Zuo et al.

Light: Science & Applications (2022)11:74 Official journal of the CIOMP 2047-7538
https://doi.org/10.1038/s41377-022-00757-0 www.nature.com/lsa

CORRECTION Open Access

Correction: Deep learning in optical metrology:

a review
Chao Zuo , Jiaming Qian , Shijie Feng, Wei Yin , Yixuan Li, Pengfei Fan, Jing Han, Kemao Qian and Qian Chen

Correction to: Light: Science & Applications expressions in Fig. 1. Updated Fig. 1 is provided in this
https://doi.org/10.1038/s41377-022-00714-x, Correction.
published online 23 February 2022

Following publication of this article1, it is noticed

that some brackets are missing in the mathematical
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© The Author(s) 2022

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Zuo et al. Light: Science & Applications (2022)11:74 Page 2 of 3

Classical interferometry
Interferogram: I = AO2 + AR2 + AOARcos(O _ R )

Detector Object beam:

O = AO exp{iO}
Photoelasticity I
Imaging lens Reference beam:
2 2
Collimating Reference
IB = A + A cos(Δ) R = AR exp{iR}
Bright-field: system flat

Laser
Interference:
Dark-field: ID = A2 _ A2 cos(Δ) R O Spherical
Jones matrixes:
P,Q,J ,Q A is the amplitude of the polarized beams
surface
I = O +R
2
a
Beam splitter

Light vector: P
Q
1 J I Geometric moiré / moiré interferometry
E = PQJQ Q
0 ϕ
β
Analyzer
Interference:
Quarter-wave plate
θ Moiré fringe: I = A12 + A22 + 2A1 A2 cos(Δ)
ξ
I = E *E Sample x Illumination beam:
Light U1
Quarter-wave plate x y z -
source U1 = A exp{ik sinx}
Polarizer y b U2 = A exp{ ik sinx}
_
I Object (deformed) grating:
Holographic interferometry G = 1 + cos(k sinx + Δ)
Camera
2 Interference:
Double-exposure: I D = R (I1 + I 2 ) = 4AR4 AO2 + 4AR4 AO2 cos(Δ )  z _axis 2
c
U2 I = {U 1G +U 2G }
2
Real-time: I R = (O2 + R) I 1 = 4AR4 AO2 _ 4AR4 AO2 cos(Δ )
2
Time-averaged: 2 2 Digital holography
I =R OV + R d = 2AR4 AO2J 02 bv
(harmonic vibration) T 0 
Object beam: Beam expanding Interferogram: I = AO2 + AR2 + AO AR cos(′O _ R )
Mirror and collimating system Mirror
O1 = AO exp {i}
Mirror
O2 = AO exp {i ( + Δ)}
Beam Object beam:
2 splitter O = AO exp{iO′ }
OV = AO exp {i}exp {i b cos
t }
 v
I O′
Reference beam: may not be in-focus
R
Sample
R Reference beam:
R = AR exp {iR }
Laser Beam splitter O
Sample O R = AR exp{iR }
Interference:
I Laser
I 1 = O1 + R
2
I 2 = O2 + R
2
Detector d Beam Interference:
2
splitter
Objective I = O +R
Mirror
lens e
ESPI
Undeformed: I 1 = AO2 + AR2 + AO AR cos (O )
Shearography
Deformed: I 2 = AO2 + AR2 + 2AO AR cos(O + Δ )
2 2
Δ Δ Undeformed: I 1 = AO + AR + AO AR cos( x O )
Difference: I 1 _ I 2 = 4AO AR sin(O + ) sin ( )
2 2 2 2
Deformed: I 2 = AO + AR + 2AO AR cos( x O + x Δ)
Object beam:
Difference: I 1 _ I 2 = 4AO AR sin(x O + x Δ ) sin ( x Δ )
Plane  
O1 = AO exp{iO } mirror
2 2
Beam Laser
O2 = AO exp{i(O + Δ)}
expander
Reference beam: Object beam:
R = AR exp {iR } O1 = AO exp { i O }
Imaging
Beam Laser
Interference: lens I
expander O2 = AO exp {i ( + Δ)}
R
Detector
Detector

I 1 = O1 + R
2 Reference beam:
O
R1 = O1 (x + x , y )
I 2 = O2 + R
2
Deformation f Imaging
lens I R2 = O2(x + x,y)
Beam splitter
O Plane Interference:
Fringe projection / deflectometry R
mirror I 1 = O1 + R1
2

2
g
Deformation I 2 = O2 + R2
Plane mirror
Fringe image: I = A + B cos ()
DIC / stereo vision
Projected fringe: Measured Ambient Undeformed: I r (x , y ) (reference image)
object light Deformed: Id (x ,y ) = I r (x + Dx (x , y), y + Dy (x , y ))
I P = aP + bP cos( 2fP x P ) 1
x Sensor plane
Deformation
Captured fringe: y Dx (x , y ), Dy (x , y )

I = ( I P + 1) + 2 Reference subset

=  {a p + bp cos() + 1 } +  2  1 Deformed subset

IP I P Displacement vector field (DIC)
2
Average intensity: {Dx (x , y ), Dy (x , y )}
A = (aP + 1) + 2 Camera
Camera Disparity (stereo vision) i
Dx (x , y ) X-displacement only
Intensity modulation:
B = bp
Projector I = (IP + 1) + 2 Camera h
Zuo et al. Light: Science & Applications (2022)11:74 Page 3 of 3

The original article has been updated. Reference

1. Zuo, C. et al. Deep learning in optical metrology: a review. Light Sci. Appl. 11, 39,
https://doi.org/10.1038/s41377-022-00714-x (2022).