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100
Ta 1. run
Tantalum concentration, wt%
80 Ta 2. run
Tantalum layer
60
0.5 μm
Alloy zone
40
Stainless steel
Interface
20
Substrate Tantalum surface
0
-800 -600 -400 -200 0 200 400 600 800 10 μm
Distance from interface, nm
Fig. 5 — Cross section of tantalum surface
Fig. 4 — Concentration profile of tantalum alloy in 316 stainless steel. alloy.