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Suha equation 6وجود البلازما و معادلة ساھ
Suha equation 6وجود البلازما و معادلة ساھ
) ( 3-1
ND
6 -1 Suha equation:
.
.
%5.1 ) ( % (1.015.0 .
.
:
)(13 -1
) (Energetic Collision
/
) (Ki/Vi
.
) (Recombination Rate ) (Ni
.Ni
) ) (Ni ( .
) (execition
.
) (Recombination
. ) (1-4 .
+ +CF4
) ( 4-1
7-1 :
:
-1
<<
-2 )>> 1
:
:
) =( /
)(14 -1
-3
/
)(15 -1
:
>
.
8 -1 :
-a ) (Cold Plasma
) (
) ( ) (
) (1ev .
-b )(Hot Plasma
) (Tok mak
) (10Mev ) (
.
.
.
)
( ) (
.
) 1
(
.
:
-1 .
-2 .
1 . ) 1 ( .