(38-8-3) NPTEL - Vacuum Technology

38
1
Earlier Lecture
• In the earlier lecture, conductance equations for
some commonly used pipes were given.
Q Q
• Pump Speed : S p = System Speed : S s =
pi p
1 1 1
= +
S s S p Co
• Sp depends on vacuum pump and therefore, in
order to maximize Ss, Co should be maximum.
V  p1 − pu 
• For a constant Ss, we have t p = ln  
S s  p2 − pu 
2
Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay
Outline of the Lecture
Topic : Vacuum Technology
• Classification of Vacuum Pump
• Types of Vacuum Pump
• Conclusion
3
Introduction
• In the earlier lectures, we have seen the importance
of vacuum in Cryogenics.
• We have also seen the importance of degree of

vacuum and the pump down time from the
application point of view.
• For practical applications, a wide variety of pumps

are used to achieve the desired vacuum.
• There is a need to study the different types of

vacuum pumps and the components of a vacuum
system.
4
Classification
Vacuum Pumps
Gas Transfer Entrapment
Positive Displacement Kinetic
Sliding Vane Rotary Roots Dry Pumps
Diffusion Turbo Molecular Fluid Entrainment
Absorption Cryo Pump Getter
5
Rotary Vane Pump
• Rotary vane pump is a widely used
Vacuum Pumps
pump in vacuum technology.
Gas Transfer
• It is mostly used as a primary
Positive Displacement pump for backing or roughing
stages.
Rotary
• It falls under gas transfer category

with positive displacement
characteristics.
6
Rotary Vane Pump
• The schematic of a Rotary vane
Gas ballast
valve Exhaust
pump is as shown in the figure.
valve
Outlet
Inlet
• It consists of a stationary part,
Stator and a moving part, Rotor,
assembled inside a casing.
Rotor
• Moving component is an
Stator eccentrically placed slotted rotor,
which turns inside cylindrical stator.
• Spring loaded sliding vanes are

mounted in the slots of the rotor.
7
Rotary Vane Pump
• This rotor is driven by an electric
Gas ballast
valve Exhaust
motor at a constant speed.
valve
Outlet
Inlet
• Due to the spring action, the rotor
sliding vanes are in continuous
contact with the stator walls, during
Rotor
the rotation.
Stator • This rubbing action generates huge

amounts of heat.
• The heat is dissipated by circulating

coolant around the stator.
8
Rotary Vane Pump
• Air is drawn into the pump through
Gas ballast
valve Exhaust
an inlet and it is compressed.
valve
Outlet
Inlet
• Spring loaded exhaust valves are
used to expel this compressed gas.
Rotor • This valve operates only at a preset

pressure to avoid the back flow.
Stator
• Perfect sealing is maintained by a

thin fluid film existing between the
moving contacts.
9
Rotary Vane Pump
• It is important to note that, there is
Gas ballast
valve Exhaust
a possibility of condensation of
valve some gases, say water vapor,
Outlet
Inlet during the compression process.
• Gas ballast is an arrangement, in

Rotor
which, a metered amount of non –
condensable gas is admitted at the
Stator
high pressure side.
• This gas packet increases the mole

fraction of non – condensable gases
in the compressed gas.
10
Rotary Vane Pump
• This decreases the partial pressure
Gas ballast
valve Exhaust
of condensable gases (Dalton’s Law
valve of Partial Pressure).
Outlet
Inlet
• As a result, the water vapor at that

temperature does not condense.
Rotor
Stator
11
Rotary Vane Pump
102 • The adjacent figure shows the
Single stage Two stage
___ with ballast
pump characteristics for Single
---- without ballast
and Two stage Rotary pumps.
101
• The solid and dotted lines
correspond to pumps with and
without gas ballast arrangements
100
respectively.
−1
• Two stage or multi stage pumps
103 are used to improve the
10 −5
10 10−3 10−1 101
Pressure, mbar
performance and the ultimate
pressure (pu) of the system.
12
Classification
Vacuum Pumps
13
Roots Pump
• The schematic of a Roots pump is as
shown in figure.
Inlet
• It is often used for low and medium

degrees of vacuum.
• The pump is best suited in

applications, where there are high
mass flow rates.
Outlet
• It consists of two identical lobed

rotors mounted inside a casing.
14
Roots Pump
• These lobed rotors are synchronized
by an external gear mechanism and
Inlet are connected to an electric drive.
• A fine clearance of 0.3 mm is

maintained between the moving lobes
and the stator.
• As a result, these pumps can be

Outlet
operated at a very high speeds.
• The lobes are rotated in opposite

direction, with respect to each other.
15
Roots Pump
• Gas is displaced from inlet to outlet,
maintaining a pressure drop.
Inlet
• A backing pressure is necessary on

the outlet side before the operation of
the pump.
• This is needed to prevent the over

heating of the casing.
Outlet
16
Roots Pump
• The over heating of casing results in
thermal expansion of lobed rotors
Inlet and thereby, the possible contact
between the moving parts.
• It is important to note that, against

these high mass flow rates, one has
to compromise on the vacuum level.
Outlet
17
Roots Pump
103 • The adjacent figure shows the
pump characteristics for a single
stage Roots pump.
102
• Initially, the pumping speed (S)
increases steadily with the drop
in pressure.
101
• With the further decrease in the

pressure, the pumping speed (S)
100 −5
10 10−3 10−1 101 103 goes through a maxima and then
Pressure, mbar
decreases.
18
Classification
Vacuum Pumps
19
Kinetic Pumps
• Kinetic pumps are used when a higher degree of
vacuum, in comparison to Rotary or Roots pump,
is needed.
• In these pumps, kinetic energy or momentum is

imparted to a gas molecule.
• This momentum is used in expelling gas molecules

from the system and thereby, vacuum is created.
• As mentioned earlier, diffusion pump, turbo

molecular pump, fluid entrainment pump are the
common examples of kinetic pumps.
20
Diffusion Pump
• The schematic of a diffusion pump is
as shown in the figure.
Vacuum Nozzle
Space
Cooling
Coils • It consists of a chamber housing a
Chimney oil vessel with a heater, a chimney
and a nozzle. On chamber's outer
To Pump surface, cooling coils carrying water
are wound.
Heater • These pumps are most effective

when operated in free molecular
regime. In practical applications, it
is coupled with a backing pump.
21
Diffusion Pump
• The heater vaporizes the oil and
these hot vapors rise into the vapor
Vacuum Nozzle
Space chimney.
Cooling
Coils
Chimney • The hot vapors are deflected
downwards by an annular nozzle or
To Pump a jet assembly mounted at the top
of the chimney.
Heater • This jet, moving downwards at

supersonic speeds, imparts
momentum to randomly moving gas
molecules in the chamber.
22
Diffusion Pump
• This momentum deflects the
molecules towards the pump outlet.
Vacuum Nozzle
Space
Cooling
Coils • In other words, this momentum
Chimney gives direction to randomly moving
molecules, towards the pump exit.
To Pump
• A backing pump is constantly used

to remove the gas molecules.
Heater
• The hot oil condenses on cold walls

and returns to the vessel at bottom.
23
Diffusion Pump
• One of the common problems in
diffusion pumps is the back
Vacuum Nozzle
Space streaming of oil.
Cooling
Coils
Chimney • This occurs when the pump oil
molecules move above the upper
To Pump portion of the jet. This causes
contamination of vacuum chamber.
Heater • Chilled baffles or cold trap is used to

prevent the flow of oil molecules
into the vacuum chamber.
24
Diffusion Pump
• The figure shows the variation of
pump speed (S) with pressure.
103 • The ultimate pressure (pu)

depends on
• Vapor pressure of oil
102 • Pump design
• Gas load from vacuum space.
−8 −6 −4 −2
• The schematic of a Diffusion pump
10 10 10 10
Pressure, mbar together with a Rotary pump is as
shown in the next slide.
25
Diffusion Pump
• As mentioned before, diffusion
pump is effective in free
Vacuum molecular regime, the initial
Chamber
pump down of the system is
Roughing valve done using a Rotary pump.
• With backing valve closed and

Backing
valve roughing valve opened
positions respectively, the gas
Diffusion Rotary is pumped out of system as
Pump Pump shown in the figure.
26
Diffusion Pump
• When the pressure in system
falls well below, to ensure a
Vacuum free molecular regime, the
Chamber
diffusion pump is put to use.
Roughing valve
• With backing valve opened and

roughing valve closed positions
Backing
valve respectively, the gas is pumped
out of system as shown in the
Diffusion Rotary figure.
Pump Pump
27
Diffusion Pump
Roughing valve
Backing valve
Diffusion Pump
Rotary Pump
28
Classification
Vacuum Pumps
29
Turbo Molecular Pump
• The schematic of a Turbo Molecular
Rotor Pump (TMP) is as shown.
Stator
Rotor • It consists of alternate layers of

stator and rotor discs.
Rotor • The rotor rotates at a very high

Blades
RPM, typically, of the orders of
Stator 27000 and above.
Blades
Backing
Pump
• The blades are mounted at an
optimum angle, on both stator and
rotor.
30
• This high speed rotation imparts
Rotor momentum to the gas particles
Stator upon collision with the rotor discs.
Rotor
• The high speed molecules are
directed towards the exit using the
Rotor
stator discs.
Blades
Stator • These two adjacent discs are often

Blades
Backing
called as a stage in the TMP.
Pump
31
• A TMP has 6 to 7 stages depending
Rotor upon the level of vacuum required.
Stator
Rotor • These pumps are more efficient in

free molecular flow regime.
Rotor • They are often backed up by

Blades
mechanical pumps.
Stator
Blades
Backing• Latest developments in TMP
Pump
include replacement of oil bearings
with dry, non lubricant bearings.
32
• The following photograph shows the various
components of Turbo Molecular Pump.
Turbine stages
Rotary Pump
33
Classification
Vacuum Pumps
34
Cryo Pump
103 • The adjacent figure
He
shows the variation of
10 equilibrium vapor
H2 pressure with
10−1 O2
Xe temperature for
Ne H20
10 −3
N2 different gases.
10−5
• When the temperature
10−7 is less than 20 K, the
vapor pressure of
10−9 gases other than He,
2 10 20 50 100 200 300
Temperature, K H2 and Ne are close
to 10-9 mbar.
35
Cryo Pump
Louvered • The schematic of a Cryo pump is
Radiation
Vacuum Space Baffle
as shown in the figure.
20 K
Shield
• A two stage cold head unit
produces temperatures of 70 K (1st
70 K
Shield
stage) and 20 K (2nd stage).
20 K IInd
Stage
70 K Ist
• Adequate shielding and insulation
Stage is provided to avoid various heat in
leaks.
Cold
Head
Drive • This pump can reach pressures as
10-10 Torr.
36
Cryo Pump
Louvered
• The vacuuming process involves
Radiation
Vacuum Space Baffle
condensation of the gases onto the
cold head.
20 K
Shield
• As mentioned earlier all the gases,
70 K
Shield
except He, H2 and Ne are frozen at
20 K IInd 70 K baffle and 20 K cold head.
Stage
70 K Ist
Stage • Gases He, H2 and Ne are adsorbed
onto the charcoal provided on the
Cold underneath of the 20 K shield.
Head
Drive
37
Cryo Pump
Louvered
• Hence, it is clear that Sp of this
Radiation
Vacuum Space Baffle
pump is directly proportional to the
surface area of cold head.
20 K
Shield
• These pumps are self contained,
70 K
Shield
hydrocarbon free and are cooled by
20 K IInd a two stage cryocooler.
Stage
70 K Ist
Stage
Cold
Head
Drive
38
Other Pumps
• The other commonly used pumps are
• Getter Pump
• Sputter Ion Pump
• Sublimation Pump
• Adsorption Pump
39
Pump Selection
• The correct selection of a vacuum pump depends
on the following factors.
• Working process
• Ultimate pressure (pu) required
• Total volume, surface area of the chamber
• Out gassing rate and operating pressure
• Pump down time required from atmosphere and
special venting or gas recovery requirement
• Dimensions, weight, vibration limits and costs
• Special requirements : Hydrocarbons, reactive
gases, bake out etc
40
Operating Range
• The adjacent figure
Single Stage Mechanical
shows the operating
Two Stage Mechanical
range for different
vacuum pumps.
Diffusion Pumps
Ion Pumps
Sorption Pumps
Cryo Pumps
10−12 10−10 10−8 10−6 10−4 10−2 1 102

Pressure, Torr
41
• A self assessment exercise is given after
this slide.
• Kindly asses yourself for this lecture.
42
Self Assessment
1. Rotary vane pump is a ___ pump.
2. In a rotary pump, spring loaded exhaust valves
expel ____.
3. In ___ a metered amount of non – condensable
gas is admitted at the high pressure side.
4. ____ is best suited for high mass flow rates.
5. In a kinetic pump, ___ is used in expelling gas
molecules.
6. TMPs operate in ______ regime.
7. Diffusion pump, TMP are coupled with ____ pump.
8. ______ of oil is a common problem in diffusion
pumps.
43
Answers
1. Positive displacement
2. Compressed gas
3. Gas ballast
4. Roots pump
5. Kinetic energy
6. Free molecular flow
7. Backing pump
8. Back streaming
44
Thank You!
45

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38

• Classification of Vacuum Pump

• Types of Vacuum Pump

• We have also seen the importance of degree of

• For practical applications, a wide variety of pumps

• There is a need to study the different types of

Gas Transfer Entrapment

Positive Displacement Kinetic

Sliding Vane Rotary Roots Dry Pumps

Diffusion Turbo Molecular Fluid Entrainment

Absorption Cryo Pump Getter

• It falls under gas transfer category

• Spring loaded sliding vanes are

Stator • This rubbing action generates huge

• The heat is dissipated by circulating

Rotor • This valve operates only at a preset

• Perfect sealing is maintained by a

• Gas ballast is an arrangement, in

• This gas packet increases the mole

• As a result, the water vapor at that

Gas Transfer Entrapment

Positive Displacement Kinetic

Sliding Vane Rotary Roots Dry Pumps

Diffusion Turbo Molecular Fluid Entrainment

Absorption Cryo Pump Getter

• It is often used for low and medium

• The pump is best suited in

• It consists of two identical lobed

• A fine clearance of 0.3 mm is

• As a result, these pumps can be

• The lobes are rotated in opposite

• A backing pressure is necessary on

• This is needed to prevent the over

• It is important to note that, against

• With the further decrease in the

Gas Transfer Entrapment

Positive Displacement Kinetic

Sliding Vane Rotary Roots Dry Pumps

Diffusion Turbo Molecular Fluid Entrainment

Absorption Cryo Pump Getter

• In these pumps, kinetic energy or momentum is

• This momentum is used in expelling gas molecules

• As mentioned earlier, diffusion pump, turbo

Heater • These pumps are most effective

Heater • This jet, moving downwards at

• A backing pump is constantly used

• The hot oil condenses on cold walls

Heater • Chilled baffles or cold trap is used to

103 • The ultimate pressure (pu)

• With backing valve closed and

• With backing valve opened and

Gas Transfer Entrapment

Positive Displacement Kinetic

Sliding Vane Rotary Roots Dry Pumps

Diffusion Turbo Molecular Fluid Entrainment

Absorption Cryo Pump Getter

Rotor • It consists of alternate layers of

Rotor • The rotor rotates at a very high

Stator • These two adjacent discs are often

Rotor • These pumps are more efficient in

Rotor • They are often backed up by

Gas Transfer Entrapment

Positive Displacement Kinetic

Sliding Vane Rotary Roots Dry Pumps