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Dampening in Lithography

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Target

Even and thin water film

What to do?

Reduce surface tension Improve affinity Avoid bad effects

Control

Alcohol content Chemical concentration Temperature

Ease of Use

Long lasting Tolerant to slight maladjustment

Problems

Contaminants? Foaming

Alarm System

Alarm sounds on:


Over temperature Low (or high) alcohol content Low (or high) conductivity

Question: How about pH?

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