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Applied Surface Science 282 (2013) 450–455

Contents lists available at SciVerse ScienceDirect

Applied Surface Science


journal homepage: www.elsevier.com/locate/apsusc

Molecular dynamics study on the equal biaxial tension of Cu/Ag


bilayer films
Lin Yuan, Zhenhai Xu, Debin Shan ∗ , Bin Guo
School of Materials Science and Engineering, Harbin Institute of Technology, Harbin 150001, China

a r t i c l e i n f o a b s t r a c t

Article history: The mechanical behavior, dislocation nucleation and development, and the evolution of interface in
Received 27 April 2013 Cu/Ag bilayer films during an equal biaxial tension were studied using molecular dynamics simulations.
Received in revised form 29 May 2013 The results show that dislocations are prone to nucleate at the interface of Cu/Ag bilayer film, and then
Accepted 29 May 2013
propagate toward the free surface. The deformation defects consist of partial dislocations and intrinsic
Available online 4 June 2013
stacking faults, accompanying with some extrinsic stacking faults and stacking fault tetrahedra which
just occur at the interface and propagate in the Cu layer. Compared with Cu and Ag films, Cu/Ag bilayer
Keywords:
films have the maximal yield strain. The surface roughness reaches maximum at the yield strain, and
Cu/Ag bilayer films
Equal biaxial tension
then rapidly decreases with the increase of strain. Atoms in stacking faults increase with the strain at the
Interface high strain rate, while the rule is reversed at the low strain rate.
Dislocation © 2013 Elsevier B.V. All rights reserved.
Molecular dynamics

1. Introduction the thin film’s mechanical response with increasing strain. He et al.
[16] studied the plastic deformation behavior of the single crys-
Thin films have been widely used in various fields. The mechan- tal Cu(0 0 1) film subjected to equal biaxial tensile strain. Although
ical properties of thin films are important factors constraining their some research has been performed on the mechanical behavior of
application range and service life. They cannot be directly deduced homogeneous films, little focus was put on films with more com-
from the mechanical properties of the corresponding bulk mate- plex structures.
rials, since the thin films mechanical behavior is changed by the Since Cu and Ag have a large lattice mismatch at the interface,
dimensions substantial decrease of both the external shape and the Cu–Ag system is often regarded as a typical research object with
the internal microstructure of thin films at the same time. Some a large interfacial strain. A lot of attention has been attracted to the
progress has been made to test the properties of thin films in experi- interface structure of the Cu/Ag bilayer film [17,18]. It is well known
mental equipments and methods on nano-scale and even on atomic that defects play an important role on the properties of materi-
scale, but it is still very limited [1,2]. Molecular dynamics (MD) als, but there is little research on the deformation behavior of the
simulations can be used to observe some unique phenomenon and Cu/Ag bilayer film. In this paper, the equal biaxial tensile process of
processes which cannot do in experiments, and reveal their essence the Cu/Ag bilayer film was simulated by the MD method, and was
on atomic scale. In general, MD simulations can remedy the weak- compared with that of the single crystal Cu film and Ag film. The
ness of experiments very well in scientific research [3–9]. deformation mechanism of different systems was investigated by
Currently, most MD simulations studies on the mechanical analyzing defects evolution in films.
behavior of films were performed under the loading condition of
nanoindentation and uniaxial tension [10–14]. However, materi- 2. Simulation methods
als often suffer a complex stress state in engineering applications,
so it is also necessary to study the tensile properties of films under The atomic interaction in the Cu–Ag system was described by
biaxial or multi-axial loading. Kolluri et al. [15] simulated the defor- the EAM potentials [19,20]. The MD tensile model of the Cu/Ag
mation process of the single crystal Cu(1 1 1) film at a broad range bilayer film is shown in Fig. 1, where the x-, y- and z-axis corre-
of equal biaxial tensile strains. The results show five regimes in spond to [1 1 2̄], [1̄ 1 0] and [1 1 1] of crystal, respectively. The
atoms of Cu and Ag are colored blue and red. The dimensions of
the top Cu film are 36aCu × 63aCu × 8aCu , where aCu denotes the
∗ Corresponding author at: P.O. Box 435, No. 92 West Dazhi Street, Harbin 150001, lattice constant of Cu, while the dimensions of the bottom Ag film
China. Tel.: +86 451 86418732; fax: +86 451 86418732. are 32aAg × 56aAg × 8aAg , resulting in a Moiré pattern structure of
E-mail address: d.b.shan@gmail.com (D. Shan). the interface [18]. The free boundary condition was applied along

0169-4332/$ – see front matter © 2013 Elsevier B.V. All rights reserved.
http://dx.doi.org/10.1016/j.apsusc.2013.05.150
L. Yuan et al. / Applied Surface Science 282 (2013) 450–455 451

reaches 8%, dislocations still nucleate firstly in the Cu film from the
interface, but the nucleation distributes more uniformly. With the
further relaxation of strain, the dislocations nucleate in the inte-
rior and free surface at the same time, and also nucleate in the Ag
film. It indicates that the dislocations prone to nucleate in the Cu
film.
Fig. 3 shows the deformation defects in the Cu/Ag bilayer film
after relaxation at ε = 7.5%. Atoms in the FCC and HCP structures are
colored green and orange in Fig. 3(a), while only those in the HCP
structure are visible in Fig. 3(b). The defects include the intrinsic
stacking faults (SFs), extrinsic SFs and SF tetrahedra, and of which
the former is the main defect type. These defects result from the
interaction between Shockley partial dislocations in different slip
planes. It is worth mentioning that stacking fault tetrahedra are
observed in a variety of strain levels, but such defects exist only in
the Cu film. The bottom surface of the stacking fault tetrahedron
consists of the first Cu atom layer at the interface, while the other
three faces extend toward the Cu film.
The surface morphologies of the Cu/Ag bilayer films subjected
Fig. 1. MD tensile model of the Cu/Ag bilayer film. to equal biaxial strains with ε = 7.3% and 10% are shown in Fig. 4,
where atoms are colored according to their relative height along
z direction. It can be observed that the surface exhibits a trian-
gle net structure, resulting from the cross of surface steps left by
dislocation movement. As the strain increases, the plastic deforma-
z-axis, while the periodic boundary condition was applied along tion becomes more uniform, i.e., more dislocations nucleates and
the other axes. Initially, the film was relaxed with no strain for uniformly distribute in the film, resulting in a surface morphology
5 ps, and then it was strained biaxially along the x and y direc- with smaller triangles and lower relative height. The root-mean-
tion up to the chosen strain level at a specific rate. Finally, the squared fluctuation of the surface atoms height is defined as surface
film was relaxed for another 50 ps. The simulation parameters roughness. Fig. 5 shows the Cu and Ag film surface roughness of
are summarized in Table 1. The velocity rescaling method was the bilayer as a function of the applied strain. The Cu film sur-
adopted to control the film at a constant temperature of 300 K. face has a larger roughness than the Ag film surface at the yield
All simulations were performed using the open codes LAMMPS strain (ε = 7.3%), due to the preferred nucleation of dislocations
[21]. in the Cu film. And then the values of Cu and Ag surface rough-
To analyze the response of the film to the applied equal biax- ness decrease rapidly with the increase of strain until the same
ial strain, the angle distribution function (ADF) [22] method was level.
employed to categorize the atoms into locally perfect FCC and HCP The evolution of SF atoms proportion in the Cu/Ag bilayer film at
ones, and then identify various crystal defects based on the distri- ε = 7.3% is plotted in Fig. 6. During the tension of the Cu/Ag bilayer
bution of atoms in different lattice arrangements in the film. Two film, SFs nucleate and propagate firstly in the Cu film in a short
neighboring planes of HCP atoms constitute an intrinsic fault in a time, followed by the SFs nucleation in the Ag film. As a result, SF
FCC lattice, while two planes of HCP atoms separated by a plane of atoms proportion in the Cu film is far higher than that in the Ag
FCC atoms constitute an extrinsic fault. film at the initial stage of relaxation, and the value of total pro-
portion of SF atoms in the Cu/Ag bilayer film is between them. As
3. Results and discussion the strain increases, SF atoms proportion begins to decrease until a
stable state. The shear stress is the reason of SFs nucleation, and its
The deformation of the Cu/Ag bilayer film is found to be elas- response can be divided into five regions over the time as shown in
tic up to a biaxial strain ε of 7.3%, beyond which the strain in Fig. 6.
the film is relaxed by plastic deformation. It is indicated that the Region (I): SF atoms in the Cu film suddenly increase, and shear
value of 7.3% is the yield strain. The nucleation and propagation of stress decreases, corresponding to the nucleation of a large number
dislocations during the tensile process of the Cu/Ag bilayer film of partial dislocations.
is shown in Fig. 2, where only the atoms in stacking faults are Region (II): the SFs atoms proportion in the Cu film sharply
visible using ADF method. The two horizontal neighboring layers decreases while that in the Ag film slowly increases, the former
of atoms appear as the Cu/Ag bilayer interface, above and below is the major one, and the shear stress suddenly increases since it
which are Ag and Cu films, respectively. Fig. 2(a) shows that the cannot be effectively released.
dislocation nucleates firstly in the Cu film from the Cu/Ag interface Region (III): with the increase of SFs atoms proportion in the Ag
at ε = 7.3%, due to the lattice misfit of the interface and the lower film, the latter becomes the major one and shear stress suddenly
stacking fault energy of Cu. Fig. 2(b) shows that when the strain ε decreases.

Table 1
Simulation parameters of the tension.

Model lx × ly × lz Strain ε Strain rateε̇

36[1 1 2̄] × 63[1̄ 1 0] × 8[1 1 1]aCu 10−2 , 10−3 , 10−4


Cu/Ag bilayer
32[1 1 2̄] × 56[1̄ 1 0] × 8[1 1 1]aAg 2–20%
Cu film 64[1 1 2̄] × 112[1̄ 1 0] × 16[1 1 1]aCu 10−2
Ag film 64[1 1 2̄] × 112[1̄ 1 0] × 16[1 1 1]˛Ag 10−2
452 L. Yuan et al. / Applied Surface Science 282 (2013) 450–455

Fig. 2. Dislocations nucleation and propagation in the Cu/Ag bilayer film during the relaxation at different equal biaxial tensile strains: (a) ε = 7.3% and (b) ε = 8%.

Fig. 3. Deformation defects in the Cu/Ag bilayer film after relaxation at ε = 7.5%: (a) top view of the single Cu atom layer in the interface and (b) perspective view of the
bilayer film with only defect atoms visible.

Region (IV): with the appearance and disappearance of the SFs, evolution of defects just at the initial stage. With further relaxation,
the shear stress fluctuates; the hindrance effect of the interface gradually weakens and does
Region (V): after relaxation of the film, the SFs and the level of not work to the final development of SFs almost. The appearing
shear stress are essentially constant. time of SFs in the Cu/Ag bilayer film and Ag film is almost simul-
Fig. 7 compares the proportion evolution of SF atoms in the taneous, while the Cu film has a hysteresis, resulting in a lower
Cu/Ag bilayer film, Cu film and Ag film subjected to the same strain level of yield strain in the Cu film. The corresponding yield strain
ε = 10%. A large number of SFs nucleate in both of the Ag film and Cu value has a qualitative sequence of Cu/Ag bilayer film < Ag film < Cu
film at the initial stage of relaxation, and the SF atoms proportion film.
in the monolayer film is about 2 times larger than that in the Cu/Ag Fig. 8 compares the evolution of the proportion of atoms in
bilayer film. The reason is that the bilayer film interface will pre- the FCC structure and SFs in the Cu/Ag bilayer film after the ten-
vent the initial SFs from extending into the Ag layer seriously. As sile steady state. The SFs fraction can characterize the mechanical
the relaxation evolution continues, the SF atoms proportion in the response of the film, which can be divided into five different
monolayer film drastically decreases, while that in the bilayer film regions:
slowly decreases, and finally both of them reach the same level. It
is shown that the interface plays a significant role in preventing the Elastic deformation strain region (I): ε < 7.3%, no defects;
L. Yuan et al. / Applied Surface Science 282 (2013) 450–455 453

Fig. 4. Atomic morphology of the Cu and Ag free surfaces of the Cu/Ag bilayer film after relaxation at different equal biaxial tensile strains: (a) ε = 7.3% and (b) ε = 10%.

Critical strain region (II): 7.3% ≤ ε ≤ 7.4%, the elastic deformation Fig. 9 compares the SF atoms proportion in the Cu/Ag bilayer
transforms to plastic deformation, corresponding to the rapid film at three different strain rates. It indicates that the value
increasing of SF atoms fraction; of the yield strain is 7.3% at high strain rate (ε̇ = 10−2 ps−1 ),
Initial plastic deformation strain region (III): 7.4% < ε ≤ 8%, the SF while 7.6% at lower strain rate (ε̇ = 10−3 ps−1 and 10−4 ps−1 ).
fraction decreases slowly; It also shows that at high strain rate plastic deformation occurs
Subsequence plastic deformation strain region (IV): 8% < ε ≤ 12%, earlier, which is consistent with the conclusion achieved by
the SF fraction rises slowly; observing the surface morphology under different strain rates.
High strain region (V): ε > 12%, SF fraction has a slight fluctuation. The SF atoms proportion increases with the strain at the high
strain rate, while the rule is reversed at the low strain rate. The
smaller the strain rate is, the faster the SF atoms proportion
decreases.

Fig. 5. Dependence on strain of surface roughness of the Cu/Ag bilayer film after Fig. 6. Evolution of the proportion of SF atoms and shear stress in the Cu/Ag bilayer
relaxation. film at ε = 7.3%.
454 L. Yuan et al. / Applied Surface Science 282 (2013) 450–455

and different strain rates was studied using MD simulations. The


following conclusions are drawn:

(1) Dislocations are prone to nucleate at the interface of the Cu/Ag


bilayer film, and then propagate toward the free surface. With
the increase of strain, dislocations also nucleate at free sur-
face and the interior. Defect types include partial dislocations,
intrinsic stacking faults, accompanying with some extrinsic
stacking fault and stacking fault tetrahedra which just occurs
at the interface and extends to the Cu layer.
(2) Surface roughness of Cu/Ag bilayer film reaches the maxi-
mum value at the yield strain, and the roughness rapidly
decreases with the increase of strain. The mechanical response
can be divided into five regions according to the strain: Elastic
deformation strain region, critical strain region, initial plas-
tic deformation strain region, subsequence plastic deformation
strain region and high strain region. The corresponding yield
strain value has the relation of Cu/Ag bilayer film < Ag film < Cu
Fig. 7. Comparison of the proportion of SF atoms in the Cu/Ag bilayer film, Cu film
film.
and Ag film at ε = 10%.
(3) Atoms in stacking faults increase with the strain at the high
strain rate, while the rule is reversed at the low strain rate.
The smaller the strain rate is, the faster stacking fault atoms
proportion decreases.

Acknowledgements

This work is sponsored by the Seventh Framework Program of


the European Community for Research (Grant No. CP-FP 213600-
2 M3-2S), the National Science Foundation of China (Grant No.
51175110) and the Fundamental Research Funds for the Central
Universities (Grant No. HIT.KLOF.2010006).

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