 5
Fig. 5. Machining forces in orthogonal grooving of annealed aluminum under the influence of Dykem ink [58].
With a single cut across the workpiece, the machining force graph typ- friction (Fig. 8) and increased the shear angle to produce the character-
ically displays the conspicuous reduction in forces under the Rehbinder istic thinner and homogenously deformed chips.
effect as shown in Figs. 4 and 5, corresponding to the micro- and meso- Kohn [63] asserted the notion of ferric chloride formation from fresh
scale, respectively. metallic surfaces with CCl4 as a surfactant but determined that the
Ductile metal chip flow tended to undergo sinuous–laminar flow shear-failure during chip formation was enhanced due to the energeti-
transitions where chips were reportedly thinner with more conspicuous cally favorable system for stabilized free surface generation at the
serrations attributed to brittle failure under the Rehbinder effect as surfactant-workpiece interface. Moreover, tests applying CCl4 on the
compared to mushroom-like features under conventional conditions. pre-machined surface instead of the tool-chip interface recounted the
This phenomenon has been reported in mesoscale cutting [60] (Fig. 6) Rehbinder effect during machining. A series of controlled shearing
and microscale cutting [57,61] (Fig. 7). However, the drastic change in tests by Kohn [64] showed that CCl4 largely influenced the deformation
chip morphology appears to be more prominent at the micro-level. To in the shear zone as compared to the tool-chip interface that leads to the
date, the precise explanation for the radical differences in chip morphol- reduction in stress resistance. Therefore, the theory for friction-induced
ogy under the Rehbinder effect has not been agreed upon. changes in chip morphology was voided.
Usui et al. [65] reiterated the penetration of surfactant molecules
into micro-cracks that increased the stress concentration to yield closely
2.2. Deformation mechanism packed shear planes and a uniformly distributed flow (i.e. laminar chip
formation). Two new criteria were identified for the manifestation of
Various perspectives of the phenomenological cutting occurrences the Rehbinder effect — (1) compressive stresses on the shearing action
have been discussed over the years as illustrated in Fig. 8. The theoreti- during tensile and torsion testing; and (2) the presence of superficial
cal development began with Rehbinder's initial proposition of the pre- micro-cracks for surfactant molecule penetration. However, Barlow
ventive cyclic rewelding and refracturing of surface cracks on the [66] rejected the claim of surfactant penetration with the autoradio-
stressed material. The infiltration of surface-active media into micro- graphic records of the copper chips formed by cutting, which showed
cracks enhanced crack propagation and eventually led to material fail- no gradient in the presence of surfactant molecules. Instead, Barlow ex-
ure. Rehbinder [52] explained that the surface-active substances pene- plained the Rehbinder effect with a similar explanation prescribed by
trate microscopic cracks that were formed during deformation, which Kohn [63] as an energetically favorable system for accelerated disloca-
created a lubricating effect on the slip planes such that new surfaces tion flow.
could be generated with ease. This resulted in the losses of mechanical Dislocation emission from the surface and slippage of atoms demand
yield strength. However, Shaw [62] argued that the surfactants could the disconnection of interatomic bonds, which would leave the system
react with the work material to form products that raised tool-chip in a high energy state with excess electron charges on the surface.
Fig. 6. Copper chip morphology (a) without and (b) with surfactant at a cutting depth of 50 μm where folding and fracture are denoted by yellow and red arrows [59].
6 Y.J. Lee, H. Wang / Materials and Design 192 (2020) 108688
Fig. 7. Copper chip morphology (a–c) without ink and (d–f) with ink at a cutting depth of 10 μm [61].
Hence, the resistance to interatomic failure would be intuitively high A hiatus in the research work on the Rehbinder effect followed be-
along the shear zone. However, a case of an electronegative surfactant tween the studies on mesoscopic machining during the mid-1900s
species accepting the excess charges on the surface would ease the and the revisit of the phenomenon by Yeung et al. [60] in 2015. Their
slip step formation and interatomic fracture resistance (Fig. 8). During works were mainly focused on developing the plastic buckling theory
cutting, chemically active atoms will dominate the free surface of the during chip formation [69]. To advance the understanding of the
chip to promote chemisorption and slip formation [67]. Rehbinder and Rehbinder effect, Chaudhari et al. [57] resumed investigations in 2018
Shchukin [53] added that the intermolecular forces of attraction be- on the chip embrittlement observations during ultraprecision machin-
tween the substrate and the surfactant reduce the interatomic bonding ing. They proposed the correlation between the physicochemical phe-
forces within the bulk substrate material. In other words, the inter- nomenon and the dislocation density in each grain as depicted in Fig. 8.
atomic bond lengths in the workpiece surface layer increase in the pres- The sum of the statistically stored and geometrically necessary dislo-
ence of surfactant molecules, which lowers the forces required to break cations makes up the total dislocation network, which is inversely pro-
the bonds and ensure the equilibrium of states. Thereby, free surface portional to the grain size in accordance with the Hall-Petch
generation is promoted at lower energy costs [68]. relationship [70,71]. In other words, large grains in the annealed state
Y.J. Lee, H. Wang / Materials and Design 192 (2020) 108688 7
Fig. 8. Advancement in theories of the Rehbinder effect in microcutting (t0 = undeformed chip thickness; vc = cutting speed).
typically contained lower dislocation densities and is capable of sustain- enhanced emission of dislocations in the plastic zone of the crack tip
ing higher strains prior to failure, explaining the high plasticity in the moves along the slip plane of the grain and begins to pile up at pinning
chips with folding features. On the flipside, hardened work materials centers and entangles with dislocations emitted from the tool-tip. This
with smaller grains contain higher dislocation densities, which quickly results in a quicker strain localization within the chip and produces
lead to dislocation pile-ups and strain localization before finally failing thinner deformed chips with serration-like microfeatures on the free
by ductile-failure [72]. It was explained that when a surface-active me- surface of the chip. Conversely, the conventional chip formation process
dium is present, the energetically favorable bond between the work- without the surface-active medium would only comprise of a plastic
piece and medium creates a barrier to the egress of dislocation zone that initiates from the tool-tip and eventually forms bulges on
motion, which then causes the further piling of dislocations and the the free surface of the chip.
strain localized ductile failure. Thus, explaining the cause of the embrit-
tlement traits on the free surface of chips. Rehbinder and Shcukin [53] 2.3. Effect of grain size
recognized the possibility of this secondary effect due to the accelerated
flow of deformation and the formation of disoriented textures [52]. With the decrease in machining length scale, grain size effects must
Therefore, the Rehbinder effect can be understood to manifest in two be given the appropriate attention for polycrystalline materials such as
phases: (1) enhanced mobility of dislocations at the surface due to the varying grain sizes, crystallographic orientations and grain mechanical
intermolecular attraction between the surfactant and the workpiece properties [76–78]. On the other hand, the grain size influences the
that promotes the dislodging of workpiece atoms by slip, which leads magnitude of the Rehbinder effect due to the differences in dislocation
to (2) the pile-up of intragranular dislocations that result in strain local- density and rate hardening properties [79]. Yeung et al. [60] and
ization and the eventual embrittlement of the material. In ultraprecision Viswanathan et al. [58] claimed the reduction in the influence of the
microcutting, the stress zone can be explained to initiate from two ends Rehbinder effect on hardened copper and hardened aluminum, which
of the shear plane [73] under the influence of the surface-active medium consistently produced laminar chip morphology even without applica-
as compared to the presumptuous stress zone initiated from the tool-tip tion of a surfactant. These hardened materials were pre-strained and
[74,75]. Fig. 9 demonstrates a micro-crack that has evolved on the free contained fine grains. Conversely, Chaudhari et al. [57] reported cutting
surface of the chip during deformation along the shear plane and force reductions to varying degrees in the microcutting of annealed cop-
under the influence of a surfactant. As the micro-crack propagates, the per, hardened copper, annealed aluminum (AA-6061-T6) and rapidly
solidified aluminum (RSA-6061).
Force reductions during microcutting of copper with different grain
sizes and the application of Dykem ink (Fig. 10) testify the Rehbinder ef-
fect for coarse and fine grains. One of the major difference between the
investigations was the machining length scale. The Rehbinder effect was
not observable on the pre-strained materials at larger cutting depths
(50 μm) but had a clear influence on the machining forces at the micro-
scale where the cutting depth (10 μm) is of the same magnitude or even
smaller than the work material grain size. Undoubtedly, the differences
were attributed to the grain sizes relative to the cutting depth.
The relationship between the grain size and the cutting depth is clas-
sified as the grain size effect under the umbrella of size effects. A work
material may be considered homogeneous when the grain size is rela-
tively smaller than the cutting depth, which is the commonly assumed
material state in macroscopic cutting [76]. Hence, the study on the ef-
fects of grain size on machinability at the macroscale is rarely studied,
besides the fact that materials with smaller grains often exhibit tougher
and stronger properties [80–82]. In microcutting, crystallographic con-
stitutive laws for plastic deformation by slipping of atoms are invoked
when the grain size is relatively larger than the cutting depth [83,84].
Mesoscale cutting of a pre-strained material assumes the poise of
Fig. 9. Theorized sequence of events of the Rehbinder effect during chip formation. macromachining where the work material is implicitly homogeneous
8 Y.J. Lee, H. Wang / Materials and Design 192 (2020) 108688
Fig. 10. Machining force differences with respect to undeformed chip thickness, to, under the influence of the Rehbinder effect: (a) hardened copper; and (b) annealed copper [57].
due to the small grain sizes relative to the cutting depth. Under this con- corresponds to a change in the shear angle and shortening of the shear
dition, the manifestation of the Rehbinder effect appears to be negligible plane, which would indicate a shift in the resultant force vector and fric-
but does not warrant the conclusion that small grain sizes reduce the tion angle. This could mistakenly lead to the assumption that the tool-
physicochemical influence. Minute force reductions could be observed chip friction was reduced but, in reality, the fundamental mechanism
in the microcutting of RSA-6061 that has nanometric grains [57]. Sim- causing the difference initiated from the change in material flow.
ply, the fundamental mechanism of the Rehbinder effect on the chip for- Thus, the results could be indeed a product of the Rehbinder effect
mation process seems to depend on crystallographic relationships (e.g. with chip embrittlement due to shear localization.
slip system activation, dislocation motion, etc.). However, it is also im- Various surfactants that have been reported comprise household
portant to note that the weakly manifested Rehbinder effect during cut- media and reactive chemicals with the common ability to bond with
ting of RSA-6061 may not be reasoned with single crystal plasticity due the work materials by adhesion, which has been determined to be a
to the different deformation mechanism of nano-grained polycrystals. necessary criterion for the manifestation of the Rehbinder effect [59].
The shearing action largely occurs at grain boundaries instead of However, the governing criterion of the surfactant to induce the
intragrain slip deformation when dealing with nano-grained materials Rehbinder effect has not been confirmed. On one hand, highly viscous
[85]. liquids appear to promote greater force reductions with the acclaimed
unnecessary penetration of surfactants into micro-voids on the pre-
2.4. Surface-active media machined surface, assuming that the results presented by Kaneeda
[89] were under the influence of the Rehbinder effect. On the other
Little discussion revolves around the correlation between the surfac- hand, chemical activity of these surfactants on the work material is gen-
tant and the adsorbent material. The studies on the chemisorption phe- erally agreed to be an essential initiator for the enhanced machinability
nomenon shifted from organic acids to liquid metals in the 1970s, which [90], which requires the infiltration of surface-active molecules into
is otherwise termed as the liquid-metal embrittlement (LME) phenom- cracks. Regardless, Shchukin et al. [51] stated that there will always be
enon. Its importance grew after the reports on LME-induced damage by a medium containing the appropriate chemical composition and struc-
gallium in an aircraft, and molten zinc that accelerated the failure of ture to induce the strength-reduction in any type of solid [53].
high-pressure stainless steel pipes during the Flixborough disaster The application of liquids on the pre-machined surface also presents
[86]. The principles of the mechanism closely follow the Rehbinder ef- an additional case of surfactant hardening and high resistance viscous
fect, with the use of a liquid-metal as the surface-active medium to tem- flow during cutting, which may cause complications during the inter-
porarily modify the material properties. Lynch [87] described the pretation of the Rehbinder effect. For example, the physicochemical
process as an “adsorption-induced dislocation emission” process that phenomenon does not occur with liquid Dykem marker ink on calcium
facilitates dislocation nucleation and motion away from the crack tip fluoride (CaF2) but beneficial implications on the material machinability
under applied stresses. However, the LME phenomenon will not be have been reported with solidified Dykem ink [91]. This phenomenon
discussed in detail due to the obvious challenges in controlling the pro- will be discussed in subsequent sections on physical effects.
cess for application. Elevated temperatures to achieve melts could in-
duce additional factors of atomic excitation to alter material 3. Physical effects
properties. Moreover, traces of the liquid-metal were reportedly diffi-
cult to remove from the surface [88]. 3.1. Solid coatings
Various surface-active media have been tested over the years such as
oleic acid, carbon tetrachloride (CCl4), and marker ink. Table 1 summa- Coatings have been adopted in micromachining with the main aims
rizes the surfactants, work materials, cutting conditions and the exper- of reducing tool wear by tool coating [92–97] and workpiece coating
imental findings. These include the work by Kaneeda [89] despite the [98–100]. It is sensible to prevent tool wear by implementing a protec-
effort to propose an alternate mechanism of friction reduction along tive coating on the tool. However, workpiece coating applications tend
the tool-chip interface in place of the Rehbinder effect. The notion was to replace the actual material with a de facto modified surface that can
merely supported by a descriptive hypothesis that lacked experimental only be accepted on the conditional acceptance of an altered final ma-
evidence. It was acclaimed that the surfactant on the pre-machined sur- chined product surface. For example, electroless nickel plated dies
face could lower the friction load at the tool-chip interface. Although the have been found to be functional and diamond-turnable [101], which
statement is not inaccurate, it is definitely not the direct result of lubri- essentially benefits the production of hard optical surfaces and reduces
cant application. The evidently thinner deformed chip thickness directly diamond tool wear rates [102,103]. However, the ideal modus operandi
Y.J. Lee, H. Wang / Materials and Design 192 (2020) 108688 9
Table 1
Observations of the Rehbinder effect on various metals.
Pb 25.4 127 15 CCl4, H2O, C6H6 Cutting forces: 0%, 25%, 37.5% [62]
B1112 Steel 146.05 254 30 CCl4 Cutting energy [62]
B1213 Steel 25.4 127 15 H2O, CCl4 Cutting forces: 22%, 49% [62]
Low carbon 12.7 0 CCl4 Force curve area: 10% [65]
steel
Hot rolled 12.7 127 20 CCl4, C2H3Cl3, H2O Cutting forces [65]
steel
Armco Fe 120 50 0 C3H8O, G1, G3, I1 Cutting forces: 0%, 71%, 67%, 75% [59]
AA-1100 120 50 0 Glue1, Ink 1, C3H8O, C2H5OH, C4H9OH, C3H6O, H2O Cutting forces: 50%, 42%, 78%, 74%, 77%, 5%, 0% [59]
120 50 45 Glue 1, Glue 2, Ink 1, C3H8O, P&G soap, Wax, Cutting forces: 37.5%, 17%, 44%, 50%, 41%, 33%, 0% [59]
distilled water
Al (H14) 120 50 0 Glue 1, C3H8O, Wax, C7H8, distilled H2O Cutting forces: 9%, 29%, 29%, 0%, 0% [59]
H-Cu 50 10 0 Ink 2 Cutting forces and deformed chip thickness: 50% [57]
H-OFHC Cu 25.2 50 0 Ink 2 No effect [60]
AA-6061-T6 50 10 0 Ink 2 Cutting forces: 30% [57]
RSA-6061 50 10 0 Ink 2 Cutting forces: 30% [57]
Al-1050-H24 8800 30 0 Mineral oil, C18H36O2, C18H34O2, Graphite, MoS2 Cutting forces: 58%, 62%, 66%, 70%, 72%, respectively. Deformed chip [89]
thickness with segmentation with surfactant
A-Cu 120 50 0 Glue 1, Glue 2, Glue 3, Ink 1, Ink 2, Ink 3, C3H8O, Cutting forces: 60%, 44%, 62%, 37.5%, 44%, 39%, 0%, 0%, 0%, 0% [59]
C2H5OH, C4H9OH, C6H12O2 Deformed chip thickness with segmented features
120 50 45 Glue 1, Glue 3, Ink 1, P&G soap, C3H8O Cutting forces: 17%, 20%, 13%, 9%, 0% [59]
50 10 0 Ink 2 Cutting forces and deformed chip thickness: 50% [57]
Cu 254 254 20 Mineral oil, C18H34O2, CCl4 Increasing in concentration of crack formation on the free surface of chips in [65]
the respective order
Cu (99.3%) 1422 102 15 CCl4 Cutting forces: 21% [66]
A-OFHC Cu 25.2 50 0 Ink 2 Cutting force: N50% [60]
Pb: lead, Fe: iron, AA: annealed aluminum, RSA: rapidly solidified aluminum, Al: aluminum, H-Cu: hardened copper, H-OFHC Cu: hardened oxygen-free high conductivity copper, A-OFHC
Cu: annealed oxgyen free high conductivity copper, A-Cu: Annealed copper, CCL4: carbon tetrachloride, H2O: water, C6H6: benzene, C3H8O: isopropyl alcohol, C2H5OH: ethanol, C4H9OH: 1-
butanol, C3H6O: acetone, Glue 1: Scotch restickable glue stick, Glue 2: Scotch super glue gel, Glue 3: Gorilla super glue, Ink 1: Sharpie permanent marker, Ink 2: Dykem permanent marker,
Ink 3: Paper Mate liquid paper correction fluid, C7H8: toulene, C18H36O2: stearic acid, C18H34O2: oleic acid, MoS2: Molybdenum disulfide, C6H12O2: diacetone alcohol, P&G soap: Procter &
Gamble soap.
of the coating technique should produce a finished product without its significant delay in the DBT of CaF2 during orthogonal taper grooving
coating layer. In this aspect, investigations on microcutting at a depth (Fig. 11). Taper grooving is a commonly adopted method for determin-
that removes the actual work material while being “sandwiched” by ing the critical uncut chip thickness (i.e. ductile–brittle transition) dur-
the coating layer has never been reported, until recently. ing machining of brittle single crystal materials [107–109].
The potential influence of the Rehbinder effect may be postulated
3.1.1. Ductile–brittle transition with the use of Dykem ink, but the purely mechanical influence of the
Lee et al. [91] uncovered the use of Dykem marker ink as a solidified coating was described by Lee et al. [91] in Vickers microhardness testing
coating film to enhance the machinability of brittle calcium fluoride and a coating-thickness-dependency on the DBT as shown in Fig. 12. It
(CaF2) single crystals. The machinability of brittle materials is often de- was described that chemisorption effects should influence the mode
termined by the cutting depth-dependent ductile–brittle transition of cutting (i.e. ductile or brittle) on the conditional presence of the sur-
(DBT) [104]. Brittle cracks appear on the machined surface within the face coating, but the fact that brittle-mode cutting manifested when
brittle-regime at large cutting depths, while defect-free surfaces can microcutting with a thin layer of coating signaled a physical mechanism
be achieved at smaller cutting depths in the ductile-regime [105,106]. to enhance ductile-mode cutting. Close examination of Fig. 12 reveals
It is apparent that the application of the solidified film resulted in a that microcracks begin to re-manifest on the machined surface as the
Fig. 11. Optical microscopic top view of plunge-cut microgrooves on CaF2 single crystal and the corresponding ductile–brittle transitions: (a) without coating; and (b) with coating [91].
10 Y.J. Lee, H. Wang / Materials and Design 192 (2020) 108688
Fig. 14. (a) Overview schematic of the experimental setup for scratching under hydrostatic pressure; (b) close up view of the apparatus within the pressurized chamber: 1 – pressure
vessel, 2 – pressure intake, 3 – turntable, 4 – angular bearing, 5 – Bridgman seal, 6 – Sleeve, 7 – Bridgman seal, 8 – lid, 9 – bolts for securing, 10 – sample, 11 – tool holder, 12 – tool
holder fulcrum, 13 – tool, 14 – spring, and 15 – spring adjuster [121].
chamber, the stresses on the crack tip will be balanced by the surround- distortion was observed with a 45% decrease in subsurface damage
ing pressure and the enhancement in machinability would be voided. thickness [91]. Cross-sectional transmission electron microscopic
Fig. 15 illustrates the differences in the effects of pressurized fluids on (TEM) imaging of the machined subsurface (Fig. 16) depicts the degree
cracks initiating from the surface and the subsurface. of distortion in the subsurface. An obvious contrast in the structure of
Phase transformations can also occur under compressive stresses as the bulk material and the immediate subsurface revealed the decrease
observed in diamond [132], silicon [133], germanium [134], and quartz in thickness of the damaged layer [149]. Controlled slip deformation in
[135]. If adopted correctly, these contact loading conditions can support the subsurface was suggested to occur under the influence of the coat-
the understanding of wear, friction and erosion, particularly in cutting, ing as observed by the evident rows of atoms in the high-resolution
polishing and indentation testing [136]. These physical changes can be TEM (HRTEM) images in Fig. 16 that correspond to the ð100Þ½011 slip
beneficial to the microcutting process in view of the material softening direction. Fast Fourier transform (FFT) imaging confirms the disorienta-
nature such as the transition of silicon (Si) single crystals to the Si-II tion of the lattice structure under conventional cutting with the inade-
phase, which is relatively ductile and transforms into an amorphous quate order of diffraction spots in the HRTEM image [150–153], while
state (α-Si) upon release of pressure [123,137]. Microcutting of Si with the lattice structure remained in alignment with the original crystal
negative rake angled tools demonstrate the pressure-dependent degree orientation.
of phase transformation after machining [138,139]. Typically, a larger Lee et al. [91] proposed that the surface coating induced a degree of
negative rake angle tends to induce higher resultant machining forces resistance to deformation that creates a reaction force on the work ma-
[140], corresponding to larger contact pressure and consequently a terial and stabilizes the material removal process. The controlled resul-
thicker amorphized Si layer on the machined surface. tant forces reduced the rotational deformation in the subsurface lattice
Yoshino et al. [123] agreed that the pressures adopted in their cham- to promote plastic deformation by slip. According to Bishop and Hill
ber were insignificant in megapascals as compared to the pressure nec- [154], the material stress state during incremental strain determines
essary to induce phase transformations on Si in gigapascals, but the maximum plastic work done during deformation. The plastic work
suggested that the hydraulic pressures assisted the phase transforma- done during deformation is defined in Eqs. (3) and (4) [155]:
tion process. It is important to remember that the phase transformation
process during deformation of silicon is also strongly dependent on the dW ¼ σdεw ð3Þ
rates of loading and unloading besides the effective contact pressure
[141–144]. dΓ
σ¼ τc ¼ Mτ c ð4Þ
dεw
3.1.3. Subsurface damage
Differences in the topography of machined surface quality indefi- where σ is the equivalent stress state, τc is the critical resolved shear
nitely affect the degree of damage in the subsurface regions. The forces stress, dεw is the macroscopic effective strain, Γ is the total dislocation
induced to mechanically remove material by shear deformation extend shear strain, and M is the crystal orientation-dependent Taylor factor.
beyond the evacuated material by chip formation, into the bulk of the The deviation in shear angle from the direction of maximum shear
work material. On one hand, the increase in hydrostatic pressure may stress (45° to the cutting direction), ψ, affects the effective Taylor factor
seem beneficial for the ductile-mode cutting process in relation to (M' = M/cos 2ψ) [156]. While the Taylor factor corresponds to the shear
phase transformations, but on the other hand, excessive pressure may strength of the material, it also provides an indication of the direction of
result in unnecessary high-pressure phase transformed subsurface the main shearing action during cutting based on the minimum work
damage on brittle materials such as silicon [145,146] and germanium principle, such that shear banding occurs at the minimal Taylor factor
[147]. Removal of the damaged layer is a challenging process even [157]. In crystal plasticity, an increment of strain imposed on the crystal
with polishing, which exhibits significantly milder loading conditions corresponds to the shear on independent slip systems but the preferred
for mechanical material removal [148]. slip system during deformation is determined by the minimum sum of
Fortunately, phase transformation during cutting is not a generic oc- shear on the system [157]. The cumulative shear then influences the lat-
currence in machining as observed in lattice deformation by slip and ro- tice rotation tensor, which alters the crystal orientation during deforma-
tation in CaF2 [110]. When cutting CaF2 with the surface coating, lattice tion. Without the influence of the surface constraint, the shear-
12 Y.J. Lee, H. Wang / Materials and Design 192 (2020) 108688
Fig. 15. Illustrations of pressurized fluid on the origins of defects: (a) in the subsurface; and (b) on the surface [121].
Y.J. Lee, H. Wang / Materials and Design 192 (2020) 108688 13
Fig. 16. Cross-sectional transmission electron microscopic (XTEM) image comparison of the machined subsurface, high-resolution TEM (HRTEM) of each location marked by red boxes in
the XTEM images, and fast Fourier transform (FFT) analysis of each HRTEM image: (a) without coating; (b) with coating [91].
dependent lattice rotation tensor varies according to the activated slip suppress the stress intensity factor for crack propagation [162], it can
system resulting in the uncontrollable crystal distortion in the ma- also change the material flow and the resultant machined surface qual-
chined subsurface. However, due to the control of the resultant forces ity [163].
and the shear angle under the constraint of an external pressure [91], Fig. 17 illustrates the different material flow types under the influ-
the effective Taylor factor would remain relatively constant such that ence of the rake angle. Conventional cutting conditions involve shearing
the preferred slip system during deformation remains unchanged ac- of the work material as the chip is formed and displaced upwards. As the
cording to the minimum sum of shear on the system. Thus, the subsur- rake angle becomes increasingly negative, material removal by extru-
face deformation undergoes shearing along a consistent direction and sion occurs such that a stagnation point evolves, and the final machined
subsurface distortion may be reduced. surface comprises a fraction of deformed material that was not evacu-
ated through the chip. Further increase in the negativity of the rake
3.2. Machine tool design angle leads to ploughing and rubbing where the respective upheaval
and elastic deformation of the material occurs and produces scratches
Beside surface films and pressurized chambers to intentionally mod- or grooves, while the material is not physically removed [164]. There-
ify the material response during microcutting, tool modifications can fore, the changes in the material flow mechanism limit the extensive
also induce a similar compressive surface effect. Conventionally, ma- use of negative rake angled tools to induce the necessary compressive
chine tool modifications include changes in the cutting tool geometry pressures in the work material.
and chip breakers. Negative rake angled cutting tools are classic exam- Although the change in the negative rake angle of the cutting tool
ples that are well established to enable ductile-mode cutting of brittle presents a familiar influence on compressive pressure and material
substances due to the increase in compressive pressure as observed in flow, it can only be considered as a machining parametric condition in-
macroscopic drilling of rocks [158] and precision grinding [159–161]. stead of a surface effect. Fortunately, the change in the negative rake
While an excessively large negative rake angle theoretically increases angle is not the only modification in tool design to induce compressive
the compressive pressure into the work material from the surface to pressures.
14 Y.J. Lee, H. Wang / Materials and Design 192 (2020) 108688
Fig. 17. Material deformation mechanisms under varying effective rake angles: (a) shearing, (b) extrusion, (c) ploughing, and (d) rubbing [20].
3.2.1. Extrusion-cutting microstructural production by varying the shear strain and deformation
In 1975, a unique method of material removal was proposed by rates [174,175], as described in Fig. 19 for copper.
Akiyama et al. [165] involving a constraining upper plate above the
pre-machined work material surface. In this condition, work material 3.2.2. Shear strain theory
flows through the defined gap between the tool and the upper bound- While the production of UFG materials with this innovative method
ary to enable control of the shear angle (ϕ) and the chip compression is not of importance to this paper, the cutting mechanics involved with
ratio (λ), which is the ratio between the deformed chip thickness (tc) this constraint can be considered to be an important surface effect in
over the undeformed chip thickness (t0). Fig. 18 illustrates the machining to control the shear directions and deformation history
constrained cutting process where the constraint is position ahead of [176]. This novel idea was coined as “extrusion-cutting” in 1976 by De
the cutting tool on the pre-machined surface and leaves a gap between Chiffre [177], who elaborated the geometrical relationship between
for chip flow, dictating the deformed chip thickness. the chip compression ratio and the shear strain in the primary deforma-
The innovation has since been adopted as an advanced technique to tion zone during cutting. The shear strain along the shear plane in metal
overcome challenges in the formation of materials with ultrafine- cutting was defined by Merchant [178,179] in Eq. (5), based on the
grained (UFG) microstructures. These nano-grained materials were shear angle that can be determined from the chip compression ratio in
conventionally attained through severe plastic deformation (SPD) tech- Eq. (6). Over the years of research in metal cutting, discrepancies in
niques such as equal channel angular pressing (ECAP) [167–169], tubu- Merchant's prediction of shear angles have often been reported such
lar channel angular pressing (TCAP) [170,171] and high-pressure as the disregard for strain hardening and thermal softening effects.
torsion (HPT) [172,173]. Unfortunately, these conventional methods However, Akiyama et al. [165] demonstrated that Merchant's argument
were limited in terms of the strain rates and the number of deformation holds for the minimum energy principle when the corresponding shear
passes to achieve the desired strains and microstructure [166]. The SPD
under constrained machining has greatly diversified the types of
Fig. 19. Microstructure map for deformed copper under varying severe plastic
Fig. 18. Illustration of the constrained cutting process [166]. deformation conditions [181].
Y.J. Lee, H. Wang / Materials and Design 192 (2020) 108688 15
cosα
ϕ ¼ tan−1 ð6Þ
λ− sinα
λ 1
γ¼ þ −2 tanα ð7Þ
cosα λ cosα
In 2015, Cai et al. [182] proposed that the major influence of the con-
straint was in the deviation of material flow by an angle χ, as depicted in
Fig. 20. This was based on mesoscale cutting tests (t0 = 200 μm) with
high speed imaging and digital image correlation shown in Fig. 21. By
considering the trigonometric relations, the shear strain during defor-
mation under extrusion-cutting can then be revised to Eq. (8) [182].
When χ = 0, Eq. (8) is simplified to Eq. (7) to describe the strain in con-
ventional machining.
cosα p λ 1þm
γ¼ ð5Þ ¼ þ −ð2 þ mÞ tanα−m tanβ ð9Þ
sinϕ cosðϕ−α Þ k cosα λ cosα
Fig. 21. Particle image velocimetry (PIV) analysis of chip formation during extrusion-cutting of lead: (a) high-speed imaging; (b) strain rate field; (c) strain rate along material flow path a-
b-c-d; and (d) strain along a-b-c-d [176].
16 Y.J. Lee, H. Wang / Materials and Design 192 (2020) 108688
where k is the shear flow stress, α is the tool rake angle, β is the friction Sagapuram et al. [193] described conventional shear banding as a
angle, and m is a friction factor. In the cutting of 63% Cu-brass, De Chiffre two-phase process of initiation and sliding, where the chip weakens
[185] acclaimed that the chip compression ratio should be 1.5 to achieve under the initial phase and undergoes severe plastic strain under slid-
the lowest cutting forces, which was consistent with his previous work ing. However, the implementation of the modified tool demonstrated
on wax (λ = 1.414) [177]. The minimum extrusion pressure was sug- effective capabilities to suppress the secondary plastic strain and unsta-
gested to occur when λ = (1 + m)1/2, independent of the rake angle. ble chip morphology of Mg and Ti alloys to produce continuous chips as
Here, m is assumed to be in relation to the friction angle (m = cos 2β). shown in Fig. 23 [188]. The geometric flow constraint determines the
shear angle, which influences the second phase sliding velocity (vs) in
3.2.3. Chip formation Eq. (10) [193], where vc is the cutting speed.
With respect to cutting, the chip morphology and microstructure are
often employed as indicators of the machining performance. Moreover, vs cosα
≈ ð10Þ
the flow of material during its removal is correlated to the plastic strains vc cosϕ
and residual stresses on the machined surface [181]. According to
Eq. (8), an increase in the chip compression ratio raises the shear strain It was suggested that the dynamic recrystallization of the chips can
within the chip, which results in the hardening of the material. The be controlled by varying the cutting speed, such that a relatively lower
hardness corresponds with the deformed microstructure shown in vs can achieve ultrafine equiaxed nanograins. However, the critical pa-
Fig. 22, where relatively larger and elongated grains can be observed rameter to suppress shear banding remains as the chip compression
at lower strain levels (λ = 2.2) and the refinement of nano-sized grains ratio, which dictates the shear strain and increases the sliding velocity
(~250 nm) evolve under larger deformation (λ = 11) [186]. An upper within the chip. However, as the chip compression ratio progresses fur-
limit on the chip compression ratio is defined where the free surface is ther down (λ b 1), a complex extrusion process manifests where mate-
no longer in contact with the constrain during cutting and is material rial flow stagnation at the tool-tip occurs [187]. This appears to be
dependent. similar to the observed material flow when using a large negative rake
Conversely, material flow transits to an extrusion process that also angled tool to induce ploughing. While this notion may be true, the pre-
exhibits large strains at significantly small ratios (λ b 1) [187]. sented test results by Guo et al. [187] revealed the non-rigidity of the
Sagapuram et al. [188] experimented with magnesium alloy MG constraining tool (Fig. 24), which questions the accuracy of the de-
AZ31B and titanium alloy Ti-6Al-4V and determined that the optimal scribed material flow.
chip compression ratio for each material were in the lower range of Understandably, the reduction in λ inadvertently increases the shear
0.7 and 0.6, respectively, for the suppression of shear banding in the angle such that the direction of the shear force approaches the thrust
chips. Generic chip morphologies can be categorized into three groups force (i.e. perpendicular to the cutting direction) and leads to the in-
with different mechanisms to initiate unstable flow, namely segmenta- crease in thrust force, which potentially causes the deformation of the
tion, vortex-like flow, and shear banding. This unstable cyclic fluctua- constraint. The disregard of a rigid constraint simply suggests an addi-
tion of cutting force and shear angle during shear banding can cause tional degree of freedom for material flow, which could cause instabil-
high-frequency multimode tool-tip vibrations that are detrimental to ities during cutting manifesting as the aforementioned complex
the accuracy of ultraprecision machining [189]. Hence, the suppression extrusion process. Nonetheless, the fundamental theory of the con-
of shear banding would be beneficial for improving surface quality and straint still stands where the increase in flow resistance and material
tool wear caused by tool-tip vibrations [190–192]. separation corresponds to a substantial amount of cutting energy to
Fig. 22. Transmission electron microscopic (TEM) and selective area diffraction (SAD) imaging of OFHC copper under different compression conditions: (a) λ = 2.2; (b) λ = 4.3; (c) λ =
7.4; and (d) λ = 11 [186].
Y.J. Lee, H. Wang / Materials and Design 192 (2020) 108688 17
Fig. 23. Continuous chip formation of (a) Mg AZ31B and (b) Ti-6Al-4V with the associated homogenous microstructure [188].
support the deformation of the subsurface. Therefore, a critical com- nano-level has been simulated to understand the material flow dynam-
pression ratio exists to achieve the optimal machining conditions for su- ics at the atomic level. Uezaki et al. [194] investigated the constrained
perior surface finishing as demonstrated in Fig. 25. cutting method for nanometric cutting of aluminum single crystal in
molecular dynamic (MD) simulations and reported the increase in ma-
3.2.4. Constrained micro/nano-cutting terial yield strength during cutting with the constraint. In theory, the
To date, investigations on extrusion-cutting have been limited to material mechanical properties should remain unchanged under both
mesoscale cutting with no engagement with the microscale. Theoreti- cutting conditions, but the resultant stresses applied in the cutting
cally, the concepts established in by De Chiffre [177] and Cai et al. zone can be directed along the shear plane to depict the higher material
[182] can apply to the microscale just as classical machining theories strength under the constrained configuration.
are often adopted to elucidate microcutting phenomenon. Fig. 26 illustrates the increase in hydrostatic stresses under the pro-
With the advanced computational power and establishment of in- posed tool (i.e. extrusion-cutting). The stabilization of material flow
teratomic potentials, modelling of extrusion-cutting in the micro/ stress enabled the distinct activation of slip planes under extrusion-
Fig. 24. Particle image velocimetry (PIV) in-situ analysis of chip formation during extrusion-cutting of OFHC copper (H04) with high-speed imaging, strain rate field, and strain field
measurement, from top to bottom [187].
18 Y.J. Lee, H. Wang / Materials and Design 192 (2020) 108688
Fig. 25. Scanning electron microscope images of the machined surfaces under different constraining conditions [187].
cutting, while multiple narrow slips systems were reported under con- scale. Considerations for geometrical surface effects can be particularly
ventional conditions [194]. This is synonymous to the analysis with useful in the post-processing of trending additive manufacturing appli-
solid coatings on CaF2. Other benefits of the modified tool included re- cations where fabricated metal parts arrive with periodic features in the
duced burr formation as observed by the absence of an additional microscale such as rippling effects [195,196], balling effects [197,198]
layer of atoms above the initial workpiece surface plane in Fig. 26(a). and stair effects [199–201].
This is suspected to be a result of the constraint geometry that physically While encompassing these attributes, an emphasis should be made
restricts the burr formation and not the representative suppression of on the present lack of research development at the microscale, which
plastic flow. While MD simulations are effective in illustrating the ef-
fects of the extrusion-cutting method on the interatomic relations and
slip system activation, the modelling length scale remains far from the
experimental capabilities.
The classification of extrusion-cutting as a novel machining innova-
tion in the ranks of ultrasonic vibration-assisted machining and cryo-
genic cutting remains unclear given the relatively few investigations
on this unorthodox methodology. The idea of extrusion-cutting as a sur-
face effect has not been explored but can be categorized as one of the
physical influences. The theories describing the cutting principles over
the last 35 years can be used to analyze the critical problems of surface
films. On one hand, the constraint in extrusion-cutting is assumed to be
a rigid body but, on the other hand, a coating is deformable, which adds
on to the set of parameters for investigation.
Fig. 28. Scanning electron microscope images of the machined surface quality on annealed copper (t0 = 10 μm, vc = 50 mm/min) [57].
physiochemical relationships, but has been mainly reported to be due to Although Rehbinder discouraged the association of WGL model with
irradiation damage [221]. the hypothesis for reduction in surface energy, Westwood et al. [227]
An adsorption-locking phenomenon was proposed by Westwood coined the physicochemical occurrences in both metals and ionic crys-
[55] where the adsorbate pins half-loop surface sources of dislocation tals as chemomechanical effects, which can be defined as the observed
due to the interatomic bonds between the adsorbate molecules and differences in the strength of solids in different solution environments
high-energy sites of dislocation emergence, particularly in lithium fluo- under the same loading conditions [228]. To this date, there lacks re-
ride (LiF). Fig. 29 depicts the proposed illustration by Westwood where search on the anhydrous cutting of brittle materials due to the inherent
the adsorbed molecule inhibits the motion of the screw dislocation AB, challenges in fabricating the dehydrated environment for industrial ap-
thereby increasing the necessary stress to break the bond. This returned plications. However, it is critical to understand the influence of the envi-
with an increase in yield point of LiF crystals that is a hardening effect. ronment humidity and the use of surface-active media on the
Kochanova et al. [222] also reported a similar influence of various machinability of these brittle ionic crystals.
surface-active media on LiF and explained the phenomenon as a compe-
tition between plasticizing and embrittlement. On one hand, the pres- 4.2. Surface coating
ence of the surfactant reduced the yield strength and hardening
coefficient of the crystal. On the other hand, the lowered surface energy Machining pre-coated work materials is a novel method to enhance
suggested reduced stresses necessary for microcrack propagation. cutting at this point and has only been covered on one brittle material.
Quite the opposite occurs with CaF2 [223] and magnesium oxide However, the positive improvements in DBT along different crystallo-
(MgO) [224,225] crystals, where enhanced dislocation mobility (i.e. ma- graphic cutting directions suggest that the methodology should apply
terial softening) was described under hydrous environments. Buckley to other materials that deform according to crystallographic relation-
[226] reported an increase in deformation resistance on the adsorbed ships. At this stage, it is clear that the modified machining process is
CaF2 surface in sliding tests under surface-active media, oleic acid and not fit for industrial adoption due to a lack of understanding of the fun-
dimethyl sulfoxide (DMSO). High plastic deformation was observed in damental relationships between the coating properties and the cutting
the inert aqueous environment of hexadecane, while the limited strain process. Critical problems that impede the likelihood of adoption in-
in surface-active media resulted in subsurface microcracking in the ma- clude precise coating application, solidification time, and ineffectiveness
terial. Water is also proved to inhibit plastic deformation, even though it in cross-feed applications such as turning. Nevertheless, the findings of
portrayed the lowest coefficient of friction during sliding. this research are opportunistic in revealing the possible influence of a
surface film on the machining process, particularly in the case of unin-
tentional coating formation.
The case of applying a surfactant on the work material can be an in-
tentional alteration to material properties as described in earlier sec-
tions on chemisorption and the chemical reaction to form a modified
surface layer, but the formation of oxide films often goes unaccounted
for in micromachining.
Oxide layer formation can be both beneficial and disadvantageous in
material removal processes, depending on the hardness of the oxide
layer relative to the host material. In some cases, such as polishing of sil-
icon carbide (SiC), the reaction of SiC and the polishing liquid assists the
Fig. 29. Illustration of the adsorption-locking phenomenon of adsorbate molecules at process through a continual formation and removal of the softer silica
emergent points of screw dislocations [55]. oxide layer [229,230]. In most metals, the formation of an oxide layer
Y.J. Lee, H. Wang / Materials and Design 192 (2020) 108688 21
[56] J. Ferrante, Exoelectron emission from a clean, annealed magnesium single crystal [86] M.G. Nicholas, C.F. Old, Liquid metal embrittlement, J. Mater. Sci. 14 (1979) 1–18,
during oxygen adsorption, A S L E Trans 20 (1977) 328–332, https://doi.org/10. https://doi.org/10.1007/BF01028323.
1080/05698197708982851. [87] S.P. Lynch, Mechanisms and kinetics of environmentally assisted cracking: current
[57] A. Chaudhari, Z.Y. Soh, H. Wang, A.S. Kumar, Rehbinder effect in ultraprecision ma- status, issues, and suggestions for further work, Metall. Mater. Trans. A. 44 (2013)
chining of ductile materials, Int. J. Mach. Tools Manuf. 133 (2018) 47–60, https:// 1209–1229, https://doi.org/10.1007/s11661-012-1359-2.
doi.org/10.1016/j.ijmachtools.2018.05.009. [88] E. D. Shchukin, Physical–chemical mechanics in the studies of Peter A. Rehbinder
[58] K. Viswanathan, A. Udupa, H. Yeung, D. Sagapuram, J.B. Mann, M. Saei, S. and his school, Colloids Surfaces A Physicochem. Eng. Asp. 149 (1999) 529–537,
Chandrasekar, On the stability of plastic flow in cutting of metals, CIRP Ann. 66 https://doi.org/10.1016/S0927-7757(98)00607-4.
(2017) 69–72, https://doi.org/10.1016/j.cirp.2017.04.027. [89] T. Kaneeda, Spreading effect in ductile metal cutting, Seventh Int. Conf. Prod. Eng.
[59] A. Udupa, K. Viswanathan, M. Saei, J.B. Mann, S. Chandrasekar, Material- 4th Int. Conf. High Technol., Elsevier, Chiba, Japan 1994, pp. 385–390, https://doi.
independent mechanochemical effect in the deformation of highly-strain- org/10.1016/B978-0-444-81901-7.50078-5.
hardening metals, Phys. Rev. Appl. 10 (2018) 1, https://doi.org/10.1103/ [90] R.W. Mould, H.B. Silver, R.J. Syrett, Investigations of the activity of cutting oil addi-
PhysRevApplied.10.014009. tives II. Organochlorine containing compounds, Wear 22 (1972) 269–286, https://
[60] H. Yeung, K. Viswanathan, W.D. Compton, S. Chandrasekar, Sinuous flow in metals, doi.org/10.1016/0043-1648(72)90280-3.
Proc. Natl. Acad. Sci. 112 (2015) 9828–9832, https://doi.org/10.1073/pnas. [91] Y.J. Lee, J.Y. Chong, A. Chaudhari, H. Wang, Enhancing ductile-mode cutting of cal-
1509165112. cium fluoride single crystals with solidified coating, Int. J. Precis. Eng. Manuf.
[61] A. Chaudhari, H. Wang, Effect of surface-active media on chip formation in Technol. (2019) https://doi.org/10.1007/s40684-019-00126-0.
micromachining, J. Mater. Process. Technol. 271 (2019) 325–335, https://doi.org/ [92] A.R. Zareena, S.C. Veldhuis, Tool wear mechanisms and tool life enhancement in
10.1016/j.jmatprotec.2019.04.011. ultra-precision machining of titanium, J. Mater. Process. Technol. 212 (2012)
[62] M.C. Shaw, On the action of metal cutting fluids at low speeds, Wear. 2 (1958) 560–570, https://doi.org/10.1016/j.jmatprotec.2011.10.014.
217–227, https://doi.org/10.1016/0043-1648(59)90006-7. [93] V.P. Astakhov, J.P. Davim, Tools (geometry and material) and tool wear, in: J.P.
[63] E.M. Kohn, Role of extreme pressure lubricants in boundary lubrication and in Davim (Ed.), Mach. Fundam. Recent Adv, Springer-Verlag London Limited,
metal cutting, Nature 197 (1963) 895, https://doi.org/10.1038/197895a0. London 2008, pp. 29–57, https://doi.org/10.1007/978-1-84800-213-5_2.
[64] E.M. Kohn, A theory on the role of lubricants in metal cutting at low speeds and in [94] J. Dosbaeva, G. Fox-Rabinovich, J. Dasch, S. Veldhuis, Enhancement of wet- and
boundary lubrication, Wear 8 (1965) 43–59, https://doi.org/10.1016/0043-1648 MQL-based machining of automotive alloys using cutting tools with DLC/polymer
(65)90250-4. surface treatments, J. Mater. Eng. Perform. 17 (2008) 346–351, https://doi.org/10.
[65] E. Usui, A. Gujral, M.C. Shaw, An experimental study of the action of CCl4 in cutting 1007/s11665-008-9209-5.
and other processes involving plastic flow, Int. J. Mach. Tool Des. Res. 1 (1961) [95] M. Lahres, P. Müller-Hummel, O. Doerfel, Applicability of different hard coatings in
187–197, https://doi.org/10.1016/0020-7357(61)90002-6. dry milling aluminium alloys, Surf. Coatings Technol. 91 (1997) 116–121, https://
[66] P.L. Barlow, Rehbinder effect in lubricated metal cutting, Nature 211 (1966) doi.org/10.1016/S0257-8972(96)03121-0.
1076–1077, https://doi.org/10.1038/2111076a0. [96] P.E. Hovsepian, Q. Luo, G. Robinson, M. Pittman, M. Howarth, D. Doerwald, R.
[67] V.P. Astakhov, Tribology of Metal Cutting, Elsevier Ltd, Oxford, 2006. Tietema, W.M. Sim, A. Deeming, T. Zeus, TiAlN/VN superlattice structured PVD
[68] A.I. Malkin, Regularities and mechanisms of the Rehbinder’s effect, Colloid J 74 coatings: a new alternative in machining of aluminium alloys for aerospace and
(2012) 223–238, https://doi.org/10.1134/S1061933X12020068. automotive components, Surf. Coatings Technol. 201 (2006) 265–272, https://
[69] A. Udupa, K. Viswanathan, Y. Ho, S. Chandrasekar, The cutting of metals via plastic doi.org/10.1016/j.surfcoat.2005.11.106.
buckling, Proc. R. Soc. A Math. Phys. Eng. Sci. 473 (2017), 20160863. https://doi. [97] M. Nouari, G. List, F. Girot, D. Coupard, Experimental analysis and optimisation of
org/10.1098/rspa.2016.0863. tool wear in dry machining of aluminium alloys, Wear 255 (2003) 1359–1368,
[70] E.O. Hall, The deformation and ageing of mild steel: III discussion of results, Proc. https://doi.org/10.1016/S0043-1648(03)00105-4.
Phys. Soc. Sect. B. 64 (1951) 747–753, https://doi.org/10.1088/0370-1301/64/9/ [98] E. Brinksmeier, R. Gläbe, Advances in precision machining of steel, CIRP Ann. 50
303. (2001) 385–388, https://doi.org/10.1080/713819805.
[71] N.J. Petch, The cleavage strength of polycrystals, J. Iron Steel Inst. 174 (1953) [99] Z.J. Li, F.Z. Fang, H. Gong, X.D. Zhang, Review of diamond-cutting ferrous metals,
25–28. Int. J. Adv. Manuf. Technol. 68 (2013) 1717–1731, https://doi.org/10.1007/
[72] G.K. Williamson, R.E. Smallman, III. Dislocation densities in some annealed and s00170-013-4970-5.
cold-worked metals from measurements on the X-ray debye-scherrer spectrum, [100] Z.J. Li, F.Z. Fang, H. Gong, X.D. Zhang, Effects of surface modifications on steel’s ma-
Philos. Mag. A J. Theor. Exp. Appl. Phys. 1 (1956) 34–46, https://doi.org/10.1080/ chinability in single-point diamond turning, Int. J. Precis. Technol. 3 (2013)
14786435608238074. 105–116, https://doi.org/10.1504/IJPTECH.2013.053299.
[73] H. Wang, S. To, C.Y. Chan, C.F. Cheung, W.B. Lee, Elastic strain induced shear bands [101] J.M. Casstevens, C.E. Daugherty, Diamond turning optical surfaces on electroless
in the microcutting process, Int. J. Mach. Tools Manuf. 50 (2010) 9–18, https://doi. nickel, Proc. SPIE 0159, Precis. Mach. Opt, 1978https://doi.org/10.1117/12.956844.
org/10.1016/j.ijmachtools.2009.10.002. [102] C.K. Syn, J.S. Taylor, R.R. Donaldson, Diamond tool wear vs. cutting distance on elec-
[74] J. Barry, G. Byrne, D. Lennon, Observations on chip formation and acoustic emission troless nickel mirrors, Proc. SPIE 0676, Ultraprecis. Mach. Autom. Fabr. Opt,
in machining Ti–6Al–4V alloy, Int. J. Mach. Tools Manuf. 41 (2001) 1055–1070, 1987https://doi.org/10.1117/12.939527.
https://doi.org/10.1016/S0890-6955(00)00096-1. [103] A. Pramanik, K.S. Neo, M. Rahman, X.P. Li, M. Sawa, Y. Maeda, Cutting performance
[75] J.T. Black, Flow stress model in metal cutting, J. Eng. Ind. 101 (1979) 403–415, of diamond tools during ultra-precision turning of electroless-nickel plated die ma-
https://doi.org/10.1115/1.3439527. terials, J. Mater. Process. Technol. 140 (2003) 308–313, https://doi.org/10.1016/
[76] J. Chae, S.S. Park, T. Freiheit, Investigation of micro-cutting operations, Int. J. Mach. S0924-0136(03)00751-9.
Tools Manuf. 46 (2006) 313–332, https://doi.org/10.1016/j.ijmachtools.2005.05. [104] K. Liu, H. Wang, X. Zhang, Ductile Mode Cutting of Brittle Materials, Springer
015. Nature Singapore, Singapore, 2020https://doi.org/10.1007/978-981-32-
[77] Z. Shi, Q. Zhao, H. Wang, J. Chen, T. Jin, T. Ji, On the effect of grain structure in micro- 9836-1.
cutting of polycrystalline aluminate magnesium spinel (PAMS) crystals, Int. J. [105] F.Z. Fang, V.C. Venkatesh, Diamond cutting of silicon with nanometric finish, CIRP
Mech. Sci. 160 (2019) 372–385, https://doi.org/10.1016/j.ijmecsci.2019.07.003. Ann. 47 (1998) 45–49, https://doi.org/10.1016/S0007-8506(07)62782-6.
[78] Z. Shi, H. Wang, Q. Zhao, T. Ji, Y. Wang, Y. Pan, B. Guo, Damage mechanisms of poly- [106] X. Gu, H. Wang, Q. Zhao, J. Xue, B. Guo, Effect of cutting tool geometries on the
crystalline aluminate magnesium spinel (PAMS) under different loading condi- ductile-brittle transition of monocrystalline sapphire, Int. J. Mech. Sci. 148 (2018)
tions of indentation and micro-cutting tests, Ceram. Int. 46 (2019) 7235–7252, 565–577, https://doi.org/10.1016/j.ijmecsci.2018.09.015.
https://doi.org/10.1016/j.ceramint.2019.11.218. [107] H. Wang, A. Senthil Kumar, O. Riemer, On the theoretical foundation for the
[79] T.H.C. Childs, G.W. Rowe, Physics in metal cutting, Reports Prog. Phys. 36 (1973) microcutting of calcium fluoride single crystals at elevated temperatures, Proc.
223–288, https://doi.org/10.1088/0034-4885/36/3/001. Inst. Mech. Eng. Part B J. Eng. Manuf. 232 (2018) 1123–1129, https://doi.org/10.
[80] D.V. Wilson, J.A. Chapman, Effects of preferred orientation on the grain size depen- 1177/0954405416666907.
dence of yield strength in metals, Philos. Mag. A J. Theor. Exp. Appl. Phys. 8 (1963) [108] X. Chen, J. Xu, H. Fang, R. Tian, Influence of cutting parameters on the ductile-brittle
1543–1551, https://doi.org/10.1080/14786436308207317. transition of single-crystal calcium fluoride during ultra-precision cutting, Int. J.
[81] M.A. Meyersm, E. Ashworth, A model for the effect of grain size on the yield stress Adv. Manuf. Technol. 89 (2017) 219–225, https://doi.org/10.1007/s00170-016-
of metals, Philos. Mag. A. 46 (1982) 737–759, https://doi.org/10.1080/ 9063-9.
01418618208236928. [109] J. Yan, T. Asami, H. Harada, T. Kuriyagawa, Crystallographic effect on subsurface
[82] J.S. Hayes, R. Keyte, P.B. Prangnell, Effect of grain size on tensile behaviour of a damage formation in silicon microcutting, CIRP Ann. 61 (2012) 131–134, https://
submicron grained Al–3 wt-%Mg alloy produced by severe deformation, doi.org/10.1016/j.cirp.2012.03.070.
Mater. Sci. Technol. 16 (2000) 1259–1263, https://doi.org/10.1179/ [110] H. Wang, O. Riemer, K. Rickens, E. Brinksmeier, On the mechanism of asymmetric
026708300101507479. ductile-brittle transition in microcutting of (111) CaF2 single crystals, Scr. Mater.
[83] W.B. Lee, C.F. Cheung, S. To, Characteristics of microcutting force variation in ultra- 114 (2016) 21–26, https://doi.org/10.1016/j.scriptamat.2015.11.030.
precision diamond turning, Mater. Manuf. Process. 16 (2001) 177–193, https://doi. [111] X. Guo, Y. Wei, Z. Jin, D. Guo, W. Maosen, A numerical model for optical glass cut-
org/10.1081/AMP-100104299. ting based on SPH method, Int. J. Adv. Manuf. Technol. 68 (2013) 1277–1283,
[84] X. Wu, L. Li, N. He, M. Zhao, Z. Zhan, Investigation on the influence of material mi- https://doi.org/10.1007/s00170-013-4919-8.
crostructure on cutting force and bur formation in the micro cutting of copper, Int. [112] K. Liu, X. Li, S.Y. Liang, X. Dong Liu, Nanometer-scale, ductile-mode cutting of soda-
J. Adv. Manuf. Technol. 79 (2015) 321–327, https://doi.org/10.1007/s00170-015- lime glass, J. Manuf. Process. 7 (2005) 95–101, https://doi.org/10.1016/S1526-
6828-5. 6125(05)70086-4.
[85] H. Conrad, Grain-size dependence of the flow stress of Cu from millimeters to [113] P.W. Bridgman, Effects of high hydrostatic pressure on the plastic properties of
nanometers, Metall. Mater. Trans. A. 35 (2004) 2681–2695, https://doi.org/10. metals, Rev. Mod. Phys. 17 (1945) 3–14, https://doi.org/10.1103/RevModPhys.17.
1007/s11661-004-0214-5. 3.
24 Y.J. Lee, H. Wang / Materials and Design 192 (2020) 108688
[114] P.W. Bridgman, The effect of hydrostatic pressure on plastic flow under shearing [144] J.E. Bradby, J.S. Williams, J. Wong-Leung, M.V. Swain, P. Munroe, Mechanical defor-
stress, J. Appl. Phys. 17 (1946) 692–698, https://doi.org/10.1063/1.1707772. mation in silicon by micro-indentation, J. Mater. Res. 16 (2001) 1500–1507,
[115] H. Wang, S. To, C.Y. Chan, C.F. Cheung, W.B. Lee, A study of regularly spaced shear https://doi.org/10.1557/JMR.2001.0209.
bands and morphology of serrated chip formation in microcutting process, Scr. [145] J. Yan, Laser micro-Raman spectroscopy of single-point diamond machined silicon
Mater. 63 (2010) 227–230, https://doi.org/10.1016/j.scriptamat.2010.03.059. substrates, J. Appl. Phys. 95 (2004) 2094–2101, https://doi.org/10.1063/1.1639953.
[116] K.D. Pae, S.K. Bhateja, The effects of hydrostatic pressure on the mechanical behav- [146] J.C. Morris, D.L. Callahan, Origins of microplasticity in low-load scratching of silicon,
ior of polymers, J. Macromol. Sci. Part C. 13 (1975) 1–75, https://doi.org/10.1080/ J. Mater. Res. 9 (1994) 2907–2913, https://doi.org/10.1557/JMR.1994.2907.
15321797508068145. [147] Z. Li, X. Zhang, Subsurface deformation of germanium in ultra-precision cutting:
[117] H.L.D. Pugh, E.F. Chandler, L. Holliday, J. Mann, The effect of hydrostatic pressure on characterization of micro-Raman spectroscopy, Int. J. Adv. Manuf. Technol. 91
the tensile properties of plastics, Polym. Eng. Sci. 11 (1971) 463–473, https://doi. (2017) 213–225, https://doi.org/10.1007/s00170-016-9749-z.
org/10.1002/pen.760110605. [148] S. Johansson, J. Schweitz, Contact damage in single-crystalline silicon investigated
[118] M. Sakata, T. Okubo, An experimental study on the deformation of materials under by cross-sectional transmission electron microscopy, J. Am. Ceram. Soc. 71
high hydrostatic pressures: 1st report, on the deformation of cylinders under inter- (1988) 617–623, https://doi.org/10.1111/j.1151-2916.1988.tb06378.x.
nal and external pressures, Bull. JSME. 13 (1970) 1059–1065, https://doi.org/10. [149] Y. Mizumoto, H. Amano, H. Kangawa, K. Harano, H. Sumiya, Y. Kakinuma, On the
1299/jsme1958.13.1059. improvement of subsurface quality of CaF2 single crystal machined by boron-
[119] M. Sakata, S. Aoki, T. Tsujimoto, An experimental study on the deformation of ma- doped nano-polycrystalline diamond tools, Precis. Eng. 52 (2018) 73–83, https://
terials under high hydrostatic pressures: 2nd report, on torsional deformation, doi.org/10.1016/j.precisioneng.2017.11.005.
Bull. JSME. 14 (1971) 737–744, https://doi.org/10.1299/jsme1958.14.737. [150] Y. Mizumoto, H. Kangawa, H. Itobe, T. Tanabe, Y. Kakinuma, Influence of crystal an-
[120] P.W. Bridgman, The effect of hydrostatic pressure on the fracture of brittle sub- isotropy on subsurface damage in ultra-precision cylindrical turning of CaF2, Precis.
stances, J. Appl. Phys. 18 (1947) 246–258, https://doi.org/10.1063/1.1697610. Eng. 49 (2017) 104–114, https://doi.org/10.1016/j.precisioneng.2017.01.017.
[121] M. Yoshino, T. Aoki, T. Shirakashi, R. Komanduri, Some experiments on the [151] Y. Kakinuma, S. Azami, T. Tanabe, Evaluation of subsurface damage caused by ultra-
scratching of silicon: in situ scratching inside an SEM and scratching under high precision turning in fabrication of CaF2 optical micro resonator, CIRP Ann. 64
external hydrostatic pressures, Int. J. Mech. Sci. 43 (2001) 335–347, https://doi. (2015) 117–120, https://doi.org/10.1016/j.cirp.2015.04.076.
org/10.1016/S0020-7403(00)00019-9. [152] T.-H. Tan, J. Yan, Atomic-scale characterization of subsurface damage and structural
[122] M. Yoshino, T. Aoki, T. Sugishima, T. Shirakashi, Scratching test on hard-brittle ma- changes of single-crystal silicon carbide subjected to electrical discharge machin-
terials under high hydrostatic pressure, J. Manuf. Sci. Eng. 123 (2001) 231–239, ing, Acta Mater. 123 (2017) 362–372, https://doi.org/10.1016/j.actamat.2016.10.
https://doi.org/10.2493/jjspe.65.1481. 045.
[123] M. Yoshino, Y. Ogawa, S. Aravindan, Machining of hard-brittle materials by a single [153] Y. Mizumoto, H. Kangawa, Y. Nakagawa, H. Itobe, T. Tanabe, Y. Kakinuma, Influence
point tool under external hydrostatic pressure, J. Mater. Sci. Eng. 127 (2005) of nose radius on surface integrity in ultra-precision cylindrical turning of single-
837–845, https://doi.org/10.1115/1.2035695. crystal calcium fluoride, Procedia CIRP 45 (2016) 139–142, https://doi.org/10.
[124] E.K. Antwi, K. Liu, H. Wang, A review on ductile mode cutting of brittle materials, 1016/j.procir.2016.02.075.
Front. Mech. Eng. 13 (2018) 251–263, https://doi.org/10.1007/s11465-018-0504- [154] J.F.W. Bishop, R. Hill, XLVI. A theory of the plastic distortion of a polycrystalline ag-
z. gregate under combined stresses., London, Edinburgh, Dublin, Philos. Mag. J. Sci. 42
[125] P.S. Sreejith, Machining force studies on ductile machining of silicon nitride, J. (1951) 414–427, https://doi.org/10.1080/14786445108561065.
Mater. Process. Technol. 169 (2005) 414–417, https://doi.org/10.1016/j. [155] Z.J. Yuan, W.B. Lee, Y.X. Yao, M. Zhou, Effect of crystallographic orientation on cut-
jmatprotec.2005.04.092. ting forces and surface quality in diamond cutting of single crystal, CIRP Ann. 43
[126] T. Nakasuji, S. Kodera, S. Hara, N. Ikawa, Diamond turning of brittle materials for (1994) 39–42, https://doi.org/10.1016/S0007-8506(07)62159-3.
optical components, CIRP Ann. 39 (1994) 89–92, https://doi.org/10.1016/S0007- [156] W.B. Lee, M. Zhou, A theoretical analysis of the effect of crystallographic orienta-
8506(07)61009-9. tion on chip formation in micromachining, Int. J. Mach. Tools Manuf. 33 (1993)
[127] T. He, K. Liu, X.P. Li, M. Rahman, A Method of Atomic Dynamic Modeling for 439–447, https://doi.org/10.1016/0890-6955(93)90050-5.
Nanometric Ductile Cutting of Silicon Wafer Material, in: Int, Conf. Precis. Eng, [157] W.B. Lee, C.F. Cheung, S. To, A microplasticity analysis of micro-cutting force vari-
Singapore, 2004 409–417. ation in ultra-precision diamond turning, J. Manuf. Sci. Eng. 124 (2002) 170–177,
[128] K. Liu, H. Wang, X. Zhang, Molecular dynamics simulation of ductile mode cutting, in: https://doi.org/10.1115/1.1454108.
K. Liu, H. Wang, X. Zhang (Eds.), Ductile Mode Cut. Brittle Mater, Springer Singapore, [158] P. Kaitkay, S. Lei, Experimental study of rock cutting under external hydrostatic
Singapore 2020, pp. 75–99, https://doi.org/10.1007/978-981-32-9836-1_5. pressure, J. Mater. Process. Technol. 159 (2005) 206–213, https://doi.org/10.
[129] M. Sakata, S. Aoki, Torsional strength of glass under hydrostatic pressure, J. Eng. 1016/j.jmatprotec.2004.04.418.
Mater. Technol. 95 (1973) 83–86, https://doi.org/10.1115/1.3443136. [159] P.S. Sreejith, B.K.A. Ngoi, Material removal mechanisms in precision machining of
[130] S.B. Ainbinder, Effect of hydrostatic pressure on the strength properties of polymer new materials, Int. J. Mach. Tools Manuf. 41 (2001) 1831–1843, https://doi.org/
materials, Polym. Mech. 5 (1969) 382–386, https://doi.org/10.1007/BF00855157. 10.1016/S0890-6955(01)00014-1.
[131] S. Rabinowitz, I.M. Ward, J.S.C. Parry, The effect of hydrostatic pressure on the shear [160] R. Komanduri, N. Chandrasekaran, L.M. Raff, Some aspects of machining with
yield behaviour of polymers, J. Mater. Sci. 5 (1970) 29–39, https://doi.org/10.1007/ negative-rake tools simulating grinding: a molecular dynamics simulation ap-
BF02427181. proach, Philos. Mag. B 79 (1999) 955–968, https://doi.org/10.1080/
[132] Y.G. Gogotsi, A. Kailer, K.G. Nickel, Transformation of diamond to graphite, Nature 13642819908214852.
401 (1999) 663–664, https://doi.org/10.1038/44323. [161] Y. Ohbuchi, T. Obikawa, Surface generation model in grinding with effect of grain
[133] A. Kailer, Y.G. Gogotsi, K.G. Nickel, Phase transformations of silicon caused by con- shape and cutting speed, JSME Int. J. Ser. C Mech. Syst. Mach. Elem. Manuf. 49
tact loading, J. Appl. Phys. 81 (1997) 3057–3063, https://doi.org/10.1063/1. (2006) 114–120, https://doi.org/10.1299/jsmec.49.114.
364340. [162] K. Liu, X.P. Li, S.Y. Liang, The mechanism of ductile chip formation in cutting of brit-
[134] A.P. Gerk, D. Tabor, Indentation hardness and semiconductor–metal transition of tle materials, Int. J. Adv. Manuf. Technol. 33 (2007) 875–884, https://doi.org/10.
germanium and silicon, Nature 271 (1978) 732–733, https://doi.org/10.1038/ 1007/s00170-006-0531-5.
271732a0. [163] Y. Kita, M. Ido, N. Kawasaki, A study of metal flow ahead of tool face with large neg-
[135] K.J. Kingma, C. Meade, R.J. Hemley, H. Mao, D.R. Veblen, Microstructural observa- ative rake angle, J. Eng. Ind. 104 (1982) 319–325, https://doi.org/10.1115/1.
tions of α-quartz amorphization, Science 259 (1993) 666–669, https://doi.org/ 3185836.
10.1126/science.259.5095.66680-. [164] D.A. Doman, A. Warkentin, R. Bauer, Finite element modeling approaches in grind-
[136] V. Domnich, Y. Gogotsi, 5. High-pressure surface science, Exp. Methods Phys. Sci. ing, Int. J. Mach. Tools Manuf. 49 (2009) 109–116, https://doi.org/10.1016/j.
38 (2001) 355–445, https://doi.org/10.1016/S1079-4042(01)80052-7. ijmachtools.2008.10.002.
[137] B.V. Tanikella, A.H. Somasekhar, A.T. Sowers, R.J. Nemanich, R.O. Scattergood, Phase [165] T. Akiyama, T. Kishinami, K. Saito, K. Hoshi, A study of the orthogonal cutting
transformations during microcutting tests on silicon, Appl. Phys. Lett. 69 (1996) mechanism by controlled shear angle experiments, Mem. Fac. Eng. Hokkaido
2870–2872, https://doi.org/10.1063/1.117346. Univ. 14 (1975) 13–20.
[138] J. Yan, T. Asami, H. Harada, T. Kuriyagawa, Fundamental investigation of subsurface [166] T.L. Brown, C. Saldana, T.G. Murthy, J.B. Mann, Y. Guo, L.F. Allard, A.H. King, W.D.
damage in single crystalline silicon caused by diamond machining, Precis. Eng. 33 Compton, K.P. Trumble, S. Chandrasekar, A study of the interactive effects of strain,
(2009) 378–386, https://doi.org/10.1016/j.precisioneng.2008.10.008. strain rate and temperature in severe plastic deformation of copper, Acta Mater. 57
[139] M. Zhou, X.J. Wang, B.K.A. Ngoi, J.G.K. Gan, Brittle-ductile transition in the diamond (2009) 5491–5500, https://doi.org/10.1016/j.actamat.2009.07.052.
cutting of glasses with the aid of ultrasonic vibration, J. Mater. Process. Technol. [167] L.S. Tóth, Texture evolution in severe plastic deformation by equal channel angular
121 (2002) 243–251, https://doi.org/10.1016/S0924-0136(01)01262-6. extrusion, Adv. Eng. Mater. 5 (2003) 308–316, https://doi.org/10.1002/adem.
[140] P. Dahlman, F. Gunnberg, M. Jacobson, The influence of rake angle, cutting feed and 200310084.
cutting depth on residual stresses in hard turning, J. Mater. Process. Technol. 147 [168] D.H. Shin, B.C. Kim, K.-T. Park, W.Y. Choo, Microstructural changes in equal channel
(2004) 181–184, https://doi.org/10.1016/j.matprotec.2003.12.014. angular pressed low carbon steel by static annealing, Acta Mater. 48 (2000)
[141] S.-M. Jeong, H.-S. Oh, S.-E. Park, H.-L. Lee, Phase transformation of single crystalline 3245–3252, https://doi.org/10.1016/S1359-6454(00)00090-2.
silicon by scratching, Jpn. J. Appl. Phys. 42 (2003) 2773–2774, https://doi.org/10. [169] V.M. Segal, Materials processing by simple shear, Mater. Sci. Eng. A 197 (1995)
1143/jjap.42.2773. 157–164, https://doi.org/10.1016/0921-5093(95)09705-8.
[142] T. Juliano, Y. Gogotsi, V. Domnich, Effect of indentation unloading conditions on [170] G. Faraji, M.M. Mashhadi, H.S. Kim, Tubular channel angular pressing (TCAP) as a
phase transformation induced events in silicon, J. Mater. Res. 18 (2003) novel severe plastic deformation method for cylindrical tubes, Mater. Lett. 65
1192–1201, https://doi.org/10.1557/JMR.2003.0164. (2011) 3009–3012, https://doi.org/10.1016/j.matlet.2011.06.039.
[143] A.B. Mann, D. van Heerden, J.B. Pethica, P. Bowes, T.P. Weihs, Contact resistance [171] C. Wang, F. Li, L. Wang, H. Qiao, Review on modified and novel techniques of severe
and phase transformations during nanoindentation of silicon, Philos. Mag. A. 82 plastic deformation, Sci. China Technol. Sci. 55 (2012) 2377–2390, https://doi.org/
(2002) 1921–1929, https://doi.org/10.1080/01418610208235704. 10.1007/s11431-012-4954-y.
Y.J. Lee, H. Wang / Materials and Design 192 (2020) 108688 25
[172] M. Liu, H.J. Roven, X. Liu, M. Murashkin, R.Z. Valiev, T. Ungár, L. Balogh, Grain re- [200] H.K. Rafi, N.V. Karthik, H. Gong, T.L. Starr, B.E. Stucker, Microstructures and me-
finement in nanostructured Al–Mg alloys subjected to high pressure torsion, J. chanical properties of Ti6Al4V parts fabricated by selective laser melting and elec-
Mater. Sci. 45 (2010) 4659–4664, https://doi.org/10.1007/s10853-010-4604-3. tron beam melting, J. Mater. Eng. Perform. 22 (2013) 3872–3883, https://doi.org/
[173] D.R. Leiva, A.M. Jorge, T.T. Ishikawa, J. Huot, D. Fruchart, S. Miraglia, C.S. Kiminami, 10.1007/s11665-013-0658-0.
W.J. Botta, Nanoscale grain refinement and H-sorption properties of MgH2 proc- [201] J. Zhang, A.Y. Xiang Toh, H. Wang, W.F. Lu, J.Y.H. Fuh, Vibration-assisted conformal
essed by high-pressure torsion and other mechanical routes, Adv. Eng. Mater. 12 polishing of additively manufactured structured surface, Proc. Inst. Mech. Eng. Part
(2010) 786–792, https://doi.org/10.1002/adem.201000030. C J. Mech. Eng. Sci. 233 (2018) 4154–4164, https://doi.org/10.1177/
[174] C. Saldana, S. Swaminathan, T.L. Brown, W. Moscoso, J.B. Mann, W.D. Compton, S. 0954406218811359.
Chandrasekar, Unusual applications of machining: controlled nanostructuring of [202] W.D. Nix, H.J. Gao, Indentation size effects in crystalline materials: a law for strain
materials and surfaces, J. Manuf. Sci. Eng. 132 (2010) https://doi.org/10.1115/1. gradient plasticity, J. Mech. Phys. Solids. 46 (1998) 411–425, https://doi.org/10.
4001665. 1016/s0022-5096(97)00086-0.
[175] Y. Liu, S. Cai, L. Dai, A new method for grain refinement in magnesium alloy: high [203] K. Durst, B. Backes, M. Göken, Indentation size effect in metallic materials:
speed extrusion machining, Mater. Sci. Eng. A 651 (2016) 878–885, https://doi.org/ correcting for the size of the plastic zone, Scr. Mater. 52 (2005) 1093–1097,
10.1016/j.msea.2015.11.046. https://doi.org/10.1016/j.scriptamat.2005.02.009.
[176] Y. Guo, M. Efe, W. Moscoso, D. Sagapuram, K.P. Trumble, S. Chandrasekar, Deforma- [204] J.G. Swadener, E.P. George, G.M. Pharr, The correlation of the indentation size
tion field in large-strain extrusion machining and implications for deformation efffect measured with indenters of various shapes, J. Mech. Phys. Solids. 50
processing, Scr. Mater. 66 (2012) 235–238, https://doi.org/10.1016/j.scriptamat. (2002) 681–694, https://doi.org/10.1016/S0022-5096(01)00103-X.
2011.10.045. [205] F. Fang, F. Xu, M. Lai, Size effect in material removal by cutting at nano scale, Int. J.
[177] L. De Chiffre, Extusion-cutting, Int. J. Mach. Tool Des. Res. 16 (1976) 137–144, Adv. Manuf. Technol. 80 (2015) 591–598, https://doi.org/10.1007/s00170-015-
https://doi.org/10.1016/0020-7357(76)90032-9. 7032-3.
[178] M.E. Merchant, Mechanics of the metal cutting process. I. Orthogonal cutting and a [206] D. Lorenz, A. Zeckzer, U. Hilpert, P. Grau, H. Johansen, H.S. Leipner, Pop-in effect as
type 2 chip, J. Appl. Phys. 16 (1945) 267–275, https://doi.org/10.1063/1.1707586. homogeneous nucleation of dislocations during nanoindentation, Phys. Rev. B -
[179] M.E. Merchant, Mechanics of the metal cutting process. II. Plasticity conditions in Condens. Matter Mater. Phys. 67 (2003) 1–4, https://doi.org/10.1103/PhysRevB.
orthogonal cutting, J. Appl. Phys. 16 (1945) 318–324, https://doi.org/10.1063/1. 67.172101.
1707596. [207] J. Chua, R. Zhang, A. Chaudhari, S.J. Vachhani, A.S. Kumar, Q. Tu, H. Wang, High-
[180] M.C. Shaw, Metal Cutting Principles, Oxford, Clarendon Press, New York, 1984. temperature nanoindentation size effect in fluorite material, Int. J. Mech. Sci. 159
[181] Y. Guo, R. M’Saoubi, S. Chandrasekar, Control of deformation levels on machined (2019) 459–466, https://doi.org/10.1016/j.ijmecsci.2019.06.020.
surfaces, CIRP Ann. 60 (2011) 137–140, https://doi.org/10.1016/j.cirp.2011.03.138. [208] K. Durst, B. Backes, O. Franke, M. Göken, Indentation size effect in metallic mate-
[182] S.L. Cai, Y. Chen, G.G. Ye, M.Q. Jiang, H.Y. Wang, L.H. Dai, Characterization of the de- rials: Modeling strength from pop-in to macroscopic hardness using geometrically
formation field in large-strain extrusion machining, J. Mater. Process. Technol. 216 necessary dislocations, Acta Mater. 54 (2006) 2547–2555, https://doi.org/10.1016/
(2015) 48–58, https://doi.org/10.1016/j.jmatprotec.2014.08.022. j.actamat.2006.01.036.
[183] A.S. Kumar, M. Rahman, S.L. Ng, Effect of high-pressure coolant on machining per- [209] K. Viswanathan, A. Mahato, H. Yeung, S. Chandrasekar, Surface phenomena re-
formance, Int. J. Adv. Manuf. Technol. 20 (2002) 83–91, https://doi.org/10.1007/ vealed by in situ imaging: studies from adhesion, wear and cutting, Surf. Topogr.
s001700200128. Metrol. Prop. 5 (2017), 14002. https://doi.org/10.1088/2051-672x/aa612a.
[184] Y.J. Lee, L. Hao, J. Lüder, A. Chaudhari, S. Wang, S. Manzhos, H. Wang, [210] O. Ojo, N. Brook, The effect of moisture on some mechanical properties of rock,
Micromachining of ferrous metal with an ion implanted diamond cutting tool, Car- Min. Sci. Technol. 10 (1990) 145–156, https://doi.org/10.1016/0167-9031(90)
bon N. Y. 152 (2019) 598–608, https://doi.org/10.1016/j.carbon.2019.06.043. 90158-O.
[185] L. De Chiffre, Extrusion cutting of brass strips, Int. J. Mach. Tool Des. Res. 23 (1983) [211] A.L. Volynskii, N.F. Bakeev, Regularities of the Rehbinder effect in polymers. Re-
141–151, https://doi.org/10.1016/0020-7357(83)90013-6. view, Prot. Met. Phys. Chem. Surfaces. 49 (2013) 493–509, https://doi.org/10.
[186] W. Moscoso, M.R. Shankar, J.B. Mann, W.D. Compton, S. Chandrasekar, Bulk nano- 1134/S2070205113050109.
structured materials by large strain extrusion machining, J. Mater. Res. 22 (2007) [212] E. Shamoto, T. Moriwaki, Ultaprecision diamond cutting of hardened steel by ap-
201–205, https://doi.org/10.1557/jmr.2007.0021. plying elliptical vibration cutting, Ann. CIRP 48 (1999) 441–444, https://doi.org/
[187] Y. Guo, J. Chen, A. Saleh, In situ analysis of deformation mechanics of constrained 10.1016/S0007-8506(07)63222-3.
cutting toward enhanced material removal, J. Manuf. Sci. Eng. 142 (2020) [213] X. Zhang, D. Hui, K. Liu, H. Wang, Effect of air blow pressure in ultrasonic vibration
https://doi.org/10.1115/1.4045613. cutting of steel using PCD tools, 17th Int. Conf. Eur. Soc. Precis. Eng. Nanotechnol.,
[188] D. Sagapuram, H. Yeung, Y. Guo, A. Mahato, R. M’Saoubi, W.D. Compton, K.P. Hannover, Germany, 2017.
Trumble, S. Chandrasekar, On control of flow instabilities in cutting of metals, [214] X. Zhang, M. Arif, K. Liu, A.S. Kumar, M. Rahman, A model to predict the critical unde-
CIRP Ann. 64 (2015) 49–52, https://doi.org/10.1016/j.cirp.2015.04.059. formed chip thickness in vibration-assisted machining of brittle materials, Int. J. Mach.
[189] S. Zhang, P. Guo, Z. Xiong, S. To, Cyclic shear angle for lamellar chip formation in Tools Manuf. 69 (2013) 57–66, https://doi.org/10.1016/j.ijmachtools.2013.03.006.
ultra-precision machining, Proc. Inst. Mech. Eng. Part C J. Mech. Eng. Sci. (2020), [215] Z. Shi, B. Guo, Q. Zhao, T. Ji, A study on micro-machining spinel by applying ordi-
0954406220908890. https://doi.org/10.1177/0954406220908890. nary cutting and ultra-sonic elliptical vibration cutting, Int. J. Adv. Manuf. Technol.
[190] H. Wang, S. To, C.Y. Chan, C.F. Cheung, W.B. Lee, Dynamic modelling of shear band 104 (2019) 1677–1692, https://doi.org/10.1007/s00170-019-03905-w.
formation and tool-tip vibration in ultra-precision diamond turning, Int. J. Mach. [216] H. Shahinian, J. Navare, D. Zaytsev, D. Ravindra, Microlaser assisted diamond turn-
Tools Manuf. 51 (2011) 512–519, https://doi.org/10.1016/j.ijmachtools.2011.02.010. ing of precision silicon optics, Opt. Eng. 58 (2019) 1–8, https://doi.org/10.1117/1.
[191] H. Wang, S. To, C.Y. Chan, C.F. Cheung, W.B. Lee, A theoretical and experimental in- OE.58.9.092607.
vestigation of the tool-tip vibration and its influence upon surface generation in [217] Y.J. Lee, Thermal expansion control in heat assisted machining of calcium fluoride
single-point diamond turning, Int. J. Mach. Tools Manuf. 50 (2010) 241–252, single crystals, 19th Int. Conf. Eur. Soc. Precis. Eng. Nanotechnol., Bilbao, Spain,
https://doi.org/10.1016/j.ijmachtools.2009.12.003. 2019.
[192] H. Wang, S. To, C.Y. Chan, Investigation on the influence of tool-tip vibration on [218] K. Liu, H. Wang, X. Zhang, Thermally assisted ductile mode cutting, in: K. Liu, H.
surface roughness and its representative measurement in ultra-precision diamond Wang, X. Zhang (Eds.), Ductile Mode Cut. Brittle Mater, Springer, Singapore,
turning, Int. J. Mach. Tools Manuf. 69 (2013) 20–29, https://doi.org/10.1016/j. Singapore 2020, pp. 255–285, https://doi.org/10.1007/978-981-32-9836-1_12.
ijmachtools.2013.02.006. [219] Y.J. Lee, A. Chaudhari, J. Zhang, H. Wang, Thermally assisted microcutting of cal-
[193] D. Sagapuram, K. Viswanathan, A. Mahato, N.K. Sundaram, R. M’Saoubi, K.P. cium fluoride single crystals, Simul. Exp. Mater. Ultra-Precision Mach, Springer,
Trumble, S. Chandrasekar, Geometric flow control of shear bands by suppression Singapore 2019, pp. 77–127, https://doi.org/10.1007/978-981-13-3335-4_4.
of viscous sliding, Proc. R. Soc. A Math. Phys. Eng. Sci. 472 (2016) 20160167, [220] A. Chaudhari, Y.J. Lee, H. Wang, A.S. Kumar, Thermal effect on brittle-ductile tran-
https://doi.org/10.1098/rspa.2016.0167. sition in CaF2 single crystals, 17th Int. Conf. Eur. Soc. Precis. Eng. Nanotechnol.,
[194] K. Uezaki, J. Shimizu, L. Zhou, Development of metal cutting process accompanied Hannover, Germany, 2017.
by a localized compressive hydrostatic stress field formation: examination by mo- [221] S. To, H. Wang, E.V. Jelenković, Enhancement of the machinability of silicon by hy-
lecular dynamics simulation, Precis. Eng. 38 (2014) 371–378, https://doi.org/10. drogen ion implantation for ultra-precision micro-cutting, Int. J. Mach. Tools
1016/j.precisioneng.2013.12.002. Manuf. 74 (2013) 50–55, https://doi.org/10.1016/j.ijmachtools.2013.07.005.
[195] D. Brown, C. Li, Z.Y. Liu, X.Y. Fang, Y.B. Guo, Surface integrity of Inconel 718 by hy- [222] L.A. Kochanova, V.M. Kuchumova, V.I. Savenko, E.D. Shchukin, Environmental effect
brid selective laser melting and milling, Virtual Phys. Prototyp. 13 (2018) 26–31, on sclerometric brittleness of ionic crystals, J. Mater. Sci. 27 (1992) 5516–5522,
https://doi.org/10.1080/17452759.2017.1392681. https://doi.org/10.1007/BF00541614.
[196] M. Król, T. Tański, Surface quality research for selective laser melting of Ti-6Al-4V [223] A.R.C. Westwood, D.L. Goldheim, Occurrence and mechanism of rebinder effects in
alloy, Arch. Metall. Mater. 61 (2016) 1291–1296, https://doi.org/10.1515/amm- CaF2, J. Appl. Phys. 39 (1968) 3401–3405, https://doi.org/10.1063/1.1656788.
2016-0213. [224] A.R.C. Westwood, D.L. Goldheim, R.G. Lye, Rebinder effects in MgO, Philos. Mag. A J.
[197] R. Li, J. Liu, Y. Shi, L. Wang, W. Jiang, Balling behavior of stainless steel and nickel Theor. Exp. Appl. Phys. 16 (1967) 505–519, https://doi.org/10.1080/
powder during selective laser melting process, Int. J. Adv. Manuf. Technol. 59 14786436708220861.
(2012) 1025–1035, https://doi.org/10.1007/s00170-011-3566-1. [225] D.A. Shockey, G.W. Groves, Origin of water-induced toughening in MgO crystals, J.
[198] Y. Bai, A. Chaudhari, H. Wang, Investigation on the microstructure and machinabil- Am. Ceram. Soc. 52 (1969) 82–85, https://doi.org/10.1111/j.1151-2916.1969.
ity of ASTM A131 steel manufactured by directed energy deposition, J. Mater. Pro- tb13346.x.
cess. Technol. 276 (2020), 116410. https://doi.org/10.1016/j.jmatprotec.2019. [226] D.H. Buckley, Effect of Surface Active Media on Friction, Deformation, and Fracture
116410. of Calcium Fluoride, 1969.
[199] J. Zhang, A. Chaudhari, H. Wang, Surface quality and material removal in magnetic [227] A.R.C. Westwood, J.S. Ahearn, J.J. Mills, Developments in the theory and application
abrasive finishing of selective laser melted 316L stainless steel, J. Manuf. Process. of chemomechanical effects, Colloids and Surfaces. 2 (1981) 1–35, https://doi.org/
45 (2019) 710–719, https://doi.org/10.1016/j.jmapro.2019.07.044. 10.1016/0166-6622(81)80050-9.
26 Y.J. Lee, H. Wang / Materials and Design 192 (2020) 108688
[228] U. Schneider, S.-W. Chen, The chemomechanical effect and the mechanochemical [237] Y. Liu, T. Inamura, N. Takezawa, S. Shimada, Y.F. Guo, Effects of air and surface ox-
effect on high-performance concrete subjected to stress corrosion, Cem. Concr. idation in ultra-micro cutting of mono-crystalline silicon, Proc. Int. Conf. Lead. Edge
Res. 28 (1998) 509–522, https://doi.org/10.1016/S0008-8846(98)00015-5. Manuf. 21st Century LEM21 2003, pp. 45–48, https://doi.org/10.1299/jsmelem.
[229] Q. Zhao, Z. Sun, B. Guo, Material removal mechanism in ultrasonic vibration 2003.45.
assisted polishing of micro cylindrical surface on SiC, Int. J. Mach. Tools Manuf. [238] E. Rabinowicz, Lubrication of metal surfaces by oxide films, A S L E Trans 10 (1967)
103 (2016) 28–39, https://doi.org/10.1016/j.ijmachtools.2016.01.003. 400–407, https://doi.org/10.1080/05698196708972199.
[230] Y. Zhou, G. Pan, X. Shi, L. Xu, C. Zou, H. Gong, G. Luo, XPS, UV–vis spectroscopy and [239] I.R. Kramer, Effect of surfaces on mechanical behavior of metals, in: L.J. Bonis, P.L.
AFM studies on removal mechanisms of Si-face SiC wafer chemical mechanical de Bruyn, J.J. Duga (Eds.),Surf. Phenomena. Fundam. Phenom. Mater. Sci., Springer,
polishing (CMP), Appl. Surf. Sci. 316 (2014) 643–648, https://doi.org/10.1016/j. Boston, MA 1966, pp. 171–193, https://doi.org/10.1007/978-1-4899-6347-5_10.
apsusc.2014.08.011. [240] A.H. Cottrell, D.F. Gibbons, Thermal hardening of cadmium crystals, Nature 162
[231] Y.L. Wang, J. Wu, C.W. Liu, T.C. Wang, J. Dun, Material characteristics and chemical– (1948) 488–489, https://doi.org/10.1038/162488a0.
mechanical polishing of aluminum alloy thin films, Thin Solid Films 332 (1998) [241] A.K. Head, X, The interaction of dislocations and boundaries, London, Edinburgh,
397–403, https://doi.org/10.1016/S0040-6090(98)01200-0. Dublin, Philos. Mag. J. Sci. 44 (1953) 92–94, https://doi.org/10.1080/
[232] Y. Li, M. Hariharaputhiran, S.V. Babu, Chemical–mechanical polishing of copper and 14786440108520278.
tantalum with silica abrasives, J. Mater. Res. 16 (2001) 1066–1073, https://doi.org/ [242] G.H. Conners, The interaction of a dislocation with a coated plane boundary, Int. J.
10.1557/JMR.2001.0148. Eng. Sci. 5 (1967) 25–38, https://doi.org/10.1016/0020-7225(67)90052-3.
[233] M. Hariharaputhiran, Chemical mechanical polishing of Ta, Electrochem. Solid- [243] J.C. Grosskreutz, The effect of oxide films on dislocation-surface interactions in al-
State Lett. 3 (1999) 95, https://doi.org/10.1149/1.1390969. uminium, Surf. Sci. 8 (1967) 173–190, https://doi.org/10.1016/0039-6028(67)
[234] N. Wang, G. Pan, Y. Liu, Synergistic roles of mixed inhibitors and the application of 90080-5.
mixed complexing ligands in copper chemical mechanical polishing, [244] J.C. Grosskreutz, D.K. Benson, The effects of the surface on the mechanical proper-
Microelectron. Eng. 88 (2011) 3372–3374, https://doi.org/10.1016/j.mee.2011.06. ties of metals, Surfaces Interfaces II, Springer US, Boston, MA 1968, pp. 61–94,
029. https://doi.org/10.1007/978-1-4757-0178-4_2.
[235] Y. Bai, Z. Shi, Y.J. Lee, H. Wang, Optical surface generation on additively [245] J.C. Grosskreutz, Mechanical properties of metal oxide films, J. Electrochem. Soc.
manufactured AlSiMg0.75 alloys with ultrasonic vibration-assisted machining, J. 116 (1969) 1232, https://doi.org/10.1149/1.2412286.
Mater. Process. Technol. 280 (2020), 116597. https://doi.org/10.1016/j. [246] D.H. Kaelble, Theory and analysis of peel adhesion: bond stresses and distributions,
jmatprotec.2020.116597. Trans. Soc. Rheol. 4 (1960) 45–73, https://doi.org/10.1122/1.548868.
[236] T. Inamura, G.Y. Feng, N. Takezawa, N. Mohri, Effect of surface oxidation on
micromachinability of monocrystalline silicon, CIRP Ann. 50 (2001) 393–396,
https://doi.org/10.1016/S0007-8506(07)62148-9.