2/20/2011

Example Fan Filter Units Arrangement

Scru bbed Exhaust Air

3.5m

2.2m

3.6m
Stair Case
Cleanroom
9.6m

4.8m
Ret urn Air

4.8m

0. 0m
Basement

Make- Up Air Gas Cabinets Process Suppl y Syst ems Submains Process Supply Submains Scrubber

Control Airflows Between Rooms

Air Lock
Air Lock AIRFLOW CORRIDOR

+
AIRFLOW CORRIDOR

+
An intermediate room
AIRLOCK AIRLOCK
between adjacent ++ ++
areas with different
cleanliness to prevent AIRFLOW CLEANROOM AIRFLOW CLEANROOM

airborne cross +++ -

contamination CASCADING AIRLOCK BUBBLE AIRLOCK

Type AIRFLOW CORRIDOR AIRFLOW CORRIDOR

+ -
Cascading
Bubble AIRLOCK

--
AIRLOCK

++
AIRLOCK
--
Sink
Dual Compartment AIRFLOW CLEANROOM CLEANROOM
AIRFLOW

- -

SINK AIRLOCK DUAL COMPARTMENT AIRLOCK

10