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Energy table for EDS analysis http://www.jeol.com/
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Hydrogen Characteristic X-rays Continuum X-rays The electrons generated by the electron gun If the incident electrons have sufficient acceleration The continuum X-rays are emitted Helium
1
1.01 H
are accelerated and irradiate the sample. The
electron has a kinetic energy proportional to
the accelerating voltage. The kinetic energy
and then have enough energy to strike an electron
from the inner shell of the atom, it'll make an
when the primary electrons are
decelerated by the strong electric field
existing close to atomic nucleus. The
2
4.00 He
electron hole. An electron from the outer shell will
0.08 Secondary Electron E0 dissipated within the sample generates fill up the hole and then, some characteristic X-rays continuum X-rays have the energy of 0.19
Electron transmissions of major lines
characteristic signals from the specimen. The will be emitted. The characteristic X-rays have the kinetic energy lost during the
Incident Electron NⅦ E0 characteristic X-rays are the information different energy for each element, and the intensity deceleration. It will be observed as
： used for EDS analysis. will be proportional to the element concentration. EDS spectrum background.
NⅣ Continuum X-rays
：
Characteristic NⅠ E0 hv = E4
Lithium Beryllium X-rays
Boron Carbon Nitrogen Oxygen Fluorine Neon
3
6.94 Li 4
9.01 Be MⅤ・
α1 β γ ζ
E0
hv = E3
hv = E2
5
10.81 B 6
12.01 C 7
14.01 N 8
16.00 O 9
19.00 F 10 20.18 Ne
0.53 1.85 2.54 2.25 * 1.14 1.57 1.5 1.20
MⅢ・ hv = E1
Kα 0.110 Nucleus
MⅠ Nucleus
Kα 0.183 Kα 0.277 Kα 0.392 Kα 0.525 Kα 0.677 Kα 0.848
M
K shell
α1 α2 β1 β2 γ1 γ3
L shell
M shell LⅢ E0 - E4
Sodium Magnesium N shell LⅡ
Aluminium Silicon Phosphorus Sulphur Chlorine Argon
11
22.99 Na 12
24.31 Mg
O shell
LⅠ
L
E0 - E3 13
26.98 Al 14
28.09 Si 15
30.97 P 16
32.06 S 17
35.45 Cl 18 39.95 Ar
0.97 1.74 2.70 2.42 1.83 * 2.07 * 2.2 1.65
Electron
α1 α2 β1 E0 - E2
Kα 1.041 Kα 1.253 KⅠ Kα 1.486 Kα 1.739 Kα 2.013 Kα 2.307 Kα 2.621 Kα 2.957
K
E0 - E1

Potassium Calcium Scandium Titanium Vanadium Chromium Manganese Iron Cobalt Nickel Copper Zinc Gallium Germanium Arsenic Selenium Bromine Krypton
19
39.10 K 20
40.08 Ca 21
44.96 Sc 22
47.90 Ti 23
50.94 V 24
52.00 Cr 25
54.94 Mn 26
55.85 Fe 27
58.93 Co 28
58.70 Ni 29
63.55 Cu 30
65.38 Zn 31
69.72 Ga 32
72.59 Ge 33
74.92 As 34
78.96 Se 35
79.90 Br 36 83.80 Kr
0.87 1.55 2.99 4.5 5.87 7.14 7.3 7.86 8.71 8.8 8.93 6.92 5.93 5.46 5.73 4.82 4.2 3.4
Kα 3.312 Kα 3.690 Kα 4.088 Kα 4.508 Kα 4.949 Kα 5.411 Kα 5.894 Kα 6.398 Kα 6.924 Kα 7.471 Kα 8.040 Kα 8.630 Kα 9.241 Kα 9.874 Kα 10.530 Kα 11.207 Kα 11.907 Kα 12.631
Lα 0.395 Lα 0.452 Lα 0.511 Lα 0.573 Lα 0.637 Lα 0.705 Lα 0.776 Lα 0.851 Lα 0.930 Lα 1.012 Lα 1.098 Lα 1.188 Lα 1.282 Lα 1.379 Lα 1.480 Lα 1.586

Rubidium Strontium Yttrium Zirconium Niobium Molybdenum Technetium Ruthenium Rhodium Palladium Silver Cadmium Indium Tin Antimony Tellurium Iodine Xenon
37
85.47 Rb 38
87.62 Sr 39
88.91 Y 40
91.22 Zr 41
92.91 Nb 42
95.94 Mo 43
( 97) Tc 44
101.07 Ru 45
102.91 Rh 46
106.4 Pd 47
107.87 Ag 48
112.40 Cd 49
114.82 In 50
118.69 Sn 51
121.75 Sb 52
127.60 Te 53
126.90 I 54
131.30 Xe
1.53 2.60 4.48 6.44 8.4 9.01 12.1 12.44 12.16 10.49 8.65 7.28 7.30 * 6.62 6.25 4.94
Kα 13.373 Kα 14.140 Kα 14.931 Kα 15.744 Kα 16.581 Kα 17.441 Kα 18.325 Kα 19.233 Lα 2.696 Lα 2.838 Lα 2.984 Lα 3.133 Lα 3.286 Lα 3.443 Lα 3.604 Lα 3.769 Lα 3.937 Lα 4.109
Lα 1.694 Lα 1.806 Lα 1.922 Lα 2.042 Lα 2.166 Lα 2.293 Lα 2.424 Lα 2.558 M 0.368 M 0.691 M 0.733 M 0.778

Cesium Barium Lanthanoid Hafnium Tantalum Tungsten Rhenium Osmium Iridium Platinum Gold Mercury Thallium Lead Bismuth Polonium Astatine Radon
55
132.91 Cs 56
137.34 Ba 72
178.49 Hf 73
180.95 Ta 74
183.85 W 75
186.21 Re 76
190.2 Os 77
192.22 Ir 78
195.09 Pt 79
196.97 Au 80
200.59 Hg 81
204.37 Tl 82
207.2 Pb 83
208.98 Bi 84
(209) Po 85
(210) At 86
(222) Rn
1.87 3.5 57-71 13.3 16.6 19.3 20.53 22.5 22.42 21.37 18.88 14.19 11.86 11.34 9.78
Lα 4.286 Lα 4.465 Lα 7.898 Lα 8.145 Lα 8.396 Lα 8.651 Lα 8.910 Lα 9.174 Lα 9.441 Lα 9.712 Lα 9.987 Lα 10.267 Lα 10.550 Lα 10.837 Lα 11.129 Lα 11.425 Lα 11.725
M 0.972 M 1.644 M 1.709 M 1.774 M 1.842 M 1.914 M 1.977 M 2.048 M 2.120 M 2.195 M 2.267 M 2.342 M 2.419

Francium Radium Actinoid

Lanthanum Cerium Praseodymium Neodymium Prometium Samarium Europium Gadolinium Terbium Dysprosium Holmium Erbium Thulium Ytterbium Lutetium
87 Fr 88 Ra 57 58
58 59 60 61 62 63 64 65 66 67 68 69 70 71
(223) 226.03
5 89-103 138.91
6.17
La 140.12
6.66
Ce 140.91
6.77
Pr 144.24
7.02
Nd (145) Pm 150.4
7.54
Sm 151.96
5.25
Eu 157.25
7.90
Gd 158.93
8.25
Tb 162.50
8.56
Dy 164.93
8.80
Ho 167.26
9.06
Er 168.93
9.32
Tm 173.04
6.96
Yb 174.97
9.84
Lu
Lα 12.029 Lα 12.340 Lα 4.650 Lα 4.839 Lα 5.033 Lα 5.229 Lα 5.432 Lα 5.635 Lα 5.845 Lα 6.056 Lα 6.272 Lα 6.494 Lα 6.719 Lα 6.947 Lα 7.179 Lα 7.414 Lα 7.654
M 0.833 M 0.883 M 0.929 M 0.978 M 1.081 M 1.131 M 1.185 M 1.240 M 1.293 M 1.347 M 1.405 M 1.462 M 1.521 M 1.581

Actinium Thorium Protactinium Uranium Neptunium Plutonium Americium Curium Berkelium Californium Einsteinium Fermium Mendelevium Nobelium Lawrencium
89
(227) Ac 90
232.04 Th 91
231.04 Pa 92
238.03 U 93
237.05 Np 94
(244) Pu 95 Am 96
(243) (247) Cm 97
(247) Bk 98
(251) Cf 99
(254) Es 100 Fm 101 Md 102 No 103
(257) (258) (255) (262) Lr
Gold Name 10.07 11.00 18.7
Number Lα 12.650 Lα 12.967 Lα 13.288 Lα 13.612 Lα 13.942 Lα 14.276 Lα 14.615 Lα 14.953 Lα 15.304 Lα 15.652
79 Au Symbol M 2.991 M 3.077 M 3.164 M 3.260 M 3.348 M 3.437 M 3.539 M 3.634 M 3.731
Atomic mass 196.97
18.88
Density Lα 9.712
(kg/m3) M 2.120 Characteristic
X-ray （keV) Information from specimen Generation depth and space resolution Analytical area
Note: Density
* ‘C’ as (graphite), ‘P’ as (white), Castaing’s formula
Electron probe
‘S’ as (alpha), ‘Sn’ as (white)
A 0.5 1 5 10 20 (kg/m3)
Incident electrons zm = 0.033 (E01.7 - EC1.7)
ρZ PLASTICS Si Al Ti Ge Fe Ag Au
WOOD
X-rays Secondary electrons
RUBBER CERAMICS
GLASS
Cu Pb
Secondary electrons E0 : Accelerating voltage (kV)
Minimum accelerating voltage ROCK

Cathodoluminescence Backscattered electrons

Auger electrons EC : Minimum emission voltage (keV)
A : Atomic mass
Unable Backscattered electrons ρ: Density (kg/m3)
Unable
to 5kV
5kV Auger electrons Z : Atomic number
to
detect or
orhigher
higher
detect
Continuum X-rays E0 1 5 10 20 50 (kV)
Specimen Characteristic X-rays
EC E0
Fluorescent X-rays
10kV
10kV 15kV
15kV
Electromotive force Absorbed electrons

or
orhigher
higher or
orhigher
higher
zm (μm) 0.01 0.05 0.1 0.5 1 5 10 50 100 (μm)
Transmitted electrons
The colors mean to detect the characteristic
X-ray of the lowest energy for each element.
Analytical area of iron in 20kV ≒ 1.5 – 0.2 = 1.3 (μm)

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