Angle between planes

Angle between two planes (u1,v1,w1) and (u2,v2,w2) is given by

cos

u1u 2 v1v2 w1 w2
2

v1 w1 u 2 v2 w2
2 2 2 2

Separation between two adjacent parallel planes is

d a h2 k 2 l 2

Example: Find the number of Si atoms/cm2 on the (100) surface of a Si wafer.

a=5.43 A (room temperature)

Calculate the volume density of Si atoms

Calculate the surface density of Si in (110) plane

6.783...X 1014 atoms/cm2

Orientation effects in Si
<111>directions are the least expensive from the manufacturing point of view. etching is slowest along the <111> directions. Chemical etching of Si will preferentially expose {111} planes.This will facilitate cutting of V grooves in a {100} surface. Silicon tends to cleave on {111} planes. {100} surface is suitable for defining scribe lines for rectangular chips. Scribe lines are described along <110> directions and all <110>directions are mutually at right angles on a (100) surface. Defining scribe lines on a (111) surface is difficult.

(111) surface

(100) surface

Orientation effects in Si
Growth of Si is difficult in {110} planes. Four of the {111} planes meet (110) Si at 90o on the surface. Used for etching vertical grooves. Diffusion, oxidation etc are also orientation dependent. MOS circuits are fabricated on {100}surface only.

Flats

Flats

Vertical Groove

V-groove