Professional Documents
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Europäisches Patentamt
(19) European Patent Office
(54) Ion source apparatus and method of making the ion source apparatus
(57) An ion source tube (300) for sustaining a plasma diameter of the ion source tube (300) and is displaced
discharge therein. The ion source tube (300) comprises by 0-1.5 mm from a central axis (316) of the ion source
a slit opening (310) along a side of the ion source tube tube (300) toward the slit opening (310). The plasma col-
(300), wherein the slit opening (310) has a width less umn is displaced 0.2 to 0.5 mm relative the slit opening
than 0.29 mm. The ion source tube (300) also comprises (310). The ion source tube (300) comprises a cavity (312)
an end opening (314) in an end of the ion source tube that accommodates the plasma discharge. The invention
(300). The end opening (314) is smaller than an inner also relates to a method for making an ion source tube
(300).
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the end opening is smaller than an inner diameter of the scribed in connection with Figures 9-12.
ion source tube and is displaced by 0-1.5 mm from a [0014] It should be noted that the ion source tube 300
central axis of the ion source tube toward the slit opening; is typically manufactured in one piece. That is, the geo-
and a cavity that accommodates the plasma discharge. metrical parameters that affect the ion beam currents,
[0010] According to another embodiment, the inven- 5 such as the width of the slit opening 310 and the shape
tion relates to a method for making an ion source tube, of the cavity 312, may be predetermined based on, for
the method comprising: forming an ion source tube, the example, experiments or theoretical calculations (e.g.,
ion source tube comprising a slit opening along a side of computer simulation). Then, the desired set of parame-
the ion source tube, wherein the slit opening has a width ters may be incorporated into the ion source tube 300 to
of less than 0.29 mm; an end opening in at least one end 10 form one integral structure that requires little or no as-
of the ion source tube, wherein the end opening is smaller sembly or adjustment. This design methodology can re-
than an inner diameter of the ion source tube and is dis- duce the need for time-consuming adjustment of the ion
placed by 0-1.5 mm from a central axis of the ion source source tube 300 and can increase the machining toler-
tube toward the slit opening; and a cavity in which the ances.
plasma discharge is located. 15 [0015] Figures 9-12 are mechanical diagrams illustrat-
[0011] Embodiments of the invention will now be de- ing the exemplary ion source tube shown in Figure 8.
scribed, by way of example, with reference to the accom- Figure 9 is a front view of the ion source tube 300, Figure
panying drawings, in which: 10 is a side view, Figure 11 is a cross-sectional view of
the section A-A, and Figure 12 is a cross-sectional view
Figure 1 illustrates the operation of a known plasma- 20 of the section B-B. The length unit is millimeters (mm).
based ion source used in cyclotrons for isotope pro- [0016] The overall length of the ion source tube 300
duction. shown in Figure 9 may be 20 mm, with a tolerance of
0.05 mm, for example. Of course, these values, and the
Figures 2-7 illustrate a prior art design of an ion other values set forth herein, are merely examples. The
source tube. 25 slit opening 310 along the front side of the ion source
tube 300 may have a width of less than 0.3 mm, more
Figure 8 is a perspective view of an exemplary ion preferably less than 0.29 mm and greater than 0.1 mm,
source tube according to an embodiment of the in- still more preferably less than 0.25 mm and greater than
vention. 0.15 mm, and most preferably a width of 0.2 mm with a
30 tolerance of 0.01 mm. The length of the slit opening 310
Figures 9-12 are mechanical diagrams illustrating may be 4-6 mm, more preferably 5.00 mm with a toler-
the exemplary ion source tube shown in Figure 8. ance of 0.05 mm. The slit opening 310 and both ends of
the ion source tube 300 may have sharp edges.
Figures 13-16 are mechanical diagrams illustrating [0017] Figure 10 shows a view of the ion source tube
an exemplary restrictor ring according to an embod- 35 300 seen from one end. The end opening 314 typically
iment of the invention. has a diameter of 2.5-5 mm, and preferably has a diam-
eter of 3.00 mm with a tolerance of 0.05 mm. Also as
[0012] Reference will now be made in detail to exem- shown in Figures 10 and 11, the end opening 314 is typ-
plary embodiments of the invention. ically but not necessarily off center from a central axis
[0013] Referring to Figure 8, there is shown a perspec- 40 316 of the ion source tube. For example, the end opening
tive view of an exemplary ion source tube 300 according 314 may be zero or greater than zero up to 1.5 mm off
to an embodiment of the invention. The ion source tube center from the central axis 316, and is preferably about
300 may be used in a plasma-based ion source similar 1.00 mm off center from the central axis 316. As a result,
to the one shown in Figure 1. A plasma discharge (not a plasma column (not shown) restricted by the end open-
shown) may be sustained in or near the ion source tube 45 ing 314 may be moved off-center and closer to the slit
300. The ion source tube 300 may be made of metals opening 310. A position of the plasma column close to
(e.g., copper and tungsten) that are resistant to heat and the slit opening 310 typically improves the efficiency of
the plasma discharge. As shown, the exemplary ion ion extraction. Furthermore, the diameter of the end
source tube 300 has a substantially cylindrical shape. opening 314 may be smaller than that of the cavity 312
There may be a slit opening 310 in the front side of the 50 inside the ion source tube 300, which may help increase
ion source tube 300 for extraction of ions. There may be the density of the plasma discharge to create more ions.
an end opening 314 in the end of the ion source tube 300 Typically, the diameter of the plasma discharge inside
to accommodate a flow of gas ingredient(s) and to help the ion source tube is about 2.5-5 mm, more preferably
define the shape and position of the plasma discharge. 3 mm.
Inside the ion source tube 300, there may be a preshaped 55 [0018] Figure 12 shows that the distance between the
cavity 312 that further defines the shape and position of slit opening 310 and the central axis 316 can be about
the plasma discharge as well as its density. Details of 2.6 mm, according to one example. Assuming that a plas-
the interior geometry of the ion source tube 300 are de- ma column restricted by the end opening 314 and a built-
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in restrictor 324 maintains a straight cylindrical shape easy to install and adjust. The geometry of the cavity
throughout the length of the ion source tube 300, the inside the ion source tube may be designed to achieve
edge of the plasma column may be only 0.3 mm away efficient ion generation and extraction. For example, an
from the slit opening 310. Typically, the edge of the plas- off-center end opening in one end of the cavity may po-
ma column is 0.2-0.5 mm away from the slit opening 310. 5 sition the plasma column closer to the slit opening. The
The thickness of the ion source tube at the edge of the shape of the plasma column may be configured based
slit opening 310 is typically 0.05-0.15 mm, and preferably on geometrical parameters of the off-center opening and
0.1 mm as shown in Figure 11. The thickness of the ion the cavity. The size of the off-center opening and the
source tube at the edge of the slit opening 310 may have cavity may be reduced to increase the density of the plas-
two effects on performance. For example, a thinner edge 10 ma column, for example. With the optional restrictor ring
may lead to an improved electric field penetration and (s), embodiments of the present invention also offer flex-
hence a better H- output. A thinner edge, however, may ibility in design and manufacturing of the ion source tube.
cause a shorter lifetime of the ion source tube as it will When the one-piece design is difficult to realize, one or
be less resistant to wear. The chosen edge thickness more restrictor rings of appropriate shapes and dimen-
may be a trade-off between the two effects. 15 sions may be inserted into the ion source tube to achieve
[0019] Figures 13-16 are mechanical diagrams illus- a desired geometry.
trating an exemplary restrictor ring according to an em-
bodiment of the invention. Figure 13 is a perspective view
of the restrictor ring 500, Figure 14 is a top view, Figure Claims
15 is a side view, and Figure 16 is a cross-sectional view 20
of the section f-f. The length unit is millimeters (mm). 1. An ion source tube (300) for sustaining a plasma
[0020] According to embodiments of the invention, one discharge therein, the ion source tube (300) com-
or more restrictor rings, such as the one shown in Figure prising:
13, may be inserted into an ion source tube to further
alter the shape of its cavity. For example, the restrictor 25 a slit opening (310) along a side of the ion source
ring 500 may be inserted, along the dashed line 320 in tube (300), wherein the slit opening (310) has a
Figure 11, into the cavity 312. The restrictor ring 500 may width less than 0.29 mm;
be made of a heat- and plasma-resistant metal (e.g., an end opening (314) in an end of the ion source
tungsten or copper). As shown in Figure 16, the restrictor tube (300), wherein the end opening (314) is
ring 500 may have an inner diameter of 4.60 mm and an 30 smaller than an inner diameter of the ion source
outer diameter of 5.60 mm. As shown in Figure 14, the tube and is displaced by 0-1.5 mm from a central
restrictor ring 500 may have a 0.8 mm wide slit 508. The axis (316) of the ion source tube (300) toward
slit 508 may allow slight bending of the restrictor ring 500 the slit opening (310); and
during insertion and adjustment. And the dimensions of a cavity (312) that accommodates the plasma
the inner and outer diameters may allow the restrictor 35 discharge.
ring 500 to rest against the flange 322 shown in Figure 11.
[0021] According to embodiments of the invention, al- 2. The ion source tube (300) of claim 1, wherein the
though it may be desirable to manufacture an ion source end opening (314) has a diameter of 2.5-5 mm.
tube in a single piece incorporating all the key parameters
for ion extraction, sometimes it may be too difficult or too 40 3. The ion source tube (300) of claim 1, wherein at least
expensive to machine the tube to fit all the requirements. one of a built-in restrictor (324) and the end opening
For example, referring again to Figure 11, it may be dif- (314) causes an edge of the plasma discharge to be
ficult to make a one-piece ion source tube 300 whose 0.2-0.5 mm away from the slit opening (310).
cavity 312 is wider in the center portion and narrower on
both ends. However, when the restrictor ring 500 is in- 45 4. The ion source tube (300) of claim 1, wherein the slit
serted along the dashed line 320 and rested against the opening (310) has a width between 0.15 mm and
flange 322, the desired symmetry in the shape of the 0.25 mm.
cavity 312 may be achieved with respect to the section
B-B. 5. The ion source tube (300) of claim 1, wherein the slit
[0022] In summary, embodiments of the present inven- 50 opening (310) has a width of about 0.2 mm.
tion can offer a number of advantageous features to im-
proving the lifetime and performance of an ion source. 6. The ion source tube (300) of claim 1, wherein the ion
For example, a one-piece design may incorporate all the source tube (300) has a one-piece construction.
key parameters that may affect the output ion current,
such as the width of the slit opening, the distance be- 55 7. The ion source tube (300) of claim 6, further com-
tween the slit opening and the edge of the plasma col- prising a restrictor ring (500) for insertion into the
umn, and the shape of the plasma column. With almost one-piece ion source tube (300) to alter the geometry
no discrete parts, the one-piece ion source tube may be of the cavity (312).
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