micromachines

Article
A Novel Stick-Slip Nanopositioning Stage Integrated
with a Flexure Hinge-Based Friction Force
Adjusting Structure
Junhui Zhu 1,† , Peng Pan 2,3,† , Yong Wang 1 , Sen Gu 4 , Rongan Zhai 1 , Ming Pang 5 ,
Xinyu Liu 2,3 and Changhai Ru 4,6, *
1 School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200444, China;
juviechu@shu.edu.cn (J.Z.); 15106201197@163.com (Y.W.); zra123@shu.edu.cn (R.Z.)
2 Department of Mechanical and Industrial Engineering, University of Toronto,
Toronto, ON M5S 3G8, Canada; peng.pan@mail.mcgill.ca (P.P.); xyliu@mie.utoronto.ca (X.L.)
3 Department of Mechanical Engineering, McGill University, Montreal, QC H3A 0C3, Canada
4 College of Mechanical and Electrical Engineering & Robotics and Microsystem Center, Soochow University,
Suzhou 215021, China; hwigusen2014@163.com
5 College of Automation, Harbin Engineering University, Harbin 150001, China; pangm@hrbeu.edu.cn
6 Micro-Nano Automation Institute, JITRI, Suzhou 215100, China
* Correspondence: rzh@suda.edu.cn
† Both authors contributed equally to this work.




Received: 10 July 2020; Accepted: 26 July 2020; Published: 11 August 2020


Abstract: The piezoelectrically-actuated stick-slip nanopositioning stage (PASSNS) has been applied
extensively, and many designs of PASSNSs have been developed. The friction force between the
stick-slip surfaces plays a critical role in successful movement of the stage, which influences the
load capacity, dynamic performance, and positioning accuracy of the PASSNS. Toward solving the
influence problems of friction force, this paper presents a novel stick-slip nanopositioning stage
where the flexure hinge-based friction force adjusting unit was employed. Numerical analysis
was conducted to estimate the static performance of the stage, a dynamic model was established,
and simulation analysis was performed to study the dynamic performance of the stage. Further,
a prototype was manufactured and a series of experiments were carried out to test the performance
of the stage. The results show that the maximum forward and backward movement speeds of the
stage are 1 and 0.7 mm/s, respectively, and the minimum forward and backward step displacements
are approximately 11 and 12 nm, respectively. Compared to the step displacement under no working
load, the forward and backward step displacements only increase by 6% and 8% with a working
load of 20 g, respectively. And the load capacity of the PASSNS in the vertical direction is about 72 g.
The experimental results confirm the feasibility of the proposed stage, and high accuracy, high speed,
and good robustness to varying loads were achieved. These results demonstrate the great potential of
the developed stage in many nanopositioning applications.

Keywords: piezoelectric actuation; stick-slip; nanopositioning; friction force; flexure hinge

1. Introduction
A positioning stage with nanometer resolution is widely used in many fields such as bioengineering,
nanomanipulation, and nanometrology [1–5]. In order to obtain nanometer resolution, a piezoelectric
actuator is often employed as the actuator of the positioning stage for its significant performance,
such as high frequency, nanometer resolution, and high energy density [6]. However, the travel range
of a piezoelectric actuator is quite small, which is only in the micrometer range. To meet the demand of

Micromachines 2020, 11, 765; doi:10.3390/mi11080765 www.mdpi.com/journal/micromachines

Micromachines 2020, 11, 765 2 of 14

long travel range and nanometer resolution at the same time, many techniques have been developed to
amplify or accumulate the displacement of the piezoelectric actuator, including the macro-micro dual
drive principle [7,8], the inchworm drive principle [9], a piezoelectric ultrasonic motor [10,11], and the
stick-slip drive principle [12,13]. Stages based on the macro-micro dual drive principle usually have
large dimensions, making them unable to be used in many applications of limited space [14]. The size
of an inchworm drive stage is also large, and it needs to be manufactured and assembled precisely [15].
As for the piezoelectric ultrasonic motor, its driving force is small, which limits its use in applications
where heavy loads are required [16]. Compared with them, stages developed by the stick-slip drive
principle not only have a compact structure, but also provide high resolution and long travel range [17],
which enables this kind of stage to be commonly employed in the scanning electron microscope (SEM).
Owing to its inherent excellent characteristics, the piezoelectrically-actuated stick-slip nanopositioning
stage (PASSNS) has been a hot research topic.
The stick-slip principle inertial motor was originally investigated by Yoshida et al. [18] and firstly
commercialized by Konica–Minolta, Japan [19]. They revealed the principle of the “stick & slip” motion.
The essence of the stick-slip principle is the friction force change between maximum static friction
force and sliding friction force [20,21]. As illustrated in Figure 1, the piezoelectric actuator pushes the
driving object forward and the slider keeps relatively static to the driving object when the driving
signal rises slowly from O to A. If the driving signal descends quickly from A to B, the driving object
will retract fast. This will result in a relative movement between driving object and slider, and the
slider almost remains static to the ground. In a circle of the driving signal, the slider will get a forward
displacement. If a continuous driving signal is applied to the piezoelectric actuator, the slider will
produce a large travel range. Obviously, the friction force is of quite importance for the successful
movement of a PASSNS.
Until now, many designs of PASSNSs have been developed. Zhang et al. utilized the stick-slip
principle to develop a stage including a horizontal movement and a rotary movement [22]. This stage
has a maximum speed of 7.2 mm/s and a maximum output force of 2.09 N. Rakotondrabe et al.
developed a stick-slip stage which is capable of moving at a maximum speed at 1.8 mm/s in the
horizontal direction, and has a step resolution of 70 nm and an angular resolution of 0.001◦ [23].
A systematic investigation and performance comparisons of different stick-slip and slip-slip modes
of operation were previously discussed in Hunstig M.’s research [24]. Criteria such as steady state
velocity, smoothness of motion, and start-up time were used for comparisons. Shimizu et al. utilized
the stick-slip principle and piezoelectric actuators to develop an XY positioning stage [25]. The stage
was capable of moving over a range of ±1 mm in both directions at a travel speed of 5 mm/s. In addition
to the extensive research on PASSNSs by scholars, some companies have issued related commercialized
products. For example, the 1-DOF linear positioning stage (Model SLC-1720), a classic product of
SmarAct GmbH, is designed based on the stick-slip driving principle; its maximum stroke is 12 mm,
the maximum resolution is 50 nm, the speed is more than 20 mm/s, the weight is only 13 g, and the size
is 22 × 17 × 8.5 mm3 [26]. The most representative 1-DOF stick-slip drive positioning stage of Attocube
System Inc. is the ANPx101 [27] with a size of 24 × 24 × 11 mm3 , a weight of 20 g, a position sensor
resolution of about 200 nm, a stroke of 5 mm, a speed that can reach 3 mm/s, and a maximum load
that can reach 1 N. The main characteristics of the proposed stages of these studies are summarized in
Table 1.
The PASSNSs reported in these literatures and some commercialized products research focuses
are different, they are more about the structural design and positioning performance of the stage
itself. There are literature reports on friction adjustment mechanisms and methods [28–30], such as
mechanical tolerance fit, permanent magnet preloading, and upper and lower springs preloading,
but these friction adjustment methods are more complex, which will restrict the friction adjustment.
At the same time, these friction adjustment methods have higher requirements on the machining
accuracy of the friction interface, which leads to higher requirements on the machining and assembly
accuracy of the PASSNS, and ultimately affects the positioning performance of the stage. Although
 /Commercial Dimension & Travel Maximum Maximum
Resolution
Company Weight Range Speed Output Force
Zhang et.al 2006 - - 26 nm, 0.019° 7.2 mm/s 2.09 N
50 mm, 1.8 mm/s,
Rakotondrade et al. 20 × 20 × 20 mm3 70 nm, 0.001° 150 mN
Micromachines 2020, 11, 765 360° 20°/s 3 of 14
Shimizu et al. 24 × 24 × 5 mm3 2 mm 10 nm 60 mN 5 mm/s
SmarAct GmbH 22 × 17 × 8.5 1 nm (OL) 50 nm
12 mm >20 mm/s 10 N
many PASSNSs have been
(SLC-1720) mm3developed,
, 13 g there still exist (CL)
many problems such as low working load,
step displacement
Attocube Inc. sensitive to mm
24 × 24 × 11 the 3,load change, hard to obtain vertical movement, poor dynamic
5 mm 200 nm 3 mm/s 1N
performance,
(ANPx101)and so on. 20 g

The PASSNSsTable 1. Main

reported in characteristics
these literatures of the
and developed stages of previous
some commercialized studies. research focuses
products
are different, they are more about the structural design and positioning performance of the stage
Main Characteristics of the Developed Stages
Researchers
itself. There are
/Commercial literature reports on friction adjustment mechanisms and methods [28–30], such as
Maximum Maximum
mechanical tolerance fit,
Company Dimension
permanent & Weight
magnetTravel Range
preloading, andResolution
upper and lower springsOutput
preloading,
Speed Force
but these
Zhangfriction
et.al 2006adjustment methods - are more complex,
- which will◦restrict7.2the
26 nm, 0.019 friction adjustment.
mm/s 2.09 N
mm, 360◦ have ◦ ◦ /s
At the same time,
Rakotondrade et al.these20friction mm3
× 20 × 20adjustment 50methods 70 higher
nm, 0.001requirements
1.8 mm/s, 20on the machining
150 mN
Shimizu et al. 3 2 mm 10 nm
× 24 × 5 mmwhich leads to higher requirements on the machining 5 mm/s 60 mN
accuracy of the friction24interface, and
SmarAct GmbH 1 nm (OL)
assembly 22 × 17 × 8.5 mm 3 , 13 g
accuracy of the PASSNS, and ultimately affects the 12 mm positioning >20 mm/s 10
performance of the stage. N
(SLC-1720) 50 nm (CL)
Although many
Attocube Inc. PASSNSs have been 3
24 × 24 × 11 mm , 20 g developed,
5 mm there still exist
200 nm many 3problems
mm/s such1 N as low
(ANPx101)
working load, step displacement sensitive to the load change, hard to obtain vertical movement,
poor dynamic performance, and so on.
In order to
In to realize
realizethethemovement
movement positioning
positioning withwith
nanoscale
nanoscale positioning performance
positioning and strong
performance and
robustness to load change, a novel PASSNS integrated with a flexure hinge-based
strong robustness to load change, a novel PASSNS integrated with a flexure hinge-based friction friction force adjusting
structure
force was developed.
adjusting structure Inwasaddition, we built
developed. Ina addition,
general dynamic
we built model and performed
a general dynamic a simulation
model and to
analyze theainfluence
performed simulation of various
to analyze parameters on the of
the influence performance of the stage.
various parameters onFinally, experiments
the performance ofwere
the
conducted
stage. on aexperiments
Finally, prototype of werethe developed
conducted PASSNS. High accuracy,
on a prototype of the high speed, large
developed load capacity,
PASSNS. High
and largehigh
accuracy, travel rangelarge
speed, wereload
achieved,
capacity,which
anddemonstrates that this
large travel range werestage has significant
achieved, performance
which demonstrates
andthis
that potential in many
stage has applications.
significant performance and potential in many applications.

Figure 1. (a) Principle of stick-slip driving; (b) conventional driving signal. Reproduced with permission
Figure 1. (a) Principle of stick-slip driving; (b) conventional driving signal.
from [31].

2. Design and Analysis

2.1. Design of the Piezoelectrically-Actuated Stick-Slip Nanopositioning Stage (PASSNS)

The structure of the designed PASSNS is illustrated in Figure 2. It can be clearly seen that the
stage mainly consists of a driving unit, a moving unit, and an adjusting unit. In this design, the cross
roller guide rail is recognized as the slider. The driving unit includes a piezoelectric actuator and
flexure hinges A; the unit is used to preload. The moving unit includes flexure hinges B; the unit is
2.1. Design of the Piezoelectrically-Actuated Stick-Slip Nanopositioning Stage (PASSNS)
The structure of the designed PASSNS is illustrated in Figure 2. It can be clearly seen that the
stage mainly consists of a driving unit, a moving unit, and an adjusting unit. In this design, the cross
Micromachines 2020, 11, 765 4 of 14
roller guide rail is recognized as the slider. The driving unit includes a piezoelectric actuator and
flexure hinges A; the unit is used to preload. The moving unit includes flexure hinges B; the unit is
used to
used to transfer
transfer thethe displacement
displacement of the the actuator,
actuator, aa mass
mass block,
block, and a set of cross roller guide rails.
The adjusting
The adjusting unitunit has
has aa flexure
flexure hinge
hinge structure
structure linked
linked to
to the
the mass
mass block
block and
and one
one bolt
bolt to
to change
change
deformation of
deformation of the
the flexure
flexure hinges
hinges above
above thethemass
massblock.
block. This
This flexure
flexure hinge
hinge structure
structure possesses
possesses aa
friction block
friction block and flexure hinges hinges C. C. Friction
Frictionforce
forcebetween
betweenthe thefriction
frictionblock
blockand andthe
theguide
guiderail can
rail canbe
adjusted
be adjusted bybyscrewing
screwing thethe
bolt
bolttotochange
changethe thedeformation
deformationofofthe the flexure
flexure hinges
hinges C. This bolt bolt goes
goes
through the
through the threaded
threaded holehole manufactured
manufactured at at the
the center
center of
of the
the mass
mass block
block to
to ensure
ensure that
that supporting
supporting
forceisisapplied
force appliedtotothe the center
center of of
thethe flexure
flexure hinges
hinges C.the
C. As As deformation
the deformation of theofflexure
the flexure
hinge hinge is a
is a result
result
of of the distance
the distance that thethat
boltthe
goesbolt goesitinside,
inside, will not it change
will notwhen
changethewhen the load
working working load In
changes. changes.
addition, In
addition,
the working theload
working load to
compared compared
the positiveto the positive
pressure pressure
between between
friction blockfriction
and guideblockrailand guide
is very rail
small,
is very
thus small,
when thethus
loadwhen the load
changes, changes,
the step the step displacement
displacement will not change. will not
Thischange.
provides Thistheprovides
developed the
developed
PASSNS an PASSNS
ability toan be ability
robust toto be robustload.
varying to varying load.

Figure 2. (a) Schematic of the developed stick-slip positioning stage. Reproduced with permission
Figure 2. (a) Schematic of the developed stick-slip positioning stage; (b) zoom in on the different
from [31]; (b) zoom in on the different hinges (A, B, C).
hinges (A, B, C).
2.2. Design of Friction Force Adjustment Structure
2.2. Design of Friction Force Adjustment Structure
As mentioned above, friction force is the key to successful movement of the PASSNS. To enable
As mentioned
the stick-slip above, friction
nanopositioning stageforce is the
to move inkey
bothtohorizontal
successfulandmovement
vertical of the PASSNS.
directions, To enable
it is necessary
theadjust
to stick-slip nanopositioning
the friction force betweenstage the
to move in both
driving horizontal
object and vertical
and the slider. As thedirections,
flexure hinge it is necessary
provides
to adjust the friction force between the driving object and the slider. As the
many advantages over conventional joints such as being monolithic with the rest of the mechanism, flexure hinge provides
many advantages over conventional joints such as being monolithic with the rest
there is no need for lubrication, no backlash, and compactness [32]; it is employed to uniformly adjust of the mechanism,
there isforce
friction no need for lubrication,
between no backlash,
the driving object and sliderandwith
compactness [31]; itwith
a bolt in contact is employed
its center. to uniformly
A schematic
adjust friction force between the driving object and slider with a bolt in contact
of the flexure hinge structure C is shown in Figure 2; it is used to adjust friction force, as shown with its center.inA
schematic
Figure of the
3. This flexureconsists
structure hinge structure C is showncorner-filleted
of two symmetric in Figure 2; itflexure
is usedhinges.
to adjust friction
When the force, as
bolt for
shown in Figure 3. This structure consists of two symmetric corner-filleted flexure
adjusting friction force is screwed upwards, flexure hinges C will deform symmetrically as shown in hinges. When the
bolt for3b.
Figure adjusting
Finally, friction forceforce
the friction is screwed
between upwards,
these two flexure
partshinges C will accordingly.
will increase deform symmetrically
The flexureas
shown in Figure
hinge-based 3 b.force
friction Finally, the friction
adjusting forceisbetween
structure made bythese two parts
integrated will increasethe
manufacturing, accordingly. The
structure and
adjustment method are simple, easy to manufacture and assemble, and the assembly error is reduced.
Micromachines 2020, 11, x 5 of 15

flexure hinge-based friction force adjusting structure is made by integrated manufacturing, the
Micromachines
structure and2020, 11, 765
adjustment 5 of 14
method are simple, easy to manufacture and assemble, and the assembly
error is reduced.

Schematic
Figure3.3.Schematic
Figure ofof
thethe flexure
flexure hinges
hinges to adjust
to adjust friction
friction force:
force: (a) structure
(a) the the structure of flexure
of flexure hinge;
hinge; (b)
(b) force diagram of the flexure
force diagram of the flexure hinge. hinge. Reproduced with permission from [31].

2.3. Determination of Flexure Hinge Size

2.3. Determination of Flexure Hinge Size
When designing the flexure hinge, the effect of the flexure hinge’s stiffness on the resonance
When designing the flexure hinge, the effect of the flexure hinge’s stiffness on the resonance
frequency of the PASSNS should be taken into consideration. If the stiffness of the flexure hinge is large,
frequency of the PASSNS should be taken into consideration. If the stiffness of the flexure hinge is
the dynamic performance of the stage will be good. However, if the stiffness is too large, the flexure
large, the dynamic performance of the stage will be good. However, if the stiffness is too large, the
hinge under a small deformation will endure a large stress in the root of the flexure hinge. To avoid
flexure hinge under a small deformation will endure a large stress in the root of the flexure hinge. To
structure failure and poor dynamic performance of the stage, stiffness of the stage should be reasonable.
avoid structure failure and poor dynamic performance of the stage, stiffness of the stage should be
Stiffness of the flexure hinge structure along vertical direction is described as K which is calculated as:
reasonable. Stiffness of the flexure hinge structure along vertical direction is described as K which is
calculated as: F 2th3 E
K= = 3
(1)
w
F 2thL3 E
K= = 3 (1)
where t is the width of the single corner-filletedwflexureL hinge, L is the length, and h is the thickness of
the single flexure hinge. E is the elastic modulus of material. To obtain proper dimensions of flexure
where t is the width of the single corner-filleted flexure hinge, L is the length, and h is the thickness
hinges, a flow chart has been developed, shown in Figure 4. As 7075-T651 aluminum (Young’s modulus
of the single flexure 2hinge. E is the elastic modulus of material. To obtain proper dimensions of
value: 71 × 109 N/m ; Poisson’s ratio: 0.33) has many advantages like small density, good abrasion
flexure hinges, a flow chart has been developed, shown in Figure 4. As 7075-T651 aluminum
performance, and high strength, it was used as the material to manufacture the proposed PASSNS.
(Young’s modulus value: 71 × 109 N/m2; Poisson’s ratio: 0.33) has many advantages like small
To conduct finite element analysis (FEA) by ANSYS, the 10-node solid 92 tetrahedron element was
density, good abrasion performance, and high strength, it was used as the material to manufacture
used. Finally, the dimensions of the flexure hinge B were set to be 4 mm long, 4 mm wide and 0.6 mm
the proposed PASSNS. To conduct finite element analysis (FEA) by ANSYS, the 10-node solid 92
thick and the flexure of C was designed to be 1.5 mm (length) × 4 mm (width) × 0.4 mm (thickness).
tetrahedron element was used. Finally, the dimensions of the flexure hinge B were set to be 4 mm
The stiffness of flexure hinge B was calculated by the formula and was 3.888 N/µm; the stiffness obtained
long, 4 mm wide and 0.6 mm thick and the flexure of C was designed to be 1.5 mm (length) × 4 mm
from the FEA was 3.777 N/µm. The error between theoretical stiffness and simulation stiffness was
(width) × 0.4 mm (thickness). The stiffness of flexure hinge B was calculated by the formula and was
2.83%, which proved validity of the stiffness formula. In addition, when the flexure hinge experienced
3.888 N/μm; the stiffness obtained from the FEA was 3.777 N/μm. The error between theoretical
10 µm deformation, maximum stress in the root of the flexure hinge was calculated to be 36.2 Mpa,
stiffness and simulation stiffness was 2.83%, which proved validity of the stiffness formula. In
which is far less than the yield stress of 7075-T651 aluminum of 505 Mpa. The stiffness of the flexure
addition, when the flexure hinge experienced 10 μm deformation, maximum stress in the root of the
hinge C was calculated to be 10.771 N/µm. When a 100 N force was applied to the flexure hinge C,
flexure hinge was calculated to be 36.2 Mpa, which is far less than the yield stress of 7075-T651
maximum stress was calculated to be 351.5 Mpa, which is also less than the yield stress of the 7075-T651
aluminum of 505 Mpa. The stiffness of the flexure hinge C was calculated to be 10.771 N/μm. When a
aluminum. According to the FEA results, we obtained first order natural frequency of this stage base
100 N force was applied to the flexure hinge C, maximum stress was calculated to be 351.5 Mpa,
which was 10 kHz, as is shown in Figure 5. Thus, the frequency of the driving signal applied to the
which is also less than the yield stress of the 7075-T651 aluminum. According to the FEA results, we
piezoelectric actuator should be below 10 kHz. The main characteristic parameters of the A, B, C
obtained first order natural frequency of this stage base which was 10 kHz, as is shown in Figure 5.
hinges are summarized in Table 2.
Thus, the frequency of the driving signal applied to the piezoelectric actuator should be below 10
kHz. The main characteristic parameters of the A, B, C hinges are summarized in Table 2.
 FEA
FEASimulation
Simulation
Theoretical
TheoreticalStiffness
Stiffness Maximum
MaximumStress
Stress
Hinges
Hinges LL(mm)
(mm) hh(mm)
(mm) TT(mm)
(mm) Stiffness
Stiffness
(N/μm)
(N/μm) (Mpa)
(Mpa)
(N/μm)
(N/μm)
AA 14
14 44 0.6
0.6 N/A
N/A N/A
N/A N/A
N/A
BB 44 4 0.6 3.888 3.777 36.2
Micromachines 2020, 11, 765 4 0.6 3.888 3.777 36.2 6 of 14
CC 1.5
1.5 44 0.4
0.4 10.771
10.771 10.652
10.652 351.5
351.5

Figure
Figure 4. Flow chart 4.4.Flow
to design
Figure chart
chartto
dimensions
Flow design
toof dimensions
the flexure
design hinge. of
dimensions ofthe
theflexure
Reproduced hinge.
flexurewith permission from [31].
hinge.

Figure
Figure5.
Figure 5.5.First
Firstorder
First ordernatural
order naturalfrequency
natural frequencyof
frequency ofthe
of thestage
the stagebase.
stage base.
base.

2.4. 2. Characteristic parameters

Table Simulation of the A, B, C hinges. FEA = finite element analysis.
2.4.Analysis
Analysisand
and Simulationofofthe
thePASSNS
PASSNS
To FEA Simulation
Tostudy
studyLthe
Hinges theeffect
(mm)effect of
ofdifferent
h (mm) different parameters on the
Theoretical performance
Stiffness
T (mm)parameters on the performance
of
ofthe
thePASSNS,
Stiffness
ititisisnecessary
Maximum
PASSNS, Stress
necessaryto
to
establish the dynamic model. As shown in (N/µm)
Figure 1, in the driving phase, the piezo (Mpa)
stack actuator
establish the dynamic model. As shown in Figure 1, in the driving phase, the piezo stack actuator
(N/µm)
outputs
outputsAdisplacement
displacement
14 when
when
4 the driving
drivingsignal
the0.6 signalis
isapplied.
N/A applied.Then,
Then,the
the displacement
N/Adisplacementisistransferred
transferredto
N/A to
B 4 4 0.6 3.888 3.777 36.2
C 1.5 4 0.4 10.771 10.652 351.5

2.4. Analysis and Simulation of the PASSNS

To study the effect of different parameters on the performance of the PASSNS, it is necessary to
establish the dynamic model. As shown in Figure 1, in the driving phase, the piezo stack actuator
 Micromachines 2020, 11, 765 7 of 14
Micromachines2020,
Micromachines 2020,11,
11,xx 77ofof15
15

the
the massdisplacement
mass
outputs blockthrough
block through theflexure
the
when flexure hinge
hinge
the driving B.B.Finally,
signal Finally, forward/backward
forward/backward
is applied. Then, the displacement motionof
motion ofisthe
the movingguide
moving
transferred guide
to the
rail
rail
mass will
will be obtained
be obtained
block through
through through
the flexure the switch
thehinge of dynamic
switchB.ofFinally,
dynamic and static friction
and static friction
forward/backward force between
force between
motion of the moving the mass
the mass guide block
blockrail
and
and guide
guide rails.
rails. Thus,
Thus, the
the whole
whole dynamic
dynamic model
model of
of the
the stage
stage can
can
will be obtained through the switch of dynamic and static friction force between the mass block and bebe divided
divided into
into three
three separate
separate
models,
models, which
which
guide rails. arethe
are
Thus, theelectric
the electricdynamic
whole modelof
model ofmodel
thepiezo
the piezo stack
stack
of the stage actuator,
actuator,
can bethe the driving
driving
divided and
and
into transmission
transmission
three separate models, model
model
of piezo
of piezo
which arestack
stack actuator
actuator
the electric and mass
and
model mass
of block,stack
theblock,
piezo and the
and the stick-slip
stick-slip
actuator, transmission
transmission
the driving model between
model
and transmission between
model the
the mass
of mass
piezo
block
block and
and guide
guide rails,
rails, as
as shown
shown in
in Figure
Figure 6.
6. If
If there
there exists
exists aa tilting
tilting
stack actuator and mass block, and the stick-slip transmission model between the mass block and angle
angle θ,θ, gravity
gravity ofof the
the moving
moving
guide
guide railhas
guiderail
rails,has alarge
largein
as ashown influence
influence
Figure 6.on on themovement
Ifthe
theremovement ofthe
of
exists a tilting the stage
stage
angle and
θ,and ititshould
gravity should
of thebe beconsidered.
considered.
moving guide rail Inthe
In the
has
whole
whole dynamic
a largedynamic model,
influencemodel,
on thethe the piezostack
piezo
movement stack actuator
actuator
of the stage and isisplaced
placed
it should onthe
on theconsidered.
be leftside
left sideofofthe
thethe
In mass
mass whole block.
block. IfIfthe
dynamic the
signal
signal in
in Figure
Figure 1b
1b is
is applied
applied to
to the
the piezo
piezo stack
stack actuator,
actuator, the
the moving
moving guide
guide
model, the piezo stack actuator is placed on the left side of the mass block. If the signal in Figure 1b is rail
rail may
may move
move forward
forward
continuously.
continuously.
applied to theTo Todescribe
piezo describe thefriction
the
stack actuator,friction forceprecisely,
the force
moving precisely,
guide rail the
themay LuGre
LuGre
move friction
friction
forward model
model [32]has
[32]
continuously. hasbeen
been
To used.
used.
describe
After
After analysis
analysis
the friction ofeach
of
force eachmodel,
model,
precisely, thewewe
LuGre obtain
obtain thetransfer
the
friction transfer
model [33] functions
functions
has been ofeach
of eachmodel.
used. model. Basedon
Based
After analysis on the
ofthe
each transfer
transfer
model,
functions
functions
we obtainof of each
theeach model,
model,
transfer we
we have
functions have
of each established
established
model. Based a simulation
a simulation model,
model,functions
on the transfer presented
presented in Figure
in Figure
of each model,7,we 7, using
using
have
MATLAB.
MATLAB.
established a simulation model, presented in Figure 7, using MATLAB.

Figure
Figure6.6.
Figure Dynamic
6.Dynamic model
modelofof
Dynamicmodel the
ofthe PASSNS.
thePASSNS.
PASSNS.

Figure 7. SimulationFigure
model the PASSNS. model
Reproduced with permission from [31].
Figure 7.7.Simulation
Simulation thePASSNS.
model the PASSNS.

Using the
Using the simulation
simulation model,
model, the
the effects
effects of
of some
some parameters
parameters on on the
the performance
performance of of the
the
PASSNS’s movement can be studied. The systematic study of the PASSNS is
PASSNS’s movement can be studied. The systematic study of the PASSNS is mainly performed in mainly performed in
thecase
the casethat
thatthe
thestage
stageisisplaced
placedhorizontally.
horizontally.InInthis
thiscase,
case,the
thetilting
tiltingangle
angleisis00degree.
degree.At
Atfirst,
first,the
the
parameter of total mass of the mass block and adjusting unit is studied, and the simulation result isis
parameter of total mass of the mass block and adjusting unit is studied, and the simulation result
shownin
shown inthe
theFigure
Figure8.8.From
Fromthis
thissimulation
simulationresult,
result,wewecan
cansee
seethat
thatthe
theaverage
averagestep
stepdisplacements
displacements
Micromachines 2020, 11, 765 8 of 14

Using the simulation model, the effects of some parameters on the performance of the PASSNS’s
movement can be studied. The systematic study of the PASSNS is mainly performed in the case that
the stage is placed horizontally. In this case, the tilting angle is 0 degree. At first, the parameter of
total mass of
Micromachines 2020,the11,mass
x block and adjusting unit is studied, and the simulation result is shown in 8 ofthe
15
Micromachines 2020, 11, x 8 of 15
Figure 8. From this simulation result, we can see that the average step displacements are about 1.55 and
1.3
are about
are about
µm, respectively,
1.55and
1.55 and1.31.3when
μm, the total mass
μm,respectively,
respectively, when of the
when theadjusting
the totalmass
total mass unit and
ofofthe mass block
theadjusting
adjusting are
unit
unit 0.025
and
and mass
mass and 0.25
block
block kg,
are
are
respectively,
0.025 and 0.25 with
kg, a decrease
respectively, rate of
with about
a 16.13%.
decrease rate Inofaddition,
about the
16.13%.
0.025 and 0.25 kg, respectively, with a decrease rate of about 16.13%. In addition, the displacement displacement
In addition, curve
the of the mass
displacement
block of
curve
curve vibrates
of the
the mass obviously
mass block from the
block vibrates
vibrates time between
obviously
obviously fromthe
from 0.021
thetime
timeand 0.028 s,0.021
between
between and and
0.021 between
and0.028
0.0280.043
s,s,andand
and 0.048 s,
between
between
when
0.043 the
and total
0.048 mass
s, whenincreases
the totalto 0.25
mass kg. To
increasesensure
to the
0.25 system
kg. To is stable
ensure the
0.043 and 0.048 s, when the total mass increases to 0.25 kg. To ensure the system is stable and the step and
systemthe step
is displacement
stable and the step is
as large as
displacement possible,
is as the
large total
as mass
possible, of the
the mass
total block
mass ofand
the adjusting
mass block
displacement is as large as possible, the total mass of the mass block and adjusting unit should be unit
and should be
adjusting smaller
unit than
should the
be
mass ofthan
smaller
smaller the guide
than themass
the rails.
mass In
theour
ofthe
of work,
guide
guide the
rails.
rails. Intotal
In mass the
ourwork,
our work, of
thethe mass
total
total mass
mass block ismass
ofofthe
the about 0.855isis
massblock
block gabout
and
aboutthe mass
0.855
0.855 gg
and the mass of the guide rails is about 7.1 g. The employment of the flexure hinge as an adjustingit
of
andthe
theguide
mass rails
of is
the about
guide 7.1
railsg. The
is employment
about 7.1 g. The of the
employmentflexure hinge
of the as an
flexure adjusting
hinge as unit
an makes
adjusting
possible,
unit
unit makes
makes asititthe flexureas
possible,
possible, hinges
as provide
theflexure
the flexure many
hinges
hinges advantages
provide
provide many
many such as beingsuch
advantages
advantages monolithic
such asasbeing
beingwith the rest with
monolithic
monolithic ofwith
the
mechanism,
the
the rest of
rest theno
of the backlash, and
mechanism,
mechanism, compactness.
nobacklash,
no backlash,and andcompactness.
compactness.

(a)
(a) (b)
(b)
Figure 8.8. Simulation
Figure Simulation results
Simulationresults of
resultsof displacement
ofdisplacement under
displacementunder different
underdifferent total
differenttotal massofofadjusting
totalmass adjustingunit
unitand
andmass
mass
block:(a)
block: (a) total
(a)total mass
totalmass of0.025
massof 0.025kg;
kg;(b)
(b)total
totalmass
massofof0.25
0.25kg.
kg.

As known to
As known to all,
all,the
themovement
movementof
movement ofthe
of thePASSNS
the PASSNS
PASSNS relies onon
relies
relies friction
on force.
friction
friction Conventionally,
force.
force. Conventionally,
Conventionally, when
when
when the
working
the load
the working
working loadchanges,
load changes,
changes, thethe
friction
the force
friction
friction between
force
force betweenthe
between thedriving
the drivingobject
driving objectand
object the
andthe slider
theslider will
sliderwill change
willchange
accordingly. From
accordingly. Fromthe
From thesimulation
the simulationresults
simulation resultsasasshown
results shownininFigure
shown Figure9,9,wewecancansee
seethat
thatininthe
theconventional
conventional
stage design,
stage design,thethestep displacementwill
stepdisplacement willchange
changebyby17.11%
17.11%from
from
from3.83.8
3.8toto4.45
4.45 µm
4.45μm with
μmwith increasing
withincreasing load.
increasingload.
load.

(a)
(a) (b)
(b)
Figure9.
Figure
Figure 9. Simulationresults
9.Simulation
Simulation resultsof
results ofdisplacement
of displacementunder
displacement underdifferent
under differentworking
different working load:
workingload: (a)0.032
load:(a)
(a) 0.032kg;
0.032 kg;(b)
kg; (b)0.064
(b) 0.064kg.
0.064 kg.
kg.
electro-discharging machining with a resolution better than 0.5 mm. The piezoelectric actuator
(PANT, PTJ1500303051) can provide a maximum displacement of 5 μm under 150 V applied voltage
and the maximum output force it provides is 150 N. The cross-roller guide (GMT, GRV01-30)
provides a maximum stroke of 21 mm. The material of the stage base is 7075-T651 aluminum and the
Micromachines
overall size 2020, 11, whole
of this 765 stage is 24 mm (length) × 12 mm (height) × 30 mm (width). 9 of 14

The experimental system was established to characterize the performance of the proposed
PASSNS, as shown
3. Experimental in the Figure 10b. In the experimental setup, an NI PCI-6221 DAQ card
Results
integrated into the PC was used to generate signals (e.g., conventional and modified sawtooth). A
powerA amplifier
prototype(BOSHI)
of the amplified
proposed the PASSNS,
signalsasto shown
drive thein piezoelectric
Figure 10a, actuator.
was fabricated by using
Displacement of
the horizontal positioning stage was measured by a Polytec laser vibrometer, as shown in (PANT,
electro-discharging machining with a resolution better than 0.5 mm. The piezoelectric actuator Figure
PTJ1500303051)
10b, can provide
and displacement of theavertical
maximum displacement
positioning stage of 5 µm
was under 150
measured by aVnoncontact
applied voltage and the
and compact
maximum output force it provides is 150 N. The cross-roller guide (GMT, GRV01-30)
laser distance sensor (KEYENCE, LKG3000 Series), which is mounted on a base placed on an provides a maximum
stroke of 21 mm.
anti-vibration TheThe
table. material of the stage
experimental base
data is 7075-T651
measured aluminum
by the Polytecand the
laser overall sizeorofKEYENCE
vibrometer this whole
stage collected
were is 24 mm into the ×
(length) 12 mm (height)
LabVIEW × 30
software of mm (width). through the NI PCI-6221 DAQ card.
the computer

(a) (b)
10. (a)10.
FigureFigure Constructed stage.stage;
(a) Constructed Reproduced with permission
(b) experimental systemfrom [31]; (b) experimental
for performance system for
measurement.
performance measurement.
Before testing the performance of the PASSNS, we adjusted the friction force between the
Theblock
friction experimental
and guidesystemrailwas
to established
enable the to characterize
stage to movethesuccessfully.
performanceWhen of the proposed PASSNS,
the conventional
as shown in
sawtooth the Figure
driving signal,10b. In the
with the experimental
frequency of setup, an NI
6 Hz and PCI-6221of
amplitude DAQ
80 V,card
wasintegrated
applied tointo the the
drive PC
was used to generate signals (e.g., conventional and modified sawtooth). A power
PASSNS forwards and backwards, displacements of the stage in two directions, respectively, were amplifier (BOSHI)
amplified After
obtained. the signals to drive
calculation, thethe piezoelectric
average forward actuator. Displacement
and backward of the horizontal
step displacements werepositioning
measured
stage was measured by a Polytec laser vibrometer, as shown in Figure 10b, and displacement
to be 2.27 and 1.36 μm, respectively. The step displacements in opposite directions are different ofdue
the
vertical positioning stage was measured by a noncontact and compact laser distance sensor
to the nonuniform roughness of the surface between the guide rails and the friction block. If it can (KEYENCE,
LKG3000
be Series),
improved, the which is mounted onina base
step displacements placed
opposite on an anti-vibration
directions table.
will be closer. The experimental
To quantify data
the precision
measured by the Polytec laser vibrometer or KEYENCE were collected into
of step displacement, we obtained 20 continuous upward and downward step displacements, the LabVIEW software of
the computer through the NI PCI-6221 DAQ card.
respectively, shown in Figure 11. Positioning accuracy for upward and downward step
Before testing
displacements werethe performance
calculated to beof0.09
theand
PASSNS, werespectively.
0.1 μm, adjusted the This
friction forcethat
shows between the friction
the PASSNS can
block and guide rail to enable the
provide relatively high positioning accuracy. stage to move successfully. When the conventional sawtooth
driving signal, with the frequency of 6 Hz and amplitude of 80 V, was applied to drive the PASSNS
forwards and backwards, displacements of the stage in two directions, respectively, were obtained.
After calculation, the average forward and backward step displacements were measured to be 2.27 and
1.36 µm, respectively. The step displacements in opposite directions are different due to the nonuniform
roughness of the surface between the guide rails and the friction block. If it can be improved, the step
displacements in opposite directions will be closer. To quantify the precision of step displacement,
we obtained 20 continuous upward and downward step displacements, respectively, shown in Figure 11.
Positioning accuracy for upward and downward step displacements were calculated to be 0.09 and
0.1 µm, respectively. This shows that the PASSNS can provide relatively high positioning accuracy.
In the following experiments, the maximum speed of the PASSNS has been tested with no
working load. After a series of experiments, we found when the frequency of the conventional
sawtooth driving signal reaches 600 Hz, forward and backward movement of stage is the fastest.
The displacement of the stage is plotted in Figure 12; here the amplitude of the applied driving signal
is 80 V. Finally, the maximum speeds of the forward and backward movements were measured to be
1.00 and 0.70 mm/s, respectively.
Micromachines 2020, 11, 765 10 of 14
Micromachines 2020, 11, x 10 of 15

Figure 11.Forward
Figure11. Forwardand
andbackward
backwardmovement
movementofofthe
thePASNS
PASNSunder
undera aconventional
conventionalsawtooth
sawtoothdriving
driving
signal:
signal: (a) forward movement; (b) backward movement; (c) 20 continuous displacements;
(a) forward movement; (b) backward movement; (c) 20 continuous forward step forward step
and (d) 20 continuous backward step displacements.
displacements; and (d) 20 continuous backward step displacements.

After that, the minimum step displacement of forward and backward movement of the PASSNS
In the following experiments, the maximum speed of the PASSNS has been tested with no
was studied. When the amplitude and cycle of the driving signal are set to be 4.5 V and 60 ms (each cycle
working load. After a series of experiments, we found when the frequency of the conventional
is divided into two parts, one of which is 35 ms and another one is 25 ms), respectively, the minimum
sawtooth driving signal reaches 600 Hz, forward and backward movement of stage is the fastest.
step displacement can be obtained accordingly. As there exists measurement noise, we measured
The displacement of the stage is plotted in Figure 12; here the amplitude of the applied driving
50 continuous step displacements and calculated the average value with standard deviation of 0.002 µm
signal is 80 V. Finally, the maximum speeds of the forward and backward movements were
as the minimum step displacement. As shown in Figure 13a, the total displacement of 50 continuous
measured to be 1.00 and 0.70 mm/s, respectively.
forward movements is calculated to be 0.55 µm. Thus, after calculation, the minimum forward step
displacement is around 11.00 nm. For the backward movement, the minimum step displacement is
measured to be 12.00 nm.
Micromachines 2020, 11, 765 11 of 14
Micromachines 2020, 11, x 11 of 15

Figure 12. Forward and backward displacements of the PASSNS under the driving signal.

After that, the minimum step displacement of forward and backward movement of the
PASSNS was studied. When the amplitude and cycle of the driving signal are set to be 4.5 V and 60
ms (each cycle is divided into two parts, one of which is 35 ms and another one is 25 ms),
respectively, the minimum step displacement can be obtained accordingly. As there exists
measurement noise, we measured 50 continuous step displacements and calculated the average
value with standard deviation of 0.002 μm as the minimum step displacement. As shown in Figure
13a, the total displacement of 50 continuous forward movements is calculated to be 0.55 μm. Thus,
after calculation, the minimum forward step displacement is around 11.00 nm. For the backward
movement, the minimum step displacement is measured to be 12.00 nm.
Figure 12. Forward
Figure12. Forwardand
andbackward
backwarddisplacements
displacementsof
ofthe
thePASSNS
PASSNSunder
underthe
thedriving
drivingsignal.
signal.

After that, the minimum step displacement of forward and backward movement of the
PASSNS was studied. When the amplitude and cycle of the driving signal are set to be 4.5 V and 60
ms (each cycle is divided into two parts, one of which is 35 ms and another one is 25 ms),
respectively, the minimum step displacement can be obtained accordingly. As there exists
measurement noise, we measured 50 continuous step displacements and calculated the average
value with standard deviation of 0.002 μm as the minimum step displacement. As shown in Figure
13a, the total displacement of 50 continuous forward movements is calculated to be 0.55 μm. Thus,
after calculation, the minimum forward step displacement is around 11.00 nm. For the backward
movement, the minimum step displacement is measured to be 12.00 nm.

Figure 13. Forward and backward displacement of the stage under conventional sawtooth driving
Figure 13. Forward and backward displacement of the stage under conventional sawtooth driving
signal: (a) forward movement; (b) backward movement.
signal: (a) forward movement; (b) backward movement.
As mentioned above, in the conventional stick-slip positioning stage, the step displacement varies
As mentioned above, in the conventional stick-slip positioning stage, the step displacement
drastically when the load changes. Here, we studied the effect of a working load on the the proposed
varies drastically when the load changes. Here, we studied the effect of a working load on the the
PASSNS’s performance. As the guide rails have weight of around 7.104 g, it is recognized as the initial
proposed PASSNS’s performance. As the guide rails have weight of around 7.104 g, it is recognized
load. In Figure 11, the step displacement of the stage under initial load has been measured. Here we put
as the initial load. In Figure 11, the step displacement of the stage under initial load has been
the working load of 20 g on the stage and measured its step displacement while other parameters were
measured. Here we put the working load of 20 g on the stage and measured its step displacement
kept the same. For the forward movement, the average step displacement was calculated to be 2.41 µm,
as shown in Figure 14. Compared to the step displacement under initial load, the step displacement
only increases by 6% even though the working load is three times larger than the initial load. For the
backward movement, the average step displacement was calculated to be 1.47 µm. Compared with the
Figure 13. Forward and backward displacement of the stage under conventional sawtooth driving
backward step displacement with no load, the backward step displacement only increases by 8% even
signal: (a) forward movement; (b) backward movement.
though the working load is three times larger than the initial load. Thus, compared with the traditional
stage As
design simulation
mentioned results
above, in in
theFigure 9, our PASSNS
conventional design
stick-slip is more robust
positioning stage, to
thethe varying
step load.
displacement
varies drastically when the load changes. Here, we studied the effect of a working load on the the
proposed PASSNS’s performance. As the guide rails have weight of around 7.104 g, it is recognized
as the initial load. In Figure 11, the step displacement of the stage under initial load has been
measured. Here we put the working load of 20 g on the stage and measured its step displacement
working load isunder
displacement three initial
times load,
largerthe
than thedisplacement
step initial load. For
onlythe backward
increases by movement, the average
6% even though the
step displacement was calculated to be 1.47 μm. Compared with the backward step
working load is three times larger than the initial load. For the backward movement, the average displacement
with
stepno load, the backward
displacement step displacement
was calculated to be 1.47 μm. only increaseswith
Compared by 8%
the even though
backward stepthe working load
displacement
iswith
three times larger than the initial load. Thus, compared with the traditional
no load, the backward step displacement only increases by 8% even though the working stage load
design
simulation results
is three times
Micromachines in
larger
2020, 11, Figure 9, our PASSNS design is more robust to the varying load.
765 than the initial load. Thus, compared with the traditional stage design 12 of 14
simulation results in Figure 9, our PASSNS design is more robust to the varying load.

Figure 14. Forward and backward displacement of the stage with working load of 20 g: (a) forward
Figure 14.Forward
Figure14. Forward and
and backward displacementof
backward displacement ofthe
thestage
stagewith
withworking
working load
load of of
2020
g: g:
(a)(a) forward
forward
movement;
movement; (b)
(b) backward
backward movement.
movement.
movement; (b) backward movement.

The loading
Theloading capacity
capacityofof
loadingcapacity thethe
of PASSNS
PASSNS
the PASSNS in vertical
in the
in the vertical
the vertical direction
direction depends
direction depends
on the
depends onthethefriction
onfriction friction
force force
between
force
between
between the stick-slip surfaces and slider mass. On the other hand, it depends on the load it cancan
the the
stick-slip stick-slip
surfaces surfaces
and slider and
mass.slider
On mass.
the other On the
hand, other
it hand,
depends onit depends
the load it on
can the
moveload it
upward.
move
We
move upward.
carried out the
upward. WeWe carried
vertical out
carriedload the vertical load
outexperiments:
the vertical load experiments:
we applied a driving
experiments: wewesignal
applied
applied a adriving
with adriving
period signal
of
signal 200 with
ms
with aanda
period
an of
amplitude 200 ms
of 150and V an
to amplitude
the of
piezoelectric 150 V
ceramic to the
of piezoelectric
the positioning ceramic
stage.
period of 200 ms and an amplitude of 60 V to the piezoelectric ceramic of the positioning stage. Whenof thethepositioning
load is stage.
gradually
When
Whenthe
increased load
thein theisisvertical
load gradually
gradually increased
direction,
increasedand inwhen
in thevertical
the vertical direction,
it is increased
direction, and
toand
72 g,when it increased
is increased
the itpositioning
when is stage tocan
to 300 72
g, g,
move
the the
positioning
upward andstage
positioning output
stage can
cana move
rising upward
move displacement,
upward and and output
output
as shown aa rising
rising displacement,
in Figure 15a. When
displacement, asasshown
shown
the load in
in is Figure
increased
Figure 15a.15a.
to
When
more
When the
than
the72load
load isis increased
g, the slider of the
increased more than300
positioning
to more than 72 g, the
stage the slider
doesslider ofthe
not move
of the positioning
upward,
positioningbut falls stage
stage does
down,
does asnot
not move
shown
move in
upward,
Figure but
15b. falls
Thus,
upward, but falls down, as down,
based as
on shown
the in Figure
experimental 15b.
results, Thus,
the based
maximum on the
load experimental
of the
Figure 15b. Thus, based on the experimental results, thestage in results,
the the
vertical
maximum
direction
maximum isload
72
loadg.ofofthe
thestage
stage inin the vertical directionisis300
vertical direction 72 g.

15. Displacementcurves
Figure 15.
Figure curvesofofthe
thestage
stage with diferent vertical loads: (a) vertical load ofg;72(b)
g;
Figure 15.Displacement
Displacement of the stage with
with diferent
diferent vertical
vertical loads:
loads: (a)(a) vertical
vertical load
load of 72
of 300 g; (b)
(b) vertical
vertical load of more than 72 g.
verticalload
loadof
ofmore
more than
than 72
300g.g.
4. Discussion and Conclusions
As known to all, friction force plays an important role in the successful movement of the PASSNS.
To effectively change the friction force, many friction force adjusting units have been integrated into
the PASSNS. However, most of these units cannot allow the stage to have a robust performance when
subjected to varying load. When the working load changes, the performance of the stage will change
drastically. In addition, some friction force adjusting units are heavy and large in size, which results in
a drastic vibration of the stage during movement. To overcome these problems, we developed a novel
PASSNS where the flexure hinge-based friction force adjusting unit was employed to meet requirements.
Micromachines 2020, 11, 765 13 of 14

Numerical analysis was conducted to estimate the static performance of the PASSNS. To study the
effect of different parameters on the movement performance of the PASSNS, a dynamic model was
established and simulation analysis was performed. Based on the simulation analysis, we found that
different total masses of the adjusting unit and the mass block will affect the dynamic performance
of the stage. We also found that in the conventional stage design, the step displacement of the stage
will become large with the increase of the working load. The employment of the flexure hinge-based
friction force adjusting unit helps us reduce the weight of the adjusting unit, which improves the
dynamic performance of the PASSNS. In addition, the deformation of the flexure hinge can maintain
the same position when the load changes. This ensures that the stage can be robust to the varying
load. This is further demonstrated by the experimental results. The maximum speed of forward and
backward movement of the stage has been measured to be 1.00 and 0.70 mm/s, respectively, when the
amplitude of the driving signal was set to be 80 V. The minimum forward step displacement is around
11.00 nm, and the minimum backward step displacement is around 12.00 nm. The maximum vertical
direction load capacity of the stage is 72 g with robustness to varying load. The proposed PASSNS
provides excellent performance, which demonstrates the great potential of the developed stage in many
applications which require nanometer positioning accuracies, high travel stroke, compact structure,
and a large load.

Author Contributions: Conceptualization, J.Z. and P.P.; data curation, S.G. and R.Z.; formal analysis, J.Z., P.P.
and M.P.; funding acquisition, C.R.; investigation, J.Z., P.P. and Y.W.; project administration, X.L.; resources,
X.L. and C.R.; supervision, C.R.; visualization, Y.W., S.G. and R.Z.; writing—original draft, J.Z., P.P. and M.P.;
writing—review and editing, J.Z. and C.R. All authors have read and agreed to the published version of
the manuscript.
Funding: The work is supported by the National Natural Science Foundation of China (No. 61774107) and
the Suzhou science and technology development project of Suzhou Late-model R&D Institutions Construction
(No. SZS2018337).
Conflicts of Interest: The authors declared no potential conflicts of interest with respect to the research, authorship,
and/or publication of this article.

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