Linear Gage

CATALOG No.
E4174-542/572/575
LINEAR GAGE
SERIES 542/572/575
Dimension sensors offering superb

durability and environmental resistance,
suitable for in-line measurements.
1. A range of models available
2. Suitable for in-line use 3. Space-saving design
2
Features
1. A range of models available
4. Secured with nuts The linear gages offer five measuring ranges of 5, 10, 25, 50, and 100mm.
Different output modes are also available, including pulse waveform,
Digimatic Code (SPC) and sine wave (limited to the LGH with 0.01mm
ES Counter resolution). There are four resolution settings to choose from in pulse
waveform output: 0.005, 0.001, 0.0005 and 0.0001mm. Select the model
offering specifications best suited for your application.
2. Suitable for in-line use

The linear gages offer superb durability and environmental resistance,
I/O making them ideal for in-line measurements. Durability is ensured by strong
or construction and linear ball bearings in the slider unit (except for models
BCD Output
LGS and LGD-M), which are designed to last up to 10 million vertical spindle
strokes (according to Mitutoyo’s internal tests). Moreover, excellent dust/
EF Counter water protection (IP-66) is provided for effective use in severe in-line
environments (model LGF and others).
3. Space-saving design
The slender design of the gage enables installation in confined spaces.
Slim-line models with outside diameters of 8mm are also available for
I/O measurements in spaces of 10mm or less. These gages come in two
RS-232C different cable arrangements— vertical and horizontal— to suit the type of
Digimatic Code(SPC) fixture used.
RS Link
4. Secured with nuts
EV Counter The gage can be installed easily and securely by drilling a hole in the flat
plate and mounting the gage securely with a nut. (The specification varies
by model. The use of a nut is a standard specification with some models,
while others require special accessories. Some models cannot be secured
with nuts. Check the specifications for each model.)
5. Various output functions

The linear gage counters offer a range of output types: I/O, BCD, RS-232C
I/O and Digimatic (SPC). The EF/EV counter has a RS link function to be
RS-232C connected with multiple counters for multi-gage measurement (see page
Digimatic Code(SPC) 19). Select the output type that meets your specific needs.
RS Link
5. Various output functions
Measurement mechanism Output

The linear gages mainly use transmission- range. In the transmission-type The linear gage processes internally
type photoelectric linear encoders, as photoelectric linear encoder shown in detects signals and outputs square-wave
shown below. Some linear gages use a the figure, the light source (LED) and the signals as shown below. These
capacitance-type linear encoder, or a sensor element (photodiode) face each operating signals, which are square
laser-hologram measurement system (see other with the main scale and index scale waves having a relative phase difference
page 39) as a sensor. These high- of 20mm pitch positioned between of 90 degrees, are equivalent to RS-422A
precision linear encoders allow high them. signals, allowing for the independent use
precision measurement over a wide As the scale moves with respect to the of the linear gage unit (gage output).
Main scale detector, the extent of the light passing However, certain models (LGD, LGD-M
Photo-diode through the window in the index scale and LGS), do not output square-wave
varies constantly. At this time, two signals but generate Digimatic Code
synchronized sine-wave signals having a output (SPC output) in order to identify
relative 90-degree phase difference are the measurement position.
output. These signals are then amplified Phase-PA
and split electrically (with additional
waveforms inserted) and Signal pitch
output as 1µm or 0.5µm
LED
square-wave signals.
Phase-PB
Index scale Condenser lens Measuring pitch
LINEAR GAGE
3
ALL MODELS OF LINEAR GAGE
Gage Heads
Output Measuring Range
[Resolution] 5mm (.2”) 10mm (.4”) 25mm (1”) 50mm (2”)
0.25µm pitch Laser Hologage
Sign Wave
[0.00001mm]
(1µinch)
Accessories
Refer to p.8 • Accessories for gage head: p.16
• Accessories for ES, EF and EV counter: p.23
Square Wave LGB Laser Hologage • Accessories for SD-D1/D2: p.24
[0.0001mm]
(4µinch)*1
Refer to p.9 Refer to p.9
Square Wave LGF LGF LGF

[0.0005mm]
(.00002”)*
[0.001mm]
(.00004”)*
Refer to p.10 Refer to p.10 Refer to p.10
Square Wave LGB LGB

[0.001mm] Operation Guide and Technical Data
(.00004”)* • About the RS link: p.19
• Before using the gage: p.27
Refer to p.11 • Installing the gage: p.28
• Interchangeable contact point: p.31
• Gage Output Specification: p.32
• Counter output specifications: p.34
Refer to p.11 • Interconnection table for linear gage: p.38
• What is a hologram?: p.39
Refer to p.11 • Underground factory: p.39
• What is the absolute positional origin?: p.39
Square Wave LGE LGE LGE

[0.005mm]
(.0002”)*
Refer to p.12
Refer to p.12
Digimatic Output LGD LGD LGD

with an absolute sensor
[0.01mm/.0005”]
Refer to p.13
LGD-M

Refer to p.14
Digimatic Output LGS

with an incremetal sensor
[0.01mm/.0005”]
Refer to p.15
*: The resolution shown in inches is a calculated value. The actual resolution in inches is determined by the counter setting.
4
Display Units (Counters)
Single function Type Multi-function Type Multi-Gage System
100mm (4”)
KH Counter
Refer to p.8
EF Counter
Refer to p.21
ES Counter EF Counter EV Counter
EV-16P
Refer to p.20
(Not compatible with the LGF
LG with 0.5 mm resolution.)
Refer to p.22
Refer to p.21
Refer to p.15
ES Counter SD Counter EV Counter
SD-D2 EV-16D
Refer to p.20
SD Counter
SD-D1
Refer to p.24
LINEAR GAGE
5
Applications
Multipoint measurement Measurement of camshaft displacement
of automobile doors The linear gage (LGF-125L with EF counter) can be used to
The linear gage (LGS-1012 with EV counter) can be used to measure camshaft lift.
perform multi-point measurements for automobile doors and The EF counter is easily installed in the equipment panel.
evaluate errors against the specified tolerances.
When there are many points to measure, the use
of the LGS gage provides higher cost-effectiveness.
Ｍ
ｉＧＯ／
ｔＥＮ
ｕＦＧ
ｔ−
ｏＰ
ｙ
ｏ
Ｚ
Ｅ
Ｒ △
Ｏ
Ｔ
Ｐ
ＩＭＭ
．
ＲＡＩ
Ｓ＜
ＥＬ
ＸＮ
ＴＩ
Ｍ＞
ＩＰ
ＴＥ
Ａ％
ＫＬ
ＣＯ
ＬＡ
ＲＤ
Ｍ
ｉＧＯ／
ｔＥＮ
ｕＦＧ
ｔ−
ｏＰ
ｙ
ｏ
Ｚ
Ｅ
When shearing force
Ｒ △
Ｏ
Ｔ
Ｐ
ＩＭＭ
．
ＲＡＩ
Ｓ＜
ＥＬ
ＸＮ
ＴＩ
Ｍ＞
ＩＰ
ＴＥ
Ａ％
ＫＬ
ＣＯ
ＬＡ
is to be exerted on
ＲＤ
the gage, as shown
Ｍ
ｉＧＯ／
ｔＥＮ
ｕＦＧ
ｔ−
ｏＰ
ｙ
in the figure, take
ｏ
Ｚ
Ｅ
Ｒ △
Ｏ
Ｔ
Ｐ
ＩＭＭ
．
ＲＡＩ
Ｓ＜
ＥＬ
ＸＮ
measurements
ＴＩ
Ｍ＞
ＩＰ
ＴＥ
Ａ％
ＫＬ
ＣＯ
ＬＡ
ＲＤ
indirectly using a
Ｍ
fixture or the like in
ｉＧＯ／
ｔＥＮ
ｕＦＧ
ｔ−
ｏＰ
ｙ
ｏ
Ｚ
Ｅ
Ｒ △
order to avoid
Ｔ
Ｐ
ＩＭＭ
．
ＲＡＩ
Ｓ＜
ＥＬ
ＸＮ
ＴＩ
Ｍ＞
ＩＰ
ＴＥ
Ａ％
ＫＬ
ＣＯ
ＬＡ
applying an excess
ＲＤ
load on the gage.
Measuring displacement
Measuring
the door shape
Measurement of hydraulic coupling Multipoint measurement of turbine blades

dimensions The linear gage (LGB-110 with EV counter) can be used to
The linear gage (LGF-110L with EF-12PR counter) can be used perform multi-point measurements of aircraft turbine blades.
to measure the outside diameters and thicknesses of hydraulic
couplings used in shovel cars. EF-12PR counter allows for the
calculation of sums and differences between two gages.
Measuring outside Measuring blade shape

diameter and
thickness
Measurement of aircraft fuselage distortion Measurement of elevator drive-rail

The linear gage (LGD-1010L with EV counter) can be used to deflection
measure changes in stress generated in an aircraft fuselage. The linear gage (LGF-110L with EF counter) can be used to
For the very large workpiece, the use of an absolute type linear measure deflection in the drive rail of an elevator.
gage is recommended, since the master settings then need to Measured data can be output from the EF counter to a personal
be done just once. computer in order to plot the condition of displacement.
Analog output
Deflection data
tolerance
judgement
Plotted
When shearing force is to be exerted on deflection data
the gage, as shown in the figure, take
measurements indirectly using a fixture
Measuring displacement or the like in order to avoid subjecting
the gage to an excessive load.
6
Measurement of cylindrical pin displacement Multipoint measurement of VTR chassis
The linear gage (LGB-110 with EF-12PR counter) can be used to The linear gage (LGF-110L with EV counter) can be used to
measure the displacement of tape-winding capstan pins in measure VTR components at several points.
cassette recorders.
EF-12PR counter is capable of calculating sums and differences
between two gages.
X-direction:
Measuring pin
displacement
Y-direction:
Measuring pin
displacement
Multi-points
measurement/judgement
Measurement of core metal runout for Measurement of bridge-support joint

floppy disks The linear gage (LGD-1025L with ES counter) can be used to
The linear gage (LGB-110 with EF counter) can be used to measure the displacement of the bridge-support joint.
measure the runout of the diskís core metal. Since this measurement is performed over a long period of time,
use an absolute-type linear gage that requires power only
during the act of measurement.
Measuring the run-out
When shearing force is to be

exerted on the gage, as shown
in the figure, take
measurements indirectly using a
fixture or the like in order to
avoid subjecting the gage to an
excessive load.
Measuring displacement
Sorting of parts Inspection of rivet

The linear gage (LGF with EV counter) can be used to measure The linear gage (LGF with ES counter) can be used to inspect
the parts dimension for sorting. The EV counter can divide the the condition of fixing of the rivet or bolt. The inspection of the
dimension into 21-step and output the signal for sorting. parts press fitted is also the same way.
Mit
uto
yo
ES-P
Fn
P.S
ET
LINEAR GAGE
7
Laser Hologage Display unit is provided
0.00001mm (0.01µm) Reading
542-923-1
The Mitutoyo Laser Hologage is a high-end digital gaging
system that employs diffracted laser beam interference to make
highly accurate and repeatable measurements. It features ultra-
fine diffraction gratings which are holographically recorded on
the scale. The Laser Hologage is suitable for measuring ultra- 45.4 Unit: mm
high precision parts, especially those in semiconductor and Dimensions
related industries (See page 39 for explanation on hologram.).
Connector for
lifting cable
FEATURES
85
146 (0.01µm type)
• Highly accurate measurement due to an ultra-high resolution
of 0.00001mm (0.01µm), which is close to the performance
10 (Measuring range)
of laser interferometers.
• Excellent measuring stability — the design is also highly
25
0
Ø15h6 -0.011
resistant to unfavorable environmental conditions such as air (Stem dia.)
movement and atmospheric pressure changes.
• High-precision linear ball bearings are used in the guide for
extremely smooth movement and exceptional durability. 18
0.01mm type with
10
R5 carbide point
• A display unit is provided. 40 20
OPTIONAL ACCESSORIES 235 5 100 13

Order No. Description
09CAA335 Zero-set remote controller Ø E
mm ZERO
P.SET
971751 Stem fixture for Laser Hologage Refer to p.30 A inch
UNIT
107
1/ 2
971752 Stem fixture for Laser Hologage Refer to p.30 I
A
LOAD
971753 Spindle lifting cable for Laser Hologage Refer to p.17
KH
971750 Laser Hologage stand Refer to p.17
8
Display Unit
SPECIFICATIONS
Order No. 100V 542-923 542-924
(including the 120V 542-923-1A 542-924-1A
display unit) 220V 542-923-1D 542-924-1D
240V 542-923-1E 542-924-1E
240V 542-923-1F 542-924-1F
Resolution 0.00001mm (.000001")
Range 10mm (.4")
Accuracy (20°C) 0.1µm
Repeatability (2σ) 0.02µm
Measuring force Upward ( ) 0.55N or less 0.1N
Horizontal ( ) 0.45N or less —
Downward ( ) 0.35N or less —
Dust/Water protection level Not specified
Contact point R5mm carbide (mounting threads: M2.5 (P = 0.45) X 5mm)
Stem diameter Ø15mm
Bearing type High-precision linear ball bearing
Position-detection sensor Laser-hologram measuring sensor
Max. response speed 250mm/s
Output signal 0.25µm pitch, 90° phase difference, two-phase sine wave
Display 8-digit fluorescent tubes and a [-] sign
Functions Zero-set, preset, halved reading, double reading (diameter display), ABS/INC coordinate switching,
counting direction switching, mm/inch conversion, linear error compensation, error alarm
Data output Via RS-232C interface (provided)
Power supply 100-120V/200-240V AC, 50/60Hz
Power consumption Approx. 30VA
Operating environment 10°C to 30°C (20%RH to 80%RH, without condensation)
Mass Laser Hologage: 0.2kg (excluding cable) Display unit: 2kg.
Standard accessories Wrench for contact point (538610)
8
LGB
Laser Hologage
0.0001mm
0.0001mm (0.1µm)
(0.1µm) Reading
Reading
Differential Square-wave Output
542-711-1
542-246
These are extra-high accuracy gaging heads provided with

resolution up to 0.0001mm. The compact dimensions allow
easy installation to very tight spaces. The Laser Hologage
employs a unique holography scale as the length standard,
ensuring excellent measuring accuracy and repeatability (See
Connecting cable (2m) Unit: mm
page 39 for explanation on hologram.). Dimensions
The dedicated display unit (EF Counter) is optional. Ø9
Ø9
18
FEATURES
25.1 15.9 6.3

82.7
• A linear ball bearing in the spindle guide provides excellent
durability for an extended service life. Ø9.5 - 00.009
75
L
• The 0.0001mm reading type LGB linear gage (542-246) Ø14
4.9 (thread)
comes with a clamping nut on the stem. Clamping nut
(HIROSE) (No.200365)
5 (Measuring
RM12BPG-6P 30 20.4
L=11.5~13.0
OPTIONAL ACCESSORIES
range)
Order No. Description 45.4
902434 Extension cable (5m) for LGB Refer to p.16

902433 Extension cable (10m) for LGB Refer to p.16 Connector for
lifting cable
902432 Extension cable (20m) for LGB Refer to p.16
148.3 (0.1µm type)
85
238773 Rubber boot for LGB (spare) Refer to p.16
971751 Stem fixture for Laser Hologage Refer to p.30 10 (Measuring range)
971752 Stem fixture for Laser Hologage Refer to p.30 25
0
Ø15h6 -0.011
971753 Spindle lifting cable for Laser Hologage Refer to p.17
Stem dia
971750 Laser Hologage stand Refer to p.17
0.1µm type with

R1.5 carbide point
18 10
40 20
SPECIFICATIONS
Model No. LGB Laser Hologage*1
Order No. 542-246 542-711-1 542-712-1
Resolution 0.0001mm (.000005”)
Range 5mm 10mm
Accuracy (20°C) 0.8µm 0.2µm
Measuring force Upward ( ) Approx. 0.65N or less 0.55N or less 0.1N
Horizontal ( ) Approx. 0.6N or less 0.45N or less —
Downward ( ) Approx. 0.55N or less 0.35N or less —
Dust/Water protection level IP-54 Not Specified
Contact point R1.5mm carbide (mounting threads: M2.5 (P = 0.45) X 5mm)
Stem diameter Ø9.5mm Ø15mm
Bearing type Linear ball bearing High-precision linear ball bearing
Position-detection sensor Transmission-type photoelectric linear encoder Laser-hologram measurement sensor
Max.Responnse Speed 380mm/sec 250mm/sec
Output signal 0.4µm pitch, 90° phase difference, 0.25µm pitch, 90° phase difference, differential square wave
differential square wave (RS-422A equivalent) (RS-422A equivalent)*2
Cable length 2m
Power supply +5V ± 5% (power-supply ripple 200 mV p-p max.)
Power consumption 150mA 200mA
Mass 160g 200g (excluding cable)
Compatible counter EF counter with 0.0001mm resolution.[See page 21]
Standard accessories Wrench for contact point (538610) Wrench for contact point (538610)
Wrench for the nut (200168)
Remarks with a clamping nut on the stem Low force type
*1: Only one laser hologage may be connected to the EF counter. To connect two gages, use a 542-062-1 (without AC adapter) and an external power supply (12 to
24 VDC, 1A or greater).
*2: The signal output uses a special pitch (intervals) of 0.25mm. The values are converted to 0.0001mm resolution on the counter side.
LINEAR GAGE
9
LGF
0.0005/0.001mm Reading
Differential
Differential Square-wave
Square-wave Output
The LGF Linear Gages are Mitutoyo's new, low-cost type 542-121/131 542-123/133
electronic gage heads designed to fit into very tight spaces.
Employing an improved structure for the spindle guide, the LGF 542-122/132
is highly resistant to external shock and vibration.
FEATURES
• Excellent structure of protection
against dust and water splash (IP-66) in Dimensions Unit: mm
harsh shop-floor environments.
3.5
6.4
• Output differential square wave signals 57.5 0.6 (screw
0.6 (screw
3.5
40.5 top height) 14.8 6.4 54.6
for a wide range of applications. 36.5 11.2 37.6 top height) 20
54.6 0.6 (screw 34 + 10 10.86
• Use linear stroke bearings on the +1
34 0 5.6
37.6 top height) 20
spindle movement for durability +1
34 0 10.86
50.5
17.3
• Thrust Stem with a clamping nut is
20
23
24.5
optional.
20
20
75.9
168.9
109
128.5
Clamping nut for thrust stem
14 6.7
202.1
310.4
0
Ø8 - 0.009
902434 Extension cable (5m) Refer to p.16
10.6 or longer
902433 Extension cable (10m) Refer to p.16 Ø15 - 00.015
21.5
(stroke)
M9.5x0.5
902432 Extension cable (20m) Refer to p.16
29.1
Ø15 - 00.015
for thrust stem
Clamping nut
238772 10mm rubber boot (spare) Refer to p.16 12.3 6
for thrust stem

Clamping nut
M14x0.5
962504 25mm rubber boot (spare) Refer to p.16
6
26 or longer
51.5 or longer (stroke)

M14x0.5
962505 50mm rubber boot (spare) Refer to p.16 Ø18
RM12BPG-6P
02ADB680 Thrust stem set (for 10mm LGF model) (HIROSE)
Refer to p.29 13.8 8.6
39
02ADB690 Thrust stem set (for 25mm/50mm LGF

model) Refer to p.29
Connecting cable 13.8 8.6
2m
SPECIFICATIONS
Order No. 542-121 542-131 542-122 542-132 542-123 542-133
Resolution 0.001mm 0.0005mm 0.001mm 0.0005mm 0.001mm 0.0005mm
Measuring range 10mm 25mm 50mm
Accuracy (20°C) (1.5+L/50) µm (L=mm)
Measuring force Upward ( ) 1.2N or less 4.6N or less 5.7N or less
Horizontal ( ) 1.1N or less 4.3N or less 5.3N or less
Downward ( ) 1.0N or less 4.0N or less 4.9N or less
Dust/water protection*2 IP-66 equivalent
Contact point ø3mm carbide (mounting threads: M2.5 (P = 0.45) X 5mm) 901312
Stem diameter Ø8mm Ø15mm
Bearing type Stroke ball bearing
Position-detection method Transmission-type photoelectric linear encoder
Response speed*1 1500mm/sec
Output signal 90° phase difference, differential square wave (RS-422A equivalent);
minimum edge intervals 500 ns for 1 µm model, 250 ns for 0.5 µm model
Signal pitch 4µm 2µm 4µm 2µm 4µm 2µm
Cable length 2m
Power supply Supply voltage +5V (4.8V to 5.2V), ripple voltage 200mV p-p max.
Power consumption Max. 120mA
Mass 250g 290g 380g
*1: An alarm signal is output when the spindleís movement speed reaches 1500mm/s. If a Mitutoyo counter is used, an error will be displayed.
If the counter is not a Mitutoyo model, contact us regarding the use of alarm-signal output. When the LGF-150L is used, releasing the contact point after pushing it
in may cause an overspeed error depending on the extent to which the contact point is pushed inward.
*2: The IP value is a standard indicating the degree of protection against solid foreign matter and water. Note that the standard may not apply to certain types of liquids.
10
LGB
0.001mm Reading
Reading FEATURES
Differential Square-wave Output • Extremely compact design. Available with an outside
diameter as small as 8mm.
• The small photoelectric linear encoder assures high precision
over the entire stroke range.
• The ball bearings used in the spindle unit ensure superb
durability.
542-222 542-223
542-222H
542-224
542-204 542-244 542-262

542-204H 542-262H 542-270
542-264
Dimensions
Unit: mm
9.2 4.9 9.6
Ø9 Ø9 Ø4.2
18
10.5
Ø9
18 Ø7.9
5 Applicable air hose
25.1 15.9 6.3
Knurl (ID Ø2.5)

Air inlet
Ø9
Ø9.5- 00.009 34.9 15.9 20.2

113
Ø12
75
75
9
(Applicable air hose: ID Ø2.5)

113
L
0
Ø8 - 0.009 Ø14 Ø9.5 - 00.009
34.9 15.4
Ø8 - 00.009 Knurl
24.6
60.1
Clamping nut Ø14
4.9 (thread)
No.200365
60.1
29.3 15.9 4.5

Clamping nut
4.9 (thread)
113
23.9 15.4 21.2
7.3
L=11.5 to 13.0 No.200365

7.3
102
L
L=11.5 to 13.0 Ø9.5 - 00.009
50.3
Ø8 - 00.009
(39.3)
Stroke 10.5mm
Clamping nut
82.7
Connecting cable (2m) (No.200365)
Stroke 10.5mm
or longer
542-230
or longer
L=11.5 to 13.0
(HIROSE) * Connector dimensions are common to all models.
RM12BPG-6P 30 20.4
Individual specifications
Order No. 542-204 542-204H 542-222 542-222H 542-224 542-230 542-223
Stem 8mm diameter, straight stem
Order No. 542-244 542-262 542-262H 542-264 542-270
Stem 9.5mm diameter, straight stem with nut
Measuring range 5mm (.2”) 10mm (.4”)
Accuracy (20°C) 2 µm 1 µm 2 µm 1 µm 2 µm
Measuring Upward ( ) Approx. 0.65N or less Approx. 0.8N or less Approx. 0.6N or less Approx. 0.8N or less
force Horizontal ( ) Approx. 0.6N or less Approx. 0.75N or less Approx. 0.55N or less Approx. 0.75N or less
Downward ( ) Approx. 0.55N or less Approx. 0.7N or less Approx. 0.5N or less Approx. 0.7N or less
Mass 145g (542-204) 145g 150g (542-222) 150g (542-222H) 150g (542-224) 165g (542-230) 165g
160g (542-244) 170g (542-262) 170g (542-262H) 170g (542-264) 170g (542-270)
Air-lifter mechanism Spindle becomes Spindle retreats
None free when air when air is
is supplied supplied
Common specifications
Resolution 0.001mm
Dust/water protection IP-54
Contact point Ø3mm in carbide (mounting threads: M2.5 (P = 0.45) X 5mm), 901312
Position-detection method Transmission-type photoelectric linear encoder
Response speed 900mm/sec
Output signal/signal pitch 4µm pitch, 90° phase difference, differential square wave (RS-422A equivalent)
Cable length 2m
Power supply Supply voltage: 4.8 to 5.3V, ripple voltage 200mV p-p max.
Power consumption 80mA
Operating enviromment 0°C to 40°C (20%RH to 80%RH, without condensation)
Required air-pressure range 0.3 to 0.4 MPa (3 to 4kg/cm2) (Required only for models equipped with air lifters)
LINEAR GAGE
11
LGE 542-601 542-602
0.005mm Reading
Differential
Differential Square-wave
Square-wave Output
542-604
542-603
The LGE Series Linear Gages are compact electronic gage heads
designed to fit into very tight spaces. Employing linear ball
bearings, the LGE is also highly durable for long life.
FEATURES
• With a rubber boot for use in harsh environments.
• Optional thrust stem and tightening nut facilitate setup of the
LGE linear gage in holes of a plate or fixture.
unit: mm
Applicable air hose (ID Ø2.5)
0.6 (screw top height)
Dimensions
3
3
27.6 27.6
9.1
55
34 55.1 55.1
34.6

55 34.6
35.9
34 13.8 19 13.8 19

76.3
12.5
18.9
6.5
164.8 (at air supplied)
44.9
128.9
12.5
76.3
15 5.7
105
Ø8 - 0.009 6.5

166.5
M9.5x0.5 8
10.5 (stroke)
10.2 (stroke) 15 5.7
194.1
0
Ø8 - 0.009
6 Ø15 - 0.018
0
6.5 17
M9.5x0.5
8
299.4
M14x0.5
6
26 (stroke)
0
Ø15 - 0.018
20
6.5
M14x0.5
RM12BPG−6P (HIROSE)
51.5 (stroke)
238772 10mm rubber boot (spare) Refer to p.16 Ø18
39
02ADC730 Ø9.5mm Thrust stem set (for 10mm LGE model) Refer to p.29
02ADC740 Ø18mm Thrust stem set (for 25mm/50mm LGE model) Refer to p.29
Connecting cable 2m
SPECIFICATIONS
Order No. 542-601 542-604 542-602 542-603
Resolution 0.005mm (5µm)
Measuring range 10mm (.4”) 25mm (1”) 50mm (2”)
Accuracy (20°C) 20µm 30µm
Measuring Upward ( ) Approx. 1.2N or less Approx. 4.6N or less Approx. 5.7N or less
force Horizontal ( ) Approx. 1.1N or less Approx. 4.3N or less Approx. 5.3N or less
Downward ( ) Approx. 1.0N or less Approx. 4.0N or less Approx. 4.9N or less
Dust/water protection*1 IP-66 equivalent IP-54 equivalent IP-66 equivalent
Contact point Ø3mm carbide (mounting threads: M2.5 (P = 0.45) X 5mm), 901312
Position-detection method Capacitance-type incremental linear encoder
Response speed*2 Static: 1400mm/s Dynamic: 17.5mm/s
Output signal/signal pitch 20µm pitch, 90° phase difference, differential square wave (RS-422A equivalent)
Output cable length 2m
Power supply Supply voltage 5V (4.8V to 5.2V), ripple voltage 200mV p-p max.
Lifter mechanism None Built-in air lifter*3 None
Mass 200g 220g 250g 300g
Accessories Wrench for contact point (538610) Wrench for contact point (210187)
*1: The IP value given is for water. Note that the unit may not be able to maintain resistance to certain types of liquids.
*2: Static - The maximum movement speed at which no overspeed error occurs.
Dynamic - The maximum movement speed at which measurement by scanning is possible.
*3: The air-supply pressure for 524-604 is 0.3 to 0.4 MPa. The spindle moves forward (becomes free) when air is supplied. Use an air hose with an inside diameter of
2.5mm.
12
LGD
0.01mm/.0005” Reading
Digimatic
Digimatic Code
Code (SPC) Output 575-323/333
The LGD is an ultra-compact ABS Linear Gage designed to fit 575-322/332

into very tight spaces. It keeps track of its origin point once set.
FEATURES
• The use of an absolute scale* in the sensor makes it possible
to maintain the origin setting even when the power is
switched off.
• Special linear ball bearings are used for the spindle guide to 575-321/331
ensure a long service life. 575-324/334
• Optional thrust stem and tightening nut facilitate setup of the
LGD linear gage in holes of a plate or fixture.
*: See page 39 for an explanation of the absolute scale.
OPTIONAL ACCESSORIES Dimensions

238772 Spare rubber boot (for 10mm LGD model) Refer to p.16 The dimensions of the LGD is the
962504 Spare rubber boot (for 25mm LGD model) Refer to p.16 same as that of the LGE, as
Unit: mm
962505 Spare rubber boot (for 50mm LGD model) Refer to p.16
indicated on the page at left. The
20 8.6 only differences are the shape and
02ADC730 Ø9.5mm Thrust stem set (for 10mm LGD model) Refer to p.29 size of the connector at the end of
02ADC740 Ø18mm Thrust stem set (for 25mm/50mm LGD model) Refer to p.29 the cable.
37
965275■ * Digimatic Power Supply Unit Refer to p.17
*: ■ is left blank or an appropriate suffix (A or E) is inserted, depending on the AC
supply voltage (blank - 100V; A - 120V; E - 240V).
575-321/331: Refer to 542-601
575-322/332: Refer to 542-602
575-323/333: Refer to 542-603
575-324/334: Refer to 542-604
SPECIFICATIONS
Order No. 575-321 575-331 575-324 575-334 575-322 575-332 575-323 575-333
Resolution 0.01mm .0005” 0.01mm .0005” 0.01mm .0005” 0.01mm .0005”
Measuring range 10mm .4” 10mm .4” 25mm 1” 50mm 2”
Accuracy (20°C) 20µm .001” 20µm .001” 20µm .001” 30µm .0012”
Measuring force Upward ( ) Approx. 1.2N or less Approx. 4.6N or less Approx. 5.7N or less
Horizontal ( ) Approx. 1.1N or less Approx. 4.3N or less Approx. 5.3N or less
Downward ( ) Approx. 1.0N or less Approx. 4.0N or less Approx. 4.9N or less
Dust/water protection*1 IP-66 equivalent IP-54 equivalent IP-66 equivalent
Position-detection method Capacitance-type absolute linear encoder
Response speed Unlimited; measurement by scanning cannot be performed
Output signal Digimatic output
External input Origin-setting signal (absolute positional origin*3 can be changed externally)
Power supply Supply voltage 5V (4.5V to 5.5V), ripple voltage 200mV p-p max.
Lifter mechanism None Built-in air lifter*2 None
Mass 200g 220g 250g 300g
*1:The IP value given is for water. Note that the unit may not be able to maintain resistance to certain types of liquids.
*2:The air-supply pressure for 575-324 and 575-334 is 0.3 to 0.4 MPa. The spindle moves forward (becomes free) when air is supplied. Use an air hose with an inside
diameter of 2.5mm.
LINEAR GAGE
13
LGD-M
Digimatic Code (SPC) Output
This LGD-M ultra-compact ABS linear gage maintains the origin

once it is set.
Metal bushings have replaced the ball bearings of the original 575-325
LGD gage for higher cost-effectiveness.
FEATURES
• The use of an absolute scale in the sensor makes it possible to
maintain the origin setting even when the power is cut off.
• The spindle is supported at both ends, improving the
accuracy to 15mm. Dimensions
Unit: mm
( 147.1 )
49.3 76.3 21.5

15.2
02ACA376 Spare rubber boot Refer to p.16
34
10.5 or longer (stroke)
965275■ * Digimatic Power Supply Unit Refer to p.17
55
*: ■ is left blank or an appropriate suffix (A or E) is inserted, depending on the AC
supply voltage (blank - 100V; A - 120V; E - 240V).
Connecting cable 2m
20
8.6
Ø 8 -0.009
0
37
6.5
12.5
SPECIFICATIONS
Order No. 575-325 575-335
Resolution 0.01mm .0005”
Measuring range 10mm .4”
Accuracy (20°C) 15µm .0006”
Measuring force Upward ( ) 2.0N or less
Horizontal ( ) 1.8N or less
Downward ( ) 1.6N or less
Dust/water protection* IP-66 equivalent
Stem diameter Ø8mm
Bearing type Slide-bearing type
Position-detection method Capacitance-type absolute linear encoder
Response speed Unlimited; measurement by scanning cannot be performed
Output signal Digimatic output
External input Origin-setting signal (absolute positional origin can be changed externally)
Power supply Supply voltage: 5V (4.5V to 5.5V), Ripple voltage: 200mV p-p max.
Mass 182g
Standard accessories Wrench for contact point (538610)
*: The IP value given is for water. Note that the unit may not be able to maintain resistance to certain types of liquids.
14
LGS 100mm
Digimatic
Digimatic Code
Code (SPC) Output Stroke Linear Gage
0.001mm Reading
Differential square-wave model
Dimensions Unit: mm
25.5 21.7 542-310
Connecting cable 2m 20 11.4
22
Dimensions Unit: mm
575-301
56.6
132.4
207.7
37
Ø8 - 00.009
14.9
Note: Inch gage has a

stem of 3/8" DIA. (Tol. 2-Ø4.5,
+0/-.001") and #4- Ø8 depth 5
38.9
8.6 20
48UNF threads for the
contact point mount.
20
6
16.4 5.3
60 Ø20 - 00.013
Ø6
125.3
238774 Spare rubber boot Refer to p.16

Connecting
903594 Air drive unit (for 575-301 and 575-302) Refer to p.16 cable 2m
903598 Air drive unit (for 575-311 and 575-312) Refer to p.16
22.3
20 17
36 7 34
SPECIFICATIONS 50
Order No. 575-301 575-302 575-311 575-312
Resolution 0.01mm .0005” SPECIFICATIONS
Measuring range 12mm .5” Order No. 542-310
Direction (UP) plus minus plus minus Resolution 0.001mm
Accuracy (20°C) 0.02mm .001” Measuring range 100mm
Measuring Upward ( ) Approx. 1.96N or less Accuracy (20°C) 3µm
force Horizontal ( ) Approx. 1.67N or less Measuring Upward ( ) Approx. 3.9N or less
Downward ( ) Approx. 1.47N or less force Horizontal ( ) Approx. 2.7N or less
Dust/water protection*1 IP-66 Downward ( ) —
Contact point Ø3mm carbide (mounting Ø5/32” (DIA) steel (4-48UNF) Dust/water protection Not specified
threads: M2.5 (P = 0.45) X 5mm)
Contact point Ø3mm carbide (mounting
Maximum response speed 1600mm/s; measurement by scanning cannot be performed threads: M2.5 (P = 0.45) X
Stem diameter Ø8mm Ø9.52mm (.375”) 5mm)
Bearing type Slide-bearing type Stem diameter 20mm
Position-detection method Capacitance-type incremental linear encoder Bearing type Ball-bearing type
Output signal Digimatic output Position-detection Reflection-type photoelectric
Power supply DC5 to 10V (5mA max.) method linear encoder
Cable length 2m Response speed 400mm/sec.
Operating environment 0°C to 40°C (20%RH to 80%RH, without condensation) Output signal 4µm pitch, 90° phase
Mass 170g (including cable) difference, differential square
wave (RS422 equivalent)
*1: The IP value given is for water. Note that the unit may not be able to maintain resistance to certain types of
liquids. Power supply +5V (120mA )
LINEAR GAGE
15
Special Accessories for Gage Head
(See the Operational Guide (page 28 to 31) for mounting bracket, thrust stem and contact point)
Air Drive Unit

FEATURES
Dimensions
• Ascends or descends the spindle of a Linear Gage by the
Unit: mm
supply and exhaust of air. LGF-125L / LGF-150L
• Spindle descending speed can be adjusted by using the

speed controller of the drive unit.
Speed controller
• Automatic measurement is possible by using a solenoid valve. 12
E
Dimensions Dimensions LGF-110L Unit: mm
Speed
Unit: mm controller
Ø6
20 Ø12
(85.48)
7
15
15
4.1
12.5 14
6.3
D
6
ø6
C
6.3
12
6.1
7
14
15
15
B (cylinder stroke)
94 to 97
15*1 14
54.4
6.3
64.9
11.4 28
6.3
A (Measuring stroke)
21 11 3 11
4.5
18
70
46
8.8
19
19 6.5
10.5*2
13 at air supply OFF at air supply ON
37
at air supply OFF at air supply ON 64
12 12
6 *1: Cylinder stroke
ø6 *2: Contact point stroke 6
Ø6
Ø15
31
42
18
31
42
20
50
903594 02ADE230 02ADE250/02ADE270
SPECIFICATIONS A B C D E
Order No. 903594 903598 02ADE230 02ADE250 02ADE270 02ADE250 25.5 30 77.6 41.5 (110.5)
Stroke 10mm .4” 10mm 25mm 50mm 02ADE270 51 50 95.9 66.5 (159.5)
Applicable gage model LGS LGF, LGE, LGD
Air supply 0.49MPa 0.2 to 0.4MPa
Air horse to be used Inner diameter : Ø2.5mm
Mass 60g 150g 250g 300g
Extension Signal Cables Spare Rubber Boots
238772
FEATURES FEATURES
• The distance between a Linear Gage and the Counter can be • Protects the spindle of a Linear Gage from dust.
extended up to 20m by using these cables. • Dedicated for the following models: LGB, LGD, LGE, and
• Cannot be used for LGS, LGD models, and Laser Hologage. LGF.
SPECIFICATIONS SPECIFICATIONS
Order No. Cable length Order No. Applicable Linear Gage
902434 5m 238773 5mm LGB
902433 10m 238772 10mm LGB/LGD/LGE/LGF
902432 20m 02ACA376 10mm LGD-M
962504 25mm LGD/LGE/LGF
962505 50mm LGD/LGE/LGF
238774 mm/inch LGS
16
Special Accessories for Gage Head
(See the Operational Guide (page 28 to 31) for mounting bracket, thrust stem and contact point)
Release with damper: 971753 Digimatic external power unit: 965275 *
*: ■ is left blank or an
Dimensions appropriate suffix (A or E) is
Unit: mm inserted, depending on the
504
AC supply voltage (blank -
43 100V; A - 120V; E - 240V).
12(stroke)
Ø24
Return-speed adjustment knob
Spindle-lift release for the laser hologage. A sudden drop of the Power-supply unit for models LGD, LGD-M and LGS.
spindle is prevented by the return-speed adjustment knob. Outer dimensions (W x D x H): 62 x 40 x 20 mm
Mass: 50 g
Sample application 1
Measuring stand: 971750
Dimensions
300
DP-1HS
Sample application 1: Use it as an external power supply when

250
connecting to other equipment (such as MUX-10 or DP-1HS)

LGH-1010 : 0 to 137mm
34 to 175 Max. measuring range LGH-110 : 0 to 139mm
instead of the display unit.
Sample application 2
110
Ø50
Ø15H7 for
gage setting
270
100
(350)
25
80
Display unit
Measuring stand for Laser Hologage used in high-precision Sample application 2: Use it for setting the absolute origin
measurements. when connecting an absolute-type LGD or LGD-M to a display
Mass: 23 kg unit other than the ES and EV counters.
Clamping brackets See page 30 Interchangeable contact points See page 31
LINEAR GAGE
17
Linear Gage and Counter Connections
& Comparisons of Counter Functions
KH ES EF EV SD
counter counter counter counter counter
Representative Code No. 542 542 542 542 542 542 542 542 542 542 572 572 572
-051 -053 -055 -057 -059 -060 -061 -062 -063 -064 -001 -021 -052
Applicable gages
0.00001mm Laser Hologage O
0.0001mm Laser Hologage O O
0.0001mm LGB O O
0.0005mm LGF O O O O O
0.001mm LGF O O O O O O O
0.001mm LGB O O O O O O O
0.001/100mm Linear Gage O O O O O O O
0.005mm LGE O O O O O O O
0.01mm LGD/LGD-M O O O O O O
0.01mm LGS O O O O O O
Functions
Number of connectable gages 1 1 1 1 1 1 1 2 2 6 6 1 1 6
Display O O O O O O O O O 1 1 O O 3
Zero set O O O O O O O O O 1 1 O O O
Presetting O O O O O O O O O 1 1 O
Direction switch O O O O O O O O O O O O
GO/±NG indication O O O O O O 1 1 O O
GO/±NG output O O O O O O O O O O
5-stage tolerance display O O O O
5-stage tolerance output O O O O O O
Segment output O O
Inch/mm switch O O O O O O O O O O O 4 O
ABS gage zero set* O O O
ABS/INC gage changeover O O O
Peak hold O O O O O O
Run out (TIR) measurement O O O O O O
Double count O O O O O 5
Calculation function using constant O
Sum/difference calculation O O
External zero set 2 2 2 2 O O O O O O O
External preset O O O O O O O O O O 3
External hold O O O O O O O O O O
External tolerance set O O O O O O 3
External output off O O
External peak-hold cancel O O O O O O
Two coordinate systems switch O
Inter-axial calculation function O O
Output
I/O output BCD output O O O O
Limit output O O O O O O O O
RS-232 output O O O O O O O
Digimatic output O O O O O O O
RS link O O O O O O
(Maximum number of gages) (6) (6) (12) (12) (60) (60)
Power-supply voltage error O O O O O O O O O O
Overspeed error O O O O O O O
Overflow error O O O O O O O O O O O O O
Gage error O O O O O O O O O O O O
System error O O O O
Tolerance setting error O O O O O O O O O O
Communication error O O O O O O
*: The applicable gage type is LGD and LGD-M.
1: When an optional D-EV is connected.
2: Enabled by setting ”O“ via external presetting.
3: When an SD-D2 is connected.
4: Only for models that measure in inches.
5: Uses the calculation function using a constant.
18
Explanation of functions
Zero set Preset Direction switch

Sets the displayed value to 0 at any Presets the displayed value at any value. Selects the counting direction of (+)
position. Counting begins at the preset value. or (-), whichever is convenient with a
given direction of
spindle movement. ＋/−
Reference
0.000 surface
0.000 0.000 1.234 123.456
Tolerance judgment indication/ Segment output ABS gage zero set

output
The function used to divide the Sets the absolute origin of an LGD gage
Sets two (or four) desired tolerances for specified range into 21 equal segments from the counter side. Once set, the
three (or five) stages. Judgment results and output where the measured value absolute origin will be maintained even
can be output to an external device. falls among the 23 segments, including during a power failure or when the
Upper-limit Lower-limit the segments before and after the counter is disconnected.
tolerance tolerance
3step divided segments.
(GO/±NG) –NG GO +NG
Limit1 Limit2 Limit3 Limit4
ABS/INC gage changeover
Inch/mm switch
5step –NG GO1 GO2 GO3 +NG Sets the absolute origin of an LGD gage
Selects mm or inch as the unit of from the counter side. Once set, the
display, and enables the automatic absolute origin will be maintained even
conversion of displayed values during a power failure or when the
Peak hold/TIR measurement according to the selected unit. counter is disconnected.
Allows switching to the measurement
mode for maximum value, minimum Double count
value, and run out value (maximum - Sum/difference calculation
minimum), in addition to the normal Displays a value twice the actual count
Enables measurement of thickness or
measurement mode. value. Allows the direct reading of
step using two gages.
diameter for cylindrical objects.
Shows
MAX the displacement
of radius
MIN as that
of diameter.
TIR (run-out) = Maximum - minimum
1.234 123.456
External control I/O output
Zero set, preset and display hold can be For input/output of external control
controlled from the I/O terminals. signals and tolerance judgment result BCD output
to/from the PLCs or other external The displayed value can be output as
devices. one of I/O signal to a sequence, etc.
Communication via RS-232C interface Digimatic output

RS-232C allows communication with a personal computer. It allows not only the Data can be output to various printers
reading of measured values but also data transmission to the counter and remote and statistical processing devices, such
operations, such as when changing various settings. as DP-1HS and MUX-10, using
Digimatic Code (SPC) output.
RS link function
A maximum of six (EF) or ten (EV) counters can be connected for multi-point measurements using up to 60 channels. EF and EV
counters can be available in the same network (in which case a total of six counters can be connected). Use dedicated RS-link
connecting cable 936937 (1 m), 965014 (2 m) or 02ADD950 (0.5 m). The maximum length of the RS-link connecting cable is
10 m for the entire system.
First counter Last counter
(Output example)
IN OUT IN OUT IN OUT
GN01, + 0001.100CRLF
RS-232C connector RS-232C connector RS-232C connector GN02, + 0001.200CRLF
RS-232C GN03, + 0001.300CRLF
cable
GN04, + 0001.400CRLF
GN05, + 0001.500CRLF
Personal computer GN06, + 0001.600CRLF
GN07, + 0001.700CRLF
GN08, + 0001.800CRLF
Gage number
Measured value
Gage number 01 02 03 04 05 06 07 08......
LINEAR GAGE
19
ES counter
Assembly Type Display Unit
FEATURES
• DIN compatible compact panel-mounting (96 x 48mm). It can
be easily incorporated into each system instrument.
For the gage with differential For the gage with Digimatic
square-wave output. code output.
Unit: mm
Dimensions -V +V OUTPUT
-24V
12
DC0mA
20 -V
0
AD
D40 +V DC IN 12-24V 500mA
02 I
o. EV- 01
e N 0000 MADE IN JAPAN
Cod el No.
Modial PA
N
OU
T
Ser
JA
DE
IN
K Serial 000001
MA LIN Model ES-11 DL
RS Code No. ***-***
IN
INPUT
Approx. 10
44.4 91.4
Panel thickness: 1-3.2mm
• Two choices of data output: the BCD data output type (542-
053) and the tolerance judgment output type (542-051) are
137
available.
02ADB440 Output connector pulg (with cover) Refer to p.23
6.6
GO/±NG judgement indicator (542-051 only)

02ADD930 Terminal block connection cable Refer to p.23
ES-D
527428■■■* AC Adaptor Refer to p.23 P. UNIT

+0.8
Dimensions of opening
0
48
*: ■■■ is determined by the power-supply voltage specified. Used in
45
(panel maonting) Fn P.SET

combination with 02ADD930.
+0.8
92 0 96
SPECIFICATIONS
Order No. 542-051 542-053 542-055 542-057
Applicable input Differential square-wave Digimatic code (SPC)
Applicable gage LGB (excluding 0.0001mm resolution), LGF(0.001mm reading only), LGD, LGD-M, LGS
LGE, 100mm LG
No. of gage input 1
Resolution 0.001mm, 0.005mm, 0.01mm,.00005”, .0005” 0.01mm, 0.001mm*, .0005”, .00005”*
(Automatically set depending on the gage.)
Display 6-digit and a negative [-] sign LED (red)
Function • Preset • Preset • Preset • Preset
• Limit setting • BCD data output • Limit setting • BCD data output
• GO/±NG judgment • mm/inch switch • GO/±NG judgment • mm/inch switch
• mm/inch switch • +/- direction switch • mm/inch switch • +/- direction switch
• +/- direction switch • +/- direction switch
Output • Limit signal (3 or 5-step) • Measurement data • Limit signal (3 or 5-step) • Measurement data
(open-collector) • Normal signal • Normal signal • Normal signal • Normal signal
Refer to p.34 Refer to p.34 Refer to p.34 Refer to p.34
External control • Preset • Preset • Preset • Preset
signal input • Data hold • Data hold • Data hold • Data hold
• Data output prohibit • Data output prohibit
Error display/output Power-supply voltage error, overflow error, gage error, system error,
overspeed error (542-051 and 542-055 only), tolerance setting error (542-051 and 542-055 only).
Maximum input frequency 750kHz (two-phase square wave) —
Power supply Terminal block (M3 screws); 12 to 24V DC, 500mA (max.) (Through an external power supply)
Mass 400g
Standard accessories Six washers for adjusting the mounting plate thickness
*: Will not be indicated when combined with an LG gage.
20
EF counter
Multi-function Type
FEATURES
• DIN compatible Panel-mounting type and DIN size (144 x Single-display type Double-display type
72mm). It can be easily incorporated into each system (with 1gage input channel) (with 2gage input channels)
instrument.
156.7 Unit: mm
• This counter can be used on a desktop by mounting it on the Dimensions 148.2
144 Showing the
supplied stand leg. 137 AC adapter
connection
72
（3.1）
5.1
27
10°
Rubber foot (provided) 137
11.2
Stand (provided)
138 138 +1
+0.5
Dimensions of opening
68 +0.7
+0.3
(panel mounting)
68
Panel thickness: 1 to 3.2 mm
• The standard RS-232C interface allows easy communication
with an external PC.
• The RS Link function permits multiple EF counters (6 units
maximum) to be connected with daisy chain and data to be OPTIONAL ACCESSORIES
input/output from one channel of the terminal RS-232C
interface. Order No. Description
• The maximum value, minimum value, and TIR (runout) 02ADB440 Output connector pulg (with cover)
measurements are possible. 02ADD950 SPC data output/RS link cable (0.5m)
• The 2-gage input type can perform 2-axis display and make 936937 SPC data output/RS link cable (1m)
addition or subtraction calculations between 2 gages. 965014 SPC data output/RS link cable (2m)
SPECIFICATIONS
Order No. 100V 542-059 542-061 542-060 542-062
(Order number suffix 120V 542-059A 542-061A 542-060A 542-062A
denotes the AC adaptor 220V 542-059D 542-061D 542-060D 542-062D
type equipped.)
240V 542-059E 542-061E 542-060E 542-062E
— 542-059-1*1 542-061-1*1 542-060-1*1 542-062-1*1
Applicable input Differential square-wave
Applicable gage LGB (excluding 0.0001mm resolution),LGF, LGE, 100mm LG LGB (including 0.0001mm resolution),LGF, LGE,
100mm LG, LGH with 0.0001mm resolution*2
Number of gage input 1 2 1 2
(Single-display) (Double-display) (Single-display) (Double-display)
Resolution (Depending on the linear 0.0005mm, 0.001mm, 0.005mm, 0.01mm, 0.0001mm, 0.0005mm, 0.001mm, 0.005mm,0.01mm,
gage type connected) .000005”, .00005”, .0005” .000005”, .00005”, .0005”
Display 8-digit and a negative [-] sign LED (green)
Function Zeroset, preset, limit setting (3 or 5-step), GO/±NG judgement, GO/±NG signal output,
MAX/MIN/TIR (runout) measurement, counting direction switching, double reading, mm/inch switching,
sum/difference calculation of 2 gages (542-061, 542-062 only), output mode selection
Output I/O: Tolerance judgment output (3/5 stages), normal operation output
RS-232C or Digimatic code (selectable): Various measurement data
External Control I/O: Preset, Data hold and Error clear
RS-232C: Displayed value output,MAX/MIN/TIR switching,Zero set,peak value clear, preset value input, tolerance value input and error clear
RS Link Up to six EF counters may be connected via one RS-232C port.(daisy chain)
Error display/output Power-supply voltage error, overspeed error, overflow error, gage error, communication error, and tolerance setting error
Maximum input frequency 1.25MHz (differential square-wave): Max counting Speed : 5MHz
Power supply Via AC adaptor (12 - 24V DC, 700mA (max))
Mass (main unit only) 760g 800g 760g 800g
Standard accessories Stand leg (one piece), rubber feet (four pieces), washer for adjusting the mounting plate thickness when securing the plate (six pieces),
DC plug (one piece), AC adapter (excluding model 542-06X-1)
*1: An AC adapter is not required.
*2: Only one LGH may be connected to one AC adapter (provided as a standard accessory). To connect two gages, use a 542-062-1 and a separate power supply (12
to 24V DC, 1A or greater).
LINEAR GAGE
21
EV counter
for Multi-gage System
Multi-function counter
FEATURES
• Up to six gages can be connected to one unit.
• Able to connect up to 10 EV counters to one personal
computer using the RS link function to facilitate the
configuration of a multi-point measurement system
comprising a maximum of 60 gages. For the gage with differential- For the gage with Digimatic
• A range of output modes to choose from; I/O output for square-wave output Code output
tolerance judgment and segment output, BCD data output
and RS-232 output are available.
• Peak-hold measurements are possible for maximum value, Dimensions Unit: mm
minimum value, runout (TIR), etc.
• Able to calculate a sum, average, maximum, minimum,
maximum difference, etc., between gages connected to the
4
RS LINK
IN OUT Err. 5 4
same unit. LOAD 8 7 MODE 6 3 SEL. 2 1 DATA
INPUT
F E D C B A
64
72
RS-232C +V -V
IO/BCD
OPTIONAL ACCESSORIES 4 Code No.***-***

Code No.***-***
Model EV-16P
MADE IN JAPAN
DC12-24V
700mA
6
4 136 4 5 161 5
02ADB440 Output connector pulg (with cover) Refer to p.23
144 16 139 16
02ADD400 D-EV Display Unit Refer to p.23
02ADD950 SPC data output/RS link cable (0.5m) Refer to p.23 6.5
936937 SPC data output/RS link cable (1m) Refer to p.23
4.5
965014 SPC data output/RS link cable (2m) Refer to p.23
02ADD930 Terminal block connection cable Refer to p.23 Interconnecting Affixing an
527428■■■* AC Adaptor Refer to p.23 EV counters EV counter
*: ■■■ is determined according to the specified power-supply voltage. Used in
combination with 02ADD930.
SPECIFICATIONS
Order No. 542-063 542-064
Applicable input Differential square-wave Digimatic Code (SPC)
Applicable gage LGB (excluding 0.0001mm resolution), LGF, LGE, 100mm LG LGD, LGD-M, LGS
Number of gage input 6 6
Resolution (internal) 0.0005mm, 0.001mm, 0.005mm, 0.01mm, 0.001mm*1, 0.01mm, .00005”*,
- no display capability .000005”, .00005”, .0005” .0005”
Function GO/±NG judgment, GO/±NG signal output, MAX/MIN/TIR (runout) measurement, counting direction switching,
mm/inch switching, calculation of sum, average, maximum, minimum and maximum difference between specified axes,
and output-mode selection
Output I/O: Normal operation output and GO/±NG signal (three steps), measurement data (BCD code),
or 21-stage segment output (selectable)
RS-232C: Various measurement data
External Control I/O: Axis designation, preset, data hold, and error clear
RS-232: Displayed value output command, MAX/MIN/TIR switching and peak value clear, zero set, preset value input,
tolerance value input, error clear, and command to output calculated value between specified axes
RS Link Up to 10 EV counters may be connected via a single RS-232 port. (daisy chain)
EV and EF counters can be mixed (in which case a total of six counters can be connected).
Error display/output Power-supply voltage error, overspeed error, overflow error, gage error, communication error, and tolerance setting error
Maximum input frequency 1.25MHz (differential square-wave): Max counting Speed : 5 MHz —
Power supply Terminal block (M3 screws), DC +12 to +24V, 700mA (max.)
Operating temperature 0°C to 40°C (20%RH to 80%RH, without condensation)
Mass (main unit only) 910g 830g
Standard accessories Mounting feet (four pieces), brackets (four pieces), and mounting screws M4 x 8 (eight pieces)
*: Will not be indicated when combined with an LG gage.
22
Options for ES/EF/EV Counters
D-EV Display Unit (02ADD400)
Dimensions
Unit: mm
GAGE
TIR EV-1
MAX MIN
UNIT +NG
44.4
GO
48
-NG
DISP Fn MODE P.SET
• Display unit for the EV counter.

• Using this display allows various settings for the EV counter 96 6.6 67 (11)
without a personal computer or other equipment.
• Able to display each axis measurement value and, GO/NG
judgment result, total GO/NG judgment result for all axes, Code No. 02ADD400
Model EV-1
setting details, and errors Serial No. 000001

DC12-24V
200mA
MADE IN JAPAN
• DIN compatible compact panel-mounting - cutout dimensions IN RS LINK OUT +V -V
45+0.8 +0.8
0 x92 0
• The required power supply is DC +12 to +24V, 200mA at the
terminal block.
(AC adapter 02ADD930 and 527428■■■ are available. See 91.4
below.)
SPECIFICATIONS
Number of connectable units One display unit allows external display and setting for one EV counter.
Displayed digits It uses a single sign plus six digits (EV counter operates on eight-digit data internally but displays only the last six digits).
Channel display (also for display of judgment result): 3 (three-color LED)
LED display Measurement mode display (current, maximum, minimum, runout): 2
Status display: 1 (two-color)
Operating switches 4
Switches and their functions Channel switching, measurement mode switching (current value, maximum value, minimum value and runout),
parameter setting, preset, and tolerance setting
Input/output RS Link connectors: 1 in and 1 out.
Error display Overspeed, gage error and others.
Power supply Terminal block (M3 screws), DC +12 to +24V, 200mA
Operating temperature (humidity) range 0°C to 40°C (20%RH to 80%RH, without condensation)
I/O output connector (02ADB440) AC output adapter

This receptacle fits the I/O output plug Connected to the power supply
of ES/EF/EV counters. Refer to the terminal of ES/EV/D-EV counters. Use
corresponding technical explanations a 02ADD930 together with an AC
(pages 34 and 35) for pin assignment. adapter for the applicable line voltage.

02ADB440
02ADD930 Three-terminal section only
527428 for 100V AC
02ADD930 527428A for 120V AC
RS link cable 527428CED for 220V AC
527428CEE for 240V AC
Used to interconnect EF/EV Order No. Cable length

counters comprising a RS link. 02ADD950 0.5m
Same as the cable used for 936937 1m
Digimatic code (SPC) output.
965014 2m
LINEAR GAGE
23
SD Display Unit
Low
Low Cost
Cost Display
Display for
for LGD/LGS
LGD/LGS
The Digimatic Display Units offer a large LED display

for LGD and LGS gages.
SD-D1 SD-D2
FEATURES
• The multi-function type Display Unit (SD-D2) comes with OPTIONAL ACCESSORIES
functions including zero setting, presetting,GO/±NG
judgment, GO/NG analog signal output, and counting Order No. Description
direction switching. 936937 SPC cable for data output (1m) Refer to p.24
• Can be zero set independently of the gage. 965014 SPC cable for data output (2m) Refer to p.24
• Digimatic output function for connection with data 907020 GO/NG signal output cable (2m) Refer to p.26
processing units in the SPC system. 572-041■ * Digimatic Differense/Sa Unit Refer to p.25
• Various equipment is available for configuring a multi-gage 572-052■ * Digimatic Multi Unit Refer to p.25
system. 572-061■ * Digimatic Extension Unit Refer to p.26
264-503■ * Digimatic Mini-Processor DP-1HS Refer to p.26
937179T Foot Switch Refer to p.24
*: The suffix in ■ is determined by the power-supply voltage specified.
SPECIFICATIONS
Digimatic Display Units
Model No. SD-D1 SD-D2
Order No. 100V 572-001 572-011 572-021 572-031
120V 572-001A 572-011A 572-021A 572-031A
220V 572-001D 572-011D 572-021D 572-031D
240V 572-001E 572-011E 572-021E 572-031E
Applicable input Digimatic code (SPC) output
Applicable gage LGD, LGD-M, LGS
Data input port 1
Resolution* 0.001mm, 0.01mm .00005”, .0005”, 0.001mm, 0.01mm .00005”, .0001” .0005”, .001”
0.001mm, 0.01mm 0.001mm, 0.01mm
Display 7-digit green LED (Display digit height: 14.2mm)
Functions Zero setting, SPC data output, Error alarm Zero Setting, Presetting, GO/±NG judgment, Calculation with
constant value, GO/±NG output, Counting direction switching,
Error alarm
Output — Digimatic code (SPC) output, GO/±NG Output
Power supply 9V DC, 500mA (via AC adaptor)
Operating temperature
0°C to 40°C/20%RH to 80%RH (without condensation)
(humidity) range
Dimensions 200 (W) x 120 (D) x 66 (H) mm 236 (W) x 120 (D) x 66 (H) mm
Mass 1.1kg 1.3kg
* Depending on the gage connected.
Note: The SD-D1 Display Unit can only be used with Digimatic gages which have .00005”/0.001mm or .0005”/0.01mm readout.
Optional Accessories for SD Display Unit
Foot Switch (937179T) Digimatic Cable

Accepts external zero set and timing Used to interconnect various SD
signals. series units and output the
measured data from each unit to
SD-U1: Zero reset various Digimatic mini-processors.
SD-M2:Zero reset Order No. Cable Length
Tolerance zone measurement
02ADD950 0.5m
trigger 936937 1m
No.937179T SD-E1: Tolerance zone measurement 965014 2m
trigger
24
936937(1m) DP-1HS
965014(2m)
GO/NG lamp
Digimatic Multi-Unit SD-M2
GO/NG Cable
A+B Mode
User's system
SD-D2 Display Unit Foot Switch
A-B Mode
Digimatic Difference/Sum Unit
Digimatic Multi-Unit [SD-M2]

SPECIFICATIONS
Order No. 572-052 (w/100V AC adaptor)
572-052A (w/120V AC adaptor)
572-052D (w/220V AC adaptor)
572-052E (w/240-220V AC adaptor)
Data input port 6
Functions • MAX/MIN mesurement
• Range (MAX-MIN) mesurement
• Zero-Setting
• Presetting
FEATURES • GO/±NG judgment (Buzzer and LED)
• The Digimatic Multi-Unit receives measurement data from • GO/±NG signal output
multiple (up to six) LGD or LGS gages. • Error alarm
• By connecting a multi-function type Digimatic Display Unit • PC data output
(SD-D2) to the Multi-Unit measurement from each gage can Power supply 9V DC, 500mA (via AC adaptor)
be displayed, and, max, min, and range measurements can Dimensions 236(W) x 120(D) x 66(H) mm
be made for the connected gages. Also possible are GO/±NG Mass 1.3kg
judgments on the measurement data individually or
collectively.
• Tolerance judgment and zero setting can be triggered using
a foot switch (937179T).
• The back up memory stores the tolerance entered, after the
power to the Multi-Unit is turned off.
Digimatic Difference/Sum Unit [SD-U1]

SPECIFICATIONS
572-041E (w/240-220V AC adaptor)
Data input port 2
Calculation mode A+B, A-B, A, B
Functions •Zero Setting
•SPC data output
FEATURES Power supply 9V DC, 500mA (via AC adaptor)
• The Digimatic Difference/Sum Unit will add or subtract the Dimensions 76(W) x 120(D) x 66(H) mm
measurements from two Digimatic gages and output results
Mass 550g
to a remote Display Unit or SPC data processor.
• Zero setting can be done at the Difference/Sum Unit or by
external foot switch (937179T) and direct mesurements from
a signal of connected gage can also be passed on without
alterations.
• One connecting cable is provided for SPC data output.
LINEAR GAGE
25
Digimatic Multi-Unit SD-M2

(4 units maximum)
GO/NG lamp
SD-E1
Foot Switch GO/NG Cable
Digimatic Indicators
and Linear Gages User's system
SD-D2 Display Unit
with SPC Data Output
(24 Gages maximum)
936937(1m)
DP-1HS 965014(2m)
Digimatic Extension Unit [SD-E1] Digimatic Mini-Processor [DP-1HS]
FEATURES
• Up to four Multi-Units (shown on previous page) can be
connected through the Extension Unit to configure a GO/
±NG judgment system for multiple Digimatic gages (up to 24
gages). The DP-1HS Digimatic Mini-Processor is a powerful, yet
• Max, min, and range measurements can be made for the inexpensive tool for implementing SPC. This compact unit is
connected gages. capable of many functions, including performing calculations
• Tolerance judgment can be triggered using a foot switch for statistical analyses and x-R control charts, generating
(937179T). histograms and individual charts, as well as printing out and
outputting measured data via an RS-232C port.
SPECIFICATIONS
Order No. 572-061 (w/100V AC adaptor) SPECIFICATIONS
572-061E (w/240-220V AC adaptor)
Data input port 4 (allows the connection of up to four SD-M2s) 264-503E (w/240-220V AC adaptor)
Functions • MAX/MIN mesurement Data input port 1 channel for Mitutoyo Digimatic gage
• Range (MAX-MIN) mesurement
Data entry capacity 1000 pieces of data
• GO/±NG judgment (Buzzer and LED)
• GO/±NG signal output Data output port via RS-232C interface
• SPC data output Printer 5X7-dot thermal dot matrix type
• Error alarm Printed items Measurement data, lower limit, upper limit, out-of-
Power supply 9V DC, 500mA (via AC adaptor) tolerance marks, number of data, max./min. value of
Dimensions 236(W) x 120(D) x 66(H) mm data, range, mean value of data, standard deviation,
number of defectives, fraction defective, process
Mass 1.3 kg
capability index, histogram, individual chart, x -R chart,
mean value of subgroup, range of subgroup, number
of subgroup, sample size, part number, date, time,
name of operator
GO/NG Signal Output Cable Number of Characteristic 1
Sample size up to 10
Used to output to external
Power supply 9V DC, 500mA (via AC adaptor/batteries)
devices the GO/NG judgment
results from the SD-D2, Digimatic Dimensions 180(W) x 160(D) x 80.5(H) mm
Multi-Unit and Digimatic Mass 500g
Extension Unit. Cable length: 2m.
See the corresponding technical
explanation on page 37 for pin
No.907020 assignment.
26
Operational Guide and Technical Data
Before using the gage
Avoid installing the gage in the following locations:

• Where the gage will be exposed to direct sunlight, or where the ambient temperature may drop below 0°C or
exceed 40°C.
• Where the relative humidity may drop below 20%RH or exceed 80%RH, or where a sudden change in
temperature may cause condensation.
• Where the gage would be subject to corrosive gas, or where combustible materials are placed nearby.
• Where the gage is subject to air containing significant amounts of dust, salt or iron powder.
• Where the gage is subject to direct vibration or shock.
• Where the gage may come in contact with splashed water, oil or chemicals. (The gage system components are
not designed for protection against water, oil or chemical protection, except for the gage unit.)
• Where electronic noise is likely to affect the gage.
Noise-prevention measure
• Wiring the sensor cable in the same circuit as high-voltage lines or power lines may cause the gage to
malfunction. Be sure to wire the sensor cable separately.
Power supply to the gage

• If a generic switching regulator is used, provide grounding via the frame’s ground terminal or ground terminal
of the power supply.
• If a malfunction occurs due to superimposed noise on the power-supply line, use a DC-regulated power supply
that incorporates an insulated transformer.
Handling precautions
• This product is a precision measuring instrument. Do not drop or otherwise subject it to impact.
• The spindle (moving unit) of the gage head is connected to the main unit via a spring. Be careful not to pull the
spindle in the extending direction or rotate it with force. Doing so may cause permanent distortion and
damage to the spring.
• The gage is shipped with a standard contact point (901312 or 900032 for the inch version of the LGS)
installed on the spindle. This contact point can be replaced with a different type according to the shape of
workpiece. (See page 31.)
When installing or removing the contact point, place the wrench provided on the catch in order to keep the
spindle from rotating. Then grab the contact point with pliers to install or remove it.
When grabbing the contact point with pliers, insert a piece of felt or other soft cloth to prevent the contact
point from getting scratched.
• Do not set both ends of the stroke as the origin (zero).
Dust/water protection
The dust/water protective construction of all gage heads, excluding the LGH and 100mm LG gages, is equivalent
to IP-66 or IP-54 (DIN40050/IEC529 standards).
• The preamplifiers and counters are not designed to provide dust or water protection. Install them in places
where they will not come in direct contact with water or oil.
• When an extension cable is used, seal the preamplifier connection and connectors completely by making sure
no portion is left exposed.
• IF the cable cover is broken, water or other liquids may enter the gage through the capillary effect, causing
gage failure. When the cable cover is broken, repair it immediately.
• Handle the gage with due caution to make sure that the rubber boots will not be damaged by chipping, etc. If
the rubber boots are damaged, the gage can no longer be protected from dust or water. When damage is
found, repair or replace the boots immediately.
• The rubber material used for the boots and seals does not provide complete protection against coolants and
chemicals, which are becoming increasingly complex in composition. If rubber parts are found to have
deteriorated significantly, contact your nearest Mitutoyo office.
• The gage must not be disassembled, since it will break the seals of various components. Never attempt to
disassemble the gage. Doing so will prevent the gage from functioning to its original specifications.
LINEAR GAGE
27
Installing the gage

Precautions for installation Mounting with a thrust stem
• Fasten the stem section onto the gage mount on the A thrust stem is available as an option for the LGF, LGE and
measuring instrument or secure it with a stand, etc. LGD gages (except for LGD-M). Installing a thrust stem on the
• Be careful not to overly tighten the stem. Doing so may stem allows direct mounting, just like the stem with nut, simply
cause problems in gage operation. by drilling a hole in the flat plate. This eliminates the need for
• Never fasten the gage by placing the tip of a screw directly an extra stem-clamping mechanism.
against the stem.
• Never fasten the gage by any section other than its stem.
• Mount the gage in such a way that it is perpendicular to the Thrust Stem Thrust Stem
surface to be measured. If installed at an angle, for LGF 10mm for LGE/LGD 10mm
measurement errors may occur.
• Be careful not to exert force on the gage via the cables.
Straight stem and stem with nut

The stem is a part that supports the gage. There are two types
of stems: the straight type and the one with a nut. The stem
with nut can be mounted easily and ensures that the gage is
fastened securely. The straight stem requires extra machining
for split-clamping, etc. However, this type can be used in a
range of applications and offers the advantage of allowing
forward and backward adjustment to a certain degree. Be
careful no to overly tighten the straight stem. (Dimensions when using a thrust stem are shown on the next
page.)
• How to use a thrust stem with the LGF gages

1. Screw the thrust stem into the stem of the gage. When
installing the thrust stem, fix the special wrench on the flat area
Stem with nut Straight stem provided at the upper section of the stem, then hold the
wrench in order to prevent force from being applied to the
body of the gage.
See the next page for mounting brackets available for the two 2. Insert the gage into the mounting hole, then secure the
stem types.
gage by tightening the clamping nut. Use a separate wrench
to tighten the clamping nut.
Examples of the straight-stem mount
• The recommended clamping torque is 0.4 to 0.5Nm (LGB- • How to use a thrust stem with the LGE/LGD gages
0105L: 0.2 to 0.3Nm). Overly tightening the stem will 1. Screw the thrust stem into the stem section of the gage by
prevent smooth movement of the spindle. Check the hand.
movement of spindle after clamping. (Application of screw lock is recommended to prevent the nut
from coming loose.)
Example 1 16 15 (9) Unit: mm 2. Insert the gage into the mounting hole, then tighten the
7.5 7.5 clamping nut to secure the gage. In the case of an LGE/LGD
(4.5) A (4.5) gage (10mm), use the special wrench (200168) to tighten the
6
nut. If it is a LGE/LGD gage (25/50mm), use a separate 21mm

15
wrench.
30
• Precautions
M4x0.7 A' A-A' section
Ø4.5, Ø7.5 depth 4.4
- Exerting undue force between the gage body and stem may
Ø8H7 ＋0.015
0
damage the gage. Hold the gage body to avoid exerting
excessive force.
- When inserting the gage into the mounting hole, exercise due
Example 2 Unit: mm caution so as not to have the bellows of the gage damaged by
20 15 (9) burrs along the hole, etc.
1 10 7.5
Notch (90° angled
2 against the tap) A (4.5)
Ø10h7 +0.015
15
0
15
30
Ø10h7 -0.015
Ø8h7 +0.0115
0
A-A' section A′
2 M4x0.7
15 (9)
1
28
Installing the gage

Dimensions when using a thrust stem
LGF LGE/LGD
Ø12
Unit: mm Unit: mm
0
Ø9.5-0.015 (OD, thrust stem)
Thrust stem 02ADB681
No.242327 Clamping nut
6
5
5.5~11.5
1
M9.5x0.5
21.5
5.5
14.5
4
9.5
4
45.9
44.9
Clamping nut 02ADB682
0
Ø9.5 -0.015 No.200365 Clamping nut
M9.5x0.5
Thrust stem/clamping nut 2
12
12
Ø14
For 10mm LGF
For 10mm LGE/LGD
Thrust stem 02ADB691 Ø24

0
Ø18 -0.018 (OD, thrust stem)
6
0
Ø18 -0.018 No.242328 thrust stem
17
9.5 4
10~12.5
8
5
123.4 (LGF 50mm)
82.6 (LGF 25mm)
22.5
84.1(LGE/LGD 25mm)
124.9(LGE/LGD 50mm)
Clamping nut 02ADB692
6
M18x1
No.242330 Clamping nut
Thrust stem/clamping nut

21
21
M18x1 Ø24
For 25/50mm LGF For 25/50mm LGE/LGD
Specifications relating to use of the thrust stem

Set No. 02ADB680 02ADB690 02ADC730 02ADC740
Applicable gage LGF 10mm LGF 25/50mm LGE/LGD 10mm LGE/LGD 25/50mm
Applicable gage Code No. 542-121, 542-131 542-122, 542-132 542-601, 542-604 542-602, 542-603
542-123, 542-133 575-321, 575-331 575-322, 575-332
575-324, 575-334 575-323, 575-333
Part No. Thrust stem 02ADB681 02ADB691 242327 242328
Clamping Nat 02ADB682 02ADB692 200365 242330
Wrench 02ADB683* 02ADB693* 200168* —
Gage mounting hole diameter Ø9.5mm Ø18mm Ø9.5mm Ø18mm
Recommended plate
6~10.5mm 10~12mm 5.5~11.5mm 10~12.5mm
thickness (mounting section)
*: Not included in the set. It is an optional accessory.
LINEAR GAGE
29
Installing the gage

Mounting bracket for the gage head
As shown below, a wide range of brackets is available for the Linear gages with stem diameters of 8mm or 9.5mm. Two types of
brackets are available for the 15mm diameter stem type.
For stem with nut For the straight stem

• A nut-mount type linear gage can be installed without • To mount a linear gage with an 8 mm diameter stem, use a
additional parts or machining. 9.5 mm diameter stem bushing.
B Unit: mm Unit: mm
B
546288 Ø9.5x15
A
2-K
A
J
F
D
546343 Ø9.5x8.5
C
F
2-I
H G
C E I H E
B Unit: mm
M K Unit: mm
Part No. 303568 Part No. 303572 B E
A Ø9.5 A Ø9.5 G
A
B 11.5 G 16 B 11.5 F 18 C
2-L
J
D
C 20 H 12 C 40 G 15
H
A
D 30 I 1.75 D 50 H 20
F
E 35 J 40 E 6.5 I Ø4.5 H G F J 2-I
F 7 K Ø4.5 C E I
Part No. 303560 303569 Part No. 303562 303571

A Ø9.5 Ø9.5 A Ø9.5 Ø9.5
Unit: mm Unit: mm B 9 14.5 B 9 14.5
B C B
C C 15 20 C 15 15
E 2-K D 20 30 D 20 22.5
A
E 23 35 E 40 60
D
J
F 5 7 F 3 5
A
G 11 16 G 30 40
H G
D 2-G H 8 12 H 15 20
F E L
I 1.5 3.25 I Ø3.4 Ø4.5
Part No. 303574 J 32.5 42.5 J M3x0.5 M3x0.5
Part No. 303570 A Ø9.5 G 10 K 4.5 7.25
A Ø9.5 B 11.5 H 20 L Ø3.4 Ø4.5
B 11.5 E 40 C ø15 I 15 M M3x0.5 M3x0.5
C 60 F 20 D 20 J 35
D 5.5 G Ø4.5 E 40 K Ø4.5
F 8.5 L 1.25
Unit: mm
K B
I Unit: mm
C B
M K
A
A
F
2-L
D
D
For 15 mm diameter stem J
C
I
G
2-J
H G
Unit: mm F E
H E
Reference plane 2-5.5, 9.5 depth 5.5 25
for mounting Part No. 303564 303573 Part No. 303566 303575
Reference plane 15±0.2 2-M5x0.8,
for mounting depth 10 A Ø9.5 Ø9.5 A Ø9.5 Ø9.5
37±0.2
B 9 14.5 B 9 14.5
25
25
50
C 30 40 C 15 15
D 42.5 52.5 D 15 20
12.5 E 4 6 E 25 40
25 M4x0.76 hex-bolt F 15 18 F 8.5 8.5
C2 M4x0.76 hex-bolt (for gage clamping) G 10 15 G 7.5 10
C2
(for gage clamping)
H 15 20 H 10 20
I 4.5 7.25 I 10 15
45
45
J Ø3.4 Ø4.5 J 32.5 40

23
23
K M3x0.5 M3x0.5 K 4.5 7.25

14.5
Plane for bracket Ø15H7 Plane for bracket Ø15H7 L Ø3.4 Ø4.5
mounting (for gage mounting) mounting (for gage mounting) M M3x0.5 M3x0.5
Bracket A (for top surface) Bracket B (for bottom surface)
971751 971752
30
Interchangeable contact point

Interchangeable contact points for dial gages can be used with linear gages. Shown below are the representative models of
interchangeable contact points. With all linear gages, the screw-hole specification for the interchangeable contact point is set at
M2.5 (P = 0.45) x 5mm (all in mm), except for the inch versions of the LGS gages (575-311 and 575-312) which conform to the
UNF thread specification (#4-48 UNF).
Precautions when replacing contact point

• Place the provided key wrench on the catch (key wrenches are not provided for the LGS and 100mm stroke model) to prevent
the spindle from rotating. Then, grab the contact point with pliers to install or remove it.
When grabbing the contact point with pliers, insert a piece of felt or other soft cloth in order to prevent the contact point from
getting scratched.
• The gage may be damaged if rotational force is exerted on the inside of the gage through the spindle. Exercise due caution and
securely hold the spindle with the key wrench before replacing the contact point.
• Pay attention to the angle when installing a flat, knife edge, or blade type contact point, since such contact point needs to be
perpendicular to the stem (gage-holding section).
Ø3mm Ball Points Spherical Points 90° Conical Points (Carbide) Flat Points (Carbide)
Unit: mm L Unit: mm Unit: mm Unit: mm
L 9
8
ØD
90°
Ø2
Ø3 A
A
Radius (SR) A A
L Material Order No. A D L SR Order No. A Order No. A Order No. A

7.3 Carbide 901312 M2.5x0.45 10 5 7 101119 M2.5x0.45 120057 M2.5x0.45 120056 M2.5x0.45
901454 #4-48UNF 12.7 3.18 7 101205 #4-48UNF
Steel 900030 M2.5x0.45 9.53 2.38 9 101204 #4-48UNF L Unit: mm
Plastic 901994 M2.5x0.45
902018 #4-48UNF Knife Edge Point (Carbide)
ØD
Ød
Ruby 120047 M2.5x0.45 Spherical Points (Carbide) 8 Unit: mm
L
8.3* Carbide 902119 M2.5x0.45 Unit: mm
1.7 A
Ø4
1.7
Steel 900986 M2.5x0.45
15 Carbide 120049 M2.5x0.45 D d L Order No. A
ØD
Ruby 120051 M2.5x0.45 5.2 4.3 5 120041 M2.5x0.45

15 A
20 Carbide 137391 M2.5x0.45 Radius (SR) A 7 6.5 10 120042 M2.5x0.45
Ruby 137392 M2.5x0.45 Order No. A 10.5 9.5 10 120043 M2.5x0.45
25 Carbide 120053 M2.5x0.45 D L SR Order No. A
120067 M2.5x0.45
Ruby 120055 M2.5x0.45 5.2 5 5 120058 M2.5x0.45
* For waterproof dial indicators. 7.5 10 7 120059 M2.5x0.45
Blade Points (Carbide)
10.5 10 10 120060 M2.5x0.45
Flat Points Unit: mm
10
Shell Type Points Unit: mm 2.5 A
8
Unit: mm 60° Conical Points
L
T
Ø5
Unit: mm
Ø5
L
D
A
Ø5
R2.5 (.16") A
( ): For inch type
5 Order No. A T W Order No. A
A
L Order No. A 131365 M2.5x0.45 0.4 2 120061 M2.5x0.45
3.97 101184 #4-48UNF 133017 #4-48UNF 0.6 2 120062 M2.5x0.45
L Order No. A 1 4 120063 M2.5x0.45
5 101386 M2.5x0.45
10 101120 M2.5x0.45
10 101118 M2.5x0.45 Unit: mm
12.7 101190 #4-48UNF L
12.7 101185 #4-48UNF
15 137393 M2.5x0.45 Roller Points
Unit: mm
ØD
19.05 101186 #4-48UNF A

20 101387 M2.5x0.45 90° Conical Points A
23
25 101388 M2.5x0.45
15
Unit: mm
25.4 101187 #4-48UNF L
D L Order No. A
3
10 10 101117 M2.5x0.45 Ø10
Ø5
9
12.7 9.53 101188 #4-48UNF
A 9.53 9.53 101189 #4-48UNF Order No. A
901954 M2.5x0.45
L Order No. A 901991 #4-48UNF
5 101385 M2.5x0.45
7.14 101191 #4-48UNF
LINEAR GAGE
31
Gage Output Specifications (differential square wave)

0.0001mm LGB 0.0005mm LGF 0.001mm LGB/LGF LGE
Output signal 90° phase difference, differential square wave (RS-422A equivalent)
Signal pitch 0.4µm 2µm 4µm 20µm
Minimum edge interval 250nsec. 250nsec. 500nsec. 4µsec.
Output signal level line driver output, SN75158 or equivalent (conform to RS-422A)
Connector RM12BPG-6P (manufactured by Hirose)
Applicable receptacle RM12BRD-6S (manufactured by Hirose)
Recommended receiver Differential input, line receiver, SN75182 or equivalent (conform to RS-422A)
Gage cable length 2 m; directly connected to the gage
Maximum extension cable length 20m (extension cables of 5, 10 and 20m in length are available)
Alarm output*1 A special signal (see the chart below) is output when an alarm detection occurs
2
LGB: 4.8 to 5.2V (80mA)
Power supply* 4.8 to 5.2V (80mA) 4.8 to 5.2V (120mA) 4.8 to 5.2V (100mA)
LGB: 4.8 to 5.2V (120mA)
*1: With an LGF gage, a seventh signal line may be provided to output the error alarm. (Factory option).
*2: Power supply ripple voltage 200mV p-p max.
Pin assignment Timing chart (occurrence of gage alarm)

1 Pin No. Signal
LGF, 1µm LGB
1 +5 (gage power supply)
2 6
2 ØA ØA
3 ØB
3 5 4 ØA ØA
4 5 GND
6 ØB ØB
Recommended processing circuit for received ØB

waveform
Edge interval*
RM128RD-6S +5 *Varies depending on the gage.
2
3 20k 1µm LGB, 1µm LGF: 0.5µsec
2 6 A
2200p 1 5
0.5µm LGF: 0.25µsec
4 10k 100p DOWN PULSE
+5
10p
11
3
12 8
20k
B 0.1µm LGB
2200p 13 9 UP PULSE
6 10k 100p
SN75182 10p ØA
1 +5
This constant generates the
5 GND UP/DOWN pulse length.
ØA
A
ØB
B
ØB
UP PULSE Edge interval = 0.25µsec
DOWN PULSE
LGE
Timing chart (normal) ØA
ØA
ØA
ØA ØB
ØB
ØB 4.0µsec 0.5µsec
0.5 to 2msec max. 9.6µsec
ØB
90°
A gage alarm occurs in the following cases:
1µm* 1µm 1µm 1µm • The spindle has moved at a speed exceeding the maximum
(5µm)* (5µm) (5µm) (5µm) response speed.
*Varies depending on the gage. (ex. 0.1µm, 0.5µm). • Noise that may result in a counting error has been detected.
• The internal sensor does not function due to a gage failure.
32
Gage Output Specifications (Digimatic Code)

1) Applicable receptacle 5) Data format
Sumitomo 3M: V Low-Proheader
Model: 7610-5002XX or equivalent
d1 d2 d3 d4 d5 d6 d7 d8 d9 d10 d11 d12 d13
2) Pin assignments and signals
1 9 9 1 ALL "F" Measured value

Sign (+: 0, -: 8)
Decimal point (0-5) e.g.0→000000.
1→00000.0
2 10 10 2 5→0.00000
Gage plug External device
receptacle
Unit (mm: 0, inch: 1)
Pin No. Signal I/O LGD LGD-M LGS

1 GND — Signal ground • Data is output as 13-digit (52-bit) based on 4bits = 1digit.
2 DATA Output Measurement data-output terminal • Data is output in the order from d1 to d13. Each digit is
3 CK Output Synchronized clock-output terminal output in the order from LSB to MSB.
*14 N.C. — Not used • Measured data is output in the order from MSD to LSD.
5 REQ Input Input terminal for data transmission request • The sign, measured data, decimal position and unit are
from external device output by BCD based on positive logic (0 = L, 1 = H).
*16 ORIG Input Input terminal for absolute-origin External
setting signal zero set
*17 N.C. — Not used External hold
*18 N.C. — Not used 6) Timing chart
1 2
*9 +5V — Power supply terminal (+5 V ± 10%)*
*110 GND(F.G.) — Frame ground t5 t6 t7
*1: LGD uses unique a specification.
All others use the common Digimatic output specification (10-pin, square). REQ
*2: Current consumption of LGD: Idd = 20 mA max.
CK
DATA
3) I/O electrical specifications
• Output terminal format: CK, DATA t1 t2 t3 t4
Nch open drain t8
Maximum output current: 400 µA max. (when Vol = 0.4 V)
Output withstand voltage: -0.3 V to 7 V
ORIG
• Input terminal format: REQ, ORIG
Pull-up CMOS input Absolute origin setting active
Internal power supply voltage: Vdd = 1.35 to 1.65 V t10 Completed
Pull-up resistance: R1 = 10 to 100 KΩ t11
”H” level input voltage: VIH = 1.1 V min.:
“L” level input voltage: VIL = 0.3 V max.
SDP LGD LGS
standard (for reference only)
4) Recommended receiving circuit Symbol min. max. Symbol min. max. Symbol min. max.
*t1 0µs 2sec *t1 30µs 95ms *t1 160µs 85ms
t2 15µs — t2 15µs — t2 150µs 180µs
GAGE side recommended I/F for external device t3 100µs — t3 100µs — t3 150µs 180µs
• CK, DATA Vcc t4 100µs — t4 100µs — t4 300µs 330µs
t5 0µs — t5 0µs — t5 0µs —
R1
*t6 — — *t6 — 100µs *t6 — 100µs
*t7 — — *t7 100µs — *t7 100µs —
R2 C 74HC14,etc.
*t8 — — *t8 — 30ms *t8 — —
e.g. Vcc=5V
Symbol min. max.
• REQ, ORIG *t10 1.5s —
R1, R2=22KΩ±10%
Vdd C=330pF ±20% *t11 — 4s
R1
Tr Note 1: The specifications indicated by an asterisk (*) are applicable only to LGD.
CMOS
All other Digimatic output specifications are common to all models.
Note 2: Read data only when CK is at the “L” level.
Note 3: Do not input REQ signal (fixed at “H”) while the absolute origin is being
Tr= NPN open collector or Nch open drain (2SC2855, etc.) set (during t11).
“H” level output voltage: VOL = 0.2 V max., (IOL = 10 mA. etc.) Note 4: If t5, t6 and t7 are satisfied and REQ is continuously input, an output is
“H” level leak current: IIK = 2 µA max., (at VOH = 5.5 V) obtained from LGD at intervals of approximately 95ms.
Note 5: Start inputting ORIG and REQ after two or three seconds have elapsed
(the estimated time required for internal circuit/sensor to stabilize)
Note: Since the power supply voltages are different between the gage side and following power-on.
the external device side, be sure to use an open collector or open drain circuit.
Do not use CMOS output or the like.
LINEAR GAGE
33
Counter Output Specifications (I/O Output)

1) Used receptacle: 5) I/O circuits
10236-52A2 (made by 3M) or equivalent 1. Output circuits (NOM, BCD data, SIGN, READY)
Based on open-collector transistor output.
2) Applicable plugs: To counter External device (sample circuit)
10136-3000VE (3M: plug) TD62583 or -5V
74HC14 or equivalent
10336-52A0-008 (3M: cover) equivalent 5kΩ
DX40M-36P (Hirose: plug) 0.01µF
DX30M-36-CV (Hirose: cover) COM
(The following is available as a optional accessory:
02ADB440 (with cover)) Maximum output voltage: 24V
Output current: max. 10mA
Output saturated voltage: max. 0.7V
3) Applicable cables:
AWG #24~#30
2. Input circuits (PSET, HOLD, INH)
4) Pin assignments (1) Input is enabled when “L”.
To counter External device
18 1
+5V Sample circuit
Receptacle 1kΩ Use a non-voltage output
(10236-52A2 by 3M such as an open collector
or equivalent) output or relay output.
I
36 19
0.01µF
Refer to the following table:

Input current I: Max. 5mA Output saturated voltage: less than 0.7V
Display ES counter (limit output type) ES counter (BCD output type) EF Counter
unit 542-051, 542-055 542-053, 542-057 542-059, -060, -061, -062
Pin No. Signal name I/O Description Signal name I/O Description Signal name I/O Description
1 COM —
Common terminal for input/output circuits (connected to internal GND)
2 COM —
3 L1 O A-axis tolerance judgment 1x100 O AL1 O A-axis tolerance judgment
output BCD output output
4 L2 O • Outputs “L” only at terminal 2x100 O Selectable between AL2 O • Outputs “L” only at terminal
5 L3 O used for judgment. 4x100 O positive and negative AL3 O used for judgment.
• Upon occurrence of an error • Upon occurrence of an error
6 L4 O L1, L5 = “L” 8x100 O logic. AL4 O AL1, AL5 = “L”
7 L5 O
L2, L3 and L4 = “H” 1x101 O AL5 O AL2, AL3 and AL4 = “H”
8 — Not used 2x101 O —
9 — 4x101 O — Not used
10 NOM O Outputs “L” when 8x101 O NOM O Outputs “L” when
counting is enabled. counting is enabled
11 — Not used 1x102 O BL1 O B-axis tolerance judgment
output
12 — 2x102 O BL2 O
• Outputs “L” only at terminal
13 — 4x102 O BL3 O used for judgment.
14 — 8x102 O BL4 O • Upon occurrence of an error
BL1, BL5 = “L”
15 — 1x103 O BL5 O BL2, BL3 and BL4 = “H”
16 — 2x103 O —
: : : : : Not used
: : : : :
26 — 8x105 O —
27 — Not used (connected to — —
28 — internal GND) — —
29 — — —
30 — — —
31 — Not used SIGN O Interrupts data output. —
32 — NOM O Outputs “L” when —
counting is enabled.
33 — READY O Outputs “L” when —
BCD data is enabled
34 HOLD I Holds displayed data.*2, *3 HOLD I Holds data, Error clear*4
1
35 P.SET I Displays preset value stored in internal memory.* PA I Execute preset to A-axis.*4
36 — I Not used INH I Terminates data output. PB I Execute preset to B-axis.
*1: With an ES counter, P.SET input is also used as the signal to enable counting when the power is switched on.
*2: With an EF counter, HOLD input is also used as the signal to enable counting when the power is switched on.
*3: With an ES counter, HOLD is used as the data-output request command when data output is executed in the command mode.
*4: It is also used as the signal to clear the peak value being held when peak-hold measurement is performed (input Hold and PA simultaneously).
34
Counter Output Specifications (I/O Output)

4) Pin assignments (2)
With an EV counter a range of outputs can be obtained, as shown below, by switching between different output modes.
Mode Tolerance output Segment output BCD output
Pin No. I/O Name Description (usage) Name Description (usage) Name Description (usage)
1 — COM Common terminal for input/output COM Common terminal for input/output circuits COM Common terminal for input/output circuits
2 — COM circuits (connected to internal GND) COM (connected to internal GND) COM (connected to internal GND)
3 O CEL1_-NG -OVER -Range exceeded 1x100 Performs BCD output using the
Tolerance-judgment output
4 O CEL1_GO -L10 2x100 specified channel.
terminal (1CH) Performs divided output
5 O CEL1_+NG -L9 (± 10) using the specified 4x100
6 O CEL1_NOM Outputs “L” when counting is enabled. -L8 channel and range. 8x100
7 O CEL2_-NG -L7 1x101
8 O CEL2_GO terminal (2CH) -L6 2x101
9 O CEL2_+NG -L5 4x101
10 O CEL2_-NOM Outputs “L” when counting is enabled. -L4 8x101
11 O CEL3_-NG -L3 1x102
12 O CEL3_GO -L2 2x102
terminal (3CH)
13 O CEL3_+NG -L1 4x102
14 O CEL3_NOM Outputs “L” when counting is enabled. L0 8x102
15 O CEL4_-NG Tolerance-judgment output +L1 1x103
: terminal (4CH) : :
: : :
24 O CEL6_GO Tolerance-judgment output +L10 2x105
25 O CEL6_+NG terminal (6CH) +OVER +Range exceeded 4x105
26 O CEL6_NOM Outputs “L” when counting NOM Outputs “L” when counting 8x105
is enabled. is enabled.
27 O EXTEND Outputs “L” while RS command EXTEND Outputs “L” while RS command SIGN Sign (+”H” or -”L”) of counter value
is being executed. is being executed.
28 I READY Data-confirmation signal READY Data-confirmation signal READY Data confirmation signal
29 O START Head CEL identification signal START Head CEL identification signal START Head CEL identification signal
30 O NORMAL “Normal” signal NORMAL “Normal” signal NORMAL “Normal” signal
31 I P.SET Preset P.SET Preset P.SET Preset
32 I OUTCEL Sets the output CEL OUTCEL Sets the output CEL OUTCEL Sets output CEL.
33 I SET1 CEL specification or segment SET1 CEL specification or SET1 CEL specification or
34 I SET2 range data SET2 segment range data SET2 segment-range data
35 I SET3 SET3 SET3
36 I HOLD Hold-peak clear, Error clear HOLD Hold-peak clear, Error clear HOLD Hold-peak clear, Error clear
* In addition to the measured value of each gage, CEL accepts a specified peak-hold value as well as the sum, average, maximum, minimum and difference between
gages. All such data is output as shown above.
5) Timing charts (examples of gage specifications with differential square-wave outputs)

Tolerance output timing Tolerance-judgment result Interval mode [ES counter, Command mode [ES counter,
[ES counter, limit output] output time [EF counter] BCD output] BCD output]
Outputs data continuously, Outputs data via synchronous
Upper limit according to the counterís internal control by HOLD and READY.
Tolerance judgement time value timing. 14~16ms
Upper Lower limit MIN 30ms MIN 30ms
limit value value HOLD 4~6ms
Lower MAX.30ms
limit value 3~30ms READY
MAX 20ms MAX 4ms
L1 READY DATA
L1 MAX.30ms
MAX 20ms
L5 DATA
MAX 10us
L5 Data latch
Interval mode (all CEL output) [EV counter] Command mode (individual CEL output) [EV counter]
Continuously outputs 30ms - 35ms Outputs data of Min. 40ms (Min. 15ms) Min. 15ms
data of all CELs (specified START individual CEL (specified
by SEL1 through 3), by SEL 1 through 3) via HOLD
according to the 5ms - 6ms synchronous control by Data latch for 10 µs only for EV-16P
counterís internal timing. 1.6ms - 2ms HOLD and READY. Max. 40ms 12ms - 15ms
(Max. 15ms) (1.6ms - 2ms)
READY
Tolerance judgment, segment, BCD data *: The figures in ( ) are READY
output values in high- Tolerance judgment, segment, BCD data
CEL1 CEL2 CEL3 CEL4 CEL5 CEL6 speed mode, respectively.
Note: When using the counter in high speed mode or all CELs output, use the
device having 1 ms or less input response time.
LINEAR GAGE
35
Operational Guide and Technical Data (Counter Output)
Counter Output Specifications (RS-232C)

The EF and EV counters are each equipped with a RS-232C output as standard, and are thus able to send and receive data to/from
a personal computer. By using the RS-Link function (see page 19), data from a multiple gage system can be managed using one
personal computer.
1) Receptacle used
D-Sub 9-pin (male)
Threads specified in inches 4) Pin assignments
2) Applicable plug 1 5
D-Sub 9-pin (female)
Threads specified in inches
3) Communication specifications (conforming with EIA 6 9

RS-232C)
Pin No. Signal I/O Description (usage)
Home position DTE (terminal definition)
1 N.C. — Not used
Use a cross cable to connect
2 RXD IN Receive data
to a personal computer.
3 TXD OUT Transmit data
Communication mode Half-duplex, nonprocedural
4 DTR OUT Data terminal ready
Data-transfer speed 4800, 9600, 19200bps
5 GND — Ground
Bit configuration Start bit: 1
6 DSR IN Data set ready
Data bit: 7, 8, ASCII, upper case
Parity bit: None, even, odd 7 RTS OUT Transmission request
Stop bit: 2 8 CTS IN Enable transmission
Communication conditions Set using parameters. 9 N.C. — Disable connection
5)
Operation
Command format Corresponding output
EF counter EV counter
GA**CRLF G#**, +01234.567CRLF Outputs [displayed value] to the RS-232C.
CN**CRLF CH**CRLF Switches display to [current value].
CX**CRLF CH**CRLF Switches display to [maximum value].
CM**CRLF CH**CRLF Switches display to [minimum value].
CW**CRLF CH**CRLF Switches display to [TIR (runout)].
CR**CRLF CH**CRLF Zero set
CL**CRLF CH**CRLF Clears the peak value.
CP**,+01234567CRLF CH**CRLF Inputs the preset value.
CD**,+01234567CRLF CH**CRLF Inputs tolerance S1. Inputs the lower limit of tolerance.
CE**,+01234567CRLF CH***CRLF Inputs tolerance S2. —
CF**,+01234567CRLF CH**CRLF Inputs tolerance S3. —
CG**,+01234567CRLF CH**CRLF Inputs tolerance S4. Inputs the upper limit of tolerance.
CS**CRLF CH**CRLF Cancels error./cancels “stand by for count” status.
CK**CRLF CH**, $CRLF($=0 or 1) — Verifies the hold status.
CT\\CRLF CH\\, +01234.567CRLF — Outputs [Calculated value]
to RS-232C.
1: [**] indicates the channel number of gage between 01 and 99 (00 for all channels).
2: [#] indicates the type of data [N: current value, X: maximum value, M: minimum value, W: TIR (runout)].
3: CRLF means CR (carriage return) and LF (line feed).
4: Inputs preset values and tolerance setting values as a single digit plus eight numerical digits without including a decimal point.
5: When setting tolerances, use CD and CG in this order for three-stage tolerances and CD, CE, CF and CG, in that order, for five-stage tolerances (EF counter).
6: When setting tolerances, use CD and CG, in this order (EV counter).
7: All channels cannot be specified when requesting the data of calculated value or confirming the hold status.
Note 1:The RS-232C communication function is temporarily suspended during key operation (while setting parameters, preset values or tolerances). Commands and
data output will be executed when the system returns to counting-enabled status.
Note 2:To cancel the counting standby status, use CS00CRLF (specification for all channels).
36
Operational Guide and Technical Data (Counter Output)
Counter Output Specifications (Digimatic Code (SPC))

The EF counter and SD display unit are equipped with 2 Data format
Digimatic code (SPC) output as standard, and can therefore be Data consisits of 13 digits (d1 thru d13); each digit consists of 4
connected to various external devices offered by Mitutoyo for bits. Data output to a linked data processor or other peripheral
use with micrometers and calipers. (External connection of the is effected via pin No. 2 from d1 to d13 in bit serial; from the
EF counter is limited to the DP-1HS only.) LSB (20) to the MSB(23) for each digit.
1 Connector pin assignment
d1 d2 d3 d4 d5 d6 d7 d8 d9 d10 d11 d12 d13
Pin No. Signal I/O Description
MSD LSD
1 GND — Signal Ground Unit
9 1 1
All "F" (1111) Sign Measurement mm: 0 (0000)
2* DATA O Measurement Data
+: 0 (0000) inch: 1 (1000)
3*1 CK O Clock for data transmission –: 8 (0001) Decimal point
X. X. X. X. X. X.
10 2
5*2 REQ I Request data transmission
2 (0100)
4,6 – 9 N.C. — No connection
3 (1100)
10 GND — Signal ground 4 (0010)
*1: Open collector: 35V, 50mA max. (SD only) 5 (1010)
*2: C-MOS: Pull-up to VDD (5V)
3 Timing chart
Open collector output REQ
T1 T2 T3 T51 T52
CK
*
DATA
t1 t2 t3 *: This time varies according to the connected measuring tool.

15µs ≤ t1 ≤ 250µs
150µs ≤ t2 ≤ 250µs
150µs ≤ t3 ≤ 450µs
[GO/NG judgment output]

The SD-D2, Digimatic Multi-Unit and Digimatic Extension Unit are able to output the result of tolerance judgment (GO/NG).
1) Applicable plug:
3) Output/input electrical specifications
TC8050-91-020 by Hoshi Electric or equivalent
• Output
Open collector output: 35V, 50mA (max.)
2) Applicable cable
• Input
907020 (2m): special accessory
Non-polarized contact signal
(see page 26)
Pull-up type, CMOS input (internal voltage 5V)
4) Pin assignments and signal names

MOdel SD-D2 Multi-Unit, Extension Unit
Pin no. I/O Signal Description I/O Signal Description
5 4 1 — GND GND — GND GND
2 O ERROR “H” upon occurrence of an O TIMING “L” upon completion of GO/NG
3 2 error judgment
3* O +NG/-NG Identification of +NG and -NG O ERROR “H” upon occurrence of an error
1
4* O GO “L” when GO O GO/NG GO: "L", NG: "H"
5 — N.C. I TRG GO/NG judgment is executed
upon the input of “L.”
*: GO/NG is determined by the following combinations:
Pin No. GO +NG -NG

3* H H L
4* L H H
*: The transistor turns off when “H” is output.
The transistor turns on when “L” is output.
LINEAR GAGE
37
Interconnection table for Linear Gage

1) 0.00001mm or 0.0001mm resolution Types
Laser Hologage KH Counter (comes with

gage head)
p.8 p.8
*1
Laser Hologage EF Counter for 0.0001mm
resolution gage
542-711, 542-712 542-060, 542-062
p.9 p.21
LGB
542-246
p.9
2) 0.0005mm or 0.001mm resolution Types
LGF EF Counter
542-131, 542-132, 542-133 542-059, 542-061
p.10 p.21
LGF ES Counter for differential

542-121, 542-122, 542-123
Squar-wave input 542-051, 542-053
p.10 p.20
LGB EV Counter for multi gages

542-244, etc 542-063
p.11 p.22
100mm stroke LG D-EV Display

542-310 02ADD400
p.15 p.23
LGE
542-601, 542-602, 542-603, 542-604
p.12
EV Counter for multi gages
542-064
3) 0.01mm resolution Types p.22
LGD ES Counter for Digimatic

575-321, 575-322, 575-323, 575-324 code input 542-055, 542-057
575-331, 575-332, 575-333, 575-334
p.13 p.20
*2
LGD-M Digimatic Power Unit
575-325, 575-335 965275
p.14 p.17
LGS SD Counter
575-301, 575-302, 575-311, 575-312 572-001, 572-011, 572-021
572-031, 572-052
p.15 p.24
*1: To connect two Laser Hologages to a dual-axis input-type EF counter, use a 542-062-1.
Since the 542-062-1 does not come with an AC adapter, provide a separate power supply (DC 12 to 24V, 12VA).
*2: An external Digimatic power unit is required when connecting an LGD/LGD-M with an SD counter and using the absolute-value function.
38
What is a hologram? Underground factory

1. Using the wavelength of light as the scale 4. Leading-edge technologies and facilities
Grids of 0.5µm in pitch are used as scale grids in hologram supporting super-high accuracy
analysis. These grids are much finer than the conventional The laser holoscales and all other scales used in Mitutoyo’s
lithographic grids used in reduction-exposure systems (only 1/ linear gages are products of comprehensive development
15th to 1/200th the thickness of lithography grids). Hologram capabilities in the fields of optics, electronics and mechanical
technology is essential to achieving high-resolution in design. And it is at our state-of-the-art production facilities
measuring scales. where these precision instruments are crafted. To further its
leading-edge technologies in precision instrument
When two parallel laser light beams (a) and (b) intersect each development—a capability fostered through 60 years of
other, as shown in Figure A, three-dimensional light interference
is created at the intersection, and bands of interference are experience—Mitutoyo maintains a laboratory located eleven
generated. The pitch of (b) meters underground at its Kiyohara factory in Tochigi
these bands is roughly the
same as the wavelength of (a) Prefecture, the only production factory dedicated for linear
the light source. This pitch scales in Japan. At this underground laboratory, fluctuations in
is set precisely at 0.5 µm temperature and humidity, as well as the effects of outside
with Mitutoyo’s hologram
scales. In other words, the vibration, are kept to an absolute minimum. This provides us
recording of interference with a superior environment for the development of precision
bands produces a scale of
very fine pitch. instruments.
0.5µm
Figure A
2. A length-measurement system employing

diffraction
The mechanism of light diffraction is used to detect scale
displacement as a change in the phase of light. Since the
amount of phase change is equivalent to the hologram’s grid
pitch, an accurate length-measurement system can be created
to detect scale displacement at a 0.5µm pitch.
When two parallel laser light
)
(a
am t
beams (a) and (b) intersect

be igh
each other, as shown in Figure

L
A, three-dimensional light
interference is created at the 1P
intersection, and bands of
interference are generated.
The pitch of these bands is
roughly the same as the
wavelength of the light source.
This pitch is set precisely at 0.5 What is the absolute positional origin?
µm with Mitutoyo’s hologram 1/4P
scales. In other words, the
recording of interference bands The absolute positional origin refers to the origin (zero point)
1/
produces a scale of very fine that is maintained even when the power is switched off. The
4P
Li
gh
pitch.
Li
Figure B LGD series gages are equipped with an absolute scale (ABS
gh am
tb
t b (b
e
scale) that allows the setting of absolute positional origin.

ea ')
m
Therefore, when the power is turned on again, the contact

(b
)
point’s position is always output correctly, according to the

previously set origin. This eliminates the need for a master
adjustment each time the power is turned on, thus contributing
3. Detection using perfect sine-wave signals greatly to automated measurements.
Displacement is detected via the interference of diffracted light, • The absolute positional scale uses three internal scales of different
in the form of bright-to-dark signals with a pitch equal to one- wavelengths in order to register an absolute address on the scale.
half that of the hologram grid (0.25mm).
Coarse scale
(a) (COA)
Since it is difficult with current technol- (b)
ogy to directly read the phase change in
light, two diffracted light beams are Medium scale
caused to interfere with each other in (MED)
order to generate bright-to-dark signals,
as shown in Figure C. The signals are
divided into 25 segments in order to Fine scale
measure displacements at 0.01µm (FIN)
resolution.
To identify the direction of scale Scale
displacement, two light receptors (a) One period: 430.08 mm
COA Resolution: 3.36 mm
and (b) are installed by which one signal
light is detected as a signal having a
relative 90-degree phase difference from
One period: 26.88mm
the other. MED Resolution: 0.21mm
One period: 1.68mm

Figure C FIN Resolution: 0.01mm
LINEAR GAGE
39
Specifications are subject to change without notice.
Mitutoyo Corporation
20-1, Sakado 1-chome, Takatsu-ku, Kawasaki-shi,
Kanagawa 213-0012, Japan
Phone (044)813-8230 Fax (044)813-8231
http://www.mitutoyo.co.jp
Printed in Japan
82.400010 (2) CPR

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CATALOG No.

Dimension sensors offering superb

2. Suitable for in-line use 3. Space-saving design

2. Suitable for in-line use

5. Various output functions

5. Various output functions

Measurement mechanism Output

Refer to p.9 Refer to p.9

Square Wave LGF LGF LGF

Square Wave LGB LGB

Square Wave LGE LGE LGE

Refer to p.12 Refer to p.12

Digimatic Output LGD LGD LGD

Refer to p.13 Refer to p.13

Digimatic Output LGS

ES Counter EF Counter EV Counter

ES Counter SD Counter EV Counter

Measurement of hydraulic coupling Multipoint measurement of turbine blades

Measuring outside Measuring blade shape

Measurement of aircraft fuselage distortion Measurement of elevator drive-rail

Measurement of core metal runout for Measurement of bridge-support joint

Measuring the run-out

When shearing force is to be

Sorting of parts Inspection of rivet

0.00001mm (0.01µm) Reading

OPTIONAL ACCESSORIES 235 5 100 13

These are extra-high accuracy gaging heads provided with

25.1 15.9 6.3

902434 Extension cable (5m) for LGB Refer to p.16

0.1µm type with

Order No. Description

902433 Extension cable (10m) Refer to p.16 Ø15 - 00.015

902432 Extension cable (20m) Refer to p.16

238772 10mm rubber boot (spare) Refer to p.16 12.3 6

for thrust stem

962504 25mm rubber boot (spare) Refer to p.16

51.5 or longer (stroke)

02ADB690 Thrust stem set (for 25mm/50mm LGF

542-204 542-244 542-262

Knurl (ID Ø2.5)

Ø9.5- 00.009 34.9 15.9 20.2

(Applicable air hose: ID Ø2.5)

29.3 15.9 4.5

L=11.5 to 13.0 No.200365

Connecting cable (2m) (No.200365)

0.6 (screw top height)

0.6 (screw top height)

0.6 (screw top height)

10.2 (stroke) 15 5.7

The LGD is an ultra-compact ABS Linear Gage designed to fit 575-322/332

OPTIONAL ACCESSORIES Dimensions

This LGD-M ultra-compact ABS linear gage maintains the origin

49.3 76.3 21.5

Note: Inch gage has a

238774 Spare rubber boot Refer to p.16

Air Drive Unit

• Spindle descending speed can be adjusted by using the

Extension Signal Cables Spare Rubber Boots

Release with damper: 971753 Digimatic external power unit: 965275 *

Measuring stand: 971750

Sample application 1: Use it as an external power supply when

connecting to other equipment (such as MUX-10 or DP-1HS)

instead of the display unit.

Clamping brackets See page 30 Interchangeable contact points See page 31

OPTIONAL ACCESSORIES 4 Code No.-