FLOW SENSOR and METER Ok

FD-M Series FD-S Series FD-S Series (PFA type) FD-V70 Series
FLOW
SENSOR & METER
G E N E R A L C A T A L O G U E
KEYENCE Flow Detecting Technology
Free Minimal Accumulated

lowing low display
structure Measurements in Capable of instantaneous and
units of 0.1 mL accumulated displays and
Flow sensors that do
(the accumulated flow unit) equipped with analogue output
not become clogged
FLOW Sensor & Meter G en er a l C a ta l ogue
2
Flow Sensor & Meter General Catalogue Model Variation
A Rich Variety of Model Variations
Flow Sensor Variations
Non-Wetted Electrode Electromagnetic Flow Sensor

FD-M Series (Electromagnetism + electrostatic capacitance method)
FD-M Series
Detecting range 0.15 to 1000 L/min.
Pipe diameter 10A 20A 25A 50A

P.6
Conductivity : 5 μS/cm or more
Wetted materials : SCS13, PPS, FKM
Pressure resistance 2 MPa*
* The operating pressure range is 1 MPa or less.
Coriolis Method Digital Flow Sensor

FD-S Series (Coriolis method)
PFA type
FD-S Series
Detecting range 0 to 40 L/min.
8A 10A
Pipe diameter P.10
4 x 3 mm, 3/8" x 1/4"
1
Kinematic viscosity : Oil level*
Wetted materials : SCS14, SUS316L, PPS, FKM,*2 PFA
Pressure resistance 10 MPa*3
*1 A large pressure loss occurs with highly viscous fluids. (See page 12.)
*2 For details on the separate material FFKM, contact your nearest KEYENCE office.
*3 The operating pressure range is 5 MPa or less.
Separate-Amplifier Type Digital Flow Sensor

FD-V70 Series (Eddies + ultrasonic waves method)
FD-V70 Series
PPS: PFA:
Detecting range 0.5 to 100 L/min. 0.4 to 50 L/min.
10A 15A 20A 25A

Pipe diameter P.18
ø3/8", ø1/2", ø3/4"
Kinematic viscosity : Water level*
Wetted materials : PPS or PFA
Pressure resistance PPS: 1 MPa or less, PFA: 0.7 MPA or less
* Highly viscous fluids cannot be measured. (See page 19.)
3
Flow Sensor & Meter General Catalogue Detection Technology
Detection Technology Only Available from KEYENCE
ELECTROMAGNETISM + ELECTROSTATIC CAPACITANCE METHOD FD-M
This method performs detections by way of electrostatic capacitance, Using Faraday’s law to perform detection
which makes a free flowing structure possible. A typical electromagnetic flow sensor employs electrodes, wetted
within the pipe, to detect the electromotive force of the liquid.
The FD-M Series determines this value from outside the pipe by
Coil means of electrostatic capacitance.
External
electrode
Faraday’s law
Pipe When conductive fluid flows
through a magnetic field, electric
External electrode
voltage is generated in proportion
Electromotive force Velocity Electromotive to the value calculated by (the inner
of flow: V force: E diameter of the pipe x the magnetic
Magnetic field field strength x the average flow
Velocity Magnetic field:
of flow velocity of the fluid). The flow can
B be determined by measuring this
Coil voltage.
EDDIES + ULTRASONIC WAVES METHOD FD-V70
This method uses ultrasonic waves, which makes joint-less structures Hybrid detection using eddies and ultrasonic
possible. waves
The detection method employs eddies and ultrasonic waves.
To detect eddies, this method uses ultrasonic waves instead of
piezoelectric effect elements, which are easily influenced by
vibrations. The result is stable flow detections with high accuracy.
Eddy Receiver
generator
The flowing liquid causes
Flow the eddy generator to
Ultrasonic
generate eddies, which
wave
are detected by way of
the ultrasonic waves.
Housing Transmitter
CORIOLIS METHOD FD-S
This method can be used to detect the flows of all kinds of liquids. Using the Coriolis method to perform detection
The flow causes the Coriolis force to be generated at the entrance
and exit of the flow pipe, which causes the twist angle θ to be
generated due to resistance against the pipe vibrations. This angle is
read with electrical signals and is converted to the flow.
Resonance
Flow
When the fluid When the fluid Phase difference

is not flowing is flowing signal
A B
Output voltage
A'
θ
Coriolis force B'
A’ detection signal
One kind of inertial force whose size is generated B’ detection signal
in proportion to the movement speed.
4
Flow Sensor & Meter General Catalogue Success Example
Examples of Success in Various Locations
Flow control of the cooling water used FD-M Control of the cooling water FD-M Water-soluble coolant flow FD-M
in the vulcanising process of tyres used in precision moulding control
FD-S
FD-M Series
Small flow Large flow
Foreign materials, sludge, A layer of water is formed
and abrasion grains are not between the grindstone and
properly rinsed away, which the workpiece, which results in
may lead to surface damage. uneven surface roughness.
Control of the amount of mould FD-S Checking the flow of cleaning FD-V70 Control of the amount of liquid- FD-V70
release agent applied water crystal washing agent supplied
FD-S FD-S
FD-S Series
Checking the amount of cooling FD-M Cooling-water flow control for FD-M FD-S
CMP slurry flow control
water used welding machines
FD-S FD-V70
FD-V70
FD-V70 Series
FD-S Cooling-water flow control for Cooling-water control for

Oil-based coolant flow control
induction hardening equipment extrusion moulding equipment
The FD-M Series can output an alarm when a value This sensor performs cooling-water control for
falls below the set lower limit. The FD-M Series extrusion moulding equipment. Using analogue output
protects equipment from overheating. makes it possible to also perform detailed control.
5
Flow Sensor & Meter General Catalogue Flow Sensor FD-M Series
Flow sensors highly resistant

to clogging because of their
free lowing structure
Detecting range 0.15 to 1000 L/min.
Non-Wetted Electrode Electromagnetic Flow Sensor Pipe diameter

Usable fluids
10A 20A 25A
: Water or non-corrosive fluid
50A
FD-M Series
Conductivity : 5 μS/cm or more
Wetted materials : SCS13, PPS, FKM
Pressure resistance 2 MPa*
Detection principle Electromagnetism + electrostatic capacitance method
* The operating pressure range is 1 MPa or less.
❙ Free flowing structure Variations

No obstructions, no paddle wheels,
no electrodes Built-in ampliier type, electromagnetism method (general type)
Model Detecting range (L/min.)*1 Pipe diameter Piping direction Output format
FD-M5AT NPN*2
Rated range 0.25 to 5 Vertical
FD-M5ATP Rc3/8 PNP
FD-M5AY (10A) NPN
Display range 0.15 to 10 Horizontal
FD-M5AYP PNP
FD-M10AT NPN
FD-M10ATP Rc3/8 PNP
FD-M10AY (10A) NPN
FD-M10AYP PNP
FD-M50AT NPN
FD-M50ATP PNP
Merits of the FD-M Series Rc3/4
FD-M50AY (20A) NPN
FD-M50AYP PNP
Lowers maintenance Dramatically reduces clogging
FD-M100AT NPN
Rated range 5 to 100 Vertical
Unlike general floating element and paddle wheel flow meters, the FD-M Series has a “free FD-M100ATP Rc1 PNP
flowing structure” that is completely free of moving parts and obstructions. There is no FD-M100AY (25A) NPN
Display range 5 to 200 Horizontal
trouble with dirt and rust clogging the mechanical parts, greatly reducing maintenance. FD-M100AYP PNP
*1 Values that are within a range that is twice that of the rated range can be displayed.
Long lifespan No damage from moving parts *2 Among the NPN-output types, the FD-MZ Series, in which the power cable has been changed to a
connector, is available. For details, contact your nearest KEYENCE office.
Due to the absence of moving parts, it does not experience axial wear and other types of
mechanical wear. Through its “free flowing structure” the FD-M Series has achieved a Separate-ampliier type, electromagnetism method (general type)
significantly longer lifespan. Head Amplifier
Pipe Piping Model Type
Model Detecting range (L/min.)*1
Energy saving Dramatically reduces pressure loss
Rated range 0.5 to 10
diameter direction
FD-MA1A
Rc3/8 FD-MA2A
Due to its “free flowing structure”, the FD-M Series has almost no pressure loss. Does not FD-MH10A
Display range 0.5 to 30 (10A) DIN rail mounting
apply a large load on pumps and thus saves energy. FD-MA1AP
Rated range 2.5 to 50 Rc3/4
FD-MH50A FD-MA2AP
Display range 2.5 to 100 (20A)
Vertical or
Resistant to the adherence of insulating materials Rated range 5 to 100 Rc1
horizontal
* Models with “1” at the end of their
model number are main units.
FD-MH100A
No electrodes in the flow pipe Display range 5 to 200 (25A) Models with “2” at the end of their
model number are expansion units.
Rated range 25 to 500
With conventional electrode types, detection could not be performed when the electrodes FD-MH500A*2
Rc2
Display range 25 to 1000 (50A)
were covered in insulating materials. However, the FD-M Series with “free flowing Model Type
structure” detects from outside its flow pipe, which originally does not conduct electricity, *1 Values that are within a range that is twice that of the rated range FD-MA5A
Panel mounting
and because of this, the FD-M Series is capable of detection even with the adherence of can be displayed. FD-MA5AP
insulating materials. *2 When the FD-MH500A has a flow rate of 500 to 1000 L/min.,
the conductivity becomes 20 μS/cm or more. * A panel mounting bracket is
included with the panel mount type.
6
Dual digital display with easy setup

Dual coloured digital display allows you to adjust setting values, while monitoring the present flow.
Also, the select and toggle buttons can be used to easily configure settings.
Flow indicator
Built-in Amplifier Type Output 1 indicator
The flow indicator displays the flow conditions at a scroll speed
that matches the instantaneous flow. The two-colour LED screens
light in conjunction with the ON/OFF state of output 1.
FD-M
FD-M Series
Series Output 2 indicator
Present value indicator Bank indicator
Setting value indicator Alarm indicator
Setup indicator
Select and toggle buttons
Mode button
Enclosure rating: IP65 Switchable low direction

The IP65 enclosure rating of the FD-M makes it possible The flow direction can be switched by using the mode
to use this sensor in harsh environments. setting; you can mount the flow sensor at any location that
can provide easy-to-view monitoring.
* The separate-amplifier type cannot be switched.
Can be installed regardless of flow direction.
Flow conditions that are understood

even with just the sensor head Dual digital display with easy setup
Separate-Amplifier Type Present value display Bank indicator

Output 1 indicator
FD-MH Series
Flow indicator Alarm indicator
Displays the flow Output 2 indicator Arrow keys
conditions with a scroll
Output 2 indicator
Mode button
speed that matches the Output 1 indicator
Sensor head instantaneous flow. Alarm indicator
Set value indicator Set value display
Wire-saving and can be expanded Close vertical

Enclosure rating IP67 up to 10 units mounting
The sensor head of the separate-amplifier Through expansion, the power line is supplied The panel mounting
type has achieved an enclosure rating of IP67. from the side connector, saving 2 wires (+ and - type is capable of close
This further widens the range of environments power source) for each unit. vertical mounting.
in which this sensor can be used.
DIN rail mounting

type amplifier
Panel mounting type
amplifier
* The panel mounting type cannot be expanded.
❙ Supports temperature sensors ❙ Supports communication units (separate-ampliier type only)

Flow
(Separate-Ampliier Type only) It’s possible to communicate a variety of data with PLCs and PCs
Flow reduction by using a communication unit. Instantaneous flow data
A temperature sensor can be combined with the FD-T1 Series. It
Accumulated flow data
outputs an alarm when the current temperature exceeds the preset Set RS-232C
Control output status
temperature. The FD-M Series can reliably detect errors by checking value Communication
Temperature data
unit
the flow and temperature of the fluid. DL-RS1/CL1/
Hold-reset
Accumulation reset, etc.
Control DN1/EP1
output
Connection with the Temperature

temperature sensor sensor
FD-T1 Temperature
Temperature
increase
Connection with
the amplifier Set
value
Alarm
Temperature display output Programmable PC
Set temperature logic controller
* The BCD unit DL-RB1A is not supported.
* Temperature settings can be performed from a window. * The panel type amplifier does not support the DL-RS1A/RB1A/CL1/DN1/EP1.
7
Selecting Step
1
Step
2
Step
3
Step
4
Step
5
Step
6
an FD-M Series Unit Checking the
target fluid
Checking the
flow and
Sensor Display
(amplifier)
Temperature sensor
and
Mounting
bracket
Follow the steps shown here to select an appropriate unit.
temperature communication unit
Step Checking the target fluid The FD-M Series can be used with a fluid that has a conductivity of 5 μS/cm or more. Be sure to check the conductivity of the fluid.
1
Fluids that are very likely to be Fluids that are not very likely to be The materials shown below are used in the flow path of the FD-M Series.
Note that this sensor cannot be used with fluids that will corrode these materials.
usable with the FD-M Series usable with the FD-M Series
Cooling water and warming water (tap,

Oil, ultrapure water, alcohol, Flow pipe Bore: SCS13
underground, and industrial water) as well as Flow pipe: PPS (polyphenylene sulfide)
and organic solvents
water-soluble coolant (diluted with water) Bore O-ring: Fluoro-rubber
Step Checking the instantaneous flow and temperature

2
Instantaneous low of luids that can be supported by the FD-M Series
0.15 L/min. to 1000 L/min. The FD-M Series can support fluid temperatures from 0 to 85°C.
Step Selecting the basic sensor Select a built-in display or a separate display to match the installation environment.
3
Select the sensor to match the flow that was determined in step 2.
Built-in display (ampliier) type Separate display (ampliier) type

Instantaneous flow Connection pipe Instantaneous flow Connection pipe
Piping direction Output format Model Piping direction Output format Model
(L/min.) diameter (L/min.) diameter
NPN FD-M5AT Depends on
Vertical 0.5 to 30 Rc3/8 (10A) Vertical or horizontal FD-MH10A
the display
PNP FD-M5ATP
0.15 to 10 Depends on
NPN FD-M5AY 2.5 to 100 Rc3/4 (20A) Vertical or horizontal FD-MH50A
Horizontal the display
Rc3/8 PNP FD-M5AYP
Depends on
(10A) NPN FD-M10AT 5 to 200 Rc1 (25A) Vertical or horizontal FD-MH100A
the display
Vertical
PNP FD-M10ATP Depends on
0.5 to 30 25 to 1000 Rc2 (50A) Vertical or horizontal FD-MH500A
NPN FD-M10AY the display
Horizontal
PNP FD-M10AYP
NPN FD-M50AT
Vertical
Rc3/4 PNP FD-M50ATP
2.5 to 100
(20A) NPN FD-M50AY
Horizontal If the built-in type was selected, proceed to step 6.
PNP FD-M50AYP
NPN FD-M100AT If the separate type was selected, proceed to step 4.
Vertical
Rc1 PNP FD-M100ATP
5 to 200
(25A) NPN FD-M100AY
Horizontal
PNP FD-M100AYP
* The FD-M Series cannot be used in an environment in which the pipes are positive grounded.
For this purpose, the FD-MZ Series is available.
For details, contact your nearest KEYENCE office.
Step Selecting the separate display (amplifier) and options This step is necessary when using the separate type. Select the appropriate products to match the mounting method.
4
DIN rail mounting type Options dedicated for use with the separate-display type
Type Shape Explanation Model
Panel mounting type
DIN rail mounting type
This option makes it possible to install the unit
amplifier mounting fixture (for Amplifier OP-76877
Model when no DIN rail is present.
the main unit; sold separately) mounting
Type bracket
NPN output PNP output
This option is used at the front and end of a series of main and End unit End unit
Main unit FD-MA1A FD-MA1AP
DIN rail mounting End unit expansion amplifiers when the system is expanded in order
Expansion unit FD-MA2A FD-MA2AP OP-26751
(sold separately) to fix all the units in place. Be sure to use this option when
Panel mounting FD-MA5A FD-MA5AP expanding the system. (Two units are included.)
The DIN rail mounting type supports reduced wiring.
Systems can be expanded up to nine expansion units for each one Panel mounting bracket
This option is included with the display of the panel mounting type.
main unit. (included with the panel OP-76876
Use this option separately if the included part is lost or damaged.
In an expanded system, expansion unit power supply wires are not mounting type amplifier)
necessary.
Step Selecting the temperature sensor and communication unit as necessary

5 These parts are designed for use with the separate-display type. They cannot be used with the built-in display type.
Temperature sensor dedicated for use Communication units

with the separate type (for use with the DIN rail mounting, separate-display [ampliier] type)
Temperature sensor model: FD-T1 Model: DL-RS1A (communication unit that supports RS-232C)
Temperature detecting range: 0 to 90°C DL-CL1 (communication unit that supports CC-Link)
DL-DN1 (communication unit that supports DeviceNet)
DL-EP1 (communication unit that supports EtherNet/IP)
Step Selecting mounting brackets as necessary

6 Excluding the FD-MH500 separate head, the mounting brackets can be used with all separate heads and with all built-in display (amplifier) types.
L-shaped mounting bracket Flat mounting bracket

OP-42193 OP-42194
8
Specifications
Built-in ampliier type
For vertical piping FD-M5AT FD-M10AT FD-M50AT FD-M100AT
NPN output
For horizontal piping FD-M5AY FD-M10AY FD-M50AY FD-M100AY
Model*1
For vertical piping FD-M5ATP FD-M10ATP FD-M50ATP FD-M100ATP
PNP output
For horizontal piping FD-M5AYP FD-M10AYP FD-M50AYP FD-M100AYP
Configuration Built-in amplifier type
Rated flow range*2 0.25 to 5 L/min. 0.5 to 10 L/min. 2.5 to 50 L/min. 5 to 100 L/min.
Display range*3 0.15 to 10 L/min. 0.5 to 30 L/min. 2.5 to 100 L/min. 5 to 200 L/min.
Settable range 0 to 10 L/min. 0 to 30 L/min. 0 to 100 L/min. 0 to 200 L/min.
Minimum flow*4 0.15 L/min. 0.5 L/min. 2.5 L/min. 5 L/min.
Connection pipe diameter Rc3/8 (10A) Rc3/4 (20A) Rc1 (25A)
Usable fluids Water or non-corrosive fluid
Conductivity of usable fluids 5 μS/cm or more
FD-M Series
Temperature of usable fluids 0 to +85°C (no freezing)
Operating pressure range 1.0 MPa or less
Pressure resistance 2.0 MPa
Pressure loss 0.01 MPa or less
Display method Dual row display with 4-digit, 7-segment LED; bar display (2 colours)
Display resolution 0.05/0.1 (L/min.) selectable*5 0.01/0.1 (L/min.) selectable 0.1/1 (L/min.) selectable
Repeatability*6 0.5 s: ±5% of F.S., 1 s: ±3.5% of F.S., 2.5 s: ±2.5% of F.S., 5 s: ±1.6% of F.S., 10 s: ±1% of F.S., 30 s: ±0.8% of F.S., 60 s: ±0.6% of F.S.
Hysteresis Variable
Response time (chattering prevention) 500 ms/1 s/2.5 s/5 s/10 s/30 s/60 s variable
Accumulated display unit 0.01/0.1/1/10/100 (L) selectable 0.1/1/10/100/1000 (L) selectable
Accumulated data storage Data written to memory once every 10 seconds
Memory backup EEPROM (data storage period: 10 years or more, number of times data can be rewritten: 1 million times or more)
Control output/accumulation pulse output/error alarm output NPN/PNP open collector, max. 100 mA/ch* 7 (NPN: 40 V or less, PNP: 30 V or less); residual voltage: 1 V or less; 3 outputs (N.O./N.C. switchable)
Accumulation reset/bank switching/zero flow function Input time: 20 ms or more, accumulation reset or bank switching selectable by way of the mode setting
Analogue output 4 to 20 mA, max. load resistance: 260 Ω, analogue output range can be set to an arbitrary value
Power supply voltage 24 VDC ±10%, ripple (P-P): ±10% or less
Power consumption (current consumption) Normal: 1700 mW (70 mA), power save: 1000 mW (40 mA)
Enclosure rating IP65
Ambient operating temperature 0 to +50°C (no freezing)
Environmental 35 to 85% RH (no condensation)
Ambient operating humidity
resistance
Vibration resistance 10 to 55 Hz; 1.5 mm compound amplitude; 2 hours in each of the X, Y, and Z directions
Wetted part Bore: SCS13, flow pipe: PPS, O-ring: fluoro-rubber (FKM)
Materials
Other materials Plastic parts of case: PBT, metal parts of case: SUS430, cable: PVC
Weight Approx. 835 g Approx. 1100 g Approx. 1310 g
Accessory Instruction manual
*1 The types that have an “A” at the end of their names are the conventional types with additional functions such as display averaging. *2 The rated flow range indicates the range that is supposed to be used in general. *3 This can be used within the display range in the same
manner as it is used within the rated flow range. *4 A flow less than or equal to the minimum flow is displayed as 0 L/min. *5 When 0.05 L/min. is selected, the instantaneous flow is displayed in increments of 0.05 for values between 0.15 and 0.5 L/min. and in increments of
0.01 for values above 0.5 L/min. *6 The repeatability indicates the calculation error in the detections performed with repeated flows under fixed conditions. The repeatability is effective within the display range. When performing conversions using F.S. (full scale) in this table,
use the rated flow range for the F.S. value. The repeatability for the FD-M5AT(P)/Y(P) is ±7.5% of F.S. at a response time of 0.5 s and ±5% of F.S. at a response time of 1 s. The repeatability for the FD-M10AT(P)/Y(P) in the range of 20 to 30 L/min. is twice that of the values listed
in the table. *7 The maximum alarm output is 20 mA.
Sensor head (separate type)

Model*1 FD-MH10A FD-MH50A FD-MH100A FD-MH500A
Configuration Separate-amplifier type
Rated flow range*2 0.5 to 10 L/min. 2.5 to 50 L/min. 5 to 100 L/min. 25 to 500 L/min.
Amplifier display range*3 0.5 to 30 L/min. 2.5 to 100 L/min. 5 to 200 L/min. 25 to 1000 L/min.
Connection pipe diameter Rc3/8 (10A) Rc3/4 (20A) Rc1 (25A) Rc2 (50A)
Usable fluids Water or non-corrosive fluid
With 25 to 500 L/min.: 5 μS/cm or more
Conductivity of usable fluids 5 μS/cm or more
With 500 to 1000 L/min.: 20 μS/cm or more
Temperature of usable fluids 0 to +85°C (no freezing)
Operating pressure range 1.0 MPa or less
Pressure resistance 2.0 MPa
Pressure loss 0.01 MPa or less*4
Display method Bar display (2 colours), other indicators
resistance
Wetted part Bore: SCS13, flow pipe: PPS, O-ring: fluoro-rubber (FKM)
Materials
Other materials Plastic parts of case: PBT, indicators: polyarylate, metal parts of case: SUS430, cable: PVC
Weight Approx. 800 g Approx. 1070 g Approx. 1280 g Approx. 3700 g
Accessory Warnings
*1 The models that have an “A” at the end of their names support the type A amplifier. These models operate normally even when a conventional amplifier that does not have an “A” at the end of its name is connected. *2 The rated flow range indicates the range that is supposed to
be used in general. *3 This can be used within the display range in the same manner as it is used within the rated flow range. *4 This excludes the situation in which the FD-MH500A is used with a flow of 500 L/min. to 1000 L/min. For details, see the pressure loss data.
Ampliier unit (separate type)

DIN rail mounting type*2 FD-MA1A (main unit)/FD-MA2A (expansion unit)
NPN output
Panel mounting type*3 FD-MA5A
Model*1
DIN rail mounting type* 2 FD-MA1AP (main unit)/FD-MA2AP (expansion unit)
PNP output
Panel mounting type*3 FD-MA5AP
Head combination FD-MH10A FD-MH50A FD-MH100A FD-MH500A
Rated flow range*4 0.5 to 10 L/min. 2.5 to 50 L/min. 5 to 100 L/min. 25 to 500 L/min.
Display range*5 0.5 to 30 L/min. 2.5 to 100 L/min. 5 to 200 L/min. 25 to 1000 L/min.
Settable range 0 to 30 L/min. 0 to 100 L/min. 0 to 200 L/min. 0 to 999.9 L/min.
Minimum flow*6 0.5 L/min. 2.5 L/min. 5 L/min. 25 L/min.
Display method Dual row display with 4-digit, 7-segment LED; other indicators
Display resolution 0.01/0.1 (L/min.) selectable 0.1/1 (L/min.) selectable
Repeatability*7 0.5 s: ±5% of F.S., 1 s: ±3.5% of F.S., 2.5 s: ±2.5% of F.S., 5 s: ±1.6% of F.S., 10 s: ±1% of F.S., 30 s: ±0.8% of F.S., 60 s: ±0.6% of F.S.
Hysteresis Variable
Response time (chattering prevention) 500 ms/1 s/2.5 s/5 s/10 s/30 s/60 s variable
Accumulated display unit 0.01/0.1/1/10/100 (L) selectable 0.1/1/10/100/1000 (L) selectable 1/10/100/1000/10000 (L) selectable
Control output/accumulation pulse output/error alarm output NPN/PNP open collector, max. 100 mA/ch*8 (NPN: 40 V or less, PNP: 30 V or less); residual voltage: 1 V or less; 3 outputs (N.O./N.C. switchable)
Accumulation reset/bank switching/zero flow function Input time: 20 ms or more, accumulation reset or bank switching selectable by way of the mode setting
Power supply voltage 24 VDC ± 10%, ripple (P-P): ±10% or less
resistance
Materials Main case: polycarbonate, key tops: polyacetal, front sheet: polycarbonate, cable: PVC
DIN rail mounting type Approx. 115 g
Weight
Panel mounting type Approx. 105 g
DIN rail mounting type Main unit: instruction manual, expansion unit: none
Accessories
Panel mounting type Panel mounting bracket, front protective cover, instruction manual
*1 The types that have an “A” at the end of their names are the conventional types with additional functions such as display averaging. Connect the heads that have an “A” at the end of their names. If a conventional head, which does not have an “A” at the end of its name, is
connected, the FD-M operates in the same way as the conventional models. *2 Do not connect to the sides of units other than the DL-RS1 and FD-M. *3 There are no expansion units for the panel mounting type. *4 The rated flow range indicates the range that is supposed to be
used in general. *5 This can be used within the display range in the same manner as it is used within the rated flow range. *6 A flow less than or equal to the minimum flow is displayed as 0 L/min. *7 The repeatability indicates the calculation error in the detections performed
with repeated flows under fixed conditions. When performing conversions using F.S. (full scale), use the rated flow range for the F.S. value. *8 The maximum alarm output is 20 mA. When using a total of 6 to 10 units in an expanded system, ensure that each output current is
10 mA or less.
9
Flow Sensor & Meter General Catalogue Flow Sensor FD-S Series
Minimal low detections

in units of 0.1 mL,
even for non-conductive luids

Pipe diameter
Coriolis Method Digital Flow Sensor Usable fluids
8A 10A
: Water, oil, or non-corrosive fluid
FD-S Series
Kinematic viscosity : Oil level*1
Wetted materials : SCS14, SUS16L, PPS, FKM*2
Pressure resistance : 10 MPa*3
Detection principle Coriolis method
*1 A large pressure loss occurs with highly viscous fluids. (See page 12.) *2 For details on the separate material FFKM,
contact your nearest KEYENCE office. *3 The operating pressure range is 5 MPa or less.
❙ Coriolis method
Variations
Built-in display type sensors

Measures a minimal Type Model Detecting range (mL/min.) Pipe diameter Output format
flow in which a single
Rated range*1 0.0 to 200
water droplet drops
Ultra minimal flow FD-SS02A
each second Display range 0.0 to 400
NPN or PNP can be
8A
selected in the initial
(Rc1/4)
settings.
Rated range* 1 0 to 2000
Minimal flow FD-SS2A
Display range 0 to 4000
Three low measurements made possible by the Coriolis method

Type Model Detecting range (L/min.) Pipe diameter Output format
Minimal lows Resolution: 0.1 mL/min. Rated range*1 0 to 20

NPN or PNP can be
Measurements of minimal flows are now possible. 10A
Medium flow FD-SS20A selected in the initial
(Rc3/8)
Examples of such flows include those in which a single Display range 0 to 40
settings.
water droplet drops each second and the minimal
amounts of mould release agent ejected in a single shot. *1 The rated range is the detection range for which accuracy is guaranteed.
For details on accuracies for ranges other than the rated range — for example, the display range
— contact your nearest KEYENCE office.
Oil lows Oil, high pressure (5 MPa),

and high temperature (100°C) Select the output cable from those shown in the following table. When using a separate-display unit,
the cable is different from those shown here (see the lower part of page 11).
All kinds of fluids, oil, pure water, and other non-
conductive fluids as well as viscous fluids, can be
measured.
Model Cable length Weight
FD-SCB3 3m Approx. 115 g

High-speed lows Response time: 50 ms
This sensor has achieved a fastest response time of 50 ms. FD-SCB10 10 m Approx. 350 g
As a result, this sensor can measure, without missing any
information, short-time flows of fluids, which were
difficult to measure with conventional sensors.
Examples of applications of these measurements include
spraying and coating confirmations.
10
Introducing 10 functions that Support a variety of applications
6 5
10
FD-S Series
2 4 3 7
1 High-pressure support up to 5 MPa 6 Switchable low direction

Pressure resistance: 10 MPa This sensor supports both flow directions.
The FD-S can support highly viscous fluids and applications that use The mode setting can be used to switch the flow direction.
high-pressure coolants.
7 Selectable modes Free-range analogue and accumulation pulse output
2 Adjustable display Output is generated between 4 and 20 mA according to the lower and upper
The angle of the sensor’s display can be adjusted in 90-degree increments. limits of the required range. It is also possible to output accumulation
pulses starting at 0.1 mL.
3 Supports both NPN and PNP output*
NPN or PNP can be selected in the initial settings. 8 IP65 enclosure rating
This eliminates the need to keep both types on hand. The sensor’s enclosure rating makes it possible to use this sensor in harsh
* Built-in type only environments.
4 Accuracy of ±5%* 9 High-temperature support up to 100°C

Equipped with alarm output
In RESO mode, a smallest display unit of 0.1 mL is possible, which enables
detections of minimal flows. The FD-S can perform measurements with temperatures from 0 to 100°C,
* Linearity ± 4% of Rdg (indicated value), zero stability ± 1% of F.S. (under the condition that the flow is which enables a wide range of applications.
within 25 to 100% of the rated flow) (As a guideline, temperatures in the range of 0.1 to 99.9°C can be displayed.)
5 Does not require a straight section of pipe 10 Separate-display and communication units
Coriolis method flow meters can directly measure the mass flow rate, so DIN rail mounting type and panel mounting type displays are also available
the straight section of pipe, which is used to perform rectification, is not to match the sensor application. The lineup includes communication units
required. that support RS-232C, CC-Link, DeviceNet, and EtherNet/IP.
Separate-display unit
Type Model Output format Main unit/expansion unit
FD-SA1NA NPN ❙ Main unit and expansion units
Main unit Main unit
FD-SA1PA PNP
DIN rail mounting type Use the side connector to expand the system. Expansion unit
FD-SA2NA NPN
Expansion unit*1
FD-SA2PA PNP When expanding the system, purchase the
FD-SA5NA NPN - OP-26751 end unit (sold separately).
Panel mounting type
FD-SA5PA PNP -
*1 Systems can be expanded up to three expansion units for each one main unit (for a total of four units).
Expanding the system eliminates the need to wire the expansion unit power supplies (which reduces wiring). Connector
Model Cable length Weight

When using the separate-display unit, select a cable from the table on the right
FD-SCC3 3m Approx. 95 g
to use in connecting the sensor and the separate-display unit.
FD-SCC10 10 m Approx. 270 g
11
Selecting Step
1
Step
2
Step
3
Step
4
Step
5
Step
6
an FD-S Series Unit Checking the Checking the
target fluid and flow and
Sensor Display
(amplifier)
Communication
unit
Mounting
bracket
Follow the steps shown here to select an appropriate unit. viscosity temperature
Step Checking the target fluid and viscosity

1
So long as the luid does not corrode the wetted materials, the sensor can Kinematic viscosity guidelines
perform detections. Water ······································ 1 cSt Egg yolk and white ··········· 1000 cSt
However, pay attention to the following two precautions: Orange juice ························· 10 cSt Honey ····························· 10000 cSt
• This product is not designed to be explosion-proof, so it cannot be used in an explosion-proof environment. Olive oil ······························ 100 cSt
• Highly viscous fluids may create a large pressure loss, which may make it impossible to perform measurements.
(As a guideline, use fluids with a viscosity of 1000 cSt or less.)
Step Checking the pressure loss caused by instantaneous flow, temperature, and fluid kinematic viscosity
2
Instantaneous low of luids that can be supported by the FD-S Series
0.1 mL/min. to 40 L/min. The FD-S Series can support fluid temperatures from 0 to 100ºC.
Use the graphs on the right to check Flow characteristics (pressure loss) 1 [cSt] 10 [cSt] 30 [cSt] 100 [cSt]
the pressure loss caused by the FD-SS02A 1 FD-SS2A 1 FD-SS20A 1
kinematic viscosity of the fluid being
measured and the instantaneous flow
Pressure loss (MPa)
Pressure loss (MPa)
Pressure loss (MPa)

to be measured.
Check that fluid can be ejected with 0.1 0.1 0.1
the pumps being used.
0.01 0.01 0.01
0.001 0.001 0.001

0.001 0.01 0.1 1 0.01 0.1 1 10 0.1 1 10 100
Flow (L/min.) Flow (L/min.) Flow (L/min.)
Step Selecting the basic sensor

3 Select the sensor to match the flow and pressure loss that were determined in step 2.
Sensor
Instantaneous flow (L/min.) Connection pipe diameter Model Model Cable length Weight
Select the output cable from those shown in the table
0 to 400 Rc1/4 (8A) FD-SS02A to the right. FD-SCB3 3m Approx. 115 g
0 to 4000 Rc1/4 (8A) FD-SS2A When using a separate-display unit, the cable is FD-SCB10 10 m Approx. 350 g
0 to 40 Rc3/8 (10A) FD-SS20A different from those shown here.
Step Selecting the separate-display unit as necessary Select the unit according to the mounting method.
4 DIN rail mounting type
Separate-display unit options
Panel mounting type Type Shape Explanation Model
DIN rail mounting type display

Main unit/ This option makes it possible to install the unit
Type Model Output format mounting fixture (for the main Amplifier OP-76877
expansion unit when no DIN rail is present.
unit; sold separately) mounting
FD-SA1NA NPN bracket
Main unit
FD-SA1PA PNP End unit End unit
DIN rail This option is used at the front and end of a series of main
mounting type FD-SA2NA NPN End unit and expansion display units when the system is expanded in
Expansion unit OP-26751
FD-SA2PA PNP (sold separately) order to fix all the units in place. Be sure to use this option
when expanding the system. (Two units are included.)
Panel mounting FD-SA5NA NPN -
type FD-SA5PA PNP - Panel mounting bracket
The panel mounting types can be installed close to each other in a vertical
(included with the panel OP-76876
Model Cable length Weight configuration.
mounting type)
FD-SCC3 3m Approx. 95 g
FD-SCC10 10 m Approx. 270 g
Step Selecting the communication unit as necessary

5
Communication unit (for use with the DIN rail mounting type separate-display unit)
It’s possible to communicate a variety of data with PLCs and PCs by using a communication unit.
• Instantaneous flow data
Model: DL-RS1A (communication unit that supports RS-232C) • Temperature data
• Accumulated flow data • Hold-reset
DL-CL1/DL-DN1 (communication unit that supports CC-Link or DeviceNet) • Density data • Accumulation reset, etc.
Programmable logic controller PC

6
Flat mounting bracket Vibration-proof mounting Vibration-proof mounting Replacement vibration-
bracket set for vertical piping bracket set for horizontal piping proof rubber feet
(two pieces included)
OP-86951 OP-86952 OP-86953 OP-86954
When used When used When used
These are the vibration-proof rubber feet that are

included with the OP-86952/86953.
Use these options as replacement parts in the
event that the original parts are damaged.
12
Specifications
Sensor (built-in display type)
Type Ultra minimal low type Minimal low type Medium low type
Model NPN/PNP switchable output FD-SS02A FD-SS2A FD-SS20A
Rated flow range* 1 0 to 200 mL/min. 0 to 2000 mL/min. 0 to 20 L/min.
Usable fluids Water, oil, or non-corrosive fluid
Specified density range 0.3 to 2.0 g/cm 3
Minimum density*2 Initial value: 0.5 g/cm 3 (this can be set to a value from 0 to 2.0 g/cm 3)
Minimum flow, initial value*3 10 mL/min. 100 mL/min. 1 L/min.
Minimum setting range 0 to 400 mL/min. 0 to 4000 mL/min. 0 to 40 L/min.
Connection pipe diameter Rc1/4 Rc1/4 Rc3/8
Pipe inner diameter ø1.0 mm x 2 pipes ø2.1 mm x 2 pipes ø5.0 mm x 2 pipes
Temperature of usable fluids 0 to 100°C (no freezing or boiling)
Operating pressure range*4 5 MPa or less (1 MPa or less at 60°C or higher)
Pressure resistance*4 10 MPa or less (2 MPa or less at 60°C or higher)
For water with a viscosity of 1 cSt and at F.S. 0.03 MPa or less 0.06 MPa or less 0.1 MPa or less
Pressure loss
For a fluid with a viscosity of 30 cSt and at half F.S. 0.3 MPa or less 0.2 MPa or less 0.1 MPa or less
Display method Dual row display with 4-digit, 7-segment LED (upper row: current value in red, lower row: set value in green)
Output: red LED x 2 (control outputs 1 and 2), setting indicator: green LED x 2, bank indicator: green LED, alarm indicator: red LED,
Operation indicators status indicator (lit in red: vibration warning, lit in green: full with water [normal operation], blinking in green: bubble mixture warning): red and green LED, flow indicator: red and green LED x 3
Display resolution Standard mode 1 mL/min. (0.1 mL/min.) 10 mL/min. (1 mL/min.) 0.1 L/min. (0.01 L/min.)
(during rESo mode) Focus mode*11 – 1 mL/min. (0.1 mL/min.) 10 mL/min. (1 mL/min.)
Between 0 and 25% of F.S.: ±1% of F.S.
Linearity Between 25 and 100% of F.S.: ±4% of Rdg
Accuracy*5
Zero point stability* 6 ±1% of F.S.
Repeatability*12 50 ms to 100 ms: ±3% of F.S., 0.5 s to 1 s: ±1% of F.S., 2.5 s to 60 s: ±0.5% of F.S.
Hysteresis Variable
Response time (chattering prevention) 50 ms/100 ms/500 ms/1 s/2.5 s/5 s/10 s/30 s/60 s variable
Standard mode 0.1/1/10/100/1000 (mL) selectable 1/10/100/1000/10000 (mL) selectable 0.01/0.1/1/10/100 (L) selectable
Accumulated flow unit
Focus mode*11 – 0.1/1/10/100/1000 (mL) selectable 1/10/100/1000/10000 (mL) selectable
NPN open collector, max. 100 mA/ch (40 V or less); PNP open collector, max. 50 mA/ch (power supply voltage: 24 V or less);
Control output/accumulation pulse output/error alarm output*7 residual voltage: 1 V or less (NPN) or 2 V or less (PNP); 3 outputs (N.O./N.C. switchable)
Accumulation reset/bank switching*8/zero adjustment/zero flow No-voltage input (contact or solid), input time: 20 ms or more, 2 selectable inputs
FD-S Series
Withstand voltage (between [a] the power supply and signal wires and Not prescribed due to grounding by way of capacitor
[b] the metal parts of the main unit)*9
Insulation resistance (between [a] the power supply and signal wires Not prescribed due to grounding by way of capacitor
and [b] the metal parts of the main unit)*9
Environmental resistance Ambient operating humidity 35 to 85% RH (no condensation)
Wetted part* 10 Flow pipe: SCS14, SUS316L, PPS, O-ring: fluoro-rubber (FKM)
Materials
Other materials Plastic parts of case: PBT or PPS, cable: PVC
Weight Approx. 1600 g Approx. 1650 g Approx. 2100 g
*1 Values that are within a range that is twice that of the rated flow range are possible. The range given here is the range when the fluid has a density of 1.00 g/cm 3. If the density exceeds 1.0 g/cm 3, values can be displayed up to a limit of the rated flow range × 2/the density.
If the density is lower than 1.0, values can be displayed up to a limit of the rated flow range x 2. There are no changes to the rated flow range when using focus mode, but the flow display range becomes 0 to 400 mL/min. for the FD-SS2A and 0 to 4000 mL/min. for the FD-SS2A.
*2 When the density is less than or equal to the minimum density, the flow is displayed as 0 L/min. The minimum density is reflected in the accumulated flow.
When using focus mode, the initial value of the minimum flow is 10 mL/min. for the FD-SS2A and 100 mL/min. for the FD-SS20A.
*3 A flow less than or equal to the minimum flow is displayed as 0 L/min. The minimum value is reflected in the accumulated flow. *4 For details, see the characteristic diagrams.
*5 The accuracy is regulated according to the calculation error accumulated over 30 seconds using room-temperature water (at approximately 25°C) and adjustment equipment at the time of product shipment.
There may be large differences between this value and the actual value experienced due to the used fluid, the presence of bubbles in the fluid, vibrations, and the cleanliness of the piping being used to perform detections. The following reference value is added into the
linearity and zero point stability fluctuations that arise due to the temperature characteristic.
(±0.02% of Rdg/°C [linearity]) + (±0.1 of F.S./°C [zero point stability]) F.S. (full scale) indicates the rated flow and Rdg (reading) indicates the display of the instantaneous flow.
The accuracy when using focus mode is the same as the accuracy during normal operation. When using focus mode, F.S. is also 2000 mL/min. for the FD-SS2A and 20 L/min. for the FD-SS20A.
*6 The zero point stability is the offset amount after both installation and zero point adjustment are performed. *7 The maximum alarm output is 20 mA. *8 When selecting the bank switching, up to 2 banks can be set.
*9 The metal parts of the main unit and 0 V of the internal circuit (the blue wire) are connected by way of a 3 kV, 100 pF capacitor. *10 The lineup also includes a type with a fluoro-rubber (FFKM) O-ring. For details, contact your nearest KEYENCE office.
*11 When using focus mode, the instantaneous flow display range becomes 0 to 400 mL/min. for the FD-SS2A and 0 to 4000 mL/min. for the FD-SS20A. *12 The repeatability indicates the calculation error in the detections performed with repeated flows under fixed
conditions.
DIN rail mounting*1 FD-SA1NA (main unit)/FD-SA2NA (expansion unit)
NPN output
Panel mounting FD-SA5NA
Model
DIN rail mounting*1 FD-SA1PA (main unit)/FD-SA2PA (expansion unit)
PNP output
Panel mounting FD-SA5PA
System expansion (when mounted on a DIN rail) Systems can be expanded up to three expansion units for each one main unit (for a total of four units).
Output: red LED x 2 (control outputs 1 and 2), setting indicator: green LED x 2,
Operation indicators bank indicator: green LED, alarm indicator: red LED, unit indicator: green LED
Display resolution Depends on the sensor specifications
Response time (chattering prevention) (Response time in the sensor specifications) +20 ms
Accumulated display unit Depends on the sensor specifications
Accumulated data storage Depends on the sensor specifications
Control output/accumulation pulse output/error alarm output NPN/PNP open collector, max. 100 mA/ch*2 (NPN: 40 V or less, PNP: 30 V or less); residual voltage: 1 V or less; 3 outputs (N.O./N.C. switchable)
Accumulation reset/bank switching/zero adjustment No-voltage input (contact or solid), input time: 20 ms or more, 1 selectable input
Environmental Ambient operating temperature 0 to +50°C (no freezing)
resistance Ambient operating humidity 35 to 85% RH (no condensation)
Weight
*1 When using the DIN rail mounting type, do not connect, for the purpose of expanding the system, any units other than the DL-RS1A and FD-S Series units.
*2 The maximum alarm output is 20 mA.
13
Flow Sensor & Meter General Catalogue Flow Sensor FD-S Series PFA type
Sensors that can measure

minimal lows in units of
0.01 mL to enable
measurements of all kinds of
luids including liquid medicine
Process connection pipe diameter : 4 x 3 mm 3/8" x 1/4" (9.53 x 6.35 mm)

Coriolis Method Digital Flow Sensor Usable fluids
: Water, oil, or non-corrosive fluid
(fluid that does not corrode PFA)
FD-S Kinematic viscosity : Oil level*1

Series PFA type Measurement pipeline : Super PFA
Pressure resistance FD-SF1: 1.0 MPa or less (25°C)
FD-SF8: 0.6 MPa or less (25°C)
Detection principle Coriolis method
*1 A large pressure loss occurs with highly viscous fluids. (See page 15.)
Wetted part: Super PFA (no packing)

Variations
Measurement principle:
Coriolis method Sensor head There are two types to select from according to the flow.
Process connection
Type Model Detecting range (L/min.) pipe diameter Inner diameter
(tube end)
Main unit: Plastic body Solving all the Rated range* 1 0 to 1
ø3.0 mm
FD-SF1 4 x 3 mm
loop
conventional problems Display range 0 to 2
Ultra minimal flow
by changing the common Rated range*1 0 to 8
3/8" x 1/4" ø5.0 mm
FD-SF8
way of thinking about Display range 0 to 16
(9.53 x 6.35 mm) forked
flow measurements! *1 The rated range is the detection range for which accuracy is guaranteed.
For details on accuracies for ranges other than the rated range—for example, the display range
—contact your nearest KEYENCE office.
Merits of the FD-S Series
Separate-display unit Using expansion units makes it possible to use up to four
Minimal low meter in units of 0.01 mL units with minimal wiring (DIN rail mounting only).
Type Model Output format Main unit or expansion unit
This sensor makes possible measurements in units of
FD-SA1NA NPN
0.01 mL. These measurements, such as those used in Main unit
resist fluid control, were incredibly difficult to perform FD-SA1PA PNP
until now.* DIN rail mounting type
FD-SA2NA NPN
* When using focus mode on the FD-SF1.
Expansion unit*1
FD-SA2PA PNP
Unaffected by the presence of
FD-SA5NA NPN –
bubbles in the luid
Panel mounting type
The Coriolis method is used to measure the mass flow
rate, so this sensor is not affected by the bubbles found FD-SA5PA PNP –
in liquid medicine or by micro bubbles, which are not
visible to the naked eye. *1 Systems can be expanded up to three expansion units for each one main unit (for a total of four units). Expanding
the system eliminates the need to wire the expansion unit power supplies (which reduces wiring).
Simple settings
There is no need to configure bothersome settings or to
manage parameters for different types of liquid
medicine. Additionally, the compact separate-display
unit employs a dual digital display.
14
Introducing 8 functions that support a variety of applications
1 Requires no straight section of pipe Compact! 5 Equipped with focus mode

The Coriolis method does not require a straight section of pipe. Also, The accumulated flow can be displayed in units of 0.01 mL for the type
this sensor is not affected by the presence of bubbles in the fluid, so with a 2 L display and in units of 0.1 mL for the type with a 16 L display.
pipes can be arranged without restrictions.
2 A wide range of response times 6 Capabilities over a wide range

This sensor has a fast response time of 50 ms to 60 ms, and the This sensor can perform measurements in the low-flow area. The
response time can be varied to match applications such as pump output itself does not disappear, and detections can be performed
pulsing and discharge amount detection. from 0 mL. (When the minimum value setting is turned off.)
3 High accuracy 7 Switchable low direction

Accuracy: ±1% of Rdg (indicated value) This sensor supports both flow directions.
The accuracy is regulated according to the calculation error The initial settings can be used to change the flow direction.
accumulated over 30 seconds using room-temperature water (at 25°C)
and adjustment equipment at the time of product shipment.
4 Equipped with ventilation openings for purging 8 IP65 enclosure rating

This sensor is equipped with ventilation openings for purging the This sensor’s enclosure rating makes it possible to use this sensor in
inside of the unit. harsh environments.
FD-S Series
Communication unit It’s possible to communicate a variety of data with PLCs and PCs.
Model Type Weight Density data
DL-RS1A RS-232C Approx. 53 g Instantaneous flow data
DL-CL1 CC-Link (Ver2) Approx. 80 g (including the connector) Accumulated flow data
Control output status
DL-DN1 Device Net Approx. 80 g
Temperature data
DL-EP1 EtherNet/IP Approx. 70 g Hold-reset
Programmable PC
* Note that the panel mounting type separate-display unit (FD-SA5) is not supported. logic controller Accumulation reset, etc.
Mounting brackets Be sure to prepare mounting brackets for the main unit.
Type Model Material Mounting bracket
PEI
L-shaped mounting bracket OP-87137
(polyetherimide)
When the mounting
bracket is used
Vibration-proof mounting brackets

(two brackets included) Bracket: SPCC
OP-87138
Use this in combination with Rubber feet: chloroprene
When the mounting
the L-shaped mounting bracket. bracket is used
Characteristic diagram Flow characteristics (pressure loss)
[FD-SF1] [FD-SF8]
1 1
0.1 0.1
Pressure loss (Mpa)
Pressure loss (Mpa)
0.01 0.01
0.001 0.001
0.0001 0.0001
1 10 100 1000 10000 0.01 0.1 1 10
Flow (L/min.) Flow (L/min.)
100 [cSt] 100 [cSt]

10 [cSt] 10 [cSt]
1 [cSt] 1 [cSt]
15
Selecting Step
1
Step
2
Step
3
Step
4
Step
5
Step
6
an FD-S Series (PFA type) Unit Checking the Checking the
target fluid and flow and
Sensor Display
(amplifier)
Communication
unit
Mounting
brackets
Follow the steps shown here to select an appropriate unit. viscosity temperature
Step Checking the target fluid and viscosity

1
So long as a luid is used (a luid that does not corrode PFA), Kinematic viscosity guidelines
the sensor can perform detections. Water ······································ 1 cSt Egg yolk and white ··········· 1000 cSt
However, pay attention to the following two precautions: Orange juice ························· 10 cSt Honey ····························· 10000 cSt
• This product is not designed to be explosion-proof, so it cannot be used in an explosion-proof environment. Olive oil ······························ 100 cSt
• Highly viscous fluids may create a large pressure loss, which may make it impossible to perform measurements.
(As a guideline, use fluids with a viscosity of 1000 cSt or less.)
Step Checking the pressure loss caused by instantaneous flow, temperature, and fluid kinematic viscosity
2
Instantaneous low of luids that can be supported by the FD-S Series (PFA type)
0.1 mL/min. to 16 L/min. The FD-S (PFA) Series can support fluid temperatures from 10 to 60ºC.
Step Selecting the basic sensor

3
Select the sensor to match the flow and pressure loss that were determined in step 2.
Sensor head
Type Model Shape Detecting range Process connection pipe diameter (tube end) Inner diameter
Rated range* 0 to 1 L/min.

Ultra minimal ø3.0 mm
FD-SF1 4 x 3 mm
flow loop
Display range 0 to 2 L/min.
Rated range* 0 to 8 L/min.

3/8" x 1/4" ø5.0 mm
Minimal flow FD-SF8
(9.53 x 6.35 mm) forked
Display range 0 to 16 L/min.
* The rated range is the detection range for which accuracy is guaranteed. For details on accuracies for ranges other than the rated range—for example, the display range—contact your nearest KEYENCE office.
Step Selecting the separate-display unit Select the unit according to the mounting method.
4
DIN rail mounting type
Separate-display unit options
Panel mounting type Type Shape Explanation Model
DIN rail mounting type display

Main unit or This option makes it possible to install the unit
Type Model Output format mounting fixture (for the main Amplifier OP-76877
expansion unit when no DIN rail is present.
unit; sold separately) mounting
FD-SA1NA NPN bracket
Main unit
FD-SA1PA PNP End unit End unit
DIN rail This option is used at the front and end of a series of main
mounting type FD-SA2NA NPN End unit and expansion display units when the system is expanded in
Expansion unit OP-26751
FD-SA2PA PNP (sold separately) order to fix all the units in place. Be sure to use this option
when expanding the system. (Two units are included.)
Panel mounting FD-SA5NA NPN –
type FD-SA5PA PNP – Panel mounting bracket
The panel mounting types can be installed close to each other in a vertical
(included with the panel OP-76876
configuration.
mounting type)
Step Selecting the communication unit as necessary

5
Communication unit (for use with the DIN rail mounting type separate-display unit)
It’s possible to communicate a variety of data with PLCs and PCs by using a communication unit. • Instantaneous flow data
• Accumulated flow data
Model: DL-RS1A (communication unit that supports RS-232C) • Density data • Temperature data
• Hold-reset • Accumulation reset, etc.
DL-CL1 (communication unit that supports CC-Link) Programmable PC
logic controller
DL-DN1 (communication unit that supports DeviceNet)
DL-EP1 (communication unit that supports EtherNet/IP)

6
L-shaped mounting bracket Vibration-proof mounting brackets Use this in combination with the
L-shaped mounting bracket.
(two brackets included)
OP-87137 OP-87138
Material Material
PEI (polyetherimide) Bracket: SPCC (cold rolled steel sheet)
Accessories Rubber feet: chloroprene
M4 x L60 pan head screw (SUS), Accessories for assembly
3 screws included M4 x L10 hexagon socket head cap screw,
Parts to use in installing the main unit width across flats: 3, 4 screws
3 washers (SUS) for M4 screws M4 x L8 hexagon socket head cap screw,
3 M4 nuts (SUS) width across flats: 2.5, 8 screws
1 mounting manual
16
Specifications
Sensor (built-in display type)
Type Ultra minimal low type Minimal low type
Model FD-SF1 FD-SF8
Rated flow range*1 0 to 1000 mL/min. 0 to 8 L/min.
Usable fluids Fluid (fluid that does not corrode PFA)
Specified density range 0.300 to 2.000 g/cm 3
Minimum density*2 Initial value: 0.50 g/cm 3 (this can be set to a value from 0.01 to 2.00 g/cm 3)
Minimum flow, initial value*3 50 mL/min. 0.4 L/min
Minimum flow*3 0 to 2000 mL/min. 0 to 16 L/min.
Process connection pipe diameter (PFA tube end) 4 x 3 mm 3/8" x 1/4" (9.53 x 6.35)
Tube inner diameter ø3.0 mm loop ø5.0 mm forked
Temperature of usable fluids 10 to 60ºC (no freezing)
Operating pressure range*4 1.0 MPa or less (25°C) 0.6 MPa or less (25°C)
Pressure resistance*4 1.5 MPa or less (25°C) 0.9 MPa or less (25°C)
Pressure loss (for water with a viscosity of 1 cSt and at F.S.) 0.035 MPa or less 0.04 MPa or less
Display method None (connect the sensor to an FD-SAxxA setting and display panel)
Alarm indicator: red and green LEDs (lit in red: alarm, lit in green: power on),
Operation indicators status indicator: red and green LEDs (lit in red: vibration warning, lit in green: full with water [normal operation], blinking in green: bubble mixture warning, green indicator off: dry [no water])
Display resolution Standard mode 1 mL/min. 0.01 L/min

(during rESo mode) Focus mode*5 0.1 mL/min. 1 mL/min.
50 to 100% of F.S. flow ± 1% of Rdg (indicated value)
20 to 50% of F.S. flow ± 2% of Rdg (indicated value) 25 to 100% of F.S. flow ± 1% of Rdg (indicated value)
Linearity 0 to 20% of F.S. flow ± 0.4% of F.S. 0 to 25% of F.S. flow ± 0.25% of F.S.
Accuracy*6
Reproducibility (in focus mode) between 0 and 50 mL/min.: ±1 mL/min.
Zero point stability ±1% of F.S.* 7
Hysteresis Variable
Response time (chattering prevention) 50 ms/100 ms/500 ms/1 s/2.5 s/5 s/ 10 s/30 s/60 s variable
Standard mode 0.1/1/10/100/1000/10000 (mL) selectable 0.001/0.01/0.1/1/10/100 (L) selectable
Accumulated display unit
Focus mode*5 0.01/0.1/1/10/100/1000 (mL) selectable 0.1/1/10/100/1000/10000 (mL) selectable
Control output/accumulation pulse output/error alarm output Output from the FD-SAxxA (NPN/PNP open collector, max. 100 mA/ch [NPN: 40 V or less, PNP: 30 V or less]; residual voltage: 1 V or less)
Accumulation reset/bank switching Input from the FD-SAxxA (contact or solid, input time: 20 ms or more)
Analogue output Output from the FD-SAxxA (4 to 20 mA, max. load resistance: 260 Ω, analogue output range can be set to an arbitrary value)
FD-S Series
Power supply voltage Supplied by the FD-SAxxA
Power consumption (current consumption) Supplied by the FD-SAxxA
Ambient operating temperature 0 to +60ºC (no freezing)
Environmental resistance Ambient operating humidity 35 to 85% RH (no condensation)
Wetted part Super PFA Super PFA or new PFA
Materials
Other materials Plastic parts of case: PEI, cable: PVC
Weight Approx. 700 g Approx. 750 g
Accessory Instruction manual
*1 Values that are within a range that is twice that of the rated flow range can be displayed. There are no changes to the rated flow range when using focus mode, but the flow display range becomes 0 to 400 mL/min. for the FD-SF1 and 0 to 4000 mL/min. for the FD-SF8.
*2 When the density is less than or equal to the minimum density, the flow is displayed as 0 L/min. The minimum density is reflected in the accumulated flow.
*3 A flow less than or equal to the minimum flow is displayed as 0 L/min. The minimum value is reflected in the accumulated flow. When using focus mode, the initial value of the minimum flow is 10.0 mL/min. for the FD-SF1 and 100 mL/min. for the FD-SF8.
*4 For this value at a temperature of 25°C or higher, see the derating straight line. Ensure that pressure fluctuations caused by water hammers and similar phenomena are also within the operating pressure range.
*5 When using focus mode, the instantaneous flow display range becomes 0 to 400 mL/min. for the FD-SF1 and 0 to 4000 mL/min. for the FD-SF8.
*6 F.S. (full scale) indicates the rated flow and Rdg indicates the display of the instantaneous flow. The accuracy is regulated according to the calculation error accumulated over 30 seconds using water at 25°C and adjustment equipment at the time of product shipment.
The accuracy when using focus mode is the same as the accuracy during normal operation. When using focus mode, F.S. is also 1 L/min. for the FD-SF1 and 8 L/min. for the FD-SF8.
*7 This can be cancelled by way of periodic zero point adjustments.
* When using multiple sensor units together, install the sensor units at the separately determined interval.
DIN rail mounting type*1 FD-SA1NA (main unit)/FD-SA2NA (expansion unit)
NPN output
Panel mounting type FD-SA5NA
Model
DIN rail mounting type*1 FD-SA1PA (main unit)/FD-SA2PA (expansion unit)
PNP output
Panel mounting type FD-SA5PA
System expansion (when mounted on a DIN rail) Systems can be expanded up to three expansion units for each one main unit (for a total of four units).
Operation indicators Output: red LED x 2 (control outputs 1 and 2), setting indicator: green LED x 2, bank indicator: green LED, alarm indicator: red LED, unit indicator: green LED
Display resolution Depends on the sensor specifications
Response time (chattering prevention) Response time in the sensor specifications +20 ms
Accumulated display unit Depends on the sensor specifications
Accumulated data storage Depends on the sensor specifications
Control output/accumulation pulse output/ NPN/PNP open-collector, max. 100 mA/ch*2
error alarm output
Accumulation reset/bank switching/zero adjustment Input time: 20 ms or more, 1 selectable input
Power supply voltage 24 VDC ± 10%, ripple (P-P): ±10% or less
Power consumption (current consumption)*3 Normal: 2200 mW (90 mA), power save: 1680 mW (70 mA)
Environmental Ambient operating temperature 0 to +50°C (no freezing)

resistance Ambient operating humidity 35 to 85% RH (no condensation)
Weight
*1 When using the DIN rail mounting type, do not connect, for the purpose of expanding the system, any units other than the DL-RS1A and FD-S Series units.
*2 The maximum alarm output is 20 mA.
*3 This is different when the FD-SS02A/FD-SS2A/FD-SS20A is connected.
* The FD-SAxx cannot be used with the FD-SF1/FD-SF8. Use the FD-SAxxA.
17
Flow Sensor & Meter General Catalogue Flow Sensor FD-V70 Series
Available in both PPS and

PFA types!
Compact and joint-less
low sensors with built-in
structures
Detecting range PPS: 0.5 to 100 L/min. PFA: 0.4 to 50 L/min.

10A 15A 20A 25A ø3/8", ø1/2", ø3/4"
Separate-Amplifier Type Digital Flow Sensor Pipe diameter
Usable fluids : Fluid that does not corrode PPS or PFA
FD-V70 Series
Kinematic viscosity : Water level*
Wetted materials : PPS or PFA
Pressure resistance PPS: 1 MPa or less, PFA: 0.7 MPA or less
Detection principle Eddies + ultrasonic waves method
*Highly viscous fluids cannot be measured. (See page 19.)
Merits of the FD-V70 Series Variations

Separate ampliier type, eddies + ultrasonic waves method (general type)
Compact
Head
The sensor head is thin with a width of only 20 mm Model Flow pipe material Detecting range (L/min.) Pipe diameter
(FD-F04/F20), so multiple sensor units can be installed FD-P05 0.5 to 5 PT3/8 (10A)
even on pipes that are close together. FD-P20 2 to 20 PT1/2 (15A)
PPS
FD-P50 5 to 50 PT3/4 (20A)
FD-P100 10 to 100 PT1" (25A)
Supports pipes that are close together
Amplifier
Highly durable due to no moving Model Output format Type
parts FD-V70A NPN
DIN rail mounting
FD-V70AP PNP
The built-in, moulded structure of the flow pipe uses
FD-V75A NPN
just a single stopper (eddy generator). The sensor has Panel mounting
FD-V75AP PNP
no moving parts, which gives it a highly durable
structure. * A panel mounting bracket is included with the panel mounting type.
Separate ampliier type, eddies + ultrasonic waves method (medicine-resistant)

Easy to understand
Head
Sensor head Flow display Alarm display
Model Flow pipe material Detecting range (L/min.) Pipe diameter
FD-F04 0.4 to 4 ø3/8" (9.5 mm)
FD-F20 PFA 2 to 20 ø1/2" (12.7 mm)
FD-F50 5 to 50 ø3/4" (19 mm)
The sensor displays the flow conditions The sensor displays detection errors
at a scroll speed that matches the caused by problems such as a shortage Amplifier
instantaneous flow. of water.
Model Output format Type
FD-V70A NPN
Output indicator Current value display (red) Manual button DIN rail mounting
Display (amplifier) FD-V70AP PNP
Manual sensitivity adjustment
FD-V75A NPN
The flow is displayed on a bright Panel mounting
LED display. FD-V75AP PNP
* A panel mounting bracket is included with the panel mounting type.

Mode button Direct access
Switches the display Provides direct access to
and operating mode the set values
Set value display (green)
18
Leading functions that give a shape to ease of use

Product materials that can be selected to match the luid Selectable mounting methods
(also supports pure water and liquid medicine) (amplifiers are available in two types: DIN rail mounting and panel mounting)
The PPS type is available for use with general-purpose fluids such as water and Two types of mounting methods are available: the DIN rail mounting method and the
water-soluble coolant, and the PFA type is available for use with corrosive fluids such as panel mounting method. This makes it possible to match the mounting method to the
liquid medicine. available equipment. mm 48
PFA head DIN rail mounting type Panel mounting type

Built-in structure FD-V70A, V70AP FD-V75A, 75AP
made entirely of
fluoroplastic all the
way down to the tubes 24 mm
48 mm
PPS head 24 mm
Built-in structure
made entirely of PPS
all the way down to The amplifier can be easily The amplifier can be mounted in a panel.
the screws mounted on a DIN rail. Additionally, multiple amplifiers can be installed
It can easily be mounted on a close to each other, which conserves space.
DIN rail at a later time.
Selectable detection modes Selectable detection modes

Upper/lower limit detection Window Accumulated flow Bank setting Free range analogue Accumulated pulse output
The optimum mode can be selected to match the application of the sensor. The sensor is standard-equipped with two output modes: “Free range analogue”, which
can be used to set the desired analogue output range to use to an arbitrary value, and
“Accumulated pulse output”. This function enables the sensor to support a wide range of
flow pipe needs.
Selectable display modes
Flow
Standard display mode Averaged two-digit display mode
Upper
In this mode, the display is the same limit In this mode, the flow signals
Lower
as that of our conventional amplifiers. limit are averaged to further reduce
Thanks to the high-speed response, the display by one digit.
this display can even detect fast This mode is useful in
Control
changes. output stabilising the display when
there are extreme fluctuations.
Averaged display mode

In this mode, the flow signals are averaged. This mode stabilises displays that are unstable due to phenomena such as fluid turbulence and pulses.
Detection range for which accuracy is guaranteed (detection range according to the kinematic viscosity of the fluid)
Minimum flow (L/min.)
Kinematic viscosity of the fluid being measure (x 10 -6 m2 /s = cSt) Maximum flow
FD-V70 Series
Model (L/min.)
0.3 0.5 0.7 1 2 3 4 5 7
FD-P05 0.3 0.3 0.4 0.5 1.0 1.5 2.0 2.5 3.5 5.0
FD-P20 1.0 1.0 1.4 2.0 4.0 6.0 8.0 10.0 14.0 20.0
FD-P50 2.5 2.5 3.5 5.0 10.0 15.0 20.0 25.0 35.0 50.0
FD-P100 8.0 8.0 8.0 10.0 20.0 30.0 40.0 50.0 70.0 100.0
FD-F04 0.3 0.3 0.3 0.4 0.8 1.2 1.6 2.0 2.8 4.0
FD-F20 1.0 1.0 1.4 2.0 4.0 6.0 8.0 10.0 14.0 20.0
FD-F50 2.5 2.5 3.5 5.0 10.0 15.0 20.0 25.0 35.0 50.0
Flow characteristic diagrams (pressure loss)

FD-P05 FD-P20 FD-P50 FD-P100
0.06 0.06 0.06 0.06
0.05 0.05 0.05 0.05

Pressure loss (MPa)
Pressure loss (MPa)
Pressure loss (MPa)
Pressure loss (MPa)
0.04 0.04 0.04 0.04
0.03 0.03 0.03 0.03
0.02 0.02 0.02 0.02
0.01 0.01 0.01 0.01
0 0 0 0
0 1 2 3 4 5 6 0 5 10 15 20 25 0 10 20 30 40 50 60 0 20 40 60 80 100 120
Flow (L/min.) Flow (L/min.) Flow (L/min.) Flow (L/min.)
FD-F04 FD-F20 FD-F50

0.06 0.06 0.06
0.05 0.05 0.05

Pressure loss (MPa)
Pressure loss (MPa)
Pressure loss (MPa)
0.04 0.04 0.04
0.03 0.03 0.03
0.02 0.02 0.02
0.01 0.01 0.01
0 0 0
0 0.5 1 1.5 2 2.5 3 3.5 4 4.5 0 5 10 15 20 25 0 10 20 30 40 50 60
Flow (L/min.) Flow (L/min.) Flow (L/min.)
19
Selecting Step
1
Step
2
Step
3
Step
4
Step
5
an FD-V70 Series Unit Checking the
target fluid
Checking the
flow and
Sensor Display
(amplifier)
Option
Follow the steps shown here to select an appropriate unit. temperature
Step Checking the target fluid Note that the FD-V70’s measurement principle precludes it from performing detections with highly viscous fluids.
(As a guideline, use fluids with a kinematic viscosity of 7 cSt or less. For details on the flows that can be detected for each kinematic viscosity, see page 19.)
1
The materials shown below are used in the flow path of the FD-V70 Series.
Fluids that are very likely to be Fluids that are not very likely to be Note that this sensor cannot be used with fluids that will corrode these
usable with the FD-M Series usable with the FD-M Series materials.
FD-P Series FD-F Series

Water-soluble coolant, cooling water (tap Oil, fluorine-based solvents,
and underground water), purified water, hydrochloric acid, chloroform, Material: PPS Material: Fluoroplastic
ultrapure water, and salt water and other highly viscous fluids (polyphenylene sulfide) (new PFA)
Step Checking the instantaneous flow and temperature

2
Instantaneous low of luids that can be supported by the FD-V70 Series
0.4 L/min. to 100 L/min. The FD-V70 Series can support fluid temperatures from 0 to 100ºC.
Step Selecting the sensor in detail according to the instantaneous flow

3
Select the sensor according to the instantaneous flow that was checked in step 2.
FD-P Series FD-F Series

Type (material) Model Instantaneous flow (L/min.) Connection pipe diameter Type (material) Model Instantaneous flow (L/min.) Connection pipe diameter
FD-P05 0.5 to 5 PT3/8 (10A) FD-F04 0.4 to 4 ø3/8" (9.5 mm)
FD-P20 2 to 20 PT1/2 (15A) PFA FD-F20 2 to 20 ø1/2" (12.7 mm)

PPS
FD-P50 5 to 50 PT3/4 (20A) FD-F50 5 to 50 ø3/4" (19 mm)
FD-P100 10 to 100 PT1" (25A)
Step Selecting the display unit (amplifier) Select the unit according to the mounting method.
4
DIN rail mounting type Panel mounting type
Model Model
Type Type
NPN output PNP output NPN output PNP output
DIN rail mounting FD-V70A FD-V70AP Panel mounting FD-V75A FD-V75AP
Mounting fixtures are included so that the unit can be installed even if no DIN rail is present.
Panel mounting bracket
OP-51476
(included with the FD-V75A and FD-V75AP)
Step Selecting options as necessary To lengthen the cable used between an FD-P Series sensor head and amplifier, select from the following options.
5
Options Sensor head Amplifier unit
Model Shape Remarks Included cable
ø14
OP-51475 10 m connector cable
(sold separately) (for use with the PPS type)
Cable length: 10 m, oil-resistant and high-flex cable
ø3.6 (4 cores x 0.18 mm 2 each) OP-51475
Ensure that the total length of the sensor head cable is 10.3 m or less. To extend the cable used
with the PPS-type head, use the OP-51475 (10 m head cable) instead of the included head cable.
Also, the cable can be extended by using a relay cable with connectors on both ends in addition to
the included head cable.
Relay cable Included cable
0.5 m: OP-94736
1 m: OP-94737
2 m: OP-94738
3 m: OP-94739
5 m: OP-94740
20
Specifications
Sensor head
Model FD-P05 FD-P20 FD-P50 FD-P100 FD-F04 FD-F20 FD-F50
Detecting range 0.5 to 5 L/min. 2 to 20 L/min. 5 to 50 L/min. 10 to 100 L/min. 0.4 to 4 L/min. 2 to 20 L/min. 5 to 50 L/min.
Pressure resistance 1.0 MPa 0.7 MPa
Fluid to detect* 1 Fluid (fluid that does not corrode PPS) Fluid (fluid that does not corrode PFA)
Temperature of usable fluids* 2 0 to +100°C (no freezing or boiling)
Connection pipe diameter PT 3/8 PT 1/2 PT 3/4 PT 1" ø3/8" (9.5 mm) ø1/2" (12.7 mm) ø3/4" (19 mm)
Display method Flow indicator: green LED, error display: red LED
Environmental Ambient operating humidity 5 to 80% RH (no condensation)

resistance Vibration resistance 10 to 55 Hz; 1.5 mm compound amplitude; 3 hours in each of the X, Y, and Z directions
Shock resistance 300 m/s 2 ; 10 times in each of the X, Y, and Z directions for a total of 60 times
Materials Glass fibre reinforced PPS Piping: new PFA, case: polysulfone
Approx. 175 g Approx. 180 g Approx. 200 g Approx. 270 g Approx. 135 g Approx. 140 g Approx. 180 g
Weight
3 m M12 connector cable included 3 m connector cable included
Accessories M12 relay connector cable (3 m), head connector (x1) Head connector (x1), mounting bracket (x2)
*1 This sensor cannot be used to measure fluids that have high viscosity. For details, see “Detection range for which accuracy is guaranteed” on page 19.
*2 If the inside of the piping freezes, the sensor head may be damaged.
Ampliier unit
NPN output FD-V70A (DIN rail mounting type)/FD-V75A (panel mounting type)
Model
PNP output FD-V70AP (DIN rail mounting type)/FD-V75AP (panel mounting type)
Head combination FD-P05 FD-P20 FD-P50 FD-P100 FD-F04 FD-F20 FD-F50
Power supply voltage 12 to 24 VDC, ripple (P-P): ±10% or less
12 V 24 V
Current consumption Normal 1500 mW (125 mA) or less 2000 mW (83 mA) or less * Excluding the analogue output and including the head
Power save 1320 mW (110 mA) or less 1700 mW (70 mA) or less
Dual row display with 3-digit, 7-segment LED (character height: 8 mm [upper row, in red], 5.7 mm [lower row, in green])
Display method Display update period: 5 times/second (10 times/second in the standard display mode with a response time of 0.5 seconds)
Operation indicators Red LED x 3 (control outputs 1 and 2 and error alarm)
Detecting range 0.5 to 5 L/min. 2 to 20 L/min. 5 to 50 L/min. 10 to 100 L/min. 0.4 to 4 L/min. 2 to 20 L/min. 5 to 50 L/min.
When the standard display mode or 0.01 L 0.1 L 0.01 L 0.1 L
averaged display mode is selected
Display resolution
When the averaged two-digit display 0.1 L 1L 0.1 L 1L
mode is selected
Hysteresis Variable
Response time (chattering prevention function) 0.5/1/2/5/20/60 (seconds) selectable
0.01/0.1/1/10/100 (L) 0.01/0.1/1/10/100 (L)
Accumulated display unit 0.1/1/10/100/1000 (L) selectable 0.1/1/10/100/1000 (L) selectable
selectable selectable
Accumulation reset/bank input Input time: 20 ms or more (analogue output/error alarm output switchable)
Control output/accumulated pulse output NPN (PNP) open collector, max. 50 mA (NPN: 40 V or less, PNP: 30 V or less); residual voltage: 1 V or less; 2 outputs (N.O./N.C. switchable)
Error alarm output*1 NPN open collector, max. 20 mA (27 V or less); residual voltage: 1 V or less (fixed to N.C., analogue output, accumulation reset/bank input switching)
4 to 20 mA, max. load resistance: 260 Ω
Analogue output The analogue output range can be set to an arbitrary value in units of 10% of F.S.
Repeatability* 2 ±0.5% of F.S. or less (when the temperature of the fluid is 20°C and the ambient operating temperature is 25°C)
resistance
Materials Main unit and cover: polycarbonate, key tops: silicon rubber
Weight FD-V70A (P): approx. 85 g (including the power cable) FD-V75A (P): approx. 85 g (including the panel mounting bracket, protective front cover, and power cable)
Accessories FD-V70A (P): power cable, mounting bracket, instruction manual FD-V75A (P): panel mounting bracket, protective front cover, power cable, instruction manual
*1 The PNP type is not equipped with an error alarm output.
FD-V70 Series
*2 The repeatability indicates the calculation error in the detections performed with repeated flows under fixed conditions.
21
Flow Sensor & Meter General Catalogue Flow Sensor Dimensions (FD-M Series)
Dimensions
FD-M
G
Built-in display (amplifier)
FD-M5AT/M5ATP/M10AT/M10ATP
FD-M50AT/M50ATP/M100AT/M100ATP
C
D F 4-M4
Depth: 6.5
FD-M5AT/M5ATP/ FD-M50AT/ FD-M100AT/

M10AT/M10ATP M50ATP/ M100ATP/
A 110 120 130
41
A
E
B
B 90 95 110
24
C 56 65 70
D 23.8 35.4 41
E 63 71 73 ø4 (7 x 0.27 mm 2)
F 37 47.5 50 Cable length: 3 m
G Rc3/8 Rc3/4 Rc1
H 54.1 65.1 71.1 54 H
FD-M5AY/M5AYP/M10AY/M10AYP A
FD-M50AY/M50AYP/M100AY/M100AYP B
G 54
41
C
H
24
ø4 (7 x 0.27 mm 2)
Cable length: 3 m
H
FD-M5AY/M5AYP/ FD-M50AY/ FD-M100AY/
M10AY/10AY M50AYP/ M100AYP/
A 110 120 130
B 90 95 110
E 4-M4
C 56 65 70
Depth: 6.5
D 23.8 35.4 41
E 63 71 73
F 37 47.5 50
Rc3/8 Rc3/4 Rc1
F
G
H 54.1 65.1 71.1
G
Separate display (amplifier)
FD-MH10A/MH50A/MH100A/MH500A
4-M4
C (Depth: 9.5 for the FD-MH500A only)
D
F
FD-MH10A FD-MH50A FD-MH100A FD-MH500A

A
E
B
A 110 120 130 185.2

20.5
B 90 95 110 149.2
C 56 65 70 110
D 23.8 35.4 41 69
E 63 71 73 114.8
F 37 47.5 50 77
When connected ø2.5 × 2,
G Rc3/8 Rc3/4 Rc1 Rc2 to the FD-T1 2-core shielded wire H
H 55.3 66.3 72.3 113.8 ø3.5, cable length: 0.7 m Cable length: 3 m
22
Flow Sensor & Meter General Catalogue Flow Sensor Dimensions (FD-M Series)
CAD data download www.keyence.co.uk/CADG
Unit: mm
Display (panel mounting type)
FD-MA5A/MA5PA Panel mounting bracket (included) OP-76876
44.7
*1 ø4.2 (7 x 0.20 mm 2)
16.3
FD-M Series
Cable length: 2 m
*1 12.5 38.8
49
51.8 24
6.8
Protective front cover

1.6 2.3 12.4
23.8
24 21
13.4 62
3.5 10.7
60 Min.
6.6
15
Panel cutout dimensions When mounted in a panel

45 (73)
11.1
Panel thickness:
X 1 to 6 mm
X=24x (A-1) +21

When A units are installed close to each other
63 mm or more
21+0.4
-0
45
Display (DIN rail mounting type) Mounting brackets

FD-MA1A/MA1AP L-shaped mounting bracket Flat mounting bracket
ø4.2 (7 x 0.20 mm 2) Cable length: 2 m (sold separately) OP-42193 (sold separately) OP-42194
24
15 11.6
35°
x. 1
3 Ma
When 40 R3.5
ø7 4
cover is
opened:
37 max. 79 27.5
42 114
7 2 ø7
18 17.6 7
12.4
21.1 35.4
67 54
Min. 15 79.7
70 1
Min. 15 46.5
2.3
7 2.3
FD-MA2A/MA2AP 90 17.5 130 7.5
* 4 M4 x L8 screws included * 4 M4 x L8 screws included
ø4.2 (5 x 0.20 mm 2) Cable length: 2 m
* 4 M4 x L10 screws included * 4 M4 x L10 screws included
24
15
Temperature sensor (dedicated for use with the separate type)
11.6
Temperature
3 Sensor Rc3/8 detection unit
ø13
unit
19 ø22
42 37
18 17.6
15 14 6±1
67±1
12.4
21.1 35.4 16.4
Connector ø3.5
Min. 15
70
unit 11
Cable length: 0.7 m
Min. 15
10
23
Flow Sensor & Meter General Catalogue Flow Sensor Dimensions (FD-S Series)
Dimensions
FD-S
Sensor unit Ultra minimal flow type and minimal flow type (SUS type) Sensor unit Medium flow type (SUS type)
Ultra minimal flow type

FD-SS02A
Minimal flow type Medium flow type
FD-SS2A FD-SS20A
Rc 3/8
Rc 1/4
18 43.6 Max. rotation 22 48.6

Max. rotation radius: 25 mm
radius: 25 mm
Hexagon socket
Hexagon socket 14 head cap screw 13
head cap screw
159.5 196.5
Nominal diameter: 4, Nominal diameter: 4,
width across flats of hexagon hole: 2.5 mm width across flats of hexagon hole: 2.5 mm
181 25 218 30
42 42
(25) 4-M4 (25) 4-M4
Depth: 6 Depth: 6
127 122.5 116 117 79 149

140.5 123 81.2
42 133.7
42
170.8
Min. 15 159.5 196.5

Min. 15
Separate display (DIN rail mounting type) Separate display (panel mounting type)
FD-SA1NA/SA1PA/FD-SA2NA/SA2PA FD-SA5NA/SA5PA
*DIN-rail amplifier mounting fixture (sold separately) OP-76877 44.7 *1 ø4.2 (7 x 0.20 mm 2)
2
ø4.2 (7 x 0.20 mm ) Cable length: 2 m 16.3
Cable length: 2 m
*1 12.5
24
15 11.6
51.8
°
135 6.8
3 M a x.
When
cover is
opened: 1.6 2.3 12.4
max. 79
37
42
18 17.6 24 21
13.4
12.4 60 3.5
21.1 35.4 Min.
Min. 15 6.6
15
70
Min. 15 * Panel mounting bracket (included) OP-76876
Sensor unit Ultra minimal flow type (PFA) Sensor unit Minimal flow type (PFA)
FD-SF1 FD-SF8
Cable outlet Cable outlet

ø2.5 x 2, cable length: 5 m ø2.5 × 2, cable length: 5 m
10 10
12.15 12.15
PFA
46.6 3/8" x 1/4" tube 108
75
235
46.6 (50) 135 (50) PFA 4 x 3 tube 70
108
115.5
(55.5) 45.5
26 23 36 23
(36)
10 10
Rc 1/8 Mounting hole Rc 1/8 Mounting hole
3 x ø4.5 3 x ø4.5
(M4; through-hole) (M4; through-hole)
123.5 114.91 123.5
(104.91) 114.91 (104.91)
129.7
129.7
Rc 1/8
Rc 1/8
(14.79) (14.79)
120 120
60.2 60.2
45 45
24
Flow Sensor & Meter General Catalogue Flow Sensor Dimensions (FD-S Series)
CAD data download www.keyence.co.uk/CADG
Unit: mm
Mounting brackets
Flat mounting bracket OP-86951 Flat mounting bracket (when used)
Material: SPCC 204* (241)
37 *(36)
*M4 x L10 hexagon socket head cap screw, width across flats: 3, 4 screws included
23
*The values within
185 parentheses are for 27.5
171 when the bracket is
159 used with the FD-SS20.
135
)
.5
4.5
4. 5
ø4
4-ø 6.5
-
3.2
(4
(R)
55 41 30 28 25 6.5 12
79
(R
81.2
)
185 171 135 109
116
23 3.2
12
(25.3) 28
41
55
Vibration-proof mounting bracket set for Vibration-proof mounting bracket set

vertical piping OP-86952 for vertical piping (when used)
Materials: metal: SPCC, rubber: chloroprene 204* (241)
78
*M4 x L10 hexagon socket head cap screw, width across flats: 3, 8 screws included 37 *(36)
FD-S Series
8-M3 x L8
37.5 23 *The values within
73.5 55.5 Hexagon socket head cap screw parentheses are for
when the bracket is
used with the FD-SS20.
4-M4 x L10
78 Hexagon socket head cap screw
123.4
68 90
43 90
19.8
15
100 76.4 48 7 15
7 48 100
66.4
123.4
Vibration-proof mounting bracket set for Vibration-proof mounting bracket set

horizontal piping OP-86953 for horizontal piping (when used)
Materials: metal: SPCC, rubber: chloroprene 216
126
*M4 × L10 hexagon socket head cap screw, width across flats: 3, 8 screws included
*The values within
207 parentheses are for
171 when the bracket is
9.5 used with the FD-SS20.
8-M3 x L8
23 Hexagon socket head cap screw 65
51 37 30 141 30
4-
4
ø7
4-M4 x L10 54
*(53)
Hexagon socket head cap screw
216
30 30
141
126 7 221
4 8.2
109 4-ø *(258)
40 40 35.2
65
L-shaped mounting bracket OP-87137 Vibration-proof Materials

Bracket: SPCC (cold rolled steel sheet)
Material mounting bracket
Rubber feet: chloroprene
PEI (polyetherimide) OP-87138
Accessories Accessories for assembly
Use this in combination with the
M4 x L60 pan head screw (SUS),3 screws included M4 x L10 hexagon socket head cap screw,
L-shaped mounting bracket.
Parts to use in installing the main unit width across flats: 3, 4 screws
3 washers (SUS) for M4 screws M4 x L8 hexagon socket head cap screw,
3 M4 nuts (SUS) 11.5 260.8 width across flats: 2.5, 8 screws
1 mounting manual 3.2 244.4
53 28 6.5
30 8.2
81.2
170
123.5 16.2
108 11.2
149.7 108 123.5 176 175.5

165.2
95.7
30
When the mounting bracket When the mounting 170 170
is used 18.5 bracket is used 244.4 7.5
63.7 65 260.8
25
Flow Sensor & Meter General Catalogue Flow Sensor Dimensions (FD-V70 Series)
Dimensions
FD-V70
Unit: mm
Sensor head
FD-P05 FD-F04
F
51.4
Cable length: 0.3 m, øB (pipe diameter: 3/8")
oil-resistant and high-flex cable (inner diameter: øC)
44.5 ø3.6 (4 cores x 0.18 mm 2 each) Cable length: 3 m,
(R15) oil-resistant and high-flex cable
ø14 ø3.6 (4 cores x 0.18 mm 2 each)
A
7.5
B
12.85
R15 A
D 26.3
11.25
11.5
E C
9.3 55
D
61
(175)
Mounting hole
9
position
When mounting brackets are attached Mounting bracket (2 brackets included)
G
Min. 70 E
F
14 22
4-ø4.6
7
G H
FD-P05 FD-P20 FD-P50 FD-P100 FD-F04 FD-F20 FD-F50

A 45.4 45.4 45.4 47.9 A 41.2 43.9 53.3
B 41.8 44.5 49.9 63.8 ø9.5 ø12.7 ø19
B
C 100 112 114 135 (pipe diameter: 3/8") (pipe diameter: 1/2") (pipe diameter: 3/4")
D 73 77 77 92.7 C Inner diameter: ø6.3 Inner diameter: ø9.5 Inner diameter: ø15.8
E 22.5 22.5 27.7 36.5 D 20 20 29.3
F 2-R(PT)3/8 2-R(PT)1/2 2-R(PT)3/4 2-R(PT)1 E 24 27 35
G 50 50 50 52 F 17 20 28
G 17.8 20.7 29.6
H 11.5 12.85 18.3
Display (DIN rail mounting type) Extension cable Power cable

FD-V70A/V70AP (DIN rail mounting) Included with the FD-P05/P20/ Included with the FD-V70/
When mounted (83.8)
P50/P100 V70P/V75/V75P
on a DIN rail 16.7 ø14 19
24
12.9 10.5
26.9 47.6 ø3.9 (5 cores x 0.20 mm 2)
Cable length: 3 m, 25.5 Cable length: 2 m
(R15) Max. 135° oil-resistant and high-flex cable
When cover
is opened: (R15) 8.7 ø3.6 (4 cores x 0.18 mm 2 each)
8.1
max. 77
(38.2) 33.2
15.2 11.4
4.2 35.4
16 49.3 18.5
Display (panel mounting type)

FD-V75A/V75AP (panel mounting) Panel mounting bracket (included) OP-51476
Standalone part
(78.2) Panel cutout dimensions When mounted in a panel
48 23.5 (Max. 73)
24 49
12.9 10.5 29.6
X
2 2 24.3
(R15) (R15)
Panel thickness: 1 to 6 7.6
24.7
11.3 45
Protective front cover (included)
16 18.5 7.4 7.5 X=24 x (A-1) +21
When A units are installed close to each other
83.1
+0.4
23.8 21 0
50 45
26
RELATED PRODUCT
The New Standard for Ease of Use
Harsh Environment Resistant

Pressure Sensors are Released
GP-M Series
WATER OIL MISTY AIR
Toughness and environmental resistance meet a wide variety of applications
Vibration Shock
Tough but light weight Fluid temperature
Tough &
resistance resistance
20G 50G 150 g −20 to 100ºC *1

Heavy-duty
High chemical resistance and hardness Performance durability
C e r a mic dia p hr ag m
Alumina
100 million
times*2
*1 No freezing or condensation
*2 This varies depending on the sensor model.
For details, contact your nearest KEYENCE office.
SUSXM7
DIAPHRAGM
AI2O 3
(Alumina)
O-ring
FKM
ø34.2 mm
Range Selection
NP N / P NP sw i tch abl e GP-M001 - 0.1 to +0.1MPa
86.7 mm GP-M010 - 0.1 to +1MPa

Switchable between
GP-M025 - 0.1 to +2.5MPa
[2 outputs] or M12
[1 output + analogue output] 4pin
GP-M100 0 to +10MPa
GP-M250 0 to +25MPa
Various cables and adapters 3
G 4
are optional accessories GP-M400 0 to +40MPa
0 MPa
27
SAFETY INFORMATION
Please visit: www.keyence.com Please read the instruction manual carefully in
order to safely operate any KEYENCE product.
KEYENCE CORPORATION
AUSTRIA HONG KONG MEXICO TAIWAN
Phone: +43 22 36-3782 66-0 Fax: +43 22 36-3782 66-30 Phone: +852-3104-1010 Fax: +852-3104-1080 Phone: +52-81-8220-7900 Fax: +52-81-8220-9097 Phone: +886-2-2718-8700 Fax: +886-2-2718-8711
BELGIUM HUNGARY NETHERLANDS THAILAND
Phone: +32 1 528 1222 Fax: +32 1 520 1623 Phone: +36 1 802 73 60 Fax: +36 1 802 73 61 Phone: +31 40 20 66 100 Fax: +31 40 20 66 112 Phone: +66-2-369-2777 Fax: +66-2-369-2775
BRAZIL INDIA POLAND UK & IRELAND
Phone: +55-11-3045-4011 Fax: +55-11-3045-5219 Phone: +91-44-4963-0900 Fax: +91-44-4963-0901 Phone: +48 71 36861 60 Fax: +48 71 36861 62 Phone: +44-1908-696900 Fax: +44-1908-696777
CANADA INDONESIA ROMANIA USA
Phone: +1-905-366-7655 Fax: +1-905-366-1122 Phone: +62-21-2966-0120 Fax: +62-21-2966-0121 Phone: +40 269-232-808 Fax: +40 269-232-808 Phone: +1-201-930-0100 Fax: +1-201-930-0099
CHINA ITALY SINGAPORE VIETNAM
Phone: +86-21-68757500 Fax: +86-21-68757550 Phone: +39-02-6688220 Fax: +39-02-66825099 Phone: +65-6392-1011 Fax: +65-6392-5055 Phone: +84-4-3760-6214 Fax: +84-4-6277-6616
CZECH REPUBLIC JAPAN SLOVAKIA
Phone: +420 222 191 483 Fax: +420 222 191 505 Phone: +81-6-6379-2211 Fax: +81-6-6379-2131 Phone: +421 2 5939 6461 Fax: +421 2 5939 6200
FRANCE KOREA SLOVENIA
Phone: +33 1 56 37 78 00 Fax: +33 1 56 37 78 01 Phone: +82-31-789-4300 Fax: +82-31-789-4301 Phone: +386 1-4701-666 Fax: +386 1-4701-699
GERMANY MALAYSIA SWITZERLAND
Phone: +49 61 02 36 89-0 Fax: +49 61 02 36 89-100 Phone: +60-3-2092-2211 Fax: +60-3-2092-2131 Phone: +41 43-45577 30 Fax: +41 43-45577 40
WW1-1094
The information in this publication is based on KEYENCE’s internal research/evaluation at the time of release and is subject to change without notice.
Copyright (c) 2013 KEYENCE CORPORATION. All rights reserved. FlowsensorGeneral-WW-C-GB 1015-2 600C88 Printed in Japan
* 6 0 0 C 8 8 *

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FLOW SENSOR and METER Ok

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FD-M Series FD-S Series FD-S Series (PFA type) FD-V70 Series

Free Minimal Accumulated

FLOW Sensor & Meter G en er a l C a ta l ogue

A Rich Variety of Model Variations

Flow Sensor Variations

Non-Wetted Electrode Electromagnetic Flow Sensor

Pipe diameter 10A 20A 25A 50A

* The operating pressure range is 1 MPa or less.

Coriolis Method Digital Flow Sensor

Separate-Amplifier Type Digital Flow Sensor

10A 15A 20A 25A

* Highly viscous fluids cannot be measured. (See page 19.)

Detection Technology Only Available from KEYENCE

ELECTROMAGNETISM + ELECTROSTATIC CAPACITANCE METHOD FD-M

EDDIES + ULTRASONIC WAVES METHOD FD-V70

CORIOLIS METHOD FD-S

When the fluid When the fluid Phase difference

Examples of Success in Various Locations

FD-S Cooling-water flow control for Cooling-water control for

Flow sensors highly resistant

Detecting range 0.15 to 1000 L/min.

Non-Wetted Electrode Electromagnetic Flow Sensor Pipe diameter

❙ Free flowing structure Variations

Dual digital display with easy setup

Enclosure rating: IP65 Switchable low direction

Can be installed regardless of flow direction.

Flow conditions that are understood

Separate-Amplifier Type Present value display Bank indicator

Set value indicator Set value display

Wire-saving and can be expanded Close vertical

DIN rail mounting

* The panel mounting type cannot be expanded.

❙ Supports temperature sensors ❙ Supports communication units (separate-ampliier type only)

Connection with the Temperature

Cooling water and warming water (tap,

Step Checking the instantaneous flow and temperature

Built-in display (ampliier) type Separate display (ampliier) type

Step Selecting the temperature sensor and communication unit as necessary

Temperature sensor dedicated for use Communication units

Step Selecting mounting brackets as necessary

L-shaped mounting bracket Flat mounting bracket

Sensor head (separate type)

Ampliier unit (separate type)

Minimal low detections

Detecting range 0 to 40 L/min.

Built-in display type sensors

Three low measurements made possible by the Coriolis method

Minimal lows Resolution: 0.1 mL/min. Rated range*1 0 to 20

Oil lows Oil, high pressure (5 MPa),

FD-SCB3 3m Approx. 115 g

Introducing 10 functions that Support a variety of applications

1 High-pressure support up to 5 MPa 6 Switchable low direction

4 Accuracy of ±5%* 9 High-temperature support up to 100°C

Model Cable length Weight

Step Checking the target fluid and viscosity

Pressure loss (MPa)

Pressure loss (MPa)

the pumps being used.

0.01 0.01 0.01

0.001 0.001 0.001

Step Selecting the basic sensor

DIN rail mounting type display

Step Selecting the communication unit as necessary