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A Toroidal Power Inductor Using Radial-Anisotropy

Thin-Film Magnetic Material Based on a Hybrid


Fabrication Process
Jizheng Qiu, Daniel V. Harburg and Charles R. Sullivan
Thayer School of Engineering at Dartmouth
14 Engineering Drive, Hanover, NH 03755, USA
Email: {jizheng.qiu.th, daniel.v.harburg, charles.r.sullivan}@dartmouth.edu

Abstract— This paper presents improvements for the design magnetic material surrounding windings [4], [6], [12]–[14],
and fabrication of high-frequency toroidal power inductors with take advantage of uniaxial anisotropy of the magnetic material
and without radial-anisotropy thin-film magnetic material. An to achieve low hysteresis loss. However, the device fabrication
improved winding resistance model for toroids is developed
considering an angle factor for actual winding shape, the effect process requires two deposition steps of magnetic material,
of spacing between turns and loss associated with exterior which is generally expensive. Moreover, racetrack inductors
current in the circumferential direction. A hybrid process for have significant loss in the magnetic vias, which connect
fabricating low-profile magnetic-core toroids is presented. The upper and lower sections of the core, because the flux is
process uses standard flex printed circuit board (PCB) technology perpendicular to the magnetic layers and induces large eddy-
for the top and bottom winding layers with vias electroplated
after sandwiching the magnetic core between the two winding current loss [4], [12], [15]–[17]. Toroidal inductors, with only
layers. Thin-film magnetic material (Co-Zr-O) is deposited in one magnetic material deposition step needed, also avoid the
the presence of a radial magnetic field, which induces radial magnetic-via loss because the majority of the flux is in the
anisotropy in the toroidal core. Small-signal measurements show plane of the magnetic layers. However, they require special
that the toroidal core has a relative permeability over 40 at anisotropy in magnetic cores to perform properly. A radial-
frequencies up to several hundred megahertz, and very high
quality factor in the frequency range below 100 MHz. Air- anisotropy thin-film toroial core, with a radial easy axis and
core and magnetic-core toroidal inductors using this hybrid circumferential hard axis was proposed in [18], [19] to be
fabrication process were built and tested at small-signal levels. used in toroidal inductors. The hard axis is aligned with the
Magnetic-core toroids showed a higher inductance and quality direction of flux flow in the toroidal core, leading to small
factor than air-core toroids at frequencies below 100 MHz. This hysteresis loss.
winding loss model and fabrication process can be applied to
both air-core and magnetic-core toroidal inductors. In this paper, radial-anisotropy toroidal cores with thick-
nesses of 10 µm and 40 µm were developed and characterized.
I. I NTRODUCTION The toroidal cores demonstrated a quality factor higher than
Power converters using a switching frequency in the mega- 100 at frequencies below 100 MHz, which is the frequency
hertz range have been developed for miniaturization [1], [2]. range of interest for most power applications. An improved
Magnetic components with high efficiency, high power density winding resistance model for toroids is developed. The model
and low profile are needed for integration in power-supply- takes into account an angle factor for actual winding shape,
in-package and/or power-supply-on-chip [3]–[7]. Toroidal in- the effect of spacing between turns and loss associated with
ductors have attractive geometries compared to solenoids and exterior current in the circumferential direction. This winding
planar spirals, as they have little external field, which can cause resistance model can predict winding resistances accurately
electromagnetic interference and induce eddy-current loss in in the multimegahertz frequency range, where skin effect and
nearby conductors [8]–[11]. Magnetic-core inductors are at- proximity effect become significant [20]. Compared to finite-
tractive for multimegahertz (e.g. 1–50 MHz) power converters element analysis (FEA), the proposed resistance model is
to achieve low profile while maintaining high efficiency [7]. much faster, which is important in an optimization process
Many anisotropic thin-film magnetic materials work well in which requires a large number of iterations. This model can
the multi-megahertz range, and have low hysteresis loss, if be applied to both air-core and magnteic-core toroids.
the flux is aligned with the hard axis of the anisotropic This paper also presents an inexpensive hybrid fabrication
material [5]. Racetrack inductors, which have closed-core process for low-profile toroidal inductors. The top and bottom
winding layers of the toroid are fabricated in a printed circuit
This work was supported in part by the Advanced Research Project Agency- board (PCB), with vias electroplated afterwards. A toroidal
Energy at the U.S. Department of Energy, and in part by the Interconnect
Focus Center, one of the six research centers funded under the Focus Center magnetic core can be integrated into the winding during the
Research Program, a Semiconductor Research Corporation program. fabrication process to build magnetic-core toroids. Low-profile

978-1-4673-4355-8/13/$31.00 ©2013 IEEE 1660


ri ro

݈ଵ ro θ ri
i ݈ଶ i
w
(a) Simplified 1D model (b) Actual winding with di-
with radial current path agonal current path
Fig. 1. 3D model of an air-core toroidal inductor with foil winding. Fig. 2. Schematics of a N-turn toroid (top or bottom layer).

TABLE I
PARAMETERS OF T OROIDS U SED IN 3D FEA S IMULATIONS
air-core and magnetic-core toroid prototypes using the hybrid
fabrication process were built and tested at small-signal levels. Toroid 1 Toroid 2 Toroid 3
parameters
(N=4) (N=16) (N=32)
II. A N I MPROVED W INDING R ESISTANCE M ODEL ro (mm) 2.8 2.8 2.8
Analysis of winding resistance in toroids with foil windings ri (mm) 1.7 1.7 1.7
using analytical models or FEA has been discussed in [9], h (mm) 0.3 0.3 0.3
[21]–[25]. The model proposed in [22] accounts for all the t (µm) 50 50 50
effects discussed here and is a good alternative whereas the w (µm) 140 185 145
others are more approximate. An air-core toroidal inductor
with a single-layer foil winding is shown in Fig. 1. The
foil winding has a rectangular cross section, with the same and magnetic-core toroids, and is not specific to any one
thickness for the top and bottom layers, and the inner and outer fabrication method.
vias. The winding resistance model discussed in this paper is
based on this winding geometry. Fig. 2a shows the top-view A. Angle Factor for Winding Resistance
of the winding layout of an N -turn toroid with inner radius Fig. 2b shows the actual toroid with diagonal current paths.
ri and outer radius ro , based on radial current paths. ri and Compared to the radial-path model, the resistances of the inner
ro are defined as the distance from the center of the toroid and outer vias for the diagonal-path model remain the same
to the center face of the inner and outer vias, respectively. as (2) and (3), but the top and bottom layer traces have a a
The top and bottom layers are symmetric. Assuming zero longer trace and smaller effective width. An angle factor (F )
spacing between turns (w), the basic dc resistance model for can be applied to correct the top and bottom layer resistances
the geometry shown in Fig. 2a is from (1) for the actual diagonal path
µ ¶2
N 2 ρ ro l2 r2 + ro2 − 2ri ro cos θ
Rt,dc = Rb,dc = ln (1) F = = i 2 (4)
2πt ri l1 (ro − ri )
N 2 ρh where l1 and l2 are the lengths of the current path in the
Ri,dc = (2)
2πri t top/bottom layer of each turn in the radial-path model and
π
diagonal-path model respectively and θ = N . The angle factor
N 2 ρh
Ro,dc = (3) is the same for both dc and ac resistances.
2πro t A model of angle factor (F 0 ) for the toroid winding re-
where Rt,dc , Rb,dc , Ri,dc and Ro,dc are dc resistances of top, sistance was also presented in [24]. The accuracy of the
bottom, inner, and outer conductors of the toroid, respectively. two models was compared to FEA results. Three types of
ρ is the conductor resistivity, t is the conductor thickness, and toroids with 4, 16, and 32 turns, as shown in Table I, were
h is the
p toroid thickness. For ac currents, if the skin depth δ analyzed using Ansys MAXWELL 3D FEA. A comparison of
(δ = ρ/(πf µ)) is much less than the conductor thickness, calculated and simulated dc winding loss is shown in Table II.
ac current flows in a layer that is one skin depth thick. Thus, It can be seen that for Toroids 2 and 3, both angle factors
the ac resistance is the same as (1) to (3), but with t replaced give accurate predictions; while for Toroid 1, angle factor F
by δ. is more accurate than F 0 . A comparison between these two
To develop a more accurate resistance model for toroids angle factors is also given in Fig. 3, as a function of number
with single-layer foil windings, we modify this model to of turns, giving ri /ro = 0.6. It can be seen from Fig. 3 that F
account for several additional factors: an angle factor for and F 0 converge as N increases (e.g. the difference between
the tilted actual winding geometry, non-zero spacing between F and F 0 is less than 2% for N > 10). F gives accurate
turns, and loss associated with radial and circumferential corrections for all three examples. However, F 0 becomes less
current components. The model is applicable to both air-core accurate when the tilt angle becomes larger, which happens

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TABLE II Axes of symmetry
C OMPARISON OF C ALCULATED AND S IMULATED D C W INDING L OSS
s
dc resistance Toroid 1 Toroid 2 Toroid 3
simulated (mΩ) 3.31 24.0 105
d
calculated with F 0 (mΩ) 4.34 24.7 107
relative error with F 0 31% 3% 2% t
calculated with F (mΩ) 3.21 24.5 107 p
relative error with F 3% 2% 2%

4.5 Fig. 4. Example of 2D FEA simulations for a toroidal winding with radial
F current excitation. Symmetric boundaries are used to model the periodic multi-
4 turn structure. Colored shading in the winding represents current density.
F′

3.5
TABLE III
VARIABLES IN 2D FEA S IMULATIONS
angle factor

3
variable definition range number of data points
2.5
X s/p 0.3 ∼ 0.98 15
2 Y d/δ 1 ∼ 100 10
Z t/δ 0.1 ∼ 10 20
1.5
V p/δ 10 ∼ 500 15
1
45 10 15 20 25 30 32
N
radius to inner radius needs to be included when applying
Fig. 3. Angle factors as a function of number of turns N, given ri /ro =0.6. the simulated resistance into the toroid ac winding resistance
The solid line is the angle factor (F ) introduced in this paper, and the dotted calculation. For a given design as shown in Fig. 2a, at a radius
line is the angle factor (F 0 ) introduced in [24].
r between ri and ro , the resistance per unit length can be
interpolated by using the look-up table of resistances simulated
when the number of turns is small, or when the ratio of ri to by 2D FEA. By integrating the resistance from ri and ro , one
ro approaches 1. can obtain the ac winding resistance of the geometry shown
in Fig. 2a considering the non-uniform ac current distribution.
B. Winding Resistance Considering Non-Zero Spacing Be- C. Radial and Circumferential Currents
tween Turns
The current in the toroidal winding can be decomposed
An actual winding has non-zero spacing between turns, as into a radial and a circumferential component [22]. The radial
shown in Fig. 2. The first effect of the turn spacing is that current component (called the poloidal current in [22]) induces
it decreases the effective width of the winding traces. The the main field inside the toroid, and flows on the interior
second effect is that ac current flows also on the side edge of surface of the winding with high-frequency excitations. The
the turn, thus changing the ac winding resistance calculated radial current refers to the current that flows radially in the
based on the assumption that the ac current flows uniformly in top and bottom conductor layers and vertically in the inner
one skin depth of the winding. The first effect can be √corrected and outer via portions of the winding. The circumferential
by replacing√ro and ri in (1)–(3) with ro0 = ro − w 2πF N and current component (called the toroidal current in [22]) induces
ri0 = ri − w 2πF N . The angle factor remains the same as (4). the leakage dipole field outside the toroid, and flows on
To account for the second effect of the winding gap, we the exterior surface with high-frequency excitations. With dc
used a curve-fit method proposed in [26]. 2D FEA simulations, or low-frequency ac current excitations, the currents flow
as shown in Fig. 4, were performed in COMSOL over a uniformly in the winding, and thus the net current follows the
wide range of geometries, and the resulting ac resistance was winding path. In this situation, combining the radial current
tabulated for interpolation. The range of the variables of the associated resistances ((1) to (3)) with non-zero turn spacing
geometries is listed in Table III. s and t are the width and correction and the angle factor (4) will give an accurate
thickness of the winding, d is the vertical space between winding resistance. With high-frequency ac current excitations,
windings, and p is the pitch of the symmetric geometry. The the currents become nonuniform (radial interior current and
total number of simulations is 45,000. Once the look-up table circumferential exterior current) due to skin effects. In this
is obtained by 2D FEA, the interpolation of the table to get situation, an angle factor may not be accurate enough; thus
the resistance of any design in the simulated range is fast and we can calculate resistances associated with radial current and
thus can be effectively used in iterative design optimizations. circumferential current separately. The model of radial current
The change of the width of the toroid winding from the outer associated resistance is discussed in Section II-B (without the

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Center axis of symmetry
magnetic-core toroids was used. The process consists of PCB
technology for the top and bottom winding layers and vias
electroplated after sandwiching the magnetic core between the
two conductor layers.
Fig. 6 and Fig. 7 show a schematic and photo of the hybrid
fabrication process, which includes the following procedures:
Fig. 5. 2D FEA simulation of the circumferential current component in a
toroid, which induces a radial field. Colored shading in the winding represents 1) Winding layout in PCB: The top and bottom windings
current density; field lines are shown outside the toroid. were fabricated in a polyimide substrate using a standard
TABLE IV PCB process, with a total board thickness of about
C OMPARISON OF C ALCULATED TO S IMULATED AC W INDING L OSS 100 µm and a copper thickness of 18 µm, as shown in
Fig. 7b. A trace network was also patterned in the bottom
ac resistance (5 MHz) Toroid 1 Toroid 2 Toroid 3 winding substrate providing electrical connections for
simulated (mΩ) 6.29 36.6 143
electroplating.
2) Via electroplating: Most of the conductor area on the
calculated (mΩ) 5.92 36.2 145
bottom substrate is covered by a polyimide overlay, but
relative error 5.9% 1.1% 1.4%
pads are left open to allow via growth. Copper was
ac resistance (10 MHz) Toroid 1 Toroid 2 Toroid 3 electroplated on top of the exposed pads, as shown in
simulated (mΩ) 8.88 51.6 198 Fig. 7c.
calculated (mΩ) 8.54 50.5 197 3) Via polishing: The top of the electroplated pads were
relative error 3.8% 2.1% 0.5% polished down to provide a flat surface, as shown in
Fig. 7d.
ac resistance (20 MHz) Toroid 1 Toroid 2 Toroid 3 4) Fabricating the toroidal core: Radial-anisotropy toroidal
simulated (mΩ) 12.2 73.5 282 cores were fabricated separately using the method dis-
calculated (mΩ) 12.2 71.3 276 cussed in [18], [19], and then dropped in the toroidal
relative error 0% 3.0% 2.1% winding for integration, as shown in Fig. 7e. Co-Zr-O
nanogranular magnetic material was magnetron sput-
tered on top of 50-µm-thick alumina substrates, which
angle factor as the current path is radial). Similarly, a series were laser cut into toroidal shapes before sputtering.
of 2D FEA simulations of the geometry shown in Fig. 5 Magnetic orientation fixtures were built to provide an
has been performed to obtain a look-up table for resistance in-plane radial magnetic field during the deposition to
associated with circumferential current for interpolation. The induce radial anisotropy [18], [19]. The outer radius of
sum of the resistances associated with radial current and the fabricated toroidal core is 2.8 mm, and inner radius
with circumferential current gives the total winding resistance. is 1.7 mm. Toroidal cores with 10-µm-thick and 40-
Similar to the angle factor, the resistance associated with µm-thick magnetic films were developed. Fig. 8 shows
circumferential current is most important for toroids with a photograph of fabricated 40-µm thin-film Co-Zr-O
a small number of turns, because the resistance associated radial-anisotropy toroidal cores.
with radial current is proportional to N 2 , while the resistance 5) Connecting the top layer of winding: In the top winding
associated with circumferential current is independent of N . layer, holes are drilled in the via area. Copper was
electroplated through the holes connecting the via and
D. Comparison of Proposed Winding Resistance Model to 3D top winding, as shown in Fig. 7f. For flexible substrates,
FEA Simulations it is important to attach the top winding layer closely
By combining the loss models discussed from Section II- to the bottom layer in order to have a small distance
A to Section II-C, we obtain accurate winding loss models between the via surface and the top conductor pads
for toroids. The winding resistances of toroids are compared during electroplating.
with FEA simulations (MAXWELL 3D), both in dc and ac
(5 MHz, 10 MHz and 20 MHz) excitations. Parameters of IV. M EASUREMENT R ESULTS
the three examples of the tested toroids are listed in Table I.
A. 40-µm Thin-Film Toroidal Core Measurements
Simulated and calculated dc resistances are listed in Table II.
Simulated and calculated ac resistances are shown in Table IV. A total magnetic material thickness of 40 µm per toroidal
It can be seen that across the tested examples, the improved substrate was obtained by depositing 20 µm on each side of
winding resistance model matches FEA within several percent the substrate. The complex permeability (µr = µ0r − jµ00r )
for both dc and ac resistances. of the 40-µm thin-film toroidal cores was measured with an
impedance analyzer (Agilent 4991A). The core permeability
III. FABRICATION is extracted from impedance measurements of a test fixture
A 4-turn toroidal inductor has been designed and fabri- (equivalent to a 1-turn toroid) with and without the toroidal
cated. A hybrid fabrication process for fabricating low-profile core. Details of the measurement method are described in [18],

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µ′
r
Cross section of half of the toroid 1000
µ′′
1. Bottom winding of the toroid patterned r
Copper Polyimide Magnetic core
in a 1-layer PCB. Pads are not covered by 100 Q

relative permeability
polyimide for via growth.

10
2. Electroplating the vias

3. Polishing after the via plating 1

0.1
4. Dropping the magnetic core.

0.01
5. Covering the top layer of winding (1- 10 100 1000
layer PCB) by electroplating. f (MHz)

Fig. 6. Hybrid fabrication process steps for the toroidal inductor. Fig. 9. Measured complex permeability of fabricated 40-µm thin-film radial-
anisotropy toroidal cores.

[27]. Fig. 9 shows the measured real and imaginary parts of


Pads for via growth Core position
the complex relative permeability, from 10 MHz to 1 GHz. As
can be seen from Fig. 9, the resonant frequency of the core is
close to 1 GHz. The real part of the relative permeability is
over 40 below the resonant frequency. The measured quality
factor (ratio of real to imaginary relative permeability) of the
toroidal core is higher than 100 at frequencies below 100 MHz.
(a) Step 0: layout design (b) Step 1: bottom conductors B. Air-Core Toroidal Inductor Small-Signal Measurements
4-turn air-core toroids were built using the fabrication
process shown in Section III. Inductance of an air-core toroid
can be calculated as [9], [22]

La =Li + Lo
· ¸
(c) Step 2: via electroplating (d) Step 3: via polishing N 2 hµ0 ro µ0 (ro + ri ) 8(ro + ri ) (5)
= ln + ln −2 ,
2π ri 2 r o − ri
where µ0 is the permeability in free space, Li represents
the energy stored inside the toroid due to the radial current
component, and Lo represents the energy stored outside the
toroid due to the circumferential current component. Lo is
estimated as the inductance of a single-turn wire loop. For
(e) Step 4: dropping the (f) Step 5: connecting the
toroidal core top layer of winding toroids with a large number of turns, Li is much grater than
Lo , and Lo can often be neglected. However, for the built
Fig. 7. Photos of each step in the fabrication process. 4-turn toroid here, Lo is even larger than Li .
As is shown in Fig. 10, inductance and resistance of the
air-core toroid were measured from 1 MHz to 1 GHz with
an impedance analyzer. The height of the measured toroidal
inductor is about 350 µm. The measured inductance is 3.9 nH
at 1 MHz. The modeled inductance of the air-core toroid based
on (5) is 4.5 nH. The comparison of the modeled resistance
(developed in Section II) and the measured resistance is also
given in Fig. 10. The measured winding resistance is much
larger than the modeled values. Part of the discrepancy is
from the non-ideal resistivity obtained from the electroplated
copper. Part of the discrepancy is from the difference of the
Fig. 8. Photo of 40-µm Co-Zr-O radial-anisotropy cores (ro =2.8 mm, modeled and actual winding geometries, as shown in Fig. 11.
ri =1.7 mm).
The fabricated winding has large inner and outer via pads,
as can be seen in Fig. 7. The dipole leakage flux created

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10 10
air-core toroid
8

L (nH)
measured
magnetic-core toroid with 10-µ m thick core
5

L (nH)
6
4
0
2 1 10 100 1000
0 f (MHz)
1 10 100 1000
f (MHz) 1
air-core toroid

R (Ω)
1 magnetic-core toroid with 10-µ m thick core
measured 0.1
modeled
0.1 simulated with actual geometry
R (Ω)

0.01
1 10 100 1000
0.01 f (MHz)
60
0.001 air-core toroid
1 10 100 1000 40 magnetic-core toroid with 10-µ m thick core
f (MHz)

Q
20
Fig. 10. Small-signal measurements of inductance and resistance of a 0
1 10 100 1000
fabricated air-core toroid (dot). Modeled resistance (circle) and simulated f (MHz)
resistance with the actual geometry (star) are also shown.
Fig. 12. Small-signal measurements of inductance, resistance, and quality
Inner and factor of a fabricated air-core toroid (dash dot) and a magnetic-core toroid
outer vias with a 10-µm-thick toroidal core (solid line).

1000

Connection pads 100

relative permeability
(a) Modeled 4-turn (b) Fabricated 4-turn toroidal
toroidal winding winding geometry µ′r (extrcted from the toroid measurements)

geometry 10
µ′′r
Q
µ′r (measured with test fixture)
Fig. 11. 3D models of the ideal and fabricated 4-turn toroidal inductors. µ′′r
Q

by the circumferential current travels through the vias and


introduces extra eddy-current loss. 3D FEA simulation was
0.1
used to obtain the resistance of the actual winding geometry. 10 100 1000
f (MHz)
Simulated resistances of the actual geometry at 5 MHz and
10 MHz are shown in Fig. 10. By using a finer fabrication Fig. 13. Extracted relative permeability of the 10-µm-thick toroidal core from
process (e.g. photolithography process), the toroidal winding measured impedances of air-core and magnetic-core toroids (dot) compared
to the relative permeability of the 10-µm-thick toroidal core measured by the
can better approximate the modeled winding geometry with 1-turn test fixture (circle).
thin vias.

C. Magnetic-Core Toroidal Inductor Small-Signal Measure-


ments
N 2 µ0 (µ0r − 1)hc roc
4-turn magnetic-core toroids with 10-µm-thick toroidal Lm = La + ∆L = La + ln , (6)
cores were fabricated. Inductance, resistance, and quality 2π ric
factor of the magnetic-core toroidal inductor was measured where La is the air-core inductance (5), ∆L is the inductance
from 1 MHz to 1 GHz, as shown in Fig. 12 in comparison difference between the magnetic-core toroid and the air-core
with the air-core toroid impedances. From Fig. 12, it can toroid given the same winding geometry, µ0r is the real part
be seen that the magnetic-core toroid has an increase in of the relative permeability of the magnetic core, hc is the
inductance and quality factor compared to the air-core toroid at magnetic core thickness, and roc and ric are outer and inner
frequencies below 100 MHz. The inductance increase is only radius of the core. Based on impedance measurements of both
about 25%. This is because the number of turns of the toroid air-core and magnetic-core toroids, the complex permeability
is too small, and the radial current associate inductance Li is of the magnetic core can be extracted [27]. Fig. 13 shows
small compared to the circumferential associated inductance the extracted relative permeability of the 10-µm-thick toroidal
Lo (defined in (5)). The magnetic core directly increases Li , core from impedance measurements shown in Fig. 12 com-
but Lo is not impacted. Given other parameters the same, a 16- pared to the relative permeability of the 10-µm-thick toroidal
turn magnetic-core toroid with 10-µm-thick core is expected core measured by the 1-turn test fixture. As can be seen from
to show an inductance increase by as much as 150% (2.5x) Fig. 13, both measurement results match very well, except for
compared to a 16-turn air-core toroid. The magnetic-core frequencies higher than 300 MHz where the 4-turn toroidal
inductance can be calculated as inductor approaches self resonance.

1665
60
air-core toroid [3] D. Gardner, G. Schrom, F. Paillet, B. Jamieson, T. Karnik, and S. Borkar,
magnetic-core toroid with 10-µ m thick core (measured) “Review of on-chip inductor structures with magnetic films,” IEEE
50 magnetic-core toroid with 40-µ m thick core (estimated)
magnetic-core toroid with 80-µ m thick core (estimated)
Transactions on Magnetics, vol. 45, no. 10, pp. 4760 –4766, Oct. 2009.
[4] P. Morrow, C.-M. Park, H. Koertzen, and J. DiBene, “Design and fab-
40 rication of on-chip coupled inductors integrated with magnetic material
Q of inductor

for voltage regulators,” IEEE Transactions on Magnetics, vol. 47, no. 6,


pp. 1678 –1686, June 2011.
30 [5] S. Mathuna, N. Wang, S. Kulkarni, and S. Roy, “Review of Integrated
Magnetics for Power Supply on Chip (PwrSoC),” IEEE Transactions on
20 Power Electronics, vol. 27, no. 11, pp. 4799 –4817, Nov. 2012.
[6] C. Sullivan and S. Sanders, “Design of microfabricated transformers and
inductors for high-frequency power conversion,” IEEE Transactions on
10 Power Electronics, vol. 11, no. 2, pp. 228 –238, Mar. 1996.
[7] C. Sullivan, “Integrating magnetics for on-chip power: Challenges and
0 opportunities,” in IEEE Custom Integrated Circuits Conference, Sep.
1 10 100 2009, pp. 291 –298.
f (MHz)
[8] Y. Chen, R. Crumley, S. Lloyd, C. Baum, and D. Giri, “Field-
containing inductors,” IEEE Transactions on Electromagnetic Compati-
Fig. 14. Estimated quality factor of a magnetic-core toroidal inductor with bility, vol. 30, no. 3, pp. 345 –350, Aug. 1988.
thicker magnetic material (40 µm and 80 µm) based on the measurements of [9] C. Sullivan, W. Li, S. Prabhakaran, and S. Lu, “Design and fabrication
the magnetic-core toroidal inductor with 10-µm-thick core and the air-core of low-loss toroidal air-core inductors,” in IEEE Power Electronics
toroidal inductor. Specialists Conference, June 2007, pp. 1754 –1759.
[10] J. Phinney, J. Lang, and D. Perreault, “Multi-resonant microfabricated
inductors and transformers,” in IEEE Power Electronics Specialists
Based on the measured impedance of the air-core toroid Conference, vol. 6, June 2004, pp. 4527 – 4536.
[11] C. Ahn and M. Allen, “Micromachined planar inductors on silicon
and the magnetic-core toroid with a 10-µm-thick core, we wafers for mems applications,” IEEE Transactions on Industrial Elec-
estimated how the inductor quality factor would scale with tronics, vol. 45, no. 6, pp. 866 –876, Dec. 1998.
a thicker core. Fig. 14 shows the estimated inductor quality [12] J. Qiu and C. R. Sullivan, “Design and fabrication of VHF tapped power
inductors using nanogranular magnetic films,” IEEE Transactions on
factor with a 40-µm-thick toroidal core and with an 80-µm- Power Electronics, vol. 27, no. 12, pp. 4965 –4975, Dec. 2012.
thick toroidal core, using the same 4-turn winding. With an [13] N. Wang, E. J. O’Sullivan, P. Herget, B. Rajendran, L. E. Krupp, L. T.
80-µm-thick core, the inductor quality factor is expected to Romankiw, B. C. Webb, R. Fontana, E. A. Duch, E. A. Joseph, S. L.
Brown, X. Hu, G. M. Decad, N. Sturcken, K. L. Shepard, and W. J.
be higher than 40. As we discussed in Section IV-B, with a Gallagher, “Integrated on-chip inductors with electroplated magnetic
higher number of turns and/or an improved winding fabrication yokes (invited),” Journal of Applied Physics, vol. 111, no. 7, p. 07E732,
process, the quality factor is expected to be even higher. 2012.
[14] N. Wang, T. O’Donnell, R. Meere, F. Rhen, S. Roy, and S. O’Mathuna,
“Thin-film-integrated power inductor on Si and its performance in an 8-
V. C ONCLUSION MHz buck converter,” IEEE Transactions on Magnetics, vol. 44, no. 11,
pp. 4096 –4099, Nov. 2008.
In this paper, an improved winding resistance model for [15] D. Yao, C. Levey, and C. Sullivan, “Microfabricated v-groove power
toroids is developed. The model takes into account an angle inductors using multilayer Co-Zr-O thin films for very-high-frequency
dc-dc converters,” IEEE Transactions on Power Electronics, early access
factor for actual windings, spacing between turns, and loss 2013.
associated with radial currents and circumferential currents. [16] H. Wu, D. S. Gardner, W. Xu, and H. Yu, “Integrated RF on-chip
This improved model shows high accuracy for tested toroids inductors with patterned Co-Zr-Ta-B films,” IEEE Transactions on
examples compared to 3D FEA, within a several percent for Magnetics, vol. 48, no. 11, pp. 4123 –4126, Nov. 2012.
[17] D. V. Harburg, X. Yu, F. Herrault, C. Levey, M. Allen, and C. Sullivan,
both dc and ac resistances. This is similar to the performance “Micro-fabricated thin-film inductors for on-chip power conversion,” in
of the model in [22], and offers an alternative formulation that 7th International Conference on Integrated Power Electronics Systems,
may be preferred in some implementations. An inexpensive 2012, pp. 1–6.
[18] J. Qiu and C. Sullivan, “Radial-anisotropy nanogranular thin-film mag-
hybrid fabrication process for integrating separately-deposited netic material for toroidal inductors,” in IEEE Applied Power Electronics
toroidal cores into toroidal windings is presented. Prototype Conference and Exposition, Feb. 2012, pp. 491 –497.
air-core and magnetic-core toroids using this process were [19] ——, “Radial-anisotropy thin-film magnetic material for high-power-
density toroidal inductors,” in 7th International Conference on Integrated
fabricated and tested at small-signal levels. 40-µm radial- Power Electronics Systems, Mar. 2012, pp. 1 –6.
anisotropy toroidal cores show promising performance from [20] X. Nan, “Eddy current loss in windings,” Ph.D. dissertation, Thayer
small-signal permeability measurements, and are expected to School of Engineering at Dartmouth, 2005.
have good performance in a magnetic-core toroid. [21] C. Sullivan, D. Yao, G. Gamache, A. Latham, and J. Qiu, “(invited)
passive component technologies for advanced power conversion enabled
by wide-band-gap power devices,” ECS Transactions, vol. 41, no. 8, pp.
R EFERENCES 315–330, 2011.
[22] M. Araghchini, J. H. Lang, X. Yu, M. S. Kim, F. Herrault, M. G. Allen,
[1] D. Perreault, J. Hu, J. Rivas, Y. Han, O. Leitermann, R. Pilawa- J. Qiu, and C. R. Sullivan, “Modeling and measured verification of
Podgurski, A. Sagneri, and C. Sullivan, “Opportunities and challenges stored energy and loss in MEMS toroidal inductors,” in IEEE Energy
in very high frequency power conversion,” in IEEE Applied Power Conversion Congress and Exposition (ECCE), Sep. 2012, pp. 3293 –
Electronics Conference and Exposition, Feb. 2009, pp. 1 –14. 3300.
[2] Q. Li, M. Lim, J. Sun, A. Ball, Y. Ying, F. Lee, and K. Ngo, “Technology [23] Y. Zhang and S. Sanders, “In-board magnetics processes,” in IEEE
roadmap for high frequency integrated dc-dc converter,” in IEEE 6th Power Electronics Specialists Conference, vol. 1, Aug. 1999, pp. 561
International Power Electronics and Motion Control Conference, May –567 vol.1.
2009, pp. 1 –8. [24] ——, “Design, manufacture and application of in-board magnetic de-

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vices,” in 4th International Power Electronics and Motion Control
Conference, vol. 3, Aug. 2004, pp. 1791 –1798.
[25] S. Orlandi, B. Allongue, G. Blanchot, S. Buso, F. Faccio, C. Fuentes,
M. Kayal, S. Michelis, and G. Spiazzi, “Optimization of shielded pcb
air-core toroids for high-efficiency dc-dc converters,” IEEE Transactions
on Power Electronics, vol. 26, no. 7, pp. 1837 –1846, July 2011.
[26] D. V. Harburg, J. Qiu, and C. Sullivan, “An improved ac loss model for
the optimization of planar-coil inductors,” in IEEE 13th Workshop on
Control and Modeling for Power Electronics, June 2012.
[27] R. Goldfarb and H. Bussey, “Method for measuring complex permeabil-
ity at radio frequencies,” Review of Scientific Instruments, vol. 58, no. 4,
pp. 624 –627, Apr. 1987.

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