Professional Documents
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1. Describe the basic definition of the part or product of the macro, micro,
and nano process.
2. Describe the commonly used terms related to micro products such as
MEMS, MST
3. Name some devices that represent microsystem technology.
4. What is meant by the term aspect ratio in microsystem technology? In
what way does this ratio affect microsystem technology manufacturing
process?
5. Briefly present Silicone semiconductor, what advantages does it have
over germanium semiconductor
6. Describe the technology to create silicon wafers (Wafer) from
monocrystalline silicon cylinders
7. When do we need to create a layer of SiO2 on the surface of silicon
semiconductors?
8. When do we need to create a thin film made of metal such as titanium?
Describe the method to create them.
9. What is lithography process? Describe photolithography process.
10. Analyze photolithography steps
11. Describe detail etching process in manufacturing circuit board, the
advantage and disadvantage of each method
12. Describe LIGA process. Give examples
13. What are the requirements for traditional microsystem technology
(MST)?
14. Describe some traditional manufacturing method that can be used in
microsystem technology.
15. Describe some nontraditional manufacturing methods and rapid
prototyping that can be used in microsystem technology?