X-Ray orientation data

Wafer
X-ray (100)
1
0
2
-0.3
3
0.4
4
0.2
5
-0.3
6
-0.3
7
0.3
8
-0.1
9
0.4
10
-0.1
11
-0.5
12
0.3
13
0.4
14
-0.1
15
-0.2
16
-0.3
17
0.1
18
0
19
0
20
0.1
21
0.4
22
0.1
23
-0.3
24
0.4
25
-0.2
26
0.4
27
-0.1
28
-0.2
29
0.4
30
-0.2
d2=
D3=
D4=

1.128
0
3.267

X
Moving Range UCL
CL
1.032137
0.3 1.032137
0.7 1.032137
0.2 1.032137
0.5 1.032137
0 1.032137
0.6 1.032137
0.4 1.032137
0.5 1.032137
0.5 1.032137
0.4 1.032137
0.8 1.032137
0.1 1.032137
0.5 1.032137
0.1 1.032137
0.1 1.032137
0.4 1.032137
0.1 1.032137
0 1.032137
0.1 1.032137
0.3 1.032137
0.3 1.032137
0.4 1.032137
0.7 1.032137
0.6 1.032137
0.6 1.032137
0.5 1.032137
0.1 1.032137
0.6 1.032137
0.6 1.032137
0 0.3793103448

0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0

X Control Chart

UCL
CL
LCL
R Control Chart

UCL
CL
LCL

X
LCL

R
UCL
CL
LCL
-0.9854707753 1.239207 0.37931
-0.9854707753 1.239207 0.37931
-0.9854707753 1.239207 0.37931
-0.9854707753 1.239207 0.37931
-0.9854707753 1.239207 0.37931
-0.9854707753 1.239207 0.37931
-0.9854707753 1.239207 0.37931
-0.9854707753 1.239207 0.37931
-0.9854707753 1.239207 0.37931
-0.9854707753 1.239207 0.37931
-0.9854707753 1.239207 0.37931
-0.9854707753 1.239207 0.37931
-0.9854707753 1.239207 0.37931
-0.9854707753 1.239207 0.37931
-0.9854707753 1.239207 0.37931
-0.9854707753 1.239207 0.37931
-0.9854707753 1.239207 0.37931
-0.9854707753 1.239207 0.37931
-0.9854707753 1.239207 0.37931
-0.9854707753 1.239207 0.37931
-0.9854707753 1.239207 0.37931
-0.9854707753 1.239207 0.37931
-0.9854707753 1.239207 0.37931
-0.9854707753 1.239207 0.37931
-0.9854707753 1.239207 0.37931
-0.9854707753 1.239207 0.37931
-0.9854707753 1.239207 0.37931
-0.9854707753 1.239207 0.37931
-0.9854707753 1.239207 0.37931
-0.9854707753 1.239207 0.37931

X Control Chart

0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0

Mean Co
2
1
1
0
0

15

-2

Moving Rang
1.4
1.2
1
0.8
Range 0.6

1.0321
0.3793
-0.9855
Moving Range Control Chart
1.2392
0.3793
0.0000

10

-1

Moving Range Control Chart

R Control Chart

-1

0.4
0.2
0
0

10

15
Sample

Mean Control Chart

X-Ray
UCL
CL
5

10

15

20

25

30

35

LCL

Moving Range Control Chart

Range VS Sample

UCL

CL

LCL

0
0

10

15
Sample

20

25

30

35

2
Total: 30 times polishing

Sample
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
27
28
29
30

Wafer thickness (um) (Lapping)

wafer1 wafer2
wafer3 wafer4
464
466
467
460
477
472
462
475
464
479
474
464
479
466
473
479
479
470
479
480
472
467
474
480
478
462
477
471
465
471
465
462
473
480
466
478
471
478
465
460
464
468
468
463
479
467
471
469
465
462
469
471
461
473
472
461
479
461
475
464
480
472
473
461
464
463
473
468
480
474
461
468
476
478
465
474
474
461
463
478
460
466
461
475
472
479
465
478
463
460
460
480
473
465
480
473
475
462
463
463
476
468
464
471
473
474
463
480
475
471
461
461
464
468
462
470
465
470
478
469

X bar
Min
464.25
471.5
470.25
474.25
477
473.25
472
465.75
474.25
468.5
465.75
471.5
466.75
466.75
469.75
471.5
467
470.75
473.25
469
465.5
473.5
465.75
472.75
465.75
469.75
472.5
467
466
470.5
469.7333

Max
460
462
464
466
470
467
462
462
466
460
463
467
462
461
461
461
463
461
465
461
460
465
460
465
462
464
463
461
462
465

467
477
479
479
480
480
478
471
480
478
468
479
471
473
479
480
473
480
478
478
475
479
480
480
475
476
480
475
470
478

Mean Control Chart

485
480

Mean

475

Mean VS Sample

470

UCL

465

LCL

460

X Bar Bar

Mean Control Chart

485
480

Mean

475

Mean VS Sample

470

UCL

465

LCL

460

X Bar Bar

455
450
0

10

15

20

Sample

25

30

35

Range
7
15
15
13
10
13
16
9
14
18
5
12
9
12
18
19
10
19
13
17
15
14
20
15
13
12
17
14
8
13
13.5

xx
rr
A2
D3
D4

UCL
CL
LCL

469.7333
13.5
0.729
0
2.282
X control Chart
479.5748
469.7333
459.8918

R Control Chart
UCL
CL
LCL

30.807
13.5
0

UCL
LCL
479.5748 459.8918
479.5748 459.8918
479.5748 459.8918
479.5748 459.8918
479.5748 459.8918
479.5748 459.8918
479.5748 459.8918
479.5748 459.8918
479.5748 459.8918
479.5748 459.8918
479.5748 459.8918
479.5748 459.8918
479.5748 459.8918
479.5748 459.8918
479.5748 459.8918
479.5748 459.8918
479.5748 459.8918
479.5748 459.8918
479.5748 459.8918
479.5748 459.8918
479.5748 459.8918
479.5748 459.8918
479.5748 459.8918
479.5748 459.8918
479.5748 459.8918
479.5748 459.8918
479.5748 459.8918
479.5748 459.8918
479.5748 459.8918
479.5748 459.8918

Range Control Chart

35
30
Mean VS Sample
UCL
LCL
X Bar Bar

Range

25

Range VS Sam

20

UCL

15

LCL

10

rr

Range Control Chart

35
30
Mean VS Sample
UCL
LCL
X Bar Bar

Range

25

Range VS Sam

20

UCL

15

LCL

10

rr

5
0
0

10

15

20

Sample

25

30

35

X bar bar
469.7333
469.7333
469.7333
469.7333
469.7333
469.7333
469.7333
469.7333
469.7333
469.7333
469.7333
469.7333
469.7333
469.7333
469.7333
469.7333
469.7333
469.7333
469.7333
469.7333
469.7333
469.7333
469.7333
469.7333
469.7333
469.7333
469.7333
469.7333
469.7333
469.7333

art
Range VS Sample
UCL
LCL
rr

UCL
LCL
30.807
30.807
30.807
30.807
30.807
30.807
30.807
30.807
30.807
30.807
30.807
30.807
30.807
30.807
30.807
30.807
30.807
30.807
30.807
30.807
30.807
30.807
30.807
30.807
30.807
30.807
30.807
30.807
30.807
30.807

R bar
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0

13.5
13.5
13.5
13.5
13.5
13.5
13.5
13.5
13.5
13.5
13.5
13.5
13.5
13.5
13.5
13.5
13.5
13.5
13.5
13.5
13.5
13.5
13.5
13.5
13.5
13.5
13.5
13.5
13.5
13.5

art
Range VS Sample
UCL
LCL
rr

35

Sample
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
27
28
29
30

Wafer diameter (mm) (Grinding)

wafer1 wafer2
wafer3
200.08
199.98
199.95
199.98
199.98
199.95
200.02
199.98
200.04
200.00
199.98
199.96
199.90
199.91
200.09
200.02
199.92
200.04
200.07
200.02
200.00
199.97
200.05
200.00
200.01
200.07
200.08
199.90
200.01
199.93
199.92
199.95
200.10
199.97
200.04
200.04
200.10
200.06
199.97
199.98
199.99
200.07
200.02
199.95
199.99
199.95
200.08
200.00
200.00
200.03
199.92
199.91
200.02
199.95
199.95
200.03
200.04
199.93
200.05
200.01
200.07
199.93
200.02
200.05
199.93
199.96
200.04
199.99
200.01
200.08
200.01
200.03
200.01
199.94
200.02
199.94
200.09
199.93
199.96
199.95
200.04
199.99
200.03
199.94
199.95
200.04
199.93
200.06
200.07
199.93
x bar bar

X Bar
Min
200.00
199.95
199.97
199.95
200.01
199.98
199.98
199.96
199.97
199.90
199.99
199.92
200.03
200.00
200.01
199.97
200.05
200.01
199.95
199.90
199.99
199.92
200.02
199.97
200.04
199.97
200.01
199.98
199.99
199.95
200.01
199.95
199.98
199.92
199.96
199.91
200.01
199.95
200.00
199.93
200.01
199.93
199.98
199.93
200.01
199.99
200.04
200.01
199.99
199.94
199.99
199.93
199.98
199.95
199.99
199.94
199.97
199.93
200.02
199.93
200.00

Mean Control Chart

200.20
200.10

Mea

200.00
Mean

UCL

LCL

199.90

xx

199.80
199.70
0

10

15
Sample

20

25

30

35

Mean

LCL

199.90

xx

199.80
199.70
0

10

15
Sample

20

25

30

35

Max
Range
200.08
0.13
199.98
0.03
200.04
0.06
200.00
0.04
200.09
0.19
200.04
0.12
200.07
0.07
200.05
0.08
200.08
0.07
200.01
0.11
200.10
0.18
200.04
0.07
200.10
0.13
200.07
0.09
200.02
0.07
200.08
0.13
200.03
0.11
200.02
0.11
200.04
0.09
200.05
0.12
200.07
0.14
200.05
0.12
200.04
0.05
200.08
0.07
200.02
0.08
200.09
0.16
200.04
0.09
200.03
0.09
200.04
0.11
200.07
0.14
R bar
0.10

UCL
200.1023
200.1023
200.1023
200.1023
200.1023
200.1023
200.1023
200.1023
200.1023
200.1023
200.1023
200.1023
200.1023
200.1023
200.1023
200.1023
200.1023
200.1023
200.1023
200.1023
200.1023
200.1023
200.1023
200.1023
200.1023
200.1023
200.1023
200.1023
200.1023
200.1023

X control Chart
UCL
200.10233833
CL
200.00
LCL
199.89432833
R Control Chart
UCL
0.26169
CL
0.10
LCL
0
xx
rr
A2
D3
D4

200.00
0.10
1.023
0
2.574

Range Control C

rol Chart
0.30
0.25
Mean VS Sample
UCL

0.20

LCL

0.15

xx

0.10
0.05

25

30

35

0.00
0

10

15

20

25

30

LCL

0.15

xx

0.10
0.05

25

30

35

0.00
0

10

15

20

25

30

LCL
X bar bar
199.8943
200.00
199.8943
200.00
199.8943
200.00
199.8943
200.00
199.8943
200.00
199.8943
200.00
199.8943
200.00
199.8943
200.00
199.8943
200.00
199.8943
200.00
199.8943
200.00
199.8943
200.00
199.8943
200.00
199.8943
200.00
199.8943
200.00
199.8943
200.00
199.8943
200.00
199.8943
200.00
199.8943
200.00
199.8943
200.00
199.8943
200.00
199.8943
200.00
199.8943
200.00
199.8943
200.00
199.8943
200.00
199.8943
200.00
199.8943
200.00
199.8943
200.00
199.8943
200.00
199.8943
200.00

UCL
LCL
R bar
0.26169
0
0.10
0.26169
0
0.10
0.26169
#REF!
0.10
0.26169
0.10
0.26169
0.10
0.26169
0.10
0.26169
0.10
0.26169
0
0.10
0.26169
0
0.10
0.26169
0
0.10
0.26169
0
0.10
0.26169
0
0.10
0.26169
0
0.10
0.26169
0
0.10
0.26169
0
0.10
0.26169
0
0.10
0.26169
0
0.10
0.26169
0
0.10
0.26169
0
0.10
0.26169
0
0.10
0.26169
0
0.10
0.26169
0
0.10
0.26169
0
0.10
0.26169
0
0.10
0.26169
0
0.10
0.26169
0
0.10
0.26169
0
0.10
0.26169
0
0.10
0.26169
0
0.10
0.26169
0
0.10

Range Control Chart

Range VS Sample
UCL
LCL
r r

15

20

25

30

35

0.26169

LCL
r r

15

20

25

30

35

HCl concentration (%)

Observatio(%)
r
1
54
2
49
3
50
4
40
5
59
6
48
7
53
8
54
9
46
10
49
11
43
12
60
13
42
14
58
15
40
16
43
17
41
18
51
19
44
20
47
21
52
22
48
23
57
24
47
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17

49
49
49
60
52
44
59
42
44
46
49
50
48
46
41
57
53

UCLx
LCLx
UCLr
LCLr
71.0479 26.86877 27.15522
5 71.0479 26.86877 27.15522
1 71.0479 26.86877 27.15522
10 71.0479 26.86877 27.15522
19 71.0479 26.86877 27.15522
11 71.0479 26.86877 27.15522
5 71.0479 26.86877 27.15522
1 71.0479 26.86877 27.15522
8 71.0479 26.86877 27.15522
3 71.0479 26.86877 27.15522
6 71.0479 26.86877 27.15522
17 71.0479 26.86877 27.15522
18 71.0479 26.86877 27.15522
16 71.0479 26.86877 27.15522
18 71.0479 26.86877 27.15522
3 71.0479 26.86877 27.15522
2 71.0479 26.86877 27.15522
10 71.0479 26.86877 27.15522
7 71.0479 26.86877 27.15522
3 71.0479 26.86877 27.15522
5 71.0479 26.86877 27.15522
4 71.0479 26.86877 27.15522
9 71.0479 26.86877 27.15522
10 71.0479 26.86877 27.15522

0
0
11
8
8
15
17
2
2
3
1
2
2
5
16
4

68.53587
68.53587
68.53587
68.53587
68.53587
68.53587
68.53587
68.53587
68.53587
68.53587
68.53587
68.53587
68.53587
68.53587
68.53587
68.53587
68.53587

29.21413
29.21413
29.21413
29.21413
29.21413
29.21413
29.21413
29.21413
29.21413
29.21413
29.21413
29.21413
29.21413
29.21413
29.21413
29.21413
29.21413

24.16957
24.16957
24.16957
24.16957
24.16957
24.16957
24.16957
24.16957
24.16957
24.16957
24.16957
24.16957
24.16957
24.16957
24.16957
24.16957
24.16957

0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0

18
19
20
21
22
23
24

40
57
57
40
49
41
51

13
17
0
17
9
8
10

68.53587
68.53587
68.53587
68.53587
68.53587
68.53587
68.53587

29.21413
29.21413
29.21413
29.21413
29.21413
29.21413
29.21413

24.16957
24.16957
24.16957
24.16957
24.16957
24.16957
24.16957

0
0
0
0
0
0
0

XBAR
RBAR
48.95833 8.304348
48.95833 8.304348
48.95833 8.304348
48.95833 8.304348
48.95833 8.304348
48.95833 8.304348
48.95833 8.304348
48.95833 8.304348
48.95833 8.304348
48.95833 8.304348
48.95833 8.304348
48.95833 8.304348
48.95833 8.304348
48.95833 8.304348
48.95833 8.304348
48.95833 8.304348
48.95833 8.304348
48.95833 8.304348
48.95833 8.304348
48.95833 8.304348
48.95833 8.304348
48.95833 8.304348
48.95833 8.304348
48.95833 8.304348
48.875
48.875
48.875
48.875
48.875
48.875
48.875
48.875
48.875
48.875
48.875
48.875
48.875
48.875
48.875
48.875
48.875

7.391304
7.391304
7.391304
7.391304
7.391304
7.391304
7.391304
7.391304
7.391304
7.391304
7.391304
7.391304
7.391304
7.391304
7.391304
7.391304
7.391304

sample

xbar
rbar
uclx
lclx
1 48.95833 8.304348 71.0479 26.86877
2
48.875 7.391304 68.53587 29.21413

Mean Control Chart

80
70
60
50
40
30
20
10
0
0

10

15

20

25

Range Control Chart

30
25
20
15
10
5
0
0

10

15

20

Mean Control Chart

80
70
60
50
40

25

Mean Control Chart

80

48.875
48.875
48.875
48.875
48.875
48.875
48.875

7.391304
7.391304
7.391304
7.391304
7.391304
7.391304
7.391304

70
60
50
40
30
20
10
0
0

10

15

20

25

Range Control Chart

30
25
20
15
10
5
0
0

10

15

20

25

uclr
lclr
27.15522
24.16957

0
0

ntrol Chart

UCL
LCL
X
X BAR

20

25

30

ntrol Chart
X
UCL
LCL
R Bar

20

25

30

trol Chart
X
UCL
LCL

trol Chart
X
UCL
LCL
X Bar

20

25

30

ntrol Chart
X
UCL
LCL
R Bar

20

25

30

HCl concentration (%)

X
Observation
(%)
r
UCL
CL
LCL
1
54
71.0443648 48.95833 26.8723
2
49
5 71.0443648 48.95833 26.8723
3
50
1 71.0443648 48.95833 26.8723
4
40
10 71.0443648 48.95833 26.8723
5
59
19 71.0443648 48.95833 26.8723
6
48
11 71.0443648 48.95833 26.8723
7
53
5 71.0443648 48.95833 26.8723
8
54
1 71.0443648 48.95833 26.8723
9
46
8 71.0443648 48.95833 26.8723
10
49
3 71.0443648 48.95833 26.8723
11
43
6 71.0443648 48.95833 26.8723
12
60
17 71.0443648 48.95833 26.8723
13
42
18 71.0443648 48.95833 26.8723
14
58
16 71.0443648 48.95833 26.8723
15
40
18 71.0443648 48.95833 26.8723
16
43
3 71.0443648 48.95833 26.8723
17
41
2 71.0443648 48.95833 26.8723
18
51
10 71.0443648 48.95833 26.8723
19
44
7 71.0443648 48.95833 26.8723
20
47
3 71.0443648 48.95833 26.8723
21
52
5 71.0443648 48.95833 26.8723
22
48
4 71.0443648 48.95833 26.8723
23
57
9 71.0443648 48.95833 26.8723
24
47
10 71.0443648 48.95833 26.8723
X bar
48.958333333 8.304348
d2=
D3=
D4=

1.128
0
3.267

HCl concentration (%)

Observation
(%)
1
49
2
49
3
49
4
60
5
52
6
44
7
59
8
42
9
44

HCl concentration (

X
UCL
CL
68.5327243
0 68.5327243
0 68.5327243
11 68.5327243
8 68.5327243
8 68.5327243
15 68.5327243
17 68.5327243
2 68.5327243

LCL
48.875 29.21728
48.875 29.21728
48.875 29.21728
48.875 29.21728
48.875 29.21728
48.875 29.21728
48.875 29.21728
48.875 29.21728
48.875 29.21728

10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
x BAR

46
2
49
3
50
1
48
2
46
2
41
5
57
16
53
4
40
13
57
17
57
0
40
17
49
9
41
8
51
10
48.875 7.391304

UCL
CL
LCL

68.5327243
68.5327243
68.5327243
68.5327243
68.5327243
68.5327243
68.5327243
68.5327243
68.5327243
68.5327243
68.5327243
68.5327243
68.5327243
68.5327243
68.5327243

X Control Chart
71.0443648
48.9583333
26.8723019

X Control Chart
UCL
68.5327
CL
48.8750
LCL
29.2173

48.875
48.875
48.875
48.875
48.875
48.875
48.875
48.875
48.875
48.875
48.875
48.875
48.875
48.875
48.875

29.21728
29.21728
29.21728
29.21728
29.21728
29.21728
29.21728
29.21728
29.21728
29.21728
29.21728
29.21728
29.21728
29.21728
29.21728

R Control Chart
UCL
CL
LCL

Range Control Chart

UCL
CL
LCL

R
UCL
CL
LCL
27.1303043 8.304348
27.1303043 8.304348
27.1303043 8.304348
27.1303043 8.304348
27.1303043 8.304348
27.1303043 8.304348
27.1303043 8.304348
27.1303043 8.304348
27.1303043 8.304348
27.1303043 8.304348
27.1303043 8.304348
27.1303043 8.304348
27.1303043 8.304348
27.1303043 8.304348
27.1303043 8.304348
27.1303043 8.304348
27.1303043 8.304348
27.1303043 8.304348
27.1303043 8.304348
27.1303043 8.304348
27.1303043 8.304348
27.1303043 8.304348
27.1303043 8.304348
27.1303043 8.304348

Mean Co

0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0

80
70
60
50
40
30
20
10
0
0

10

15

Range Co
30
25
20
15
10
5

HCl concentration (%)

0
0

10

15

R
UCL
CL
LCL
24.1473913 7.391304
24.1473913 7.391304
24.1473913 7.391304
24.1473913 7.391304
24.1473913 7.391304
24.1473913 7.391304
24.1473913 7.391304
24.1473913 7.391304
24.1473913 7.391304

0
0
0
0
0
0
0
0
0

Mean Control
80
70
60
50
40
30
20
10

70
60
50

24.1473913
24.1473913
24.1473913
24.1473913
24.1473913
24.1473913
24.1473913
24.1473913
24.1473913
24.1473913
24.1473913
24.1473913
24.1473913
24.1473913
24.1473913

7.391304
7.391304
7.391304
7.391304
7.391304
7.391304
7.391304
7.391304
7.391304
7.391304
7.391304
7.391304
7.391304
7.391304
7.391304

0
0
0
0
0
0
0
0
0
0
0
0
0
0
0

40
30
20
10
0
0

10

15

20

Range Contr
30
25
20
15

R Control Chart
27.1303
8.304348
0

10
5
0
0

Range Control Chart

24.1474
7.3913
0.0000

10

15

20

Mean Control Chart

HCL Concentration
UCL
CL
LCL

10

15

20

25

30

Range Control Chart

HCL Concentration
UCL
CL
LCL

10

15

20

25

30

Mean Control Chart

HCL Concentration
UCL
CL
LCL

HCL Concentration
UCL
CL
LCL

15

20

25

30

Range Control Chart

HCL Concentration
UCL
CL
LCL

15

20

25

30