Sensores y actuadores

Jacob Javier Vasquez Sanjuan

Ingeniera
Jacob Javier en Sistemas
Vasquez Sanjuan Automotrices
Ingeniera en Sistemas Automotrices
Pressure Sensors

There are two principals techniques :

Tube of Bourdon
Diaphragms

Jacob Javier Vasquez Sanjuan Ingeniera en Sistemas Automotrices

Applications

Micromachined pressure sensors have been deployed in almost

every automotive application, including inlet manifold, cylinder,
brake fluid, tire pressure, and fuel injection. Automotive
applications place challenging requirements on the silicon.

Jacob Javier Vasquez Sanjuan Ingeniera en Sistemas Automotrices

Diaphragm Silicon Micromachined

The diaphragm is essentially a flexible flat or corrugated plate

clamped around its edges. As pressure is applied the diaphragm
will deform, the magnitude of the deflection being proportional to
the pressure. The pressure is determined by measuring the amount
of deflection or the strain induced in the surface of the diaphragm.

Pa4

yo = (1 v 2 ) (1)
Eh3
 2
Pa
stress = (2)
h2

Jacob Javier Vasquez Sanjuan Ingeniera en Sistemas Automotrices

Diaphragm Silicon Micromachined

Pa4
 
yo = (1 v 2 ) (3)
Eh3
 2
Pa
deformation = (4)
h2
donde:
yo is the maximum deflection at the diaphragm center under
uniform pressure P.
h is the diaphragm thickness.
a is the length of the shorter side.
E and v are the Youngs modulus and Poissons ratio,
respectively.
For a rectangular diaphragm, the coefficients and depend
upon the ratio of the lengths of the diaphragm sides and the
position of interest.
Jacob Javier Vasquez Sanjuan Ingeniera en Sistemas Automotrices
Diaphragm Silicon Micromachined

Assuming a square diaphragm, =0.0151, and =0.378 for the

maximum stress that occurs along the edge of the diaphragm and
0.1386 for the maximum stress at the center of the diaphragm.

Jacob Javier Vasquez Sanjuan Ingeniera en Sistemas Automotrices

Jacob Javier Vasquez Sanjuan Ingeniera en Sistemas Automotrices