Advanced

Materials
Characterization
Techniques
LECTURE -3

Pavan Bosukonda
XPS Instrumentation

XPS instruments also use mu - metal Vacuum

(∼76% Ni, ∼17% Fe, ∼5% Cu, and ∼2% Cr) either in the construction
X-ray sources
of the analysis chamber, energy filter housing, and detector housing, or
in the lining of these chambers/housings since this material acts as an Detector
effective shield against any extraneous magnetic or electrostatic fields
Vacuum
Latin word “vacuo” – meaning empty

Revised definition - Region in space containing less gas than its surroundings

1 atm – 2 x 1019 molecules 1023 collisions/cm2s

Vacuum
Mean free path
Vacuum
Vacuum Systems

Only in 1960s – vacuum conditions better than ~10-7 Torr

Specialized pumping systems

Chamber characteristics (mu-metal)

• Low outgassing rate (surface adsorbates)

• Low corrosion rate (minimized at UHV)

• Low vapor pressure(high MP)

• Structural integrity(under both ambient and thermal) Cylindrical or spherical shapes

• Machining (ease of fabrication) & cost effectiveness

Conflat system (Junctions)

Other soft gasket materials – Al, Au, In

HV conditions – carbon-based O-rings

Types of vacuum systems
Types of vacuum pumps
Types of vacuum pumps
Rotary Vane pump Diaphragm pump

https://www.youtube.com/watch?v=AFHogF-9eGA https://www.youtube.com/watch?v=Ljb7R09f-8k
Oil Diffusion pump (momentum transfer pump)

1915 Wolfgang Gaede

NO moving parts

Low energy efficiency

Backstream Oil into chamber Cold traps or baffles

https://www.youtube.com/watch?v=ubno1kNtxIQ
Turbomolecular pump (momentum transfer pump)

https://www.youtube.com/watch?time_continue=91&v=f1SErZyhMe4&feature=emb_logo
Sputter Ion Pump (Entrapment pump)

https://www.youtube.com/watch?v=_SiJtauhhHs
Pumping speed

1 L/s for every 100 cm2 of surface area

20000 cm2 – 200 L/s