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Article history: Hazardous industrial chemical gases pose a significant threat to the environment and human life. There-
Received 1 December 2010 fore, there is an urgent need to develop a reliable sensor for identifying these hazardous gases. In this
Received in revised form 15 February 2011 work, a silicon wafer microelectrode substrate for a resistance sensor was fabricated using the semi-
Accepted 22 March 2011
conductor manufacturing process. Conductive carbon nanotubes were then mixed with six different
polymers with different chemical adsorption properties to produce a composite thin film for the fabrica-
Keywords:
tion of a chemical sensor array. This array was then utilized to identify three hazardous gases at different
Hazardous gases
temperatures. Experimental results for six polymers for chemical gases, such as tetrahydrofuran (THF),
Multi-walled carbon nanotube
Resistance sensor array
chloroform (CHCl3 ) and methanol (MeOH) at different temperatures, indicate that the variation in sensi-
Principal component analysis tivity resistance increased when the sensing temperature increased. The poly(ethylene adipate)/MWNT
sensing film had high sensitivity, excellent selectivity, and good reproducibility in detecting all chemical
agent vapors. Additionally, this study utilized a bar chart and statistical methods in principal component
analysis to identify gases with the polymer/MWNT sensor.
© 2011 Elsevier B.V. All rights reserved.
0921-5107/$ – see front matter © 2011 Elsevier B.V. All rights reserved.
doi:10.1016/j.mseb.2011.03.011
822 C.L. Yuana et al. / Materials Science and Engineering B 176 (2011) 821–829
2.1. Materials The first MWNT (1 wt%) layer-modified electrode was prepared
by casting 1 mg/mL. The MWNTs were dissolved in methyl-ethyl-
The multi-walled carbon nanotubes (MWNTs) were fabricated ketone (MEK) and dispersed on the surface of an interdigitated
by chemical vapor deposition (CVD) with a nominal outside diam- microelectrode (IME) device, which was air-dried at room tem-
eter (OD) of 30–40 nm. The six polymers, including ethyl cellulose perature. When MEK was volatilized, an MWNT conducting film
(EC), poly[methyl vinyl ether-alt-maleic acid] (PMVEMA), hydrox- formed. The polymer layer was then constructed by drop-casting
ypropyl methyl cellulose (HPMC), poly(alpha-methylstyrene) 1 wt% of different polymer solutions onto the MWNT-layer. After
(PMS), poly(vinyl benzyl chloride) (PVBC) and poly(ethylene adi- vacuum drying for 24 h at 60 ◦ C, the multilayer film sensor device
pate) (PEA), were purchased from the Sigma–Aldrich Corporation was formed.
(Fig. 1). All chemical agents, such as chloroform (CHCl3 ), tetrahy- The functionalized polymer/MWNT samples were characterized
drofuran (THF) and methanol (MeOH), were of analytical reagent using several techniques. Observations of the double-layer mor-
grade. Photolithography, a semiconductor manufacturing tech- phology were performed by scanning electron microscopy (SEM)
nique, was utilized for device fabrication. (JSM-6500F).
C.L. Yuana et al. / Materials Science and Engineering B 176 (2011) 821–829 823
Table 1
Concentration (ppm) of the six chemical vapors.
3. Results and discussion surface imparted compatibility and electron transfer which greatly
improved the material responsiveness and reversibility.
3.1. SEM of sensing films
3.2. Gas-sensing resistivity response characteristics
Fig. 4 shows scanning electron micrographs of pure-MWNTs
and the PMS/MWNT double-layer film. Fig. 4a shows micrographs This study used six different polymer/MWNT sensors to detect
of MWNTs, indicating that MWNTs with diameters of 30–80 nm three industrial chemical gases chloroform (CHCl3 ), tetrahydro-
were well distributed on the surface of small bundles or single furan (THF) and methanol (MeOH), at different temperatures.
tubes. These small bundles and single tubes, which were assembled The arrays of sensing films differed in terms of the chemical
homogeneously on the substrate, should improve sensor perfor- and physical characteristics of the mediator molecules, which
mance because most well-dispersed MWNTs are electrochemically include hydrogen-bonding properties, hydrophobicity, and chin
accessible. Conversely, the deposition of PMS on the MWNTs film length or structure. Resistance variations were measured by
produced a multilayer morphology (Fig. 4b). The PMS particles absorption/desorption tests under different vapor concentrations
were spherical and rough (particles were about 100 nm), and at different temperatures. Fig. 5 shows that different absorp-
agglomeration was also observed. This uneven surface is beneficial tion/desorption response may be produced by patterns of the six
for gas adsorption. The anchoring of PMS covering the MWNT- polymer/MWNT composite sensing films. The sensitivity of the
Fig. 5. The tendency charts of polymer/MWNT thin film sensing three gases at different concentrations. (A) CHCl3 , (B) THF and (C) MeOH.
C.L. Yuana et al. / Materials Science and Engineering B 176 (2011) 821–829 825
Fig. 5. (Continued )
PEA/MWNT sensing film increased dramatically by over 5, 15, HPMC/MWNTs and PMVEMA/MWNTs sensing films. Fig. 5 shows
21, and 40% within 30 s after exposure to 19,381, 32,274, 44,225 the response profiles for a selected exposure to vapor concen-
and 100,639 ppm CHCl3 vapor at 30, 40, 50, and 60 ◦ C, respec- trations, and the corresponding response sensitivities against
tively. When the PEA/MWNT film was transferred from solvent concentration.
vapor into dry air, the sensitivity rapidly returned to the orig- After sampling saturated absorption resistances for five times at
inal value after 33 s, which is a measure of the sensitivity and different temperatures, this work derived the standard deviation of
the significant improvement in restoring performance at roughly polymer/MWNT exposure to CHCl3 vapor as 4.7 × 10−1 –8.4 × 10−2
30 min after obvious stability (Fig. 5A-b). Otherwise exposure of the (Fig. 6a). The standard deviation of the polymer/MWNT exposure
PEA/MWNT film to THF and MeOH vapor results in excellent sensi- to THF and MeOH was 1.2 × 10−1 –9.0 × 10−2 (Fig. 6b and c). These
tivity and reproducibility (Fig. 5B and C). In this study, the responses low deviation rates show that the stability increased when using
of different films in the array to different vapors are reported, polymer thin films to identify chemical gases at different tem-
including vapor molecules of chloride, cycle-oxide and hydroxide peratures. The resistance variation can be further explored via
groups. Fig. 5 shows a representative series of response character- factors such as interaction forces among chemical gas molecules,
istics for sensing responses obtained for the three vapors of the vapor pressure of chemical gas molecules, and polymer solubility
six-sensor array system EC/MWNTs, PMS/MWNTs, PVBC/MWNTs, parameters.
826 C.L. Yuana et al. / Materials Science and Engineering B 176 (2011) 821–829
Fig. 5. (Continued )
Based on these response data, this study further compared dented example resulting from a unique combination of the
the response sensitivities (Fig. 7). From the bar chart and radar hydrogen-bending donor/acceptor and hydrophobicity of the poly-
chart (Fig. 7), the PEA/MWNTs, EC/MWNTs, PMVEMA/MWNTs and mer/MWNT structure [16]. These experimental results show that
PVBC/MWNTs had highly resistant absorption variation rates for these polymer/MWNT composite thin-film sensors were selective
the three gases at different concentrations. Additionally, the resis- for the three industrial gases at different temperatures.
tance variation rate of HPMC/MWNTs and PMS/MWNTs for MeOH
had an increasing tendency to sensitivity. However, exposure to 3.3. Adsorption/desorption mechanism of gas-sensing film
CHCl3 and THF caused a sensitivity response that decreased than behavior
the responses of the polymer/MWNT composite thin film sen-
sors to EC, PEA, PVBC and PMVEMA (Fig. 7). Thus, experimental According to the data on adsorption/desorption, the response
results indicate that all sensing materials had higher sensitivity mechanism of gas-sensing film behavior may be associated with
for the hydroxide compounds than for chloride and cycle-oxide differences in the physical adsorption properties of MWNTs and
vapor analytes. Additionally, for hydroxide vapor, the response polymers for different organic chemical vapors. A highly polar
sensitivity increase with high specificity constitutes an unprece- surface energy component was observed for MWNTs, which was
C.L. Yuana et al. / Materials Science and Engineering B 176 (2011) 821–829 827
Fig. 6. Standard deviations of polymer/MWNT thin film sensing three gases with 5
cycles. (a) CHCl3 , (b) THF and (c) MeOH. Fig. 7. Resistance bar chart of six polymer/MWNTs for three gases at different con-
centrations.
time, the polymer volume increased when it swelled, and the inter-
layer distance between MWNTs increased, breaking the conducting
network and leading to a significant increase in film electrical resis-
tance. Notably, the swelling of polymer chains wrapped around
MWNTs differs from that of a pure polymer matrix. The for-
mer involves the influence of interactions on the surface of the
polymer/MWNTs and gases [19], while the interaction among poly-
mer chains differs in the latter case because aggregation occurs
easily. Thus, the ability of the polymer alone to shrink is not
sufficient to explain the aforementioned phenomenon. To date,
no study has investigated the absorption kinetics for the inter-
action between polymers and MWNT. One researcher suggested
that the polymer molecular structure and atomic interactions at
MWNT interfaces significantly influence sensor system properties
[20]. Another researcher suggested that weak electrostatic or non-
covalent interactions between highly delocalized electron systems
of polymer and MWNTs may affect the molecular recognition abil-
ity of solvent molecules by PEA [21]. For covalently functionalized
MWNTs, polymer chains are individually anchored onto the tube
surface, forming a nanoscale layer of coverage (where the thickness
depends on polymer amount), especially for the case of high con-
ducting polymer amounts between MWNTs. A hopping mechanism
was responsible for intertube charge transfer between MWNTs and
intertube modulation of the MWNTs network in lieu of a conduc-
tivity change [21].
The PCA statistical method was applied to the signal of the opti-
mized sensor array, and input data from the primary matrix were
normalized responses, which were chosen to represent the rela-
tive resistance change (R/R0 ) of the polymer/MWNT sensors. The
PCA data were obtained from the correlation matrix (centered and
standardized data) [22]. The responses of the three polymer/MWNT
sensors were normalized by the sum of all sensor response val-
ues for a given analyte. This normalization process reduced array
response dependence on vapor concentration and slightly reduced
sensor drift effects. Fig. 8 shows 3D plots for the three groups at four
concentrations of CHCl3 , THF and MeOH vapors obtained by apply-
ing PCA to the normalized responses of the six polymer/MWNT
sensing films. As shown by the data points for the high concen-
trations, analytical results demonstrate that all vapors were easily
separated. Between the four dots of 19,381, 32,274, 44,225 and
100,639 ppm (Fig. 8a), another evolved region of organic agents
can be fixed in the feature plane analyzed (PC1 –PC2 ) with a high
cumulative variance exceeding 96.54%. As previously noted, the
largest portion of variance was from the first principal component
(PC1 ), which was also the most important in dot discrimination. The
second principal component (PC2 ) contained relatively less infor-
mation (3.43%), whereas the third principal component included
the smallest variation (0.025%). Fig. 8b and c shows the four dots for
11,650, 8531, 10,707, and 21,526 and 27,271, 45,445, 60,691, and
92,410 ppm. With the high cumulative variance exceeding 99.56
and 91.7%, the second principal component (PC2 ) contained less
information (0.31 and 7.35%), and the third principal component
(PC3 ) had the smallest variation (0.13 and 0.94%). Thus, no redun-
dant sensors existed in the studied array.
4. Conclusions
Fig. 8. PCA score plots of three groups in the 3D PCA space (a) CHCl3 , (b) THF and
(c) MeOH. This study demonstrated that coating six polymers on the
surface of MWNTs can produce standardization of gas sensing prop-
erties for the detection of CHCl3 , THF, and MeOH vapors. The sen-
sitivities of polymer/MWNT films for the three solvents in decreas-
ing order were PEA/MWNTs > EC/MWNTs > PMVEMA/MWNTs >
C.L. Yuana et al. / Materials Science and Engineering B 176 (2011) 821–829 829
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