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Wave propagation behavior of coupled viscoelastic FG-CNTRPC micro plates

subjected to electro-magnetic fields surrounded by orthotropic visco-
Pasternak foundation

Article  in  Microsystem Technologies · August 2017

DOI: 10.1007/s00542-016-3232-5

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Microsyst Technol
DOI 10.1007/s00542-016-3232-5
TECHNICAL PAPER
Wave propagation behavior of coupled viscoelastic FG‑CNTRPC
micro plates subjected to electro‑magnetic fields surrounded
by orthotropic visco‑Pasternak foundation
Majid Jamali1 · Ali Ghorbanpour Arani1,2 · Mohammad Mosayyebi1 ·
Reza Kolahchi1 · Rasoul Tarkesh Esfahani3 
Received: 16 August 2016 / Accepted: 30 November 2016
© Springer-Verlag Berlin Heidelberg 2016
Abstract Wave propagation in a coupled visco-elastic
micro polyvinylidene fluoride (PVDF) plate reinforced
by single-walled carbon nanotubes (SWCNTs) under an
electro-magnetic field will be analyzed in this study. Quasi-
3D sinusoidal shear deformation theory (SSDT) of plates
is presumed in order to simulate plates. The system is sur-
rounded by orthotropic visco-Pasternak foundation. Plates
are assumed to have piezoelectric property and CNTs are
applied to reinforce plates in different types so micro plates
are functionally graded carbon nanotube-reinforced piezo-
electric composite (FG-CNTRPC); therefore, electro-mag-
netic field can be used as a controlling parameter for sys-
tem. At first, energy equation is written according to local
piezoelasticity theory and strain energy, kinetic energy and
work of external forces are calculated and motion equation
of system will be calculated by applying Hamilton’s princi-
ple. Finally, motion equation will be solved by using ana-
lytical solution in order to obtaining velocity of wave prop-
agation, cut-off and escape frequency of system in different
types of wave propagation in system, such as in-phase,
out-of-phase and one of plate fixed. After that, the effects
of magnetic field, voltage, structure damping and distribu-
tions of CNTs on velocity of system and the effects of three
type of wave propagation on cut-off and escape frequency
of system will be studied. Results show that the effect of
* Ali Ghorbanpour Arani
aghorban@kashanu.ac.ir; a_ghorbanpour@yahoo.com
1
Faculty of Mechanical Engineering, University of Kashan,
Kashan, Iran
2
Institute of Nanoscience and Nanotechnology, University
of Kashan, Kashan, Iran
3
Department of Mechanical Engineering, Najafabad Branch,
Islamic Azad University, Najafabad, Iran
out-of-phase type on phase velocity and frequency of sys-
tem is more than in-phase and one of plate fixed types.
1 Introduction
Recently, most materials are consisted of multiphase solid
material where one of the phases has one, two or three
dimensions of less than one hundred nanometers that
named as nano composites. Also, nano composites are one
of the interesting materials in nanotechnology. Moreover,
they have better properties in compared by other materi-
als. Hence in this regard, analysis of wave propagation can
be useful in many applications. Wave in plates is used to
ascertain the polarization of body fluids in microscopes and
to correct for unwanted phase shifts in biomedical appli-
cations. They are also used in the semiconductor industry,
astronomy, aerospace and etc.
Classical theories are used to study the behavior of thin
plates. In thick plates, the transverse shear deformation
must be considered. Therefore, higher order shear deforma-
tion theories (HSDTs) are applied in these plates; because,
the transverse shear deformation is not negligible (Aghaba-
baei and Reddy 2009; Matsunaga 2008; Thai and Kim
2013). According to the results of research, the trigonomet-
ric shear deformation theories (TSDT) is compared with
polynomial shear deformation theory (PSDTs) and they
defined as simple and more accurate theories (Levy 1877;
Mantari and Guedes Soares 2012; Mantari et al. 2012;
Neves et al. 2012; Stein 1986; Touratier 1991; Zenkour
2006, 2007, 2009). Ghugal and Sayyad (2010) proposed
a TSDT for static flexure analysis of Thick isotropic plate,
taking into account transverse shear deformation effect.
Their results show a comparison of deflection and stresses
for the simply supported homogenous rectangular plate
13

subjected for various theory of plate. Thai and Kim (2013)
assumed quasi-3D SSDT for thick plates to achieve accu-
rate results which compared with other HSDTs.
For the first time, in 2009, the idea of intended use of
CNT in polymer composites and nanocomposite structures
was discussed by Shen (2009). Due to the many applica-
tions of nanocomposite structures in different industries,
many researchers is studied these composites. For instance,
Natarajan et al. scrutinized (2014) the bending and free
flexural vibration behavior of sandwich plates with CNT
reinforced facesheets by utilizing higher order structural
theory. Wattanasakulpong and Chaikittiratana (2015) pre-
sented static bending, buckling and vibration problems of
CNTRC plates with symmetrically and unsymmetrically
distributed CNTs resting on the Pasternak elastic founda-
tion. Their results indicated that volume fraction of CNT is
significant parameters that have impact on buckling loads
and natural frequencies. Zhu et al. (2012) investigated
static and free vibration analyses of CNTRC plates using
finite element method with first order shear deformation
plate theory.
None of the above researchers have considered smart
composites. Recently, the study of piezoelectric smart
plates such as PVDF has found a special position among
researchers. Zang et al. (2014) discussed propagation char-
acteristics of the longitudinal wave in a piezoelectric nan-
oplate with considering surface effects and nonlocal elas-
ticity theory. The influence of different scale parameter,
wavenumbers, and voltages are reported by them. Wave
propagation of bonded double-piezoelectric nanobeam
based on Euler–Bernoulli beam analyzed by Ghorbanpour
Arani et al. (2014). Magnetic field is one of the parameters
that can be used to control the behavior of systems. So in
recent years, researchers have tried to improve structure
performance by using magnetic field in different directions.
Keep in view, the characteristics of the transverse waves
within embedded double-walled carbon nanotubes (DWC-
NTs) which are subjected to an axial magnetic field was
studied by Kiani (2015). Longitudinal magnetic field effect
on buckling behavior of double-orthotropic simply sup-
ported microplate method based on strain gradient theory
for three different cases (out-of-phase buckling, in-phase
buckling and buckling with a microplate) by using analyti-
cal approach was carried out by Jamalpoor and Hosseini
(2015).
Due to the realistic simulation of nano/micro structure,
viscoelastic property must be considered. None of the
mentioned paper have used viscoelastic model. Dynamic
instability of viscoelastic DWCNTs conveying pulsating
fluid under 2D magnetic fields based on strain gradient
theory with considering surface effect pointed out by Ghor-
banpour Arani et al. (2016). They studied influences of
visco-Pasternak foundation, nonlocal parameter, Knudsen
13
Microsyst Technol
number, magnetic field, fluid velocity and surface stress.
In other work, Ghorbanpour Arani et al. (2015) examined
nonlinear nonlocal dynamic stability control of single lay-
ered graphene sheets (SLGSs) integrated with ZnO actua-
tors and sensors based on refined zigzag theory (RZT) with
considering nonlinear orthotropic visco-Pasternak medium.
The objective of this study is develop wave propaga-
tion of a coupled visco-elastic FG-CNTRPC micro plates
in the framework of nonlocal elasticity theory, rule of mix-
ture, quasi-3D SSDT and electro-magnetic field. Firstly, by
considering Kelvin–Voigt model and orthotropic visco-Pas-
ternak foundation, the strain energy, the kinetic energy and
the work of external forces are obtained. Then, after deriv-
ing the motion equation by utilizing Hamilton’s principle,
the phase velocity is evaluated according to the analytical
solution. Afterwards, the influence of different types of
wave propagation, damping coefficient of structure, exter-
nal voltages, magnetic field along x and y directions and
diverse distribution of CNTs (FG − X, FG − UD, FG − A
and FG − O) are discussed in detail.
2 Nonlocal quasi‑3D model for viscoelastic
FG‑CNTRPC micro plates
A schematic diagram for four types of CNTs distributions
along the thickness direction of viscoelastic FG-CNTRPC
micro plate is shown in Fig. 1. The coupled viscoelas-
tic FG-CNTRPC micro plates with length a, width b and
thickness h are subjected to 2D magnetic fields and sup-
ported with orthotropic visco-Pasternak medium.
The displacements of a material point placed at (x, y, z)
in viscoelastic FG-CNTRC micro plate based on the quasi-
3D SSDPT can be presented as (Thai and Kim 2013)
 πz  ∂w 
∂w h s
u1 (x, y, z, t) = u(x, y, t) − z + sin , (1)
∂x π h ∂x
 πz  ∂w 
∂w h s
u2 (x, y, z, t) = v(x, y, t) − z + sin , (2)
∂y π h ∂y
 πz 
u3 (x, y, z, t) = w(x, y, t) + cos ϕ(x, y, t), (3)
h
where u, v, and (w(x, y, t) = wb (x, y, t) + ws (x, y, t)), are the
displacements of the mid-plane along the axes x, y and z,
respectively, and ϕ is the rotations about z axes and account
for the effect of transverse shear.
2.1 Motion equations for single layer of FG‑CNTRPC
micro plate
In order to calculate the motion equations of single layer,
Hamilton’s principle is applied; therefore, according to
Microsyst Technol

Fig.  1  a A single layer viscoelastic FG-CNTRPC micro plate subjected to magnetic field and surrounded by orthotropic visco-Pasternak foun-
dation. b Distribution of CNTs in plate. c A schematic of double bonded viscoelastic FG-CNTRPC micro plates

Arani et al. (2015) the motion equations are obtained. through material directions compared to the other visco-
These equations are presented in “Appendix 1”. elastic foundation models.
In this project is assumed that dimensions and properties
2.2 Motion equations of coupled FG‑CNTRPC micro of micro plates are same, meanwhile, parameters of foun-
plates dation surrounding between and around micro plates are
same too. Displacements of No. 1 and No. 2 micro plates
Figure  1c depicts the coupled FG-CNTRPC micro plates. are presented by subscripts (1) and (2). Each of micro
Orthotropic visco-Pasternak foundation surrounds between plates motion equations, according to “Appendix 1”, are as:
and around micro plates No. 1 and No. 2. In order to real- (1) (1)
 (1)
∂Nx ∂Nxy ∂ 2 u(1) ∂ 3 wb
istic simulation of micro\nano structures, visco-elastic (1)
δu : − − 2 2
+ (1 − µ ∇ ) m0 − m1
∂x ∂y ∂t 2 ∂x∂t 2
medium should be assumed orthotropic visco-Pasternak.
(1)
This model considers normal stresses, transverse shear

∂ 3 ws (1)
deformation and orthotropic and arbitrarily oriented
+ (m3 − m1 )
∂x∂t 2
− Fmx , (4)

13
 Microsyst Technol

 
∂Ny(1) (1)
∂Nxy ∂ 2 v(1) ∂ 3 w(1) ∂ 3 w(1)
s
δv(1) :− − +(1−µ2 ∇ 2 ) m0 − m1 b
+ (m3 − m1 ) (1)
− Fmy , (5)
∂y ∂x ∂t 2 ∂y∂t 2 ∂y∂t 2

 (1)
(1) ∂ 2 Mx(1) ∂ 2 My(1) ∂ 2 Mxy
(1)
2 2 ∂ 3 u(1) ∂ 3 v(1) ∂ 2 wb
δwb :− − − 2 + (1 − µ ∇ ) m1 + m 1 + m0
∂x 2 ∂y2 ∂y∂x ∂x∂t 2 ∂y∂t 2 ∂t 2
(1) (1) (1)
∂ 2 ϕ (1) ∂ 4 wb ∂ 4 wb ∂ 4 ws(1) ∂ 2 wb ∂ 2 ϕ (1)
+ m6 − m2 − m2 + (m 5 − m2 ) − N xe − N ye
∂t 2 ∂x 2 ∂t 2 ∂y2 ∂t 2 ∂x 2 ∂t 2 ∂x 2 ∂y2
(1)
∂ 4 ws(1) ∂ 2 ws(1) ∂ 2 wb ∂ 2 ws(1) ∂ 2 ws(1) ∂ 2 ϕ (1)
+ (m5 − m2 ) 2 2
+ m0 2
− Nye 2
− Nxe 2
− Nye 2
− Nxe
∂y ∂t ∂t ∂y ∂x ∂y ∂x 2

(1) (2) (1) (2) (1) (2)
(1)
− Mmx,x (1)
− Mmy,y (1)
− Fmz + Kw (u3 − u3 ) + cd (u3 − u3 ) − Gf α cos2 θ (u3,11 − u3,11 )
 
(1) (2) (1) (2) (1) (2)
+2cosθ sin θ(u3,21 − u3,21 ) + sin2 θ(u3,22 − u3,22 ) − Gf β sin2 θ (u3,11 − u3,11 )
 
(1) (2) (1) (2) (1) (1)
−2cosθ sin θ(u3,21 − u3,21 ) + cos2 θ(u3,22 − u3,22 ) − Gf α cos2 θ u3,11 + 2cosθ sin θ u3,21
   
(1) (1) (1) (1)
+ sin2 θ u3,22 − Gf β sin2 θ u3,11 − 2cosθ sin θ u3,21 + cos2 θ u3,22 + Kw u3 + cd u3 ,
(1) (1)
(6)

∂ 2 Mx(1) ∂ 2 My(1) ∂ 2 Mxy

(1)
∂ 2 Sx(1) ∂ 2 Sy(1) ∂ 2 Sxy
(1) (1)
∂Qxz (1)
∂Qyz
δws(1) : − − − 2 + + + 2 − −
∂x 2 ∂y2 ∂y∂x ∂x 2 ∂y2 ∂y∂x ∂x ∂y
 (1) (1)
2
∂ wb 4
∂ w ∂ 4 w(1)
+ (1 − µ2 ∇ 2 ) m0 2
+ (m2 + m5 ) 2 b 2 + (m4 − m2 + 2m5 ) 2 s 2
∂t ∂x ∂t ∂x ∂t
∂ 3 u(1) ∂ 2 ϕ (1) ∂ 4 w(1) ∂ 3 v(1)
+ (m1 + m3 ) 2
+ m6 2
+ (m4 − m2 + 2m5 ) 2 s 2 + (m1 + m3 )
∂x∂t ∂t ∂y ∂t ∂y∂t 2
(1) (1)
∂ 2 ws(1) ∂ 4 wb ∂ 2 wb ∂ 2 ϕ (1) ∂ 2 ws(1) ∂ 2 ϕ (1)
+ m0 + (m 2 + m5 ) − N xe − N xe − N xe − N ye
∂t 2 ∂y2 ∂t 2 ∂x 2 ∂x 2 ∂x 2 ∂y2
(1)
∂ 2 ws(1) ∂ 2 wb (1) (1) (1) (1) (2) (1) (2)
− Nye − N ye − Mmx,x − Mmy,y − Fmz + Kw (u3 − u3 ) + cd (u3 − u3 )
∂y2 ∂y2
 
(1) (2) (1) (2) (1) (2)
− Gf α cos2 θ(u3,11 − u3,11 ) +2cosθ sin θ(u3,21 − u3,21 ) + sin2 θ (u3,22 − u3,22 )
 
(1) (2) (1) (2) (1) (2)
− Gf β sin2 θ(u3,11 − u3,11 ) −2cosθ sin θ(u3,21 − u3,21 ) + cos2 θ (u3,22 − u3,22 )
  
(1) (1) (1) (1) (1)
− Gf α cos2 θ u3,11 + 2cosθ sin θ u3,21 + sin2 θ u3,22 − Gf β sin2 θ u3,11 − 2cosθ sin θ u3,21
 
(1) (1)
+ cos2 θ u3,22 + Kw u3 + cd u3 ,
(1) (7)


(1) (1)
∂Qxz ∂Qyz ∂ 2 ϕ (1) h

∂Dy(1)

(1)
Pz(1) 2 2 ∂Dx(1)

δϕ : − − + (1 − µ ∇ ) m7 (1)
2
′ (1)
∂x ∂y ∂t 2 δφ : g(z) + g(z) − g (z)Dz dz. (9)
− 2h ∂x ∂y
(1)
∂ 2 wb ∂ 2 ws(1) ∂ 2 ϕ (1)
− Nxe − Nxe − Nxe
∂x 2 ∂x 2 ∂x 2 (2) (2)
 (2)
(1) (1) ∂Nx ∂Nxy ∂ 2 u(2) ∂ 3 wb
∂ 2 ws(1) ∂ 2 wb ∂ 2 wb (2)
δu : − − 2 2
+ (1 − µ ∇ ) m0 − m1
+ m6 + m6 −Nye ∂x ∂y ∂t 2 ∂x∂t 2
∂t 2 ∂t 2 ∂y2
(2)

∂ 3 ws

∂ 2 ws(1) ∂ 2 ϕ (1) (1) + (m3 − m1 ) − F (2) ,
(10)
− Nye − Nye − Fmz , (8) ∂x∂t 2 mx
∂y2 ∂y2

13
Microsyst Technol

(2)
 
(2)
∂Ny(2) (2)
∂ 2 v(2)
∂Nxy ∂ 3 wb
2 2 ∂ 3 ws(2) (2)
δv :− − +(1−µ ∇ ) m0 − m1 + (m3 − m1 ) − Fmy ,
∂y ∂x ∂t 2 ∂y∂t 2 ∂y∂t 2 (11)
 (2)
(2) ∂ 2 Mx(2) ∂ 2 My(2) ∂ 2 Mxy
(2)
2 2 ∂ 3 u(2) ∂ 3 v(2) ∂ 2 wb
δwb : − − − 2 + (1 − µ ∇ ) m1 + m1 + m 0
∂x 2 ∂y2 ∂y∂x ∂x∂t 2 ∂y∂t 2 ∂t 2
(2) (2) (2)
∂ 2 ϕ (2) ∂ 4 wb ∂ 4 wb ∂ 4 ws(2) ∂ 2 wb ∂ 2 ϕ (2)
+ m6 − m2 − m2 + (m 5 − m2 ) − N xe − N ye
∂t 2 ∂x 2 ∂t 2 ∂y2 ∂t 2 ∂x 2 ∂t 2 ∂x 2 ∂y2
(2)
∂ 4 ws(2) ∂ 2 ws(2) ∂ 2 wb ∂ 2 ws(2) ∂ 2 ws(2) ∂ 2 ϕ (2)
+ (m5 − m2 ) + m 0 − N ye − N xe − N ye − N xe
∂y2 ∂t 2 ∂t 2 ∂y2 ∂x 2 ∂y2 ∂x 2

(2) (1) (2) (1) (2) (1)
(2)
− Mmx,x (2)
− Mmy,y (2)
− Fmz + Kw (u3 − u3 ) + cd (u3 − u3 ) − Gf α cos2 θ (u3,11 − u3,11 )
 
(2) (1) (2) (1) (2) (1)
+2cosθ sin θ(u3,21 − u3,21 ) + sin2 θ(u3,22 − u3,22 ) − Gf β sin2 θ (u3,11 − u3,11 )
 
(2) (1) (2) (1) (2) (2)
−2cosθ sin θ(u3,21 − u3,21 ) + cos2 θ(u3,22 − u3,22 ) − Gf α cos2 θ u3,11 + 2cosθ sin θ u3,21
   
(2) (2) (2) (2)
+ sin2 θ u3,22 − Gf β sin2 θ u3,11 − 2cosθ sin θ u3,21 + cos2 θ u3,22 + Kw u3 + cd u3 ,
(2) (2) (12)

∂ 2 Mx(2) ∂ 2 My(2) ∂ 2 Mxy

(2)
∂ 2 Sx(2) ∂ 2 Sy(2) ∂ 2 Sxy
(2) (2)
∂Qxz (2)
∂Qyz
δws(2) : − − − 2 + + + 2 − −
∂x 2 ∂y2 ∂y∂x ∂x 2 ∂y2 ∂y∂x ∂x ∂y
 (2) (2)
2
∂ wb 4
∂ w ∂ 4 w(2)
+ (1 − µ2 ∇ 2 ) m0 2
+ (m2 + m5 ) 2 b 2 + (m4 − m2 + 2m5 ) 2 s 2
∂t ∂x ∂t ∂x ∂t
∂ 3 u(2) ∂ 2 ϕ (2) ∂ 4 w(2) ∂ 3 v(2)
+ (m1 + m3 ) 2
+ m6 2
+ (m4 − m2 + 2m5 ) 2 s 2 + (m1 + m3 )
∂x∂t ∂t ∂y ∂t ∂y∂t 2
(2) (2)
∂ 2 ws(2) ∂ 4 wb ∂ 2 wb ∂ 2 ϕ (2) ∂ 2 ws(2) ∂ 2 ϕ (2)
+ m0 + (m 2 + m5 ) − N xe − N xe − N xe − N ye
∂t 2 ∂y2 ∂t 2 ∂x 2 ∂x 2 ∂x 2 ∂y2
(2)
∂ 2 ws(2) ∂ 2 wb (2) (2) (2) (2) (1) (2) (1)
− Nye − N ye − Mmx,x − Mmy,y − Fmz + Kw (u3 − u3 ) + cd (u3 − u3 )
∂y2 ∂y2
 
(2) (1) (2) (1) (2) (1)
− Gf α cos2 θ(u3,11 − u3,11 ) +2cosθ sin θ(u3,21 − u3,21 ) + sin2 θ (u3,22 − u3,22 )
 
(2) (1) (2) (1) (2) (1)
− Gf β sin2 θ(u3,11 − u3,11 ) −2cosθ sin θ(u3,21 − u3,21 ) + cos2 θ (u3,22 − u3,22 )
  
(2) (2) (2) (2) (2)
− Gf α cos2 θ u3,11 + 2cosθ sin θ u3,21 + sin2 θ u3,22 − Gf β sin2 θ u3,11 − 2cosθ sin θ u3,21
(13)
 
(2) (2) (2)
+ cos2 θ u3,22 + Kw u3 + cd u3 ,

in which the stress resultant–displacement can be express


(2) (2)
(2) ∂Qxz ∂Qyz ∂ 2 ϕ (2)
δϕ : Pz(2) − − 2 2
+ (1 − µ ∇ ) m7 as (Arani et al. 2015) (i = 1, 2 refers to number of micro
∂x ∂y ∂t 2
plates)
(2)
∂ 2 wb ∂ 2 ws(2) ∂ 2 ϕ (2)
− Nxe − N xe − N xe (i)
∂x 2 ∂x 2 ∂x 2 ∂u(i) ∂v(i) h2 H11 ∂ 2 ws
 
2 (2) 2 (2) 2 (2) Nx(i) = A11 + A12 − B11 +
∂ ws ∂ wb ∂ wb ∂ 2 ws(2) ∂x ∂y π2 ∂x 2
+ m6 + m 6 −N ye − N ye
∂t 2 ∂t 2 ∂y2 ∂y2 
h2 H12 ∂ 2 ws
 (i) (i)
∂ 2 wb
 − B12 + − B11
∂ 2 ϕ (2) (2) π 2 ∂y 2 ∂x 2
− Nye − Fmz , (14)
∂y2 (i)
∂ 2 wb
+ H13 ϕ (i) − B12 + 2V0 e31 , (16)
h
  ∂y2
∂Dx(2) ∂Dy(2)

2
δφ (2) : g(z) + g(z) ′ (2)
− g (z)Dz dz.
− 2h ∂x ∂y
(15)

13
 Microsyst Technol

∂u(i) ∂v(i) h2 H12 ∂ 2 ws

(i) h2 H66 ∂u(i) h2 H66 ∂v(i)
 
(i)
Ny(i) = A12 + A22 − B12 + Sxy =− −
∂x ∂y π2 ∂x 2 π 2 ∂y π 2 ∂x
(i) (i)
h2 O66 ∂ 2 wb
 2
(i) (i) h4 L66 ∂ 2 ws

h2 H22 ∂ 2 ws ∂ 2 wb h O66
 
− B22 + − B 12 +2 + +2 2 ,
π2 ∂y2 ∂x 2 π2 π4 ∂y∂x π ∂y∂x
(i)
(24)
∂ 2 wb
+ H23 ϕ (i) − B22 + 2V0 e32 , (17)
∂y2 ∂ws
(i)
∂ϕ (i) 1 ∂φ (i)
(i)
Qxz = K55 + K55 − he15 , (25)
  ∂x ∂x 2 ∂x
(i)
(i) ∂u(i) ∂v(i) ∂ 2 ws h2 H66
Nxy = A66 + A66 − 2 B66 +
∂y ∂x ∂y∂x π2 ∂ws
(i)
∂ϕ (i) 1 ∂φ (i)
(i)
Qyz = K44 + K44 − he24 , (26)
(i) (i) ∂y ∂y 2 ∂y
∂ 2 ws ∂ 2 wb
− 2B66 , (18)
∂y∂x ∂y∂x
(i)
∂u(i) ∂v(i) h2 L13 ∂ 2 ws
 
(i) Pz(i) = H13 + H23 − O13 +
∂u(i) ∂v(i) h2 O11 ∂ 2 ws
 
∂x ∂y π2 ∂x 2
Mx(i) = B11 + B12 − D11 +
∂x ∂y π2 ∂x 2  (i)
h2 L23 ∂ 2 ws
 (i)
∂ 2 wb
 2 (i) (i) − O23 + − O13
∂ 2 wb
 2
h O12 ∂ ws π2 ∂y2 ∂x 2
− + D 12 − D11
π2 ∂y2 ∂x 2 1 π 2 (i) ∂ 2 wb
(i)
(i) − φ e33 − O23 + L33 ϕ (i) , (27)
∂ 2 wb e31 h (i) 2h ∂y2
+ O13 ϕ (i) − D12 +2 φ , (19)
∂y2 π
 
(i)
∂ϕ (i) ∂ws ∂φ (i)
(i) Dx(i) = e15 g(z) + + ε11 g(z) , (28)
∂u(i) ∂v(i) h2 O12 ∂ 2 ws
 
∂x ∂x ∂x
My(i) = B12 + B22 − D12 +
∂x ∂y π2 ∂x 2
(i) (i)
h2 O22 ∂ 2 ws ∂ 2 wb
   
(i)
+ D22 − − D12 ∂ϕ ∂ws ∂φ (i)
π2 ∂y2 ∂x 2 Dy(i) = e24 g(z) + + ε22 g(z) , (29)
∂y ∂y ∂y
(i)
∂ 2 wb e32 h (i)
− D22 +2 φ + O13 ϕ (i) , (20)
∂y2 π
 (i)

(i)
∂u(i) ∂ 2 wb ∂ 2 ws
Dz(i) = e31 −z − f (z)
  ∂x ∂x 2 ∂x 2
(i)
∂u(i) ∂v(i) ∂ 2 ws h2 O66  (i) (i)

(i)
Mxy = B66 + B66 − 2 D66 + ∂v(i) ∂ 2 wb ∂ 2 ws
∂y ∂x ∂y∂x π2 + e32 −z − f (z)
∂y ∂y2 ∂y2
(i) (i)
∂ 2 ws ∂ 2 wb 
V0

− 2D66 , (21) + e33 g′ (z) ϕ (i) + ε33 g′ (z) ϕ (i) − 2
∂y∂x ∂y∂x , (30)
h

 2 (i)   2   4  2 (i)   2 2 (i)

h2 H12 ∂v(i)

h ∂u h h ∂ ws h ∂ wb
Sx(i) = − H11 − + O11 + L11 + O12
π ∂x π 2 ∂y π π ∂x 2 π ∂y2
  2   4 
(i)  2 2 (i)   2 (22)
∂ 2 ws

h h h ∂ wb h 1
+ O12 + L11 2
+ O11 2
− L13 ϕ (i) + e31 h φ (i) ,
π π ∂y π ∂x π 2

 2   2   4  2   2 2

h ∂u h h ∂ ws h ∂ wb 1
Sy = − H12 + O12 + L12 + O12 + e32 hφ
π ∂x π π ∂x 2 π ∂x 2 2
  2   4  2  2 2   2 (23)
h2 H22 ∂v

h h ∂ ws h ∂ wb h
+ O22 + L22 + O22 − L 23 ϕ − ,
π π ∂y2 π ∂y2 π π 2 ∂y

13
Microsyst Technol

In order to analysis the behavior of micro plates, rela-


(0) (0)
(0) ∂Qxz ∂Qyz ∂ 2 ϕ (0)
tive movements are described as (Ghorbanpour Arani et al. δϕ : Pz(0) − − 2 2
+ (1 − µ ∇ ) m7
∂x ∂y ∂t 2
2014)
(0)
∂ 2 wb ∂ 2 ws(0) ∂ 2 ϕ (0)
d (0) = d (1) − d (2) , d = u, v, wb , ws , ϕ, φ (31) − Nxe − N xe − N xe
∂x 2 ∂x 2 ∂x 2
By subtracting Eqs. (4)–(9) and Eqs. (10)–(15) and 2
∂ ws (0) 2
∂ wb
(0) 2
∂ wb
(0)
applying Eq. (31) + m6 + m6 −N ye
∂t 2 ∂t 2 ∂y2

(0)
 ∂ 2 ws(0) ∂ 2 ϕ (0)
(0) ∂Nx(0) ∂Nxy 2 2 ∂ 2 u(0) − Nye − Nye − Fmz(0)
, (36)
δu : − − + (1 − µ ∇ ) m0 ∂y2 ∂y2
∂x ∂y ∂t 2
(0)

∂ 3 wb ∂ 3 ws(0) h
 
− m1 (m m ) (0)
− Fmx , ∂Dx(0) ∂Dy(0)

+ 3 − 1 (32) (0)
2
′ (0)
∂x∂t 2 ∂x∂t 2 δφ : g(z) + g(z) − g (z)Dz dz.
− 2h ∂x ∂y
(37)

∂Ny(0) (0)
∂Nxy ∂ 2 v(0) (2)

δv(0) : − − + (1 − µ2 ∇ 2 ) m0 ∂Nx(2) ∂Nxy ∂ 2 u(2)
∂y ∂x ∂t 2 δu(2) : − − + (1 − µ2 ∇ 2 ) m0
 ∂x ∂y ∂t 2
(0)
∂ 3 wb ∂ 3 ws(0) (2)

− m1 + (m3 − m1 ) (0)
− Fmy , ∂ 3 wb ∂ 3 ws(2) (2)
∂y∂t 2 ∂y∂t 2 (33) − m1 + (m 3 − m 1 ) − Fmx , (38)
∂x∂t 2 ∂x∂t 2

 (0)
(0) ∂ 2 Mx(0) ∂ 2 My(0) ∂ 2 Mxy
(0)
2 2 ∂ 3 u(0) ∂ 3 v(0) ∂ 2 wb
δwb :− − − 2 + (1 − µ ∇ ) m1 + m1 + m0
∂x 2 ∂y2 ∂y∂x ∂x∂t 2 ∂y∂t 2 ∂t 2
(0) (0) (0)
∂ 2 ϕ (0) ∂ 4 wb ∂ 4 wb ∂ 4 ws(0) ∂ 2 wb ∂ 2 ϕ (0)
+ m6 − m2 − m2 + (m 5 − m2 ) − N xe − N ye
∂t 2 ∂x 2 ∂t 2 ∂y2 ∂t 2 ∂x 2 ∂t 2 ∂x 2 ∂y2
(0)
∂ 4 ws(0) ∂ 2 ws(0) ∂ 2 wb ∂ 2 ws(0) ∂ 2 ws(0) ∂ 2 ϕ (0)
+ (m5 − m2 ) + m 0 − N ye − N xe − N ye − N xe
∂y2 ∂t 2 ∂t 2 ∂y2 ∂x 2 ∂y2 ∂x 2
 
(0) (0) (0)
(0)
− Mmx,x (0)
− Mmy,y (0)
− Fmz − 3Gf α cos2 θ u3,11 + 2cosθ sin θ u3,21 + sin2 θ u3,22
(34)
  
(0) (0) (0) (0) (0)
−3Gf β sin2 θ u3,11 − 2cosθ sin θ u3,21 + cos2 θ u3,22 + 3Kw u3 + 3cd u3 ,

∂ 2 Mx(0) ∂ 2 My(0) ∂ 2 Mxy

(0)
∂ 2 Sx(0) ∂ 2 Sy(0) ∂ 2 Sxy
(0) (0)
∂Qxz (0)
∂Qyz
δws(0) : − − − 2 + + + 2 − −
∂x 2 ∂y2 ∂y∂x ∂x 2 ∂y2 ∂y∂x ∂x ∂y
 (0) (0)
2
∂ wb 4
∂ w 4
∂ w (0)
+ (1 − µ2 ∇ 2 ) m0 + (m2 + m5 ) 2 b 2 + (m4 − m2 + 2m5 ) 2 s 2
∂t 2 ∂x ∂t ∂x ∂t
∂ 3 u(0) ∂ 2 ϕ (0) ∂ 4 ws(0) ∂ 3 v(0)
+ (m1 + m3 ) + m6 + (m 4 − m 2 + 2m5 ) + (m 1 + m3 )
∂x∂t 2 ∂t 2 ∂y2 ∂t 2 ∂y∂t 2
(0) (0)
∂ 2 ws(0) ∂ 4 wb ∂ 2 wb ∂ 2 ϕ (0) ∂ 2 ws(0)
+ m0 2
+ (m 2 + m5 ) 2 2
− N xe 2
− Nxe 2
− Nxe
∂t ∂y ∂t ∂x ∂x ∂x 2
(0)
∂ 2 ϕ (0) ∂ 2 wb ∂ 2 ws(0) (0) (0) (0)
− Nye − N ye − N ye − Mmx,x − Mmy,y − Fmz
∂y2 ∂y2 ∂y2
  
(0) (0) (0) (0)
− 3Gf α cos2 θ u3,11 + 2cosθ sin θ u3,21 + sin2 θ u3,22 − 3Gf β sin2 θ u3,11
(0) (0)

(0) (0)
 (35)
−2cosθ sin θ u3,21 + cos2 θ u3,22 + 3Kw u3 + 3cd u3 ,

13
 Microsyst Technol


(2)

(2)
∂Ny(2) (2)
∂Nxy ∂ 2 v(2) 2 ∂ 3 wb
2 ∂ 3 ws(2) (2)
δv :− − +(1−µ ∇ ) m0 − m1 + (m3 − m1 ) − Fmy ,
∂y ∂x ∂t 2 ∂y∂t 2 ∂y∂t 2 (39)
 (2)
(2) ∂ 2 Mx(2) ∂ 2 My(2) ∂ 2 Mxy
(2)
2 2 ∂ 3 u(2) ∂ 3 v(2) ∂ 2 wb
δwb :− − − 2 + (1 − µ ∇ ) m1 + m1 + m 0
∂x 2 ∂y2 ∂y∂x ∂x∂t 2 ∂y∂t 2 ∂t 2
(2) (2) (2)
∂ 2 ϕ (2) ∂ 4 wb ∂ 4 wb ∂ 4 ws(2) ∂ 2 wb ∂ 2 ϕ (2)
+ m6 − m2 − m2 + (m 5 − m2 ) − N xe − N ye
∂t 2 ∂x 2 ∂t 2 ∂y2 ∂t 2 ∂x 2 ∂t 2 ∂x 2 ∂y2
(2)
∂ 4 ws(2) ∂ 2 ws(2) ∂ 2 wb ∂ 2 ws(2) ∂ 2 ws(2) ∂ 2 ϕ (2)
+ (m5 − m2 ) 2 2
+ m0 2
− Nye 2
− Nxe 2
− Nye 2
− Nxe
∂y ∂t ∂t ∂y ∂x ∂y ∂x 2

(0) (0) (0) (0)
(2)
− Mmx,x (2)
− Mmy,y − Fmz(2)
+ Kw u3 + cd u3 − Gf α cos2 θ u3,11 + 2cosθ sin θ u3,21
   
(0) (0) (0) (0) (2)
+ sin2 θ u3,22 − Gf β sin2 θ u3,11 −2cosθ sin θ u3,21 + cos2 θ u3,22 − Gf α cos2 θ u3,11
  
(2) (2) (2) (2) (2)
+2cosθ sin θ u3,11 + sin2 θ u3,11 − Gf β sin2 θ u3,11 − 2cosθ sin θ u3,11 + cos2 θ u3,11

+Kw u3(2) + cd u3(2) , (40)

∂ 2 Mx(2) ∂ 2 My(2) ∂ 2 Mxy

(2)
∂ 2 Sx(2) ∂ 2 Sy(2) ∂ 2 Sxy
(2) (2)
∂Qxz (2)
∂Qyz
δws(2) : − − − 2 + + + 2 − −
∂x 2 ∂y2 ∂y∂x ∂x 2 ∂y2 ∂y∂x ∂x ∂y
 (2) (2)
2
∂ wb 4
∂ w 4
∂ w (2)
+ (1 − µ2 ∇ 2 ) m0 + (m2 + m5 ) 2 b 2 + (m4 − m2 + 2m5 ) 2 s 2
∂t 2 ∂x ∂t ∂x ∂t
∂ 3 u(2) ∂ 2 ϕ (2) ∂ 4 ws(2) ∂ 3 v(2)
+ (m1 + m3 ) + m6 + (m 4 − m2 + 2m5 ) + (m 1 + m 3 )
∂x∂t 2 ∂t 2 ∂y2 ∂t 2 ∂y∂t 2
(2) (2)
∂ 2 ws(2) ∂ 4w ∂ 2 wb ∂ 2 ϕ (2) ∂ 2 ws(2)
+ m0 2
+ (m2 + m5 ) 2 b 2 − Nxe 2
− Nxe 2
− Nxe
∂t ∂y ∂t ∂x ∂x ∂x 2
(2)
∂ 2 ϕ (2) ∂ 2 wb ∂ 2 ws(2) (2) (2) (2) (0) (0)
− Nye − N ye − N ye − Mmx,x − Mmy,y − Fmz + Kw u3 + cd u3
∂y2 ∂y2 ∂y2
  
(0) (0) (0) (0)
− Gf α cos2 θ u3,11 + 2cosθ sin θ u3,21 + sin2 θ u3,22 − Gf β sin2 θ u3,11
  
(0) (0) (2) (2) (2)
−2cosθ sin θ u3,21 + cos2 θ u3,22 − Gf α cos2 θ u3,11 + 2cosθ sin θ u3,11 + sin2 θ u3,11
(41)
  
(2) (2) (2) (2) (2)
− Gf β sin2 θ u3,11 − 2cosθ sin θ u3,11 + cos2 θ u3,11 +Kw u3 + cd u3 ,
 (2)
(2)
∂Q (2)
xz ∂Q yz ∂ 2 ϕ (2) ∂ 2 wb ∂ 2 ws(2) ∂ 2 ϕ (2)
δϕ (2) : Pz(2) − − + (1 − µ2 ∇ 2 ) m7 − N xe − N xe − N xe
∂x ∂y ∂t 2 ∂x 2 ∂x 2 ∂x 2
(2) (2)

∂ 2 ws(2) ∂ 2 wb ∂ 2 wb ∂ 2 ws(2) ∂ 2 ϕ (2) (2) (42)
+ m6 + m 6 −Nye − N ye − N ye − Fmz ,
∂t 2 ∂t 2 ∂y2 ∂y2 ∂y2
h
d(x, y, t) = d0 ei(k1 x−k2 y)+ωt ,
 
∂Dx(2) ∂Dy(2) d = U, V , Wb , Ws , Φ, Θ,

2
(2) ′ (2)
δφ : g(z) + g(z) − g (z)Dz dz. (44)
− 2h ∂x ∂y
(43)
where d0 , ωn , k1 and k2 show the amplitudes of the wave
3 Solution methodology motion, the circular frequency, the wave number in x-direc-
tion and the wave number in y-direction, respectively. Uti-
A wave propagation analytical solution in a viscoelastic lizing wave displacement in dimensionless motion equa-
FG-CNTRPC micro plate can be expressed in pressed form tions that obtained by considering dimensionless parameters
as (Narendar and Gopalakrishnan 2012) in “Appendix 2”, is given a matrix with order (6 × 6) as

13
Microsyst Technol

    
L11 L12 L13 L14 L15 L16  u0  
 0
 L21 L22 L23 L24 L25 L26  v 0
   
0

 
 
 
    
 
 L31 L32 L33 L34 L35 L36  wb0 0
 

 L41 L42 L43 L44 L45 L46 
 ws0 
=
0
, (45)
   
 
 L51 L52 L53 L54 L55 L56  ϕ0  0

 
 
 

  
  
L61 L62 L63 L64 L65 L66 φ0 0
 

The eigenvalue of above matrix means dimensionless

frequency. After that, phase velocity of system can be eval-
uated as
v = Ω/k. (46)
3.1 Coupled micro plates

In order to analysis the wave propagation in coupled sys-

tem three types such as in-phase, out-of-phase and one
micro plate fixed are considered in this section (Ghor-
banpour Arani et al. 2014); in Fig. 2 all of these types are
shown.

3.1.1 In‑phase type

Figure  2a demonstrates in-phase type for wave propaga-

tion. In this type micro plates move simultaneously (syn-
chronous), therefore, relative movements are zero

d (0) = d (1) − d (2) = 0 , d = u, v, wb , ws , ϕ, φ . (47)

So, in this type each of plate can be reagent of coupled
system movement; so, to analyze wave propagation in
coupled system for in-phase type Eqs. (38)–(43) are used.
Matrix elements of Eq. (45) for in-phase wave propagation
type are presented in “Appendix 3”.

3.1.2 Out‑of‑phase type
Fig. 2  Illustration of the different types of wave propagation in cou-
pled system. a out-of-phase. b One micro plate fixed. c In-phase
Out-of-phase wave propagation type is shown in Fig. 2b. In
this type micro plates move non-ordinary (asynchronous),
Thus, Eqs. (4)–(9) change to
thus, relative movements are not zero

(1)
d (0) = d (1) − d (2) �= 0, d = u, v, wb , ws , ϕ, φ. (48) ∂Nx(1)
(1)
∂Nxy 2 2 ∂ 2 u(1)
δu : − − + (1 − µ ∇ ) m0
Therefore, in this type Eqs. (32)–(37) are applied for ∂x ∂y ∂t 2
wave propagation analysis in coupled system and members (1)

∂ 3 wb ∂ 3 ws(1) (1)
of Lpq are in “Appendix 3”. − m1 + (m3 − m1 ) − Fmx , (50)
∂x∂t 2 ∂x∂t 2
3.1.3 One micro plate fixed type

∂Ny(1) (1)
∂Nxy ∂ 2 v(1)
In this type is assumed micro plate No. 2 is fixed (Fig. 2c) δv (1)
:− − 2 2
+ (1 − µ ∇ ) m0
so ∂y ∂x ∂t 2
(1)

∂ 3 wb ∂ 3 ws(1) (1)
(2)
u(2) = v(2) = wb = ws(2) = ϕ (2) = φ (2) = 0. (49) − m1 + (m 3 − m1 ) − Fmy , (51)
∂y∂t 2 ∂y∂t 2

13
 Microsyst Technol

 (1)
(1) ∂ 2 Mx(1) ∂ 2 My(1) ∂ 2 Mxy
(1)
2 2 ∂ 3 u(1) ∂ 3 v(1) ∂ 2 wb
δwb :− − − 2 + (1 − µ ∇ ) m1 + m 1 + m0
∂x 2 ∂y2 ∂y∂x ∂x∂t 2 ∂y∂t 2 ∂t 2
(1) (1) (1)
∂ 2 ϕ (1) ∂ 4 wb ∂ 4 wb ∂ 4 ws(1) ∂ 2 wb ∂ 2 ϕ (1)
+ m6 − m2 − m2 + (m 5 − m2 ) − N xe − N ye
∂t 2 ∂x 2 ∂t 2 ∂y2 ∂t 2 ∂x 2 ∂t 2 ∂x 2 ∂y2
(1)
∂ 4 ws(1) ∂ 2 ws(1) ∂ 2 wb ∂ 2 ws(1) ∂ 2 ws(1) ∂ 2 ϕ (1)
+ (m5 − m2 ) + m 0 − N ye − N xe − N ye − N xe
∂y2 ∂t 2 ∂t 2 ∂y2 ∂x 2 ∂y2 ∂x 2

(1) (1) (1) (1)
(1)
− Mmx,x (1)
− Mmy,y (1)
− Fmz + 2Kw (u3 ) + 2cd (u3 ) − 2Gf α cos2 θ u3,11 + 2cosθ sin θ u3,21
   
(1) (1) (1) (1) (1) (1)
+ sin2 θ u3,22 − 2Gf β sin2 θ u3,11 − 2cosθ sin θ u3,21 + cos2 θ u3,22 + Kw u3 + cd u3 , (52)

∂ 2 Mx(1) ∂ 2 My(1) ∂ 2 Mxy

(1)
∂ 2 Sx(1) ∂ 2 Sy(1) ∂ 2 Sxy
(1) (1)
∂Qxz (1)
∂Qyz
δws(1) : − − − 2 + + + 2 − −
∂x 2 ∂y2 ∂y∂x ∂x 2 ∂y2 ∂y∂x ∂x ∂y
 (1) (1)
2
∂ wb 4
∂ w 4
∂ w (1)
+ (1 − µ2 ∇ 2 ) m0 + (m2 + m5 ) 2 b 2 + (m4 − m2 + 2m5 ) 2 s 2
∂t 2 ∂x ∂t ∂x ∂t
∂ 3 u(1) ∂ 2 ϕ (1) ∂ 4 ws(1) ∂ 3 v(1)
+ (m1 + m3 ) + m6 + (m 4 − m2 + 2m5 ) + (m 1 + m3 )
∂x∂t 2 ∂t 2 ∂y2 ∂t 2 ∂y∂t 2
(1) (1)
∂ 2 ws(1) ∂ 4w ∂ 2 wb ∂ 2 ϕ (1) ∂ 2 ws(1)
+ m0 2
+ (m2 + m5 ) 2 b 2 − Nxe 2
− Nxe 2
− Nxe
∂t ∂y ∂t ∂x ∂x ∂x 2
(1)
∂ 2 ϕ (1) ∂ 2 wb ∂ 2 ws(1) (1) (1) (1) (1)
− Nye − N ye − N ye − Mmx,x − Mmy,y − Fmz + 2Kw (u3 )
∂y2 ∂y2 ∂y2
 
(1) (1) (1) (1)
+ 2cd (u3 ) − 2Gf α cos2 θ u3,11 + 2cosθ sin θ u3,21 + sin2 θ u3,22
(53)
  
(1) (1) (1) (1) (1)
− 2Gf β sin2 θ u3,11 − 2cosθ sin θ u3,21 + cos2 θ u3,22 + Kw u3 + cd u3 ,

 (1)
(1)
(1)
(1)
∂Qxz ∂Qyz 2 2 ∂ 2 ϕ (1) ∂ 2 wb ∂ 2 ws(1) ∂ 2 ϕ (1)
δϕ : − Pz(1) − + (1 − µ ∇ ) m7 − N xe − N xe − N xe
∂x ∂y ∂t 2 ∂x 2 ∂x 2 ∂x 2
(1) (1)

∂ 2 ws(1) ∂ 2 wb ∂ 2 wb ∂ 2 ws(1) ∂ 2 ϕ (1) (1) (54)
+ m6 + m 6 −N ye − N ye − N ye − Fmz ,
∂t 2 ∂t 2 ∂y2 ∂y2 ∂y2

h

∂Dy(1)
 electric voltage, structure damping, four different distri-
∂Dx(1)

2
(1) ′ (1)
δφ : g(z) + g(z) − g (z)Dz dz. (55) butions of CNTs on phase velocity through in-phase, out-
− h2 ∂x ∂y
of-phase and one micro plate fixed types of wave propaga-
In this type like other types members of Lpq is defined in tion. Moreover, the effect of in-phase, out-of-phase and one
“Appendix 3”. micro plate fixed types are considered on cut-off and scape
frequencies.
Since, there is not any article which is similar to this
4 Result and discussion study; its validation is not possible. However, In order to
validate the results of this study, some parameters such as
In this section, wave propagation in coupled FG-CNTRPC electro-magnetic field, viscoelastic foundation, structural
micro plates surrounded by visco-Pasternak foundation damping and coupled system are eliminated and results
subjected to electro-magnetic field is considered. The goal are compared with those of Wang et al. (2010). The results
of this work is analyzing phase velocity in coupled system are illustrated in Fig. 3 in which frequency versus wave
for in-phase, out-of-phase and one micro plate fixed types. number is depicted for different nonlocal parameters. With
Therefore, in this study the effects of 2D magnetic field, respect to Fig. 3, two analyses have acceptable matching.

13
Microsyst Technol

Fig. 3  Comparison of fre- x 10
13

quency versus wave number for 2.5

different nonlocal parameters
Wang et al. e 0 a= 0
Present e 0 a= 0
2
Wang et al. e 0 a= 1 nm
Present e 0 a= 1 nm
1.5 Wang et al. e 0 a= 2 nm

Frequency, ω
Present e 0 a= 2 nm

0.5

0
0 1 2 3 4 5 6
Wave number, k1 x 10
9

Structural properties of PVDF and CNTs are (Alibeigloo Figure  4 portrays the effect of the different types of
2013; Ghorbanpour Arani et al. 2012) wave propagation on phase velocity in terms of wave
  number. This figure shows phase velocity of in-phase
E PVDF = 8.3(GPa), ρ PVDF = 1780 Kg/m3 , type is less than out-off-phase and one micro plate fixed
  types; because, in this type the effect of springs and damp-
υ PVDF = 0.34, e31 = −0.13 C/m2 , ers between the two plates are absent so phase velocity
decreases. It is apparent the effect of different types of
wave propagation is remarkable in low amount of wave
   
e15 = −0.009 C/m2 , e24 = −0.276 C/m2 ,
    number. Moreover, the figure shows by increasing wave
e32 = −0.145 C/m2 , e33 = −0.28 C/m2 , number, phase velocity comes down.
The effect of damping coefficient of structure on phase
∈11 = 1.1068 × 10−8 (F/m), ∈22 = 1.0607 × 10−8 (F/m), velocity versus wave number is illustrated in Fig. 5a–c.
This figure depicts by increasing the amount of damping
∈33 = 1.0607 × 10−8 (F/m), cnt
ν12 = 0.175 coefficient of structure, phase velocity decreases; the rea-
son is that by considering structural damping coefficient, a
ρ cnt = 1400 kg/m3 , cnt
E12 = 5.6466 (TPa), resistant force is applied to system and energy of system
cnt
= 7.0800(TPa), Gcnt comes down, therefore, phase velocity decreases subse-
E22 12 = 1.9445 (TPa)
quently. By comparing Fig. 5a–c, it is obvious in type of
Moreover, the CNT efficiency parameters for different in-phase phase velocity is less than to others types of wave
volume fractions are defined as (Zhu et al., 2012) propagation.
∗ The variation of phase velocity versus wave number
VCNT = 0.11 : η1 = 0.149, η2 = η3 = 0.934
based on diverse amount of voltage is demonstrated in
∗ Fig. 6a–c. The effect of voltage is conspicuous on varia-
VCNT = 0.14 : η1 = 0.150, η2 = η3 = 0.941
tion of phase velocity. While negative voltage has posi-
∗ tive effect on behavior of system, positive voltage has
VCNT = 0.17 : η1 = 0.149, η2 = η3 = 1.381
destructive effect; because, positive and negative volt-
Meanwhile, dimensionless parameters are considered as ages impose compressive and tensile force to system,
follow for drawing figure in this part ḡ = 0.1, HX = 1e − 2, respectively. According to before definition, in-phase
HY = 3e − 2, V0 = 1e − 2, K2 = 1.5, KW = 2e − 3, type has less effect on phase velocity in comparing oth-
GF1 = GF2 = 3e − 2, Cd = 1e − 2 ers types.

13

Fig. 4  Effect of the different
types of wave propagation in
coupled system on dimension-
less phase velocity in terms of
the dimensionless wave number
Dimensionless velocity, V
In order to detect the effect of magnetic field on phase
velocity in system, magnetic field is imposes in two direc-
tions to system. Figures 7a–c and 8a–c are considering the
effect of magnetic field on phase velocity in terms of wave
number. Figures illustrate that imposing magnetic field to
system, improve behavior of it thus, magnetic field can be
applied to control the system. According to these figures,
magnetic field along x direction (Hx) has remarkable effect
in high amount of wave number, while magnetic field along
y direction (Hy) has considerable effect in low amount of
wave number. Moreover, figures show that Hx has more
effect on phase velocity in system than Hy.By looking
figures, this is transparent that in out-of-phase type phase
velocity is more than other types.
One of the most important significant goals of this paper
is probing the effect of FG and different types of it on sys-
tem. Therefore, in Fig. 9a–c the effect of the distribution of
CNTs on phase velocity versus wave number is considered.
Figures demonstrate FG − X has the most effect on phase
velocity in system, while FG − A has the least effect. Thus,
it is founded out that if the distribution of CNTs be more
near to neutral line, phase velocity will be more. Figures
illustrate that the range 100 K1 101 of wave number, is the
sensitive range for effect of different distribution of CNTs.
According to these figures, it is apparent that in- phase type
has less effect on phase velocity than other types (out-of-
phase and one micro plate fixed).
One of the important topics explored in wave propaga-
tion, is studying cut-off and escape frequency of system.
Cut-off and escape frequency are calculated for K → 0
and K → ∞, respectively. Figures 10 and 11 depict
13
Microsyst Technol
2
1.8 Out-of-phase
One microplate fixed
1.6
In-phase
1.4
1.2
0.8
0.6
0.4
0.2
0
-1 0 1 2 3
10 10 10 10 10
Dimensionless wave number, K1
dimensionless cut-off and escape frequency in terms of
dimensionless length based on different types of wave prop-
agation (in-phase, out-off-phase and one micro plate fixed),
respectively. It can be understood that the effect of out-of-
phase is more than in-phase and one micro plate fixed types.
5 Conclusion
In-phase, out-of-phase and one micro plate fixed types of
wave propagation in double bounded visco-elastically FG-
CNTRPC micro plate has been investigated within the
context of nonlocal piezoelasticity theory, rule of mixture,
Kelvin–Voigt model and quasi-3D SSDT. Four different
type of CNT distributions were taken into account in this
paper. Hamilton’s principal is employed to establish the
motion equation and then they were solved by utilizing the
analytical approach. Detailed parameters such as different
types of wave propagation, structure damping, applied volt-
age, magnetic field and different types of FG distributions
of CNTs were discussed on the wave propagation behav-
ior of the system. The significant conclusion is that the
out-of-phase and in-phase have maximum and minimum
phase velocity in micro plates, respectively. Results indi-
cated that with increasing structural damping coefficient
the dimensionless phase velocity in the viscoelastic micro
plates decreases. Moreover, phase velocity becomes maxi-
mum in negative voltage and is minimum when the volt-
age is positive. Also, magnetic field can change the stiff-
ness of system. It is hoped that the influence of explained
parameters have a heading roles in behaviors of coupled
Microsyst Technol

Fig. 5  Effect of the damp- a 0.35

ing coefficient of structure on
dimensionless phase velocity g-= 0
0.3
versus the dimensionless wave g-= 0.4
number. a Out-of-phase. b One
g-= 0.8
micro plate fixed. c In-phase 0.25

Dimensionless velocity
g-= 1.2
0.2

0.15
Out-of-phase
0.1

0.05

0
0 1 2 3
10 10 10 10
Dimensionless Wave Number (k1)
b 0.35

0.3 g-= 0
g-= 0.4
Dimensionless velocity, V

0.25 g-= 0.8

g-= 1.2
0.2

0.15
One micro plate fixed
0.1

0.05

0
0 1 2 3
10 10 10 10
Dimensionless wave number, K 1
c 0.35
g-= 0
0.3
g-= 0.4
g-= 0.8
Dimensionless velocity, V

0.25
g-= 1.2
0.2

In-phase
0.15

0.1

0.05

0
0 1 2 3
10 10 10 10
Dimensionless wave number, K 1

13
 Microsyst Technol

Fig. 6  Variation of the dimen- a 0.35

sionless phase velocity by
considering dimensionless wave V0 = -2e-2
0.3
number for different external V0 = 0
voltages. a Out-of-phase. b One
micro plate fixed. c In-phase V0 = 2e-2
0.25

Dimensionless velocity, V
0.2

0.15
Out-of-phase
0.1

0.05

0
0 1 2 3
10 10 10 10
Dimensionless wave number, K1

b 0.35

0.3 V0 = -2e-2
V0 =0
Dimensionless velocity, V

0.25
V0 = 2e-2

0.2

0.15
One micro plate fixed
0.1

0.05

0
0 1 2 3
10 10 10 10
Dimensionless wave number, K1
c 0.35

V0 = -2e-2
0.3
V0 = 0
0.25 V0 = 2e-2
Dimensionless velocity, V

0.2

0.15 In-phase

0.1

0.05

0
0 1 2 3
10 10 10 10
Dimensionless wave number, K1

13
Microsyst Technol

Fig. 7  Dimensionless phase a 0.35

velocity versus dimension- HX= 3.31e-2
less wave number for different
0.3 HX= 2.31e-2
values of the magnetic field
along x-direction. a Out-of- HX= 1.31e-2

Dimensionless velocity, V
phase. b One micro plate fixed. 0.25 H X= 0
c In-phase
0.2

Out-of-Phase
0.15

0.1

0.05

0
0 1 2 3
10 10 10 10
Dimensionless wave number, K 1
b 0.35
HX= 3.31e-2
0.3 HX= 2.31e-2
HX= 1.31e-2
Dimensionless velocity, V

0.25
H X= 0

0.2

One micro plate fixed

0.15

0.1

0.05

0
0 1 2 3
10 10 10 10
Dimensionless wave number, K1
c 0.35
HX= 3.31e-2
0.3 HX= 2.31e-2
HX= 1.31e-2
Dimensionless velocity, V

0.25
H X= 0

0.2
In-Phase

0.15

0.1

0.05

0
0 1 2 3
10 10 10 10
Dimensionless wave number, K1

13
 Microsyst Technol

Fig. 8  Dimensionless phase a 2.5

velocity versus dimension-
less wave number for different HY= 3.31e-2
values of the magnetic field HY= 2.31e-2
along y-direction. a Out-of- 2

Dimensionless velocity, V
phase. b One micro plate fixed. HY= 1.31e-2
c In-phase H Y= 0
1.5

1
Out-of-Phase

0.5

0
-1 0 1 2 3
10 10 10 10 10
Dimensionless wave number, K1
b 2.5
HY= 3.31e-2
HY= 2.31e-2
2
HY= 1.31e-2
Dimensionless velocity, V

H Y= 0
1.5

1 One micro plate fixed

0.5

0
-1 0 1 2 3
10 10 10 10 10
Dimensionless wave number, K 1
c 2

1.8 HY= 3.31e-2

1.6 HY= 2.31e-2

HY= 1.31e-2
1.4
Dimensionless velocity, V

H Y= 0
1.2

0.8
In-Phase
0.6

0.4

0.2

0
-1 0 1 2 3
10 10 10 10 10
Dimensionless wave number, K 1

13
Microsyst Technol

Fig. 9  Effect of the distribu- a 0.35

tion of CNTs on dimension-
less phase velocity versus the FG - X
0.3 FG - UD
dimensionless wave number. a
Out-of-phase. b One micro plate FG - A
fixed. c In-phase 0.25 FG - O

Dimensionless velocity, V
0.2

0.15
Out-of-phase
0.1

0.05

0
0 1 2 3
10 10 10 10
Dimensionless wave number, K 1
b 0.35

FG - X
0.3
FG - UD
FG - A
0.25
Dimensionless velocity, V

FG - O

0.2

0.15
One micro plate fixed
0.1

0.05

0
0 1 2 3
10 10 10 10
Dimensionless wave number, K 1
c
0.35

FG - X
0.3
FG - UD
FG - A
0.25
Dimensionless velocity, V

FG - O

0.2

0.15
In-phase
0.1

0.05

0
0 1 2 3
10 10 10 10
Dimensionless wave number, K 1

13
 Microsyst Technol

Fig. 10  Dimensionless cut-off 2
frequency versus dimension- Out-of-phase
less length for different types 1.8
of wave propagation in coupled One microplate fixed

Dimensionless cut-off frequency, Ω

system 1.6 In-phase

1.4

1.2

0.8

0.6

0.4

0.2

0
0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1
Dimensionless length, a

Fig. 11  Dimensionless escape 45
frequency versus dimension-
less length for different types 40 Out-of-phase
of wave propagation in coupled One microplate fixed
system
Dimensionless escape frequency, Ω

35 In-phase

30

25

20

15

10

0
0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1
Dimensionless length, a

visco-elastically FG-CNTRPC micro plates. The results
presented in this paper would be helpful in design and man-
ufacturing of sensor and composite systems based on smart
control and nano/micro-mechanical systems.
Acknowledgements The authors would like to thank the reviewers
for their comments and suggestions to improve the clarity of this arti-
cle. This work was supported by University of Kashan [Grant Number
574600/15].

13
Microsyst Technol

Appendix 1 ∂ 2 Mx ∂ 2 My ∂ 2 Mxy ∂ 2 Sx ∂ 2 Sy ∂ 2 Sxy

δws : − 2
− 2
−2 + 2
+ 2
+2
∂x ∂y ∂y∂x ∂x ∂y ∂y∂x
∂Qxz ∂Qyz

∂ 2w ∂ 4 wb
b
− − + (1 − µ2 ∇ 2 ) m0 2 + (m2 + m5 ) 2 2
∂Nxy ∂ 2u ∂ 3 wb

∂Nx 2 2 ∂x ∂y ∂t ∂x ∂t
δu : − − + (1 − µ ∇ ) m0 2 − m1
∂x ∂y ∂t ∂x∂t 2 ∂ 4 ws ∂ 3u ∂2ϕ
+ (m4 − m2 + 2m5 ) 2 2
+ (m1 + m3 ) 2
+ m6 2
3
∂ ws
 ∂x ∂t ∂x∂t ∂t
+ (m3 − m1 ) − Fmx , (56) ∂ 4 ws ∂ 3v ∂ 2 ws
∂x∂t 2 + (m4 − m2 + 2m5 ) 2 2 + (m1 + m3 ) + m0 2
∂y ∂t ∂y∂t 2 ∂t
∂ 2 wb ∂2ϕ ∂2ϕ ∂ 4 wb
− Nxe − Nye 2 − Nxe 2 + (m2 + m5 ) 2 2
∂Ny ∂Nxy ∂ 2v ∂ 3 wb

∂x 2 ∂y ∂x ∂y ∂t
δv : − − + (1 − µ2 ∇ 2 ) m0 2 − m1
∂y∂t 2 ∂ 2 ws ∂ 2 wb ∂ 2 ws

∂y ∂x ∂t
−Nxe 2
− Nye 2
− Nye 2 + q − Mmx,x − Mmy,y − Fmz ,
∂ 3 ws
 ∂x ∂y ∂y
+ (m3 − m1 ) − Fmy , (57) (59)
∂y∂t 2
∂Qyz ∂ 2ϕ

∂Qxz
δϕ : Pz − − + (1 − µ2 ∇ 2 ) m7 2
∂ 2 Mx ∂ 2 My ∂ 2 Mxy ∂ 3u ∂x ∂y ∂t

2 2
δwb : − − − 2 + (1 − µ ∇ ) m1
∂x 2 ∂y 2 ∂y∂x ∂x∂t 2 ∂ 2 wb ∂ 2 ws ∂ 2ϕ
− Nxe − N xe − N xe
∂ 3v ∂ 2 wb ∂ 2ϕ ∂ 4 wb ∂x 2 ∂x 2 ∂x 2
+ m1 + m0 2 + m6 2 − m2 2 2 2 2 2
∂y∂t 2 ∂t ∂t ∂x ∂t ∂ ws ∂ wb ∂ wb
+ m6 2 + m6 2 −Nye 2 (60)
∂ 4 wb ∂ 4 ws ∂ 2 wb ∂ 2ϕ ∂t ∂t ∂y
− m2 2 2
+ (m5 − m2 ) 2 2 − Nxe 2
− Nye 2 2 2 
∂y ∂t ∂x ∂t ∂x ∂y ∂ ws ∂ ϕ
− Nye 2 − Nye 2 − Fmz ,
∂ 4 ws ∂ 2 ws ∂ 2 wb ∂ 2 ws ∂y ∂y
+ (m5 − m2 ) 2 2
+ m0 2 − Nye 2 − Nxe 2
∂y ∂t ∂t ∂y ∂x
∂ 2 ws ∂ 2ϕ

h
∂Dy
  
− Nye 2 − Nxe 2 +q − Mmx,x − Mmy,y − Fmz , 2 ∂Dx ′
∂y ∂x δφ : g(z) + g(z) − g (z)Dz dz. (61)
(58) − h2 ∂x ∂y

Appendix 2

1 φe31 x y h µ
(U, V , Wb , Ws , Φ) = (u, v, wb , ws , ϕ), Θ = , X = , Y = , Lx = , ex = ,
h A110 a b a a

a t A110 hη 1
 = ,τ = , (HX , HY ) = (H 2 , H 2 ), (GF1 , GF2 ) = (Gf α , Gf β ),
b h I10 A110 x y A110

h2 Kw h2 v0 e31 A110
Cd = cd , KW = , V0 = , (ϑ11 , ϑ22 , ϑ33 ) = 2 (ε11 , ε22 , ε33 ), K1 = k1 a,
I10 A110 A110 A110 he31
   
I10 I10 e15 e24 e31 e32 e33
K2 = k2 b, ω = Ωh , V =v , (ζ15 , ζ24 , ζ31 , ζ32 , ζ33 ) = , , , , ,
A110 A110 e31 e31 e31 e31 e31

hHij Oij Kij h2 Lij
 
g A110 Aij Bij Dij
ḡ = , (aij , bij , dij , hij , oij , kij , lij ) = , , 2 , , , , ,
h I10 A110 hA110 h A110 A110 A110 A110 A110
 
m0 m1 m2 m3 m4 m5 m6 m7
(M̄0 , M̄1 , M̄2 , M̄3 , M̄4 , M̄5 , M̄6 , M̄7 ) = , , , , , , , , (62)
I10 I10 h I10 h2 I10 h I10 h2 I10 h2 I10 I10

13
 Microsyst Technol

Appendix 3 2ih66 Lx3 K2 K12

L24 = iM1 Lx Ω 2 K2 + + ib22 Lx3 3 K23
π2
2iḡh66 Lx3 ΩK2 K12
L11 = ḡa66 Lx2 2 ΩK22 + a66 Lx2 2 K22 + ḡa11 Lx2 ΩK12 + 2iḡb66 Lx3 ΩK2 K12 +
π2
+ a11 Lx2 K12 + HY K12 Lx2 + M0 Ω 2 + 2 e2x M0 Ω 2 K22 iḡh12 Lx3 ΩK2 K12
+ − ie2x M3 Lx Ω 2 K2 K12
+ 4 HY K24 Lx2 e2x + 22 HY K12 K22 Lx2 e2x π2
+ 2 HY K22 Lx2 + e2x M0 Ω 2 K12 + HY K14 Lx2 e2x , (63) − iM3 Lx Ω 2 K2 iḡb12 Lx3 ΩK2 K12 + ie2x M1 Lx Ω 2 K2 K12
ih22 Lx3 3 K23
+ + iḡb22 Lx3 3 ΩK23 − i3 e2x M3 Lx Ω 2 K23
L12 = −ḡa66 Lx2 ΩK2 K1 − ḡa12 Lx2 ΩK2 K1 π2
(64) iḡh22 Lx3 3 ΩK23
− a66 Lx2 K2 K1 − a12 Lx2 K2 K1 , + + 2ib66 Lx3 K2 K12 + i3 e2x M1 Lx Ω 2 K23
π2
ih12 Lx3 K2 K12
+ + ib12 Lx3 K2 K12 , (72)
L13 = −2ib66 Lx3 2 K22 K1 − ib12 Lx3 2 K22 K1 − iḡb11 Lx3 ΩK13 π2

− iK13 Lx3 b11 − 2iḡb66 Lx3 2 ΩK22 K1 − iM1 Lx Ω 2 K1 L25 = iḡh23 Lx ΩK2 + ih23 Lx K2 , (73)
− i2 e2x M1 Lx Ω 2 K22 K1 − ie2x M1 Lx Ω 2 K13
(74)
− iḡb12 Lx3 2 ΩK22 K1 , (65)
L26 = 0,
L31 = ib11 Lx3 K13 + iḡb12 Lx3 2 ΩK22 K1 + 2iḡb66 Lx3 2 ΩK22 K1
ih11 Lx3 K13 ih12 Lx3 2 K22 K1 + iḡb11 Lx3 ΩK13 + 2ib66 Lx3 2 K22 K1 + ie2x M1 Lx Ω 2 K13
L14 = −2ib66 Lx3 2 K22 K1 − −
π2 π2
+ i2 e2x M1 Lx Ω 2 K22 K1 + ib12 Lx3 2 K22 K1 + iM1 Lx Ω 2 K1 ,
+ ie2x M3 Lx Ω 2 K13 − ib11 Lx3 K13 + i2 e2x M3 Lx Ω 2 K22 K1
iḡh11 Lx3 ΩK13 2iḡh66 Lx3 2 ΩK22 K1 (75)
− iḡb11 Lx3 ΩK13 − −
π2 π2
3 2 2 L32 = −iḡb22 Lx3 3 ΩK23 − 2iḡb66 Lx3 ΩK2 K12 − iḡb12 Lx3 ΩK2 K12
2ih66 Lx  K2 K1
− 2iḡb66 Lx3 2 ΩK22 K1 − − iM1 Lx Ω 2 K2 − i3 e2x M1 Lx Ω 2 K23 − ie2x M1 Lx Ω 2 K2 K12
π2
− iḡb12 Lx  ΩK2 K1 − iM1 Lx Ω 2 K1 − ib12 Lx3 2 K22 K1
3 2 2 − 2ib66 Lx3 K2 K12 − ib12 Lx3 K2 K12 − ib22 Lx3 3 K23 ,

+ iM3 Lx Ω 2 K1 − ie2x M1 Lx Ω 2 K13 − i2 e2x M1 Lx Ω 2 K22 K1 (76)

iḡh12 Lx3 2 ΩK22 K1 1 2

− , (66) L33 = 2ḡd12 Lx4 2 ΩK22 K12 + e HY Lx4 K16 − HX Lx2 2 K22
π2 12 x
+ HY Lx2 2 K22 − e2x HY Lx2 K14 + e2x HX Lx2 K14 + d22 Lx4 4 K24
L15 = −iḡh13 Lx ΩK1 − ih13 Lx K1 , (67) + e2x M0 Ω 2 K12 + 4 e2x M2 Lx2 Ω 2 K24 + 24 K24 Lx2 V0 ζ32 e2x
1 1
+ 4 e2x HX Lx4 K24 K12 + 2 e2x HY Lx4 K22 K14
L16 = 0, (68) 6 6
1 4 2 1
+  ex HY Lx K2 K1 + e2x HX Lx4 2 K22 K14
4 4 2
12 12
L21 = −ḡa66 Lx2 ΩK2 K1 − ḡa12 Lx2 ΩK2 K1 − a66 Lx2 K2 K1
1 1
+ 6 e2x HX Lx4 K26 + 4 e2x HY Lx2 K24 + HY Lx4 2 K22 K12
− a12 Lx2 K2 K1 , (69) 12 12
1
− 4 e2x HX Lx2 K24 + HX Lx4 2 K22 K12 + 22 K22 Lx2 V0 ζ32
L22 = ḡa22 Lx2 2 ΩK22 + a22 Lx2 2 K22 + ḡa66 Lx2 ΩK12 12
+ 2K14 Lx2 V0 ζ31 e2x + e2x M2 Lx2 Ω 2 K14
+ a66 Lx2 K12 + M0 Ω 2 + 2 e2x M0 Ω 2 K22
+ 22 K12 K22 Lx2 V0 ζ32 e2x + 4ḡd66 Lx4 2 ΩK22 K12
+ 4 HX K24 Lx2 e2x + 22 HX K12 K22 Lx2 e2x + HX K14 Lx2 e2x
+ 2e2x M2 Lx2 2 Ω 2 K22 K12 + 2 e2x M0 Ω 2 K22 + ḡd11 Lx4 ΩK14
+ HX K12 Lx2 + e2x M0 Ω 2 K12 + 2 HX K22 Lx2 , (70)
+ 2d12 Lx4 2 K22 K12 + 4d66 Lx4 2 K22 K12 + M2 Lx2 Ω 2 K12
1 1
L23 = 2ib66 Lx3 K2 K12 + ib12 Lx3 K2 K12 + iḡb22 Lx3 3 ΩK23 + 2K12 Lx2 V0 ζ31 + HX Lx4 4 K24 + HY Lx4 K14
12 12
+ iḡb12 Lx3 ΩK2 K12 + 2iḡb66 Lx3 ΩK2 K12 − HY Lx2 K12 + ḡd22 Lx4 4 ΩK24 + M2 Lx2 2 Ω 2 K22 + M0 Ω 2
+ ie2x M1 Lx Ω 2 K2 K12 + i3 e2x M1 Lx Ω 2 K23 + d11 Lx4 K14 + HX Lx2 K12 + 22 K12 K22 Lx2 V0 ζ31 e2x
+ iM1 Lx Ω 2 K2 + ib22 Lx3 3 K23 , (71) − Welastic medium , (77)

13
Microsyst Technol

ḡo66 Lx4 2 ΩK22 K12 1 1

L34 = 4 2
+ 2 e2x HY Lx4 K22 K14 + e2x HX Lx4 2 K22 K14
π 6 12
1 4 2 1 4 e2 L 2 K 4 HX
+  ex HY Lx4 K24 K12 + 4 e2x HX Lx4 K24 K12 + 2 x x 2
12 6 π
4 2 2
HX Lx  K2 K1 2 ḡo12 Lx 2 ΩK22 K12
4
4 4 2 2
−2 + d 11 Lx K1 + H X L x K 1 + 2 +
π3 π2
6 e2 HX L 4 K 6 ḡo11 Lx4 ΩK14 o66 Lx4 2 K22 K12
− 2 x 3 x 2 + ḡd22 Lx4 4 ΩK24 + 2
+4
π π π2
4 2 2 2 4 4 2 2 2 4 4 4 2 2
−  ex M5 Lx Ω K2 +  ex M2 Lx Ω K2 + 2 K2 Lx V0 ζ32 ex
2 e2x Lx2 K22 K12 HY 2 e2 HY Lx4 K22 K14 2 e2x Lx2 K22 K12 HX
+2 −4 x 3
+2
π π π
e2x HX Lx4 2 K22 K14 4 e2x HY Lx4 K24 K12
−2 −2 + 22 K12 K22 Lx2 V0 ζ31 e2x
π3 π3
ḡo22 Lx4 4 ΩK24
+ 2e2x M2 Lx2 2 Ω 2 K22 K12 − 2e2x M5 Lx2 2 Ω 2 K22 K12 +
π2
2 2
e L K HY 4 2 2 2
L  K2 HX
+ 2ḡd12 Lx4 2 ΩK22 K12 + 2 x x 1 +2 x − e2x Lx2 K14 HY
π π
e2 HY Lx4 K16 1
−2 x − 4 e2x HX Lx2 K24 + 6 e2x HX Lx4 K26 + 4 e2x HY Lx2 K24 (78)
π3 12
1 1 HY Lx2 K12
+ HY Lx4 2 K22 K12 + e2x HX Lx2 K14 + e2x HY Lx4 K16 + 2
12 12 π
2 2 2 1 4 4 4 2 2 2 2 2
+ HY Lx  K2 + HX Lx  K2 + 2K1 Lx V0 ζ31 + ex M0 Ω K1
12
+ d22 Lx  K2 + 22 K22 Lx2 V0 ζ32 + 2K14 Lx2 V0 ζ31 e2x + e2x M2 Lx2 Ω 2 K14
4 4 4

− e2x M5 Lx2 Ω 2 K14 − M5 Lx2 2 Ω 2 K22 + 2 e2x M0 Ω 2 K22 + 2d12 Lx4 2 K22 K12
o11 Lx4 K14 2 2 HY Lx4 2 K22 K12 1 4 4 HX Lx4 4 K24
+ − H Y Lx K 1 − 2 + H Y L x K1 − 2
π2 π3 12 π3
4 2 4
 e HX Lx K2 K14 2 4 2 2
o12 Lx  K2 K1 2
−4 x +2 + 4ḡd66 Lx4 2 ΩK22 K12
π3 π2
HY Lx4 K14
+ 22 K12 K22 Lx2 V0 ζ32 e2x − M5 Lx2 Ω 2 K12 + M2 Lx2 Ω 2 K12 − 2
π3
1
+ HX Lx4 2 K22 K12 + 4d66 Lx4 2 K22 K12 + M2 Lx2 2 Ω 2 K22 − Lx2 2 K22 HX
12
o22 Lx4 4 K24
+ ḡd11 Lx4 ΩK14 + + M0 Ω 2 − Welastic medium ,
π2

Lx2 K12 HY
L35 = o23 Lx2 2 K22 + e2x M6 Ω 2 K12 + 2K12 Lx2 V0 ζ31 + 2e2x πK12 HX − 2
π
 4 e2 L 2 K 4 H
X
+ 2e2x πK12 HY + ḡo23 Lx2 2 ΩK22 + 24 K24 Lx2 V0 ζ32 e2x − 2 x x 2
π
2L 2 2 K22 HX 2L 2 2 K22 HY
− x + 22 e2x πK22 HY + x + 2 e2x M6 Ω 2 K22 + M6 Ω 2
π π (79)
e2 L 2 K 4 HX e2 L 2 K 4 HY
+2 x x 1 + 22 e2x πK22 HX − 2 x x 1 + 22 K22 Lx2 V0 ζ32
π π
+ ḡo13 Lx2 ΩK12 + 2πHY + 2πHX + 22 K12 K22 Lx2 V0 ζ31 e2x + o13 Lx2 K12
4 e2x Lx2 K24 HY L 2 K 2 HX
+2 +2 x 1 + 2K14 Lx2 V0 ζ31 e2x + 22 K12 K22 Lx2 V0 ζ32 e2x ,
π π

13
 Microsyst Technol

ζ31 Lx2 K12 ζ32 Lx2 2 K22

L36 = 2 +2 , (80)
π π

L41 = −i2 e2x M3 Lx Ω 2 K22 K1 + 2iḡb66 Lx3 2 ΩK22 K1 + i2 e2x M1 Lx Ω 2 K22 K1
2iḡh66 Lx3 2 ΩK22 K1 ih12 Lx3 2 K22 K1
+ ie2x M1 Lx Ω 2 K13 + + ib L 3 3
K
11 x 1 +
π2 π2
2 2 2 2 3 2 2 2 2 2 2
− i ex M3 Lx Ω K2 K1 + 2iḡb66 Lx  ΩK2 K1 + i ex M1 Lx Ω K2 K1
2iḡh66 Lx3 2 ΩK22 K1 ih12 Lx3 2 K22 K1 (81)
+ ie2x M1 Lx Ω 2 K13 + + ib 11 L 3 3
K
x 1 +
π2 π2
2 2 2 3 2 2
+ iM1 Lx Ω K1 + iM1 Lx Ω K1 − iM3 Lx Ω K1 + ib12 Lx  K2 K1
+ ib12 Lx3 2 K22 K1 − iM3 Lx Ω 2 K1 ,

iḡh12 Lx3 ΩK2 K12

L42 = −i3 e2x M1 Lx Ω 2 K23 + ie2x M3 Lx Ω 2 K2 K12 −
π2
ih12 Lx K2 K12
3
− ib12 Lx3 K2 K12 + i3 e2x M3 Lx Ω 2 K23 − + iM3 Lx Ω 2 K2
π2
2ih66 Lx3 K2 K12 ih22 Lx3 3 K23
− 2
− iM1 Lx Ω 2 K2 − ib22 Lx3 3 K23 − (82)
π π2
3
2iḡh66 Lx ΩK2 K1 2
− − ie2x M1 Lx Ω 2 K2 K12 − 2iḡb66 Lx3 ΩK2 K12
π2
iḡh22 Lx3 3 ΩK23
− iḡb12 Lx3 ΩK2 K12 − 2ib66 Lx3 K2 K12 − − iḡb22 Lx3 3 ΩK23 ,
π2
1 1 o11 Lx4 K14
L43 = HY Lx4 K14 + e2x HX Lx4 2 K22 K14 + d22 Lx4 4 K24 +
12 12 π2
1
+ 2K12 Lx2 V0 ζ31 + M2 Lx2 Ω 2 K12 + e2x M0 Ω 2 K12 + e2x HY Lx4 K16
12
1
− HX Lx2 2 K22 + HY Lx2 2 K22 + HX Lx4 4 K24 − e2x HY Lx2 K14
12
ḡo11 Lx4 ΩK14 o66 Lx4 2 K22 K12
+ 2
+4 − M5 Lx2 Ω 2 K12 + e2x HX Lx2 K14
π π2
2o12 Lx4 2 K22 K12
+ ḡd22 Lx4 4 ΩK24 + + 4 e2x M2 Lx2 Ω 2 K24 + e2x M2 Lx2 Ω 2 K14
π2
1 1
+ 24 K24 Lx2 V0 ζ32 e2x + 4 e2x HX Lx4 K24 K12 + 2 e2x HY Lx4 K22 K14
6 6
1 4 2
+  ex HY Lx4 K24 K12 + M2 Lx2 2 Ω 2 K22 − e2x M5 Lx2 Ω 2 K14 + M0 Ω 2
12
(83)
ḡo12 Lx4 2 ΩK22 K12 ḡo66 Lx4 2 ΩK22 K12 o22 Lx4 4 K24
+2 2
+4 2
+ + HX Lx2 K12
π π π2
+ 2K14 Lx2 V0 ζ31 e2x + 22 K22 Lx2 V0 ζ32 + ḡd11 Lx4 ΩK14 + 2d12 Lx4 2 K22 K12
+ 4d66 Lx4 2 K22 K12 + 2 e2x M0 Ω 2 K22 − M5 Lx2 2 Ω 2 K22 − 4 e2x M5 Lx2 Ω 2 K24
− HY Lx2 K12 + d11 Lx4 K14 + 22 K12 K22 Lx2 V0 ζ31 e2x + 22 K12 K22 Lx2 V0 ζ32 e2x
ḡo22 Lx4 4 ΩK24
− 2e2x M5 Lx2 2 Ω 2 K22 K12 + 2e2x M2 Lx2 2 Ω 2 K22 K12 +
π2
1 6 2
+ 4ḡd66 Lx4 2 ΩK22 K12 + 2ḡd12 Lx4 2 ΩK22 K12 +  e HX Lx4 K26
12 x
1 1
+ 4 e2x HY Lx2 K24 + HY Lx4 2 K22 K12 − 4 e2x HX Lx2 K24 + HX Lx4 2 K22 K12
12 12
− Welastic medium ,

13
Microsyst Technol

ḡo11 Lx4 ΩK14 o66 Lx4 2 K22 K12 4 4 4 o12 Lx4 2 K22 K12
L44 = 2 + 8 + ḡd 22 Lx  ΩK 2 + 4
π2 π2 π2
4 2 2
l66 Lx  K2 K1 2 4
ḡl11 Lx ΩK1 4 4 2 2
l12 Lx  K2 K1 2
+4 + +2 + ḡk44 Lx2 2 ΩK22
π4 π4 π4
+ 4 e2x M2 Lx2 Ω 2 K24 − 24 e2x M5 Lx2 Ω 2 K24 + 24 K24 Lx2 V0 ζ32 e2x
1 2 e2 HY Lx4 K22 K14
+ 2 e2x HY Lx4 K22 K14 + 4 e2x M4 Lx2 Ω 2 K24 − 4 x
6 π3
1 1 ḡo12 Lx4 2 ΩK22 K12
+ e2x HX Lx4 2 K22 K14 + 4 e2x HY Lx4 K24 K12 + 4
12 12 π2
ḡo66 Lx4 2 ΩK22 K12 ḡl66 Lx4 2 ΩK22 K12 ḡl12 Lx4 2 ΩK22 K12
+8 2
+4 4
+2
π π π4
4 2 4
 e HX Lx K2 K14 2 4 2 4
 ex HY Lx K2 K1 4 2  ex Lx K2 K12 HY
2 2 2 2
−4 x − 2 + 2
π3 π3 π
2 2 2 2 2
ex Lx  K2 K1 HX ex HX Lx4 2 K22 K14
2
+2 −2 + 22 K12 K22 Lx2 V0 ζ31 e2x
π π3
+ 22 K12 K22 Lx2 V0 ζ32 e2x + 2e2x M2 Lx2 2 Ω 2 K22 K12 − 4e2x M5 Lx2 2 Ω 2 K22 K12
ḡl22 Lx4 4 ΩK24
+ 2e2x M4 Lx2 2 Ω 2 K22 K12 + 2ḡd12 Lx4 2 ΩK22 K12 +
π4
o22 Lx4 4 K24
+ 4ḡd66 Lx4 2 ΩK22 K12 + k55 Lx2 K12 + 4d66 Lx4 2 K22 K12 + 2
π2
 e HX L 4 K 6
6 2
+ ḡk55 Lx2 ΩK12 + 2d12 Lx4 2 K22 K12 + ḡd11 Lx4 ΩK14 − 2 x 3 x 2 (84)
π
HY Lx4 2 K22 K12 4 e2x Lx2 K24 HX 1 4 2
−2 +2 +  ex HX Lx4 K24 K12 + d11 Lx4 K14
π3 π 6
2e2x Lx2 K14 HY 2Lx2 2 K22 HX 2HX Lx4 4 K24 2e2x HY Lx4 K16
+ + − −
π π π3 π3
1 6 2 1
+  ex HX Lx4 K26 + 4 e2x HY Lx2 K24 + HX Lx4 2 K22 K12 − HY Lx2 K12
12 12
1
+ HY Lx  K2 K1 + 2K1 Lx V0 ζ31 ex + 22 K22 Lx2 V0 ζ32 + HX Lx2 K12
4 2 2 2 4 2 2
12
ḡo22 Lx4 4 ΩK24 HX Lx4 2 K22 K12
+2 − 2 − 4 e2x Lx2 K24 HX + k44 Lx2 2 K22
π2 π3
1 HY Lx2 K12 HY Lx4 K14
+ HY Lx4 K14 + 2 −2 + HY Lx2 2 K22 + e2x HX Lx2 K14
12 π π3
1 1
+ HX Lx4 4 K24 + e2x HY Lx4 K16 − e2x Lx2 K14 HY − Lx2 2 K22 HX
12 12
+ 2K12 Lx2 V0 ζ31 − 2M5 Lx2 Ω 2 K12 + M4 Lx2 Ω 2 K12 + M2 Lx2 Ω 2 K12
l11 Lx4 K14 o11 Lx4 K14
+ + 2 + d22 Lx4 4 K24 + M2 Lx2 2 Ω 2 K22 + M4 Lx2 2 Ω 2 K22
π4 π2
+ e2x M2 Lx2 Ω 2 K14 − 2M5 Lx2 2 Ω 2 K22 + e2x M4 Lx2 Ω 2 K14 − 2e2x M5 Lx2 Ω 2 K14
l22 Lx4 4 K24
+ 2 e2x M0 Ω 2 K22 + + M0 Ω 2 + e2x M0 Ω 2 K12 − Welastic medium ,
π4

13
 Microsyst Technol

l13 Lx2 K12

L45 = o23 Lx2 2 K22 + + k44 Lx2 2 K22 + e2x M6 Ω 2 K12 + 2K12 Lx2 V0 ζ31
π2
K 2 L 2 HY K 2 L 2 HX ḡl13 Lx2 ΩK12
+ 2e2x πK12 HX − 2 1 x +2 1 x + 2e2x πK12 HY +
π π π2
 e L 2 K 4 HX
4 2
+ ḡo23 Lx2 2 ΩK22 + ḡk44 Lx2 2 ΩK22 + 24 K24 Lx2 V0 ζ32 e2x − 2 x x 2
π
4 e2x Lx2 K24 HY L 2 2 K 2 H
2 X L 2 2 K 2 H
2 Y
+2 2πHY + 2πHX + M6 Ω 2 − 2 x +2 x
π π π
e2 L 2 K 4 HY e2 L 2 K 4 HX
+ 22 e2x πK22 HX + 22 e2x πK22 HY − 2 x x 1 +2 x x 1
π π
ḡl 23 Lx2 2 ΩK22
+ 2K14 Lx2 V0 ζ31 e2x + k55 Lx2 K12 + 22 K12 K22 Lx2 V0 ζ32 e2x +
π2
l23 Lx  K22
2 2
+ 22 K22 Lx2 V0 ζ32 + 2 e2x M6 Ω 2 K22 + ḡo13 Lx2 ΩK12 + + o13 Lx2 K12
π2
(85)
+ 22 K12 K22 Lx2 V0 ζ31 e2x + ḡk55 Lx2 ΩK12 ,

1 1 ζ31 Lx2 K12 l13 Lx2 K12

L46 = − ζ32 Lx2 2 K22 − ζ24 Lx2 2 K22 + 2 L54 = + k44 Lx2 2 K22 + o23 Lx2 2 K22 + e2x M6 Ω 2 K12
2 2 π π2
ḡζ32 Lx2 2 ΩK22 L 2 K 2 HY
1 1 + 2K12 Lx2 V0 ζ31 + e2x HX Lx2 K14 − e2x HY Lx2 K14 + 2 x 1
+2 − ζ15 Lx2 K12 − ζ31 Lx2 K12 π
π 2 2
− HX Lx2 2 K22 + HY Lx2 2 K22 + ḡk44 Lx2 2 ΩK22
1 1 ζ32 Lx2 2 K22
− ḡζ31 Lx2 ΩK12 − ḡζ15 Lx2 ΩK12 + 2 ḡl13 Lx2 ΩK12
2 2 π + ḡo23 Lx2 2 ΩK22 + + 2 e2x M6 Ω 2 K22
1 1 ḡζ31 Lx2 ΩK12 π2
− ḡζ32 Lx2 2 ΩK22 − ḡζ24 Lx2 2 ΩK22 + 2 , 4 e2x Lx2 K24 HX HX Lx2 2 K22
2 2 π + 24 K24 Lx2 V0 ζ32 e2x + 2 +2
(86) π π
e 2 H L2 K 4
x Y x
+ 4 e2x HY Lx2 K24 + 2 1
− 4 e2x Lx2 K24 HX
π
L51 = ih13 Lx K1 + iḡh13 Lx ΩK1 , (87)
+ 2K14 Lx2 V0 ζ31 e2x + 22 K22 Lx2 V0 ζ32 + ḡk55 Lx2 ΩK12

L52 = −iḡh23 Lx ΩK2 − ih23 Lx K2 , (88) + ḡo13 Lx2 ΩK12 + M6 Ω 2 − Lx2 K12 HY + k55 Lx2 K12
l23 Lx2 2 K22 e2 L 2 2 K22 K12 HX
+ o13 Lx2 K12 + + HX Lx2 K12 + 2 x x
π2 π
L53 = o23 Lx2 2 K22 + ḡo23 Lx2 2 ΩK22 + ḡo13 Lx2 ΩK12
2 e2x Lx2 K22 K12 HY
+ o13 Lx2 K12 + M6 Ω 2 + e2x M6 Ω 2 K12 + 2 e2x M6 Ω 2 K22 +2 + 22 K12 K22 Lx2 V0 ζ32 e2x
π
+ 24 K24 Lx2 V0 ζ32 e2x + 22 K12 K22 Lx2 V0 ζ31 e2x ḡl23 Lx2 2 ΩK22
+ + 22 K12 K22 Lx2 V0 ζ31 e2x , (90)
π2
+ 22 K12 K22 Lx2 V0 ζ32 e2x + 2K14 Lx2 V0 ζ31 e2x
− HY K14 Lx2 e2x + 22 K22 Lx2 V0 ζ32
− 4 HX K24 Lx2 e2x + 4 HY K24 Lx2 e2x
− HY K12 Lx2 + HX K14 Lx2 e2x + 2 HY K22 Lx2
+ 2K12 Lx2 V0 ζ31 + HX K12 Lx2 − 2 HX K22 Lx2 , (89)

13
Microsyst Technol

L55 = k44 Lx2 2 K22 + e2x M7 Ω 2 K12 + 2K12 Lx2 V0 ζ31 + 2e2x πK12 HX + 2e2x πK12 HY
Lx2 K12 HX 4 e2 L 2 K 4 HY
+2 + ḡk44 Lx2 2 ΩK22 + 24 K24 Lx2 V0 ζ32 e2x + 2 x x 2
π π
e 2 L2 K 4 H L 2 2 K 2 H  2 e2 L 2 K 2 K 2 H
X 2 Y x x 2 1 Y
+ 22 e2x πK22 HY + 2 x x 1 +2 x +2
π π π
+ 22 e2x πK22 HX + 2K14 Lx2 V0 ζ31 e2x + 22 K22 Lx2 V0 ζ32 + 2 e2x M7 Ω 2 K22 + l33
+ ḡk55 Lx2 ΩK12 + 2πHX + 2πHY + M7 Ω 2 + ḡl33 Ω + k55 Lx2 K12
e2x Lx2 2 K22 K12 HX (91)
+2 + 22 K12 K22 Lx2 V0 ζ31 e2x + 22 K12 K22 Lx2 V0 ζ32 e2x ,
π

1 1 1
L56 = − ḡζ24 ΩK22 Lx2 2 − ζ24 K22 Lx2 2 − ḡΩπ 2 ζ33
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