CMM

CMM – Coordinate Measuring Machine

 CMM

Cylindricity

Flatness

Roundness

CMM – Coordinate Measuring Machine

CMM
CMM
CMM
CMM
CMM
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 CMM

Total Number of Layers= 4 Total Number of Layers= 5

Number of Inspection Points per layer= 8 Number of Inspection Points per layer= 4
Total Number of Probing points= 32 Total Number of Probing points= 20
CMM
 Four Modes of Operation

Manual Mode
Teaching Mode
Interactive Mode
Programming Mode
- Manual Program
- Automatic Program
 CMM

Flatness = 6 faces
Parallelism = 3
Perpendicularity = 12
Total = 21 tolerances

CMM – Coordinate Measuring Machine

 CMM

CMM – Coordinate Measuring Machine

 CMM

CMM – Coordinate Measuring Machine

Principles of Nanometrology
 About nanometrology
•The standardization of methods for
• measurement,
• imaging
• properties recording,
at nanoscale undergo continuous updating.
 Step by step

1. Size determination: PSD for particles (GSD, Grain Size

Det., for polycrystalline materials)
2. Surface Specific Area, SSA
3. Z potential, hydrodynamic radius and electrophoretic
mobility
4. Surface and 3D imaging, lattice properties
 1. PSD, Particle Size Distribution

Photon Correlation Spectroscopy.

Fluctuations of the light scattered from dispersed objects in
suspension are due to Brownian motion and are
proportional to the size of these objects.
Smaller particles move faster, causing a rapid decay of
scattering

This method of measurement is standardised according to

ISO 13320-1.
Dynamic Scatter Light: in the exemple the powder contains 50% of
nanparticles sized 5 nm and 50% of their aggregates, sized 50nm.
The number and the volume of particles, and the intensity of the
scattered light are shown.
•Note that for particles of larger size the intensity is greater:
in fact, smaller particles move faster, causing a rapid decay of
scattering.
 2. SSA, Specific Surface Area

The specific surface area, or the total surface area per

gram of material, is one of the main properties
characterizing nanomaterials, in which it is very larger than
in bulk materials.

Measurement

The material is inserted in a closed container, under

nitrogen. The gas adsorption to the surface causes
a drop of the pressure of nitrogen proportional to the surface
Area (B.E.T. method).
3a. Z potential and hydrodynamic radius

•An electrical double layer sorrounds charged particles in

liquid suspensions.

•Around them, two regions differentiate: one (the lighter

layer) where charges are diffuse, another (darker) where
the charges are stricly bonds (Stern layer).

•It moves together with the atoms forming the sorrounded

sphere and represents the hydro-dynamic radius.

•The electric potential at the boundary between Stern and

diffuse radius is called Z potential.
 Measuring the Z potential.
•A laser beam passes through a cell containing the
nanoparticles suspension.
•When an electric field is applied to the cell, the
charged particles moves.
•When interfering with the laser beam, they cause the
laser intensity fluctuate: the recorded signal is
proportional to the particle speed.
•Decrease in Z potential is followed by dramatical
aggregation of nanoparticles, big aggregates does not
move in the beam light.
1) laser; 2) attenuator; 3) cell; 4) compensation optics;
5) computer
 3b. Electrophoretical mobility.

Uε = 2 ε ζ f (k a) / 3 η
The Henry’s equation for measuring the electrophoretical
mobility (Uε) includes the following variables:
ε: dielectric constant
ζ : Z potential
η: viscosity
F (k a) : Henry’s function

Environmental variables, as pH, concentration of ions and

of sufractant-acting molecules, including polymers and
organics, affects the Z potential.
4. Surface and 3D imaging,
lattice properties
 4a. TEM: Transmission Electron
Microscopy
Basics: The electrons interacts with the ultra thin specimen and are
transmitted through that, than recorded, The image corresponding to
the transmitted electrons is magnified on a screen, a photographic
layer or another sensor.

The tomographic reconstruction provides 3D images, diffraction

methods give informations about the crystalline state of the
sample, and the cryo-vitrification shows the macromolecule
assemblies inside the sample.

Resolution: depth: 200nm, lateral resolution: 2-20nm.

 TEM: scheme

http://www.nobelprize.org/educational/physics/microscopes/tem/index.html
 4b. SEM: Scanning Electron
Microscopy

Basics: SEM uses a high-energy beam of

electrons. The beam is condensed and directed
at the sample surface. The interactions occurring
during the scanning are recorded.

Resolution: depth: 1nm-5μm, lateral

resolution: 1-20nm.
 SEM: Scheme

SEM image of Co3O4 nanoparticles in cluster

http://www-archive.mse.iastate.edu/microscopy/path2.html
 4c. AFM: Atomic Force
Microscopy
Basics: The tip of a probe (cantilever) is slowly
scanned across the surface. A laser beam,
focused on the cantilever, records on a
photodetector the deflection of the cantilever,
caused by the interaction of its atoms with those
on the sample surface.

Resolution: depth: 0.5nm-5nm; lateral

resolution: 0.2-130 nm.
AFM: Scheme

AFM image of Co3O4 nanoparticles