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1. Introduction
For decades, the outer lead of the IC is usually plated with 2. Methodology
Sn layer. The purpose of this Sn layer is to protect the Cu 2.1 Scratch test methodology
leads from oxidation and provide good solderability to the IC Bruker Tribolab tester is used to setup the scratch testing
package on the printed circuit board (PCB). In semiconductor in this work. As shown in the Figure 1, Cu strip plated with
process flow, the Cu leadframe (chips carrier) is subjected to PPF/Sn is clamped with specimen clamper which is installed
Sn plating after the chips are encapsulated. The plating on top of the linear drive; a diamond indenter is fixed at the
process requires substantial floor space and processing time. bottom of the load cell which is attached at the bottom of the
Recently, PPF leadframe with Ni-PdAu has gain more carriage. During the scratch test, the diamond indenter will be
popularity as the plating process is carried out at leadframe driven down by the Z-axis motor and load cell would detect
supplier premise in which the floor space utilization and the Fz applied on the specimen. Linear drive motor will drive
manufacturing cycle time have improved. The hardness of Ni- the specimen at constant speed in Y-axis to provide the scratch
PdAu plating is usually much higher (~3x) than Sn plating, action of diamond indenter towards specimen. Fx, z and AE
which supposed to be not easily scratched. The thickness of are recorded as a secondary measurement response, along with
Ni-PdAu layer is ~2 μm, while Sn is 10~16 μm. At final test, Fz.
IC is inserted into test socket to carry out functional testing.
The outer leads of IC are contacted with the test pins, which is
integrated in the test socket for electrical testing. It is observed
that certain types of PPF plating are more prone to exposed Cu
after the IC retest for few times. There is limited
understanding on scratch resistance for both the PPF plating
and Sn plating.
Scratch Test
In scratch testing, a diamond indenter of defined geometry
is drawn across the surface of a coated sample at a constant
speed with a defined normal load force (Fz) over a defined
distance. Fz can be constant, progressively increasing or
incrementally increasing. The diamond indenter typically has
Rockwell C geometry with an angle of 120 degrees and a Figure 1: Scratch test setup
spherical tip radius of 200 μm. Different tip radius can be used
to change the contact pressure.
During the test the scratch friction force (Fx), the
coefficient of friction (COF), the penetration depth (z) and the
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2.1 Progressive load scratch test with Rockwell indenter and
AE sensor
Rockwell indenter is used to scratch across the surface of
the Sn plated specimen and PPF specimen. The Fz increased
linear from 3 to 45 N and the bottom specimen is driven by
the linear drive at a constant speed of 0.25 mm/s over 15 mm
scratch distance (Figure 2). The AE sensor is glued (with nail
polish) on the specimen near to the scratch line. The AE
sensor would capture the acoustic wave that generated when Figure 4: Constant load scratch test
the buckling, spallation or delamination occurred.
2.4 Scratched surface analysis
After the scratch test, the specimen is heated up to 250 °C
with a heater block for 20 minutes to oxidize the exposed Cu.
The color contrast of oxidized Cu is higher and thus provides
a better visual judgement. The specimen is then examined
under a 3D laser measuring microscope LEXT OLS4000 to
measure the distance of exposed Cu from the initial scratch
location and depth. With this distance, the corresponding Lc,
Figure 2: Progressive load scratch test Fx, and the COF can be checked back from the graph. In
general, the Lc has positive correlation with the practical
2.2 Diamond indenter types study adhesion strength and the damage resistance of the plating
As compared with Sn plated strip, the PPF plating layer is layer.
quite thin, it is less than 2% of the strip thickness. Cu base
under the PPF plating layer is relatively softer and it is prone
3. Results and Discussion
to deformation by the indenter during scratch test. Therefore,
it is important to use the sharper tip in order to concentrate the 3.1 Progressive load scratch with Rockwell Indenter and AE
loading stress on the PPF plating surface. The diamond tip sensor
evaluated are flat punch, Vickers and cone tip with 60° cone Figure 5 shows the graph of progressive load scratch test
angle, 25 μm tip radius (Figure 3) to compare with Rockwell result on Sn plated specimen. The first AE signal is detected at
indenter. Progressive load scratch test was used with Fz from location A, which corresponds to the exposed Cu failure
0.1 to 2.0 N at 0.25 mm/s scratch speed over 15 mm scratch (Figure 6a), and the Fz is 15.27 N. At this point, it is also
distance on PPF specimen. After the scratch test, the specimen observed that the Fx and COF increase drastically. This is an
was then inspected for the first exposed Cu and full exposed indication of a change in the scratch surface material from Sn
Cu and corresponding scratch depth was measured with to Cu. A peak AE signal is observed when a gross plating
LEXT. The target is to select diamond indenter with the failure occurred at location B, and eventually full exposed Cu
minimal scratch depth when first exposed Cu is observed. is observed at this location (Figure 6b).
This scratch test method is suitable to analyze Sn plating
layer, where the Sn plating failure is accompanied with the
strong AE signal detection. In this case, the Lc = 15.27 N.
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(a) (b) First exposed copper
6.55 μm
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End of
scratch line
5.09 μm
Figure 14: Scratch depth graph for various
indenters on PPF specimen
Figure 11: Scratch depth analysis for Vickers indenter
on PPF specimen (end of scratch line) 3.3. Constant load scratch test
Figure 15 shows the PPF specimen after performed the
Figure 12 shows the graph of the progressive load scratch constant load scratch test. Exposed Cu is clearly seen from
test on PPF specimen using cone tip indenter. First exposed line 13 onwards, where Fx and COF increase drastically
Cu is observed at location E where Fz is 0.45 N and scratch (Figure 16). When the first Cu is exposed during the scratch
depth is 0.93 μm (Figure 13a). Full exposed Cu is observed at test, Fz at this point is defined as Lc. Analysis showed the Lc
location F where Fz is 0.76 N and scratch depth is 1.78 μm for the PPF specimen is 0.74 N.
(Figure 13b). Prior the full exposed Cu, Fx and COF has
increased drastically, which indicate a change in the scratch
surface material. However, there is no AE signal as expected
at both locations E and F. The AE signals were detected quite
late after the full exposed Cu. The same observations are seen
when the scratch test is repeated a few times.
Figure 15: Constant load scratch test on PPF specimen with cone
tip indenter (exposed Cu on line 13)
(a) (b)
0.93 μm 1.83 μm
Figure 16: Constant load scratch test graph on PPF specimen
with cone tip indenter
Figure 13: Scratch depth analysis for cone tip indenter on PPF specimen
(a) first exposed Cu (b) full exposed Cu. Conclusions
Standard progressive load scratch test method with
Figure 14 shows the scratch depth graph with various Rockwell indenter and AE sensor is quite suitable to test on
indenters on PPF specimen. Rockwell, Vicker and flat punch Sn plated Cu strip where strong AE signal is detected when
indenters are not suitable to perform the scratch test on PPF the plating failure occurred. However, progressive load
strip due to deep scratch depth. The most suitable indenter for scratch test on PPF plated Cu strip is quite challenging as
scratch test on PPF specimen is cone tip indenter with 60° when the PPF plating failed, there is a) no AE signal
cone angle and 25 μm tip radius, which minimal scratch depth detection, b) no clear plating failure transition and c)
is observed when the PPF plating layer has failed. deformation of PPF plating into the Cu base material. These
challenges had been overcome by using a) cone tip indenter
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with small radius to concentrate the normal load stress on PPF
plating surface and b) constant load scratch test technique to
provide better visualization of damage. In this work, we
develop a methodology by performing progressive load
scratch test first to obtain the Lc, then followed by the constant
load scratch test at narrow normal force range with fine force
increment. It is noted that Lc can be categorized into Lc1: first
plating failure and Lc2: Gross plating failure. However, we
only characterized Lc1 in this study.
Acknowledgments
The authors are grateful to Infineon Technologies Asia
Pacific Backend Development management team and project
core team in supporting all the assessments and fruitful
discussion.
References
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