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February 9, 2007
Contents:
Reading assignment:
Cite as: Jesús del Alamo, course materials for 6.720J Integrated Microelectronic Devices, Spring 2007.
MIT OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
6.720J/3.43J - Integrated Microelectronic Devices - Spring 2007 Lecture 3-2
Key questions
Cite as: Jesús del Alamo, course materials for 6.720J Integrated Microelectronic Devices, Spring 2007.
MIT OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
6.720J/3.43J - Integrated Microelectronic Devices - Spring 2007 Lecture 3-3
Cite as: Jesús del Alamo, course materials for 6.720J Integrated Microelectronic Devices, Spring 2007.
MIT OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
6.720J/3.43J - Integrated Microelectronic Devices - Spring 2007 Lecture 3-4
• Why?
gc(E-Ec)
no(E)
Ec E
EF Ec E
EF − Ec
no ∝ exp
kT
Cite as: Jesús del Alamo, course materials for 6.720J Integrated Microelectronic Devices, Spring 2007.
MIT OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
6.720J/3.43J - Integrated Microelectronic Devices - Spring 2007 Lecture 3-5
∞
no = Ec
no(E) dE
Then:
⎛
∗ ⎞3/2
√
2m ∞ E − Ec
no = 4π ⎝ 2de ⎠ Ec 1 + exp E−EF
dE
h kT
E − Ec EF − Ec
η= ηc =
kT kT
Then:
⎛
∗ ⎞3/2
∞
√
2m kT η
no = 4π ⎝ de2 ⎠ 0 1 + eη−ηc
dη
h
Cite as: Jesús del Alamo, course materials for 6.720J Integrated Microelectronic Devices, Spring 2007.
MIT OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
6.720J/3.43J - Integrated Microelectronic Devices - Spring 2007 Lecture 3-6
Define also:
⎛ ⎞
⎝
2πm∗dekT ⎠3/2
Nc = 2
h2
Then:
no = NcF1/2 (ηc)
with:
√
2 ∞ η
F1/2 (ηc) = √ 0 dη
π 1 + eη−ηc
Cite as: Jesús del Alamo, course materials for 6.720J Integrated Microelectronic Devices, Spring 2007.
MIT OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
6.720J/3.43J - Integrated Microelectronic Devices - Spring 2007 Lecture 3-7
1E+02
ex
1E+01
1E+00
1E-01 x3/2
1/2 (x)
1E-02
1E-03
1E-04
non-degenerate degenerate
1E-05
-10 -8 -6 -4 -2 0 2 4 6 8 10
x
EF − Ec
no = NcF1/2 (ηc) with ηc =
kT
Cite as: Jesús del Alamo, course materials for 6.720J Integrated Microelectronic Devices, Spring 2007.
MIT OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
6.720J/3.43J - Integrated Microelectronic Devices - Spring 2007 Lecture 3-8
� Non-degenerate regime
F1/2 (x
−1) ex
Then, if ηc
−1, or EC − EF kT , or no
Nc :
EF − Ec
no Nc exp
kT
f(E)
gc(E-Ec)
no(E)
Ec E
EF Ec E
Cite as: Jesús del Alamo, course materials for 6.720J Integrated Microelectronic Devices, Spring 2007.
MIT OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
6.720J/3.43J - Integrated Microelectronic Devices - Spring 2007 Lecture 3-9
� Degenerate regime
More complicated behavior of F1/2 (x) for high values of x (see Ad
vanced Topic AT2.3).
f(E)
gc(E-Ec)
no(E)
Ec EF E
degenerate
Will not deal with degenerate regime in 6.720 because it’s even more
complicated [see AT2.6 in notes]
Cite as: Jesús del Alamo, course materials for 6.720J Integrated Microelectronic Devices, Spring 2007.
MIT OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
6.720J/3.43J - Integrated Microelectronic Devices - Spring 2007 Lecture 3-10
• The closer EF is to the valence band edge, the more holes there
are in the valence band.
1-f(E)
gv(Ev-E)
po(E)
Ev E
Ev EF E
• If EF is not too close to the valence band edge, what is the rela
tionship between the location of EF and po?
Ev − EF
po ∝ exp
kT
Cite as: Jesús del Alamo, course materials for 6.720J Integrated Microelectronic Devices, Spring 2007.
MIT OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
6.720J/3.43J - Integrated Microelectronic Devices - Spring 2007 Lecture 3-11
E
v
po = p (E)dE
−∞ o
Ev − EF
ηv =
kT
⎛ ∗ 3/2 ⎞
2πm dh kT
Nv = 2 ⎝ ⎠
h2
Then:
po = Nv F1/2 (ηv )
Cite as: Jesús del Alamo, course materials for 6.720J Integrated Microelectronic Devices, Spring 2007.
MIT OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
6.720J/3.43J - Integrated Microelectronic Devices - Spring 2007 Lecture 3-12
gv(Ev-E) 1-f(E)
1-f(E)
gv(Ev-E)
po(E)
po(E)
Ev E
Ev EF E EF Ev E
non-degenerate degenerate
� Non-degenerate regime:
If ηv
−1, or EF − Ev kT , or po
Nv :
Ev − EF
po Nv exp
kT
� Degenerate regime:
If ηv 1, or Ev − EF kT , or po Nv , more complicated
dependence of po on EF .
Cite as: Jesús del Alamo, course materials for 6.720J Integrated Microelectronic Devices, Spring 2007.
MIT OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
6.720J/3.43J - Integrated Microelectronic Devices - Spring 2007 Lecture 3-13
log no, po
Nv
Nc
po
no
Ev Ec EF
Ec
Maxwell-Boltzmann for electrons
Maxwell-Boltzmann for holes
Ev
Cite as: Jesús del Alamo, course materials for 6.720J Integrated Microelectronic Devices, Spring 2007.
MIT OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
6.720J/3.43J - Integrated Microelectronic Devices - Spring 2007 Lecture 3-14
3. np product in equilibrium
Compute product:
Sketch:
nopo
ni2
Ev Ec EF
If EF is inside bandgap:
Eg
nopo Nc Nv exp −
kT
Cite as: Jesús del Alamo, course materials for 6.720J Integrated Microelectronic Devices, Spring 2007.
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6.720J/3.43J - Integrated Microelectronic Devices - Spring 2007 Lecture 3-15
√ √ Eg
ni = no po = NcNv exp −
2kT
• T ↑ ⇒ ni
• Eg ↑ ⇒ ni
• Nc ↑, Nv ↑ ⇒ ni
Cite as: Jesús del Alamo, course materials for 6.720J Integrated Microelectronic Devices, Spring 2007.
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6.720J/3.43J - Integrated Microelectronic Devices - Spring 2007 Lecture 3-16
� Intrinsic semiconductor
Require no = po ⇒
Ec + Ev Nv
Ei = + kT ln
2 Nc
Ec
Ei
Ev
Cite as: Jesús del Alamo, course materials for 6.720J Integrated Microelectronic Devices, Spring 2007.
MIT OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
6.720J/3.43J - Integrated Microelectronic Devices - Spring 2007 Lecture 3-17
ND
EF − Ec kT ln
Nc
non-degenerate degenerate
intrinsic extrinsic
Ec
EF
Ei
Ev
ni Nc log ND
Nv
EF − Ev kT ln
NA
Cite as: Jesús del Alamo, course materials for 6.720J Integrated Microelectronic Devices, Spring 2007.
MIT OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
6.720J/3.43J - Integrated Microelectronic Devices - Spring 2007 Lecture 3-18
Key conclusions
• Non-degenerate semiconductor: no
Nc and po
Nv : Maxwell-
Boltzmann statistics apply:
EF − Ec Ev − EF
no = Nc exp , po = Nv exp
kT kT
• Intrinsic semiconductor: ideally pure semiconductor. Under
M-B statistics:
√ Eg
no = po = ni = NcNv exp −
2kT
• In non-degenerate semiconductor nopo is a constant that only
depends on T :
nopo = n2i
Cite as: Jesús del Alamo, course materials for 6.720J Integrated Microelectronic Devices, Spring 2007.
MIT OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].