BS EN ISO

14644-3
Cleanrooms & associated controlled
environmentsPart 3:
Metrology and test methods

DIS

BS EN ISO 14644-3
Metrology & Test Methods
Current Status
1. DIS was issued by ISO in September 02
2.UK comments to BSI to be made by end
December 02
3. LBI/30 will consider all UK comments by
end January 03
4.BSI vote to CEN/ISO by end February 03
5. DIS is valid and can be referred to and
used until it is superseded.
6. Likely time when revised DIS will be
available - mid 2004

BS EN ISO 14644-3
Metrology & Test Methods
14644-1:1999 Classification of air cleanliness
14644-2:2000 Specifications for testing and
monitoring to prove continued compliance
with -1
14644-3:DIS Metrology and test methods
14644-4:2001 Design, construction & start-up
14644-5:FDIS Operations
14644-6:CD
Vocabulary/terminology
14644-7:FDIS Separative devices
14644-8:CD
Classification of Airborne
Molecular Contamination

BS EN ISO 14644-3
Metrology & Test Methods
Current Status of BS 5295
BS 5295 Part 0: General Introduction
Current
BS 5295 Part 1: Classification - Withdrawn
BS 5295 Part 2: Design - Withdrawn
BS 5295 Part 3: Operation
- Current
BS 5295 Part 4: Compliance - Withdrawn

BS EN ISO 14644-3
Metrology & Test Methods
Current Status of BS 5295
BS 5295 Part 0: General Introduction
- Current
BS 5295 Part 1: Classification - 14644-1/3
BS 5295 Part 2: Design - 14644-4
BS 5295 Part 3: Operation
- Current
BS 5295 Part 4: Compliance - 14644-2
Some of BS5295 Part 1 is not addressed currently
and PD6609:2000 is being revised to bridge the
gap.
Part 3:Operation will be covered by 14644-5:FDIS

BS EN ISO 14644-3
Metrology & Test Methods
This part of BS EN ISO 14644 may be used for the
characterisation of a cleanroom as described and
specified in other parts of BS EN ISO 14644.
Not all cleanroom parameter test procedures are
shown.
Other standards may be considered to be applicable
The annexes to this document are informative. Ie
they are not compulsory, but form a
recommendation for compliance with the
standard.
Consequently, throughout the document references
are made to or as agreed between customer and
supplier

BS EN ISO 14644-3
Metrology & Test Methods
SUMMARY OF ESSENTIAL CONTENTS:
1. Scope - ISO standard text and also states that
alternative methods can be used based on
agreement between customer and supplier.
2. Normative - Reference to standards
Reference
3. Terms and - Helps understanding, and
Definitions
allows document to exist alone
4. Testing - Recommended tests with procedures
Procedures
and apparatus
5. Test Report - Reporting & documentation

BS EN ISO 14644-3
Metrology & Test Methods
Item 4 forms the crux of this section of the
standard.
Recommended tests are listed in table 1. Each
test has a procedure in Annex B and a
corresponding set of apparatus in Annex C.
The section of the standard referencing the
test is also given.
Selecting and scheduling of these tests is
discussed in Annex A.

BS EN ISO 14644-3
Metrology & Test Methods
Annex A
ANNEX A (Informative) Choice of recommended tests of an installation and the
sequence in which to carry them out

A1 Recommended test procedures

Choice of tests
Table A1: Test checklist for installation properties
Table A2: Test checklist for sequencing
The checklists are useful in that they can be taken from the standard
and used as a tool.

BS EN ISO 14644-3
Metrology & Test Methods
Annex A
Test Selection & Sequence
Checklist

Choose which tests are

required
Put them in a logical order for
your application
Where not applicable put N/A
Review the schedule of tests

BS EN ISO 14644-3
Metrology & Test Methods
Annex
B
ANNEX B (Informative)
- Test Methods
B1
B2
B3
B4
B5
B6
B7
B8
B9
B10
B11
B12
B13
B14

Airborne Particle Count (for classification)

Ultrafine Particle Count (for characterisation)
Macro Particle Count (for characterisation)
Airflow Test
Pressure Difference Test
Installed Filter Leakage Test
Flow Visualisation
Airflow Direction Test
Temperature Test
Humidity Test
Electrostatic & Ion Generator Test
Particle Deposition Test
Recovery Test
Containment Leak Test

BS EN ISO 14644-3
Metrology & Test Methods
Annex
B
ANNEX B (Informative)
- Test Methods
Each section comprises items on:
Principle - what and why
Recommended test procedure - how
Recommended apparatus - with what
Test report - detailed results

BS EN ISO 14644-3
Metrology & Test Methods
Annex
B
ANNEX B (Informative)
- Test Methods
B1

Airborne Particle Count (for classification)

Airborne test for size distributions with thresholds

between 0.1 and 5 microns to certify or verify
cleanliness classification

BS EN ISO 14644-3
Metrology & Test Methods
Annex
B
ANNEX B (Informative)
- Test Methods
B2

Ultrafine Particle Count (for characterisation)

Airborne test for particles with size distribution

thresholds less than 0.1 micron for
characterisation of the cleanroom

BS EN ISO 14644-3
Metrology & Test Methods
Annex
B
ANNEX B (Informative)
- Test Methods
B3

Macro Particle Count (for characterisation)

Airborne tests for particles with size distribution

thresholds greater than 5 microns for
characterisation of the cleanroom

BS EN ISO 14644-3
Metrology & Test Methods
Annex
B
ANNEX B (Informative)
- Test Methods
B4

Airflow Test

Tests to evaluate airflow velocity, uniformity of

airflow velocity and supply air volume depending
on classification.
Airflow velocity and uniformity tests are described
for use principally in unidirectional systems.
Air volume tests are described for unidirectional,
non unidirectional or supply air duct systems.
NB Political correctness avoids terms such as
laminar and turbulent flow systems

BS EN ISO 14644-3
Metrology & Test Methods
Annex
B
ANNEX B (Informative)
- Test Methods
B5

Air Pressure Difference Test

Verification of capability of installation to maintain

the specified PD between it and its
surroundings.

BS EN ISO 14644-3
Metrology & Test Methods
Annex
B
ANNEX B (Informative)
- Test Methods
B6

Installed Filter Leakage Test

Particle Counter and Photometer tests are both

described
Photometer method for ISO 5 and less (ie typically
non-unidirectional), and for MPPS Filters with
penetrations > 0.005% (H14 and lower to BS EN
1822) Acceptance criteria is 0.01% for all grades.
DPC method more sensitive unidirectional systems.
Evaluation of scan rate and allowable particle
counts is based on BS EN 1822 part 4 and DIN
24184.

BS EN ISO 14644-3
Metrology & Test Methods
Annex
B
ANNEX B (Informative)
- Test Methods
B6

Installed Filter Leakage Test

Note error on B6.3.5 formula for scan rate

Sr <= Cc.Ps.K.Dp.Fs/Np is equivalent to
Sr = 472 Cc.Ps.K.Dp/Np
Units should be (cm/s)

BS EN ISO 14644-3
Metrology & Test Methods
Annex
ANNEX B (Informative)
- Test B
Methods
B7

Flow Visualisation

Tests to demonstrate airflow characteristics in the

installation.
Techniques described are by thread, tracer
injection or image processing (CFD)

BS EN ISO 14644-3
Metrology & Test Methods
Annex
ANNEX B (Informative)
- Test B
Methods
B8

Airflow Direction Test

Tests to demonstrate airflow directional

characteristics in the installation.
Techniques described are by thread, tracer
injection or image processing (CFD)

BS EN ISO 14644-3
Metrology & Test Methods
Annex
ANNEX B (Informative)
- Test B
Methods
B9

Temperature Test

Tests to demonstrate temperature characteristics

in the installation.
Techniques described are for general or more
exacting measurement requirements.

BS EN ISO 14644-3
Metrology & Test Methods
Annex
ANNEX B (Informative)
- Test B
Methods
B10 Humidity Test
Tests to demonstrate the humidity characteristics
of the installation using measurements of dew
point or relative humidity
Humidity tests should be performed in conjunction
with the temperature test.

BS EN ISO 14644-3
Metrology & Test Methods
Annex
ANNEX B (Informative)
- Test B
Methods
B11 Electrostatic & Ion Generator Test
Tests to evaluate the level of electrostatic charge
and dissipation rate in the installation.
Techniques for the measurement of surface voltage
and resistance as well as ioniser performance
are suggested

BS EN ISO 14644-3
Metrology & Test Methods
Annex
ANNEX B (Informative)
- Test B
Methods
B12 Particle Deposition Test
Tests to evaluate the level of particulates that can
be deposited on work or surfaces in the
installation.
Techniques using witness plates or a fall out
photometer are suggested.

BS EN ISO 14644-3
Metrology & Test Methods
Annex
ANNEX B (Informative)
- Test B
Methods
B13 Recovery Test
Test to evaluate the capability of the clean air
system to recover from a particle generating
event principally in non-unidirectional
applications.

BS EN ISO 14644-3
Metrology & Test Methods
Annex
ANNEX B (Informative)
- Test B
Methods
B14 Containment Leak Test
Test to evaluate the intrusion of contaminated air
from surrounding areas using DPC or Photometer
methods.

BS EN ISO 14644-3
Metrology & Test Methods
Annex C

Annex C (Informative) - Test Instruments

Describes test apparatus that should be used for the

corresponding recommended tests in Annex B. There is a
recommendation that apparatus should be subject to
agreement between the customer and the supplier.
The information provided is not limiting, it represents a sensible
minimum requirement. Ie Equipment that becomes available
through improvements in measurement technology are not
restricted by this Annex.
Equally alternate equipment may be suitable and may be used
subject to agreement.

BS EN ISO 14644-3
Metrology & Test Methods
C - example
Annex C (Informative) Annex
- Test Instruments
C1.
Discrete Particle Counter (DPC).
C2.
Condensation Nucleus Counter (CNC).
C3.
Microscope, Cascade Impactor, DPC, Time of Flight.
C4.
Anemometers - Thermal, Ultrasonic, Vane, Pitot, Hood.
C5.
Manometers - Electronic, Inclined, Mechanical.
C6.
Photometer, DPC, Aerosol Generator,
C7.
Anemometers, Tracers, Aerosol generator.
C8.
Anemometers, Tracers, Aerosol generator.
C9.
Liquid in Glass thermometer, Electronic thermometer.
C10. Humidity meters; Capacitive, Hair.
C11. Voltmeter, Ohmmeter, Charged plate monitor.
C12. Microscope, Fall-out Meter.
C13. Discrete Particle Counter (DPC).
C14. Discrete Particle Counter (DPC), Photometer, Aerosol
Generator.

BS EN ISO 14644-3
Metrology & Test Methods
UK public comments on this section to BSI
need to be made in written form and in an
approved format by end December 02
otherwise they will not be considered.

This presentation has been prepared

and delivered by:-

Wander ter Kuile

McLeod Russel UK Ltd
c/o Vokes Ltd
Henley Park
Guildford
Surrey, GU3 2AF
UK

tel 01483 207236

fax 01483 235384
e-mail wander.ter.kuile@vokes.com