Optical Design with Zemax

for PhD - Basics

Lecture 5: Aberrations II
2014-05-22
Herbert Gross

Summer term 2014 www.iap.uni-jena.de

 2

Preliminary Schedule
No Date Subject
1 16.04. Introduction
2 24.04. Basic Zemax handling
3 08.05. Properties of optical systems
4 15.05. Aberrations I
5 22.05. Aberrations II
6 05.06. Optimization I
7 12.06. Optimization II
8 19.06. Advanced handling
9 25.06. Imaging
Detailed content
Zemax interface, menus, file handling, system description, editors, preferences,
updates, system reports, coordinate systems, aperture, field, wavelength, layouts,
diameters, stop and pupil, solves
Raytrace, ray fans, paraxial optics, surface types, quick focus, catalogs, vignetting,
footprints, system insertion, scaling, component reversal
aspheres, gradient media, gratings and diffractive surfaces, special types of
surfaces, telecentricity, ray aiming, afocal systems
representations, spot, Seidel, transverse aberration curves, Zernike wave
aberrations
PSF, MTF, ESF
algorithms, merit function, variables, pick up’s
methodology, correction process, special requirements, examples
slider, universal plot, I/O of data, material index fit, multi configuration, macro
language
Fourier imaging, geometrical images

10 03.07. Correction I simple and medium examples

11 10.07. Correction II advanced examples

12 xx.07. Illumination simple illumination calculations, non-sequential option

13 xx.07. Physical optical modelling I Gaussian beams, POP propagation

polarization raytrace, polarization transmission, polarization aberrations, coatings,
14 xx.07. Physical optical modelling II
representations, transmission and phase effects
15 xx.07. Tolerancing Sensitivities, Tolerancing, Adjustment
 3

Contents

1. Point spread function

2. Edge and line spread function
3. Optical transfer function
Diffraction at the System Aperture

 Self luminous points: emission of spherical waves

 Optical system: only a limited solid angle is propagated, the truncaton of the spherical wave
results in a finite angle light cone
 In the image space: uncomplete constructive interference of partial waves, the image point
is spreaded
 The optical systems works as a low pass filter

spherical image
wave plane

truncated
object spherical
point wave
point
spread
function

object plane x = 1.22  / NA

Fraunhofer Point Spread Function

 
 Rayleigh-Sommerfeld diffraction integral, ik r  r '
 i  e
 
Mathematical formulation of the Huygens-principle EI (r )   E ( r ' )    cos d dx' dy'
r  r'
 Fraunhofer approximation in the far field rp2
NF  1
for large Fresnel number  z

 Optical systems: numerical aperture NA in image space

Pupil amplitude/transmission/illumination T(xp,yp)
Wave aberration W(xp,yp)
complex pupil function A(xp,yp)
Transition from exit pupil to 2 i
 
E ( x' , y ' )  T x p , y p   e

2 iW x p , y p  x x' y p y'
 RAP p
image plane
e dx p dy p
AP

 Point spread function (PSF): Fourier transform of the complex pupil

function
2 iW ( x p , y p )
A( x p , y p )  T ( x p , y p )  e
PSF by Huygens Principle

 Huygens wavelets correspond to vectorial field components

 The phase is represented by the direction
 The amplitude is represented by the length
 Zeros in the diffraction pattern: destructive interference
 Aberrations from spherical wave: reduced conctructive superposition
Perfect Point Spread Function

Circular homogeneous illuminated

Aperture: intensity distribution 1,0
 transversal: Airy
vertical
scale: 1.22  
DAiry 
0,8 lateral
NA
 axial: sinc
n
0,6

intensity
scale RE 
NA2 0,4
 Resolution transversal better
than axial: x < z
0,2

0,0
-25 -20 -15 -10 -5 0 5 10 15 20 25
u/v

 2 J v   sin u / 4
2 2
I 0,v    1  I0 I u,0    I0
 v   u / 4 
Scaled coordinates according to Wolf :
axial : u = 2  z n /  NA2
transversal : v = 2  x /  NA

Ref: M. Kempe
Perfect Lateral Point Spread Function: Airy

log I(r)
0
Airy distribution: 10

-1
10
 Gray scale picture

-2
Zeros non-equidistant 10

 Logarithmic scale 10
-3

 Encircled energy
-4
10

-5
10

10
-6 r
0 5 10 15 20 25 30
Ecirc(r)
1

0.9
3. ring 1.48%
0.8
2. ring 2.79%
0.7
1. ring 7.26%
0.6
peak 83.8%
DAiry 0.5

0.4

0.3

0.2

0.1

0 r / rAiry
0 2 3 4 5
1 1.831 2.655 3.477
Perfect Axial Point Spread Function

 sin z  
 Axial distribution of intensity 2 2
 sin u / 4 
Corresponds to defocus I ( z)  I 0     I 
o  
 z   u / 4 
 Normalized axial coordinate

 NA2 u
z z
2 4
 Scale for depth of focus :
Rayleigh length

 n' 
RE  
n' sin 2 u ' NA2
 Zero crossing points:
equidistant and symmetric,
Distance zeros around image plane 4RE
Defocussed Perfect Psf

 Perfect point spread function with defocus

 Representation with constant energy: extreme large dynamic changes

z = -2RE z = -1RE focus z = +1RE z = +2RE

normalized
intensity

Imax = 5.1% Imax = 9.8% Imax = 42%

constant
energy
Comparison Geometrical Spot – Wave-Optical Psf

 Large aberrations:
Waveoptical calculation shows bad conditioning
 Wave aberrations small: diffraction limited,
geometrical spot too small and
spot
wrong diameter

 Approximation for the

intermediate range:

DSpot  DAiry
2
 DGeo
2

exact
wave-optic
DAiry
geometric-optic
approximated
aberrations

diffraction limited, Fourier transform

failure of the ill conditioned
geometrical model
 12

Strehl Ratio

 Important citerion for diffraction limited systems:

Strehl ratio (Strehl definition)
Ratio of real peak intensity (with aberrations) referenced on ideal peak intensity
2


2 iW ( x , y )

DS 
I ( real )
0,0 A( x, y )e dxdy
PSF
D
( ideal )
0,0 S 2

 A( x, y)dxdy
I PSF I( x )

 DS takes values between 0...1 1

DS = 1 is perfect

 Critical in use: the complete

peak reduced
information is reduced to only one Strehl ratio
number
ideal , without
aberrations
 The criterion is useful for 'good'
systems with values Ds > 0.5
real with
distribution aberrations
broadened

r
 13

Psf with Aberrations

 Psf for some low oder Zernike coefficients

 The coefficients are changed between cj = 0...0.7 
 The peak intensities are renormalized

coma
5. order
astigmatism
5. order
spherical
5. order
trefoil
c =0.0 coma
c =0.1
c =0.2 astigmatism
c =0.3
c =0.4 spherical
c =0.5 defocus
c =0.7
Point Spread Function with Apodization

 Apodisation of the pupil: I(w)

1. Homogeneous 1
Airy
2. Gaussian Bessel
0.8
Gauss
3. Bessel
0.6
FWHM
 Psf in focus:
0.4
different convergence to zero for
larger radii 0.2
 Encircled energy:
0 w
same behavior -2 -1 0 1 2 3

 Complicated:
Definition of compactness of the
central peak:
1. FWHM:
Airy more compact as Gauss
Bessel more compact as Airy
2. Energy 95%:
Gauss more compact as Airy
Bessel extremly worse
PSF in Zemax

 Only far field model (Fraunhofer)

 Two different algorithms available:
1. FFT-based
- fast
- equidistant exit pupil sampling assumed
- high resolution PSF needs many points
2. elementary integration (Huygens)
- slow (N4)
- independence of pupil and image sampling
- valid also for calculation of pupil distortion
- gives correct Strehl number
 Different options for representation possible

15
PSF in Zemax

 Logarithmic representation

16
Fresnel Edge Diffraction

 Diffraction at an edge in Fresnel

I(t)
approximation
1.5

 Intensity distribution,
Fresnel integrals C(x) and S(x)
1

1  1  
2 2
 1
I (t )     C (t )    S (t )  
2  2  2  
0.5
scaled argument

k 2
t x  x  2N F
z  z 0
-4 -2 0 2 4 6
t

 Intensity:
- at the geometrical shadow edge: 0.25
- shadow region: smooth profile
- bright region: oscillations
Incoherent Edge Spread Function

 ESF with defocussing ESF with spherical aberration

IESF(x) IESF(x)
1 1

0.9 0.9

0.8 0.8

0.7 0.7
W40 = 0.0
0.6 0.6
W40 = 0.1
W20 = 0.0 0.5 W40 = 0.2
0.5
W20 = 0.1 W40 = 0.3
0.4 W20 = 0.2 0.4
W40 = 0.4
W20 = 0.3 W40 = 0.5
0.3 0.3
W20 = 0.4 W40 = 0.7
W20 = 0.5 0.2
0.2
W20 = 0.7
0.1
0.1

0 x
0 x -8 -6 -4 -2 0 2 4 6 8
-10 -5 0 5 10
Linienbild

 Line image: integral over point sptread function I LSF ( x)   I PSF ( x, y )dy
LSF: line spread function
 Realization: narrow slit
convolution of slit width
 But with deconvolution, the PSF can be reconstructed

PSF
intens
ity

Integration

I LSF ( x) I PSF ( x, y )dy x

Line spread function

Line Spread Function

2 i 2

  Px , y p  e
 x x
R i p
 Line image: p dx p dy p
Fourier transform of pupil in one dimension
I LSF ( xi ) 
  Px , y p  dx p dy p 
2
p

ILSF(x)
1

 Line spreadfunction with aberrations 0.9

Here: defocussing 0.8
W20 = 0.0
W20 = 0.1
0.7 W20 = 0.2
W20 = 0.3
0.6 W20 = 0.4
W20 = 0.5
0.5
W20 = 0.7
0.4

0.3

0.2

0.1

0 x
-10 -5 0 5 10
Sampling of the Diffraction Integral

 Oscillating exponent :
Fourier transform reduces on 2- phase
period 50
 Most critical sampling usually quadratic
phase
at boundary defines number 40
of sampling points
 Steep phase gradients define the
30
sampling
 High order aberrations are a
problem 20

wrapped
10
phase
2

0 x
-6 -4 -2 0 2 4
smallest sampling
intervall
Propagation by Plane / Spherical Waves

 Expansion field in simple-to-propagate waves

 1. Spherical waves 2. Plane waves

Huygens principle spectral representation

 e
 
ik r  r '
 

 

E (r ' )  Fˆxy1 eik z z  Fˆxy E (r )
E (r ' )      E (r ) d 2 r
r  r'
Resolution of Fourier Components

Ref: D.Aronstein / J. Bentley

Optical Transfer Function: Definition

 Normalized optical transfer function  


 2 i x p v x  y p v y 

2
(OTF) in frequency space g( xp , y p )  e dx p dy p
H OTF ( v x , v y )    
 


2
g ( x p , y p ) dx p dy p
  

 Fourier transform of the Psf-

intensity H OTF ( v x , v y )Fˆ I PSF ( x, y )

 OTF: Autocorrelation of shifted pupil function, Duffieux-integral

 
 f vx  f vy  f vx  f vy
  P( x p  2
, yp 
2
)  P* ( x p 
2
, yp 
2
) dx p dy p
H OTF ( v x , v y )    
 


2
P( x p , y p ) dx p dy p
  

 Absolute value of OTF: modulation transfer function (MTF)

 MTF is numerically identical to contrast of the image of a sine grating at the

corresponding spatial frequency
Contrast / Visibility
 The MTF-value corresponds to the intensity contrast of an imaged sin grating
 Visibility
I max  I min
V
I max  I min
 The maximum value of the intensity
is not identical to the contrast value I(x) peak slope
since the minimal value is finite too decreased decreased
1
object
 Concrete values: 0.9 Imax
0.8

I Imax V
0.7
0.010 0.990 0.980
0.020 0.980 0.961 0.6

0.050 0.950 0.905 0.5

0.100 0.900 0.818
0.4
0.111 0.889 0.800
0.150 0.850 0.739 0.3

0.200 0.800 0.667 0.2

0.300 0.700 0.538 image
0.1 Imin
0
x
-2 -1.5 -1 -0.5 0 minima 1 1.5 2
increased
Number of Supported Orders

 A structure of the object is resolved, if the first diffraction order is propagated

through the optical imaging system

 The fidelity of the image increases with the number of propagated diffracted orders
Optical Transfer Function of a Perfect System

 Aberration free circular pupil:

Reference frequency
a sin u'
vo  
f 
 Maximum cut-off frequency:
2na 2n sin u '
vmax  2v0  
f 
 Analytical representation

  v   v   v  
2
2
H MTF (v )  arccos     1   
  2 v0   2 v0   2 v0  
 
 Separation of the complex OTF function into:
- absolute value: modulation transfer MTF
- phase value: phase transfer function PTF

H OTF (vx , v y )  H MTF (vx , v y ) e

i H PTF ( v x ,v y )
Sagittal and Tangential MTF

 Due to the asymmetric geometry of the psf for finite field sizes, the MTF depends on the
azimuthal orientation of the object structure
 Generally, two MTF curves are considered for sagittal/tangential oriented object structures

gMTF
1
tangential
plane
y
ideal

0.5
sagittal

tangential sagittal tangential

 0  /  max
0 0.5 1

arbitrary
rotated
tangential
sagittal
x
plane
sagittal
Interpretation of the Duffieux Iintegral

y'
p
 Interpretation of the Duffieux integral:
overlap area of 0th and 1st diffraction order, direct
light
interference between the two orders objective
pupil

 The area of the overlap corresponds to the x'p

information transfer of the structural details

y
o
 Frequency limit of resolution: at object diffracted
areas completely separated light in 1st order

xo
y object
L

xL

y condenser
conjugate to object pupil

x
light
source
 30

Test: Siemens Star

Determination of resolution and contrast

with Siemens star test chart:

 Central segments b/w

 Growing spatial frequency towards the
center
 Gray ring zones: contrast zero
 Calibrating spatial feature size by radial
diameter
 Nested gray rings with finite contrast
in between:
contrast reversal, pseudo resolution
 31

Contrast and Resolution

contrast
 High frequent brillant
structures :
contrast reduced
 Low frequent structures:
resolution reduced

blurred sharp

milky
resolution
Optical Transfer Function of a Perfect System
 Loss of contrast for higher spatial frequencies
OTF in Zemax

 Various options:
1. FFT based calculation
2. representation as a function of
- field size
- defocus
3. Huygens PSF integral based
4. geometrical approximation via
spot calculation for not diffraction
limited systems
 Different representation settings:
- maximun spatial frequency
- volume relief
- MTF / PTF
- changes over the field size

33
OTF in Zemax

 Various MTF representations

34