Excellent

Good
Poor
Bad
Not known

PANalytical Hitachi / Oxford Rigaku Horiba Thermo Xenemetrics

Epsilon 1 LabX5000 QC X-5000 NITON FXL Genius-IF

Mobility Can be placed in the back of a Can be placed in back of a Not advertized
car car Portable Portable Portable

X-ray safety Shielded X-rays Shielded X-rays Shielded X-rays Shielded X-rays Shielded X-rays Shielded X-rays

Hardware High-resolution SDD <145 eV + High-resolution SDD Si-PIN detector, like very low current and poor very low current and poor Higher resolution SDD: 125
performance mature SW, 6+1 primary filters, MiniPal 2 light-element results light-element results eV, 10 W
Ag tube (line overlap with Ar)
features

Large sample 150x120x 100 mm Only small samples 190x165x60 mm 300x200x 125 305x229x114 mm 220x220x50 mm
mode

Elemental Na – Am Mg – U Na – U Mg – U Mg - U, up to 40 elements Na – U
range

Userfriend- Simple touchscreen, different Limited SW. One-touch Touchscreen Limited SW. No Simple touchscreen, Several external modules as
liness samples possible, easy to operation + touchscreen. 6 sample spinner deconvolution. different samples possible options, like vacuum and
calibrate Factory-loaded application helium, autosampler, spinner

Price /
performance ++ + + - + ++

1
 Excellent
Good
Poor
Bad
Not known
PANalytical Rigaku DE VS Skyray 2800 Bruker M1 Mistral Oxford Maxxi-5 range Spectro Midex
Epsilon 1 Meso

Hardware 15 W, max 1.5 mA, 10 mm2 50 W, 50 kV, 1 mA, 30 W, 48 kV, Mo-anode,

performance 165 eV Si-Pin Diode,
SDD detector 12 W, 60 kV, SDD detector 30 mm2 SDD detector, top Si-Pin, 60 kV, 1.2 mA 10 mm2 or 30 mm2 SDD
current up to 1 mA
features illumination detector

Spot size on Collimator changer Default 1 (SD) or 1.2 mm

Variable collimator: 1/3, 5 , Collimator sizes >0.1 mm
sample / Fixed collimator of 0.3 mm,
10 mm spot size on
Collimators: 8, between (0.1mm - 0.3mm -0.5mm
(min 4 mm measurment
(LD)
collimator < 1 mm2 spot on sample 0.1 and 1 mm –0.7mm - 1 mm) / top Optional variable
sample spot)
illumination meas. Spot: 0.2 – 4.4

Elemental
Na – Am Na – U S-U Ti - U Ti – U Mg – U
range
Large sample 750 x 600 x 670 mm / 235 x 178 x 160 mm / XYZ
150 x 120 x 100 mm 305 x 305 x 105 605 x 395 x 100 mm 100 x 100 x 100 mm
mode automatic XYZ stage stage

Flexible for Standardless software Omnian,

Standardless analysis is
Designed for RoHS
Fundamental parameter
applications possible to set up multiple testing, and for noble 6 Used for multi-layer analysis
optional functionallity for alloys
calibrations, Stratos metals characterization

RoHS Yes Yes 2

No Maxxi 6 is with SDD Yes (incl. pre-cal RoHS in
compatibility Yes + ASTM F2617 compliant @1mm LLD Pb = 65 ppm LLD Cd, Pb, Cr, Br, Pb Yes
detector and RoHS comp plastics)
in 200 sec claim is 1 ppm

Price /
performance ++ (~37.5k) + (~ 60k) ++ (~22.5k) + (~50k) + (~50k) ++ (~60k)
 Excellent
Good
Poor
Bad
Not known

PANalytical Oxford Bruker Rigaku Spectro Shimadzu

Epsilon 4 10W Xsupreme8000 S2 Puma QC+ Xepos D EDX-7000
Hardware 9 W, 2 mA, 4 -50 kV SDD detector max.2 mA Only 4W
2D EDXRF, Pd/Co anode
Rh tube only, will have
max. 2 mA 50 kV tube
performance <145 eV SDD10, 1500 No spectrum deconvolution, 10 - 50 kV tube Only 50 kcps
< 130 eV SDD,
overlap with S peak
features kcps but region of interest 141 eV SDD SDD detector max 1 mA
1,000,000 counts

Large sample
100x200x100 mm no up to 52 mm 190x165x60 mm 45x372x253 mm 297x210x100 mm
mode
Sample changer Option: 1, 11 or 20
Optional: 6 positions and
Default 12 positions. 1
Default: 10 positions + Default 10 positions, no positions. Spinner only in position spinner is optional. Optional 12 positions, no
and spinner spinner spinner combination with XYZ
no spinner or 1 position
8 pos. tray with spinning of spinner
and a sample spinner
changer 40 mm samples available

Helium Standard Standard Optional Optional Standard Optional

Elemental range Na – U
F-Am Na - U Na – U Na - U LLD Na (300 sec) = 650 Na - U
ppm

Automation Yes No Yes, via conveyor belt No No No

3
Price /
performance ++ +/- + +/- + +
 Excellent
Good
Poor
Bad
Not known

PANalytical Bruker Rigaku Spectro Shimadzu

Epsilon 4 15W S2 Puma (LE) CG Xepos HE EDX-8000
Hardware max. 3 mA, 1.5 Mcps max 1 mA max. 2 mA 60 kV tube, Pd/ Co max. 1 mA
max.2 mA
performance 4-50 kV tube
10-50 kV tube, 50 W
50 kV tube anode, < 130 eV SDD, 4-50 kV Rh tube. Not the
features <145 eV SDD SDD 1 Mcps counts, HAPG target advantage of high currents at low
141 eV SDD
30 mm2 detector or SDDultra 3D-EDXRF for combi 2D/3D EDXRF voltages, SDD

Standardless TurboQuant Fundamental Parameter based

Omnian
analysis Can compensate for different
Equa all: only compares known Only semi-quantitative results Good with known samples, analysis, compensate for scattered
standards in similar matrices without extra standards hard to deal with unfamiliar peaks, user can compare with
matrices
matrices library

Spinner and sample Option: 1, 11 or 20 positions. Default 12 positions

Optional 12 positions. No spinner
changer Default: Spinner + 10 positions Spinner only in combination with Option: 9 positions with spinner 1 position spinner = standard
possible.
XYZ changer solution.

Helium
Standard Optional, also vacuum as option Optional, also vacuum as option Optional Optional, also vacuum is as option

Elemental range Na – U
F-Am (optional C-Am) C-U Na - U F not possible because of 3D C-U
optics
4
Price / performance
++ + + ++ +