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VLSI-5 Short Channel Effects PDF
VLSI-5 Short Channel Effects PDF
1
1 L
I Dsat
1
L L L
L
1
W
2
I D, sat nCox VGS VTH 1 VDS VD,sat
2
L
is the channel length modulation coefficient.
and L
The effect of channel-length modulation is less for a longchannel MOSFET than for a short-channel MOSFET.
Velocity Saturation
In state-of-the-art MOSFETs, the channel is very short (<0.1m);
hence the lateral electric field is very high and carrier drift
velocities can reach their saturation levels.
The electric field magnitude at which the carrier velocity saturates is Esat.
v
vsat
6
6
10
cm/s for holes in Si
Cox
VGS / m
VGS
C C
dep
ox
Sub-threshold swing:
log (ID)
VGS
VGS
d (log10 I DS )
S
dVGS
1<<2
Low VTH
High VTH
IOFF,low VTH
VTH cannot be
reduced aggressively.
IOFF,high VTH
0
VGS