Compact size and maximum

precision: ZEISS MICURA offers

accuracy of 0.7 + L/400 µm

12
ZEISS MICURA –
Maximum Precision for Small Parts

ZEISS MICURA sets the standard in the compact class.

Despite its small size, ZEISS MICURA makes no compromises
when it comes to accuracy. ZEISS MICURA comes standard
with the VAST XT gold scanning sensor from ZEISS and
navigator technology. Optionally, the VAST XTR active scanning
sensor provides even more flexibility when measuring complex
parts.

Measuring ranges [mm] Small and precise Automatic measuring speed

X Y Z ZEISS MICURA is the solution for new
500 500 500 demands in industrial production
where parts are becoming increasingly
compact and accuracy requirements
are rising. Equipped with the VAST XT
gold high-end sensor from ZEISS and
navigator technology, ZEISS MICURA
offers active scanning with measuring
accuracy of less than one micrometer.
ZEISS MICURA flexes its muscles, in
particular, with small, complex parts
featuring narrow tolerances such as
those used in optics and electronics.
Despite its compact size, this system
provides a measuring volume of
500 x 500 x 500 millimeters – and
therefore considerably more than
comparable instruments.
Precise high-speed scanning
The VAST XT gold sensor from ZEISS
enables high-speed scanning featuring
up to 200 measuring points per
second. As a result, form and location
parameters such as roundness and
flatness can be precisely captured, in
addition to geometric features, in a
short time. The sensor can be equipped
with extremely small stylus tips. The
smallest stylus has a diameter of just
0.3 millimeters.
with VAST navigator from ZEISS
ZEISS MICURA comes standard
with VAST navigator technology. It
automatically configures the optimal
measuring speed with guaranteed
accuracy, thus considerably reducing
the measuring time. ZEISS MICURA
moves somewhat slower in areas that
demand more precision. It moves
faster with simple contours or when
less accuracy is needed. navigator
technology also saves time through
tangential approach and scanning,
helix scanning and fast dynamic stylus
calibration.
Computer-Aided Accuracy (CAA)
Measuring errors due to dynamically
induced inertia effects are automatically
compensated for.

13
Fast and Easy Measurements –
ZEISS MICURA Makes It Happen
Operation and ergonomics
ZEISS MICURA comes with a redesigned
control panel. One display and
two joysticks enable operators to
control and program the machine
independently of the computer. The
system is easy to operate and makes
it possible to start measuring even
without in-depth experience with
measuring machines. The ledge on the
front of the granite table allows the
control panel and tools to be stored
outside the measuring range.
14
Well thought-out design Sample applications
• Ceramic guideways and a large • Converters and adjusting units with
bearing base minimize susceptibility highly accurate leads and bearings
to external influences • Pistons and shafts with the tightest
• ZEISS air bearings on four sides tolerances
guarantee stability and precision • Artificial hips
• ZEISS MICURA also comes with a • Gear wheels
temperature sensor for the workpiece • Optical lens elements
• The probing force of the sensor is
actively regulated and is very low –
ideal for sensitive materials
• Controller technology, software,
sensors and additional components
are made by ZEISS and are finely
tuned to each other
Measuring accuracy

ZEISS MICURA featuring VAST XTR/XT gold

Measuring range X x Y x Z [mm] length measurement error E0 in µm
500 x 500 x 500 0.7 + L/400

15
ZEISS MICURA
Specifications
Version: May 2016
 Dynamics
Travel speed Motorized Axes 0 to 70 mm/s
CNC Vector max. 492 mm/s
Acceleration Vector max. 1969 mm/s2
Scanning speed max. 125 mm/s

Sensors and accuracy

ZEISS VAST XT gold1) Active scanning and multi-point sensor.
ZEISS VAST XTR gold1)
Including ZEISS VAST navigator.
Optional ZEISS VAST performacne to increase measurment performance.
Configurable measuring force (50-1000 mN) for data acquisition.

ZEISS VAST XT gold: stylus: max. length = 500 mm, max. weight = 500 g incl. stylus adapter,
min. stylus tip diameter = 0.3 mm.
ZEISS VAST XTR gold: stylus: max. length = 350 mm, max. weight = 500 g incl. stylus adapter,
min. stylus tip diameter = 0.5 mm.
ZEISS VAST XT gold and ZEISS VAST XTR gold
Length measurement error2) E0 in µm 0.7 + L/400
MPE complies with ISO 10360-2:2009 E150 in µm 0.9 + L/400
Repeatability range of E0 R0 in µm 0.55
MPL complies with ISO 10360-2:2009

Scanning error THP in µm 0.9

MPE complies with ISO 10360-4:2000

Required measuring time MPT τ in s 40

Form measurement error 3) MPE for RONt (MZCI) in µm 0.8
roundness complies with ISO 12181

Single stylus form probing error PFTU in µm 0.8 ZEISS

MPE complies with ISO 10360-5:2010

Multi-stylus form probing error PFTM 5)

in µm 2.3 ZEISS VAST XT gold
MPE complies with ISO 10360-5:2010 2.7 ZEISS VAST XTR gold

Multi-stylus dimension probing error PSTM 5)

in µm 0.6 ZEISS VAST XT gold
MPE complies with ISO 10360-5:2010 0.7 ZEISS VAST XTR gold

Multi-stylus location probing error PLTM 5)

in µm 1.6 ZEISS VAST XTR gold
MPL complies with ISO 10360-5:2010 1.7 ZEISS VAST XTR gold

Technical features
Length measuring system Photoelectric reflected light system, 0.1 µm resolution
Controller Type: ZEISS C99, protection type: IP22
Accessories Standard: temperature compensation system for workpieces.
Optional: Multi-sensor Rack for storage of stylus systems.

Environmental requirements4)
Humidity 30-60% (without condensation)
Measuring reference temperature 20°C to 22°C
Temperature fluctuations per day 1.0 K/d
Per hour 0.5 K/h
Spatial 0.5 K/m
Floor vibrations ZEISS MICURA is equipped with passive vibration damping (limits upon request).
If requested, we can provide assistance for vibration studies.

1) Acceptance test with stylus length of 60 mm and tip diameter of 8 mm

2) Measuring length L in mm.
3) Roundness in Scanning Mode for Vscan = 5 mm/s, filter 50 UPR.
4) To ensure specified accuracies.
5) Measuring location near the calibration position to document sensor properties.
 Requirements for operational readiness
Humidity 30-60% (without condensation)
Ambient temperature +17°C to +35°C
Electrical power rating ZEISS C99L
100 - 240 V VAC ~ (±10%); 50-60 Hz (±3.5%),
Power consumption: max. 800 VA,
Typical power consumption: 200 W

Compressed air supply Supply pressure min. 6 bar, max. 8 bar, pre-cleaned.
Max. consumption: 110 Nl/min. Air quality complies with ISO 8573 part 1: class 4

Approvals
Directives ZEISS MICURA complies with EC machine directive 2006/42/EC and EMC directive 2014/30/EU.

cCSAus is pending.
Disposal ZEISS products and packaging returned to us are disposed of in accordance with applicable legal
provisions.

Certification/accreditation
Quality management system ISO 9001:2008
VDA 6, Parts 4, 2. Version 2005

Environmental management system ISO 14001:2004

Occupational health & BS OHSAS 18001:2007
safety management systems

Accredited ISO/IEC 17025:2005

ZEISS MICURA Dimensions in mm Weight in kg

Measuring range Overall machine dimensions Working range Table Assembly Transport Max. Mea-
(Max. workpiece size) height space height1) work- suring
piece machine

X axis Y axis Z axis Length Width Height Length Width Height Height Height Height Height

G104 G105 G106 B5 B6 B7 B16 B17 B18 H B23 c1 T

5/5/5 500 500 500 1348 1364 2600 705 841 616 680 850 ≥200 2100 280 950
c1
B7

B16 B17
h
G106

B18

G104 G105
T
B23

B5 B6

Note: the given dimensions and weights are approximate values. Subject to change. Dimensioning based on DIN 4000-167:2009.

1) Transport height of the secured machine group from machine base (including 250 mm if transportation uses a secured pallet).

Carl Zeiss
Industrielle Messtechnik GmbH
73446 Oberkochen, Germany
Sales: +49 (0) 7364/ 20-6336
Service: +49 (0) 7364/ 20-6337
Fax: +49 (0) 7364/ 20-3870
Email: info.metrology.de@zeiss.com
Internet: www.zeiss.com/imt
Subject to change in design and scope of delivery and as a result of ongoing technical development.
Printed on chlorine-free bleached paper. © Carl Zeiss Industrielle Messtechnik GmbH
EN_60_022_0337VII Printed in Germany.  WD-CZ-IV/2016 N00
Carl Zeiss
Industrial Metrology
6250 Sycamore Lane North
Maple Grove, MN 55369/USA
Phone: +1 (763) 744-2400
Fax: +1 (763) 533-0219
Email: info.metrology.us@zeiss.com
Internet: www.zeiss.com/metrology