Microfine CMP-P Series Filter

Cartridges
Polypropylene Depth Media Cartridges & Capsules
for CMP Filtration

Microfine CMP-P cartridges are designed

specifically for filtration of oxide and ceria based
slurries. The multilayered media is constructed
from five distinct PP nano-fibre layers that result
in full utilization of filter depth and hence longer
life. The innovative design also ensures
enhanced flow characteristics, including low
pressure drop to minimize shearing of slurry while
providing superior service life.

Specifications

Materials

Operating
Condition

Connections
Removal
Ratings

Medium: Polypropylene
Core, Cage & End Cap:
Polypropylene
Capsule
Shell:
Polypropylene
O-Ring: EPR & Silicon
Rubber
Maximum Temperature:
45oC
Maximum
Differential
Pressure: 35psi

Inlet/Outlet: 3/8" Flaretek

Vent/Drain: 1/4" Flaretek

0.1um, 0.2um, 0.3um,

0.5um, 1.0um, 1.5um,
3.0um, 5.0um, 10.0um

Particle Removal Efficiency

Filter Micron
Rating (um)
0.1
0.2
0.3
0.5
1.0
3.0
5.0
10.0

Removal
Efficiency
90%
99%
0.2
0.5
0.3
0.6
0.5
0.8
0.8
1.2
1.5
2.0
4.0
5.0
6.0
7.5
12
15.0

Particle Size(um)

The objective of a slurry filter is for the majority of

particles to pass through it unchanged, while only
removing the undesired or over sized particles.
The over sized particle population is commonly
referred to as large particle counts (LPC) and
they typically form over time when the suspended
particles in the slurry settle forming aggregates,
agglomerates and gels. Large particles can also
be the result of adverse shipping conditions,
shearing, slurry drying and interaction with other
distribution loop components such as fittings,
tanks, piping, valves and pumps. These large
particles can scratch metal and inter-level
dielectrics potentially causing wafer defects

Total Performance
Microfine Filters is a manufacturer of filtration
products to industries in which filtration is
considered a critical part of the manufacturing
process. We supply a complete line of products
and services to help you cost effectively satisfy
all your filtration requirements from a single
source.
Our goal is to ensure our customers the
greatest possible value for their filtration dollar.
Our state of the art manufacturing facility and
quality management system both meet ISO
9001:2008 standards. Each operation from
assembly and test to cleaning, drying, and
packaging is done in appropriately rated clean
rooms.