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SEMICONDUCTOR EQUIPMENT

http://www.asmpacific.com
ASM Semiconductor Equipment Products
Index

Materials Materials
Process Model Process Model
Handling Handling
AD9312 Chip on Glass STN, CSTN, COG900 /
(COG) TFT and COG902 /
12” Wafer

Equipment
AD9212 COG930
Handling other types

Display
Flip Chip of Glass FOG900 /
AD8312FC Flex on Glass
(FOG) Panel FOG902 /
8” Wafer FOG930
AD838FC
Handling Panel Touch Panel
GEMINI Series
AD8312 / Lamination Bonding
AD8312R
12” Wafer
Handling ISLinDA Materials
Process Model
Handling
MCM12
Strip Form
TWIN832 Reflow Oven SR902 Series
Substrate

Curing
Oven
AD838 / Strip / Reel PC139 Series
Snap Curing
AD838P
Oven
Form
8” Wafer Substrate COE139 Series
AD838R
Epoxy DA Handling
AD838L /
AD838LM Materials
Process Model
Die Attach Equipment

Handling
IS898GA
TwinEagle Xtreme GoCu
TWIN833 Harrier Xtreme GoCu
Au / Cu / CuPd
iHawk Xtreme GoCu
AD830 Plus / Ball Bond
6” Wafer Eagle Xtreme GoCu
AD830R Plus
Wire Bondiing Equipment

Handling Eagle Xpress GoCu


AD210 Thermosonic
Wire Bond iHawk Xpress Opto
iHawk Xtreme
AD880 Series Au
Harrier Xtreme
Ball Bond
TWIN830UR Xpress-LB
iHawk-V
AD830U /
AD830UR
Heavy
AL501
Eutectic DA Aluminum Wire
8” Wafer AD211 Plus / Ultrasonic
AD212 TwinPhonon
Handling Wedge
Wire Bond Fine
AD220 AB589 Series
Aluminum Wire
SD832D AB530
Soft Solder DA
SD890A
Solder Paste Materials
Misc eClip Process Model
DA / Clip Attach Handling
Other DA

AD881 Series Advanced 4” Wafer


ES101
Epoxy DA Optical Handling
6” Wafer AD100 Series Inspection Strip Form
Handling VIM300
(AOI)
Equipment

PD & LD Substrate
AOI / FOL

AD819-PD /
Eutectic DA AD819-LD Chip Probing
6” Wafer CP100
Lens Holder Attach IS868LA3 Handling
Die Sorting AS899
DI-Wafer Cleaning
ISCM868
CIS Equipment

System Wafer MS100 Plus


Map Sorting
Waterless Base CMOS Form MS109
ISCM139B
Cleaning System Camera
Module
Lens Holder Alignment IS600G2
Camera Module
Auto Focusing & IS300-AF
Electrical-Test

1
ASM Semiconductor Equipment Products
Index

Materials Materials
Process Model Process Model
Handling Handling
Dispensing All kinds of IC and
DS86 Laser Mark
+ Testing Power Device LS1000

Other Equipment
Handler
+ Compensating Matrix Leadframes
Dispensing
Equipment

Glob-top DS830 CSBGA / PBGA,


Strip Form Ball Placement BP2000
flex BGA & etc.
Glob-top, Dam & Fill Substrate DS530H CSBGA, MLP,
Tape Sorting CS900
Potting DS520V QFN, SiP & etc.
Lead Frame Reel Form
Glob-top DS830LB LFC130 Series
Cutting Substrate

Materials Materials
Process Model Process Model
Handling Handling
Strip Form SIPLACE SX-Series
Transfer Molding OSPREY
Substrate

Equipment
Placement
SMT SIPLACE X-Series
Equipment

SMT
12” Wafer WLP300 SMD Components
Molding

Compression Molding Placement


Bonding SIPLACE Di-Series
IDEALcompress™
Strip Form SIPLACE CA
IDEALmold™
Transfer Molding Substrate
IDEALab™

Materials
Process Model
Handling
Form System

Saw and Pick & Place iSAP


Singulation,
Trim &

Strip Form MPHENIX


Mechanical Press Substrate
Trim / Form
MP-TAB

Materials
Process Model
Handling

FT2026
Test & Finish

Discrete
Handling
System

Turret Based Test Package


FT2018
Handler
Mini-Discrete
FT-Mini
Package

Materials
Process Model
Handling

Panel Testing MCPCB, PT86


Ceramic
Taping System

LED Testing,

Testing & Sorting SLS230 Series


Sorting &

SMD Type
Taping LED SLT400 Plus

Testing & Sorting IP360 Series


HP LED
Taping AT410

2
AD9312 AD9212
12” Thermocompression 12” Dual Head Flip Chip System
Flip Chip System

HIGH TC BONDING HIGH


PRECISION PROCESS PRECISION

Features Features
 Individually controlled dual bond head with shared  Providing dual flip chip head bonding process
up/down-look inspection  Advanced PR inspection system for high precision
 Equipping with pre-dispensing station for TC NCP bonding
process (option)  Thin dice handling capability
 Suitable for 2.5D / 3D IC packaging

Applications Applications
 Singulated BGA  Singulated BGA
 BGA  BGA
 Ceramic panel  Ceramic panel
 Singulated substrate on carrier  Singulated substrate on carrier
 Lead frame  Lead frame
 And more……  And more……

3 *Remark: All performance is package dependent


FLIP CHIP
SOLUTIONS

AD8312FC AD838FC
12” High Speed Flip Chip System 8” High Speed Flip Chip System

HIGH THIN DIE HIGH FLUX


HD LF
SPEED HANDLING SPEED DISPENSING

Features Features
 Supporting both flip chip and direct die bonding  Supporting both flip chip and direct die bonding
processes processes
 Up to 100 mm substrate width handling  Dual flux dispensing capability
 Flux dipping and dual flux dispensing capability  ASM in-house developed Archerfish dispensing system
 ASM in-house developed Archerfish dispensing system  In-lining with oven for reflow process
 In-lining with oven for solder reflow  Machine cascade for multi-die handling
 Optional for thin die handling

Applications Applications
 QFN / DFN  QFN / DFN
 SOIC  SOIC
 SO  SO
 And more……  And more……

*Remark: All performance is package dependent 4


AD8312
12” Epoxy Die Attach System
(For Strip Form Substrate Handling)

AD8312R ISLinDA
12” Epoxy Die Attach System 12” Thin Die Attach System
(For Reel Form Substrate Handling)

HIGH HD LF for THIN DIE CLASS 100


HD LF
SPEED AD8312 HANDLING STANDARD

Features Features
 World’s first 12” dual dispensing die bonding series  High density lead frame (100 x 300 mm²) handling
 AD8312: High density lead frame (100 x 300 mm²)  World’s first 12” dual dispensing die bonding series
handling and universal workholder design for various  Individual pick and bond system
packages  Thin die handling capability with patented design
 AD8312R: strategic designs for handling backside  Panel bonding capability
plated substrates
 In-lining with curing oven (option)

Applications Applications
 Mini-BGA  PLCC  Mini-BGA  PLCC
 Flex BGA  MEMS  Flex BGA  Image sensor
 CSPBGA  PDIP  CSPBGA  And more……
 MLP/QFN  Smartcard (AD8312R)  MLP/QFN
 QFP  And more……  QFP
 TQFP  TQFP

5 *Remark: All performance is package dependent


12” EPOXY DA
SOLUTIONS

MCM12
12” Multi-Chip System

X-LARGE
HD LF
SUBSTRATE

Features
 Working range up to 330 x 210 mm²
 Up to 14 types of picking tools handling capability
 Up to 5 types of ejecting kits installation
 SMD bonding capability
 Direct die attach / flip chip bonding capability
 Supporting auxiliary dispensing system

Applications
 BGA
 Wafer submount
 MLP/QFN
 Metal can
 And more……

*Remark: All performance is package dependent 6


AD838
8” Epoxy Die Attach System

TWIN832 AD838P AD838R


8” Dual Epoxy 8” Epoxy Die Attach System 8” Epoxy Die Attach System
Die Attach System (for High Precision Placement) (for Reel Form Substrate)

DUAL HIGH HD LF HIGH


HD LF HD LF
WAFERS SPEED for AD838 SPEED

Features Features Features


 Highest throughput per footprint  AD838: up to 100 mm substrate width  High density reel form substrate up to
 Single machine for dual dice packages  AD838P: high precision placement 100 mm width
 High density lead frame (100 x 300 mm²)  Patented bond head design  Patented bond head design
handling  Dual dispensing system  Dual dispensing system
 Patented bond head and dispensing  Providing graphical SPC data with latest  Providing graphical SPC data with IQC
system IQC system system
 In-lining with curing oven or pressing
system (option)

Applications Applications Applications


 QFN / DFN  SOT  QFN / DFN  SOT  Smartcard
 TQFP  And more HD  TQFP  And more HD  RFID package
 PLCC lead frames……  PLCC lead frames……  Any reel form substrate
 TSSOP  TSSOP
 TSOP  TSOP
 SOIC  SOIC

7 *Remark: All performance is package dependent


8” EPOXY DA
SOLUTIONS

AD838L
8” Epoxy Die Attach System
(for Direct Substrate Indexing)

AD838LM IS898GA
8” Epoxy Die Attach System 8” Epoxy Glass Attach System
(for Vibration Boat Inputting)

DIRECT CERAMIC VIBRATION BOAT CLASS 100 UV SNAP


HANDLING FEEDER INPUT STANDARD CURE

Features Features
 Direct ceramic substrate indexing  Various cleaning modules during glass attach process
 Anvil block with clamp force self-compensation design  Dual glue writing capability
 Panel bonding capability with intelligent global  Suitable for strip form substrate or boat carrier
substrate alignment  Supporting glass presentation on mylar / waffle pack
 Dual stamping/ dispensing process  UV snap curing system (option)
 AD838LM with input vibration boat feeding system

Applications Applications
 Ceramic  BT
 MCPCB  CLCC
 MLP/QFN  PLCC
 QFP  Singulated lens holder
 TQFP  And more……

*Remark: All performance is package dependent 8


AD830 Plus
6” Epoxy Die Attach System

TWIN833 AD830R Plus


6” Dual Epoxy 6” Epoxy Die Attach System
Die Attach System (for Reel Form Substrate)

DUAL HIGH OPTICS


HD LF HD LF
WAFERS SPEED ARRAY

Features Features
 Single machine for dual-die packages  Patented bond head design
 High density lead frame (100 x 300 mm²) handling  High density lead frame (100 x 300 mm²) handling
 Highest throughput with smallest footprint  Optics array system enhancing bonding cycle time
 Patented bond head design  True color camera with white LED lighting for handling
 8” wafer handling (option) various materials
 AD830R Plus with reel form substrate handling
 8” wafer handling (option)

Applications Applications
 SMD LED  SMD LED
 Pre-molded lead frame  Chip LED
 EMC lead frame  Top LED
 High Power LED  EMC lead frame
 And more HD lead frames……  Side view LED
 And more……

9 *Remark: All performance is package dependent


6” EPOXY DA
SOLUTIONS

AD210 AD880 Series


6” Epoxy Die Attach System Epoxy Die Attach System

X-LARGE UV SNAP X-LARGE


SUBSTRATE CURE SUBSTRATE

Features Features
 Achieving ±5 µm @ 3 sigma XY placement  Up to 8” x 8” substrate handling
 Up to 8” x 8” bonding area  DDR rotary bond arm system
 Individual control of pick and bond process  Dual loading system for automatic materials handling,
 Patented bond head design substrate & wafer loading (option)
 UV snap curing system (option)

Applications Applications
 Silicon wafer submount  Silicon wafer submount
 Large PCB substrate  PCB
 High precision photonics device  Ceramic
 And more……  And more……

*Remark: All performance is package dependent 10


AD830U
Eutectic Die Attach System

TWIN830UR AD830UR
Dual Eutectic Die Attach System Eutectic Die Attach System
(for Reel Form Substrate) (for Reel Form Substrate)

HIGH DUAL HIGH


SPEED WAFERS SPEED

Features Features
 Single machine for dual dice packages  Independent temperature control in each heating zone
 Highest throughput per footprint  Patented bond head design
 Patented bond head design  Forming gas supply during process
 Forming gas supply during process  Dispensing system for flux eutectic (option)
 In-lining with lead frame cutting system and automatic  AD830UR: in-lining with lead frame cutting system and
wire bonding system automatic wire bonding system

Applications Applications
 SOD  SOD
 SOIC  SOIC
 SOT  SOT
 And more……  And more……

11 *Remark: All performance is package dependent


EUTECTIC DA
SOLUTIONS

AD211 Plus / AD212 AD220


Direct Eutectic Direct Eutectic
Die Attach System Die Attach System

HEATED PANEL FORM X-LARGE HEATED STRIP FORM


COLLET B/H SUBSTRATE SUBSTRATE COLLET B/H SUBSTRATE

Features Features
 Direct ceramic substrate handling  Patented process and designs
 Patented process and modules design  Individual control pick and bond system
 Individual control pick and bond system  Up to 300 mm long lead frame handling
 Graphical SPC data with IQC system  Graphical SPC data with IQC system
 Anti-thermal shock design for eutectic process  Providing 8 (heating zones) + 3 (cooling zones)
 Forming gas supply during process eutectic bonding environment
 AD212: up to 8” x 8” substrate handling  Forming gas supply during process

Applications Applications
 Ceramic based high power LED  Strip form high power LED
 Silicon based high power LED  Premold lead frame

*Remark: All performance is package dependent 12


SD832D SD890A eClip
Soft Solder Soft Solder Clip Bonding System
Die Attach System Die Attach System

PATENTED LEADING XY B/H ALL-IN-ONE PATENTED


HD LF
DESIGN THROUGHPUT SHUTTLING SOLUTION DESIGN

Features Features Features


 Industry’s leading throughput  Matrix lead frame handling with XY  All-in-one bonding solution from die
 Up to 100 x 300 mm² HD lead frame shuttling bond head system bonding, clip bonding to reflow process
handling  Motorized solder wire feeding and  Patented bond head design
 Patented bond head system spanking system  Supporting dual dispensing system
 Patented solder writing technology  AB dice handling with rotary collet bond  Array clip bonding capability
 AB dice handling with rotary collet bond arm design  Supporting independent temperature
arm design  Automatic die theta alignment controlling regions for reflow process
 Oxygen level control with forming gas  Oxygen level control with forming gas  Optional configurations with
supply supply  12” wafer handling
 Flip chip bonding
 Multi-die bonding

Applications Applications Applications


 High power device  High power device  High power discrete package
 TO-220  TO-220  DPAK matrix
 SOT  SOT  Power SO
 DPAK  DPAK  And more……
 DPAK matrix  DPAK matrix
 PowerSO  PowerSO
 And more HD high power lead frame……  And more high power lead frame……

13 *Remark: All performance is package dependent


OTHER DA
SOLUTIONS

AD819-PD
Photo Diode Epoxy
Die Attach System

AD881 Series AD100 Series AD819-LD


Flexible Epoxy Vertical LED Epoxy Laser Diode Eutectic
Die Attach System Die Attach System Die Attach System

MULTI NON-STOP PATENTED PRECISION METAL CAN


WAFER OPERATION DESIGN PLACEMENT HANDLING

Features Features Features


 DDR rotary bond arm system  Dual stacks loading system  Carrier free design for materials handling
 AD881 with 8” x 5” dual workholders  Dual clamps indexing algorithm  AD819-PD with “Two-in-One stamp and
system  Pre-bond and post-bond inspections bond system”
 AD881H with automatic substrate load/ simultaneously  AD819-LD with “Moving Temperature
unload system  Providing different algorithms for die Control Profile” for eutectic process
 AD881M with up to 3 wafers handling alignments  AD819-LD with submount and top dice
 AD881MH with up to 3 wafers handling  AD100MM with automatic input magazine handling
and automatic substrate loading / system
unloading system

Applications Applications Applications


 Top LED  Vertical lead frame  Metal can handling
 Chip LED
 PCB
 Bent lead frame
 And move......

*Remark: All performance is package dependent 14


IS868LA3 ISCM868 ISCM139B
Lens Holder DI-Water Cleaning System Waterless Base
Attach System Cleaning System

CLASS 10 QUAD-EPOXY PRECISION CLASS 100 DI-WATER


STANDARD WRITING PLACEMENT STANDARD SPRAY

Features Features Features


 World’s first quad dispensing system for  Spraying of DI-water cleaning with dual  In-lining cleaning system with
CIS bonding process air atomizing nozzles programmable air blowing
 Strategic module design for FM control  Programmable motion of swing spray arm  Achieving factory automation by fully
 ULPA filter implementation and spinner table automatic materials handling
 Multiple rotary clean bath  High speed centrifugal drying
 High resolution up-look and bond optics  In-line capability with ASM’s AOI system
and lens holder bonding system
 ISCM868 + VIM300 + IS868LA3

Applications Applications Applications


 CLCC  CLCC  CLCC
 PLCC  PLCC  PLCC
 BGA  BGA  BGA
 PCB  PCB  PCB
 Singulated unit  And more......  And more strip form substrate for
 And more...... cleaning process……

15 *Remark: All performance is package dependent


IMAGE SENSOR
SOLUTIONS

IS600G2 IS300-AF
Active Alignment Camera Module Auto Focusing &
Lens Holder Attach System Electrical-Test System

CLEAN 10 NON-STOP DUAL SETS OF


STANDARD OPERATION TEST STATIONS

Features Features
 Class 10 cleanliness  Supporting both FPC type and non-FPC type of CMOS
 Active alignment of camera module camera module
 Leading throughput among same type of bonders  Providing open/short test and current test
 Equipping with four dispensing and active alignment  Dual test charts for auto-focusing (AF) station with
(AA) stations built-in backlight illumination
 Utilization of relay lens for smaller machine footprint  In-line capability with dispensing and UV pre-curing
 In-line capability with multiple IS600G2 for mass station (option)
production (option)

Applications Applications
 CLCC  CLCC
 PLCC  PLCC
 BGA  BGA
 PCB  PCB
 And more……  And more singulated image sensor packages……

*Remark: All performance is package dependent 16


DISPLAY
SOLUTIONS

COG900 / COG902 / COG930 FOG900 / FOG902 / FOG930 GEMINI Series


Chip on Glass (COG) Flex on Glass (FOG) Panel Lamination System
Bonding System Bonding System

QUAD-EPOXY FLEX on FILM (FoF) NAKED EYE PATENTED


WRITING SOLUTION 3D SOLUTION DESIGN

Features Features Features


 True colour LED inspection  True colour LED inspection  Supporting pre-defined computer aid
 Supporting belt input/output system and  Supporting belt input/output system and dispensing patterns
tray handling system tray handling system  Up to 310 x 190 mm glass handling
 COG930: up to 13.4” glass handling  FOG930: up to 13.4” glass handling  Gemini-RTA provides real time alignment
 COG902 for high speed bonding for  FOG902 for high speed bonding for for precision control
mobile phone application mobile phone application  UV line scan cure system covers full area
 COG900 for all round COG application  FOG900 for all round FOG application pre-curing after lamination
 In-line capability with glass edge cleaning  In-line capability with COG system
system and FOG system

Applications Applications Applications


 STN  STN  Touch panel bonding
 CSTN  CSTN  Naked eye 3D application
 TFT  TFT
 And more types of glass and LSI for  And more types of glass and LSI for
COG bonding…… FOG bonding……

17 *Remark: All performance is package dependent


CURING
SOLUTIONS

SR902 Series PC139 Series COE139 Series


Reflow Oven Snap Curing Oven Snap Curing Oven

CONVECTION + REEL FORM


RADIATION HEATING SUBSTRATE HANDLING

Features Features Features


 Independent temperature controlling  Independent temperature controlling zones  Sophisticated oxygen level control
zones  PC139R-5Z: up to 5 temperature  Independent temperature controlling
 Combination of convection and radiation controlling zones and reel form substrate zones
heating modes handling  COE139: strip form substrate handling
 SR902L with automatic off-loading system  PC139R-10Z: up to 10 temperature  COE139R: reel form substrate handling
 SR902W for manual loading wafer controlling zones and reel form substrate  In-line capability with AD830 Plus, and
substrate for reflow handling other die attach system (option)
 In-line capability with AD9212 (option)  In-line capability with AD838R, AD8312R,
etc. (option)

Applications Applications Applications


 Reflowing process for high lead (> 85%  Smartcard  SOT
Pb) solder, lead free solder, flux reflow,  SOT  Top LED
etc..  And more strip / reel form substrates......  And more strip / reel form substrates......

*Remark: All performance is package dependent 18


TwinEagle Xtreme GoCu Harrier Xtreme GoCu iHawk Xtreme GoCu
Dual Heads Dual Heads Ultra High Throughput Discrete /
Gold Wire Bonder Wire Bonder Opto Wire Bonder

PATENTED HIGH LOW LOOP Cu WIRE HIGHER OPTICS PR


AWRS AWRS AWRS
TECHNOLOGY RESOLUTION ~ 35 µm BONDING UPH SYSTEM

Features Features Features


 Auto Wire Rethreading System (AWRS)  Auto Wire Rethreading System (AWRS)  Auto Wire Rethreading System (AWRS)
 Fine pitch capability: 30 µm BPP  Up to 20% higher UPH compared to  Simple package conversion with fully
 Bond placement: 2 µm @ 3 sigma Harrier motorized material handling system
 Extensive field knowledge & reliability  User-friendly, intelligent Windows-based  Robust indexer to handle high density
proven solutions for 2 N wires, ultra interface discrete package
low-k, 45 nm technology dies  Cu wire bonding & Cu BSOB
 Smart Skip – for skipping missing die

Bonding Capabilities Bonding Capabilities Bonding Capabilities


 Bonding method: thermosonic  Bonding method: thermosonic  Bonding method: thermosonic
 Cu wire size: 0.6 mil ~ 2.0 mils  Cu wire size: 0.6 mil ~ 2.0 mils  Cu wire size: 0.6 mil ~ 2.0 mils
 Wire length: max. 8 mm  Wire length: max. 8 mm  Wire length: max. 8 mm
 Bonding speed: 20 wires/sec for 2 mm  Bonding speed: 20 wires/sec for 2 mm  Bonding speed: 20 wires/sec for 2 mm
 Lead locator detection: 5 ms / lead  Lead locator detection: 5 ms / lead  Lead locator detection: 5 ms / lead

19 *Remark: All performance is package dependent


Eagle Xtreme GoCu Eagle Xpress GoCu
Model Based Wider Substrates
Wire Bonder Wire Bonder

AUTO AUTO FASTER


AWRS AWRS
PR LOOPING THAN Au

Features Features
 Auto Wire Rethreading System (AWRS)  Auto Wire Rethreading System (AWRS)
 Bonding area: 56 x 70 mm @ LF < 80 mm  Bonding area: 56 x 90 mm @ LF 100 x 300 mm
 Placement accuracy: 2.0 µm @ 3 sigma  Placement accuracy: 2.0 µm @ 3 sigma
 Eagle Xtreme is upgradable  Revolutionary auto PRS
 Loop definition

Bonding Capabilities Bonding Capabilities


 Bonding method: thermosonic  Bonding method: thermosonic
 Cu wire size: 0.6 mil ~ 2.0 mils  Cu wire size: 0.6 mil ~ 2.0mils
 Wire length: max. 8 mm  Wire length: max. 8 mm
 Bonding speed: 20 wires/sec for 2 mm  Bonding speed: 20 wires/sec for 2 mm
 Lead locator detection: 5 ms / lead  Lead locator detection: 5 ms / lead

*Remark: All performance is package dependent 20


iHawk Xpress Opto iHawk Xtreme Harrier Xtreme
Wire Bonder Wire Bonder Dual Heads
Wire Bonder

WIDER
CERAMIC AWRS AWRS
SUBSTRATES

Features Features
 Auto Wire Rethreading System (AWRS)  Auto Wire Rethreading System (AWRS)
 Wider bonding area – 56 mm x 90 mm  Easy conversion from Au to non-Au wire handling
(substrate width < 102 mm) and vice versa
 Capable of handling 4” x 4” ceramic  Optional non-Au wire bonding upgrade kits
substrate (GoCAP)
 Optional non-Au wire bonding upgrade
kits (GoCAP)

Bonding Capabilities Bonding Capabilities


 Bonding method: thermosonic  Bonding method: thermosonic
 Copper wire bonding: option with  Cu Wire Bonding: option with conversion kit
conversion kit  Wire length: max. 8 mm
 Wire length: max. 8 mm  Bonding speed: 20 wires/sec for 2 mm
 Bonding speed: 20 wires/sec for 2 mm  Lead locator detection: 5 ms / lead
 Lead locator detection: 5 ms / lead

21 *Remark: All performance is package dependent


LED OPTO
SOLUTIONS

Xpress - LB iHawk-V
Long Bar Lighting Application Wire Bonder
Wire Bonder

720 mm LONG HIGH


AWRS
LEAD FRAME PERFORMANCE

Features Features
 Auto Wire Rethreading System (AWRS)  High speed wire bonding capability
 Up to 720 mm long magazine application  Pro-longing MTBA with latest input / output magazine
 Up to 100 mm width lead frame handling handling
 COB programming feature  Extended workholder - support up to 2 strips in waiting
 Easy loop control
 Optional non-Au wire bonding upgrade kits (GoCAP)

Bonding Capabilities Applications


 Bonding method: thermosonic  Vertical lead frame
 Cu wire size: 0.7 ~ 2.0 mils
 Wire length: max. 8 mm
 Bonding speed: 20 wires/sec for 2 mm
 Lead locator detection: 5 ms / lead

*Remark: All performance is package dependent 22


AL501 TwinPhonon
Heavy Aluminum Dual Head Fine Aluminum
Wire Bonding System Wire Bonding System

DUAL PATENTED DUAL PATENTED


BOND HEAD DESIGN ROTARY TABLE DESIGN

Features Features
 5 – 20 mil aluminum wire handling  PATENTED dual workchucks design
 Hybrid wire bonding capability with dual bond  Achieving “non-stop" operation
heads system  Linear motor with DDR driven rotary worktable
 Implementing linear motor and DDR system
 “Smart BQM” system supervising bonding
quality
 Wire pull testing system integration (option)

Applications Applications
 TO-220  Toy
 DPAK matrix  Game
 And more power discrete packages……  Melody
 And more other COB packages……

23 *Remark: All performance is package dependent


ALUMINUM
WIRE BONDING
SOLUTIONS

AB589 Series AB530


Rotary Head Fine Aluminum Rotary Table Fine Aluminum
Wire Bonding System Wire Bonding System

LARGE ROTARY HIGH HIGH LEAD


WORKTABLE BOND HEAD SPEED COUNT APP.

Features Features
 Fine pitch capability for advanced packages  Fine pitch capability for advanced packages
 High precision rotary bond head design  Widely implementing linear and DDR motor system
 Patented “PR on the Fly” capability  Multi-unit / multi-PCB bonding capabilities
 Standard 8” x 6” large effective bonding area  Supporting various bonding requirements for different
 Supporting universal carrier design for full range products
application (option)
 Deep access bonding capability (option)
 Automatic material handling capability (option)

Applications Applications
 Chip-on-board (COB)  Chip-on-board (COB)
 Multi-die  Multi-die/multi-PCB
 LED display  High lead count bonding
 Chip-on-flex (COF)  And more……
 Chip-on-glass (COG)
 Ceramic
 And more……

*Remark: All performance is package dependent 24


INSPECTION
SOLUTIONS

ES101 VIM300 CP100


Automatic AOI System Automatic AOI System Automatic Chip Probing
(Wafer Level Inspection) (DIE / WIRE Inspection) System

Features Features Features


 True colour AOI capability  True colour AOI capability  Probing area up to 6” diameter
 Direct foton ring handling  2D / 3D inspection  Supporting 2” ISP and PD handling
 Dual wafers loading system  Dual substrates loading system  Supporting ESD testing
 Prolonging MTBA with up to 72 ring on  Individual control dual main stations  Built-in ASM in-house developed testing
frame handling  Supporting X-Y motion system
 Defect identification system with laser
marking for rejected units

Applications Applications Applications


 Automatic advanced optical inspection  Die bonded and wire bonded substrate  Blue LED wafer
system for die, e.g. LED die…… on either substrate / lead frame……  Green LED wafer

25 *Remark: All performance is package dependent


DIE / MAP SORTING
SOLUTIONS

AS899 MS100 Plus MS109


Die Sorting System Map Sorting System Map Sorting System
(for 8.8” Picking Area)

CONVECTION + 200 80 x 80 MM 8.8” 100 x 100 MM


RADIATION HEATING O/P BIN BINNING AREA PICKING AREA BINNING AREA

Features Features Features


 Parallel pick, test and sort process with  Dual bond arms design  Dual bond arms design
rotary turret design  Up to 200 output bin frames  Up to 8.8” picking area
 Supporting various types of detectors and  Up to 80 x 80 mm binning area  Up to 100 x 100 mm binning area
testers integration  Supporting post-sort inspection  Up to 200 output bin frames handling
 Flexible bin block arrangement  Supporting post-sort inspection
 Supporting XYZ prober motions
 Simple “click & fit” bin block design”

Applications Applications Applications


 Individual LED dice testing and sorting  Sorting die, e.g. blue LED, white LED,  Sorting die, e.g. blue LED, white LED,
solution laser diode, etc. based on wafer map laser diode, etc. based on wafer map
information information

*Remark: All performance is package dependent 26


DS86 DS830
Automatic Dispensing System Automatic Dispensing System
(With Compensation)

3 – IN – 1 WHITE LED 8 DISPENSING


DISPENSING APPLICATION HEADS CONTROL

Features Features
 Dispensing + testing + compensating in one pass  Up to 8 dispensing heads handling capability
 Enhancing production yield  Automatic encapsulant compensation by inspection
 Automatic materials handling system feedback
 Equipping with integrated sphere for light collection,  Implementing ASM in-house developed Archerfish
optional up to 8” integrated sphere handling dispensing control system

Applications Applications
 MCPCB  Photo-coupler
 LED lighting module  Lead frame based substrate
 And more LED applications……  And more……

27 *Remark: All performance is package dependent


DISPENSING
SOLUTIONS

DS530H DS520V DS830LB


Automatic Dispensing System Automatic Dispensing System Automatic Dispensing System
(for Horizontal Substrate Applications) (for Vertical LED Applications) (for Light Bar Applications)

4 – PUMP PHOSPHOR NON-STOP 650 MM


VERTICAL LED
DISPENSING APPLICATION OPERATION EXTRA LONG

Features Features Features


 Dual workholders with dual elevators  Engineered for vertical LED application  Tailor-made for LED light bar handling
system  Automatic materials handling system  Automatic materials handling system
 Supporting “Left-in, Left-out; Right-in,  Up to 18 magazines at once  Up to 650 mm length of substrate handling
Right-out” operation  Supporting “Left-in, Left-out; Right-in,
 Quad-pump dispensing implementation Right-out” operation
 Phosphor handling capability  Dual pumps implementation (option)
 Supporting various dispensing
technologies

Applications Applications Applications


 SMD LED  Vertical LED  LED light bar
 Ceramic
 MCPCB
 And more LED applications……

*Remark: All performance is package dependent 28


OSPREY WLP300
Small Lot Molding System 12” Wafer Level Molding System

SMALLEST 12” WAFER LEVEL


SIZE MOLDING MOLDING

Features Features
 World smallest footprint automatic molding machine  World’s first 12” automated WLP compression
 Built-in PGS™ molding capability encapsulation system
 Minimum tooling cost and shortest lead time  Flexible to handle wafer size ranging from 4” to 12”
 Ideal for small lot, high product mix production  Equipped with encapsulant weight compensation
 Optional for liquid epoxy, clear silicone and granular
powder handling

Applications Applications
 BGA  Wafer level packaging
 QFN  Wafer level LED
 SOT  Cu bump pillar WLP
 PDIP
 PoP

29 *Remark: All performance is package dependent


MOLDING
SOLUTIONS

IDEALcompress™ IDEALmold™ IDEALab™


Automatic Molding System Automatic Molding System Manual Molding System
(Strip Form Substrate Handling) (Strip / Reel Form Substrate Handling)

FLEXIBLE DISPENSING PGS™


CONFIGURATION MOLDING

Features Features Features


 Ideal for ECO friendly manufacturing  Suitable for standalone or in-line  Manual molding system derived from
 Various dispensing configuration, configuration IDEALmold™
including, liquid epoxy, clear silicone,  Flexible press configuration of 1 to 4  Mold chase compability with IDEALmold™
granular powder dispensing presses  Process parameter portability to
 Input and output pattern recognition IDEALmold™
features  Suitable for R&D
 Vacuum and wedge molding capability
 High pre-heat temperature capability
 Pinnacle Gating System (PGS™) molding
capability (option)

Applications Applications Applications


 Up to 150 x 300 mm substrate  Mini-BGA  Taped / Tapeless QFN
molding  Flex BGA  Mini-BGA
 QFN  Flex BGA
 PLCC  SOT
 TSSOP  Punch type micro QFN
 PoP

*Remark: All performance is package dependent 30


SINGULATION,
TRIM & FORM
SOLUTIONS

iSAP MPHENIX MP-TAB Series


Integrated Saw and Automatic Trim & Form System Automatic Trim & Form System
Pick & Place System

SMART BLADE PATENTED AUTO TUBE


HD IDF LF
HEIG HT CHECK DESIGN LOADER

Features Features Features


 Single chuck table with dual chuck tables  100 x 300 mm high density lead frame  Cost effective discrete package
speed handling singulation platform
 Robust chuck table design for warpage  High tonnage application  Suitable for ultra high density lead frames
handling & high saw speed  Vision inspection for orientation and uncut  Modular construction for various
 Eagle View vision to overcome vision dam bar integration
stoppage during alignment
 Blade height check on each substrate
without affecting cycle time

Applications Applications Applications


 BGA  QFP  SOT
 CSBGA  TQFP  SOD
 QFN  SOIC (IDF)  QFN
 Micro SD  QFN  DFN
 and more......  and more......  and more......

31 *Remark: All performance is package dependent


TEST HANDLING
SOLUTIONS

FT2026 FT2018 FT-Mini


Turret-Based Test & Turret-Based Test & Turret-Based Test &
Finish Handler Finish Handler Finish Handler

HIGH SPEED HIGH AUTO UNIT


16 TEST SITES iCONTACT
WITH ARC ACCURACY REPLACEMENT

Features Features Features


 26 pick heads for multiple process steps  18 pick heads for multiple process steps  18 pick heads for multiple process steps
 Selectable for various onloading /  iContact for double unit detection & good  High accuracy for mini package
offloading system testing yield  Vacuum stopper to prevent chipping
 Supporting various vision inspection  Vacuum stopper to prevent chipping  Best fit for mini-discrete packages
technologies  Best fit for small size IC/discrete packages
 Auto reel changer (ARC) (option)

Applications Applications Applications


 SOIC  SC70  SOD923
 TSSOP  SOT23 / 25 / 26  SOT113
 QFN / MLP  SOD123  DFN1006
 and more......  QFN (1 – 5 mm)  DFN0603
 SOIC / MSOP  and more......
 and more......

*Remark: All performance is package dependent 32


PT86 SLS230 Series
Automatic Panel Testing System Automatic LED (SMD) Sorting
System

Features Features
 Testing packaged LED for both optical & electrical  Wide range of application
properties  SLS230: chip LED
 SLS230S: sideview LED
 Back-side probing capability
 SLS230T Plus: top LED
 Co-operating with dual workholders and dual materials
 Anti-bin mixing design with digital labeling design
handling system
 Compatible to integrate with various types of detectors
 Simple conversion with universal workholder design
and testers
 Built-in ASM in-house developed testing system
 Supporting 256 output bins
 Integrated sphere for light collection, up to 8” ISP
(option)

Applications Applications
 MCPCB  SLS230: chip LED, e.g. 0402, 0603, 0605, 0805,
 Ceramic LED substrate 1206, etc.
 SLS230S: sideview LED, e.g. 008, 010, 020, 215,
335, etc.
 SLS230T Plus: top LED, e.g. 3528, 5050, 5252, 5450,
5630, 6045, 7020, 7474, etc.

33 *Remark: All performance is package dependent


TEST, SORT & TAPE
SOLUTIONS

IP360 Series SLT400 Plus AT410


Automatic LED Sorting System Automatic LED (SMD) Taping Automatic LED Taping System
System

Features Features Features


 One-stop solution from test, sort and  Applicable to wide range of top LED,  Applicable for ceramic or silicon sawn
output with good traceability sideview LED and chip LED package
 Materials handling  High throughput PPH: 45,000 +  All in one solution for inspection, checking
 Input system: wafer frame / bowl feeding  Built-in ASM in-house developed & taping
system
checking system  High throughput
 Output system: tape-and-reel output, bin
 For checking Vf, Ir & POL and optical  8,000+ PPH*
frames and / or bins
parameters  Up to 8” picking area
 Wafer barcode scanning, unit map, label
printing and output file generation  Advanced in-pocket inspection system  Advanced inspection capability
 Package surface inspection
package for good traceability of devices  Automatic repick package to ensure
 Up-look inspection
(option) good package in pocket  In-pocket inspection
 Supporting automatic reel change  Automatic repick package to ensure good
capability (option) package in pocket

Applications Applications Applications


 Ceramic based molded LED  Chip LED  Ceramic based molded LED
 Silicon based molded LED  Top LED  Silicon based molded LED
 Molded LED with lens  Sideview LED  Molded LED with lens
 And more……

*Remark: All performance is package dependent 34


LS1000 BP2000
Laser Mark Handler Ball Placement System

Features Features
 Laser handling for mold body mark or 2D mark  High flexibility in material handling (e.g. strip, JEDEC
 Experience with various third party laser gun integration tray, carrier..)
 In-line capability with trim/form system or standalone  Fully modular design/construction
system  Fine pitch capability: Ø0.2 mm/0.4 mm

Applications Applications
 All kinds of IC and power device lead  CSBGA / PBGA
frames  Flex BGA
 And more……

35 *Remark: All performance is package dependent


OTHER
SOLUTIONS

CS900 LFC130 Series


High Speed Tape Sorting Lead Frame Cutter System
System

Features Features
 Pick and Place (PnP) from wafer ring to tube/tray  LFC130: standalone cutting system
offload  LFC130NU-P / LFC130NU-S: in-line capability with
 100% 4S-inspection + mark inspection without UPH other ASM die bonding systems, e.g. AD830UR,
deduction Twin830UR, etc.
 High throughput: up to 6 cutting cycles per minute
 Reliable cutting system with excellent accuracy and burr
control

Applications Applications
 CSBGA  Precision cutting reel form lead frame
 MLP into strip form
 QFN
 SiP
 And more……

*Remark: All performance is package dependent 36


SIPLACE SX-Series SIPLACE X-Series
New Dimension of Flexibility and The Ultimate High-end SMT Solution
Maximum Speed for High Volume Production

Features Features
 High flexibility – a revolutionary placement solution that  New generation of the high speed SIPLACE X-Series sets
scales flexibility across the entire line new industry record
 Capacity on demand – machine’s performance adjusted  Excellent price-performance and
to the orders thanks to replaceable gantries and floorspace-performance ratio
intelligent placement heads  Features like SIPLACE Smart Pin Support, barcode
 Equipping with the SIPLACE MultiStar head – a wide reading and gantry exchange add more flexibility to the
range of components can be handled line
 State-of-the art software – fast and easy to use SIPLACE  Low dpm rate with set-up verification and sophfisticated
station software sensors

Facts and Figures Facts and Figures


 Placement performance: up to 60,000 cph (benchmark)  Placement performance: up to 120,000 cph (benchmark)
 Placement heads  Placement heads
 SIPLACE SpeedStar  SIPLACE SpeedStar
 SIPLACE MultiStar  SIPLACE MultiStar
 SIPLACE TwinStar  SIPLACE TwinStar
 Component spectrum: 01005 – 200 mm x 110 mm  Component spectrum: 01005 – 200 mm x 125 mm

37 *Remark: All performance is package dependent


PLACEMENT
SOLUTIONS

SIPLACE Di-Series SIPLACE CA


High-Tech Innovations at an Direct placement of dies
Attractive Price-performance Ratio along with the SMD components

Features Features
 An extremely powerful placement machine with  With the groundbreaking SIPLACE solution, the parallel
maximal four gantries placement of bare dies and SMD components in single
 The high-speed SIPLACE Di-Series combines proven pass mode during the same process, was made possible
technology with high-tech innovations, thus guarantees  The SIPLACE CA with integrated wafer feeder, can
fast return on investment place bare dies directly from wafers via the “die attach”
 With the digital SIPLACE Vision System even 01005 or “flip chip” processes. In addition, the SMT placement
components can be placed with the highest accuracy process is supported and can be implement on demand
 Flexible SIPLACE Software with advanced functions  Dual conveyor system allows simultaneously assembly
of two various products in asynchronous mode

Facts and Figures Facts and Figures


 Placement performance: up to 66,000 cph (benchmark)  Placement performance:
 Placement heads  Flip Chip: 9,000 per SWS
 SIPLACE 12-Nozzle Collect&Place  Die Attach: 6,000 per SWS
 SIPLACE 6-Nozzle Collect&Place  SMD: 20.250 per head
 SIPLACE Pick&Place  SIPLACE Wafer System
 Component spectrum: 01005 – 200 mm x 125 mm  Horizontal system
 Automatic wafer exchange
 Wafer size: 4” – 12”

*Remark: All performance is package dependent 38


China 中國
ASM Microelectronics Technical ASM Microelectronics Technical ASM Microelectronics Technical ASM Microelectronics Technical
Services (Shanghai) Co Ltd Services (Shanghai) Co Ltd Services (Shanghai) Co Ltd Services (Shanghai) Co Ltd
2/F, No. 55 Zu Chong Zhi Road Lot 1505 Room 704~706, Da An Building B Room D348, Chengdu Hi-Tech Zone Room B, 31/F, Bi Li Da Building
Shanghai Zhangjiang Hi-Tech Park No. 41 You Yi Road, He Xi District Innovation Service Centre No. 22 Lv Ling Road
Shanghai 201203, China Tianjin 300211, China Chengdu 611731, China Xiamen 361009, China
Tel : 86-21-5080 5465 Tel : 86-22-5881 3008 Tel : 86-28-8784 6551 Tel : 86-592-550 9125
Fax : 86-21-5080 5467 Fax : 86-22-5881 3009 Fax : 86-28-8784 6562 Fax : 86-592-550 9121

ASM Microelectronics Technical ASM Microelectronics Technical ASM Microelectronics Technical ASM Microelectronics Technical
Services (Shanghai) Co Ltd Services (Shanghai) Co Ltd Services (Shanghai) Co Ltd Services (Shanghai) Co Ltd
Room 05-03/06, Block A Room 7-11, 4th Floor, Block A East Wing, 4/F, Block 2 Room 1402-4
No. 5 Xing Han Street Tai'an Square, Dongshen Road CATIC (Zhonghang) Shahe Industrial Zone Jiangxin Guoji Jiayuan Yinzuo
Suzhou Industrial Park Zhang Mu Tou Town Qiao Xiang Road, Nanshan District No. 85 Jiefangxi Road, Qingyunpu District
Suzhou 215021, China Dongguan 523620, China Shenzhen 518053, China Nanchang 330002, China
Tel : 86-512-6762 6278 Tel : 86-769-8712 5600 Tel : 86-755-8830 8533 Tel : 86-791-8820 1517
Fax : 86-512-6762 6378 Fax : 86-769-8712 5601 Fax : 86-755-8344 6245 Fax : 86-791-8820 7178

Hong Kong 香港 Japan 日本 Korea 韓國


ASM Pacific (Hong Kong) Ltd ASM Assembly Technology Co Ltd ASM Pacific (Hong Kong) Limited ASM Pacific (Hong Kong) Limited
4/F Watson Centre, 16-22 Kung Yip Street 5F, Tachikawa F-Bldg, 1-7-18 Korea Branch Korea Branch
Kwai Chung, Hong Kong Nishiki-Cho, Tachikawa-Shi 4F, 628-6, Deungchon-dong Room 501, 5/F, Hi-Tech Center
Tel : 852-2619 2000 Tokyo 190-0022, Japan Kangseo-gu, Seoul 157-030, Korea 958-14 Daechon-Dong, Buk-Gu
Fax : 852-2619 2118/9 Tel : 81-42-521 7751 Tel : 82-2-2659 4174 Gwangju 500-470, Korea
Fax : 81-42-521 7750 Fax : 82-2-2659 4216 Tel : 82-62-973 4174
Fax : 82-62-973 4216

Taiwan 台灣
ASM Pacific (Holding) Limited ASM Pacific (Holding) Limited ASM Pacific (Holding) Limited ASM Pacific (Holding) Limited
Taiwan Branch Taiwan Branch Taiwan Branch Taiwan Branch
No. 4-2, East 3 Road Street 10F, No. 530, Sec. 2, Chung Shan Road 1F, No. 7, Lane 91, Dongmei Road 8F-1, No. 135, Sec 2
N.E.P.Z. Kaohsiung, Taiwan Chung Ho Dist, New Taipei City, Taiwan Hsinchu, Taiwan Chung Shan Road, Tantzu
Tel : 886-7-367 6300 Tel : 886-2-2227 3388 Tel : 886-3-573 3750 Taichung, Taiwan
Fax : 886-7-367 6399 Fax : 886-2-2227 3399 Fax : 886-3-573 3551 Tel : 886-4-2535 6390
Fax : 886-4-2535 6820

Malaysia 馬來西亞
ASM Assembly Equipment Malaysia ASM Assembly Equipment Malaysia ASM Assembly Equipment Malaysia ASM Assembly Equipment Malaysia
Sdn Bhd Sdn Bhd Sdn Bhd Sdn Bhd
Bayan Point, Block A, No. 15-1-23, 15-1-24 24A, Jalan Medan Ipoh 1B B-1-12, Jalan SS6/20, Dataran Glomac 1, Tingkat Satu, Jalan Warisan 1
Medan Kampung Relau Medan Ipoh Bistarli Pusat Bandar Kelana Jaya Taman Warisan Jalan Junid
11900 Penang, Malaysia 31400 Ipoh Perak, Malaysia 47301 Petaling Jaya, Malaysia 84000, Muar, Johor, Malaysia
Tel : 604-644 9490 Tel : 605-542 3991 Tel : 603-7806 4942 Tel : 606-951 5713
Fax : 604-645 1294 Fax : 605-542 3992 Fax : 603-7806 4943 Fax : 606-951 5786

Philippines 菲律賓 Singapore 新加坡 Thailand 泰國 Germany 德國


Edgeward Development Limited ASM Technology Singapore Pte Ltd ASM Assembly Equipment Bangkok ASM Assembly Systems GMBH & Co. KG
Philippines Branch 2 Yishun Avenue 7 Ltd ASMPT Europe
7th Floor, NOL Tower, Commerce Avenue Singapore 768924 51/3, Vibhavadi Tower, 18/2 Floor Rupert-Mayer-Street 44
Madrigal Business Park Tel : 65-6752 6311 Ngamwongwan Road, Ladyao, 81379 Munich
Barangay Ayala Alabang Fax : 65-6758 2287 Chathuchak, Bangkok 10900 Germany
Muntinlupa City, Philippines 1770 Thailand Tel : 49-89-20800-20900
Tel : 63-2-850 4543 Tel : 66-2-941 3181/2 Fax : 49-89-20800-41868
Fax : 63-2-850 4547 Fax : 66-2-941 3183 Email : sales.eu@asmpt.com

U.S.A. 美國
ASM Pacific Assembly Products Inc. ASM Pacific Assembly Products Inc.
3440 East University Drive, Phoenix (Western Regional Office)
Arizona 85034-7200 97 East Brokaw Road, Suite 100
U.S.A. San Jose, California 95112-4209
Tel : 1-602-437 4760 U.S.A.
Fax : 1-602-437 4630 Tel : 1-408-451 0800
Fax : 1-408-451 0808

http://www.asmpacific.com
NB3

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